CN206133113U - Piezoelectric actuator and distorting lens - Google Patents
Piezoelectric actuator and distorting lens Download PDFInfo
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- CN206133113U CN206133113U CN201621032963.0U CN201621032963U CN206133113U CN 206133113 U CN206133113 U CN 206133113U CN 201621032963 U CN201621032963 U CN 201621032963U CN 206133113 U CN206133113 U CN 206133113U
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Abstract
The embodiment of the utility model provides a piezoelectric actuator and distorting lens, piezoelectric actuator includes: first drive crystal, second drive crystal, third drive crystal, fourth drive crystal and articulamentum, the articulamentum has relative first surface and second surface, the one end of first drive crystal with the one end of second drive crystal is installed respectively different positions on the first surface of articulamentum, the one end of third drive crystal with the one end of fourth drive crystal is installed respectively different positions on the second surface of articulamentum. This piezoelectric actuator has advantage small, that the sluggishness is low and multi freedom controls.
Description
Technical field
This utility model is related to piezoelectric actuated technology and distorting lenss technical field, piezoelectric actuated in particular to one kind
Device and distorting lenss.
Background technology
Distorting lenss be by many preferable goggle with curve surface lens that can be combined with the little lens unit of independent control,
This distorting lenss are mainly used in adaptive optical system, can change incidence by the position operation to each independent little eyeglass
The phase structure of the wavefront of light wave reaches the purposes such as the distortion correction of focusing and High-order Image.
However, at present for the control problem of little lens unit has many weak points.Nowadays the most frequently used piezoelectricity
Actuator is lead zirconate titanate (PZT) the piezoceramic multilayer driver for producing axial displacement and the Dan Shuan for producing transverse curvature displacement
Crystal chip driver.Weak point, first, the PZT multilamellars driver and list twin lamella driver of current most of commercial are singly certainly
By degree actuator, the application of the distorting lenss of this kind little lens unit combination is not properly suited for；Second, by multilamellar driver and list
Twin lamella driver is used in combination with, and may result in that overall dimensions are excessive, cannot also be adapted to the change of this kind little lens combination
Shape mirror；3rd, the piezoelectric property of current rigid piezoelectric ceramics is relatively low, obtained by business small multilamellar driver made by which
Maximum axial displacement and inclination angle are limited in scope, and under unidirectional electric field driven, and its strain is sluggish to be up to 10%-12%, with soft
Made by the piezoelectric ceramics of property, the sluggishness of multilamellar driver is up to more than 15%.It is therefore desirable to a kind of small size, high-freedom degree
Improve the problems referred to above with low sluggish piezo-activator.
Utility model content
The purpose of this utility model is to provide a kind of piezo-activator, and which has small volume, multiple degrees of freedom and low sluggishness
Characteristic.
Another object of the present utility model is to provide a kind of distorting lenss using above-mentioned piezo-activator, the distorting lenss
Single little lens unit small volume, which can substantially reduce the hysteresis phenomenon for controlling, and energy under the control of piezo-activator
Larger angle and multivariant control are reached enough.
What embodiment of the present utility model was realized in：
A kind of piezo-activator, including：First drives crystal, second to drive crystal, the 3rd to drive crystal, the 4th to drive crystalline substance
Body and articulamentum, the articulamentum have relative first surface and second surface, and described first drives one end of crystal and institute
The one end for stating the second driving crystal is connected to the diverse location on the first surface of the articulamentum；Described 3rd drives crystalline substance
One end of one end of body and the 4th driving crystal is connected to the diverse location on the second surface of the articulamentum；Institute
State the first driving crystal and the second driving crystal being capable of the generation first direction inclination of drive connection layer；Described 3rd drives crystalline substance
Body and the 4th drives crystal to form drive surface in one end of not connected articulamentum, and the drive surface can be driven brilliant by the described 3rd
Body and the 4th drives crystal-driven that second direction inclination occurs, and the first direction and the second direction are different directions.
Preferably, also including the first bearing bed, described first drive one end not being connected with articulamentum of crystal with it is described
First bearing bed connects, and one end that the second driving crystal is not connected with articulamentum is connected with first bearing bed.
Preferably, also including the second bearing bed, the described 3rd drive one end not being connected with articulamentum of crystal with it is described
Second bearing bed connects, and one end not being connected with articulamentum of the 4th driving crystal is connected with second bearing bed.
Preferably, described first crystal, described second is driven to drive crystal, the described 3rd to drive crystal and the 4 wheel driven
Dynamic crystal is square laminated structure.
Preferably, mutually put down on the side that the first driving crystal and the second driving crystal are connected with the articulamentum
OK, the side that the 3rd driving crystal and the 4th driving crystal are connected with the articulamentum is parallel to each other.
Preferably, described first crystal and described second is driven to drive the link position of crystal and the articulamentum, with institute
State the 3rd driving crystal and the described 4th link position of crystal and the articulamentum is driven in the first surface of the articulamentum
It is mutually orthogonal with the projection in any surface of second surface.
Preferably, the first surface of the articulamentum offers two strip grooves, and the second surface of the articulamentum is opened
It is provided with two strip grooves；Described first drives one end being connected with the articulamentum of crystal, described second to drive crystal
One end, one end being connected with the articulamentum of the 3rd driving crystal and the 4th driving being connected with the articulamentum
Being each attached in different strip grooves from one end of articulamentum connection for crystal, it is non-intersect per groove described in bar.
Preferably, described first crystal, described second is driven to drive crystal, the described 3rd to drive crystal and the 4 wheel driven
The monocrystalline component of dynamic crystal includes：Lead zinc niobate-lead titanates, PMN-PT, lead niobate lead indate-lead-PMN-PT
With at least one in lead magnesio-niobate-lead zirconate titanate.
Preferably, described first crystal, described second is driven to drive crystal, the described 3rd to drive crystal and the 4 wheel driven
The transverse mode of dynamic crystal is d32Pattern.
A kind of distorting lenss, including multiple mirror bodies and multiple described piezo-activators, each described mirror body are located at institute respectively
State the same side of articulamentum, each described mirror body be separately positioned on each piezo-activator it is described first drive crystal and
Described second one end not being connected with articulamentum for driving crystal；Or each described mirror body is separately positioned on each described piezoelectricity and causes
The described 3rd of dynamic device drives crystal and the described 4th to drive one end not being connected with articulamentum of crystal.
A kind of piezo-activator that above-mentioned this utility model is provided, arranges first in the first surface of articulamentum and drives crystal
Drive crystal with second, the second surface of the articulamentum arranges the 3rd and drives crystal and the 4th to drive crystal, first surface and
Two relative sides of the second surface for articulamentum, first drives crystal, second to drive crystal, the 3rd to drive crystal and the 4th
Drive crystal to be connected to the diverse location of articulamentum, and each link position is in the first surface or the second table of the articulamentum
The projection in face is mutually misaligned.That is first crystal and second is driven to drive crystal in one direction；3rd drives crystal
Crystal is driven in the other directions with the 4th.So crystal is driven by applying voltage to the first driving crystal and second, the
One driving crystal and the second driving crystal produce deformation (elongated, shorten), adjust articulamentum inclining in one direction to reach
Rake angle or adjustable height；Crystal is driven by applying voltage to the 3rd driving crystal and the 4th, the 3rd drives crystal and the 4th
Drive crystal to produce deformation, its end face angle of inclination in the other directions or adjustable height are adjusted to reach.Two adjustment
Angle afterwards is delivered to end (the 3rd driving crystal and the 4th driving of the driving crystal of the same side of articulamentum by articulamentum
Crystal formation drive surface) angle adjustment of both direction has just been reached afterwards, simultaneously because driving crystal length in the axial direction
Change, can reach the adjustment of axial length, the i.e. piezo-activator and has reached the control of Three Degree Of Freedom.
A kind of distorting lenss using above-mentioned piezo-activator that above-mentioned this utility model is provided, the distorting lenss will be by deforming
Each little lens unit on mirror is separately mounted to the first driving crystal and second of each piezo-activator and drives the remote of crystal
From the end of articulamentum, or installed in each piezo-activator the 3rd driving crystal and the 4th drive crystal away from articulamentum
End, by be not connected with little lens unit driving crystal end fix.Adjusted by the Three Degree Of Freedom of piezo-activator, energy
The enough independent control carried out to each little eyeglass on three directions, can be reached by the control to each little eyeglass more high-precision
The control of the big goggle with curve surface lens to whole deformation mirror of degree, reduces control difficulty and reduces control sluggishness, increased control
Flexibility ratio processed.
Description of the drawings
In order to be illustrated more clearly that the technical scheme of this utility model embodiment, below will be to using needed for embodiment
Accompanying drawing be briefly described, it will be appreciated that the following drawings illustrate only some embodiments of the present utility model, therefore should not be by
Regard the restriction to scope as, for those of ordinary skill in the art, on the premise of not paying creative work, may be used also
To obtain other related accompanying drawings according to these accompanying drawings.
Fig. 1 is the structural representation of the piezo-activator of the first state that this utility model preferred embodiment is provided；
Fig. 2 is the structural representation of the piezo-activator of the second state that this utility model preferred embodiment is provided；
Fig. 3 is the PZN-5.5%PT d that this utility model preferred embodiment provides the polarization of [011] crystal orientation32Transverse mode
The field-induced strain curve chart of single-crystal wafer；
Fig. 4 is the piezo-activator of the first bearing bed of nothing that this utility model preferred embodiment is provided and the second bearing bed
Structural representation；
Fig. 5 is the distorting lenss structural representation of the first state that this utility model preferred embodiment is provided；
Fig. 6 is the distorting lenss structural representation of the second state that this utility model preferred embodiment is provided.
Reference collects：
Icon：10- piezo-activators；111- first drives crystal；112- second drives crystal；121- the 3rd drives brilliant
Body；122- the 4th drives crystal；300- articulamentums；The first bearing beds of 410-；The second bearing beds of 420-；310- grooves；20- deforms
Mirror；510- mirror bodies.
Specific embodiment
It is to make purpose, technical scheme and the advantage of this utility model embodiment clearer, new below in conjunction with this practicality
Accompanying drawing in type embodiment, is clearly and completely described to the technical scheme in this utility model embodiment, it is clear that retouched
The embodiment stated is a part of embodiment of this utility model, rather than the embodiment of whole.Generally described in accompanying drawing herein and
The component of this utility model embodiment for illustrating can be arranged and be designed with a variety of configurations.
Therefore, the detailed description of embodiment of the present utility model below to providing in the accompanying drawings is not intended to limit requirement
The scope of the present utility model of protection, but it is merely representative of selected embodiment of the present utility model.Based in this utility model
Embodiment, the every other embodiment obtained under the premise of creative work is not made by those of ordinary skill in the art, all
Belong to the scope of this utility model protection.
It should be noted that：Similar label and letter represent similar terms in following accompanying drawing, therefore, once a certain Xiang Yi
It is defined in individual accompanying drawing, then in subsequent accompanying drawing which further need not be defined and is explained.
In description of the present utility model, it should be noted that term " on ", the orientation of the instruction such as D score or position relationship
Be based on orientation shown in the drawings or position relationship, or the utility model product using when the orientation usually put or position
Relation, is for only for ease of description this utility model and simplifies description, rather than indicates or imply that the device or element of indication must
Must have specific orientation, with specific azimuth configuration and operation, therefore it is not intended that to restriction of the present utility model.This
Outward, term " first ", " second ", " the 3rd " etc. are only used for distinguishing description, and it is not intended that indicating or implying relative importance.
In description of the present utility model, in addition it is also necessary to explanation, unless otherwise clearly defined and limited, term " sets
Put ", should be interpreted broadly " installation ", " connection ", for example, it may be fixedly connected, or be detachably connected, or integratedly
Connection；Can be mechanically connected, or electrically connect；Can be joined directly together, it is also possible to be indirectly connected to by intermediary,
It can be the connection of two element internals.For the ordinary skill in the art, above-mentioned art can be understood with concrete condition
Concrete meaning of the language in this utility model.
First embodiment
Refer to Fig. 1, the present embodiment provides a kind of piezo-activator 10, including articulamentum 300, first drive crystal 111,
Second drives crystal the 112, the 3rd to drive crystal the 121, the 4th to drive crystal 122, the first bearing bed 410 and the second bearing bed 420.
Articulamentum 300, drives crystal 111, second to drive crystal 112, the 3rd to drive crystal 121 and for installing first
Four drive crystal 122, and can transmit the angle of adjustment.
Preferably, 300 body shape of articulamentum includes but is not limited to square structure, in addition as it is circular, oval and its
His irregularly shaped all may be used.The articulamentum 300 has two relative surfaces, first surface and second surface.The articulamentum
310 structure of groove can be set on 300, and two of first surface, second surface two strengthens the first drive with this groove 310
Dynamic crystal 111, second drives crystal the 112, the 3rd to drive the stable degree of crystal 121 and the 4th driving crystal 122 and articulamentum 300
(four drive crystal to be respectively embedded into different grooves 310 and be secured to connection), groove 310 can be tied for strip groove 310
Structure, but not limited to this.Arrangement can be the groove 310 (driving the link position of crystal and articulamentum 300), but not limit
In, it is two grooves 310 being arranged in parallel on same surface respectively, and 310 structure of groove and the second table on first surface
The mutually orthogonal arrangement (vertical) of 310 structure of groove in face.
First driving crystal 111, second drives crystal the 112, the 3rd to drive crystal 121 and the 4th driving crystal 122 to be used for
Receive voltage drive, and deform upon (predominantly change length), to drive the device or part of its end connection.
Preferably, the first driving crystal 111 and second drives crystal 112 to be arranged on the first surface of articulamentum 300, and
And installed in different positions.3rd drives crystal 121 and the 4th to drive crystal 122 to be arranged on the second surface of articulamentum 300,
And installed in different positions.Form double-layer structure.First drives crystal 111, second to drive crystal the 112, the 3rd to drive crystalline substance
Body 121 and the 4th drive crystal 122 respectively with the link position of articulamentum 300 in, each link position is in above-mentioned articulamentum 300
First surface or second surface projection it is mutually misaligned.If the first driving crystal 111, second drives crystal the 112, the 3rd to drive
Dynamic crystal 121 and the 4th drives crystal 122 using (not limited to this) when square laminated structure, you can be interpreted as intersecting
Distribution, for example, the mode such as orthogonal and oblique.Connected mode, glue bonding, welding etc., are not construed as limiting.
Preferably, if driving crystal using (single-crystal wafer) during square laminated structure, the chis of this four driving crystal
Very little size can be with identical, i.e., per layer is respectively made up of two single-crystal wafers.When two monocrystalline of each layer receive identical voltage drive,
Its front end face can make axial displacement (axially equivalent to the direction vertical with the surface of articulamentum 300), but when by different voltage
During excitation, two monocrystalline front end faces per side can produce axial direction and tilt displacement (drive surface：3rd drives crystal 121 and the 4th
Crystal 122 is driven to form drive surface in one end of not connected articulamentum 300, drive surface can be driven crystal 121 and the by the 3rd
Four drive crystal 122 to drive there is second direction inclination, and first direction and second direction are different directions；First crystalline substance is driven now
What body 111 and the second driving crystal 112 drove be articulamentum 300).One of which monocrystalline is overlayed on another group, and two groups
The inclination rotating shaft of monocrystalline is orthogonal arrangement, so just can obtain the driving effect of Three Degree Of Freedom.
Fig. 2 is refer to, the state after the actuating of the piezo-activator 10 is the figure shows.It can be seen that when the first driving is brilliant
Body 111, second drives crystal the 112, the 3rd to drive crystal 121 and the 4th to drive crystal 122, receives different voltage drives respectively
When, after there is strain, the first driving crystal 111 is longer than the second driving crystal 112, and the 3rd driving crystal 121 is longer than the 4th
Crystal 122 is driven, finally makes drive surface there occurs tilt variation, reached the purpose for driving.
Preferably, the first driving crystal 111, second drives crystal the 112, the 3rd to drive crystal 121 and the 4th to drive crystalline substance
Body 122 can be, but be not limited to, the lead base ferroelectricity relaxed monocrystalline of [011] crystal orientation polarization.Its component may be, but not limited to, as
Under several, lead zinc niobate-lead titanates (PZN-PT), PMN-PT (PMN-PT), lead niobate lead indate-lead-lead magnesio-niobate-metatitanic acid
Lead (PIN-PMN-PT), lead magnesio-niobate-lead zirconate titanate (PMN-PZT) and its be derivatized to grades.The lead base ferrum of this kind of crystal orientation polarization
Electric relaxed monocrystalline is with the horizontal piezoelectric coefficient d higher than piezoelectric ceramics31And d32.For example, the d of PZN-PT monocrystalline32And d31Numerical value
Respectively-(3200-4000) pC/N and 1100pC/N.This kind of piezoelectric is particularly well-suited to the driving for making high axial strain
Device.
Wherein, when encouraging field intensity to be less than switching electric field and relatively low operating frequency, the lead base relaxation list of [011] crystal orientation polarization
Brilliant transverse mode section shows extremely low strain hysteresis phenomenon.Preferably, in this utility model first driving crystal 111,
Second drives crystal the 112, the 3rd to drive crystal 121 and the 4th to drive crystal 122 be [011] crystal orientation pole using transverse mode
Change, the d that [100] direction drives32Pattern.For example, the such section by made by PZN-5.5%PT monocrystalline has high laterally piezoelectricity
Coefficient (d32≈ -3000-4000pC/N), high transformation stress intensity (the switching electric field E in high switching electric field and [100] directionROFor
0.8kV/mm and transformation stress intensity σROFor 10MPa).As shown in figure 3, the PZN-5.5%PT d of [011] crystal orientation polarization32Laterally
The field-induced strain curve of pattern single-crystal wafer, transverse axis represent electric field intensity, and the longitudinal axis represents strain, as seen from the figure this kind of monocrystalline
Show big strain and (without sluggish state, solid line represents that actual measurement becomes to where the dotted line signifies that ideal without the sluggish phenomenon of substantially strain
Change, but its small difference can be ignored, and very be close to perfect condition).It is such to strain and answer without obvious with big
The monocrystalline for becoming hysteresis phenomenon can be used as the preferred material for making 20 little glasses lens drive device of distorting lenss.
First bearing bed 410 and the second bearing bed 420, install other devices for fixing or being used for, such as little eyeglass.
Preferably, one end of articulamentum 300 is provided with the in the first driving crystal 111 and the second driving crystal 112
One bearing bed 410.One end of articulamentum 300 is provided with second and holds in the 3rd driving crystal 121 and the 4th driving crystal 122
Carrier layer 420.For example, the first bearing bed 410 can be set to firm banking；Second bearing bed 420 is set to into carrying platform,
To install powered device.If it should be noted that without bearing bed, can wherein side driving crystal end face it is direct
It is fixed on other planes or device, the end face of the driving crystal of opposite side is directly fixedly connected with driven object body or device
, as shown in Figure 4.Crystal 111, second is driven to drive crystal the 112, the 3rd to drive crystal on two bearing beds with first
121 and the 4th drive the position of the connection of crystal 122 also arrange groove 310 for connecting.
A kind of piezo-activator 10 that above-mentioned this utility model is provided, arranges first in the first surface of articulamentum 300 and drives
Dynamic crystal 111 and second drives crystal 112, the second surface end of the articulamentum 300 to arrange the 3rd and drive crystal 121 and the 4th
Drive crystal 122, the two relative sides of first surface and second surface for articulamentum 300, first drive crystal 111, the
Two driving crystal the 112, the 3rd drive crystal 121 and the 4th driving crystal 122 is connected to the diverse location of articulamentum 300, and
Each link position is mutually misaligned in the projection of the first surface or second surface of the articulamentum 300.That is first drive
Dynamic crystal 111 and second drives crystal 112 in one direction；3rd drives crystal 121 and the 4th to drive crystal 122 another
On individual direction.So crystal 112 is driven by applying voltage to the first driving crystal 111 and second, first drives 111 He of crystal
Second driving crystal 112 produces deformation (elongated, shorten), adjusts the angle of inclination in one direction of articulamentum 300 to reach
Or adjustable height；Crystal 122 is driven by applying voltage to the 3rd driving crystal 121 and the 4th, the 3rd drives crystal 121 and the
Four drive crystal 122 to produce deformation, adjust its end face angle of inclination in the other directions or adjustable height to reach.Two
Angle after adjustment is delivered to end (the 3rd driving crystal of the driving crystal of the same side of articulamentum 300 by articulamentum 300
121 and the 4th drive surface for being formed of driving crystal 122) just reached the angle adjustment of both direction afterwards, simultaneously because driving brilliant
Body length change in the axial direction, can reach the adjustment of axial length, the i.e. piezo-activator 10 and has reached the control of Three Degree Of Freedom
System.
Second embodiment
Fig. 5 is refer to, the present embodiment provides a kind of distorting lenss 20 of the piezo-activator 10 of application first embodiment.Fig. 5
And Fig. 6 show 20 structural representation of distorting lenss of the piezo-activator 10 of the application first embodiment of the 9x 9 of different conditions
Figure.
Preferably, the distorting lenss 20 include multiple mirror bodies 510 and multiple piezo-activators 10, and each mirror body 510 distinguishes position
In the same side of articulamentum 300, each mirror body 510 is separately positioned on described the first of each piezo-activator 10 and drives crystalline substance
The end face of one end not being connected with articulamentum 300 of body 111 and the second driving crystal 112；Or 510 points of each described mirror body
Be not arranged on each piezo-activator 10 it is described 3rd drive crystal 121 and it is described 4th drive crystal 122 not with
On the end face of one end of the connection of articulamentum 300.
Preferably, each mirror body 510 can be separately mounted to the first bearing bed 410 or the second of multiple piezo-activators 10
On bearing bed 420, can additionally be connected directly between the first driving crystal 111 and second and crystal 112 be driven away from articulamentum 300
End face on, or be connected directly between the 3rd driving crystal 121 and the 4th and drive on end face of the crystal 122 away from articulamentum 300, not
The end face of connection can arrange a bearing bed as fixed layer, or be directly anchored on other devices.Each piezo-activator
10 can be independent control each mirror body 510.Each mirror body 510 as constitutes each little mirror of a complete distorting lenss 20
Piece.
Fig. 6 is refer to, the schematic diagram after distorting lenss 20 are driven by piezo-activator 10 is the figure shows.It can be seen that when the
One drives crystal 111, second to drive crystal the 112, the 3rd to drive crystal 121 and the 4th to drive crystal 122, receives different electricity respectively
When pressure excitation, after there is strain, the first driving crystal 111 is longer than the second driving crystal 112, and the 3rd drives crystal 121
It is longer than the 4th driving crystal 122, finally makes 20 face of whole deformation mirror there occurs tilt variation.Certainly it is every when practical application
Individual piezo-activator 10 is all independent control, so the different change that each powered mirror body 510 may occur.
Because for the distorting lenss 20 of certain size, little lens unit is more, its optics adaptive ability is stronger.Become
In shape mirror 20, the quantity of the little eyeglass of piezoelectricity generally tens is even hundreds of, and these little eyeglasses are required for individually control, so should
Become sluggishness and can dramatically increase its control difficulty, due to this kind of piezo-activator 10 have fast response time, strain it is sluggish it is little,
The advantage such as displacement and dip resolution height, greatly reduces axial direction and the tilt displacement error of single piezoelectric patches, also reduces
The control difficulty of piezoelectric patches in distorting lenss 20.
For example, if above-mentioned little eyeglass is with the PZN-5.5%PT that four chip sizes are 7mm (L) x 4mm (W) x 0.5mm (T)
D32 single-crystal wafers drive, under the excitation of 400V unidirectional voltages, the maximum of its total axial displacement and full reclining angular width difference
For 15 μm and 0.3 degree.
A kind of distorting lenss 20 of the piezo-activator 10 of application first embodiment that the present embodiment is provided, the distorting lenss 20 lead to
Cross the first driving crystal 111 and that each the little lens unit on distorting lenss 20 is separately mounted to each piezo-activator 10
Two ends away from articulamentum 300 for driving crystal 112, or installed in the 3rd driving crystal 121 of each piezo-activator 10
With the 4th end away from articulamentum 300 for driving crystal 122, the end of driving crystal of little lens unit will be not connected with admittedly
It is fixed.Adjusted by the Three Degree Of Freedom of piezo-activator 10, the control each little eyeglass carried out on three directions that can be independent,
The control of the big goggle with curve surface lens to whole deformation mirror 20 of higher precision can be reached by the control to each little eyeglass, is dropped
Low control difficulty and control are sluggish, increased the flexibility ratio of control.
In sum, this utility model is provided a kind of piezo-activator 10 and distorting lenss 20, drive crystal using first
111st, second crystal the 112, the 3rd is driven to drive crystal 121 and the 4th to drive crystal 122, to form two groups of double-layer structures, and
Per group driving crystal Driving plane rotating shaft intersect, with reach after voltage drive drive one of which drive crystal away from
The end face (the oblique displacement of both direction and axial displacement) of articulamentum 300, obtains the driving effect of three degree of freedom, can be with this
The mirror body 510 of distorting lenss 20 is driven to reach multivariant driving effect.
Preferred embodiment of the present utility model is the foregoing is only, this utility model is not limited to, for this
For the technical staff in field, this utility model can have various modifications and variations.It is all it is of the present utility model spirit and principle
Within, any modification, equivalent substitution and improvements made etc. are should be included within protection domain of the present utility model.
Claims (10)
1. a kind of piezo-activator, it is characterised in that include：First drive crystal, second drive crystal, the 3rd drive crystal,
4th drives crystal and articulamentum, the articulamentum to have relative first surface and second surface, and described first drives crystal
One end and it is described second driving crystal one end be connected to the diverse location on the first surface of the articulamentum；It is described
One end of one end of 3rd driving crystal and the 4th driving crystal is connected on the second surface of the articulamentum
Diverse location；The first driving crystal and the second driving crystal being capable of the generation first direction inclinations of drive connection layer；Institute
Stating the 3rd driving crystal and the 4th drives crystal to form drive surface in one end of not connected articulamentum, and the drive surface can be by institute
Stating the 3rd driving crystal and the 4th drives crystal-driven that second direction inclination occurs, and the first direction and the second direction are
Different directions.
2. piezo-activator according to claim 1, it is characterised in that also including the first bearing bed, described first drives
One end not being connected with articulamentum of crystal is connected with first bearing bed, and the second driving crystal is not connected with articulamentum
One end be connected with first bearing bed.
3. piezo-activator according to claim 2, it is characterised in that also including the second bearing bed, the described 3rd drives
One end not being connected with articulamentum of crystal is connected with second bearing bed, and the described 4th drives not connecting with articulamentum for crystal
The one end for connecing is connected with second bearing bed.
4. piezo-activator according to claim 1, it is characterised in that described first drives crystal, described second to drive
Crystal, the 3rd driving crystal and the 4th driving crystal are square laminated structure.
5. piezo-activator according to claim 4, it is characterised in that described first drives crystal and described second to drive
The side that crystal is connected with the articulamentum is parallel to each other, and the described 3rd drives crystal and the described 4th to drive crystal and the connection
The side of layer connection is parallel to each other.
6. piezo-activator according to claim 4, it is characterised in that described first drives crystal and described second to drive
Crystal and the link position of the articulamentum, drive crystal and the described 4th to drive crystal and the articulamentum with the described 3rd
Projection of the link position in any surface of the first surface and second surface of the articulamentum is mutually orthogonal.
7. piezo-activator according to claim 4, it is characterised in that the first surface of the articulamentum offers two
Strip groove, the second surface of the articulamentum offer two strip grooves；It is described first drive crystal with the connection
Layer connection one end, it is described second drive crystal one end be connected with the articulamentum, it is described 3rd driving crystal with institute
The one end and the 4th driving crystal for stating articulamentum connection is each attached to different articles from one end of articulamentum connection
It is in connected in star, non-intersect per groove described in bar.
8. piezo-activator according to claim 1, it is characterised in that described first drives crystal, described second to drive
The monocrystalline component of crystal, the 3rd driving crystal and the 4th driving crystal includes：Lead zinc niobate-lead titanates, magnoniobate
At least one in lead-lead titanates, lead niobate lead indate-lead-PMN-PT and lead magnesio-niobate-lead zirconate titanate.
9. piezo-activator according to claim 1, it is characterised in that described first drives crystal, described second to drive
The transverse mode of crystal, the 3rd driving crystal and the 4th driving crystal is d32Pattern.
10. a kind of distorting lenss, it is characterised in that including the piezoelectricity any one of multiple mirror bodies and multiple claim 1-9
Actuator, respectively positioned at the same side of the articulamentum, each described mirror body is separately positioned on described in each each described mirror body
Described the first of piezo-activator drives crystal and described second to drive one end not being connected with articulamentum of crystal；Or each institute
State mirror body be separately positioned on each piezo-activator it is described 3rd drive crystal and it is described 4th drive crystal not with
One end of articulamentum connection.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201621032963.0U CN206133113U (en) | 2016-08-31 | 2016-08-31 | Piezoelectric actuator and distorting lens |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201621032963.0U CN206133113U (en) | 2016-08-31 | 2016-08-31 | Piezoelectric actuator and distorting lens |
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| CN206133113U true CN206133113U (en) | 2017-04-26 |
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| CN201621032963.0U Withdrawn - After Issue CN206133113U (en) | 2016-08-31 | 2016-08-31 | Piezoelectric actuator and distorting lens |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106199949A (en) * | 2016-08-31 | 2016-12-07 | 北京越音速科技有限公司 | A kind of piezo-activator and distorting lens |
| CN107340593A (en) * | 2017-08-14 | 2017-11-10 | 太仓宏微电子科技有限公司 | A kind of tunable distorting lens of Piezoelectric Driving |
| CN112817145A (en) * | 2021-01-05 | 2021-05-18 | 宁波大学 | Multilayer actuator array driven deformable mirror |
-
2016
- 2016-08-31 CN CN201621032963.0U patent/CN206133113U/en not_active Withdrawn - After Issue
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106199949A (en) * | 2016-08-31 | 2016-12-07 | 北京越音速科技有限公司 | A kind of piezo-activator and distorting lens |
| WO2018041240A1 (en) * | 2016-08-31 | 2018-03-08 | Beijing Supersonic Technology Co., Ltd. | Piezoelectric actuator, deformable mirror and method for manufacturing deformable mirror |
| CN106199949B (en) * | 2016-08-31 | 2018-12-28 | 北京越音速科技有限公司 | A kind of piezoelectric actuator and distorting lens |
| CN107340593A (en) * | 2017-08-14 | 2017-11-10 | 太仓宏微电子科技有限公司 | A kind of tunable distorting lens of Piezoelectric Driving |
| CN112817145A (en) * | 2021-01-05 | 2021-05-18 | 宁波大学 | Multilayer actuator array driven deformable mirror |
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