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CN205826515U - Acoustical signal detector based on surface wave and reflecting light sonomicroscope - Google Patents

Acoustical signal detector based on surface wave and reflecting light sonomicroscope Download PDF

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CN205826515U
CN205826515U CN201620547452.6U CN201620547452U CN205826515U CN 205826515 U CN205826515 U CN 205826515U CN 201620547452 U CN201620547452 U CN 201620547452U CN 205826515 U CN205826515 U CN 205826515U
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张崇磊
邢飞
闵长俊
袁小聪
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Shenzhen University
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Abstract

本实用新型适用于光声成像声压检测技术领域,提供了一种基于表面波的声信号探测器和反射式光声显微镜,该声信号探测器包括具有相互平行的两个平面的棱镜,所述相互平行的两个平面中的一个平面镀有薄膜,所述薄膜用于探测经介质传输的光声信号。该声信号探测器由于采用了光学传感折射率的方法,使得待测物体具有免标记、非接触式的传感检测特点,并且能够实现探测带宽、检测灵敏的优点。将此基于表面波的声信号探测器应用于反射式光声显微镜中,可以实现生物活体的成像检测。

The utility model is applicable to the technical field of photoacoustic imaging and sound pressure detection, and provides an acoustic signal detector based on surface waves and a reflective photoacoustic microscope. The acoustic signal detector includes a prism with two parallel planes, so One of the two parallel planes is coated with a thin film, and the thin film is used to detect photoacoustic signals transmitted through the medium. Because the acoustic signal detector adopts the method of optically sensing the refractive index, the object to be measured has the characteristics of marking-free and non-contact sensing detection, and can realize the advantages of detection bandwidth and detection sensitivity. Applying this surface wave-based acoustic signal detector to a reflective photoacoustic microscope can realize the imaging detection of living organisms.

Description

基于表面波的声信号探测器和反射式光声显微镜Surface wave based acoustic signal detector and reflective photoacoustic microscope

技术领域technical field

本实用新型属于光声成像声压检测技术领域,尤其涉及一种基于表面波的声信号探测器和反射式光声显微镜。The utility model belongs to the technical field of photoacoustic imaging sound pressure detection, in particular to a surface wave-based acoustic signal detector and a reflective photoacoustic microscope.

背景技术Background technique

采用压电法(仪器被称为超声换能器)进行声压信号的提取是目前的主流,许多课题组利用压电探测器进行光声成像的研究,取得了丰硕的研究成果。尽管该技术发展相对成熟、应用面也很广泛,但它也存在一些难以克服的缺点。比如,该技术无法同时实现高灵敏度、高频率的检测。采用压电晶体接收超声信号,灵敏度与接收频率是相互矛盾的,压电晶体的面积越小接收频率就越高,而对应的是灵敏度就越低。压电探测器无法实现点探测,它所探测到的信号为压电晶体面积的平均效应。采用压电晶体进行光声信号的拾取,必须在样品与探头之间,受压电材料本身属性的制约,超声换能器普遍存在探测带宽窄(约40~60MHz)和灵敏度低(噪音等效声压:几百~上千帕)的缺点。It is the current mainstream to use the piezoelectric method (the instrument is called an ultrasonic transducer) to extract the sound pressure signal. Many research groups use piezoelectric detectors for photoacoustic imaging research and have achieved fruitful research results. Although the technology is relatively mature and has a wide range of applications, it also has some shortcomings that are difficult to overcome. For example, this technology cannot achieve high sensitivity and high frequency detection at the same time. Using piezoelectric crystals to receive ultrasonic signals, the sensitivity and the receiving frequency are contradictory. The smaller the area of the piezoelectric crystal, the higher the receiving frequency, and the correspondingly lower sensitivity. Piezoelectric detectors cannot achieve point detection, and the detected signal is the average effect of the piezoelectric crystal area. The use of piezoelectric crystals to pick up photoacoustic signals must be between the sample and the probe. Restricted by the properties of piezoelectric materials, ultrasonic transducers generally have narrow detection bandwidth (about 40-60MHz) and low sensitivity (noise equivalent Sound pressure: hundreds to thousands of Pa) shortcomings.

实用新型内容Utility model content

本实用新型所要解决的技术问题在于提供一种基于表面波的声信号探测器和反射式光声显微镜,旨在解决现有的检测器探测带宽窄的问题。The technical problem to be solved by the utility model is to provide a surface wave-based acoustic signal detector and a reflective photoacoustic microscope, aiming at solving the problem of narrow detection bandwidth of existing detectors.

本实用新型是这样实现的,一种基于表面波的声信号探测器,包括具有相互平行的两个平面的棱镜,所述相互平行的两个平面中的一个平面镀有薄膜,所述薄膜用于探测经介质传输的光声信号。The utility model is achieved in that a surface wave based acoustic signal detector comprises a prism with two parallel planes, one of the two parallel planes is coated with a thin film, and the thin film is It is used to detect the photoacoustic signal transmitted through the medium.

进一步地,所述薄膜为金属薄膜或石墨烯薄膜。Further, the film is a metal film or a graphene film.

本实用新型还提供一种基于表面波的声信号探测器,包括多模光纤,所述多模光纤包括包层和置于包层内的纤芯,所述多模光纤的纤芯具有一与所述多模光纤长度延伸方向平行的截面,所述包层具有一使所述截面裸露于所述包层外的缺口,所述截面位于所述缺口处,所述截面上镀有薄膜,所述薄膜用于探测经介质传输的光声信号。The utility model also provides an acoustic signal detector based on surface waves, which includes a multimode optical fiber, the multimode optical fiber includes a cladding and a core placed in the cladding, and the core of the multimode optical fiber has a The cross-section parallel to the extending direction of the multimode optical fiber, the cladding has a gap that exposes the cross-section outside the cladding, the cross-section is located at the gap, and the cross-section is coated with a thin film, so The film is used to detect the photoacoustic signal transmitted through the medium.

进一步地,所述薄膜为金属薄膜或石墨烯薄膜。Further, the film is a metal film or a graphene film.

本实用新型还提供一种基于表面波的声压检测器的反射式光声显微镜,包括反射式显微物镜和声信号探测器;The utility model also provides a reflective photoacoustic microscope based on a surface wave sound pressure detector, including a reflective microscopic objective lens and an acoustic signal detector;

所述反射式显微物镜置于所述声信号探测器的上方,用于将激光源发射的激光聚焦照射到待测物体上,使得所述待测物体吸收所述激光并产生光声信号,所述光声信号反向传输经过待测物体上方的介质发生折射后进入所述声信号探测器;The reflective microscope objective lens is placed above the acoustic signal detector, and is used to focus and irradiate the laser light emitted by the laser source onto the object to be measured, so that the object to be measured absorbs the laser light and generates a photoacoustic signal, The photoacoustic signal enters the acoustic signal detector after reverse transmission through the medium above the object to be measured for refraction;

所述声信号探测器置于所述待测物体的上方且位于所述反射式显微物镜的下方,用于探测经介质传输的光声信号,并根据所述光声信号生成待测物体的用于使待测物体成像的检测谱。The acoustic signal detector is placed above the object to be measured and below the reflective microscope objective lens, and is used to detect a photoacoustic signal transmitted through a medium, and generate a signal of the object to be measured according to the photoacoustic signal. The detection spectrum used to image the object to be measured.

进一步地,所述声信号探测器为上下平面平行且下平面镀有薄膜的棱镜或者镀有薄膜的多模光纤,所述薄膜用于探测经介质传输的光声信号;Further, the acoustic signal detector is a prism whose upper and lower planes are parallel and the lower plane is coated with a thin film or a multimode optical fiber coated with a thin film, and the thin film is used to detect photoacoustic signals transmitted through a medium;

所述多模光纤包括包层和置于包层内的纤芯,所述多模光纤的纤芯具有一与所述多模光纤长度延伸方向平行的截面,所述包层具有一使所述截面裸露于所述包层外的缺口,所述截面位于所述缺口处,所述薄膜镀于所述截面上。The multimode optical fiber includes a cladding and a core placed in the cladding, the core of the multimode optical fiber has a cross-section parallel to the extending direction of the multimode optical fiber, and the cladding has a The cross section is exposed in the gap outside the cladding, the cross section is located at the gap, and the thin film is plated on the cross section.

进一步地,所述反射式光声显微镜还包括激发光路组件和探测光路组件;Further, the reflective photoacoustic microscope also includes an excitation optical path component and a detection optical path component;

所述激发光路组件用于发射脉冲激光聚焦到所述待测物体上,以激发待测物体产生光声信号;The excitation optical path component is used to emit pulsed laser light to focus on the object to be measured, so as to excite the object to be measured to generate a photoacoustic signal;

所述探测光路组件用于发出连续激光入射到所述声信号探测器上以进行全内反射,并检测经过全内反射后的反射光信号的折射率变化。The detection optical path assembly is used to emit continuous laser light incident on the acoustic signal detector for total internal reflection, and detect the change of the refractive index of the reflected light signal after total internal reflection.

进一步地,所述激发光路组件包括可调谐激光器、光阑、扩束装置、聚焦耦合透镜和第一单模光纤;Further, the excitation optical path assembly includes a tunable laser, an aperture, a beam expander, a focusing coupling lens, and a first single-mode optical fiber;

所述可调谐激光器用于产生脉冲激光;The tunable laser is used to generate pulsed laser light;

所述光阑置于所述可调谐激光器的前方,用于调整脉冲激光的光束大小;The aperture is placed in front of the tunable laser for adjusting the beam size of the pulsed laser;

所述扩束装置用于将从所述光阑出来的脉冲激光的光束进行扩大;The beam expander is used to expand the beam of the pulsed laser coming out from the aperture;

所述聚焦耦合透镜置于所述扩束装置的前方,用于将经过光束扩大的脉冲激光进行聚焦耦合;The focus coupling lens is placed in front of the beam expander, and is used to focus and couple the expanded pulsed laser light;

所述第一单模光纤置于所述聚焦耦合透镜的前方,用于将聚焦耦合后的脉冲激光传输到所述反射式显微物镜上。The first single-mode optical fiber is placed in front of the focusing coupling lens for transmitting the focused and coupled pulsed laser light to the reflective microscope objective lens.

进一步地,所述激发光路组件还包括平面光装置和平面镜;Further, the excitation optical path assembly also includes a planar light device and a planar mirror;

所述平面光装置置于所述单模光纤的前方,用于将所述第一单模光纤输出的激光源扩束成准平面光;The planar light device is placed in front of the single-mode optical fiber, and is used to expand the laser source output by the first single-mode optical fiber into quasi-planar light;

所述平面镜置于所述平面光装置的前方,用于改变脉冲激光的方向使脉冲激光能进入到所述反射式显微物镜上。The plane mirror is placed in front of the plane light device, and is used to change the direction of the pulsed laser so that the pulsed laser can enter the reflective microscope objective lens.

进一步地,所述探测光路组件包括激光器、波片、第一聚焦耦合透镜、第二单模光纤、第一准直耦合器、第二准直耦合器、第三单模光纤、第二聚焦耦合透镜、偏振分束器和平衡探测器;所述声信号探测器的下方放置一水槽,所述待测物体置于所述水槽的下方;Further, the detection optical path assembly includes a laser, a wave plate, a first focusing coupling lens, a second single-mode fiber, a first collimating coupler, a second collimating coupler, a third single-mode fiber, a second focusing coupling A lens, a polarization beam splitter and a balance detector; a water tank is placed under the acoustic signal detector, and the object to be measured is placed under the water tank;

所述激光器用于产生连续激光;The laser is used to generate continuous laser light;

所述波片置于所述激光器的前方,用于将所述连续激光调成圆偏光;The wave plate is placed in front of the laser for adjusting the continuous laser light into circularly polarized light;

所述第一聚焦耦合透镜置于所述波片的前方,用于将圆偏光进行聚焦耦合;The first focusing and coupling lens is placed in front of the wave plate for focusing and coupling circularly polarized light;

所述第二单模光纤置于所述第一聚焦耦合透镜的前方,用于将聚焦耦合后的连续激光进行传输;The second single-mode optical fiber is placed in front of the first focusing coupling lens for transmitting the focused and coupled continuous laser light;

所述第一、第二准直耦合器置于所述声信号探测器的两侧,所述第一准直耦合器用于将从所述第二单模光纤出来的光进行准直耦合,所述第二准直耦合器用于将从所述声信号探测器中出来的光进行准直耦合后输出到所述第三单模光纤;The first and second collimating couplers are placed on both sides of the acoustic signal detector, and the first collimating coupler is used for collimating and coupling the light coming out of the second single-mode fiber, so The second collimating coupler is used to collimate and couple the light coming out of the acoustic signal detector and output it to the third single-mode optical fiber;

所述第三单模光纤用于传输从所述第二准直耦合器出来的反射光;The third single-mode optical fiber is used to transmit the reflected light from the second collimating coupler;

所述第二聚焦耦合透镜用于将所述反射光进行聚焦耦合;The second focus coupling lens is used to focus and couple the reflected light;

所述偏振分束器用于将进行聚焦耦合后的反射光进行分束,分为P偏振光和S偏振光;The polarization beam splitter is used to split the reflected light after focusing and coupling into P polarized light and S polarized light;

所述平衡探测器置于所述偏振分束器后,用于检测所述P偏振光和所述S偏振光的折射率变化量。The balance detector is placed behind the polarization beam splitter, and is used to detect the refractive index variation of the P-polarized light and the S-polarized light.

进一步地,所述探测光路组件包括平面镜,所述平面镜置于偏振分束器的一侧,用于调整从所述偏振分束器出来的S偏振光的方向。Further, the detection optical path assembly includes a plane mirror, and the plane mirror is placed on one side of the polarization beam splitter for adjusting the direction of the S-polarized light coming out of the polarization beam splitter.

进一步地,所述声压检测器还包括成像装置,所述成像装置根据所述平衡探测器检测到的折射率变化量生成待测物体的光声成像立体图。Further, the sound pressure detector further includes an imaging device, and the imaging device generates a photoacoustic imaging stereogram of the object to be measured according to the refractive index variation detected by the balance detector.

进一步地,所述反射式光声显微镜还包括三维电动平台,所述反射式显微物镜和所述声信号探测器固设于三维电动平台上。Further, the reflective photoacoustic microscope also includes a three-dimensional motorized platform, and the reflective microscope objective lens and the acoustic signal detector are fixed on the three-dimensional motorized platform.

本实用新型与现有技术相比,有益效果在于:所述的基于表面波的声信号探测器将薄膜镀于棱镜上相互平行的两个平面中的一个面,使得薄膜能探测到经过介质传输的光声信号,该光声信号的变化反映了折射率的变化,从而可以实现点探测。该声信号探测器由于采用了光学传感折射率的方法,使得待测物体具有免标记、非接触式的传感检测特点,并且能够实现探测带宽、检测灵敏的优点。将此基于表面波的声信号探测器应用于反射式光声显微镜中,可以实现生物活体的成像检测。Compared with the prior art, the utility model has the beneficial effect that: the acoustic signal detector based on the surface wave coats the thin film on one of the two parallel planes on the prism, so that the thin film can detect the acoustic signal transmitted through the medium. The change of the photoacoustic signal reflects the change of the refractive index, so that point detection can be realized. Since the acoustic signal detector adopts the method of optically sensing the refractive index, the object to be measured has the characteristics of marking-free and non-contact sensing detection, and can realize the advantages of detection bandwidth and detection sensitivity. Applying this surface wave-based acoustic signal detector to a reflective photoacoustic microscope can realize the imaging detection of living organisms.

附图说明Description of drawings

图1是本实用新型实施例提供的基于表面波的声信号探测器的一种结构示意图;Fig. 1 is a kind of structure diagram of the acoustic signal detector based on the surface wave provided by the utility model embodiment;

图2是本实用新型实施例提供的基于表面波的声信号探测器的反射式光声显微镜的结构示意图;Fig. 2 is a schematic structural view of a reflective photoacoustic microscope based on a surface wave acoustic signal detector provided by an embodiment of the present invention;

图3是基于表面波的声信号探测器的另一种结构示意图;Fig. 3 is another kind of structural representation of the acoustic signal detector based on surface wave;

图4是采用本实用新型的基于表面波的声信号探测器测得的光声信号示意图;Fig. 4 is a schematic diagram of a photoacoustic signal measured by the surface wave-based acoustic signal detector of the present invention;

图5是采用本实用新型的基于表面波的声信号探测器检测到的光声信号频谱范围示意图;Fig. 5 is a schematic diagram of the spectrum range of the photoacoustic signal detected by the surface wave-based acoustic signal detector of the present invention;

图6是采用本实用新型的基于表面波的声信号探测器的反射式光声显微镜检测到的人体毛发样品的光声成像示意图。6 is a schematic diagram of photoacoustic imaging of a human hair sample detected by a reflective photoacoustic microscope based on a surface wave acoustic signal detector of the present invention.

具体实施方式detailed description

为了使本实用新型的目的、技术方案及优点更加清楚明白,以下结合附图及实施例,对本实用新型进行进一步详细说明。应当理解,此处所描述的具体实施例仅仅用以解释本实用新型,并不用于限定本实用新型。In order to make the purpose, technical solution and advantages of the utility model clearer, the utility model will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model, and are not intended to limit the utility model.

一种基于表面波的声信号探测器,包括具有相互平行的两个平面的棱镜,相互平行的两个平面中的一个平面镀有薄膜,薄膜用于探测经介质传输的光声信号。An acoustic signal detector based on surface waves includes a prism with two parallel planes, one of the two parallel planes is coated with a thin film, and the thin film is used to detect photoacoustic signals transmitted through a medium.

该基于表面波的声信号探测器基于全内反射原理、利用表面波高灵敏度传感原理,使用相互平行的两个平面中的镀于其中一个平面的薄膜就可以探测到经介质传输的光声信号。The acoustic signal detector based on the surface wave is based on the principle of total internal reflection, using the high-sensitivity sensing principle of the surface wave, and the photoacoustic signal transmitted through the medium can be detected by using a thin film coated on one of the two planes parallel to each other. .

本实施例中,薄膜为金属薄膜或石墨烯薄膜。棱镜为台型棱镜,该台型棱镜的横截面为圆形或矩形,纵截面为梯形。金属薄膜或石墨烯薄膜作为表面波产生的基底材料,表面金属薄膜的厚度和石墨烯薄膜的厚度可以替换,不同薄膜层厚度会对最高检测灵敏度有影响。金属薄膜可以为金膜、银膜等,优选的,所镀的金属膜的厚度约45nm。石墨烯薄膜可以分为多层进行蒸镀,优选的,石墨烯薄膜具有5层石墨烯,厚度为1.7nm。In this embodiment, the film is a metal film or a graphene film. The prism is a trapezoidal prism, the cross section of the trapezoidal prism is circular or rectangular, and the longitudinal section is trapezoidal. The metal film or graphene film is used as the base material for surface wave generation, the thickness of the surface metal film and the graphene film can be replaced, and the thickness of different film layers will affect the highest detection sensitivity. The metal thin film can be a gold film, a silver film, etc., preferably, the thickness of the plated metal film is about 45nm. The graphene film can be divided into multiple layers for vapor deposition. Preferably, the graphene film has 5 layers of graphene with a thickness of 1.7 nm.

如图3所示,一种基于表面波的声信号探测器,包括多模光纤301,多模光纤301包括包层302和置于包层302内的纤芯303,多模光纤301的纤芯303具有一与多模光纤301长度延伸方向平行的截面304,包层302具有一缺口305,截面304位于缺口305处,缺口305使截面304裸露于外面,截面304上镀有薄膜,薄膜用于探测经介质传输的光声信号。As shown in Figure 3, a kind of acoustic signal detector based on surface wave comprises multimode fiber 301, and multimode fiber 301 comprises cladding 302 and the fiber core 303 that places cladding 302, and the fiber core of multimode fiber 301 303 has a section 304 parallel to the extending direction of the length of the multimode optical fiber 301. The cladding 302 has a notch 305. The section 304 is located at the notch 305. The notch 305 exposes the section 304 to the outside. The section 304 is coated with a thin film, which is used for Detection of photoacoustic signals transmitted through a medium.

本实施例中,薄膜为金属薄膜或石墨烯薄膜。金属薄膜或石墨烯薄膜作为表面波产生的基底材料,表面金属薄膜的厚度和石墨烯薄膜的厚度可以根据实际应用设置为不同的值,不同薄膜层厚度会对最高检测灵敏度有影响。金属薄膜可以为金膜、银膜等,优选的,所镀的金属膜的厚度约45nm。石墨烯薄膜可以分为多层进行蒸镀,优选的,石墨烯薄膜具有5层石墨烯,厚度为1.7nm。In this embodiment, the film is a metal film or a graphene film. The metal film or graphene film is used as the base material for surface wave generation. The thickness of the surface metal film and the graphene film can be set to different values according to the actual application. Different film thicknesses will affect the highest detection sensitivity. The metal thin film can be a gold film, a silver film, etc., preferably, the thickness of the plated metal film is about 45nm. The graphene film can be divided into multiple layers for vapor deposition. Preferably, the graphene film has 5 layers of graphene with a thickness of 1.7 nm.

请参阅图1,图1为本实用新型其中一种实施例提供的基于表面波的声压检测器的反射式光声显微镜的结构示意图,该基于表面波的声压检测器,包括反射式显微物镜101和声信号探测器102。反射式显微物镜101置于声信号探测器102的上方,用于将激光源发射的激光聚焦照射到待测物体103上。待测物体103吸收激光并产生光声信号,光声信号反向传输经过待测物体上方的介质发生折射后进入声信号探测器102。图1中的待测物体103以小老鼠作为一个示意,但并不限于小老鼠,该待测物体可以是生物厚样品、活体样品,比如:各种细胞、各种动物等。声信号探测器102置于待测物体103的上方,用于探测经介质传输的光声信号,并根据光声信号生成待测物体103的检测谱,该检测谱可以用于使待测物体成像。该基于表面波的声压检测器的反射式光声显微镜整体结构的激发与接收光声信号互不干扰。Please refer to Fig. 1. Fig. 1 is a structural schematic diagram of a reflective photoacoustic microscope based on a surface wave sound pressure detector provided by one of the embodiments of the present invention. The surface wave based sound pressure detector includes a reflective display Micro objective lens 101 and acoustic signal detector 102. The reflective microscope objective lens 101 is placed above the acoustic signal detector 102 and is used to focus and irradiate the laser light emitted by the laser source onto the object 103 to be measured. The object to be measured 103 absorbs the laser light and generates a photoacoustic signal, and the photoacoustic signal is reversely transmitted through the medium above the object to be measured, refracted, and then enters the acoustic signal detector 102 . The object to be tested 103 in FIG. 1 is a mouse as an illustration, but not limited to a mouse. The object to be tested can be a biological thick sample, a living sample, such as various cells, various animals, and the like. The acoustic signal detector 102 is placed above the object to be measured 103, and is used to detect the photoacoustic signal transmitted through the medium, and generate a detection spectrum of the object to be measured 103 according to the photoacoustic signal, and the detection spectrum can be used to image the object to be measured . The excitation and receiving photoacoustic signals of the overall structure of the reflective photoacoustic microscope of the surface wave-based sound pressure detector do not interfere with each other.

声信号探测器102可以为上下平面平行且其中一个平面镀有薄膜的棱镜,或者,可以是镀有薄膜的多模光纤。该棱镜可以为台型棱镜,薄膜可以镀于台型棱镜的下平面,或者,薄膜镀于多模光纤的纤芯截面上。薄膜为金属薄膜或石墨烯薄膜。The acoustic signal detector 102 may be a prism whose upper and lower planes are parallel and one of the planes is coated with a thin film, or may be a multimode optical fiber coated with a thin film. The prism can be a trapezoidal prism, and the thin film can be coated on the lower plane of the trapezoidal prism, or the thin film can be coated on the core section of the multimode optical fiber. The film is a metal film or a graphene film.

金属薄膜或石墨烯薄膜作为表面波产生的基底材料,表面金属薄膜的厚度和石墨烯薄膜的厚度可以替换,不同薄膜层厚度会对最高检测灵敏度有影响。金属薄膜可以为金膜、银膜等,优选的,所镀的金属膜的厚度约45nm。石墨烯薄膜可以分为多层进行蒸镀,优选的,石墨烯薄膜具有5层石墨烯,厚度为1.7nm。The metal film or graphene film is used as the base material for surface wave generation, the thickness of the surface metal film and the graphene film can be replaced, and the thickness of different film layers will affect the highest detection sensitivity. The metal thin film can be a gold film, a silver film, etc., preferably, the thickness of the plated metal film is about 45nm. The graphene film can be divided into multiple layers for vapor deposition. Preferably, the graphene film has 5 layers of graphene with a thickness of 1.7 nm.

采用金属薄膜作为产生表面波的基底材料,即将金属薄膜镀于台型棱镜或单模光纤的表面上,可以使得SPR差分光声检测理论检测灵敏度可达到10-8RIU,在水中对应于0.07Pa的声压变化,远高于现有超声换能器的检测灵敏度。同时,激发SPR的响应时间是纳秒量级,对应理想频带宽度能达到1000MHz,也远高于现有超声换能器的频带响应宽度。Using metal thin film as the base material for generating surface waves, that is, coating the metal thin film on the surface of a table-shaped prism or a single-mode optical fiber, can make the theoretical detection sensitivity of SPR differential photoacoustic detection reach 10 -8 RIU, which corresponds to 0.07Pa in water The sound pressure change is much higher than the detection sensitivity of existing ultrasonic transducers. At the same time, the response time for stimulating SPR is on the order of nanoseconds, and the corresponding ideal frequency bandwidth can reach 1000MHz, which is also much higher than the frequency bandwidth response width of existing ultrasonic transducers.

石墨烯薄膜相比金属薄膜具有更好的热传导率、更大的热损伤阈值,更适合高功率脉冲激光作为光声信号的激发源。并且,石墨烯薄膜相比金属薄膜具有更高的自由电子密度,因此石墨烯对于光的吸收时间响应更快,能达到皮秒,甚至飞秒量级,其对应的理想频带宽度更宽。Graphene films have better thermal conductivity and greater thermal damage threshold than metal films, and are more suitable for high-power pulsed lasers as excitation sources for photoacoustic signals. Moreover, graphene film has a higher free electron density than metal film, so graphene has a faster response to light absorption time, which can reach picosecond or even femtosecond level, and its corresponding ideal frequency bandwidth is wider.

如图3所示,多模光纤301包括包层302和置于包层内的纤芯303,多模光纤301的纤芯303具有一与多模光纤301长度延伸方向平行的截面304,包层302具有一缺口305,截面304位于缺口305处,缺口305使得截面304裸露于包层302外面,薄膜镀于截面304上。具体的,将多模光纤301的包层302沿与长度垂直的方向上截开一段,使纤芯302的外表面裸露出来,裸露出来的纤芯302的外表面可以为截开的一段包层302对应的纤芯303的二分之一外表面、三分之一外表面等。然后再将裸露出来的纤芯302沿着多模光纤301的长度方向截开,得到的截面304与多模光纤301的长度延伸方向相平行,再在截面304上镀上金属薄膜或石墨烯薄膜。As shown in Figure 3, the multimode optical fiber 301 comprises a cladding 302 and a core 303 placed in the cladding, the core 303 of the multimode optical fiber 301 has a section 304 parallel to the extending direction of the length of the multimode optical fiber 301, and the cladding 302 has a notch 305, the section 304 is located at the notch 305, the notch 305 exposes the section 304 outside the cladding 302, and the thin film is plated on the section 304. Specifically, the cladding 302 of the multimode optical fiber 301 is cut off for a section along the direction perpendicular to the length, so that the outer surface of the fiber core 302 is exposed, and the outer surface of the exposed fiber core 302 can be a cut section of the cladding 302 corresponds to one-half of the outer surface of the fiber core 303, one-third of the outer surface, and the like. Then the exposed fiber core 302 is cut along the length direction of the multimode fiber 301, and the section 304 obtained is parallel to the extension direction of the length of the multimode fiber 301, and then coated with a metal film or a graphene film on the section 304 .

该基于表面波的声信号探测器使用反射式显微物镜将激光聚集照射到待测物体103上,使得待测物体103吸收激光并产生光声信号,然后再采用声信号探测器检测经介质传输发生折射的光声信号,并根据所述折射后的光声信号生成待测物体的检测谱。该声信号探测器由于采用了光学传感折射率的方法,使得待测物体具有免标记、非接触式的传感检测特点,并且能够实现探测带宽、检测灵敏的优点。The acoustic signal detector based on the surface wave uses a reflective microscope objective lens to concentrate and irradiate the laser light on the object 103 to be measured, so that the object 103 to be measured absorbs the laser light and generates a photoacoustic signal, and then uses the acoustic signal detector to detect the transmission through the medium. A refracted photoacoustic signal is generated, and a detection spectrum of the object to be measured is generated according to the refracted photoacoustic signal. Since the acoustic signal detector adopts the method of optically sensing the refractive index, the object to be measured has the characteristics of marking-free and non-contact sensing detection, and can realize the advantages of detection bandwidth and detection sensitivity.

请参阅图2,图2为本实用新型基于表面波的声压检测器的反射式光声显微镜结构示意图,该反射式光声显微镜包括反射式显微物镜101、声信号探测器102、激发光路组件和探测光路组件。Please refer to Fig. 2. Fig. 2 is a schematic structural diagram of a reflective photoacoustic microscope based on a surface wave sound pressure detector of the present invention. Components and Probing Optical Path Components.

反射式显微物镜101置于声信号探测器102的上方,用于将激光聚焦照射到待测物体103上。待测物体103吸收激光并产生光声信号,光声信号反向传输经过介质发生折射后进入声信号探测器102。The reflective microscope objective lens 101 is placed above the acoustic signal detector 102 for focusing and irradiating the laser light onto the object 103 to be measured. The object 103 to be measured absorbs the laser light and generates a photoacoustic signal, and the photoacoustic signal is reversely transmitted through the medium for refraction and then enters the acoustic signal detector 102 .

声信号探测器102置于待测物体103的上方,用于检测经介质传输的光声信号,并根据光声信号生成待测物体103的检测谱。探测光路器件102为镀有薄膜的台型棱镜或者镀有薄膜的单模光纤301,薄膜镀于台型棱镜的下表面,或者薄膜镀于单模光纤301的纤芯303截面上。薄膜为金属薄膜或石墨烯薄膜。关于金属薄膜或者石墨烯薄膜的点请参照上一实施例,在此不再赘述。The acoustic signal detector 102 is placed above the object to be measured 103 for detecting the photoacoustic signal transmitted through the medium, and generating a detection spectrum of the object to be measured 103 according to the photoacoustic signal. The detection optical device 102 is a trapezoidal prism coated with a thin film or a single-mode optical fiber 301 coated with a thin film. The film is a metal film or a graphene film. For details about the metal thin film or the graphene thin film, please refer to the previous embodiment, which will not be repeated here.

激发光路组件用于发射脉冲激光聚焦到待测物体103上,以激发待测物体103产生光声信号。The excitation light path component is used to emit pulsed laser light and focus it on the object 103 to be measured, so as to excite the object 103 to be measured to generate a photoacoustic signal.

激发光路组件包括可调谐激光器104、光阑105、扩束装置106、聚焦耦合透镜107和第一单模光纤108。The excitation light path components include a tunable laser 104 , an aperture 105 , a beam expander 106 , a focusing coupling lens 107 and a first single-mode fiber 108 .

可调谐激光器104用于产生脉冲激光,脉冲激光用于光声成像。作为其中一个例子,该脉冲激光的波长为532nm、脉冲宽度为1.8ns,其它波长和脉冲宽度的脉冲激光也可以实现光声成像,在光声成像的过程中,需要根据脉冲激光的波长和脉冲宽度进行调整其它光学器件的参数。The tunable laser 104 is used to generate pulsed laser, which is used for photoacoustic imaging. As an example, the pulsed laser has a wavelength of 532 nm and a pulse width of 1.8 ns. Pulsed lasers with other wavelengths and pulse widths can also realize photoacoustic imaging. Width to adjust parameters of other optics.

光阑105置于可调谐激光器104的前方,用于调整脉冲激光的光束大小。The aperture 105 is placed in front of the tunable laser 104 for adjusting the beam size of the pulsed laser.

扩束装置106用于将从光阑105出来的脉冲激光的光束进行扩大。扩束装置106包括透镜1061、针孔镜头1062和透镜1063。The beam expander 106 is used to expand the beam of the pulsed laser light coming out of the aperture 105 . The beam expander 106 includes a lens 1061 , a pinhole lens 1062 and a lens 1063 .

聚焦耦合透镜107置于扩束装置106的前方,用于将经过光束扩大的脉冲激光进行聚焦耦合。The focus coupling lens 107 is placed in front of the beam expander 106 for focusing and coupling the pulsed laser beam expanded.

第一单模光纤108置于聚焦耦合透镜107的前方,用于将聚焦耦合后的脉冲激光传输到反射式显微物镜101上。第一单模光纤108的激光从光纤端口111中进行输出。利用光纤对脉冲激光进行耦合传输,就是利用光纤传输的稳定性,保证在平台扫描成像的过程中,光信号在系统的核心部分包括反射式显微物镜101,台型棱镜中没有变化,从而能够保证在均一条件下实现光声成像。The first single-mode optical fiber 108 is placed in front of the focusing coupling lens 107 for transmitting the focused and coupled pulsed laser light to the reflective microscope objective lens 101 . The laser light of the first single-mode fiber 108 is output from the fiber port 111 . The use of optical fiber to couple and transmit the pulsed laser is to use the stability of optical fiber transmission to ensure that the optical signal does not change in the core part of the system including the reflective microscope objective lens 101 and the mesa prism during the scanning and imaging process of the platform, so that it can Ensure photoacoustic imaging under homogeneous conditions.

激发光路组件还包括平面光装置109和平面镜110。平面光装置109置于单模光纤108的前方,用于将第一单模光纤108输出的激光源扩束成准平面光。平面镜110置于平面光装置109的前方,用于改变脉冲激光的方向使其能进入到反射式显微物镜101上。The excitation light path assembly also includes a plane light device 109 and a plane mirror 110 . The planar light device 109 is placed in front of the single-mode optical fiber 108, and is used to expand the beam of the laser source output by the first single-mode optical fiber 108 into quasi-planar light. The plane mirror 110 is placed in front of the plane light device 109 for changing the direction of the pulsed laser light so that it can enter the reflective microscope objective lens 101 .

脉冲激光经过光阑105、扩束装置106和聚焦耦合透镜107后,进入高数值孔径的反射式显微物镜101作为激发源,产生声压信号。声压信号的产生是由于脉冲激光经高数值孔径的反射式显微物镜101聚焦到待测物体103上,样品通过吸收,因瞬时热弹性效应产生的宽带超起波(即光声信号)。产生的光声信号通过介质传递到声信号探测器102的表面,引起折射率的变化。该介质可以为空气、液体,比如,水、油、溶液等。折射率变化是由于声信号引起介质密度的微小变化,比如,水或者空气,物质密度的变化,表现之一就是折射率的变化。After the pulsed laser passes through the diaphragm 105, the beam expander 106 and the focusing coupling lens 107, it enters the reflective microscopic objective lens 101 with high numerical aperture as an excitation source to generate a sound pressure signal. The sound pressure signal is generated because the pulsed laser is focused on the object 103 to be measured through the reflective microscope objective lens 101 with high numerical aperture, and the sample passes through absorption, resulting in a broadband super wave (ie photoacoustic signal) generated by the instantaneous thermoelastic effect. The generated photoacoustic signal is transmitted to the surface of the acoustic signal detector 102 through the medium, causing a change in the refractive index. The medium may be air, a liquid, such as water, oil, a solution, or the like. The change of the refractive index is due to the small change of the density of the medium caused by the acoustic signal, such as water or air. One of the manifestations of the change of the material density is the change of the refractive index.

探测光路组件用于发出连续激光入射到声信号探测器102上以进行全内反射,并检测经过全内反射后的反射光信号的折射率变化。The detection optical path assembly is used to emit continuous laser light incident on the acoustic signal detector 102 for total internal reflection, and detect the change of the refractive index of the reflected light signal after total internal reflection.

探测光路组件包括激光器201、波片202、第一聚焦耦合透镜203、第二单模光纤204、第一准直耦合器205、第二准直耦合器206、第三单模光纤207、第二聚焦耦合透镜208、偏振分束器210和平衡探测器211。声信号探测器102的下方放置一水槽213,待测物体103置于水槽213的下方。The detection optical path assembly includes a laser 201, a wave plate 202, a first focusing coupling lens 203, a second single-mode fiber 204, a first collimating coupler 205, a second collimating coupler 206, a third single-mode fiber 207, a second Focus coupling lens 208 , polarizing beam splitter 210 and balanced detector 211 . A water tank 213 is placed under the acoustic signal detector 102 , and the object 103 to be tested is placed under the water tank 213 .

激光器201用于产生连续激光。Laser 201 is used to generate continuous laser light.

波片202置于激光器201的前方,用于将连续激光调成圆偏光,该波片202可以为四分之一波片。The wave plate 202 is placed in front of the laser 201 for adjusting the continuous laser light into circularly polarized light, and the wave plate 202 may be a quarter wave plate.

第一聚焦耦合透镜203置于波片202的前方,用于将圆偏光进行聚焦耦合。The first focusing and coupling lens 203 is placed in front of the wave plate 202 for focusing and coupling the circularly polarized light.

第二单模光纤204置于第一聚焦耦合透镜203的前方,用于将聚焦耦合后的连续激光进行传输。第二单模光纤204的激光从光纤端口217进行输出。即将连续激光耦合进入光纤,实现光纤传输,聚焦于声信号探测器102的表面。The second single-mode optical fiber 204 is placed in front of the first focusing coupling lens 203 for transmitting the focused and coupled continuous laser light. The laser light of the second single-mode fiber 204 is output from the fiber port 217 . That is, the continuous laser light is coupled into the optical fiber to realize optical fiber transmission and focus on the surface of the acoustic signal detector 102 .

第一、第二准直耦合器205、206置于声信号探测器102的两侧。第一准直耦合器205用于将从第二单模光纤204出来的光进行准直耦合。第二准直耦合器206用于将从声信号探测器102中出来的光进行准直耦合后输出到第三单模光纤207。The first and second collimating couplers 205 and 206 are placed on both sides of the acoustic signal detector 102 . The first collimating coupler 205 is used for collimating and coupling the light emitted from the second single-mode fiber 204 . The second collimating coupler 206 is used for collimating and coupling the light emitted from the acoustic signal detector 102 and outputting it to the third single-mode optical fiber 207 .

第三单模光纤207用于传输从第二准直耦合器206出来的反射光。第三单模光纤207的激光从光纤端口216中进行输出。在探测光路中,利用第二单模光纤204、第三单模光纤207和第一、第二准直耦合器205、206进行耦合传输,光纤传输使得连续激光具有稳定性,从而保证了平台扫描成像过程中,光信号在系统的核心部分包括反射式显微物镜101和声信号探测器102中没有变化,从而保证在均一条件下实现光声成像。The third single-mode fiber 207 is used to transmit the reflected light from the second collimating coupler 206 . The laser light of the third single-mode fiber 207 is output from the fiber port 216 . In the detection optical path, the second single-mode fiber 204, the third single-mode fiber 207, and the first and second collimation couplers 205, 206 are used for coupling transmission, and the fiber transmission makes the continuous laser stable, thus ensuring the platform scanning During the imaging process, the optical signal does not change in the core part of the system including the reflective microscopic objective lens 101 and the acoustic signal detector 102, thereby ensuring photoacoustic imaging under uniform conditions.

第二聚焦耦合透镜208用于将反射光进行聚焦耦合。The second focus coupling lens 208 is used to focus and couple the reflected light.

偏振分束器210用于将进行聚焦耦合后的反射光进行分束,分为P偏振光和S偏振光。The polarization beam splitter 210 is used to split the focused and coupled reflected light into P-polarized light and S-polarized light.

平衡探测器211置于偏振分束器210后,用于检测P偏振光和S偏振光的折射率变化量。The balance detector 211 is placed behind the polarization beam splitter 210 and is used to detect the variation of the refractive index of the P-polarized light and the S-polarized light.

探测光路组件还可以包括平面镜209,平面镜209置于偏振分束器的一侧,用于调整从偏振分束器210出来的S偏振光的方向。The detection optical path assembly may also include a plane mirror 209 placed on one side of the polarization beam splitter for adjusting the direction of the S-polarized light coming out of the polarization beam splitter 210 .

连续激光经过四分之一波片202调制成圆偏光,经第一聚焦耦合透镜203聚焦耦合,利用第二单模光纤204进行传输,入射到台型棱镜的表面,利用全内反射,检测红光的反射光信号,反射光再经过第三单模光纤207传输,第二聚焦耦合透镜208聚焦耦合,偏振分束器210分为P偏振与S偏振两部分光,利用平衡探测器211检测圆偏振光中P偏振分量和S偏振分量的强度差,实现台型棱镜表面的折射率变化的测量,通过检测共光路中的P和S偏振光分量的强度实现差分检测,可以有效的降低环境干扰,包括激光器的不稳定,环境震动,温度变化等因素的影响,提高系统的检测灵敏度。The continuous laser light is modulated into circularly polarized light by the quarter-wave plate 202, focused and coupled by the first focusing coupling lens 203, transmitted by the second single-mode optical fiber 204, incident on the surface of the table-shaped prism, and detected by total internal reflection. The reflected light signal of the light, the reflected light is transmitted through the third single-mode optical fiber 207, the second focusing coupling lens 208 is focused and coupled, the polarization beam splitter 210 is divided into two parts of P polarization and S polarization, and the balance detector 211 is used to detect the circular The intensity difference between the P polarization component and the S polarization component in the polarized light realizes the measurement of the refractive index change on the surface of the mesa prism, and realizes differential detection by detecting the intensity of the P and S polarization components in the common optical path, which can effectively reduce environmental interference , including the influence of factors such as laser instability, environmental vibration, and temperature changes, to improve the detection sensitivity of the system.

声压检测器还包括成像装置212、控制数据卡215和三维平台,成像装置212根据平衡探测器211检测到的折射率变化量生成待测物体的光声成像立体图,该成像装置可以为台式电脑、笔记本电脑等。该三维平台可以是三维电动平台、也可以是三维手动平台。反射式显微物镜101、声信号探测器102等器件固设于三维电动平台上。图中虚线框214部分的光学器件反射式显微物镜101、声信号探测器102、平面光装置109、平面镜110、第一准直耦合器205、第二准直耦合器206和水槽213均可以固设于三维电动平台上。控制数据卡215与成像装置212连接,用于控制三维平台的高精度移动,以及控制可调谐激光器104和平衡探测器211,以确保三维平台、可调谐激光器104和平衡探测器211之间的同步。成像装置212还用于对控制数据进行存储和分析。通过三维电动平台的三维扫描实现光声成像,该三维电动平台具有扫描范围大的优点,适用于生物厚样品、活体样品的光声成像。The sound pressure detector also includes an imaging device 212, a control data card 215 and a three-dimensional platform. The imaging device 212 generates a photoacoustic imaging stereogram of the object to be measured according to the refractive index variation detected by the balance detector 211. The imaging device can be a desktop computer , laptop, etc. The three-dimensional platform may be a three-dimensional electric platform or a three-dimensional manual platform. Components such as the reflective microscope objective lens 101 and the acoustic signal detector 102 are fixed on the three-dimensional electric platform. The optical device reflective microscopic objective lens 101, acoustic signal detector 102, planar light device 109, planar mirror 110, first collimating coupler 205, second collimating coupler 206 and water tank 213 of dotted line frame 214 part among the figure all can be Fixed on the three-dimensional electric platform. The control data card 215 is connected with the imaging device 212, and is used to control the high-precision movement of the three-dimensional platform, and to control the tunable laser 104 and the balance detector 211, so as to ensure the synchronization between the three-dimensional platform, the tunable laser 104 and the balance detector 211 . The imaging device 212 is also used for storage and analysis of control data. The photoacoustic imaging is realized through the three-dimensional scanning of the three-dimensional electric platform. The three-dimensional electric platform has the advantage of a large scanning range and is suitable for photoacoustic imaging of biological thick samples and living samples.

在光声成像过程中,待测物体103放置在扫描平台下方,待测物体103可以是活体组织样品。利用三维电动平台扫描,实现光聚焦照射在待测物体103的不同部位,当脉冲激光经反射式显微物镜101聚焦激发待测物体103,由于待测物体103吸收产生光声信号,光声信号反向传输进入水槽213经水传导到声信号探测器102的表面,引起表面折射率的微弱变化,因为脉冲光信号不会引起表面折射率的变化,因此通过检测表面折射率的变化可以得到确切的光声信号。由于声信号探测器102不同部位对于光吸收并不相同,会产生不同强度声谱的光声信号。不同强度的光声信号造成表面折射率大小的变化,不同声谱的光声信号也会引起折射率变化的时间响应不同。利用声信号探测器102检测折射率大小变化量和时间响应特性,从而可以分析出待测物体103的物质成分。利用三维平台,纵向扫描可以实现不同深度待测物体103的检测,横向扫描实现同一深度平面内待测物体103的检测,成像分辨率由三维平台精度与光声信号检测谱宽决定,将待测物体103不同部位的扫描信息组合就可以实现一副完整的光声成像立体图。如图4所示,为基于表面波的声信号探测器测得的光声信号示意图,如图5所示,为采用本实用新型的基于表面波的声信号探测器检测到的光声信号频谱范围示意图。During the photoacoustic imaging process, the object to be measured 103 is placed under the scanning platform, and the object to be measured 103 may be a living tissue sample. The three-dimensional electric platform is used to scan to realize focused light irradiation on different parts of the object 103 to be measured. When the pulsed laser is focused and excited by the reflective microscopic objective lens 101 to excite the object 103 to be measured, a photoacoustic signal is generated due to the absorption of the object 103 to be measured. Reverse transmission enters the water tank 213 and conducts to the surface of the acoustic signal detector 102 through the water, causing a weak change in the surface refractive index, because the pulsed light signal does not cause the change in the surface refractive index, so the exact change can be obtained by detecting the change in the surface refractive index. photoacoustic signal. Since different parts of the acoustic signal detector 102 absorb light differently, photoacoustic signals with different intensities of acoustic spectra will be generated. Photoacoustic signals of different intensities cause changes in the refractive index of the surface, and photoacoustic signals of different acoustic spectra also cause different time responses of refractive index changes. By using the acoustic signal detector 102 to detect the variation of the refractive index and the time response characteristic, the material composition of the object 103 to be measured can be analyzed. Using the three-dimensional platform, the vertical scanning can realize the detection of the object 103 to be measured at different depths, and the horizontal scanning can realize the detection of the object 103 to be measured in the same depth plane. The imaging resolution is determined by the precision of the three-dimensional platform and the detection spectral width of the photoacoustic signal. Combining the scanning information of different parts of the object 103 can realize a complete photoacoustic imaging stereogram. As shown in Figure 4, it is a schematic diagram of the photoacoustic signal measured by the acoustic signal detector based on the surface wave, and as shown in Figure 5, it is a photoacoustic signal spectrum detected by the acoustic signal detector based on the surface wave of the present utility model Range diagram.

基于表面波的声压检测器的反射式光声显微镜可以分为激发光路组件和探测光路组件,激发光路部分主要由可调谐激光器104、光阑105、扩束装置106、聚焦耦合透镜107和第一单模光纤108等光学器件组成,探测光路部分主要由激光器201、波片202、第一聚焦耦合透镜203、第二单模光纤204、第一准直耦合器205、第二准直耦合器206、第三单模光纤207、第二聚焦耦合透镜208、偏振分束器210和平衡探测器211等光学器件组成。The reflective photoacoustic microscope based on the surface wave acoustic pressure detector can be divided into an excitation optical path assembly and a detection optical path assembly. The excitation optical path is mainly composed of a tunable laser 104, an aperture 105, a beam expander 106, a focusing coupling lens 107 and A single-mode optical fiber 108 and other optical devices, the detection optical path is mainly composed of a laser 201, a wave plate 202, a first focusing coupling lens 203, a second single-mode optical fiber 204, a first collimating coupler 205, a second collimating coupler 206, a third single-mode optical fiber 207, a second focusing coupling lens 208, a polarization beam splitter 210, a balance detector 211 and other optical components.

激发光路中的脉冲激光从可调谐激光器104出来,经过光阑,扩束,光纤耦合,单模光纤传输,平面镜反射进入反射式显微物镜101。脉冲激光经过高数值孔径的反射式显微物镜101聚焦激发待测物体103,利用瞬时热弹性效应产生的宽带超声波(即光声信号),采用脉冲光激发,是由于声信号是一个宽谱信号,可以通过检测光声信号的时间响应,利用时域-频域变化分析,得到光声信号的整个宽谱信息。入射的激光将有很大部分被吸收或透过待测物体103,如果待测物体103属于薄层或透明体激光将能透过,其反射比例较小,而产生的光声信号基本属于各向同向传输,通过探测光路检测后向传输的光声信号,最大的优势是可以避免激发光路中的激光的干扰,可以实现活体厚样品的检测。探测光路中,连续激光经过1/4波片202调制成圆偏光,经聚焦耦合,利用单模光纤传输,入射到台式棱镜表面,利用全内反射,检测红光的反射光信号,反射光经聚焦耦合,第三单模光纤207传输,偏振分束器210分为P偏振与S偏振两部分光,利用平衡探测器211检测圆偏振光中P偏振分量和S偏振分量的强度差,实现台型棱镜表面的折射率变化的测量,通过检测共光路中的P和S偏振光分量的强度实现差分检测,可以有效的降低环境干扰,提高系统的检测灵敏度。由于台型棱镜的表面或单模光纤301的纤芯303截面镀金属薄膜或石墨烯薄膜,可以进一步增大由表面微弱折射率变化引起的两种偏振光分量的反射强度差,起到放大信号的作用,提高检测灵敏度。如图6所示,为采用基于表面波的声信号探测器的反射式光声显微镜检测得到的人体毛发样品的光声成像示意图。The pulsed laser light in the excitation optical path comes out of the tunable laser 104 , passes through an aperture, expands the beam, couples with an optical fiber, transmits with a single-mode optical fiber, and is reflected by a plane mirror and enters the reflective microscope objective lens 101 . The pulsed laser is focused and excited by the reflective microscopic objective lens 101 with high numerical aperture to excite the object 103 to be measured, and the broadband ultrasonic wave (that is, the photoacoustic signal) generated by the instantaneous thermoelastic effect is used to excite with pulsed light, because the acoustic signal is a wide-spectrum signal , the entire wide-spectrum information of the photoacoustic signal can be obtained by detecting the time response of the photoacoustic signal and using time-frequency domain variation analysis. A large part of the incident laser light will be absorbed or transmitted through the object 103 to be measured. If the object 103 to be measured is a thin layer or a transparent body, the laser light will be able to pass through, and its reflection ratio is small, and the generated photoacoustic signals basically belong to each Transmitting in the same direction and detecting the photoacoustic signal transmitted backward through the detection optical path, the biggest advantage is that it can avoid the interference of the laser in the excitation optical path, and can realize the detection of thick samples in vivo. In the detection optical path, the continuous laser light is modulated into circularly polarized light by a 1/4 wave plate 202. After focusing and coupling, it is transmitted by a single-mode optical fiber and incident on the surface of a desktop prism. Using total internal reflection, the reflected light signal of red light is detected. The reflected light passes through Focusing coupling, transmission by the third single-mode optical fiber 207, polarization beam splitter 210 is divided into two parts of P polarization and S polarization, and the balance detector 211 is used to detect the intensity difference between the P polarization component and the S polarization component in the circularly polarized light to realize the The measurement of the refractive index change on the surface of the type prism realizes differential detection by detecting the intensity of P and S polarized light components in the common optical path, which can effectively reduce environmental interference and improve the detection sensitivity of the system. Because the surface of the trapezoidal prism or the core 303 section of the single-mode optical fiber 301 is coated with a metal film or a graphene film, the reflection intensity difference of the two polarized light components caused by the weak refractive index change on the surface can be further increased to amplify the signal. function to improve the detection sensitivity. As shown in FIG. 6 , it is a schematic diagram of photoacoustic imaging of a human hair sample detected by a reflective photoacoustic microscope based on a surface wave acoustic signal detector.

本实用新型的基于表面波的声信号探测器的反射式光声显微镜使用反射式显微物镜将激光聚集照射到待测物体103上,使得待测物体103吸收激光并产生光声信号,然后再采用声信号探测器102检测经介质传输发生折射的光声信号,并根据折射后的光声信号生成待测物体的检测谱。本实用新型中光学表面波传感技术采用光学传感折射率的方法实现,具有免标记、非接触式的传感检测特点,可广泛应用于细胞和分子水平检测。由于任何微小的变化和作用都极易引起折射率的改变,因此声波振动引起的溶液折射率轻微变化也可以被光学表面波探测到。表面波在声波探测带宽、灵敏度等方面均有优势:表面波传播距离短,时间响应快,一般为1ns以内,可以实现更高的探测带宽;并且表面波对折射率微小变化有超强敏感性,可以实现10Pa水平的探测灵敏度;同时,由于表面波对不同偏振的响应特性,利用偏振差分方法可以极大提高信号对比度。The reflective photoacoustic microscope of the acoustic signal detector based on the surface wave of the utility model uses a reflective microscopic objective lens to gather and irradiate the laser light onto the object 103 to be measured, so that the object 103 to be measured absorbs the laser light and generates a photoacoustic signal, and then The acoustic signal detector 102 is used to detect the refracted photoacoustic signal transmitted through the medium, and a detection spectrum of the object to be measured is generated according to the refracted photoacoustic signal. The optical surface wave sensing technology in the utility model is realized by the method of optical sensing refractive index, which has the characteristics of label-free and non-contact sensing and detection, and can be widely used in the detection of cells and molecules. Since any small change and action can easily cause the change of the refractive index, the slight change of the solution's refractive index caused by the acoustic vibration can also be detected by the optical surface wave. Surface waves have advantages in acoustic wave detection bandwidth, sensitivity, etc.: surface wave propagation distance is short, time response is fast, generally within 1ns, and higher detection bandwidth can be achieved; surface waves are super sensitive to small changes in refractive index , can achieve a detection sensitivity of 10Pa level; at the same time, due to the response characteristics of surface waves to different polarizations, the signal contrast can be greatly improved by using the polarization difference method.

以上所述仅为本实用新型的较佳实施例而已,并不用以限制本实用新型,凡在本实用新型的精神和原则之内所作的任何修改、等同替换和改进等,均应包含在本实用新型的保护范围之内。The above descriptions are only preferred embodiments of the present utility model, and are not intended to limit the present utility model. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present utility model shall be included in this utility model. within the scope of protection of utility models.

Claims (13)

1. an acoustical signal detector based on surface wave, it is characterised in that include the rib with two planes being parallel to each other Mirror, described in a plane in two planes being parallel to each other be coated with thin film, described thin film for detection through the light of medium transmission Acoustical signal.
Acoustical signal detector the most according to claim 1, it is characterised in that described thin film be metallic film or Graphene thin Film.
3. an acoustical signal detector based on surface wave, including multimode fibre, it is characterised in that described multimode fibre includes bag Layer and the fibre core being placed in covering, it is parallel with described multimode fibre length bearing of trend that the fibre core of described multimode fibre has one Cross section, described covering has a breach making described cross section be exposed to outside described covering, and described cross section is positioned at described indentation, there, institute Stating and be coated with thin film on cross section, described thin film is for detecting the photoacoustic signal through medium transmission.
Acoustical signal detector the most according to claim 3, it is characterised in that described thin film be metallic film or Graphene thin Film.
5. the reflecting light sonomicroscope of an acoustic pressure detector based on surface wave, it is characterised in that include reflective micro- Object lens harmony signal sensor;
Described catoptric micro objective is placed in the top of described acoustical signal detector, shines for the laser focusing launched by lasing light emitter It is mapped on object under test so that described object under test absorbs described laser and produces photoacoustic signal, and described photoacoustic signal reversely passes Defeated after the medium above object under test reflects, enter described acoustical signal detector;
Described acoustical signal detector is placed in the top of described object under test and is positioned at the lower section of described catoptric micro objective, is used for Detect through the photoacoustic signal of medium transmission, and according to described photoacoustic signal generate object under test for making object under test imaging Detection spectrum.
Reflecting light sonomicroscope the most according to claim 5, it is characterised in that described acoustical signal detector is for put down up and down Face is parallel and lower plane is coated with the prism of thin film or is coated with the multimode fibre of thin film, and described thin film is for detecting through medium transmission Photoacoustic signal;
Described multimode fibre include covering and the fibre core being placed in covering, the fibre core of described multimode fibre have one with described multimode The cross section that fiber lengths bearing of trend is parallel, described covering has a breach making described cross section be exposed to outside described covering, institute Stating cross section and be positioned at described indentation, there, described thin film is plated on described cross section.
Reflecting light sonomicroscope the most according to claim 5, it is characterised in that described reflecting light sonomicroscope also wraps Include excitation light path assembly and detection optical path component;
Described excitation light path assembly focuses on described object under test for emission pulse laser, to excite object under test to produce light Acoustical signal;
Described detection optical path component is used for sending continuous laser and incides to carry out total internal reflection on described acoustical signal detector, and The variations in refractive index of detection reflected light signal after total internal reflection.
Reflecting light sonomicroscope the most according to claim 7, it is characterised in that described excitation light path assembly includes adjustable Humorous laser instrument, diaphragm, expand device, focus on coupled lens and the first single-mode fiber;
Described tunable laser is used for producing pulse laser;
Described diaphragm is placed in the front of described tunable laser, for adjusting the beam size of pulse laser;
The described device that expands is for being enlarged from the light beam of described diaphragm pulse laser out;
Described focusing coupled lens expands the front of device described in being placed in, for being gathered by the pulse laser expanded through light beam Burnt coupling;
Described first single-mode fiber is placed in the front of described focusing coupled lens, and the pulse laser after focusing on coupling transmits On described catoptric micro objective.
Reflecting light sonomicroscope the most according to claim 8, it is characterised in that described excitation light path assembly also includes putting down Face electro-optical device and plane mirror;
Described planar light device is placed in the front of described single-mode fiber, for being expanded by the lasing light emitter of described first single-mode fiber output Restraint into directrix plane light;
Described plane mirror is placed in the front of described planar light device, makes pulse laser to enter for changing the direction of pulse laser On described catoptric micro objective.
Reflecting light sonomicroscope the most according to claim 7, it is characterised in that described detection optical path component includes swashing Light device, wave plate, the first focusing coupled lens, the second single-mode fiber, the first collimation bonder, the second collimation bonder, the 3rd list Mode fiber, the second focusing coupled lens, polarization beam apparatus and balanced detector;A water is placed in the lower section of described acoustical signal detector Groove, described object under test is placed in the lower section of described tank;
Described laser instrument is used for producing continuous laser;
Described wave plate is placed in the front of described laser instrument, for by described continuous laser furnishing rotatory polarization;
Described first focuses on coupled lens is placed in the front of described wave plate, for rotatory polarization is focused coupling;
Described second single-mode fiber is placed in the described first front focusing on coupled lens, for focusing on the continuous laser after coupling It is transmitted;
Described first, second collimation bonder is placed in the both sides of described acoustical signal detector, and described first collimation bonder is used for To carry out collimation coupling from described second single-mode fiber light out, described second collimation bonder is for will be from described acoustical signal After in detector, light out carries out collimation coupling, output is to described 3rd single-mode fiber;
Described 3rd single-mode fiber collimates bonder reflection light out for transmission from described second;
Described second focuses on coupled lens for described reflection light is focused coupling;
Described polarization beam apparatus reflection light after being focused coupling is split, and is divided into P polarization light and S-polarization light;
After described balanced detector is placed in described polarization beam apparatus, for detecting described P polarization light and the refraction of described S-polarization light Rate variable quantity.
11. reflecting light sonomicroscopes according to claim 10, it is characterised in that described detection optical path component includes putting down Face mirror, described plane mirror is placed in the side of polarization beam apparatus, for adjusting the side from described polarization beam apparatus S-polarization light out To.
12. reflecting light sonomicroscope according to claim 10, it is characterised in that described acoustic pressure detector also includes into As device, the optoacoustic that described imaging device generates object under test according to the refractive index variable quantity that described balanced detector detects becomes As axonometric chart.
13. reflecting light sonomicroscopes according to claim 5, it is characterised in that described reflecting light sonomicroscope is also It is fixedly arranged on three-D electric platform including three-D electric platform, described catoptric micro objective and described acoustical signal detector.
CN201620547452.6U 2016-06-07 2016-06-07 Acoustical signal detector based on surface wave and reflecting light sonomicroscope Withdrawn - After Issue CN205826515U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106092901A (en) * 2016-06-07 2016-11-09 深圳大学 A kind of acoustical signal detector based on surface wave and reflecting light sonomicroscope

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106092901A (en) * 2016-06-07 2016-11-09 深圳大学 A kind of acoustical signal detector based on surface wave and reflecting light sonomicroscope
CN106092901B (en) * 2016-06-07 2019-04-30 深圳大学 A Surface Wave-Based Acoustic Signal Detector and Reflection Photoacoustic Microscope

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