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CN206488794U - A kind of high precision electro bridge circuit of resistance strain type sensor - Google Patents

A kind of high precision electro bridge circuit of resistance strain type sensor Download PDF

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CN206488794U
CN206488794U CN201720184408.8U CN201720184408U CN206488794U CN 206488794 U CN206488794 U CN 206488794U CN 201720184408 U CN201720184408 U CN 201720184408U CN 206488794 U CN206488794 U CN 206488794U
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power supply
analog
bridge
resistance strain
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潘丰
黄继炜
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Jiangnan University
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Abstract

本实用新型属于过程检测领域,具体涉及一种电阻应变式传感器的高精度电桥电路。电路由单臂电桥、四个仪用放大器G1、G2、G3和G4、直流电源US和VCC及限流电阻R0、模数转化器ADC、二个模拟多路选择器C1和C2、处理器MCU组成。G1的输入电压为电桥不平衡输出电压,G2的输入电压为电阻R4两端的电压差,G3的输入电压为电阻R2两端的电压差,G4的输入电压为电桥两端的电压差。处理器MCU通过控制CTL信号选择一组信号进行模数转换,将比率作为测量结果的输出值N,N与传感器电阻变化ΔR成线性关系,并能消除温度的影响。本实用新型电路具有很高的准确度。

The utility model belongs to the field of process detection, in particular to a high-precision electric bridge circuit of a resistance strain sensor. The circuit consists of a single-arm bridge, four instrumentation amplifiers G1, G2, G3 and G4, DC power supplies U S and V CC and current limiting resistor R 0 , analog-to-digital converter ADC, and two analog multiplexers C1 and C2 , Processor MCU composition. The input voltage of G1 is the unbalanced output voltage of the bridge, the input voltage of G2 is the voltage difference between the two ends of the resistor R4, the input voltage of G3 is the voltage difference between the two ends of the resistor R2, and the input voltage of G4 is the voltage difference between the two ends of the bridge. The processor MCU selects a group of signals for analog-to-digital conversion by controlling the CTL signal, and uses the ratio as the output value N of the measurement result. N has a linear relationship with the sensor resistance change ΔR, and can eliminate the influence of temperature. The circuit of the utility model has high accuracy.

Description

一种电阻应变式传感器的高精度电桥电路A High Precision Bridge Circuit for Resistance Strain Sensor

技术领域technical field

本实用新型涉及过程检测领域,特别是涉及一种电阻应变式传感器的高精度电桥电路。The utility model relates to the field of process detection, in particular to a high-precision electric bridge circuit of a resistance strain sensor.

背景技术Background technique

电阻应变式传感器在压力、位移、应变量和加速度等非电量测量中占有重要地位,具有结构简单、性能稳定、灵敏度高等优点,有的还适合于动态测量。然而,电阻应变式存在一个缺点,那就是其电阻值及灵敏度随温度的变化而变化。电阻应变式传感器因环境温度变化产生的电阻变化和因应变产生的电阻变化几乎有相同的数量级。压阻式传感器采用的是半导体材料,半导体材料对温度很敏感。所以使用电阻应变式和压阻式传感器在进行测量时必须考虑温度补偿,否则会有很大的误差。Resistance strain sensors play an important role in non-electrical measurements such as pressure, displacement, strain, and acceleration. They have the advantages of simple structure, stable performance, and high sensitivity, and some are also suitable for dynamic measurements. However, there is a disadvantage of the resistance strain type, that is, its resistance value and sensitivity change with temperature. The resistance change of the resistance strain sensor due to the change of the ambient temperature and the resistance change due to the strain have almost the same order of magnitude. Piezoresistive sensors use semiconductor materials, which are sensitive to temperature. Therefore, temperature compensation must be considered when using resistance strain type and piezoresistive sensors for measurement, otherwise there will be a large error.

另外,在使用电阻应变式和压阻式传感器进行测量时,为了使系统的输出线性化、提高系统的灵敏度和温度补偿,通常采用全桥电路。全桥电路要求四个传感器的电阻变化系数和温度系数尽量做到完全一致;要求其中两个传感器受压,另外两个传感器受拉,拉压程度和拉压方向尽量一致。这对传感器的制造工艺和安装条件有很高的要求In addition, when using resistance strain type and piezoresistive sensors for measurement, in order to linearize the output of the system, improve the sensitivity and temperature compensation of the system, a full bridge circuit is usually used. The full-bridge circuit requires that the resistance change coefficients and temperature coefficients of the four sensors be as completely consistent as possible; two of the sensors are required to be under pressure, and the other two are under tension, and the degree and direction of tension and compression are as consistent as possible. This has high requirements on the manufacturing process and installation conditions of the sensor

因此,为了减少传感器制造工艺存在的差异对系统测量结果的影响和减轻对传感器在测量系统上安装条件的要求,同时也能消除环境温度变化的影响,本实用新型,提出一种基于比率法的电阻应变式传感器的高精度电桥电路,该电路只采用了两个电阻应变式传感器,且只有一个电阻应变式传感器受到力的作用,减少了传感器的成本,减轻了对传感器安装条件的依赖和传感器制造工艺的要求;且能够达到全桥电路线性化的效果。Therefore, in order to reduce the influence of the differences in the sensor manufacturing process on the system measurement results and reduce the requirements for the installation conditions of the sensor on the measurement system, and at the same time eliminate the influence of ambient temperature changes, the utility model proposes a method based on the ratio method. The high-precision bridge circuit of the resistance strain sensor, the circuit only uses two resistance strain sensors, and only one resistance strain sensor is subjected to force, which reduces the cost of the sensor and reduces the dependence on the sensor installation conditions and The requirements of the sensor manufacturing process; and the effect of linearization of the full bridge circuit can be achieved.

实用新型内容Utility model content

本实用新型所采用的技术方案是:The technical scheme adopted in the utility model is:

一种电阻应变式传感器的高精度电桥电路由单臂电桥、四个仪用放大器G1、G2、G3和G4、直流电源US和VCC及限流电阻R0、模数转化器ADC、二个模拟多路选择器C1和C2、处理器MCU组成;A high-precision bridge circuit for resistance strain sensors consists of a single-arm bridge, four instrumentation amplifiers G1, G2, G3 and G4, DC power supplies U S and V CC , current limiting resistor R 0 , and an analog-to-digital converter ADC , two analog multiplexers C1 and C2, and a processor MCU;

单臂电桥的四个桥臂由二个阻值分别为R2、R4的高精度电阻和二个阻值为R1、R3的相同的电阻应变式传感器组成;R1为测量压力的电阻应变式传感器,R3为系统温度补偿的电阻应变式传感器;The four bridge arms of the single-arm bridge are composed of two high-precision resistors with resistance values R 2 and R 4 respectively and two identical resistance strain sensors with resistance values R 1 and R 3 ; R 1 is for measuring pressure The resistance strain sensor of R 3 is the resistance strain sensor of system temperature compensation;

电桥供电直流电源US经过限流电阻R0分压以后为电桥的供电电压U;电桥的供电电压U正端串接电阻高精度R2和电阻应变式传感器R1后接到直流电源US负端,仪用放大器G1和仪用放大器G3的同相端接在这二个电阻的中间;供电电压U正端串接高精度电阻R4和电阻应变式传感器R3后接到直流电源US负端,仪用放大器G1和仪用放大器G2的反相端接在这二个电阻的中间;仪用放大器G2的同相端、仪用放大器G3的反相端和仪用放大器G4的反相端接电桥的供电电压U正端,仪用放大器G4的同相端接到直流电源US负端;The DC power supply U S of the bridge power supply is the power supply voltage U of the bridge after being divided by the current - limiting resistor R0 ; The negative terminal of the power supply U S , the in-phase terminals of the instrumentation amplifier G1 and the instrumentation amplifier G3 are connected in the middle of the two resistors; the positive terminal of the power supply voltage U is connected in series with a high - precision resistor R4 and a resistance strain sensor R3 , and then connected to the DC The negative terminal of the power supply U S , the inverting terminal of the instrumentation amplifier G1 and the inverting terminal of the instrumentation amplifier G2 are connected in the middle of the two resistors; the non-inverting terminal of the instrumentation amplifier G2, the inverting terminal of the instrumentation amplifier G3 and the The inverting terminal is connected to the positive terminal of the power supply voltage U of the bridge, and the non-inverting terminal of the instrument amplifier G4 is connected to the negative terminal of the DC power supply U S ;

仪用放大器G1的输出端接到模拟多路选择器C1的CH1道道,仪用放大器G2的输出端接到模拟多路选择器C1的CH2道道;仪用放大器G3的输出端接到模拟多路选择器C2的CH1道道,仪用放大器G4的输出端接到模拟多路选择器C2的CH2道道;The output terminal of the instrument amplifier G1 is connected to the CH1 channel of the analog multiplexer C1, the output terminal of the instrument amplifier G2 is connected to the CH2 channel of the analog multiplexer C1; the output terminal of the instrument amplifier G3 is connected to the analog multiplexer The CH1 channel of the selector C2, the output terminal of the instrument amplifier G4 is connected to the CH2 channel of the analog multiplexer C2;

模拟多路选择器C1的输出端OUT接到模数转化器ADC的AIN+输入端,模拟多路选择器C2的输出端OUT接到模数转化器ADC的REF IN+参考输入端,模数转化器ADC的AIN-端、REFIN-端和GND端接到直流电源US负端,模数转化器ADC的电源端VCC接直流电源VCCThe output terminal OUT of the analog multiplexer C1 is connected to the AIN+ input terminal of the analog-to-digital converter ADC, the output terminal OUT of the analog multiplexer C2 is connected to the REF IN+ reference input terminal of the analog-to-digital converter ADC, and the analog-to-digital converter The AIN-end, REFIN-end and GND end of the ADC are connected to the negative terminal of the DC power supply U S , and the power supply terminal VCC of the analog-to-digital converter ADC is connected to the DC power supply VCC ;

处理器MCU的电源端VCC接直流电源VCC,片选信号CTL接到模拟多路选择器C1和C2的CTL端,处理器MCU的GND端接到直流电源US负端。The power supply terminal VCC of the processor MCU is connected to the DC power supply V CC , the chip select signal CTL is connected to the CTL terminals of the analog multiplexers C1 and C2, and the GND terminal of the processor MCU is connected to the negative terminal of the DC power supply U S .

工作过程是:仪用放大器G1的输入电压U01为电桥不平衡输出电压,仪用放大器G2的输入电压U02为电阻R4两端的电压差,仪用放大器G3的输入电压U03为电阻R2两端的电压差,仪用放大器G4的输入电压U04为电桥两端的电压差。经过模拟多路选择器后,U01和U03作为一组模数转换信号,U02和U04作为另一组模数转换信号,处理器MCU通过控制CTL信号选择其中一组信号进行模数转换。选择U01和U03时模数转换的结果为N1,选择U02和U04时模数转换的结果为N2。N1和N2转换完成后,处理器MCU进行一次除法运算,将N1和N2的比率作为测量结果的输出值N。The working process is: the input voltage U01 of the instrumentation amplifier G1 is the unbalanced output voltage of the bridge, the input voltage U02 of the instrumentation amplifier G2 is the voltage difference between the two ends of the resistor R4, and the input voltage U03 of the instrumentation amplifier G3 is the resistance The voltage difference at both ends of R 2 , the input voltage U 04 of the instrumentation amplifier G4 is the voltage difference at both ends of the bridge. After passing through the analog multiplexer, U 01 and U 03 are used as a group of analog-to-digital conversion signals, U 02 and U 04 are used as another group of analog-to-digital conversion signals, and the processor MCU selects one of the signals for analog-to-digital conversion by controlling the CTL signal convert. When U 01 and U 03 are selected, the result of analog-to-digital conversion is N 1 , and when U 02 and U 04 are selected, the result of analog-to-digital conversion is N 2 . After the conversion of N 1 and N 2 is completed, the processor MCU performs a division operation, and takes the ratio of N 1 and N 2 as the output value N of the measurement result.

本实用新型的有益技术效果是:N与传感器电阻变化ΔR成线性关系,能够达到全桥电路线性化的效果;N和环境温度变化引起的电阻变化ΔRt无关,能消除温度的影响。系统中采用高准确度仪用放大器,则系统具有很高的准确度,且能够方便调节系统的灵敏度,具有很强的实用价值。The beneficial technical effects of the utility model are: N has a linear relationship with sensor resistance change ΔR, which can achieve the effect of full-bridge circuit linearization; N has nothing to do with resistance change ΔR t caused by ambient temperature changes, and can eliminate the influence of temperature. If a high-accuracy instrumentation amplifier is used in the system, the system has high accuracy and can easily adjust the sensitivity of the system, which has strong practical value.

附图说明Description of drawings

附图1是电阻应变式传感器的高精度电桥电路。Accompanying drawing 1 is the high precision bridge circuit of resistance strain type sensor.

具体实施方式detailed description

下面结合附图对本实用新型装置的具体实施方式做进一步说明。The specific implementation of the device of the present invention will be further described below in conjunction with the accompanying drawings.

附图1中,R1和R3为相同的电阻应变式传感器,R1为测量压力的电阻应变式传感器,R3为系统温度补偿电阻应变式传感器,R2和R4为高准确度电阻。U01为电桥不平衡输出电压,U02为电阻R4两端的电压差,U03为电阻R2两端的电压差,U04为电桥两端的电压差。一般情况下,电桥中电阻应变式传感器R1初始值为R,电阻应变变化量为ΔR,温度变化后电阻的变化量为ΔRt;R2=R3=R4=R,则有:In attached drawing 1, R 1 and R 3 are the same resistance strain sensor, R 1 is the resistance strain sensor for measuring pressure, R 3 is the system temperature compensation resistance strain sensor, R 2 and R 4 are high-accuracy resistance . U01 is the unbalanced output voltage of the bridge, U02 is the voltage difference across the resistor R4 , U03 is the voltage difference across the resistor R2, and U04 is the voltage difference across the bridge. In general, the initial value of resistance strain sensor R 1 in the bridge is R, the variation of resistance strain is ΔR, and the variation of resistance after temperature changes is ΔR t ; R 2 =R 3 =R 4 =R, then:

U04=U (4)U 04 = U (4)

U01和U02分别经过仪用放大器G1和G2放大G1和G2倍后作为模数转化器ADC的模拟输入,U03和U04分别经过仪用放大器G3和G4放大G3和G4倍后作为模数转化器ADC的参考电压。经过模拟多路选择器后,U01和U03作为一组模数转换信号,U02和U04作为另一组模数转换信号,处理器MCU通过控制CTL信号选择其中一组信号进行模数转换。选择U01和U03时模数转换的结果为N1,选择U02和U04时模数转换的结果为N2。设模数转化器ADC的分辨力为n位,可得:U 01 and U 02 are respectively amplified G 1 and G 2 times by instrument amplifiers G1 and G2, and then used as the analog input of the analog-to-digital converter ADC, U 03 and U 04 are respectively amplified by instrument amplifiers G3 and G4 G 3 and G 4 After multiplying, it is used as the reference voltage of the analog-to-digital converter ADC. After passing through the analog multiplexer, U 01 and U 03 are used as a group of analog-to-digital conversion signals, U 02 and U 04 are used as another group of analog-to-digital conversion signals, and the processor MCU selects one of the signals for analog-to-digital conversion by controlling the CTL signal convert. When U 01 and U 03 are selected, the result of analog-to-digital conversion is N 1 , and when U 02 and U 04 are selected, the result of analog-to-digital conversion is N 2 . Assuming the resolution of the analog-to-digital converter ADC is n bits, we can get:

N1和N2转换完成后,处理器MCU进行一次除法运算,将N1和N2的比率作为测量结果的输出值N。After the conversion of N 1 and N 2 is completed, the processor MCU performs a division operation, and takes the ratio of N 1 and N 2 as the output value N of the measurement result.

由式(7)可知,N与传感器电阻变化ΔR成线性关系,说明能够达到全桥电路线性化的效果;N和环境温度变化引起的电阻变化ΔRt无关,说明能消除温度的影响。系统中采用高准确度仪用放大器,则系统具有很高的准确度,且能够方便调节系统的灵敏度,具有很强的实用价值。此外,系统只采用了两个传感器,且只有一个传感器受到力的作用,减少了传感器的成本,减轻了对传感器安装条件的依赖和传感器制造工艺的要求。It can be seen from formula (7) that N has a linear relationship with the sensor resistance change ΔR, indicating that the effect of full-bridge circuit linearization can be achieved; N has nothing to do with the resistance change ΔR t caused by ambient temperature changes, indicating that the influence of temperature can be eliminated. If a high-accuracy instrumentation amplifier is used in the system, the system has high accuracy and can easily adjust the sensitivity of the system, which has strong practical value. In addition, the system only uses two sensors, and only one sensor is subjected to force, which reduces the cost of the sensor, and reduces the dependence on the sensor installation conditions and the sensor manufacturing process requirements.

以上所述的仅是本实用新型的优选实施方式,本实用新型不限于以上实施例。可以理解,本领域技术人员在不脱离本实用新型的精神和构思的前提下直接导出或联想到的其他改进和变化,均应认为包含在本实用新型的保护范围之内。The above are only preferred implementations of the utility model, and the utility model is not limited to the above examples. It can be understood that other improvements and changes directly derived or conceived by those skilled in the art without departing from the spirit and concept of the present utility model shall be considered to be included in the protection scope of the present utility model.

Claims (1)

1.一种电阻应变式传感器的高精度电桥电路,其特征在于,电路由单臂电桥、四个仪用放大器G1、G2、G3和G4、直流电源US和VCC及限流电阻R0、模数转化器ADC、二个模拟多路选择器C1和C2、处理器MCU组成;单臂电桥的四个桥臂由二个阻值分别为R2、R4的高精度电阻和二个阻值为R1、R3的相同的电阻应变式传感器组成;R1测量压力的电阻应变式传感器,R3为系统温度补偿的电阻应变式传感器;电桥供电直流电源US经过限流电阻R0分压以后为电桥的供电电压U;电桥的供电电压U正端串接电阻高精度R2和电阻应变式传感器R1后接到直流电源US负端,仪用放大器G1和仪用放大器G3的同相端接在这二个电阻的中间;供电电压U正端串接高精度电阻R4和电阻应变式传感器R3后接到直流电源US负端,仪用放大器G1和仪用放大器G2的反相端接在这二个电阻的中间;仪用放大器G2的同相端、仪用放大器G3的反相端和仪用放大器G4的反相端接电桥的供电电压U正端,仪用放大器G4的同相端接到直流电源US负端;仪用放大器G1的输出端接到模拟多路选择器C1的CH1道道,仪用放大器G2的输出端接到模拟多路选择器C1的CH2道道;仪用放大器G3的输出端接到模拟多路选择器C2的CH1道道,仪用放大器G4的输出端接到模拟多路选择器C2的CH2道道;模拟多路选择器C1的输出端OUT接到模数转化器ADC的AIN+输入端,模拟多路选择器C2的输出端OUT接到模数转化器ADC的REF IN+参考输入端,模数转化器ADC的AIN-端、REF IN-端和GND端接到直流电源US负端,模数转化器ADC的电源端VCC接直流电源VCC;处理器MCU的电源端VCC接直流电源VCC,片选信号CTL接到模拟多路选择器C1和C2的CTL端,处理器MCU的GND端接到直流电源US负端。1. a high precision electric bridge circuit of resistance strain sensor, it is characterized in that, circuit is made of single-arm electric bridge, four instrumentation amplifiers G1, G2, G3 and G4, DC power supply U S and V CC and current-limiting resistor R 0 , analog-to-digital converter ADC, two analog multiplexers C1 and C2, and processor MCU; the four bridge arms of the single-arm bridge are composed of two high-precision resistors with resistance values R 2 and R 4 respectively It is composed of two same resistance strain sensors with resistance values R 1 and R 3 ; R 1 is a resistance strain sensor for pressure measurement, and R 3 is a resistance strain sensor for system temperature compensation; the bridge power supply DC power supply U S passes through The current-limiting resistor R 0 is divided into the power supply voltage U of the bridge; the positive end of the power supply voltage U of the bridge is connected in series with a high-precision resistor R 2 and a resistance strain sensor R 1 , and then connected to the negative end of the DC power supply U S for instrument use The non-inverting terminals of the amplifier G1 and the instrument amplifier G3 are connected in the middle of the two resistors; the positive terminal of the power supply voltage U is connected in series with the high - precision resistor R4 and the resistance strain sensor R3 , and then connected to the negative terminal of the DC power supply U S. The inverting terminal of the amplifier G1 and the instrument amplifier G2 is connected in the middle of the two resistors; the non-inverting terminal of the instrument amplifier G2, the inverting terminal of the instrument amplifier G3 and the inverting terminal of the instrument amplifier G4 are connected to the power supply of the bridge The positive terminal of the voltage U, the non-inverting terminal of the instrumentation amplifier G4 is connected to the negative terminal of the DC power supply U S ; the output terminal of the instrumentation amplifier G1 is connected to the CH1 channel of the analog multiplexer C1, and the output terminal of the instrumentation amplifier G2 is connected to the analog The CH2 channel of the multiplexer C1; the output terminal of the instrumentation amplifier G3 is connected to the CH1 channel of the analog multiplexer C2, and the output terminal of the instrumentation amplifier G4 is connected to the CH2 channel of the analog multiplexer C2; the analog multiplexer The output terminal OUT of the selector C1 is connected to the AIN+ input terminal of the analog-to-digital converter ADC, the output terminal OUT of the analog multiplexer C2 is connected to the REF IN+ reference input terminal of the analog-to-digital converter ADC, and the AIN of the analog-to-digital converter ADC - terminal, REF IN- terminal and GND terminal are connected to the negative terminal of the DC power supply U S , the power supply terminal VCC of the analog-to-digital converter ADC is connected to the DC power supply V CC ; the power supply terminal VCC of the processor MCU is connected to the DC power supply V CC , and the chip select signal The CTL is connected to the CTL terminals of the analog multiplexers C1 and C2, and the GND terminal of the processor MCU is connected to the negative terminal of the DC power supply US.
CN201720184408.8U 2017-02-28 2017-02-28 A kind of high precision electro bridge circuit of resistance strain type sensor Expired - Fee Related CN206488794U (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110006330A (en) * 2019-04-17 2019-07-12 中国工程物理研究院化工材料研究所 A strain test zeroing circuit for a wide resistance range resistance strain sensor
WO2021022459A1 (en) * 2019-08-05 2021-02-11 深圳市汇顶科技股份有限公司 Detection circuit of bridge sensor, chip and detection system
CN113155159A (en) * 2020-12-30 2021-07-23 南京英锐创电子科技有限公司 Bridge type detector

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110006330A (en) * 2019-04-17 2019-07-12 中国工程物理研究院化工材料研究所 A strain test zeroing circuit for a wide resistance range resistance strain sensor
WO2021022459A1 (en) * 2019-08-05 2021-02-11 深圳市汇顶科技股份有限公司 Detection circuit of bridge sensor, chip and detection system
US11686598B2 (en) 2019-08-05 2023-06-27 Shenzhen GOODIX Technology Co., Ltd. Detection circuit of bridge sensor, chip and detection system
CN113155159A (en) * 2020-12-30 2021-07-23 南京英锐创电子科技有限公司 Bridge type detector
CN113155159B (en) * 2020-12-30 2023-12-08 南京英锐创电子科技有限公司 Bridge detector

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