CN206279263U - A kind of volume to volume magnetic-controlled sputtering coating equipment of substrate infrared heating - Google Patents
A kind of volume to volume magnetic-controlled sputtering coating equipment of substrate infrared heating Download PDFInfo
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- CN206279263U CN206279263U CN201621474656.8U CN201621474656U CN206279263U CN 206279263 U CN206279263 U CN 206279263U CN 201621474656 U CN201621474656 U CN 201621474656U CN 206279263 U CN206279263 U CN 206279263U
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- 239000000758 substrate Substances 0.000 title claims abstract description 28
- 238000010438 heat treatment Methods 0.000 title claims abstract description 20
- 238000000576 coating method Methods 0.000 title claims abstract description 19
- 238000004544 sputter deposition Methods 0.000 title claims abstract description 15
- 239000011248 coating agent Substances 0.000 title claims abstract description 13
- 239000000463 material Substances 0.000 claims abstract description 35
- 238000002955 isolation Methods 0.000 claims abstract description 14
- 238000005477 sputtering target Methods 0.000 claims abstract description 10
- 238000001816 cooling Methods 0.000 claims description 17
- 239000010408 film Substances 0.000 abstract description 19
- 238000004519 manufacturing process Methods 0.000 abstract description 9
- 239000010409 thin film Substances 0.000 abstract description 4
- 238000001755 magnetron sputter deposition Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 239000012528 membrane Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 230000006641 stabilisation Effects 0.000 description 2
- 238000011105 stabilization Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000005034 decoration Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
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Abstract
The utility model discloses a kind of volume to volume magnetic-controlled sputtering coating equipment of substrate infrared heating, including high-temperature region, low-temperature space, retractable volume system and vacuum system, separated by dividing plate between the high-temperature region and low-temperature space, in the high-temperature region and it is equipped with infrared heater in low-temperature space, oil temperature drum is additionally provided with the high-temperature region, some isolation channels are provided with around the oil temperature drum, some magnetic controlled sputtering targets are provided with the isolation channel, correction detector and correction instrument are additionally provided with the low-temperature space, the correction detector is fixed on the dividing plate, there is base material to pass through in the correction instrument.The utility model provides a kind of volume to volume magnetic-controlled sputtering coating equipment of substrate infrared heating, the continuous prodution of volume to volume plated film is capable of achieving, low production cost, the production time is short, production efficiency is high, good product quality, high yield rate can once complete the plated film of assembly of thin films on base material, the equipment uses circular design simultaneously, floor space is small, simple to operate, it is easy to safeguard.
Description
Technical field
The utility model belongs to technical field of vacuum plating, and in particular to a kind of volume to volume magnetic control of substrate infrared heating splashes
Penetrate filming equipment.
Background technology
Magnetron sputtering is in a vacuum using high-energy particle bombardment target surface, to make to be bombarded the target ion that sputters and be deposited on
On substrate, during sputtering, after gas is ionized, gas ion flies to electrode target in the presence of electric field, and is banged with high-energy
Target surface is hit, target material is sputtered, the target particle for sputtering is deposited on substrate.
Magnetron sputtering technology is current wide variety of vacuum coating technology method, is widely used in optics, micro-
The industrial field such as electronics, wear-resisting, corrosion-resistant, decoration, is used to provide reliable and stabilization thin film coating, can be to be carried by coated product
For the characteristic in terms of certain, but current magnetron sputtering apparatus can only be to single individual plated film, such as glass, drill bit, mobile phone shell
Deng, it is impossible to plated film is carried out to continuous wire rod, this is that do not possess diffraction function due to magnetron sputtering, single target can only be to single flat
Face plated film, lacks multiaspect plated film ability, and, the substrate and film of the product produced using existing magnetron sputtering apparatus are combined
Insecure, crystallinity is poor, and substrate plate electric conductivity is weak, and yield rate is relatively low, therefore, in order to can be by magnetron sputtering technology application
Onto flexible wire, the defect of current flexible wire plated film is solved, it is necessary to be improved to magnetron sputtering apparatus, could be to flexibility
Wire rod carries out the plated film of continuous stabilization.
Utility model content
In view of the shortcomings of the prior art, the utility model provides a kind of volume to volume magnetron sputtering plating of substrate infrared heating
Equipment, the equipment can realize the continuous prodution of volume to volume plated film, and low production cost, the production time is short, and production efficiency is high, can
The plated film of assembly of thin films is once completed on base material, substrate and film are firmly combined with, better crystallinity degree, substrate plate electric conductivity is strong, into
Product rate is high, while the equipment uses circular design, floor space is small, simple to operate, it is easy to safeguard.
To realize utility model purpose, the utility model uses following technical scheme：
A kind of volume to volume magnetic-controlled sputtering coating equipment of substrate infrared heating, including high-temperature region, low-temperature space, retractable volume system
And vacuum system, separated by dividing plate between the high-temperature region and low-temperature space, it is equipped with the high-temperature region and in low-temperature space red
Outer heating device, is additionally provided with oil temperature drum in the high-temperature region, some isolation channels are provided with around the oil temperature drum, and the isolation channel ensures
Mutually pollution will not be produced in coating process, some magnetic controlled sputtering targets are provided with the isolation channel, some magnetic controlled sputtering targets around
Oil temperature drum arrangement, it is ensured that plated film uniformity, is additionally provided with correction detector and correction instrument, the correction detection in the low-temperature space
Device is fixed on the dividing plate, for detecting whether base material wanders off, has base material to pass through in the correction instrument, and the correction instrument is used for
The base material that correction wanders off.
Preferably, the infrared heater has 4, wherein 2 are in high-temperature region, 2 are in low-temperature space in addition, described
Infrared heater is arranged along base material moving direction, it is ensured that to the continuous heating of base material, for remove substrate surface moisture and
The combination of vapor, enhanced film and substrate, improves crystallinity, increases substrate plate electric conductivity, improve product quality.
Preferably, the retractable volume system includes unreeling shaft, guide roller, jockey pulley, pressure roller, chill roll and Scroll, institute
The base material on unreeling shaft is stated by entering high-temperature region, the base in the high-temperature region through dividing plate after guide roller, jockey pulley, guide roller
, by entering low-temperature space through dividing plate after guide roller, pressure roller, oil temperature drum, chill roll, the base material in the low-temperature space is by opening for material
Power roller, guide roller close at Scroll, and the guide roller is used to guide base material and prevent base material from shaking, and the jockey pulley ensures base material
Launch, the pressure roller ensures that base material is fitted in oil temperature drum surface.
Preferably, ultralow temperature cooling tube is provided with the high-temperature region, low-temperature space cooling tube is provided with the low-temperature space, it is described
Oil temperature drum cooling tube is connected with oil temperature drum, the ultralow temperature cooling tube, low-temperature space cooling tube and oil temperature drum cooling tube have cooling
Effect, while also have adsorb vapor effect.
Preferably, the isolation channel is 4, it is ensured that mutually pollution will not be produced in coating process.
Preferably, 2 or 3 magnetic controlled sputtering targets are provided with the isolation channel, had both can guarantee that highest plated membrane efficiency, and energy
Ensure mutually be polluted in coating process.
Preferably, the vacuum system is molecular pump, and inside is in vacuum state when running equipment and does not return oil
Phenomenon.
The beneficial effects of the utility model are：A kind of volume to volume magnetic control of substrate infrared heating that the utility model is provided splashes
Filming equipment is penetrated, the equipment can realize the continuous prodution of volume to volume plated film, low production cost, the production time is short, production efficiency
Height, can once complete the plated film of assembly of thin films on base material, and substrate and film are firmly combined with, better crystallinity degree, and substrate plate is conductive
Property strong, high yield rate, while the equipment uses circular design, floor space is small, simple to operate, it is easy to safeguard.
Brief description of the drawings
Fig. 1 is structural representation of the present utility model；
In figure：1st, high-temperature region；2nd, low-temperature space；3rd, dividing plate；4th, oil temperature drum；5th, isolation channel；6th, magnetic controlled sputtering target；7th, correction is visited
Survey device；8th, unreeling shaft；9th, guide roller；10th, jockey pulley；11st, pressure roller；12nd, Scroll；13rd, base material；14th, low-temperature space cooling tube；
15th, oil temperature drum cooling tube；16th, infrared heater；17th, correction instrument；18th, chill roll；19th, ultralow temperature cooling tube.
Specific embodiment
The utility model is further described by specific embodiment below in conjunction with the accompanying drawings.
As shown in figure 1, a kind of volume to volume magnetic-controlled sputtering coating equipment of substrate infrared heating, including high-temperature region 1, low-temperature space
2nd, retractable volume system and vacuum system, are separated between the high-temperature region 1 and low-temperature space 2 by dividing plate 3, in the high-temperature region 1 and
It is equipped with low-temperature space 2 in infrared heater 16, the high-temperature region 1 and is additionally provided with oil temperature drum 4, if is provided with around the oil temperature drum 4
Dry isolation channel 5, the isolation channel 5 ensures that in coating process mutually pollution will not be produced, and some magnetic controls are provided with the isolation channel 5
Sputtering target 6, some magnetic controlled sputtering targets 6 are arranged around oil temperature drum 4, it is ensured that plated film uniformity, are additionally provided with the low-temperature space 2 and entangled
Inclined detector 7 and correction instrument 17, the correction detector 7 are fixed on the dividing plate 3, for detecting whether base material 13 wanders off,
There is base material 13 to pass through in the correction instrument 17, the correction instrument 17 is used to correct the base material 13 for wandering off, the infrared heater 16
4 are had, wherein 2 are in high-temperature region 1,2 are in low-temperature space 2 in addition, and the infrared heater 16 is moved along base material 13
Direction arranges, it is ensured that to the continuous heating of base material 13, moisture and vapor for removing the surface of base material 13, enhanced film and base
The combination at bottom, improve crystallinity, increase substrate plate electric conductivity, improve product quality, the retractable volume system include unreeling shaft 8,
Guide roller 9, jockey pulley 10, pressure roller 11, chill roll 18 and Scroll 12, base material 13 on the unreeling shaft 8 by guide roller 9,
Enter high-temperature region 1 through dividing plate 3 after jockey pulley 10, guide roller 9, the base material 13 in the high-temperature region 1 passes through guide roller 9, pressure roller
11st, enter low-temperature space 2 through dividing plate 3 after oil temperature drum 4, chill roll 18, base material 13 in the low-temperature space 2 by jockey pulley 10,
Guide roller 9 closes at Scroll 12, and the guide roller 9 is used to guide base material 13 and prevent base material 13 from shaking, and the jockey pulley 10 is true
Protect base material 13 to launch, the pressure roller 11 ensures that base material 13 is fitted in the surface of oil temperature drum 4, the high-temperature region 1 and is provided with ultra-low temperature cold
But pipe 19, low-temperature space cooling tube 14 is provided with the low-temperature space 2, and oil temperature drum cooling tube 15 is connected with the oil temperature drum 4, described super
Sub-cooled pipe 19, low-temperature space cooling tube 14 and oil temperature drum cooling tube 15 have the effect of cooling, while there is absorption vapor
Effect, the isolation channel 5 is 4, it is ensured that mutually pollution will not be produced in coating process, be provided with the isolation channel 52 or
3 magnetic controlled sputtering targets 6, both can guarantee that highest plated membrane efficiency, can guarantee that again and will not mutually pollute in coating process, the vacuum
System is molecular pump, and inside is in vacuum state when running equipment and does not return oily phenomenon.
Specific embodiment of the utility model is the foregoing is only, but architectural feature of the present utility model is not limited to
This, the utility model can be used on similar product, any those skilled in the art in field of the present utility model, institute
The change or modification of work are all covered among the scope of the claims of the present utility model.
Claims (7)
1. a kind of volume to volume magnetic-controlled sputtering coating equipment of substrate infrared heating, including high-temperature region, low-temperature space, retractable volume system and
Vacuum system, is separated between the high-temperature region and low-temperature space by dividing plate, it is characterised in that：In the high-temperature region and in low-temperature space
Be equipped with infrared heater, oil temperature drum be additionally provided with the high-temperature region, be provided with some isolation channels around oil temperature drum, it is described every
Some magnetic controlled sputtering targets are provided with groove, correction detector and correction instrument, the correction detector are additionally provided with the low-temperature space
It is fixed on the dividing plate, has base material to pass through in the correction instrument.
2. the volume to volume magnetic-controlled sputtering coating equipment of substrate infrared heating as claimed in claim 1, it is characterised in that：It is described red
Outer heating device has 4, wherein 2 are in high-temperature region, 2 are in low-temperature space in addition, and the infrared heater is moved along base material
Dynamic direction arrangement.
3. the volume to volume magnetic-controlled sputtering coating equipment of substrate infrared heating as claimed in claim 1, it is characterised in that：The receipts
Unreeling system includes unreeling shaft, guide roller, jockey pulley, pressure roller, chill roll and Scroll, and the base material on the unreeling shaft is by leading
Enter high-temperature region through dividing plate to after roller, jockey pulley, guide roller, the base material in the high-temperature region passes through guide roller, pressure roller, oil temperature
Enter low-temperature space through dividing plate after drum, chill roll, the base material in the low-temperature space closes at Scroll by jockey pulley, guide roller.
4. the volume to volume magnetic-controlled sputtering coating equipment of substrate infrared heating as claimed in claim 1, it is characterised in that：The height
Ultralow temperature cooling tube is provided with warm area, low-temperature space cooling tube is provided with the low-temperature space, it is cold to be connected with oil temperature drum on the oil temperature drum
But manage.
5. the volume to volume magnetic-controlled sputtering coating equipment of substrate infrared heating as claimed in claim 1, it is characterised in that：It is described every
It it is 4 from groove.
6. the volume to volume magnetic-controlled sputtering coating equipment of substrate infrared heating as claimed in claim 1, it is characterised in that：It is described every
2 or 3 magnetic controlled sputtering targets are provided with groove.
7. the volume to volume magnetic-controlled sputtering coating equipment of substrate infrared heating as claimed in claim 1, it is characterised in that：It is described true
Empty set system is molecular pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621474656.8U CN206279263U (en) | 2016-12-30 | 2016-12-30 | A kind of volume to volume magnetic-controlled sputtering coating equipment of substrate infrared heating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621474656.8U CN206279263U (en) | 2016-12-30 | 2016-12-30 | A kind of volume to volume magnetic-controlled sputtering coating equipment of substrate infrared heating |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206279263U true CN206279263U (en) | 2017-06-27 |
Family
ID=59071548
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621474656.8U Active CN206279263U (en) | 2016-12-30 | 2016-12-30 | A kind of volume to volume magnetic-controlled sputtering coating equipment of substrate infrared heating |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206279263U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108550636A (en) * | 2018-06-14 | 2018-09-18 | 浙江尚越新能源开发有限公司 | Flexible solar battery back electrode production equipment |
| CN108649007A (en) * | 2018-06-14 | 2018-10-12 | 浙江尚越新能源开发有限公司 | Flexible solar battery window layer production equipment |
| CN108977791A (en) * | 2018-07-24 | 2018-12-11 | 电子科技大学 | A kind of electric heating device for winding deposition film under high temperature |
-
2016
- 2016-12-30 CN CN201621474656.8U patent/CN206279263U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108550636A (en) * | 2018-06-14 | 2018-09-18 | 浙江尚越新能源开发有限公司 | Flexible solar battery back electrode production equipment |
| CN108649007A (en) * | 2018-06-14 | 2018-10-12 | 浙江尚越新能源开发有限公司 | Flexible solar battery window layer production equipment |
| CN108977791A (en) * | 2018-07-24 | 2018-12-11 | 电子科技大学 | A kind of electric heating device for winding deposition film under high temperature |
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