CN206296548U - Microgap is electrolysed auxiliary laser microfabrication device - Google Patents

Abstract

The utility model provides a micro-gap electrolysis-assisted laser micromachining device, which includes a working box filled with electrolyte, a servo feeding device is arranged above the working box, and a workpiece is installed on the servo feeding device through a clamp. The workpiece is immersed in the electrolyte. One side of the workpiece is equipped with a laser and a focusing system, and the other side is equipped with an electrode. The bottom of the electrode enters the electrolyte, and the top of the electrode is fixed on the liquid inlet. On the joint, the liquid inlet joint is connected to the electrolyte tank through the infusion tube, and the electrode and the workpiece are respectively connected to the negative pole and the positive pole of the electrolysis power supply. The workpiece is fixed by the fixture, and the workpiece only needs to be clamped once to ensure the processing accuracy, and the laser micromachining is performed on the workpiece through the laser and the focusing system, and the micro-gap electrolytic processing is performed on the workpiece through the electrode, electrolyte and electrolytic power supply. Combined, the processing quality and processing efficiency of the workpiece can be improved.

Description

Micro-gap electrolysis assisted laser micromachining device

technical field

The utility model belongs to the technical field of special processing, in particular to a micro-gap electrolysis-assisted laser micro-processing device.

Background technique

Microstructures of metal materials (such as microholes, microgrooves, etc.) are commonly used key components in tiny systems (such as sensors, actuators, complex thin-walled parts). They have high technical requirements for processing precision and quality. In sensors, these microstructures can sense various physical quantities such as rotation angle and position with high sensitivity, and have strong environmental adaptability against shock and vibration; in actuators, they are the key microstructures for precise execution of actions; in In complex thin-walled parts such as fluid-driven pump microstructure radiators, microgrooves are an important method to balance the contradictory relationship between heat dissipation and pressure drop. These critical components determine the service life and reliability of the part.

In recent years, special processing technologies such as laser and electrolysis have been more and more applied to the manufacturing technology of microstructures, but laser processing has problems such as recasting layers and heat-affected zones; electrolytic processing has low efficiency, serious side erosion, and electrolysis products difficulties etc. Therefore, it is necessary to design a better processing method to solve the above problems.

Utility model content

Aiming at the problems existing in the prior art, the utility model provides a micro-gap electrolysis-assisted laser micromachining device which fully combines the advantages of laser processing and electrolytic processing, effectively removes the recast layer produced by laser processing, and greatly improves processing efficiency.

In order to achieve the above object, the utility model adopts the following technical solutions:

A micro-gap electrolysis-assisted laser micromachining device, including a working box filled with electrolyte, a servo feeding device is arranged above the working box, and a workpiece is installed on the servo feeding device through a fixture, and the workpiece is immersed in the In the electrolyte, one side of the workpiece is equipped with a laser and a focusing system, and the other side is equipped with an electrode. The bottom of the electrode enters the electrolyte, and the top of the electrode is fixed on the liquid inlet joint. The liquid inlet joint is connected to the electrolyte tank through the infusion tube, and the electrode and the workpiece are respectively connected to the negative pole and the positive pole of the electrolysis power supply.

Further, the workpiece is located at a thickness of 1 mm to 2 mm below the surface of the electrolyte.

Further, the infusion tube is provided with a filter near the electrolyte tank for filtering the electrolyte.

Further, the infusion tube is also provided with a hydraulic pump and a pressure regulating device, the pressure of the electrolyte in the infusion tube is adjusted by the pressure regulating device, the electrolyte of a certain pressure is continuously provided by the hydraulic pump, and enters the electrodes, forming an electrolyte fluid.

Further, the electrodes are hollow metal tubes with insulated side walls.

Further, the electrolyte is a low-concentration acidic passivation electrolyte.

Further, the laser is a millisecond pulsed laser.

Further, a liquid outlet pipe is provided at the lower part of the working box, and the liquid outlet pipe is connected to the working box and the electrolyte tank.

The beneficial effects of the utility model:

The utility model micro-gap electrolysis-assisted laser micromachining device fully combines the advantages of laser processing and electrolytic processing, effectively removes the recast layer produced by laser processing, and greatly improves the processing efficiency. No need to replace the electrode, realize one-time clamping from hole processing to final forming, improve microstructure forming, increase structural strength, and then significantly improve and improve the quality of micromachining, which is extremely important in the processing and manufacturing of key parts in the fields of aviation and aerospace Significance and engineering application prospects.

Description of drawings

Fig. 1 is the structural representation of the utility model micro-gap electrolysis-assisted laser micromachining device;

In the figure, 1—workpiece, 2—electrolyte, 3—working table, 4—working box, 5—fixture, 6—laser and focusing system, 7—servo feeding device, 8—liquid inlet joint, 9—electrode, 10—electrolysis power supply, 11—pressure regulating device, 12—hydraulic pump, 13—filter, 14—transfusion tube, 15—electrolyte tank, 16—liquid outlet pipe.

detailed description

The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. example. Based on the embodiments of the present utility model, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the scope of protection of the present utility model.

The utility model provides a micro-gap electrolysis-assisted laser micromachining device, which includes a work box 4 containing an electrolyte 2, the work box 4 is installed on the workbench 3, and a servo feed device 7 is arranged on the top of the work box 4. The feed device 7 is equipped with the workpiece 1 through the fixture 5, and the workpiece 1 is immersed in the electrolyte 2 in the working box 4. During processing, the workpiece 1 is located at a thickness of 1 mm to 2 mm below the surface of the electrolyte 2, and the workpiece is driven by the servo feed device 7. 1 moves up and down, left and right, back and forth in the electrolyte solution 2. One side of the workpiece 1 is provided with a laser and a focusing system 6, and the other side of the workpiece 1 is provided with an electrode 9. The electrode 9 is a hollow metal tube with an insulated side wall. The bottom of the electrode 9 enters the electrolyte 2, and the top of the electrode 9 It is fixed on the liquid inlet connector 8, and the liquid inlet connector 8 is connected to the electrolyte tank 15 through the infusion tube 14. The electrode 9 and the workpiece 1 are respectively connected to the negative pole and the positive pole of the electrolysis power supply 10 . The infusion tube 14 is provided with a filter 13 near the electrolyte tank 15 for filtering the electrolyte 2. The infusion tube 14 is also provided with a hydraulic pump 12 and a pressure regulating device 11, and the electrolyte 2 in the infusion tube 14 is adjusted by the pressure regulating device 11. The hydraulic pump 12 continuously provides the electrolyte 2 with a certain pressure, and enters the hollow cavity of the electrode 9 to form an electrolyte fluid, thereby pumping the electrolyte 2 from the electrolyte tank 15 into the working tank 4. The bottom of the work box 4 is provided with a liquid outlet pipe 16, which is connected to the work box 4 and the electrolyte tank 15. During the processing, the electrolyte 2 in the work box 4 enters the electrolyte tank 15 through the liquid outlet pipe 16. , so that the electrolyte 2 can be recycled and reused.

The above-mentioned processing device has a simple structure. The workpiece 1 is fixed by the fixture 5. The workpiece 1 only needs to be clamped once to ensure the processing accuracy. The laser micro-processing is performed on the workpiece 1 through the laser and the focusing system 6. The electrode 9, the electrolyte 2 and the electrolysis power supply 10 Perform micro-gap electrolytic machining on the workpiece, and the combination of the two can improve the processing quality and processing efficiency of the workpiece.

The use process of the above-mentioned micro-gap electrolysis-assisted laser micromachining device includes the following steps:

Step 1: Install the workpiece on the servo feed device through the fixture;

Step 2: immerse the workpiece into the electrolyte in the working box through the servo feeding device, and adjust the position of the workpiece for alignment;

Step 3: within time T1, move the workpiece to the laser processing area through the servo feeding device, turn on the laser, focus the laser on the surface of the workpiece under the electrolyte through the focusing system, and remove the workpiece material;

Step 4: within the time T2, move the workpiece to the electrolytic processing area through the servo feeding device, turn on the electrolytic power supply, remove the recast layer produced by laser processing through micro-gap electrolytic processing, and complete a composite processing cycle T=T1 +T2;

Step 5: According to the processing depth of the metal microstructure (microhole or microgroove), design the number of compound processing cycles and repeat the above steps 3 and 4 until the workpiece is processed.

In the above processing process, there is no need to change the clamping of the parts, and there is no need to replace the tool electrode 9. It realizes one clamping from hole processing to final forming, improves the microstructure forming, provides structural strength, and then significantly improves and improves the quality of microprocessing. In aviation, aerospace, etc. It has extremely important significance and engineering application prospects in the processing and manufacturing of key components in the field. In the present invention, by rationally utilizing the process characteristics of laser processing and electrolytic processing, the two processing technologies are combined to ensure that the workpiece and the electrode are clamped and positioned once, and the tool is set twice (repeated tool setting accuracy: ±5μm). Micro-gap electrolysis-assisted laser micromachining has simple procedures and is easy to guarantee processing quality and precision.

The above embodiments are only used to illustrate the technical solution of the utility model without limitation. Although the utility model has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solution of the utility model can be modified or equivalently replaced , without departing from the purpose and scope of the technical solution, which should be covered by the scope of the claims of the present utility model.

Claims (8)

1. A micro-gap electrolysis-assisted laser micromachining device, characterized in that it comprises: a working box containing electrolyte, a servo feeding device is arranged above the working box, and the servo feeding device is installed with a The workpiece, the workpiece is immersed in the electrolyte, one side of the workpiece is provided with a laser and a focusing system, and the other side is provided with an electrode, the bottom of the electrode enters the electrolyte, and the top of the electrode is fixed On the liquid inlet connector, the liquid inlet connector is connected to the electrolyte tank through the infusion tube, and the electrode and the workpiece are respectively connected to the negative pole and the positive pole of the electrolysis power supply. 2 . The micro-gap electrolysis-assisted laser micromachining device according to claim 1 , wherein the workpiece is located at a thickness of 1 mm to 2 mm below the surface of the electrolyte. 3 . 3. The micro-gap electrolysis-assisted laser micromachining device according to claim 1, characterized in that: the infusion tube is provided with a filter near the electrolyte tank for filtering the electrolyte. 4. The micro-gap electrolysis-assisted laser micromachining device according to claim 1, characterized in that: the infusion tube is also provided with a hydraulic pump and a pressure adjustment device, and the electrolyte in the infusion tube is adjusted by the pressure adjustment device. The hydraulic pump continuously provides electrolyte with a certain pressure and enters the electrodes to form electrolyte fluid. 5 . The micro-gap electrolysis-assisted laser micromachining device according to claim 1 , wherein the electrodes are hollow metal tubes with insulated side walls. 6 . The micro-gap electrolysis-assisted laser micromachining device according to claim 1 , wherein the electrolyte is a low-concentration acidic passivation electrolyte. 7. The micro-gap electrolysis-assisted laser micromachining device according to claim 1, wherein the laser is a millisecond-level pulsed laser. 8. The micro-gap electrolysis-assisted laser micromachining device according to claim 1, characterized in that: the lower part of the working box is provided with a liquid outlet pipe, and the liquid outlet pipe is connected to the working box and the electrolyte box.