CN206207476U - A kind of microwave plasma acting chamber of automatic ignition - Google Patents
A kind of microwave plasma acting chamber of automatic ignition Download PDFInfo
- Publication number
- CN206207476U CN206207476U CN201621095087.6U CN201621095087U CN206207476U CN 206207476 U CN206207476 U CN 206207476U CN 201621095087 U CN201621095087 U CN 201621095087U CN 206207476 U CN206207476 U CN 206207476U
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- China
- Prior art keywords
- combination
- water collar
- automatic ignition
- microwave plasma
- combined
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 49
- 230000005284 excitation Effects 0.000 claims abstract description 30
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 16
- 239000003989 dielectric material Substances 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 7
- 238000003466 welding Methods 0.000 claims description 5
- 230000008569 process Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
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- Electron Sources, Ion Sources (AREA)
Abstract
The utility model discloses a kind of microwave plasma acting chamber of automatic ignition, it includes excitation cavity combination (1), (1) connected upper water collar combination (2) and lower water collar combination (4) is combined with excitation cavity respectively, the quartz glass (3) in the middle of water collar combination (2) and lower water collar combination (4) is fixed on, air inlet combination (5) of (4) connection is combined with lower water collar and (1) connected automatic ignition device (6) is combined with excitation cavity.The microwave plasma acting chamber of the alternative traditional manual ignition of the utility model, using automatic ignition device (6) it is safe and reliable realize microwave plasma ignition;(2) are combined by upper water collar and lower water collar combines the fixation of (4) to quartz glass (3), combination (1) putting position in excited target chamber does not influence to make quartz glass (3), maintains balance.The utility model reasonable in design, without microwave leakage, stable performance, adaptability is stronger.
Description
Technical field
The utility model is related to microwave plasma technical field, and in particular to a kind of microwave plasma effect of automatic ignition
Chamber.
Background technology
In traditional microwave plasma acting chamber ignition process, hand-held fire rod need to be lighted a fire near acting chamber, work
Inconvenience is brought during work, the use of microwave plasma acting chamber is greatly limit;In traditional role chamber, quartz glass is only
It is placed in lower water collar combination, the length of quartz glass exceeds upper water collar top, during putting, due to quartz glass
It is not completely fixed, it is impossible to arbitrarily change the installation direction of excitation cavity combination, this structure also makes the direction of plasma flame
It is restricted, has limited to the use of microwave plasma acting chamber.
Therefore, it is necessary that improvement is optimized to traditional microwave plasma acting chamber, using automatic ignition device reality
The ignition process of existing microwave plasma acting chamber, while quartz glass is fixed, solution equipment is using being restricted and work
The low problem of efficiency.
Utility model content
Utility model purpose:The purpose of this utility model is to solve the deficiency of existing microwave plasma acting chamber, carrying
For a kind of microwave plasma acting chamber of automatic ignition, its reasonable in design can not only reduce microwave leakage, operate more square
Just, adaptability is stronger, and is not influenceed by the putting position that working environment and excitation cavity are combined, and can automatically control microwave etc.
Gas ions ignition process, adjusts the direction of plasma flame as needed, greatly improves operating efficiency, meets different operating bar
Demand under part.
Technical scheme:In order to realize the above object the technical scheme that the utility model is taken is:
A kind of microwave plasma acting chamber of automatic ignition, it is combined including excitation cavity, is combined with excitation cavity be connected respectively
Upper water collar combination and lower water collar combination, be fixed on water collar combination and lower water collar combination in the middle of quartz glass,
The air inlet combination of connection is combined with lower water collar and connected automatic ignition device is combined with excitation cavity.
Preferably, a kind of microwave plasma acting chamber of above-described automatic ignition, excitation cavity combination includes
Adpting flange that the resonator and resonator that ring flange and ring flange weld together weld together, it is welded on resonator
End plate;Ring flange and adpting flange are conveniently connected with other elements;Resonator can be 2450MHz or 915MHz under etc.
Gas ions excitation cavity, can be contracting waveguide structure, or other structures.
Preferably, the microwave plasma acting chamber of above-described a kind of automatic ignition, described upper water collar
Combine identical with the structure that lower water collar is combined, they include water collar and cylinder of the cylinder together with cylinder welding and
The bottom flange that water collar welds together;The connection that the bottom flange that upper water collar combination is combined with lower water collar is combined with excitation cavity
Flange is fixed by screw, easy installation and removal.
Preferably, the microwave plasma acting chamber of above-described a kind of automatic ignition, the combination of upper water collar and
Quartz glass length H in the middle of lower water collar combination is fixed, and quartz glass is maintained balance in excitation cavity combination, not excited target
The putting position influence of chamber combination, can as needed adjust the direction of plasma flame, can overcome prior art due to quartz
Glass is not completely fixed, it is impossible to arbitrarily change the technical deficiency of the installation direction of excitation cavity combination.
Preferably, a kind of microwave plasma acting chamber of above-described automatic ignition, air inlet combination includes platform
The air inlet pipe that post is connected with important actor;The cylinder welding that important actor is combined with lower water collar is together.
Preferably, a kind of microwave plasma acting chamber of above-described automatic ignition, described automatic ignition
Cylinder and the support of cylinders that device is connected including the dielectric material that thimble is connected with thimble with dielectric material;Support
Combined with excitation cavity and be connected.
Preferably, above-described automatic ignition device includes thimble, dielectric material, cylinder and support, thimble
With dielectric material, dielectric material and between cylinder with being threadedly coupled, cylinder is connected and fixed to excitation cavity by screw and support
On the ring flange of combination, simple structure, convenient dismounting;Progradation by cylinder to thimble can realize microwave plasma
Automatic ignition process, compared to existing technology, igniting is more automated, and operating efficiency is higher, and wherein cylinder has fixed journey system L;
Dielectric material between cylinder and thimble serves good insulating effect during microwave plasma ignition, can greatly reduce
Microwave leakage, compared to existing technology, security is more preferable.
Beneficial effect:The microwave plasma acting chamber of the automatic ignition that the utility model is provided has compared with prior art
Advantages below:
The microwave plasma acting chamber of automatic ignition described in the utility model can realize automatic ignition process, operation side
Just, operating efficiency is higher, and without microwave leakage, security performance is more preferable;Position is not put by working environment and excitation cavity combination simultaneously
Influence is put, the direction of plasma flame is adjusted as needed, the demand under the conditions of different operating can be met.
Brief description of the drawings
Fig. 1 is a kind of structural representation of the microwave plasma acting chamber of automatic ignition that the utility model is provided.
Fig. 2 is the knot of the excitation cavity combination in a kind of microwave plasma acting chamber of automatic ignition that the utility model is provided
Structure schematic diagram.
Fig. 3 is the upper water collar and lower water in a kind of microwave plasma acting chamber of automatic ignition that the utility model is provided
The structural representation of cold set combination.
Fig. 4 is the structure of the air inlet combination in a kind of microwave plasma acting chamber of automatic ignition that the utility model is provided
Schematic diagram.
Fig. 5 is the automatic ignition device in a kind of microwave plasma acting chamber of automatic ignition that the utility model is provided
Structural representation.
Specific embodiment
Below in conjunction with the accompanying drawings and specific embodiment, the utility model is further elucidated, it should be understood that these embodiments are only used for
Illustrate the utility model rather than limit scope of the present utility model, after the utility model has been read, art technology
Modification of the personnel to the various equivalent form of values of the present utility model falls within the application appended claims limited range.
As shown in Figures 1 to 5, the microwave plasma acting chamber of a kind of automatic ignition, it includes excitation cavity combination 1, respectively
1 connected upper water collar combination 2 and lower water collar combination 4 is combined with excitation cavity, water collar is fixed on and is combined 2 and lower water collar
Quartz glass 3 in the middle of combination 4, the air inlets combination 5 of 4 connections combine with lower water collar and that 1 is combined with excitation cavity is connected automatic
Igniter 6.
Described excitation cavity combination 1 includes resonator 1-2 and resonator 1-2 that ring flange 1-1 and ring flange 1-1 is welded
The adpting flange 1-3 of the welding and end plate 1-4 being welded on resonator 1-2.
Described upper water collar combination 2 is identical with the structure of lower water collar combination 4, including cylinder 2-1 and cylinder 2-1
The water collar 2-2 and cylinder 2-1 and water collar 2-2 for welding together weld together bottom flange 2-3;Bottom flange 2-3 with swash
Chamber combination 1 is encouraged to be fixed by screw.
The length of described quartz glass 3 is fixed, and is clipped between water collar combination 2 and lower water collar combination 4, makes quartz
Glass 3 maintains balance in excitation cavity combination 1, not the putting position influence of excited target chamber combination 1, can adjust as needed etc. from
The direction of daughter flame.
Described air inlet combination 5 includes the air inlet pipe 5-2 that important actor 5-1 is connected with important actor 5-1;Important actor 5-1 and lower water collar
Combination 4 welds together.
Described automatic ignition device 6 includes the dielectric material 6-2 and dielectric material that thimble 6-1 is connected with thimble 6-1
The support 6-4 that 6-2 connected cylinder 6-3 is connected with cylinder 6-3;Support 6-4 combines 1 with excitation cavity and is connected.
A kind of microwave plasma acting chamber of automatic ignition that the utility model is provided, acts on traditional microwave plasma
Chamber optimizes, and increases automatic ignition device 6 newly, and the progradation by cylinder 6-3 to thimble 6-1 realizes microwave plasma certainly
Dynamic ignition process, the dielectric material 6-2 between cylinder 6-3 and thimble 6-1 is served very well during microwave plasma ignition
Insulating effect;Quartz glass 3 with regular length H combines 2, lower water collar with upper water collar and combines 4 and excitation cavity group
1 perfect adaptation is closed, the position of excitation cavity combination 1 can be as needed put, the direction of plasma flame is adjusted, applicability is more
By force.
The above is only preferred embodiment of the present utility model, it is noted that for the common skill of the art
For art personnel, on the premise of the utility model principle is not departed from, some improvements and modifications can also be made, these improve and
Retouching also should be regarded as protection domain of the present utility model.
Claims (5)
1. the microwave plasma acting chamber of a kind of automatic ignition, it is characterised in that it includes excitation cavity combination (1), respectively with swash
Chamber combination (1) connected upper water collar combination (2) and lower water collar combination (4) are encouraged, water collar combination (2) and lower water is fixed on
Quartz glass (3) in the middle of cold set combination (4), air inlet combination (5) of (4) connection is combined with lower water collar and is combined with excitation cavity
(1) connected automatic ignition device (6).
2. the microwave plasma acting chamber of a kind of automatic ignition according to claim 1, it is characterised in that excitation cavity is combined
(1) resonator (1-2) and the adpting flange of resonator (1-2) welding for being welded including ring flange (1-1) and ring flange (1-1)
(1-3) and the end plate (1-4) being welded on resonator (1-2).
3. a kind of microwave plasma acting chamber of automatic ignition according to claim 2, it is characterised in that described upper water
Cold set combination (2) is identical with the structure that lower water collar combines (4), and they include what cylinder (2-1) and cylinder (2-1) were welded
The bottom flange (2-3) that water collar (2-2) and cylinder (2-1) and water collar (2-2) are welded;Bottom flange (2-3) and excitation cavity group
The adpting flange (1-3) for closing (1) is fixed by screw.
4. the microwave plasma acting chamber of a kind of automatic ignition according to claim 3, it is characterised in that air inlet is combined
(5) air inlet pipe (5-2) being connected with important actor (5-1) including important actor (5-1);Important actor (5-1) is combined in (4) with lower water collar
Cylinder (2-1) welds together.
5. the microwave plasma acting chamber of a kind of automatic ignition according to any one of Claims 1-4, it is characterised in that
Dielectric material (6-2) and dielectric material that described automatic ignition device (6) is connected including thimble (6-1) with thimble (6-1)
The support (6-4) that (6-2) connected cylinder (6-3) is connected with cylinder (6-3);Support (6-4) combines the method for (1) with excitation cavity
Blue disk (1-1) is connected.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201621095087.6U CN206207476U (en) | 2016-09-29 | 2016-09-29 | A kind of microwave plasma acting chamber of automatic ignition |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201621095087.6U CN206207476U (en) | 2016-09-29 | 2016-09-29 | A kind of microwave plasma acting chamber of automatic ignition |
Publications (1)
Publication Number | Publication Date |
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CN206207476U true CN206207476U (en) | 2017-05-31 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201621095087.6U Expired - Fee Related CN206207476U (en) | 2016-09-29 | 2016-09-29 | A kind of microwave plasma acting chamber of automatic ignition |
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CN (1) | CN206207476U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106322433A (en) * | 2016-09-29 | 2017-01-11 | 南京三乐微波技术发展有限公司 | Microwave plasma acting cavity capable of achieving automatic ignition |
CN107087339A (en) * | 2017-07-03 | 2017-08-22 | 李容毅 | An enhanced microwave plasma torch generator with double-cavity excitation |
-
2016
- 2016-09-29 CN CN201621095087.6U patent/CN206207476U/en not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106322433A (en) * | 2016-09-29 | 2017-01-11 | 南京三乐微波技术发展有限公司 | Microwave plasma acting cavity capable of achieving automatic ignition |
CN107087339A (en) * | 2017-07-03 | 2017-08-22 | 李容毅 | An enhanced microwave plasma torch generator with double-cavity excitation |
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GR01 | Patent grant | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170531 Termination date: 20210929 |