CN206223089U - A kind of ZYGO laser interferometer measurements regulation positioning fixture - Google Patents
A kind of ZYGO laser interferometer measurements regulation positioning fixture Download PDFInfo
- Publication number
- CN206223089U CN206223089U CN201621262222.1U CN201621262222U CN206223089U CN 206223089 U CN206223089 U CN 206223089U CN 201621262222 U CN201621262222 U CN 201621262222U CN 206223089 U CN206223089 U CN 206223089U
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- China
- Prior art keywords
- platform
- adjust
- stationary fixture
- easy
- regulation
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- Expired - Fee Related
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- 238000005259 measurement Methods 0.000 title claims description 23
- 230000003287 optical effect Effects 0.000 claims description 21
- 230000001681 protective effect Effects 0.000 claims description 12
- 230000001360 synchronised effect Effects 0.000 claims description 6
- 239000000428 dust Substances 0.000 claims description 4
- 239000004071 soot Substances 0.000 claims description 3
- 238000005516 engineering process Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011982 device technology Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The utility model discloses a kind of ZYGO laser interferometer measurements regulation positioning fixture, test platform including placing ZYGO laser interferometer, test platform is provided with a stationary fixture for being easy to place optical element to be measured, stationary fixture is located in protective cover again after being located on a three axle alignment jigs, precision rotation platform is provided with three axle alignment jigs, horizontal adjustment platform and height regulation platform, adjustable diameter and screw adjusting knob and anglec of rotation indication dial disc are provided with precision rotation platform, highly two synchronous screw adjusting knobs are provided with regulation platform, two synchronous screw adjusting knobs are respectively arranged on the diagonal of height regulation platform；The utility model can individually adjust the position of optical element to be measured using the precision rotation platform in three axle alignment jigs, horizontal adjustment platform and height regulation platform, it is easy to adjust accurate, be particularly suitable for micro-precision regulation, regulation positioning precision it is high, adjust it is easy to operate, can adjust measurement efficiency, save time of measuring.
Description
Technical field
The utility model is related to field of optical device technology, more particularly to a kind of ZYGO laser interferometer measurements to be determined with regulation
Position fixture.
Background technology
ZYGO non-contact laser interferometers are the inspections of surface face shape and Transmitted wavefront for precison optical component etc.
The optical detecting instrument of survey.ZYGO non-contact lasers interferometer uses phase shift principle of interference, can be to high-precision plane face
The optical elements such as shape, spherical surface shape, radius of curvature are measured and analyzed, and ZYGO non-contact lasers interferometer can be using mutual
Dynamic Graphic Interface Control instrument, system operatio is simple, is used by optics manufacturer extensively.
When optical element is measured and analyzed using ZYGO non-contact laser interferometers, it is necessary to first by optics zero
Part is fixed on the measurement and positioning fixture on instrument platform, during due to production optical element specification species is relatively more, each light
Learning part may need to measure the several location points in optical element, therefore need often regulation to place optical element in measurement
Measurement and positioning fixture three positions of axial direction, and ZYGO non-contact lasers interferometer be equipped be typically all fixed survey
Amount positioning fixture, prior art can only be adjusted using the mode such as increase and decrease cushion block or manual transfer pendulum position, this regulative mode
It is relatively difficult to quickly be adjusted in place, needs to spend more positioning adjustment time, it is necessary to further improve in measurement.
The content of the invention
To overcome the deficiencies in the prior art, the utility model provides that a kind of easy to operate, positioning precision is high, regulation measurement
The ZYGO laser interferometer measurements of efficiency high regulation positioning fixture.
The utility model is to reach the technical scheme that above-mentioned technical purpose used to be：A kind of ZYGO laser interferometer measurements
With regulation positioning fixture, including the test platform of ZYGO laser interferometer is placed, the test platform is provided with one and is easy to put
Put the stationary fixture of optical element to be measured, the stationary fixture on a three axle alignment jigs, the stationary fixture and
Three axle alignment jigs are provided with a protective cover for being easy to upset in a protective cover in the protective cover, three axle is adjusted
A precision rotation platform that can adjust the stationary fixture and measurement optical axis included angle, the precision rotation platform are provided with section fixture
A horizontal adjustment platform that can adjust the stationary fixture and measurement light shaft offset position is provided with, the Level tune is put down
Platform is provided with a height regulation platform that can adjust the stationary fixture vertical height, and spiral shell is provided with the precision rotation platform
Rotation adjusting knob and anglec of rotation indication dial disc, two synchronous screw adjusting knobs, two are provided with the height regulation platform
The individual synchronous screw adjusting knob is respectively arranged on the diagonal of the height regulation platform；Stationary fixture and three axles are adjusted
Fixture is enclosed in protective cover, it is to avoid dust product falls on stationary fixture and three axle alignment jigs, is easy to be held in position accuracy,
Precision rotation platform, horizontal adjustment platform and height regulation platform can be utilized the position of optical element to be measured is individually adjusted when using
Put, it is easy to adjust accurate.
The V-type locating slot for being easy to place cylindrical optics part, the both sides of the V-type locating slot are provided with the stationary fixture
The horizontal location face for being easy to holding plane optical element is provided with, the horizontal location face is provided with limited block；One stationary fixture
Can adapt to place different optical elements, stationary fixture need not be often changed during detection.
One is connected with the protective cover prevents dust from accumulating the clean soot blower on the stationary fixture.
The beneficial effects of the utility model are：Using said structure, by the test platform of ZYGO laser interferometer
One three axles regulation folder that can adjust optical element to be measured and measurement optical axis included angle, deviation post and height and position is set
Tool, sets the stationary fixture for being easy to place cylindrical optics part and plane optical element on three axle alignment jigs, the energy in measurement
Enough optics to be measured is individually adjusted using the precision rotation platform in three axle alignment jigs, horizontal adjustment platform and height regulation platform
The position of part, it is easy to adjust accurate, it is particularly suitable for micro-precision regulation, regulation positioning precision is high, be easy to ZYGO laser interferences
Instrument is accurately measured, and regulation is easy to operate, can adjust measurement efficiency, save time of measuring.
Brief description of the drawings
The utility model is described in further detail with reference to the accompanying drawings and examples.Wherein：
Fig. 1 is the structural representation that the utility model ZYGO laser interferometer measurements adjust positioning fixture；
Fig. 2 is the structural representation of the utility model stationary fixture.
Specific embodiment
To describe technology contents of the present utility model, structural feature, the objects and the effects in detail, below in conjunction with implementation
Mode simultaneously coordinates accompanying drawing to describe in detail.
Refer to shown in Fig. 1 and Fig. 2, the utility model ZYGO laser interferometer measurements include placing with regulation positioning fixture
The test platform 1 of ZYGO laser interferometer, the test platform 1 is provided with a fixation for being easy to place optical element to be measured
Fixture 2, on a three axle alignment jigs 3, the axle alignment jig 3 of the stationary fixture 2 and three is located at one to the stationary fixture 2
In individual protective cover 4, a protective cover 41 for being easy to upset is provided with the protective cover 4, one is provided with the three axles alignment jig 3
The individual precision rotation platform 31 that can adjust the stationary fixture 2 and measurement optical axis included angle, the precision rotation platform 31 is provided with one
The individual horizontal adjustment platform 32 that can adjust the stationary fixture 2 and measurement light shaft offset position, the horizontal adjustment platform 32
A height regulation platform 33 that can adjust the vertical height of the stationary fixture 2 is provided with, is set in the precision rotation platform 31
There are adjustable diameter and screw adjusting knob 311 and anglec of rotation indication dial disc 312, two synchronous screws are provided with the height regulation platform 33
Adjusting knob 331, two synchronous screw adjusting knobs 331 are respectively arranged on the diagonal of the height regulation platform 33.
The V-type locating slot 21 for being easy to place cylindrical optics part, the V-type locating slot 21 are provided with the stationary fixture 2
Both sides be provided with the horizontal location face 22 for being easy to holding plane optical element, the horizontal location face 22 is provided with limited block 23.
One is connected with the protective cover 4 prevents dust from accumulating the clean soot blower 5 on the stationary fixture 2.
Embodiment of the present utility model is the foregoing is only, the scope of the claims of the present utility model is not thereby limited, it is every
The equivalent structure transformation made using the utility model specification and accompanying drawing content, or directly or indirectly it is used in other correlations
Technical field, is similarly included in scope of patent protection of the present utility model.
Claims (3)
1. a kind of ZYGO laser interferometer measurements are used and adjust positioning fixture, it is characterised in that：Including placing ZYGO laser interferometer
Test platform, the test platform is provided with a stationary fixture for being easy to place optical element to be measured, the geometrical clamp
On a three axle alignment jigs, the stationary fixture and three axle alignment jigs are located in a protective cover tool, the protection
Be provided with cover one be easy to upset protective cover, be provided with the three axles alignment jig one can adjust the stationary fixture with
The precision rotation platform of optical axis included angle is measured, the precision rotation platform is provided with one and can adjust the stationary fixture with measurement light
The horizontal adjustment platform of axle offset position, the horizontal adjustment platform is provided with one, and can to adjust the stationary fixture vertically high
The height regulation platform of degree, is provided with adjustable diameter and screw adjusting knob and anglec of rotation indication dial disc, the height in the precision rotation platform
Two synchronous screw adjusting knobs are provided with degree regulation platform, two synchronous screw adjusting knobs are respectively arranged on the height
Adjust on the diagonal of platform.
2. a kind of ZYGO laser interferometer measurements according to claim 1 are used and adjust positioning fixture, it is characterised in that：It is described
The V-type locating slot for being easy to place cylindrical optics part is provided with stationary fixture, the both sides of the V-type locating slot are provided with to be easy to place
The horizontal location face of planar wave part, the horizontal location face is provided with limited block.
3. a kind of ZYGO laser interferometer measurements according to claim 1 are used and adjust positioning fixture, it is characterised in that：It is described
One is connected with protective cover prevents dust from accumulating the clean soot blower on the stationary fixture.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621262222.1U CN206223089U (en) | 2016-11-23 | 2016-11-23 | A kind of ZYGO laser interferometer measurements regulation positioning fixture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621262222.1U CN206223089U (en) | 2016-11-23 | 2016-11-23 | A kind of ZYGO laser interferometer measurements regulation positioning fixture |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206223089U true CN206223089U (en) | 2017-06-06 |
Family
ID=58790782
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621262222.1U Expired - Fee Related CN206223089U (en) | 2016-11-23 | 2016-11-23 | A kind of ZYGO laser interferometer measurements regulation positioning fixture |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206223089U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113008132A (en) * | 2021-02-23 | 2021-06-22 | 中山大学 | CQP-based laser interferometer and optical axis precise positioning adjusting and mounting device and method |
| CN115264317A (en) * | 2022-09-29 | 2022-11-01 | 张家港奇点光电科技有限公司 | Optical instrument platform with multi-angle is adjusted |
-
2016
- 2016-11-23 CN CN201621262222.1U patent/CN206223089U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113008132A (en) * | 2021-02-23 | 2021-06-22 | 中山大学 | CQP-based laser interferometer and optical axis precise positioning adjusting and mounting device and method |
| CN113008132B (en) * | 2021-02-23 | 2022-05-17 | 中山大学 | CQP-based laser interferometer and optical axis precise positioning adjusting and mounting device and method |
| CN115264317A (en) * | 2022-09-29 | 2022-11-01 | 张家港奇点光电科技有限公司 | Optical instrument platform with multi-angle is adjusted |
| CN115264317B (en) * | 2022-09-29 | 2022-12-20 | 张家港奇点光电科技有限公司 | Optical instrument platform with multi-angle is adjusted |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170606 Termination date: 20181123 |