CN206105614U - A cylindrical grinding anchor clamps for rotatory target - Google Patents
A cylindrical grinding anchor clamps for rotatory target Download PDFInfo
- Publication number
- CN206105614U CN206105614U CN201620794681.8U CN201620794681U CN206105614U CN 206105614 U CN206105614 U CN 206105614U CN 201620794681 U CN201620794681 U CN 201620794681U CN 206105614 U CN206105614 U CN 206105614U
- Authority
- CN
- China
- Prior art keywords
- workpiece
- work piece
- rigid
- baffle
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000006260 foam Substances 0.000 claims abstract description 8
- 239000013077 target material Substances 0.000 claims description 9
- 125000006850 spacer group Chemical group 0.000 claims description 4
- 239000004568 cement Substances 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 4
- 239000000919 ceramic Substances 0.000 description 5
- MRNHPUHPBOKKQT-UHFFFAOYSA-N indium;tin;hydrate Chemical compound O.[In].[Sn] MRNHPUHPBOKKQT-UHFFFAOYSA-N 0.000 description 4
- 238000003754 machining Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Abstract
The utility model discloses a cylindrical grinding anchor clamps for rotatory target, it includes the dabber, the preceding tip and the back tip of dabber do not are equipped with rigid slab and baffle, treat that the work piece of grinding lies in between rigid slab and the baffle, just the work piece with be equipped with rigid foam between the dabber. The work piece with be equipped with a flexible gasket between rigid slab and/or the baffle. The utility model discloses a grinding fixture, through set up between work piece treating the grinding and the dabber with the coaxial rigid foam of dabber not only can play the effect of centring, also can play the support the effect of work piece, and the setting through treating the flexible gasket between grinding work piece and rigid slab and/or the baffle can prevent to bump between work piece and rigid slab and/or the baffle, and then lead to the work piece to collapse the limit falling the angle.
Description
Technical field
The utility model is related to a kind of fixture, and in particular to a kind of cylindricalo grinding for magnetron sputtering rotary target material is pressed from both sides
Tool.
Background technology
Ceramic target, such as ITO (tin indium oxide) target, is one of key material of electronic information field, main to use
In manufacture plate of flat liquid crystal display, touch-screen, thin film transistor (TFT), the transparent electroplax of solar cell and multifunctional glass etc..When
Before, the ITO target shape of main flow is an edition type, i.e. flat target.With the development of economic technology, plated film producer wants to target
The shortcoming for seeking more and more higher, flat target is increasingly presented, and for example, target utilization ratio is only 30% or so, and utilization rate is very low.
Currently, both at home and abroad all in popularization and application ITO rotary target materials, have an advantage in that target can be around fixed bar magnet group
Part rotates, so that 360 ° of target surfaces can be etched uniformly, while sputtered atom can fly to all directions, uniformity is good, splashes
Penetrate area big, replacement operation is convenient, production efficiency is high, target utilization height (＞ 80%).And, for the deposition of part inwall
With unique superiority.However, compared with ceramic flat surface target, rotary target material cylindricalo grinding is increasingly complex.Forming ceramics
After rotary target pipe, how pipe is clamped, for cylindricalo grinding, reach required dimensional requirement, become current
Target manufactures field problem demanding prompt solution.
Utility model content
The purpose of this utility model is to overcome the deficiencies in the prior art, there is provided a kind of simple structure, easy to operate use
In the external grinding fixture of rotary target material.
For achieving the above object, the utility model is employed the following technical solutions：
A kind of clamp for rotary target material, it includes mandrel, and the leading section of the mandrel and rearward end set respectively
There are rigid plate and baffle plate, workpiece to be ground is located between the rigid plate and baffle plate, and the workpiece and the mandrel
Between be provided with rigid foam.
Preferably：The first flexible gasket is provided between the workpiece and the rigid plate.
Preferably：First flexible gasket is plastic spacer.
Preferably：The second flexible gasket is provided between the workpiece and baffle plate.
Preferably：Second flexible gasket is plastic spacer
Preferably：The rigid plate is metallic plate.
Preferably：A securing member is provided with the outside of the rigid plate.
Preferably：The securing member is bolt.
Clamp of the present utility model, by arranging coaxial with the mandrel between workpiece and mandrel to be ground
Rigid foam, not only can play a part of to center, and may also function as supporting the effect of the workpiece, and pass through workpiece to be ground with
The setting of the flexible gasket between rigid plate and/or baffle plate, can prevent from being collided between workpiece and rigid plate and/or baffle plate,
And then cause workpiece chipping arrisdefect.After workpiece installation, it is fixed by adding securing member on the outside of the rigid plate,
There is axial-rotation in grinding process to prevent workpiece.Clamp of the present utility model, processing and fabricating is simple, installs inquiry
It is convenient, can meet product design requirement using the ceramic workpiece of the fixture processing, its appearance and size, concentricity etc..
Description of the drawings
Fig. 1 shows the external grinding fixture for rotary target material described in the utility model.
Specific embodiment
Specific embodiment of the present utility model is described further below in conjunction with the accompanying drawings.
As shown in Figure 1, the clamp for rotary target material described in the utility model, it includes mandrel 6, the core
The rearward end of axle 6 has a baffle plate 61, and the leading section of the mandrel 6 is provided with a rigid plate 2, the preferred metallic plate of the rigid plate 2,
And it is surrounded for the machining area of workpiece 4 and the baffle plate 61 between, the workpiece 4 to be ground is located at the machining area
It is interior, and a rigid foam 3 coaxial with the mandrel 6 is additionally provided between the workpiece 4 and mandrel 6, wherein, it is new in this practicality
In type, the length of the machining area is more than the width of the workpiece 4, and the rigid foam 3 can be provided only on the workpiece 4
Two ends at, it is also possible to the mode for covering all regions between the workpiece 4 and mandrel 6 is arranged.The workpiece 4 is near described firm
Property plate 2 and/or baffle plate 61 end be also respectively provided with one be, for example, plastic spacer flexible gasket 5, i.e. the workpiece 4 with rigidity
The first flexible gasket is provided between plate 2, the second flexible gasket is provided between the workpiece 4 and baffle plate 61, with prevent workpiece 4 with it is firm
Property plate 2 and/or baffle plate 6 collide.Additionally, clamp described in the utility model can also be in the outside of the rigid plate 2
One securing member 1 is set, and such as fastening bolt occurs axial-rotation to prevent ceramic workpiece 4 in grinding process.
The utility model clamp as above, by arranging hard bubble between workpiece 4 and mandrel 6 to be ground
Foam 3, not only can play a part of to center, and may also function as supporting the effect of the workpiece 4, and pass through workpiece to be ground 4 with it is firm
The setting of flexible gasket 5 of the property between plate 2 and baffle plate 61, can prevent from being collided between workpiece 4 and rigid plate 2 and/or baffle plate 61,
And then cause the chipping arrisdefect of workpiece 4.After workpiece installation, carried out admittedly by adding securing member 1 in the outside of the rigid plate 2
It is fixed, there is axial-rotation in grinding process to prevent workpiece 2.
It is only in sum the utility model preferred embodiment, not for limiting practical range of the present utility model.
Equivalence changes and modification that i.e. all contents according to the utility model claim are made, should all belong to skill of the present utility model
Art category.
Claims (6)
1. a kind of external grinding fixture for rotary target material, it is characterised in that：Including mandrel, the leading section of the mandrel is with after
End is respectively equipped with rigid plate and baffle plate, and workpiece to be ground is located between the rigid plate and baffle plate, and the workpiece
Rigid foam is provided between the mandrel；The first flexible gasket is provided between the workpiece and the rigid plate；The workpiece
The second flexible gasket is provided between baffle plate.
2. clamp according to claim 1, it is characterised in that：First flexible gasket is plastic spacer.
3. clamp according to claim 1, it is characterised in that：Second flexible gasket is plastic cement pad.
4. clamp according to claim 1, it is characterised in that：The rigid plate is metallic plate.
5. the clamp according to any one in claim 1-4, it is characterised in that：It is provided with the outside of the rigid plate
One securing member.
6. clamp according to claim 5, it is characterised in that：The securing member is bolt.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620794681.8U CN206105614U (en) | 2016-07-26 | 2016-07-26 | A cylindrical grinding anchor clamps for rotatory target |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620794681.8U CN206105614U (en) | 2016-07-26 | 2016-07-26 | A cylindrical grinding anchor clamps for rotatory target |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206105614U true CN206105614U (en) | 2017-04-19 |
Family
ID=58511787
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620794681.8U Expired - Fee Related CN206105614U (en) | 2016-07-26 | 2016-07-26 | A cylindrical grinding anchor clamps for rotatory target |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206105614U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109093418A (en) * | 2017-06-21 | 2018-12-28 | 宁波江丰电子材料股份有限公司 | Clamping tool for machine work and its application method |
| CN109590824A (en) * | 2019-01-26 | 2019-04-09 | 渤海大学 | A kind of cylindrical polishing equipment for high-purity copper rotating target |
-
2016
- 2016-07-26 CN CN201620794681.8U patent/CN206105614U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109093418A (en) * | 2017-06-21 | 2018-12-28 | 宁波江丰电子材料股份有限公司 | Clamping tool for machine work and its application method |
| CN109590824A (en) * | 2019-01-26 | 2019-04-09 | 渤海大学 | A kind of cylindrical polishing equipment for high-purity copper rotating target |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200820 Address after: No. 187, Yanchang Road, Yanjiao Development Zone, Sanhe City, Langfang City, Hebei Province Patentee after: YEKE METAL Co.,Ltd. Address before: 101100, Beijing, Tongzhou District Economic Development Zone, five beautiful East Street 06 Patentee before: BEIJING YEKE NANO TECH Co.,Ltd. |
|
| TR01 | Transfer of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170419 Termination date: 20210726 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |