CN206105146U - Laser precision finishing light path - Google Patents
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- CN206105146U CN206105146U CN201621062617.7U CN201621062617U CN206105146U CN 206105146 U CN206105146 U CN 206105146U CN 201621062617 U CN201621062617 U CN 201621062617U CN 206105146 U CN206105146 U CN 206105146U
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- 230000003287 optical effect Effects 0.000 claims description 18
- 238000003754 machining Methods 0.000 claims description 10
- 239000000463 material Substances 0.000 description 15
- 238000000034 method Methods 0.000 description 13
- 230000008569 process Effects 0.000 description 12
- 230000000694 effects Effects 0.000 description 8
- 239000011521 glass Substances 0.000 description 6
- 239000000919 ceramic Substances 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052594 sapphire Inorganic materials 0.000 description 4
- 239000010980 sapphire Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 2
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- 230000003760 hair shine Effects 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
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- 239000002699 waste material Substances 0.000 description 1
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Abstract
The utility model provides a laser precision finishing light path, the light path includes: a housing. The laser instrument is fixed in the primary importance in the casing, first adjusting mount is fixed in one side of laser instrument, installs first near -infrared laser high reflective mirror, a green laser high reflective mirror and first ultraviolet laser high reflective mirror on the first alignment jig in proper order, the the second adjustment frame is fixed in the one end of first adjusting mount, installs near -infrared laser alignment beam expanding lens, green laser collimation beam expanding lens, ultraviolet laser alignment beam expanding lens on the the second adjustment frame in proper order, the third adjusting mount is fixed in second near -infrared laser high reflective mirror, the 2nd green laser high reflective mirror and second ultraviolet laser high reflective mirror are installed in proper order to the one end of the second adjustment frame on the the second adjustment frame, the fourth adjusting mount is fixed in one side of third adjusting mount, install the high reflective mirror on the fourth adjusting mount, laser head position in the one end of high reflective mirror.
Description
Technical Field
The utility model belongs to the technical field of laser beam machining, especially, relate to a laser precision finishing light path.
Background
Laser processing is carried out by focusing the energy of light through a lens to achieve high energy density at a focus and relying on the photothermal effect. The method has the advantages of no need of tools in the processing process, high processing speed and small surface deformation, and can carry out various processing on the material, such as punching, cutting, scribing, welding, heat treatment and the like. Compared with the traditional processing technology, the laser processing technology has the advantages of less material waste, obvious cost effect in large-scale production, strong adaptability to processing objects and the like, thereby being widely applied to various industries.
The laser processing light path in the prior art is limited by the wavelength of the emitted laser, only specific types of materials can be processed, and the processing mode is single; if the wavelength of the emitted laser needs to be changed, almost all optical elements including the laser need to be changed, the processing process is complicated, and the selectivity of more processing materials cannot be conveniently provided for users.
Based on this, the utility model provides a laser precision finishing light path to solve the above-mentioned problem among the prior art.
SUMMERY OF THE UTILITY MODEL
Problem to prior art existence, the embodiment of the utility model provides a laser precision finishing light path for the laser processing light path of solving among the prior art can not satisfy the processing of different grade type material, and then can not provide the technical problem of more processing methods for the user.
The utility model provides a laser precision finishing light path, the light path includes:
a laser secured at a first location within the housing;
the first adjusting frame is fixed on one side of the laser, and a first near-infrared laser high-reflection mirror, a first green laser high-reflection mirror and a first ultraviolet laser high-reflection mirror are sequentially arranged on the first adjusting frame;
the second adjusting frame is fixed at one end of the first adjusting frame, and a near-infrared laser collimation and beam expansion lens, a green laser collimation and beam expansion lens and an ultraviolet laser collimation and beam expansion lens are sequentially arranged on the second adjusting frame;
the third adjusting frame is fixed at one end of the second adjusting frame, and a second near-infrared laser high-reflection mirror, a second green laser high-reflection mirror and a second ultraviolet laser high-reflection mirror are sequentially arranged on the third adjusting frame;
the fourth adjusting frame is fixed on one side of the third adjusting frame, and a high-reflection mirror is installed on the fourth adjusting frame;
the laser head is located at one end of the high-reflection mirror.
In the above scheme, the first near-infrared laser high-reflection mirror, the near-infrared laser collimation beam expanding mirror and the second near-infrared laser high-reflection mirror are near-infrared laser mirror groups.
In the above scheme, the first green laser high-reflection mirror, the green laser collimation beam expanding mirror and the second green laser high-reflection mirror are a green laser mirror group.
In the above scheme, the first ultraviolet laser high-reflection mirror, the ultraviolet laser collimation beam expanding mirror and the second ultraviolet laser high-reflection mirror are ultraviolet laser mirror groups.
In the above scheme, the characteristic wavelength of the high-reflection mirror and the laser head is consistent with the emission wavelength of the laser.
In the above aspect, the laser includes: a near infrared laser, a green laser, or an ultraviolet laser.
In the scheme, the wavelength of the near-infrared laser is 1064nm or 1030 nm.
In the above scheme, the wavelength of the green laser is 532nm or 515 nm.
In the scheme, the wavelength of the ultraviolet laser is 355nm, 343nm or 266 nm.
In the above scheme, the laser head is matched with an objective lens, a lens or a galvanometer.
The utility model provides a laser precision finishing light path, the light path includes: a housing; a laser secured at a first location within the housing; the first adjusting frame is fixed on one side of the laser, and a first near-infrared laser high-reflection mirror, a first green laser high-reflection mirror and a first ultraviolet laser high-reflection mirror are sequentially arranged on the first adjusting frame; the second adjusting frame is fixed at one end of the first adjusting frame, and a near-infrared laser collimation and beam expansion lens, a green laser collimation and beam expansion lens and an ultraviolet laser collimation and beam expansion lens are sequentially arranged on the second adjusting frame; the third adjusting frame is fixed at one end of the second adjusting frame, and a second near-infrared laser high-reflection mirror, a second green laser high-reflection mirror and a second ultraviolet laser high-reflection mirror are sequentially arranged on the second adjusting frame; the fourth adjusting frame is fixed on one side of the third adjusting frame, and a high-reflection mirror is installed on the fourth adjusting frame; the laser head is located at one end of the high-reflection mirror. Therefore, different laser lens groups can be selected according to the characteristics of different materials, precision machining can be realized only by replacing the laser, and the light path is easy to adjust; and the laser wavelength of the laser can be switched according to the actual requirement, so that more selectivity is provided for users.
Drawings
Fig. 1 is a schematic view of an overall structure of a precision laser processing optical path according to an embodiment of the present invention;
fig. 2 is a schematic overall structure diagram of another precision laser processing optical path provided by the second embodiment of the present invention.
Description of reference numerals:
1-a laser; 2-a first near-infrared laser high-reflection mirror; 3-a first green laser high-reflection mirror; 4-a first ultraviolet laser high-reflection mirror; 5-near infrared laser collimation beam expander; 6-green laser collimation beam expander; 7-ultraviolet laser collimation beam expander; 8-a second near-infrared laser high-reflection mirror; 9-a second green laser high-reflection mirror; 9-a second ultraviolet laser high-reflection mirror; 11-high reflection mirror; 12-a laser head; 13-a third near-infrared laser high-reflection mirror; 14-a third green laser high-reflection mirror; 15-third ultraviolet laser high reflection mirror.
Detailed Description
In order to solve the laser beam machining light path among the prior art and can not satisfy the processing of different grade type material, and then can not provide the technical problem of more processing modes for the user, the utility model provides a laser precision finishing light path, the light path includes: a housing; a laser secured at a first location within the housing; the first adjusting frame is fixed on one side of the laser, and a first near-infrared laser high-reflection mirror, a first green laser high-reflection mirror and a first ultraviolet laser high-reflection mirror are sequentially arranged on the first adjusting frame; the second adjusting frame is fixed at one end of the first adjusting frame, and a near-infrared laser collimation and beam expansion lens, a green laser collimation and beam expansion lens and an ultraviolet laser collimation and beam expansion lens are sequentially arranged on the second adjusting frame; the third adjusting frame is fixed at one end of the second adjusting frame, and a second near-infrared laser high-reflection mirror, a second green laser high-reflection mirror and a second ultraviolet laser high-reflection mirror are sequentially arranged on the second adjusting frame; the fourth adjusting frame is fixed on one side of the third adjusting frame, and a high-reflection mirror is installed on the fourth adjusting frame; the laser head is located at one end of the high-reflection mirror.
The technical solution of the present invention is further described in detail with reference to the accompanying drawings and specific embodiments.
Example one
The present embodiment provides a laser precision machining optical path, as shown in fig. 1, the optical path includes: a housing; the laser device comprises a laser 1, a first near-infrared laser high-reflection mirror 2, a first green laser high-reflection mirror 3, a first ultraviolet laser high-reflection mirror 4, a near-infrared laser collimation and beam expansion mirror 5, a green laser collimation and beam expansion mirror 6, an ultraviolet laser collimation and beam expansion mirror 7, a second near-infrared laser high-reflection mirror 8, a second green laser high-reflection mirror 9, a second ultraviolet laser high-reflection mirror 10, a high-reflection mirror 11 and a laser head 12; wherein,
the laser 1 is fixed at a first position in the shell, and the first position is a position in the shell where the laser is placed; the laser may include: an infrared laser, a green laser, or an ultraviolet laser. In practical application, only one laser 1 is installed for use, and when the processing material needs to be replaced, the corresponding laser 1 is replaced.
High reflection mirror 2 of first near-infrared laser, high reflection mirror 3 of first green laser and high reflection mirror 4 of first ultraviolet laser are installed in proper order on the first alignment jig, first alignment jig is fixed in one side of laser instrument 1, the light beam of the output of laser instrument 1 shines can penetrate extremely on high reflection mirror 2 of first near-infrared laser, high reflection mirror 3 of first green laser and the high reflection mirror 4 of first ultraviolet laser.
Near-infrared laser collimation beam expander lens 5, green laser collimation beam expander lens 6, ultraviolet laser collimation beam expander lens 7 are installed in proper order on the second alignment jig, the second alignment jig is fixed in the one end of first alignment jig, can be with the light beam reflection to corresponding near-infrared laser collimation beam expander lens 5, green laser collimation beam expander lens 6, ultraviolet laser collimation beam expander lens 7 on first near-infrared laser high reflection mirror 2, first green laser high reflection mirror 3 and the first ultraviolet laser high reflection mirror 4. The near-infrared laser collimation and beam expansion lens 5, the green laser collimation and beam expansion lens 6 and the ultraviolet laser collimation and beam expansion lens 7 respectively comprise a set of Galileo beam expansion telescope structure capable of adjusting the focus position of a negative lens, the Galileo beam expansion telescope structure is adjusted by a voice coil motor, the dynamic focusing adjustment range is +/-100 mu m, and the beam expansion multiplying power is 5 x.
And a second near-infrared laser high-reflection mirror 8, a second green laser high-reflection mirror 9 and a second ultraviolet laser high-reflection mirror 10 are sequentially arranged on a third adjusting frame, and the third adjusting frame is fixed at one end of the second adjusting frame.
And a high-reflection mirror 11 is arranged on the fourth adjusting frame, and the fourth adjusting frame is fixed on one side of the third adjusting frame and used for reflecting the light beam to the laser head 12. Laser head 12 is located the one end of high reflection mirror 11 can install on the one-dimensional linear electric motor that has raising and lowering functions, just laser head 12 optional join in marriage objective, lens or galvanometer.
Wherein, the focal length of the lens is 10-50 mm, and the focal length of the vibrating mirror is 50-200 mm. The characteristic wavelength of the high-reflection mirror 11 and the laser head 12 is consistent with the emission wavelength of the laser 1. The laser 1 emits laser pulses with a width of nanosecond (10)-9s) or picosecond (10)-12s) or femtosecond (10)-15s)。
Here, the first near-infrared laser high-reflection mirror 2, the near-infrared laser collimation and beam expansion mirror 5, and the second near-infrared laser high-reflection mirror 8 are a near-infrared laser mirror group. The wavelength of the near-infrared laser is 1064nm or 1030 nm.
The first green laser high reflection mirror 3, the green laser collimation and beam expanding mirror 6 and the second green laser high reflection mirror 9 are a green laser mirror group. The wavelength of the green laser is 532nm or 515 nm.
The first ultraviolet laser high reflecting mirror 4, the ultraviolet laser collimation beam expanding mirror 7 and the second ultraviolet laser high reflecting mirror 10 are ultraviolet laser mirror groups. The wavelength of the ultraviolet laser is 355nm, 343nm or 266 nm.
In practical application, when the processing material is silicon wafer, sapphire wafer, ceramic substrate, ITO film and FPC flexible board, a near-infrared laser set with a wavelength of 1064nm may be selected, and correspondingly, the laser 1 is a near-infrared laser. In the working process, the selected light paths are the first near-infrared laser high-reflection mirror 2, the near-infrared laser collimation beam expanding mirror 5 and the second near-infrared laser high-reflection mirror 8; laser instrument 1 transmission infrared laser beam, the light beam through first near-infrared laser high reflection mirror 2 near-infrared laser collimation beam expanding lens 5 reaches high reflection mirror 11 behind the second near-infrared laser high reflection mirror 8, returns mirror 11 conveying to laser head 12 through high, is equipped with lens on the laser head 12, can come silicon wafer, sapphire wafer, ceramic substrate, ITO film and FPC flexonics with the light and heat effect and process.
When the processing material is glass, plastic and ceramic substrate, a green laser group with a wavelength of 532nm or an ultraviolet laser group with a wavelength of 343nm can be selected, and correspondingly, the laser 1 is a green laser or an ultraviolet laser. In the working process, the selected light path is a green laser lens group or an ultraviolet laser lens group; the laser 1 may be a green laser or an ultraviolet laser.
In the course of the work, green laser instrument launches green laser beam, and the light beam warp first green laser height reflects mirror 3 green laser collimation beam expanding lens 6 reaches height reflects mirror 11 behind the second green laser height reflects mirror 9, returns mirror 11 conveying to laser head 12 through the height in, is equipped with lens on the laser head 12, can come to process glass with the light and heat effect.
Or, ultraviolet laser launches the ultraviolet laser beam, and the light beam warp first ultraviolet laser high reflection mirror 4 ultraviolet laser collimation beam expanding lens 7 reaches high reflection mirror 11 behind the high reflection mirror 10 of second ultraviolet laser, returns mirror 11 through the height and conveys to laser head 12 in, be equipped with lens on the laser head 12, can come to process glass with the light and heat effect.
According to the laser precision machining light path provided by the embodiment, different laser lens groups can be selected according to the characteristics of different materials, precision machining can be realized only by replacing a laser, and the light path is easy to adjust; and the laser wavelength of the laser can be switched according to actual needs, so that more selectivity is provided for users, and the processing cost is reduced.
Example two
Corresponding to the first embodiment, the present embodiment further provides a laser precision machining optical path, based on the optical path in the first embodiment, aiming at the output laser with different wave bands, in order to adjust the high-reflection mirror with a suitable wave band to the coaxial position of the output laser by adjusting the position of the adjusting frame conveniently. The processing optical path in this embodiment further includes a set of high-reflection mirrors, see fig. 2, including: a third near-infrared laser high-reflection mirror 13, a third green laser high-reflection mirror 14 and a third ultraviolet laser high-reflection mirror 15; wherein,
the third near-infrared laser high-reflection mirror 13, the third green laser high-reflection mirror 14 and the third ultraviolet laser high-reflection mirror 15 are arranged on a fifth adjusting frame, and the fifth adjusting frame is located between the first adjusting frame and the second adjusting frame.
Specifically, the laser 1 is fixed at a first position in the housing, and compared with the first embodiment, the light emitting direction of the laser 1 has a 90-degree difference0. The first position is a position in which a laser is placed in the shell; the laser may include: an infrared laser, a green laser, or an ultraviolet laser. In practical application, only one laser 1 is installed for use, and when the processing material needs to be replaced, the corresponding laser 1 is replaced.
High reflection mirror 2 of first near-infrared laser, high reflection mirror 3 of first green laser and high reflection mirror 4 of first ultraviolet laser are installed in proper order on the first alignment jig, first alignment jig is fixed in one side of laser instrument 1, the light beam of the output of laser instrument 1 shines can penetrate extremely on high reflection mirror 2 of first near-infrared laser, high reflection mirror 3 of first green laser and the high reflection mirror 4 of first ultraviolet laser.
And the fifth adjusting frame is fixed on one side of the second adjusting frame, and the third near-infrared laser high-reflection mirror 13, the third green laser high-reflection mirror 14 and the third ultraviolet laser high-reflection mirror 15 are sequentially arranged on the fifth adjusting frame.
Near-infrared laser collimation beam expander lens 5, green laser collimation beam expander lens 6, ultraviolet laser collimation beam expander lens 7 are installed in proper order on the second alignment jig, the second alignment jig is fixed in the one end of fifth alignment jig, can be with the light beam reflection to corresponding near-infrared laser collimation beam expander lens 5, green laser collimation beam expander lens 6, ultraviolet laser collimation beam expander lens 7 on third near-infrared laser high reflection mirror 13, third green laser high reflection mirror 14 and the third ultraviolet laser high reflection mirror 15. The near-infrared laser collimation and beam expansion lens 5, the green laser collimation and beam expansion lens 6 and the ultraviolet laser collimation and beam expansion lens 7 respectively comprise a set of Galileo beam expansion telescope structure capable of adjusting the focus position of a negative lens, the Galileo beam expansion telescope structure is adjusted by a voice coil motor, the dynamic focusing adjustment range is +/-100 mu m, and the beam expansion multiplying power is 5 x.
And a second near-infrared laser high-reflection mirror 8, a second green laser high-reflection mirror 9 and a second ultraviolet laser high-reflection mirror 10 are sequentially arranged on a third adjusting frame, and the third adjusting frame is fixed at one end of the second adjusting frame.
And a high-reflection mirror 11 is arranged on the fourth adjusting frame, and the fourth adjusting frame is fixed on one side of the third adjusting frame and used for reflecting the light beam to the laser head 12. Laser head 12 is located the one end of high reflection mirror 11 can install on the one-dimensional linear electric motor that has raising and lowering functions, just laser head 12 optional join in marriage objective, lens or galvanometer. Wherein, the focal length of the lens is 10-50 mm, and the focal length of the vibrating mirror is 50-200 mm. The characteristic wavelength of the high-reflection mirror 11 and the laser head 12 is consistent with the emission wavelength of the laser 1. The laser 1 emits laser pulses with a width of nanosecond (10)-9s) or picosecond (10)-12s) or femtosecond (10)-15s)。
Here, the first near-infrared laser high-reflection mirror 2, the third near-infrared laser high-reflection mirror 13, the near-infrared laser collimation and beam expansion mirror 5, and the second near-infrared laser high-reflection mirror 8 are near-infrared laser mirror groups. The wavelength of the near-infrared laser is 1064nm or 1030 nm.
The first green laser high reflection mirror 3, the third green laser high reflection mirror 14, the green laser collimation and beam expanding mirror 6 and the second green laser high reflection mirror 9 are a green laser mirror group. The wavelength of the green laser is 532nm or 515 nm.
The first ultraviolet laser high reflecting mirror 4, the third ultraviolet laser high reflecting mirror 15, the ultraviolet laser collimation beam expanding mirror 7 and the second ultraviolet laser high reflecting mirror 10 are ultraviolet laser mirror groups. The wavelength of the ultraviolet laser is 355nm, 343nm or 266 nm.
In practical application, when the processing material is silicon wafer, sapphire wafer, ceramic substrate, ITO film and FPC flexible board, a near-infrared laser set with a wavelength of 1064nm may be selected, and correspondingly, the laser 1 is a near-infrared laser. In the working process, the selected light paths are the first near-infrared laser high-reflection mirror 2, the third near-infrared laser high-reflection mirror 13, the near-infrared laser collimation beam expanding mirror 5 and the second near-infrared laser high-reflection mirror 8; laser instrument 1 transmission infrared laser beam, the light beam through first near-infrared laser high reflection mirror 2 near-infrared laser collimation beam expanding lens 5 reaches high reflection mirror 11 behind the second near-infrared laser high reflection mirror 8, returns mirror 11 conveying to laser head 12 through high, is equipped with lens on the laser head 12, can come silicon wafer, sapphire wafer, ceramic substrate, ITO film and FPC flexonics with the light and heat effect and process.
When the processing material is glass, a near-infrared laser group with a wavelength of 532nm or an ultraviolet laser group with a wavelength of 343nm can be selected, and correspondingly, the laser 1 is a near-infrared laser or an ultraviolet laser. In the working process, the selected light path is a green laser lens group or an ultraviolet laser lens group; the laser 1 may be a green laser or an ultraviolet laser.
In the course of the work, green laser launches green laser beam, and the light beam warp high reflection mirror 3 of first green laser, the high reflection mirror 14 of third green laser collimation beam expanding lens 6 reaches high reflection mirror 11 is reachd behind the high reflection mirror 9 of second green laser, returns mirror 11 through high and conveys to laser head 12 in, is equipped with lens on the laser head 12, can come to process glass with the photothermal effect.
Or, ultraviolet laser launches the ultraviolet laser beam, and the light beam warp first ultraviolet laser high reflection mirror 4, the high reflection mirror 15 of third ultraviolet laser beam collimation beam expanding lens 7 reaches high reflection mirror 11 behind the high reflection mirror 10 of second ultraviolet laser, returns mirror 11 conveying to laser head 12 through high in, is equipped with lens on the laser head 12, can come to process glass with the light and heat effect.
According to the laser precision machining light path provided by the embodiment, different laser lens groups can be selected according to the characteristics of different materials, precision machining can be realized only by replacing a laser, and the light path is easy to adjust; and the laser wavelength of the laser can be switched according to actual needs, so that more selectivity is provided for users, and the processing cost is reduced.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and should not be taken as limiting the scope of the present invention, and any modifications, equivalent replacements, and improvements made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (10)
1. A laser precision machining optical path, comprising:
a laser secured at a first location within the housing;
the first adjusting frame is fixed on one side of the laser, and a first near-infrared laser high-reflection mirror, a first green laser high-reflection mirror and a first ultraviolet laser high-reflection mirror are sequentially arranged on the first adjusting frame;
the second adjusting frame is fixed at one end of the first adjusting frame, and a near-infrared laser collimation and beam expansion lens, a green laser collimation and beam expansion lens and an ultraviolet laser collimation and beam expansion lens are sequentially arranged on the second adjusting frame;
the third adjusting frame is fixed at one end of the second adjusting frame, and a second near-infrared laser high-reflection mirror, a second green laser high-reflection mirror and a second ultraviolet laser high-reflection mirror are sequentially arranged on the third adjusting frame;
the fourth adjusting frame is fixed on one side of the third adjusting frame, and a high-reflection mirror is installed on the fourth adjusting frame;
the laser head is located at one end of the high-reflection mirror.
2. The optical circuit of claim 1, wherein the first near-infrared laser high-reflection mirror, the near-infrared laser collimating and beam expanding mirror and the second near-infrared laser high-reflection mirror are a near-infrared laser mirror group.
3. The optical circuit of claim 1, wherein the first green laser high-reflection mirror, the green laser collimation and beam-expanding mirror and the second green laser high-reflection mirror are a green laser mirror group.
4. The optical circuit of claim 1, wherein the first uv laser high-reflection mirror, the uv laser collimating and beam expanding mirror, and the second uv laser high-reflection mirror are uv laser mirror groups.
5. The optical circuit of claim 1 wherein the characteristic wavelength of the high-reflection mirror and the laser head is coincident with the emission wavelength of the laser.
6. The optical circuit of claim 1, wherein the laser comprises: a near infrared laser, a green laser, or an ultraviolet laser.
7. The optical circuit of claim 6, wherein the near-infrared laser has a wavelength of 1064nm or 1030 nm.
8. The optical circuit according to claim 6, wherein the wavelength of the green laser light is 532nm or 515 nm.
9. The optical circuit of claim 6, wherein the ultraviolet laser has a wavelength of 355nm, 343nm, or 266 nm.
10. The optical circuit of claim 1, wherein the laser head is configured with an objective lens, a lens, or a galvanometer.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201621062617.7U CN206105146U (en) | 2016-09-19 | 2016-09-19 | Laser precision finishing light path |
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| CN201621062617.7U CN206105146U (en) | 2016-09-19 | 2016-09-19 | Laser precision finishing light path |
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| CN206105146U true CN206105146U (en) | 2017-04-19 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109227969A (en) * | 2018-10-18 | 2019-01-18 | 合肥欧克斯新型建材有限公司 | A kind of decoration cutting marble grinding device |
| CN109940292A (en) * | 2019-05-10 | 2019-06-28 | 厦门柯尔自动化设备有限公司 | LCD panel line laser cutting machine |
| CN110026694A (en) * | 2019-05-07 | 2019-07-19 | 英诺激光科技股份有限公司 | Two-beam double-sided laser system of processing and method |
| CN111515526A (en) * | 2020-05-15 | 2020-08-11 | 广东正业科技股份有限公司 | Multi-beam processing device and method |
| CN114918549A (en) * | 2022-05-27 | 2022-08-19 | 深圳泰德半导体装备有限公司 | Green light marking structure and laser marking device |
-
2016
- 2016-09-19 CN CN201621062617.7U patent/CN206105146U/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109227969A (en) * | 2018-10-18 | 2019-01-18 | 合肥欧克斯新型建材有限公司 | A kind of decoration cutting marble grinding device |
| CN110026694A (en) * | 2019-05-07 | 2019-07-19 | 英诺激光科技股份有限公司 | Two-beam double-sided laser system of processing and method |
| CN109940292A (en) * | 2019-05-10 | 2019-06-28 | 厦门柯尔自动化设备有限公司 | LCD panel line laser cutting machine |
| CN109940292B (en) * | 2019-05-10 | 2024-07-02 | 厦门柯尔自动化设备有限公司 | Laser cutting machine for liquid crystal panel circuit |
| CN111515526A (en) * | 2020-05-15 | 2020-08-11 | 广东正业科技股份有限公司 | Multi-beam processing device and method |
| CN114918549A (en) * | 2022-05-27 | 2022-08-19 | 深圳泰德半导体装备有限公司 | Green light marking structure and laser marking device |
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