CN205980036U - Dual cycle atmospheric control system - Google Patents
Dual cycle atmospheric control system Download PDFInfo
- Publication number
- CN205980036U CN205980036U CN201620958945.9U CN201620958945U CN205980036U CN 205980036 U CN205980036 U CN 205980036U CN 201620958945 U CN201620958945 U CN 201620958945U CN 205980036 U CN205980036 U CN 205980036U
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- Prior art keywords
- control system
- cleaning shop
- humidifier
- fresh air
- coil pipe
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- 230000009977 dual effect Effects 0.000 title abstract 3
- 238000004140 cleaning Methods 0.000 claims abstract description 49
- 238000000746 purification Methods 0.000 claims abstract description 26
- 238000000034 method Methods 0.000 claims abstract description 17
- 230000008569 process Effects 0.000 claims abstract description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 40
- 238000001914 filtration Methods 0.000 claims description 36
- 239000011229 interlayer Substances 0.000 claims description 35
- 238000010438 heat treatment Methods 0.000 claims description 16
- 238000005406 washing Methods 0.000 claims description 6
- 230000000977 initiatory effect Effects 0.000 claims description 4
- 238000012545 processing Methods 0.000 claims description 4
- 230000010354 integration Effects 0.000 claims description 3
- 238000005057 refrigeration Methods 0.000 claims description 3
- 239000003595 mist Substances 0.000 abstract 1
- 238000001816 cooling Methods 0.000 description 10
- 230000009471 action Effects 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 4
- 239000007921 spray Substances 0.000 description 4
- 230000003749 cleanliness Effects 0.000 description 3
- 238000007791 dehumidification Methods 0.000 description 3
- 238000003303 reheating Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000005520 electrodynamics Effects 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 244000061176 Nicotiana tabacum Species 0.000 description 1
- 235000002637 Nicotiana tabacum Nutrition 0.000 description 1
- 238000004378 air conditioning Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000005201 scrubbing Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000001932 seasonal effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
- 238000009941 weaving Methods 0.000 description 1
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- Air Conditioning Control Device (AREA)
Abstract
The utility model belongs to the technical field of control, a dual cycle atmospheric control system is provided, it is interior including a plurality of cleaning shops to purify the factory building, is just purifying the factory building top and is including last intermediate layer, including fresh air unit, a plurality of fan filter unit and a plurality of collecting main dish among the dual cycle atmospheric control system, wherein, the fresh air unit setting purify the factory building outside, with purify the factory building on the intermediate layer is connected, fan filter unit sets up in purifying the factory building top, locate the intermediate layer lower part, the collecting main coil set up outside the cleaning shop technological intermediate layer top, with the purification factory building on the intermediate layer be connected, the intermediate layer is sent into after handling to the fresh air unit to the new trend in, return air in the cleaning shop dry pan pipe on through technological intermediate layer gets into to be gone up in the intermediate layer and mixes with the new trend after handling, and in the reentrant cleaning shop of mist process fan filter unit, this system accuracy is higher, can reach 0.5 DEG C temperature, humidity 3%RH.
Description
Technical field
The invention belongs to control technology field, more particularly, to a kind of Two-way Cycle temperature and humidity control system.
Background technology
With the fast development of IC (Integrated Circuit, integrated circuit) circuit industry, integrated circuit integrated
Degree steps up, and the requirement of industry that mask is made a plate is all the more strict.The link of impact mask mask-making technology is more, except equipment originally
The technological level of body needs to reach beyond production necessary requirement, and Temperature and Humidity Control becomes the key factor determining technological level.
Purification workshop Temperature and Humidity Control field was rapidly developed in recent years, and air conditioning system make constantly changes, control
System is theoretical and method is constantly brought forth new ideas.The Temperature and Humidity Control of the purification workshop of mask industry compares general electron trade purification workshop
There are strict requirements, need the accurate reference value controlling humiture, and limit fluctuation range on its basis.
The conventional pattern of semiconductor integrated circuit industry is at present：Fresh air handling units (Make-up Air Unit, abbreviation MAU)
+ circulating fan (Recycled Air Handling Unit, abbreviation RCU)+high efficiency particulate air filter (High Efficiency
Particulate Air Filter, abbreviation HEPA).Wherein, outdoor air-flow is through MAU, coarse filtration, heating, cooling, add
The wet and mode such as dry is sent to purification workshop upper interlayer (plenum chamber) after being processed, and the return air in room presss from both sides also by return air simultaneously
Road enters plenum chamber, return air mix with fresh air after feeding RCU, mixed gas make a gift to someone end after the cold-heat treatment of RCU unit
HEPA air port.The humidity of this system is adjusted by RCU by MAU control, temperature.But, because of indoor occupant quantity, equipment heating amount etc.
It is larger that factor leads to the humiture of the air-flow of return air to fluctuate, and causes the Temperature and Humidity Control precision of mixed ventilation relatively low, typically such
Type system control accuracy is：Temperature ± 1～± 2；Humidity ± 5%RH～± 10%RH, and the air quantity of this system is larger, equipment accounts for
Ground and power consumption are larger, and operating cost is high.
Content of the invention
For the problems referred to above, the present invention is intended to provide a kind of Two-way Cycle temperature and humidity control system, realize purification workshop interior temperature
Humidity is more accurately controlled.
The technical scheme that the present invention provides is as follows：
A kind of Two-way Cycle temperature and humidity control system, includes multiple cleaning shops in purification workshop, and at purification workshop top
Including upper interlayer；Described Two-way Cycle temperature and humidity control system includes Fresh air handling units, multiple blower fan filtering unit and multiple dry
Pipe dish, wherein, Fresh air handling units are arranged on and are connected with purification workshop upper interlayer outside purification workshop, and blower fan filtering unit is arranged at
Purification workshop top, located at upper interlayer bottom, main disk is arranged at and presss from both sides on interlayer top and purification workshop outside cleaning shop
Layer connects；
Fresh air handling units are sent in upper interlayer after fresh air is processed, and the return air in cleaning shop passes through in interlayer
Dry coil pipe enter upper interlayer in and with process after fresh air mixed, mixed gas enter back into through blower fan filtering unit only
Change in workshop.
It is further preferred that described Fresh air handling units include：Described Fresh air handling units include：Fresh air section, initial effect filtering section,
First medium efficiency filtration section, preheating section, precooling zone, washing humidifier section, cold section again, again hot arc, fan section, the second medium efficiency filtration section with
And high efficiency filter section.
It is further preferred that including Water cooled air conditionerses coil pipe, electric heater, humidifier, circulating fan in described cleaning shop
And multiple blower fan filtering unit, wherein,
The plurality of blower fan filtering unit is in cleaning shop top, located at the bottom of cleaning shop upper interlayer；Water cooled air conditionerses
Coil pipe, electric heater, humidifier and circulating fan are outside cleaning shop；
Mixed gas enter through Water cooled air conditionerses coil pipe, electric heater, humidifier and circulating fan and press from both sides on cleaning shop
Layer, the return air in cleaning shop enters cleaning shop upper interlayer and place through Water cooled air conditionerses coil pipe, electric heater and humidifier
Mixed gas after reason remix；Remix gas to enter back in cleaning shop through blower fan filtering unit.
It is further preferred that described humidifier is pure water ultrasonic humidifier.
It is further preferred that also include in described cleaning shop respectively with Water cooled air conditionerses coil pipe, electric heater, humidifier with
And PLC (Programmable Logic Controller, the programmable logic controller (PLC)) control system that circulating fan connects,
The air parameter that described PLC control system gathers in cleaning shop carries out logical operationss, controls Water cooled air conditionerses coil pipe, electric heater
Load and the air output controlling circulating fan with humidifier.
It is further preferred that described Water cooled air conditionerses coil pipe controls, using frozen water type refrigeration modes, the integration water being attached thereto
The aperture of valve；And/or,
Described electric heater adjusts gas temperature by the way of multistage heating；And/or,
Described humidifier adoption rate humidification method controls the aperture of the humidification electromagnetic valve being attached thereto.
The Two-way Cycle temperature and humidity control system that the present invention provides, its advantage is：
In the Two-way Cycle temperature and humidity control system that the present invention provides, outdoor fresh air through the heating of Fresh air handling units, cooling,
Humidification, dry and multiple filtration process, air-flow reaches predetermined humiture and cleanliness factor；Afterwards, then by high pressure positive blower send
Enter purification workshop upper interlayer (plenum chamber), the return air in cleaning shop passes through the dry coil pipe in return air passageway (interlayer) simultaneously
Lower the temperature, go fresh air after processing through Fresh air handling units for the wet process feeding purification workshop upper interlayer to mix, mixed gas are again through wind
The pressurization of machine filter element, ultra high efficiency send into Clean room after filtering.This system accuracy is higher, up to temperature ± 0.5 DEG C, humidity ±
3%RH (Relative Humidity, relative humidity).In addition, system has, resh air requirement is less, occupation of land space is little, whole acc power
Little feature, and the operation and maintenance cost of system equipment is less.
Further, in the Two-way Cycle temperature and humidity control system that the present invention provides, using the cell (cleaning shop) of sealing, entering
Wind side adopts the air-supply of an original system, and that is, the parameter of the gas of air intake is temperature ± 0.5 DEG C, humidity ± 3%RH, individual scrubbing
In workshop, the equipment such as supporting Water cooled air conditionerses coil pipe, pure water ultrasonic humidifier and circulating fan, gathers room by PLC control system
Interior air parameter carries out logical calculated, controls air output, Water cooled air conditionerses, electric heater and humidifier load, thus reaching warm and humid
Spend more accurate control, make in cleaning shop, to reach temperature ± 0.1 DEG C, humidity ± 1%RH.
Finally, the present invention provide Two-way Cycle temperature and humidity control system be widely used in weaving, Nicotiana tabacum L., chemical fibre, paper and
The industry fields such as electronics.
Brief description
Fig. 1 is Two-way Cycle temperature and humidity control system structural representation in the present invention；
Fig. 2 is Fresh air handling units schematic diagram in the present invention；
Fig. 3 is indoor heating system structural representation in the present invention.
Specific embodiment
With reference to the accompanying drawings and detailed description, the present invention is described in further detail.It should be noted that below
The specific detail of the present invention of description is only used to illustrate the invention, is not construed as limiting the invention.According to described basis
Any modification that the teaching of invention is made and modification are also within the scope of the invention.
The schematic diagram of the Two-way Cycle temperature and humidity control system of present invention offer is provided, it can be seen that
Include multiple cleaning shops in this purification workshop, and include upper interlayer at purification workshop top；Two-way Cycle temperature and humidity control system
Include Fresh air handling units, multiple blower fan filtering unit and multiple main disk, wherein, Fresh air handling units are arranged on outside purification workshop
Side is connected with purification workshop upper interlayer, and blower fan filtering unit is arranged at purification workshop top, located at upper interlayer bottom, main disk
It is arranged at interlayer top outside cleaning shop to be connected with purification workshop upper interlayer.In the course of the work, outdoor fresh air is through new
The heating of blower fan group, lower the temperature, humidify, drying and multiple filtration process, air-flow reaches predetermined humiture and cleanliness factor；It
Afterwards, then by high pressure positive blower send into purification workshop upper interlayer (plenum chamber), the return air in cleaning shop passes through return air passageway simultaneously
Dry coil pipe in (interlayer) lowers the temperature, goes wet process feeding purification workshop upper interlayer and the fresh air after Fresh air handling units process to mix
Close, mixed gas send into Clean room again after blower fan filtering unit pressurization, ultra high efficiency filter.Specifically, within the system, fresh air
Unit is responsible for controlling the humidity of Clean room, dry coil pipe to control the humidity of Clean room, blower fan filtering unit to be responsible for air circulation and clean
Cleanliness maintains.Because Fresh air handling units control air-supply dew point temperature, and in cleaning shop return air before mixing with fresh air by dry pan
Pipe processes fixing humiture state, and the humiture of such mixed gas just easily reaches the requirement of cleaning shop.
More particularly, as shown in Fig. 2 including in this Fresh air handling units：Fresh air section A, initial effect filtering section, imitated in first
Filter section (be specifically illustrating middle initial effect filtering section and the first medium efficiency filtration section is represented using reference B), preheating section C are (by preheating
Coil pipe is realized), precooling zone D (being realized by desuperheating coil), washing humidifier section E (being realized by spray), cold section of F be (by more again
Cooling coil realize), reheating section G (being realized by reheating coil pipe), fan section H (being realized by ajutage), the second medium efficiency filtration section
And high efficiency filter section (in being specifically illustrating, the second medium efficiency filtration section and high efficiency filter section are represented using reference I), and fresh air
Unit Temperature and Humidity Control is preferential with dew point temperature, according to Various Seasonal operating mode, problem is controlled, e.g., makes air-supply flow parameter
Control and be 7 DEG C in 15 DEG C of temperature, dew point temperature.
In a specific embodiment, when outdoor fresh air dew point temperature≤9.6 DEG C, this Two-way Cycle temperature and humidity control system
Automatically switch to winter condition；When fresh air dew point temperature>When 9.6 DEG C, Two-way Cycle temperature and humidity control system switchs to summer condition automatically.
Specifically, in the winter time in operating mode：Indoor humidity is by Fresh air handling units control.In setting Fresh air handling units, fresh air is through spray section
Temperature after (i.e. above-mentioned washing humidifier section) is 11.3 DEG C, and specifically, when temperature is higher than 11.3 DEG C, hot water preheating coil pipe is electronic
Two-port valve open little, when temperature be less than 11.3 DEG C when, then action is contrary.In addition, according to Fresh air handling units cold section of dew point temperature afterwards again
Spend and to control cooling coil electrodynamic valve again, when temperature is higher than 9.6 DEG C, then cooling coil electric two-way valve is opened greatly, when temperature is less than 9.6
DEG C when, then action is contrary.Set in Fresh air handling units ajutage temperature as 16.5 DEG C, when temperature is higher than 16.5 DEG C, then hot coil
Electric two-way valve open little, when temperature be less than 16.5 DEG C when, then action is contrary.It can be seen that, in this process, outdoor fresh air processing procedure
Including：Hot water heating, shower humidification, cooling dehumidification, hot water heating and blower fan heat up, and finally send into plenum chamber.
In summer condition：Indoor humidity is by Fresh air handling units control.Set fresh air in new blower fan (to go up through group spray section
State washing humidifier section) after temperature be 11.3 DEG C, when temperature be higher than 11.3 DEG C when, chilled water desuperheating coil electric two-way valve is opened
Greatly, when temperature is less than 11.3 DEG C, then action is contrary.In addition, according to Fresh air handling units, cold section of dew point temperature afterwards controls again
Cooling coil electrodynamic valve again, when temperature is higher than 9.6 DEG C, then cooling coil electric two-way valve is opened greatly, when temperature is less than 9.6 DEG C, then
Action is contrary.Set in Fresh air handling units ajutage temperature as 16.5 DEG C, when temperature is higher than 16.5 DEG C, the more electronic two-way of hot coil
Valve open little, when temperature be less than 16.5 DEG C when, then action is contrary.It should be noted that in summer condition, preheating coil pipe does not work.
It can be seen that, in this process, outdoor fresh air processing procedure includes：Cooling dehumidification, spray washing, cooling dehumidification, reheating and blower fan
Heat up, finally send into plenum chamber.
For further, as shown in figure 3, including Water cooled air conditionerses coil pipe in cleaning shop (any closed chamber), electricity adds
Hot device, humidifier, circulating fan and multiple blower fan filtering unit, wherein, multiple blower fan filtering units in cleaning shop top,
Bottom located at cleaning shop upper interlayer；Water cooled air conditionerses coil pipe, electric heater, humidifier and circulating fan are located at cleaning shop
Outside.In the course of the work, (i.e. an original system send the mixed gas after Fresh air handling units, blower fan filtering unit are processed
Wind) as indoor heating system input, that is, this mixed gas sequentially pass through Water cooled air conditionerses coil pipe, electric heater, humidifier and follow
Ring blower fan 10 enters cleaning shop upper interlayer, and the return air in cleaning shop is through Water cooled air conditionerses coil pipe, electric heater and humidification
Mixed after device (Water cooled air conditionerses coil pipe, electric heater and humidifier are referred to as 20 as shown) entrance cleaning shop upper interlayer and process
Close gas to remix；Remix gas to enter back in cleaning shop through blower fan filtering unit, gas in cleaning shop is realized with this
The secondary cycle of body, thus improve the control of humiture in cleaning shop.In a specific embodiment, above-mentioned humidifier is pure
Water ultrasonic humidifier；And interior is covered with blower fan filtering unit, filter efficiency is 0.12 μm of@99.99995%, and air-flow is using above sending
Vertical stream mode next time.
More particularly, within the system, also include an indoor heating system in cleaning shop, respectively with Water cooled air conditionerses coil pipe,
The PLC control system that electric heater, humidifier and circulating fan connect, this PLC control system gathers the sky in cleaning shop
Gas parameter carries out logical operationss, controls the load of Water cooled air conditionerses coil pipe, electric heater and humidifier and controls circulating fan
Air output.The air quantity of this system is big, and air-supply enthalpy difference is little, and the humiture of indoor control is equal；And there is certain dehumidifying effect, protecting
On the premise of card humiture, air output maintains larger aperture as far as possible.
In addition, in this indoor heating system, possessing high-accuracy Temperature Humidity Sensor, the accuracy of this Temperature Humidity Sensor and essence
Degree is higher, and the precision typically requiring sensor is：Temperature ± 0.1 DEG C (when 23 ± 2 DEG C), humidity ± 1%RH.And repeatability：
Better than 0.5%RH and 0.1 DEG C；Stability：It is better than 1.0%RH and 0.1 DEG C every year.
Further, in this indoor heating system, Water cooled air conditionerses coil pipe controls be attached thereto to amass using frozen water type refrigeration modes
The aperture of shunt valve.In a specific embodiment, run in this Water cooled air conditionerses coil pipe is 7 DEG C of chilled water, controls indoor
System by the calculating of humiture is controlled with the aperture of integration water valve, completes the step-less adjustment of humiture it is achieved that humiture
Accurate control.Electric heater adjusts gas temperature by the way of multistage heating, and puts into different heating group with specific reference to the temperature difference
Number.Humidifier adoption rate humidification method controls the aperture of the humidification electromagnetic valve being attached thereto, and adjustment adds appropriate.
Above by the implement scene case that each process is respectively described, describe the present invention, the technology of this area in detail
Personnel will be understood that.In the scope without departing from present invention essence, can make an amendment and deform.
Claims (6)
1. a kind of Two-way Cycle temperature and humidity control system includes multiple cleaning shops it is characterised in that purification workshop is interior, and is purifying
Factory Building top includes upper interlayer；Described Two-way Cycle temperature and humidity control system include Fresh air handling units, multiple blower fan filtering unit with
And multiple main disk, wherein, Fresh air handling units are arranged on and are connected with purification workshop upper interlayer outside purification workshop, blower fan filtering list
Unit is arranged at purification workshop top, located at upper interlayer bottom, main disk is arranged at outside cleaning shop interlayer top and purifies
Factory Building upper interlayer connects；
Fresh air handling units are sent in upper interlayer after fresh air is processed, and the return air in cleaning shop passes through dry in interlayer
Coil pipe is entered in upper interlayer and is mixed with the fresh air after processing, and mixed gas enter back into purifying vehicle through blower fan filtering unit
Between in.
2. Two-way Cycle temperature and humidity control system as claimed in claim 1 is it is characterised in that described Fresh air handling units include：Newly
Wind section, initial effect filtering section, the first medium efficiency filtration section, preheating section, precooling zone, washing humidifier section, cold section again, again hot arc, fan section,
Second medium efficiency filtration section and high efficiency filter section.
3. Two-way Cycle temperature and humidity control system as claimed in claim 1 or 2 is it is characterised in that include in described cleaning shop
Water cooled air conditionerses coil pipe, electric heater, humidifier, circulating fan and multiple blower fan filtering unit, wherein,
The plurality of blower fan filtering unit is in cleaning shop top, located at the bottom of cleaning shop upper interlayer；Water cooled air conditionerses coil pipe,
Electric heater, humidifier and circulating fan are outside cleaning shop；
Mixed gas enter cleaning shop upper interlayer through Water cooled air conditionerses coil pipe, electric heater, humidifier and circulating fan, only
The return air changed in workshop enters after cleaning shop upper interlayer and process through Water cooled air conditionerses coil pipe, electric heater and humidifier
Mixed gas remix；Remix gas to enter back in cleaning shop through blower fan filtering unit.
4. Two-way Cycle temperature and humidity control system as claimed in claim 3 is it is characterised in that described humidifier adds for pure water is ultrasonic
Wet device.
5. Two-way Cycle temperature and humidity control system as claimed in claim 3 is it is characterised in that also include in described cleaning shop point
The PLC control system not being connected with Water cooled air conditionerses coil pipe, electric heater, humidifier and circulating fan, described PLC control system
Air parameter in collection cleaning shop carries out logical operationss, controls the load of Water cooled air conditionerses coil pipe, electric heater and humidifier
And control the air output of circulating fan.
6. Two-way Cycle temperature and humidity control system as claimed in claim 3 it is characterised in that
Described Water cooled air conditionerses coil pipe controls the aperture of the integration water valve being attached thereto using frozen water type refrigeration modes；And/or,
Described electric heater adjusts gas temperature by the way of multistage heating；And/or,
Described humidifier adoption rate humidification method controls the aperture of the humidification electromagnetic valve being attached thereto.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620958945.9U CN205980036U (en) | 2016-08-26 | 2016-08-26 | Dual cycle atmospheric control system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620958945.9U CN205980036U (en) | 2016-08-26 | 2016-08-26 | Dual cycle atmospheric control system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205980036U true CN205980036U (en) | 2017-02-22 |
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ID=58036618
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| Application Number | Title | Priority Date | Filing Date |
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| CN201620958945.9U Expired - Fee Related CN205980036U (en) | 2016-08-26 | 2016-08-26 | Dual cycle atmospheric control system |
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| Country | Link |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106225071A (en) * | 2016-08-26 | 2016-12-14 | 无锡中微掩模电子有限公司 | A kind of Two-way Cycle temperature and humidity control system |
| CN113028532A (en) * | 2019-12-09 | 2021-06-25 | 上海奇康再生医学技术有限公司 | Clean room of self-circulation fresh air management system |
-
2016
- 2016-08-26 CN CN201620958945.9U patent/CN205980036U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106225071A (en) * | 2016-08-26 | 2016-12-14 | 无锡中微掩模电子有限公司 | A kind of Two-way Cycle temperature and humidity control system |
| CN106225071B (en) * | 2016-08-26 | 2022-01-14 | 无锡中微掩模电子有限公司 | Dual cycle atmospheric control system |
| CN113028532A (en) * | 2019-12-09 | 2021-06-25 | 上海奇康再生医学技术有限公司 | Clean room of self-circulation fresh air management system |
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