CN205809412U - A kind of with beam type piezoelectric actuator for the distorting lens driven - Google Patents

Abstract

The utility model provides a deformable mirror driven by a beam-type piezoelectric actuator. The deformable mirror driven by a beam-type piezoelectric actuator includes a lens, a piezoelectric actuator group and a rod pad group, and the piezoelectric actuator group includes a plurality of piezoelectric actuators arranged at intervals, so The rod pad set includes a plurality of rod pads arranged in parallel and spaced apart, each of the piezoelectric actuators is fixed on the back of the lens through one of the rod pads, and each of the rod pads has a square cross section. cuboid structure; each of the piezoelectric actuators is a beam-type double piezoelectric actuator with a straight beam structure, and includes a first strip-shaped piezoelectric layer, a strip-shaped metal layer and a second A strip-shaped piezoelectric layer, the first strip-shaped piezoelectric layer and the second strip-shaped piezoelectric layer of the piezoelectric actuator are electrically connected to an external power supply with the same voltage, and the strip-shaped metal layer is the first strip-shaped piezoelectric layer A common electrode of the strip-shaped piezoelectric layer and the second strip-shaped piezoelectric layer, and the strip-shaped metal layer is grounded.

Description

A Deformable Mirror Driven by a Beam-type Piezoelectric Actuator

technical field

The invention belongs to the technical field of piezoelectric actuators, in particular to a piezoelectric actuator with a large range and high resonance frequency.

Background technique

Piezoelectric materials have excellent electromechanical coupling properties. Actuators developed from piezoelectric materials have the characteristics of fast response and high precision, and are widely used in the industry. However, piezoelectric actuators on the market have the limitation of small measuring range. Due to the small measuring range, the application of piezoelectric actuators in active and adaptive optics telescopes/radio telescopes is greatly limited. Active and adaptive optics systems require high frequency bandwidth, which in turn is largely constrained by the resonant frequencies of the actuators used in the system.

Therefore, it is necessary to provide a deformable mirror driven by a beam-type piezoelectric actuator.

Utility model content

The purpose of the utility model is to provide a deformable mirror driven by a beam-type piezoelectric actuator.

The technical scheme of the utility model is as follows: a deformable mirror driven by a beam-type piezoelectric actuator includes a lens in a flat plate structure, a piezoelectric actuator group, and a piezoelectric actuator group fixed on the piezoelectric actuator group and The rod pad group of the lens, the piezoelectric actuator group includes a plurality of piezoelectric actuators arranged at intervals, the rod pad group includes a plurality of relatively parallel rod pads arranged at intervals, each of the piezoelectric actuators The actuator is fixed on the back of the lens through one of the rod pads, and each of the rod pads has a rectangular parallelepiped structure with a square cross section; each of the piezoelectric actuators is a beam with a straight beam structure type double piezoelectric actuator, and includes a first strip-shaped piezoelectric layer, a strip-shaped metal layer and a second strip-shaped piezoelectric layer stacked in sequence, the first strip-shaped piezoelectric layer of the piezoelectric actuator Both the strip-shaped piezoelectric layer and the second strip-shaped piezoelectric layer are electrically connected to an external power supply having the same voltage, the strip-shaped metal layer is a common electrode of the first strip-shaped piezoelectric layer and the second strip-shaped piezoelectric layer, and The strip-shaped metal layer is grounded.

Preferably, each piezoelectric actuator is supported in a simply supported manner.

Preferably, both the first strip-shaped piezoelectric layer and the second strip-shaped piezoelectric layer are processed from piezoelectric materials.

Preferably, the first strip-shaped piezoelectric layer, the strip-shaped metal layer and the second strip-shaped piezoelectric layer have the same size.

The beneficial effect of the utility model is that: the piezoelectric actuator in the deformable mirror driven by the beam-shaped piezoelectric actuator adopts the first strip-shaped piezoelectric layer, the strip-shaped metal layer and the second The three-layer structure of the strip-shaped piezoelectric layer, and when the same voltage is applied to the first strip-shaped piezoelectric layer and the second strip-shaped piezoelectric layer, since the direction of the electric field is opposite and the direction of polarization is the same, then the The first piezoelectric strip is stretched and the second piezoelectric strip is compressed, or the second piezoelectric strip is stretched and the first piezoelectric strip is compressed, resulting in the entire piezoelectric The structure achieves bending deformation, such as arching, so as to obtain a large range.

Description of drawings

Fig. 1 is a schematic structural view of a deformable mirror driven by a beam-type piezoelectric actuator provided by an embodiment of the present invention;

Fig. 2 is the structural representation of the piezoelectric actuator in the deformable mirror driven by the beam-type piezoelectric actuator shown in Fig. 1;

FIG. 3 is a schematic diagram of bending of the piezoelectric actuator shown in FIG. 2 .

detailed description

In order to make the purpose, technical solution and advantages of the utility model clearer, the utility model will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model, and are not intended to limit the utility model.

Unless otherwise specifically and clearly described in the context, the elements and assemblies in the present invention may exist in a single form or in multiple forms, and the present invention is not limited thereto. It can be understood that the term "and/or" used herein refers to and covers any and all possible combinations of one or more of the associated listed items.

Please refer to Fig. 1, Fig. 2 and Fig. 3 at the same time. Fig. 1 is a schematic structural view of a deformable mirror driven by a beam-shaped piezoelectric actuator provided by an embodiment of the present invention; The electrical actuator is a structural schematic diagram of the piezoelectric actuator in the deformable mirror driven; FIG. 3 is a schematic diagram of the bending of the piezoelectric actuator shown in FIG. 2 . The deformable mirror 100 driven by the beam-type piezoelectric actuator provided by the embodiment of the present invention includes a lens 10 with a flat plate structure as a whole, a piezoelectric actuator group 20, and a piezoelectric actuator group 20 fixed on the piezoelectric actuator group 10. And the rod pad group 30 of the lens 20, the piezoelectric actuator group 20 includes a plurality of piezoelectric actuators 21 arranged at intervals, and the rod pad group 30 includes a plurality of relatively parallel rod pads 31 arranged at intervals , each of the piezoelectric actuators 21 is fixed on the back of the lens 10 through one of the rod pads 31 , and each of the rod pads 31 has a rectangular parallelepiped structure with a square cross section. Wherein, the lens 10 is a conventional optical lens.

Specifically, each of the piezoelectric actuators 21 is a beam-type double piezoelectric actuator with a straight beam structure, and includes a first strip-shaped piezoelectric layer 211, a strip-shaped metal layer 212 and The second strip-shaped piezoelectric layer 213, the first strip-shaped piezoelectric layer 211 and the second strip-shaped piezoelectric layer 213 of the piezoelectric actuator 21 are both electrically connected to an external power supply with the same voltage, and the strip-shaped piezoelectric layer The metal layer 212 is a common electrode of the first strip-shaped piezoelectric layer 211 and the second strip-shaped piezoelectric layer 213 , and the strip-shaped metal layer 212 is grounded. Preferably, each piezoelectric actuator 21 is supported in a simply supported manner. Optionally, each of the piezoelectric actuators 21 may be supported in a simply supported manner at edge portions at opposite ends thereof.

Moreover, both the first strip-shaped piezoelectric layer 211 and the second strip-shaped piezoelectric layer 213 are processed from piezoelectric materials, and the strip-shaped metal layer 212 can be made of metals such as iron, copper, aluminum, etc. or its alloy, which is not limited in the present invention. Further, the first strip-shaped piezoelectric layer 211 , the strip-shaped metal layer 212 and the second strip-shaped piezoelectric layer 213 have the same size.

Specifically, the polarization directions of the first strip-shaped piezoelectric layer 211 and the second strip-shaped piezoelectric layer 213 of the piezoelectric actuator 20 are consistent, and both are along the normal direction of the surface of the piezoelectric sheet. If when the same voltage is applied to the first strip-shaped piezoelectric layer 211 and the second strip-shaped piezoelectric layer 213, since the direction of the electric field is opposite and the polarization direction is the same, the first strip-shaped piezoelectric layer 211 is stretched, the second strip-shaped piezoelectric layer 213 is compressed, or the first strip-shaped piezoelectric layer 211 is compressed, and the second strip-shaped piezoelectric layer 213 is stretched, thereby causing the entire piezoelectric structure to realize bending Deformation, such as dome shape, so as to obtain a large range. Among them, the deformation of the center of the beam-type piezoelectric actuator produces the maximum deformation displacement, that is, the effective displacement d of the actuator.

It should be noted that, since the piezoelectric actuators 21 are all beam-type double piezoelectric actuators with a straight beam structure, and are simply supported at the edge portions at opposite ends, the piezoelectric actuators 21 The electric actuator 21 is very sensitive to the deformation of the first strip-shaped piezoelectric layer 211 and the second strip-shaped piezoelectric layer 213 .

Furthermore, from the stress-strain theory of mechanics, it can be known that under the action of stress, the beam structure supported at both ends is easier to obtain larger deformation under the action of stress distribution due to the elongated structure of the simply supported beam. . In this embodiment, since the two ends of the piezoelectric actuator 21 are simply supported, when the first strip-shaped piezoelectric layer 211 and the second strip-shaped piezoelectric layer 213 are subjected to an external voltage When deformation occurs, even if the first strip-shaped piezoelectric layer 211 and the second strip-shaped piezoelectric layer 213 are slightly deformed, they can be The structure amplifies the micro deformation, so as to obtain the amplified effective displacement d of the piezoelectric actuator 21 .

Compared with the prior art, the piezoelectric actuator 21 in the deformable mirror 100 driven by the beam-shaped piezoelectric actuator provided by the utility model adopts the first strip-shaped piezoelectric layer 211, the strip-shaped piezoelectric layer 211, and the strip-shaped The three-layer structure of the metal layer 212 and the second strip-shaped piezoelectric layer 213, and when the same voltage is applied to the first strip-shaped piezoelectric layer 211 and the second strip-shaped piezoelectric layer 213, since the direction of the electric field is opposite, If the polarization directions are the same, the first strip-shaped piezoelectric layer 211 is stretched, the second strip-shaped piezoelectric layer 213 is compressed, or the second strip-shaped piezoelectric layer 213 is stretched, and the first strip-shaped piezoelectric layer 213 is stretched. The strip-shaped piezoelectric layer 211 is compressed, thereby causing the entire piezoelectric structure to achieve bending deformation, such as a dome shape, thereby obtaining a large range.

It is obvious to those skilled in the art that the present invention is not limited to the details of the above-mentioned exemplary embodiments, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, no matter from all points of view, the embodiments should be regarded as exemplary and non-restrictive, and the scope of the present invention is defined by the appended claims rather than the above description, so it is intended to fall within the scope of the claims All changes within the meaning and range of equivalents of the required elements are included in the present invention. Any reference sign in a claim should not be construed as limiting the claim concerned.

In addition, it should be understood that although this specification is described according to implementation modes, not each implementation mode only includes an independent technical solution, and this description in the specification is only for clarity, and those skilled in the art should take the specification as a whole , the technical solutions in the various embodiments can also be properly combined to form other implementations that can be understood by those skilled in the art.

Claims (4)

1. the distorting lens that a kind is driving with beam type piezoelectric actuator, it is characterised in that: include overall in flat board The eyeglass of structure, piezoelectric actuator group and be fixed on the bar pad of described piezoelectric actuator group and described eyeglass Group, described piezoelectric actuator group includes multiple spaced piezoelectric actuator, and described bar pad group includes multiple Opposing parallel spaced bar pad, each described piezoelectric actuator is fixed on described by a described bar pad The back side of eyeglass, and each described bar pad to have cross section be foursquare rectangular structure；

Each described piezoelectric actuator is all the double piezoelectric actuator of beam type with straight beam structure, and includes successively The first bar shaped piezoelectric layer, bullion layer and the second bar shaped piezoelectric layer, the described piezoelectric actuator that stacking is arranged The first bar shaped piezoelectric layer and the second bar shaped piezoelectric layer all electrically connect with the external power with identical voltage, described Bullion layer is described first bar shaped piezoelectric layer and the common electrode of described second bar shaped piezoelectric layer, and described Bullion layer ground connection is arranged.

It is the most according to claim 1 with beam type piezoelectric actuator for the distorting lens driven, it is characterised in that: Each described piezoelectric actuator takes the mode of freely-supported to support.

It is the most according to claim 1 with beam type piezoelectric actuator for the distorting lens driven, it is characterised in that: Described first bar shaped piezoelectric layer and described second bar shaped piezoelectric layer are all to be processed by piezoelectric.

It is the most according to claim 3 with beam type piezoelectric actuator for the distorting lens driven, it is characterised in that: Described first bar shaped piezoelectric layer, described bullion layer and described second bar shaped piezoelectric layer equivalently-sized.