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CN206254030U - A kind of resin bonded diadust phyllotaxy abrasive disk - Google Patents

A kind of resin bonded diadust phyllotaxy abrasive disk Download PDF

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CN206254030U
CN206254030U CN201621283110.4U CN201621283110U CN206254030U CN 206254030 U CN206254030 U CN 206254030U CN 201621283110 U CN201621283110 U CN 201621283110U CN 206254030 U CN206254030 U CN 206254030U
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phyllotaxy
resin
diamond micropowder
grinding
grinding disc
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方从富
刘冲
赵再兴
胡中伟
徐西鹏
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Huaqiao University
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Huaqiao University
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Abstract

本实用新型涉及一种树脂固结金刚石微粉叶序研磨盘,所述研磨盘包括树脂基体层和至少部分形成柱状叶序结构的树脂‑金刚石微粉工作层,且柱状结构的叶序排列满足基于H.Vogel平面叶序模型的轨迹均匀性理论,即满足θ=86°×n、其中θ和r分别为第n个柱状结构的极角和极径。本实用新型的研磨盘具有均匀研磨轨迹分布、顺畅的冷却液流动作用,可将加工中的形成研屑及时排出,能够大大提高研磨质量和研磨效率,防止磨盘堵塞。

The utility model relates to a resin-consolidated diamond micropowder phyllotaxy grinding disc, the grinding disc comprises a resin matrix layer and a resin-diamond micropowder working layer at least partially forming a columnar phyllotaxy structure, and the phyllotaxy arrangement of the columnar structure satisfies the requirements based on H .The trajectory uniformity theory of the Vogel planar phyllotaxy model, that is, to satisfy θ=86°×n, where θ and r are the polar angle and polar radius of the nth columnar structure, respectively. The grinding disc of the utility model has uniform grinding track distribution and smooth cooling liquid flow, can discharge the grinding chips formed during processing in time, can greatly improve the grinding quality and grinding efficiency, and prevent the grinding disc from being blocked.

Description

一种树脂固结金刚石微粉叶序研磨盘A resin-consolidated diamond micropowder phyllotaxy grinding disc

技术领域technical field

本实用新型涉及一种金刚石微粉研磨盘,特别是涉及一种表面按均匀轨迹理论和叶序理论排布的树脂固结金刚石微粉叶序研磨盘。The utility model relates to a diamond micropowder grinding disc, in particular to a resin-solidified diamond micropowder phyllotaxy grinding disc whose surface is arranged according to the uniform track theory and the phyllotaxy theory.

背景技术Background technique

固结磨料研磨抛光是陶瓷材料、光学晶体材料和半导体基片材料获得高效平坦的一种重要技术方法,作为研磨抛光过程中主要耗材的研磨盘起到关键作用。树脂具有一定的弹性和良好的自锐性;金刚石具有高硬度、高强度和优良的化学稳定性,两者结合制备而成的树脂金刚石研磨盘具有良好的机械加工性能和很高的性价比。因此,树脂金刚石微粉研磨盘成为加工各种半导体、陶瓷和LED等材料不可或缺的研磨工具。Grinding and polishing of fixed abrasives is an important technical method for obtaining high-efficiency flatness of ceramic materials, optical crystal materials and semiconductor substrate materials. As the main consumable in the grinding and polishing process, the grinding disc plays a key role. Resin has certain elasticity and good self-sharpening; diamond has high hardness, high strength and excellent chemical stability, and the resin diamond grinding disc prepared by combining the two has good machinability and high cost performance. Therefore, the resin diamond micropowder grinding disc has become an indispensable grinding tool for processing various materials such as semiconductors, ceramics and LEDs.

在平面研磨抛光过程中,研磨盘的作用是将磨料固结并以调参方式控制加工区的研磨轨迹路径,实现与被加工工件表面的均匀划擦切削作用。现有的树脂研磨盘表面通常开交错的直槽、斜槽等,使其表面形成一定的排屑槽结构,便于加工中的冷却液供给和研屑排出。由于研磨盘表面的不同开槽结构,使得研磨轨迹不均匀,不同的开槽结构也易造成冷却液的流动不均衡,两者之间的不良匹配性导致被研磨表面宏观面型精度下降,微观精度不均衡,难以达到平坦化要求。In the process of plane grinding and polishing, the role of the grinding disc is to consolidate the abrasive and control the grinding track path in the processing area by adjusting parameters, so as to achieve uniform scratching and cutting with the surface of the workpiece to be processed. The surface of the existing resin grinding disc is usually provided with staggered straight grooves, inclined grooves, etc., so that the surface forms a certain chip removal groove structure, which is convenient for cooling liquid supply and grinding chip discharge during processing. Due to the different groove structures on the surface of the grinding disc, the grinding track is not uniform, and the different groove structures are also likely to cause the flow of the coolant to be unbalanced. Unbalanced precision makes it difficult to meet planarization requirements.

为了解决上述问题,人们采用经典的流体理论进行计算,获得了螺旋形结构具有良好的冷却液流动均衡性。采用运动学原理分析计算了单颗及少量磨粒运动轨迹,获得了研磨加工参数优化依据。由于研磨盘表面槽型结构综合影响流场和轨迹场结果,往往依靠调控研磨参数难以全面解决上述问题。In order to solve the above problems, people use the classical fluid theory to calculate, and obtain the helical structure with good coolant flow balance. The kinematics principle is used to analyze and calculate the motion trajectory of a single grain and a small amount of abrasive grains, and obtain the basis for optimizing grinding parameters. Since the surface groove structure of the grinding disc comprehensively affects the results of the flow field and the trajectory field, it is often difficult to fully solve the above problems by adjusting the grinding parameters.

实用新型内容Utility model content

本实用新型的目的是为了使研磨轨迹分布均匀、冷却液流动顺畅,设计了一种表面按均匀轨迹理论和叶序理论排布的树脂固结金刚石微粉叶序研磨盘,采用的技术方案是:一种树脂固结金刚石微粉叶序研磨盘包括树脂基体层和设置于树脂基体层之上的树脂-金刚石微粉工作层,所述树脂-金刚石微粉工作层包括叶序排列的若干柱状结构,所述柱状结构的叶序排列满足基于H.Vogel平面叶序模型的轨迹均匀性理论,即满足θ=86°×n、其中θ和r分别为第n个柱状结构的极角和极径;其中所述金刚石微粉的粒度为0.1~40μm,所述柱状结构的直径为1~5mm。The purpose of the utility model is to make the grinding tracks evenly distributed and the cooling liquid to flow smoothly. A resin-consolidated diamond micropowder phyllotaxy grinding disc whose surface is arranged according to the uniform track theory and the phyllotaxy theory is designed. The technical scheme adopted is: A resin-bonded diamond micropowder phyllotaxy grinding disc comprises a resin matrix layer and a resin-diamond micropowder working layer arranged on the resin matrix layer, the resin-diamond micropowder working layer includes several columnar structures arranged in phyllotaxy, the The phyllotaxy arrangement of the columnar structure satisfies the trajectory uniformity theory based on the H. Wherein θ and r are the polar angle and polar diameter of the nth columnar structure respectively; wherein the particle size of the diamond micropowder is 0.1-40 μm, and the diameter of the columnar structure is 1-5 mm.

优选的,所述柱状结构为圆柱形、正六棱柱或正三棱柱形。Preferably, the columnar structure is a cylinder, a regular hexagonal prism or a regular triangular prism.

优选的,所述树脂基体层的厚度为15~35mm,所述柱状结构的高度为2~5mm。Preferably, the thickness of the resin matrix layer is 15-35 mm, and the height of the columnar structure is 2-5 mm.

优选的,所述树脂-金刚石微粉工作层还包括连接子层,所述连接子层设置于所述树脂基体层和所述柱状结构之间。Preferably, the resin-diamond micropowder working layer further includes a connecting sublayer, and the connecting sublayer is arranged between the resin matrix layer and the columnar structure.

与现有技术相比,本实用新型的有益效果在于:Compared with the prior art, the utility model has the beneficial effects of:

本实用新型的研磨盘的叶序图案可在研磨中使研磨轨迹均匀,被研磨件表面的压力与温度分布均匀,研磨液可以均匀顺畅进入研磨接触区,研磨产生的研屑废物可以顺畅的排出,从而获得高平坦的宏微观表面,能够大大提高研磨质量和研磨效率,防止磨盘堵塞。柱状叶序工作层具有一定的厚度,可重复修整使用,使用寿命长。The phyllotaxic pattern of the grinding disc of the utility model can make the grinding trajectory uniform during grinding, the pressure and temperature distribution on the surface of the ground piece can be uniform, the grinding liquid can enter the grinding contact area evenly and smoothly, and the grinding waste generated by grinding can be smoothly discharged , so as to obtain a high flat macro-micro surface, which can greatly improve the grinding quality and grinding efficiency, and prevent the clogging of the grinding disc. The columnar phyllotaxy working layer has a certain thickness, can be trimmed and used repeatedly, and has a long service life.

以下结合附图及实施例对本实用新型作进一步详细说明;但本实用新型的一种树脂固结金刚石微粉叶序研磨盘不局限于实施例。The utility model will be further described in detail below in conjunction with the accompanying drawings and examples; however, a resin-consolidated diamond micropowder phyllotaxy grinding disc of the utility model is not limited to the examples.

附图说明Description of drawings

图1是本实用新型树脂固结金刚石微粉叶序研磨盘的立体结构示意图;Fig. 1 is the three-dimensional structure schematic diagram of the resin-consolidated diamond micropowder phyllotaxy grinding disc of the present invention;

图2是本实用新型树脂固结金刚石微粉叶序研磨盘的剖视图;Fig. 2 is the cross-sectional view of the utility model resin consolidated diamond micropowder phyllotaxy grinding disc;

图3是本实用新型模具底座的分解结构示意图;Fig. 3 is a schematic diagram of the decomposition structure of the mold base of the present invention;

图4是本实用新型叶序压板的平面结构示意图;Fig. 4 is a schematic diagram of the planar structure of the phyllotaxy pressing plate of the present invention;

图5是本实用新型树脂固结金刚石微粉叶序研磨盘的制造原理示意图。Fig. 5 is a schematic diagram of the manufacturing principle of the resin-consolidated diamond micropowder phyllotaxy grinding disc of the present invention.

具体实施方式detailed description

参考图1及图2,一实施例的一种树脂固结金刚石微粉叶序研磨盘包括树脂基体层1和设置于树脂基体层1之上的树脂-金刚石微粉工作层2。所述树脂-金刚石微粉工作层2包括连接子层21和呈叶序排列的若干柱状结构22。所述连接子层21覆盖于所述树脂基体层1之上,所述若干柱状结构22彼此间隔的设置于所述连接子层21之上,即,所述树脂-金刚石微粉工作层2部分是连续的层状,部分形成了柱状叶序结构。所述柱状结构21的叶序排列满足基于H.Vogel平面叶序模型的轨迹均匀性理论,即满足:θ=86°×n、其中θ和r分别为第n个柱状结构的极角和极径。柱状叶序结构具有均匀轨迹特性。此外,在其他实施例中,所述柱状结构亦可直接形成于所述树脂基体层之上,即所述树脂-金刚石微粉工作层于厚度方向全部形成呈叶序排列的若干分立的所述柱状结构。Referring to FIG. 1 and FIG. 2 , a resin-consolidated diamond micropowder phyllotaxy grinding disc according to an embodiment includes a resin matrix layer 1 and a resin-diamond micropowder working layer 2 disposed on the resin matrix layer 1 . The resin-diamond micropowder working layer 2 includes a connecting sublayer 21 and several columnar structures 22 arranged in phyllotaxy. The connecting sublayer 21 is covered on the resin matrix layer 1, and the plurality of columnar structures 22 are arranged on the connecting sublayer 21 at intervals, that is, the resin-diamond micropowder working layer 2 part is Continuous layered, partially formed columnar phyllotaxy. The phyllotaxy arrangement of the columnar structure 21 satisfies the trajectory uniformity theory based on the H.Vogel plane phyllotaxy model, that is, satisfies: θ=86°×n, where θ and r are the polar angle and polar radius of the nth columnar structure, respectively. The columnar phyllotaxy structure has the characteristic of uniform trajectory. In addition, in other embodiments, the columnar structure can also be directly formed on the resin matrix layer, that is, the resin-diamond micropowder working layer forms several discrete columnar structures arranged in phyllotaxy in the thickness direction. structure.

所述树脂-金刚石微粉工作层2是由树脂和金刚石微粉混合形成,其中金刚石微粉的粒度为0.1~40μm。所述树脂基体层1的厚度范围为15~35mm,所述柱状结构22的高度范围为2~5mm,直径范围为1~5mm。举例来说,在一实施例中,选用金刚石微粉的粒度为10μm,所述树脂基体层1的厚度为25mm,所述柱状结构22的高度为3mm,直径范围为3mm。柱状结构22具体可以是圆柱形、正六棱柱或正三棱柱形等规则图形。The resin-diamond micropowder working layer 2 is formed by mixing resin and diamond micropowder, wherein the particle size of the diamond micropowder is 0.1-40 μm. The thickness of the resin matrix layer 1 ranges from 15 to 35 mm, the height of the columnar structure 22 ranges from 2 to 5 mm, and the diameter ranges from 1 to 5 mm. For example, in one embodiment, the particle size of diamond micropowder is 10 μm, the thickness of the resin matrix layer 1 is 25 mm, the height of the columnar structure 22 is 3 mm, and the diameter range is 3 mm. Specifically, the columnar structure 22 may be a regular figure such as a cylinder, a regular hexagonal prism, or a regular triangular prism.

上述树脂固结金刚石微粉叶序研磨盘的制造方法,包括下列步骤:The manufacturing method of the above-mentioned resin-consolidated diamond micropowder phyllotaxy grinding disc comprises the following steps:

1)制造模具:参考图3至图4,按照所需研磨盘直径和叶序结构,采用电铸法、数控钻孔和数控激光加工方法制作圆环挡板3、支撑底板4和叶序压板5,支撑底板4和叶序压板5的平面度小于0.02mm,圆环挡板3与支撑底板4和叶序压板5的间隙配合为0.03mm,叶序压板5底面设置有若干呈上述叶序排列的圆柱孔51,圆柱孔51直径范围为1~5mm,深度范围为2~5mm。1) Manufacture of the mold: referring to Figure 3 to Figure 4, according to the required diameter of the grinding disc and the phyllotaxy structure, the ring baffle 3, the supporting base plate 4 and the phyllotaxy pressing plate are produced by electroforming, numerically controlled drilling and numerically controlled laser processing. 5. The flatness of the supporting base plate 4 and the phyllotaxy pressing plate 5 is less than 0.02mm, and the gap between the circular baffle plate 3 and the supporting base plate 4 and the phylloxene pressing plate 5 is 0.03mm. The arranged cylindrical holes 51 have a diameter ranging from 1 to 5 mm and a depth ranging from 2 to 5 mm.

2)将圆环挡板3用PVAL胶水密封固定在支撑底板4外沿形成模具底座,其内部即形成磨盘型腔,在磨盘型腔内均匀涂覆MMR2脱模剂,待其风干后,将不含金刚石微粉的树脂混合液注入磨盘型腔,本例所用树脂选择冷镶嵌树脂,所用固化剂为甲基四氢笨酐,树脂混合液由冷镶嵌树脂与甲基四氢笨酐按1:0.5~1.5体积比例配置,例如可以是1:1体积比例配置。将上述注有树脂混合液的磨盘型腔置于加热设备内,温度控制在60℃~100℃固化1~5分钟,例如可以是在70℃下固化2分钟,形成半固化的树脂基体层1。2) Use PVAL glue to seal and fix the ring baffle 3 on the outer edge of the support base plate 4 to form a mold base, and form a grinding disc cavity inside, and evenly coat MMR2 release agent in the grinding disc cavity. After it is air-dried, put The resin mixture without diamond micropowder is injected into the cavity of the grinding disc. The resin used in this example is cold mounting resin, the curing agent used is methyltetrahydrophthalic anhydride, and the resin mixture is composed of cold mounting resin and methyltetrahydrophthalic anhydride by 1: The volume ratio configuration is 0.5-1.5, for example, the volume ratio configuration may be 1:1. Place the grinding disc cavity filled with the resin mixture in the heating equipment, and control the temperature at 60°C to 100°C for 1 to 5 minutes, for example, 70°C for 2 minutes to form a semi-cured resin matrix layer 1 .

3)在半固化树脂基体层1表面注入含有金刚石微粉的树脂混合液,该混合液由冷镶嵌树脂、甲基四氢笨酐和金刚石微粉按1:(0.5~1.5):(0.3~0.8)体积比例配置,金刚石微粉粒度为0.1~40μm;例如可以是以1:1:0.5体积比例配置,金刚石微粉粒度10μm。控制加热温度在60℃~100℃固化1~5分钟,形成半固化的树脂-金刚石微粉层,参考图5,压上叶序压板5,压力控制在5~15N,通过叶序压板5的作用使树脂-金刚石微粉层至少部分形成呈所述叶序排列的柱状结构22,继续加热5~10分钟使其完全固化,取下圆环挡板3、支撑底板4和叶序压板5,清除多余树脂,修整磨盘,即可形成树脂固结金刚石微粉叶序研磨盘。3) Inject a resin mixture containing diamond micropowder on the surface of the semi-cured resin matrix layer 1, the mixture is composed of cold mounting resin, methyltetrahydrophthalic anhydride and diamond micropowder according to 1:(0.5~1.5):(0.3~0.8) The volume ratio is configured, and the particle size of the diamond powder is 0.1-40 μm; for example, it can be configured in a volume ratio of 1:1:0.5, and the particle size of the diamond powder is 10 μm. Control the heating temperature at 60°C to 100°C to cure for 1 to 5 minutes to form a semi-cured resin-diamond micropowder layer. Referring to Figure 5, press the phyllotaxy press plate 5, and the pressure is controlled at 5 to 15N, through the action of the phylloxene press plate 5 Make the resin-diamond micropowder layer at least partially form the columnar structure 22 arranged in the phyllotaxy, continue heating for 5 to 10 minutes to make it completely solidified, remove the ring baffle 3, the supporting base plate 4 and the phyllotaxy pressing plate 5, and remove excess Resin, trim the grinding disc to form a resin-consolidated diamond micropowder phyllotaxy grinding disc.

上述实施例仅用来进一步说明本实用新型的一种树脂固结金刚石微粉叶序研磨盘,但本实用新型并不局限于实施例,凡是依据本实用新型的技术实质对以上实施例所作的任何简单修改、等同变化与修饰,均落入本实用新型技术方案的保护范围内。Above-mentioned embodiment is only used for further illustrating a kind of resin-consolidated diamond micropowder phyllotaxy grinding disc of the present utility model, but the utility model is not limited to embodiment, any technical essence of the utility model is made to above embodiment any Simple modifications, equivalent changes and modifications all fall within the scope of protection of the technical solution of the utility model.

Claims (4)

1.一种树脂固结金刚石微粉叶序研磨盘,其特征在于:包括树脂基体层和设置于树脂基体层之上的树脂-金刚石微粉工作层,所述树脂-金刚石微粉工作层包括叶序排列的若干柱状结构,所述柱状结构的叶序排列满足基于H.Vogel平面叶序模型的轨迹均匀性理论,即满足θ=86°×n、其中θ和r分别为第n个柱状结构的极角和极径;其中所述金刚石微粉的粒度为0.1~40μm,所述柱状结构的直径为1~5mm。1. A resin-solidified diamond micropowder phyllotaxy grinding disc is characterized in that: it comprises a resin matrix layer and a resin-diamond micropowder working layer arranged on the resin matrix layer, and the resin-diamond micropowder working layer comprises a phyllotaxy arrangement Several columnar structures, the phyllotaxy arrangement of the columnar structure satisfies the trajectory uniformity theory based on the H.Vogel planar phyllotaxy model, that is, satisfies θ=86°×n, Wherein θ and r are the polar angle and polar diameter of the nth columnar structure respectively; wherein the particle size of the diamond micropowder is 0.1-40 μm, and the diameter of the columnar structure is 1-5 mm. 2.根据权利要求1所述的树脂固结金刚石微粉叶序研磨盘,其特征在于:所述柱状结构为圆柱形、正六棱柱或正三棱柱形。2. The resin-consolidated diamond micropowder phyllotaxy grinding disc according to claim 1, characterized in that: the columnar structure is cylindrical, regular hexagonal prism or regular triangular prism. 3.根据权利要求1所述的树脂固结金刚石微粉叶序研磨盘,其特征在于:所述树脂基体层的厚度为15~35mm,所述柱状结构的高度为2~5mm。3. The resin-consolidated diamond micropowder phyllotaxy grinding disc according to claim 1, characterized in that: the thickness of the resin matrix layer is 15-35 mm, and the height of the columnar structure is 2-5 mm. 4.根据权利要求1所述的树脂固结金刚石微粉叶序研磨盘,其特征在于:所述树脂-金刚石微粉工作层还包括连接子层,所述连接子层设置于所述树脂基体层和所述柱状结构之间。4. resin solidified diamond micropowder phyllotaxy grinding disc according to claim 1, is characterized in that: described resin-diamond micropowder working layer also comprises connection sublayer, and described connection sublayer is arranged on described resin matrix layer and between the columnar structures.
CN201621283110.4U 2016-11-28 2016-11-28 A kind of resin bonded diadust phyllotaxy abrasive disk Active CN206254030U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106378700A (en) * 2016-11-28 2017-02-08 华侨大学 Resin concretion diamond micro-powder phyllotaxy grinding disc and manufacturing method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106378700A (en) * 2016-11-28 2017-02-08 华侨大学 Resin concretion diamond micro-powder phyllotaxy grinding disc and manufacturing method

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