CN205603678U - flexible metal laminate - Google Patents
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- CN205603678U CN205603678U CN201620211548.5U CN201620211548U CN205603678U CN 205603678 U CN205603678 U CN 205603678U CN 201620211548 U CN201620211548 U CN 201620211548U CN 205603678 U CN205603678 U CN 205603678U
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- 229910052751 metal Inorganic materials 0.000 title claims abstract description 43
- 239000002184 metal Substances 0.000 title claims abstract description 43
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 90
- 229910052802 copper Inorganic materials 0.000 claims abstract description 88
- 239000010949 copper Substances 0.000 claims abstract description 88
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 75
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 45
- 229920001721 polyimide Polymers 0.000 claims abstract description 44
- 239000002648 laminated material Substances 0.000 abstract description 8
- 239000010410 layer Substances 0.000 description 89
- 238000009713 electroplating Methods 0.000 description 51
- 238000010438 heat treatment Methods 0.000 description 21
- 238000000034 method Methods 0.000 description 15
- 239000002253 acid Substances 0.000 description 14
- 239000002131 composite material Substances 0.000 description 13
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 12
- 239000004642 Polyimide Substances 0.000 description 12
- 230000008569 process Effects 0.000 description 11
- 239000000243 solution Substances 0.000 description 10
- 239000003792 electrolyte Substances 0.000 description 7
- 238000013112 stability test Methods 0.000 description 7
- 230000003064 anti-oxidating effect Effects 0.000 description 6
- 239000003963 antioxidant agent Substances 0.000 description 6
- 230000003078 antioxidant effect Effects 0.000 description 6
- 238000007772 electroless plating Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000007747 plating Methods 0.000 description 5
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 4
- 239000007864 aqueous solution Substances 0.000 description 4
- 239000003054 catalyst Substances 0.000 description 4
- 230000014759 maintenance of location Effects 0.000 description 4
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 230000004913 activation Effects 0.000 description 3
- 239000003153 chemical reaction reagent Substances 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 239000011574 phosphorus Substances 0.000 description 3
- 229910052698 phosphorus Inorganic materials 0.000 description 3
- 238000012797 qualification Methods 0.000 description 3
- 238000004381 surface treatment Methods 0.000 description 3
- 229910018104 Ni-P Inorganic materials 0.000 description 2
- 229910018536 Ni—P Inorganic materials 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 229910021626 Tin(II) chloride Inorganic materials 0.000 description 2
- 229910052783 alkali metal Inorganic materials 0.000 description 2
- 150000001340 alkali metals Chemical class 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 235000011150 stannous chloride Nutrition 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- AXZWODMDQAVCJE-UHFFFAOYSA-L tin(II) chloride (anhydrous) Chemical compound [Cl-].[Cl-].[Sn+2] AXZWODMDQAVCJE-UHFFFAOYSA-L 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- -1 amine compound Chemical class 0.000 description 1
- 230000003712 anti-aging effect Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006555 catalytic reaction Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000004035 construction material Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 239000008151 electrolyte solution Substances 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 150000002815 nickel Chemical class 0.000 description 1
- 239000005022 packaging material Substances 0.000 description 1
- PIBWKRNGBLPSSY-UHFFFAOYSA-L palladium(II) chloride Chemical compound Cl[Pd]Cl PIBWKRNGBLPSSY-UHFFFAOYSA-L 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000004017 vitrification Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- Laminated Bodies (AREA)
Abstract
一种可挠式金属积层材,提供一聚酰亚胺膜;无电解电镀一厚度为0.07‑0.11微米的镍金属层于该聚酰亚胺膜的至少一表面;电镀一第一铜层于该镍金属层上;及电镀一第二铜层于该第一铜层上。
A flexible metal laminate material provides a polyimide film; electrolessly plate a nickel metal layer with a thickness of 0.07-0.11 microns on at least one surface of the polyimide film; electroplate a first copper layer on the nickel metal layer; and electroplate a second copper layer on the first copper layer.
Description
技术领域 technical field
本实用新型关于一种可挠性金属积层材,特别是指一种可提高工艺合格率及尺寸安定性的可挠性积层材。 The utility model relates to a flexible metal laminated material, in particular to a flexible laminated material which can improve the process qualification rate and dimensional stability.
背景技术 Background technique
可挠性铜箔积层板(Flexible copper clad laminate,FCCL)广泛应用于电子产业中作为电路基板(PCB),FCCL除了具有轻、薄及可挠的优点外,用聚酰亚胺膜还具有电性能、热性能及耐热性优良的特点外,其较低的介电常数(Dk)性,使得电信号得到快速的传递,良好的热性能,可使组件易于降温,较高的玻璃化温度(Tg),可使组件在较高的温度下良好运行。 Flexible copper clad laminate (Flexible copper clad laminate, FCCL) is widely used in the electronics industry as a circuit substrate (PCB). In addition to the advantages of lightness, thinness and flexibility, FCCL also has the advantages of using polyimide film. In addition to excellent electrical properties, thermal properties and heat resistance, its low dielectric constant (Dk) enables rapid transmission of electrical signals, good thermal properties, easy cooling of components, and high vitrification Temperature (Tg), which allows components to perform well at higher temperatures.
目前,可挠性铜箔基材通常是在聚酰亚胺膜表面以无电解电镀方式形成一镍层,再于其上以电解电镀形成一铜层,此种以镍层作为障壁,以防止铜扩散至聚酰亚胺膜中的方式,可提供金属层与聚酰亚胺膜良好的接着性与信赖性。 At present, flexible copper foil substrates usually form a nickel layer on the surface of the polyimide film by electroless plating, and then form a copper layer by electrolytic plating on it. This nickel layer is used as a barrier to prevent The method of copper diffusion into the polyimide film can provide good adhesion and reliability between the metal layer and the polyimide film.
但是,在镍层上进行电镀铜作业时,由于镍电阻值较高,在进行高电流电镀铜作业时,会导致电镀铜厚度不均及表面产生色差,造成质量不良。 However, when electroplating copper on the nickel layer, due to the high resistance value of nickel, when performing high-current electroplating copper, it will lead to uneven thickness of electroplated copper and color difference on the surface, resulting in poor quality.
因此,具有镍层的聚酰亚胺膜下进行电镀铜作业,使铜层更有效地附着于聚酰亚胺膜上,并可在连续性电镀铜步骤中维持良好的操作性、工艺合格率及尺寸安定性,实为待研究的课题。 Therefore, electroplating copper under the polyimide film with a nickel layer can make the copper layer adhere to the polyimide film more effectively, and can maintain good operability and process qualification rate in the continuous copper electroplating step And dimensional stability, is actually a topic to be studied.
实用新型内容 Utility model content
本实用新型是关于可挠式金属积层材,其通过以下方法制造:其包括提供一聚酰亚胺膜;以无电解电镀在该聚酰亚胺膜上形成一0.07至0.11微米的镍金属层;将聚酰亚胺膜进行一第一电镀,以在镍金属层上形成一第一铜层;将聚酰亚胺膜进行一第二电镀,以在该底铜上形成二次铜层。 The utility model relates to a flexible metal laminate, which is manufactured by the following method: it includes providing a polyimide film; forming a 0.07 to 0.11 micron nickel metal on the polyimide film by electroless plating layer; the polyimide film is subjected to a first electroplating to form a first copper layer on the nickel metal layer; the polyimide film is subjected to a second electroplating to form a secondary copper layer on the bottom copper .
如此,可使铜层有效地附着于镍层上,且其厚度均匀性好及无色差等外观不良,且在制造过程中可连续性电镀第一铜层及第二铜层,以维持良好的操作性、工艺合格率及尺寸安定性。 In this way, the copper layer can be effectively attached to the nickel layer, and its thickness uniformity is good and there is no color difference and other appearance defects, and the first copper layer and the second copper layer can be continuously electroplated in the manufacturing process to maintain a good Operability, process pass rate and dimensional stability.
附图说明 Description of drawings
图1为本实用新型可挠性金属积层材的第一示意图; Fig. 1 is the first schematic diagram of the flexible metal laminated material of the present invention;
图2为本实用新型可挠性金属积层材的第二示意图; Fig. 2 is the second schematic diagram of the flexible metal laminated material of the present invention;
图3为本实用新型可挠性金属积层材的第三示意图; Fig. 3 is the third schematic diagram of the flexible metal laminated material of the present invention;
图4为本实用新型可挠性金属积层材的第四示意图。 Fig. 4 is a fourth schematic diagram of the flexible metal laminate of the present invention.
【符号说明】 【Symbol Description】
聚酰亚胺膜 10 Polyimide film 10
镍金属层 12 Nickel metal layer 12
第一铜层 14 First Copper Layer 14
第二铜层 16 Second Copper Layer 16
具体实施方式 detailed description
请参阅图1,为本实用新型的可挠性金属积层材的第一示意图,提供一聚酰亚胺膜10,聚酰亚胺膜的单体成分及制备方法并未特别限制,可通过本技术领域的通常知识进行,在此处不加以赘述。聚酰亚胺膜10的厚度可为7-50微米,对聚酰亚胺膜10先进行表面处理,包括:碱性表面改质、电荷调节、催化剂处理及活化等,此处并未加以限制。在一实施例中,在该聚酰亚胺膜的表面上形成一金属层的步骤可包括:对于该聚酰亚胺膜以碱金属溶液进行表面处理、进行催化剂处理、及无电解电镀镍处理。 Please refer to Fig. 1, which is the first schematic diagram of the flexible metal laminated material of the present invention, providing a polyimide film 10, the monomer composition and preparation method of the polyimide film are not particularly limited, and can be obtained by Common knowledge in the technical field is carried out, and details are not repeated here. The thickness of the polyimide film 10 can be 7-50 microns, and the surface treatment of the polyimide film 10 includes: alkaline surface modification, charge adjustment, catalyst treatment and activation, etc., which are not limited here . In one embodiment, the step of forming a metal layer on the surface of the polyimide film may include: surface treatment of the polyimide film with an alkali metal solution, catalyst treatment, and electroless nickel plating treatment .
碱性表面改质步骤可使用碱性金属溶液,例如:碱金族(如氢氧化钠、氢氧化钾)水溶液、碱土族水溶液、氨水、有机胺化合物水溶液等,或前述的混合物,可以浸渍或喷洒的方式进行处理。催化剂处理及活化步骤可采用例如:将聚酰亚胺膜浸渍于氯化亚锡(SnCl2)中,再浸渍于氯化钯(PdCl2)的盐酸酸性水溶液中;或将聚酰亚胺膜浸渍于钯/锡凝胶溶液中,再以硫酸或盐酸进行活化处理;此步骤是为了在表面形成无电解电镀反应的金属触媒钯。 Alkaline surface modification step can use alkaline metal solution, for example: alkali metal family (such as sodium hydroxide, potassium hydroxide) aqueous solution, alkaline earth family aqueous solution, ammoniacal water, organic amine compound aqueous solution etc., or aforementioned mixture, can impregnate or Treated by spraying. Catalyst treatment and activation steps can be used for example: polyimide film is immersed in tin protochloride (SnCl2), then immersed in palladium chloride (PdCl2) in hydrochloric acid acidic aqueous solution; or polyimide film is immersed in In the palladium/tin gel solution, the activation treatment is carried out with sulfuric acid or hydrochloric acid; this step is to form the metal catalyst palladium for electroless plating reaction on the surface.
请参阅图2,接着,将经前述表面处理的聚酰亚胺膜10进行无电解电镀,以在至少一表面上形成镍层12。在本技术领域中,无电解电镀技术包括药剂种类、浓度、温度、时间等参数,均已为众所周知,此处并未特别限制,而可依据各无电解电镀液的条件进行。在实施例中,可采用Ni-P、Ni-B、纯Ni等方式进行镀镍。在一实施例中,是以Ni-P进行,优选采用 低磷镍(含磷量低于5重量%(wt%)),所形成的镍层的含磷量约为2至4wt%。 Please refer to FIG. 2 , and then, electroless plating is performed on the above-mentioned surface-treated polyimide film 10 to form a nickel layer 12 on at least one surface. In this technical field, the electroless plating technology includes parameters such as reagent type, concentration, temperature, time, etc., which are well known, and are not particularly limited here, but can be carried out according to the conditions of each electroless plating solution. In an embodiment, Ni-P, Ni-B, pure Ni, etc. may be used for nickel plating. In one embodiment, Ni-P is used, preferably low-phosphorus nickel (less than 5% by weight (wt%) of phosphorus), and the phosphorus content of the formed nickel layer is about 2 to 4wt%.
本实用新型采用单次镀镍的方式,在该聚酰亚胺膜的一表面形成单层镍层,也可于聚酰亚胺膜的两个表面分别形成单层镍层。在实施例中,其厚度约为0.07至0.11微米,例如0.07、0.1微米等。 The utility model adopts the way of single-time nickel plating to form a single-layer nickel layer on one surface of the polyimide film, and can also form single-layer nickel layers on the two surfaces of the polyimide film respectively. In an embodiment, the thickness is about 0.07 to 0.11 microns, such as 0.07, 0.1 microns, etc.
在一实施例中,本实用新型的工艺采用卷对卷(roll-to-roll)方式进行。卷对卷工艺通常应用于可挠性薄膜工艺,可以连续式生产。 In one embodiment, the process of the present invention is carried out in a roll-to-roll manner. The roll-to-roll process is usually applied to flexible film processes and can be produced continuously.
在镍层形成后,进行热处理。通过该热处理步骤,可改善已知金属层与聚酰亚胺膜间的接着力问题(即两者间的剥离强度的高温信赖性不足)。经由该热处理步骤,可在维持金属层与聚酰亚胺膜的剥离强度的同时,提高铜层电镀的合格率,并改善铜层电镀的操作性。而且,本实用新型在适当的镍层厚度下,在同一生产线,先进行一第一铜层电镀后,再进行一第二铜层电镀,可维持良好的操作性及工艺合格率。 After the nickel layer is formed, heat treatment is performed. Through this heat treatment step, the known problem of adhesion between the metal layer and the polyimide film (that is, insufficient high-temperature reliability of the peel strength between the two) can be improved. Through the heat treatment step, while maintaining the peel strength between the metal layer and the polyimide film, the pass rate of copper layer electroplating can be improved, and the operability of copper layer electroplating can be improved. Moreover, the utility model performs electroplating on a first copper layer and then electroplating on a second copper layer in the same production line under an appropriate nickel layer thickness, which can maintain good operability and process pass rate.
在实施例中,该热处理的温度介于约60℃与约150℃之间,例如:65℃、70℃、80℃、90℃、100℃、110℃、120℃、130℃、140℃等,或前述任两点间的温度。在一优选实施例中,该热处理温度为70℃至130℃。在一更优选实施例中,该热处理温度为90℃至130℃。 In an embodiment, the heat treatment temperature is between about 60°C and about 150°C, for example: 65°C, 70°C, 80°C, 90°C, 100°C, 110°C, 120°C, 130°C, 140°C, etc. , or the temperature between any two points mentioned above. In a preferred embodiment, the heat treatment temperature is 70°C to 130°C. In a more preferred embodiment, the heat treatment temperature is 90°C to 130°C.
在实施例中,该热处理的处理时间低于28小时,且大于2小时,例如:4小时、8小时、12小时、16小时、20小时、24小时、26小时等,或前述任两点间的时间。在一优选实施例中,该处理时间为12小时至24小时。在一更优选实施例中,为24小时。 In an embodiment, the treatment time of the heat treatment is less than 28 hours and greater than 2 hours, for example: 4 hours, 8 hours, 12 hours, 16 hours, 20 hours, 24 hours, 26 hours, etc., or between any two points above time. In a preferred embodiment, the treatment time is 12 hours to 24 hours. In a more preferred embodiment, it is 24 hours.
经过热处理后,测定该镍层-聚酰亚胺膜的热重损失比例,即,经热处理后的膜重与经热处理前的膜重的比例,达到1%以上。在一实施例中,该热重损失比例为1%至2%。 After the heat treatment, the thermogravimetric loss ratio of the nickel layer-polyimide film, that is, the ratio of the film weight after heat treatment to the film weight before heat treatment, was measured to be more than 1%. In one embodiment, the thermogravimetric loss ratio is 1% to 2%.
该热处理步骤可维持该聚酰亚胺膜与该镍层间的优异的剥离强度保留率,在此处,剥离强度保留率可由下列公式计算: This heat treatment step can maintain the excellent peel strength retention rate between the polyimide film and the nickel layer. Here, the peel strength retention rate can be calculated by the following formula:
剥离强度保留率(%)=(P1/P0)×100% Peel strength retention (%)=(P1/P0)×100%
其中,P0为经该热处理步骤后的初始剥离强度,P1为经该热处理步骤及经老化步骤(150℃处理168小时)后的剥离强度。在实施例中,剥离强度保留率约为50%以上,例如:55%、60%、65%、70%、75%或以上, 或前述任两点间的范围。在前述热处理步骤完成后,后续在该镍金属层上形成第一铜层及第二铜层电镀。 Wherein, P0 is the initial peel strength after the heat treatment step, and P1 is the peel strength after the heat treatment step and the aging step (150° C. for 168 hours). In an embodiment, the peel strength retention rate is about 50% or more, for example: 55%, 60%, 65%, 70%, 75% or more, or a range between any two points above. After the aforementioned heat treatment step is completed, a first copper layer and a second copper layer are subsequently electroplated on the nickel metal layer.
请参阅图3,在完成热处理步骤后,以垂直卷对卷方式进行第一电镀,电解液为高酸低铜,以在镍金属层12上形成一铜层,该铜层包括第一铜层14及第二铜层16,第一铜层14形成于镍金属层12上。 Please refer to Fig. 3, after completing the heat treatment step, the first electroplating is carried out in a vertical roll-to-roll manner, and the electrolytic solution is high-acid low-copper, so as to form a copper layer on the nickel metal layer 12, and the copper layer includes the first copper layer 14 and the second copper layer 16 , the first copper layer 14 is formed on the nickel metal layer 12 .
请参阅图4,在完成第一电镀后,以连续性方式进行第二电镀,电解液为低酸高铜,以于第一铜层14上形成一第二铜层16。 Please refer to FIG. 4 , after the first electroplating is completed, the second electroplating is performed in a continuous manner, and the electrolyte is low-acid high-copper, so as to form a second copper layer 16 on the first copper layer 14 .
这样,以二次电镀方式在镍金属层12上分别形成一第一铜层14及第二铜层16时,可使铜层具有优选的均匀性及无色差,以得到更好的工艺合格率及尺寸安定性。 In this way, when a first copper layer 14 and a second copper layer 16 are respectively formed on the nickel metal layer 12 by means of secondary electroplating, the copper layer can be made to have preferred uniformity and no color difference, so as to obtain a better process qualification rate and dimensional stability.
在完成电一铜层14及第二铜层16电镀后,将其浸泡于有机抗氧化剂中,以进行一抗氧化处理。 After the electroplating of the first copper layer 14 and the second copper layer 16 is completed, they are immersed in an organic antioxidant to perform an anti-oxidation treatment.
实施例1: Example 1:
无电解电镀镍步骤:将聚酰亚胺膜以荒川化学工业株式会社TAMACLEAN 110试剂在35℃下进行表面处理约150秒。接着,以SLP工艺(SLP process,来自奥野制药株式会社)进行表面电荷调节、预浸、催化、速化等无电解电镀镍的步骤,该SLP系列试剂(包括SLP-200、SLP-300、SLP-400、SLP-500、SLP-600)购自奥野制药株式会社,使聚吸亚胺膜10表面形成一厚度为0.07-0.11微米的镍金属层12。 Electroless nickel plating step: surface treatment of the polyimide film with TAMACLEAN 110 reagent from Arakawa Chemical Industry Co., Ltd. at 35° C. for about 150 seconds. Then, the SLP process (SLP process, from Okuno Pharmaceutical Co., Ltd.) is used to perform the steps of electroless nickel plating such as surface charge adjustment, pre-dipping, catalysis, and acceleration. The SLP series reagents (including SLP-200, SLP-300, SLP -400, SLP-500, SLP-600) were purchased from Okuno Pharmaceutical Co., Ltd. to form a nickel metal layer 12 with a thickness of 0.07-0.11 microns on the surface of the polyimide film 10 .
热处理步骤:以90℃烘烤该膜24小时。如此得到一经过热处理具有镍金属层12的聚酰亚胺复合膜。 Heat treatment step: bake the film at 90°C for 24 hours. In this way, a heat-treated polyimide composite film with a nickel metal layer 12 is obtained.
第一电镀步骤:将经过热处理的聚酰亚胺复合膜进行第一电镀,电镀液为高酸低铜,其包含200g/L的H2SO4、55g/L的CuSO4及50ppm的氯离子,电流密度1.5ASD使该镍层12上形成一厚度为0.67微米的第一铜层14。 The first electroplating step: the heat-treated polyimide composite film is subjected to the first electroplating. The electroplating solution is high-acid and low-copper, which contains 200g/L of H 2 SO 4 , 55g/L of CuSO 4 and 50ppm of chloride ions , the current density is 1.5ASD to form a first copper layer 14 with a thickness of 0.67 microns on the nickel layer 12 .
第二电镀步骤:进行第二电镀,电镀液为低酸高铜,其包含有150g/L的H2SO4、120g/L的CuSO4及50ppm的氯离子,电流密度2ASD,使第一铜层14上形成一厚度为2.33微米的第二铜层16。 The second electroplating step: carry out the second electroplating, the electroplating solution is low-acid high-copper, which contains 150g/L of H 2 SO 4 , 120g/L of CuSO 4 and 50ppm chloride ions, and the current density is 2ASD, so that the first copper On layer 14 is formed a second copper layer 16 having a thickness of 2.33 microns.
进行尺寸安定性测试,得到0.02%。 Dimensional stability tests were performed and 0.02% was obtained.
完成第二电镀步骤后可进行浸泡有机抗氧化剂,以进行一抗氧化处理。 After the second electroplating step, the organic antioxidant can be soaked for an anti-oxidation treatment.
实施例2: Example 2:
制作一与实施例1相同的经过热处理具有镍金属层的聚酰亚胺复合膜。 Make a polyimide composite film with a nickel metal layer through heat treatment identical to that of Example 1.
第一电镀步骤:将经过热处理的聚酰亚胺复合膜进行第一电镀,电镀液为高酸低铜,其包含200g/L的H2SO4、55g/L的CuSO4及50ppm的氯离子,电流密度2ASD,使该镍金属层12上形成一厚度为1.26微米的第一铜层14。 The first electroplating step: the heat-treated polyimide composite film is subjected to the first electroplating. The electroplating solution is high-acid and low-copper, which contains 200g/L of H 2 SO 4 , 55g/L of CuSO 4 and 50ppm of chloride ions , with a current density of 2ASD, so that a first copper layer 14 with a thickness of 1.26 microns is formed on the nickel metal layer 12 .
第二电镀步骤:进行第二电镀,电镀液为低酸高铜,其包含有150g/L的H2SO4、120g/L的CuSO4及50ppm的氯离子,电流密度3ASD,使第一铜层14上形成一厚度为4.74微米的第二铜层16。 The second electroplating step: carry out the second electroplating, the electroplating solution is low-acid high-copper, which contains 150g/L of H 2 SO 4 , 120g/L of CuSO 4 and 50ppm chloride ions, and the current density is 3ASD, so that the first copper Layer 14 is formed with a second copper layer 16 having a thickness of 4.74 microns.
进行尺寸安定性测试,得到0.04%。 Dimensional stability tests were performed and 0.04% was obtained.
完成第二电镀步骤后可进行浸泡有机抗氧化剂,以进行一抗氧化处理。 After the second electroplating step, the organic antioxidant can be soaked for an anti-oxidation treatment.
实施例3: Example 3:
制作一与实施例1相同的经过热处理具有镍金属层的聚酰亚胺复合膜。 Make a polyimide composite film with a nickel metal layer through heat treatment identical to that of Example 1.
第一电镀步骤:将经过热处理的聚酰亚胺复合膜进行第一电镀,电解液为高酸低铜,其包含200g/L的H2SO4、55g/L的CuSO4及50ppm的氯离子,电流密度2ASD,使该镍金属层12上形成一厚度为1.99微米的第一铜层14。 The first electroplating step: the heat-treated polyimide composite film is subjected to the first electroplating, and the electrolyte is high-acid and low-copper, which contains 200g/L of H 2 SO 4 , 55g/L of CuSO 4 and 50ppm of chloride ions , with a current density of 2ASD, so that a first copper layer 14 with a thickness of 1.99 microns is formed on the nickel metal layer 12 .
第二电镀步骤:进行第二电镀,电解液为低酸高铜,其包含有150g/L的H2SO4、120g/L的CuSO4及50ppm的氯离子,电流密度4ASD,使第一铜层14上形成一厚度为7.01微米的第二铜层16。 The second electroplating step: carry out the second electroplating, the electrolyte is low-acid high-copper, which contains 150g/L of H 2 SO 4 , 120g/L of CuSO 4 and 50ppm chloride ions, and the current density is 4ASD, so that the first copper Layer 14 is formed with a second copper layer 16 having a thickness of 7.01 microns.
进行尺寸安定性测试,得到0.05%。 Dimensional stability tests were performed and 0.05% was obtained.
完成第二电镀步骤后可进行浸泡有机抗氧化剂,以进行一抗氧化处理。 After the second electroplating step, the organic antioxidant can be soaked for an anti-oxidation treatment.
比较例1: Comparative example 1:
制作一与实施例1相同的经过热处理具有镍金属层的聚酰亚胺复合膜。 Make a polyimide composite film with a nickel metal layer through heat treatment identical to that of Example 1.
第一电镀步骤:将经过热处理的聚酰亚胺复合膜进行第一电镀,电解液为高酸低铜,其包含200g/L的H2SO4、55g/L的CuSO4及50ppm的氯离子,电流密度1.5ASD,使该镍层12上形成一厚度为0.53微米的第一铜层14。 The first electroplating step: the heat-treated polyimide composite film is subjected to the first electroplating, and the electrolyte is high-acid and low-copper, which contains 200g/L of H 2 SO 4 , 55g/L of CuSO 4 and 50ppm of chloride ions , the current density is 1.5ASD, so that a first copper layer 14 with a thickness of 0.53 microns is formed on the nickel layer 12 .
第二电镀步骤:进行第二电镀,电解液为低酸高铜,其包含有150g/L的H2SO4、120g/L的CuSO4及50ppm的氯离子,电流密度2ASD使第一 铜层14上形成一厚度为2.47微米的第二铜层16。 The second electroplating step: carry out the second electroplating, the electrolyte is low-acid high-copper, which contains 150g/L H 2 SO 4 , 120g/L CuSO 4 and 50ppm chloride ions, and the current density is 2ASD so that the first copper layer 14 is formed with a second copper layer 16 with a thickness of 2.47 microns.
进行尺寸安定性测试,得到0.11%。 Dimensional stability tests were performed and 0.11% was obtained.
完成第二电镀步骤后可进行浸泡有机抗氧化剂,以进行一抗氧化处理。 After the second electroplating step, the organic antioxidant can be soaked for an anti-oxidation treatment.
比较例2: Comparative example 2:
制作一与实施例1相同的经过热处理具有镍金属层的聚酰亚胺复合膜。 Make a polyimide composite film with a nickel metal layer through heat treatment identical to that of Example 1.
第一电镀步骤:将经过热处理的聚酰亚胺复合膜进行第一电镀,电镀液为高酸低铜,其包含200g/L的H2SO4、55g/L的CuSO4及50ppm的氯离子,电流密度2ASD,使该镍金属层12上形成一厚度为1.11微米的第一铜层14。 The first electroplating step: the heat-treated polyimide composite film is subjected to the first electroplating. The electroplating solution is high-acid and low-copper, which contains 200g/L of H 2 SO 4 , 55g/L of CuSO 4 and 50ppm of chloride ions , with a current density of 2ASD, so that a first copper layer 14 with a thickness of 1.11 μm is formed on the nickel metal layer 12 .
第二电镀步骤:进行第二电镀,电解液为低酸高铜,其包含有150g/L的H2SO4、120g/L的CuSO4及50ppm的氯离子,电流密度3ASD,使第一铜层14上形成一厚度为4.89微米的第二铜层16。 The second electroplating step: carry out the second electroplating, the electrolyte is low-acid high-copper, which contains 150g/L of H 2 SO 4 , 120g/L of CuSO 4 and 50ppm chloride ions, and the current density is 3ASD, so that the first copper Layer 14 is formed with a second copper layer 16 having a thickness of 4.89 microns.
完成第二电镀步骤后可进行浸泡有机抗氧化剂,以进行一抗氧化处理。 After the second electroplating step, the organic antioxidant can be soaked for an anti-oxidation treatment.
进行尺寸安定性测试,得到0.12%。 Dimensional stability tests were performed and 0.12% was obtained.
比较例3: Comparative example 3:
制作一与实施例1相同的经过热处理具有镍金属层的聚酰亚胺复合膜。 Make a polyimide composite film with a nickel metal layer through heat treatment identical to that of Example 1.
第一电镀步骤:将经过热处理的聚酰亚胺复合膜进行第一电镀,电镀液为高酸低铜,其包含200g/L的H2SO4、55g/L的CuSO4及50ppm的氯离子,电流密度2ASD,使该镍金属层12上形成一厚度为1.68微米的第一铜层14。 The first electroplating step: the heat-treated polyimide composite film is subjected to the first electroplating. The electroplating solution is high-acid and low-copper, which contains 200g/L of H 2 SO 4 , 55g/L of CuSO 4 and 50ppm of chloride ions , with a current density of 2ASD, so that a first copper layer 14 with a thickness of 1.68 microns is formed on the nickel metal layer 12 .
第二电镀步骤:进行第二电镀,电解液为低酸高铜,其包含有150g/L的H2SO4、120g/L的CuSO4及50ppm的氯离子,电流密度4ASD,使第一铜层14上形成一厚度为7.32微米的第二铜层16。 The second electroplating step: carry out the second electroplating, the electrolyte is low-acid high-copper, which contains 150g/L of H 2 SO 4 , 120g/L of CuSO 4 and 50ppm chloride ions, and the current density is 4ASD, so that the first copper Layer 14 is formed with a second copper layer 16 having a thickness of 7.32 microns.
进行尺寸安定性测试,得到0.12%。 Dimensional stability tests were performed and 0.12% was obtained.
表格一: Form 1:
尺寸安定性的测试方法: Dimensional stability test method:
依据IPC-TM650 2.2.4c规范,使用2D量测仪(型号M-4030-PC,购自全闳精密)量测。 According to the IPC-TM650 2.2.4c specification, use a 2D measuring instrument (model M-4030-PC, purchased from Quanhong Precision) to measure.
将经过热处理的复合膜进行电解电镀,使该镍金属层12上形成第一铜层14,再于第一铜层14上电解电镀,以形成一第二铜层16,而制备得可挠性金属积层材(FCCL)。 The heat-treated composite film is electrolytically plated to form a first copper layer 14 on the nickel metal layer 12, and then electrolytically plated on the first copper layer 14 to form a second copper layer 16 to prepare a flexible Metal laminated materials (FCCL).
本实用新型第一铜层14厚度与总铜(第一铜层14+第二铜层16)厚度比为大于或等于20%时,可得到更好的尺寸安定性。若厚度比小于20%时,会有尺寸安定性不好的问题。一般业界的常用标准为尺寸安定性需小于0.1%。 When the ratio of the thickness of the first copper layer 14 to the thickness of the total copper (first copper layer 14+second copper layer 16 ) of the present invention is greater than or equal to 20%, better dimensional stability can be obtained. When the thickness ratio is less than 20%, there is a problem that the dimensional stability is not good. The commonly used standard in the industry is that the dimensional stability needs to be less than 0.1%.
本实用新型的工艺可有效降低生产成本,且操作简易,产品合格率高。且依据本实用新型的工艺,可制备优异的可挠式金属积层材,达到良好热安定性、层间接着力好(即剥离强度高)、抗吸湿、耐老化、易蚀刻、产品轻薄等性质,有利于后续于电子零件的构装材料、封装材料等应用。 The technology of the utility model can effectively reduce the production cost, and is easy to operate and has a high qualified rate of products. And according to the process of the utility model, excellent flexible metal laminates can be prepared, which can achieve good thermal stability, good adhesion between layers (that is, high peel strength), anti-moisture absorption, anti-aging, easy to etch, and light and thin products. , which is conducive to subsequent applications such as construction materials and packaging materials for electronic components.
上述特定实施例的内容是为了详细说明本实用新型,然而,该等实施例仅用于说明,并非意欲限制本实用新型。本领域技术人员可理解,在不悖离前附权利要求书所界定的范畴下针对本实用新型所进行的各种变化或修改落入本实用新型的一部分。 The content of the specific embodiments above is to describe the present utility model in detail, however, these embodiments are only for illustration, and are not intended to limit the present utility model. Those skilled in the art can understand that various changes or modifications made to the present utility model fall into a part of the present utility model without departing from the scope defined by the appended claims.
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