CN205538040U - Optical fiber sensing probe - Google Patents
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- CN205538040U CN205538040U CN201620049058.XU CN201620049058U CN205538040U CN 205538040 U CN205538040 U CN 205538040U CN 201620049058 U CN201620049058 U CN 201620049058U CN 205538040 U CN205538040 U CN 205538040U
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 23
- 239000000523 sample Substances 0.000 title claims abstract description 17
- 239000010409 thin film Substances 0.000 claims abstract description 13
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 239000011241 protective layer Substances 0.000 claims description 7
- 230000004888 barrier function Effects 0.000 claims description 6
- 239000010410 layer Substances 0.000 claims description 6
- 210000004127 vitreous body Anatomy 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 239000000835 fiber Substances 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims 7
- 238000000576 coating method Methods 0.000 claims 7
- 239000004411 aluminium Substances 0.000 claims 1
- 239000010408 film Substances 0.000 abstract description 51
- 239000011521 glass Substances 0.000 abstract description 19
- 230000035945 sensitivity Effects 0.000 abstract description 12
- 238000009530 blood pressure measurement Methods 0.000 abstract description 7
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 238000002310 reflectometry Methods 0.000 abstract description 7
- 230000002277 temperature effect Effects 0.000 abstract description 2
- 238000009792 diffusion process Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 5
- 230000009286 beneficial effect Effects 0.000 description 5
- 229910052796 boron Inorganic materials 0.000 description 5
- 230000007797 corrosion Effects 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 4
- 229910021419 crystalline silicon Inorganic materials 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000005259 measurement Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 230000008054 signal transmission Effects 0.000 description 2
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008447 perception Effects 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
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- Measuring Temperature Or Quantity Of Heat (AREA)
Abstract
本实用新型涉及一种光纤传感探头，光纤传感探头包括玻璃体，所述玻璃体的一侧设置有凹槽，所述凹槽的槽口处设置有硼硅敏感薄膜；所述硼硅敏感薄膜与所述玻璃体之间设置有反射膜，所述硼硅敏感薄膜与所述反射膜一体成型，所述反射膜密封所述凹槽，在所述玻璃体内构成真空腔。相对现有技术，本实用新型机械灵敏度高、反射率高，而且耐高温，温度效应小，适合于不同温度环境下的压力测量，能实现规模化、集成化生产，提高传感器芯片生产效益，降低成本。
The utility model relates to an optical fiber sensing probe. The optical fiber sensing probe includes a glass body, a groove is arranged on one side of the glass body, and a borosilicate sensitive film is arranged at the notch of the groove; the borosilicate sensitive film is A reflective film is arranged between the glass body, the borosilicate sensitive thin film is integrally formed with the reflective film, the reflective film seals the groove, and forms a vacuum cavity in the glass body. Compared with the prior art, the utility model has high mechanical sensitivity, high reflectivity, high temperature resistance, small temperature effect, is suitable for pressure measurement under different temperature environments, can realize large-scale and integrated production, improves the production efficiency of sensor chips, and reduces cost.
Description
技术领域 technical field
本实用新型涉及属于光纤传感器元件技术领域，特别涉及一种用于测量压力的法布里-帕罗复合腔光纤传感探头。 The utility model relates to the technical field of optical fiber sensor elements, in particular to a Fabry-Pérot composite cavity optical fiber sensing probe for measuring pressure.
背景技术 Background technique
法布里-帕罗（F-P）腔微型光纤压力传感器结构通常有石英毛细管结构和膜片式结构。石英毛细管结构的压力传感器由于毛细管壁较厚，对压力的感知灵敏度低，且由于腔内气体和石英管的热胀冷缩等因素的影响，对温度的敏感性强，所以适用于测量精度要求不高的大范围的压力测量。膜片式结构理论上可以获得较高的灵敏度，但是在光纤端面上制作高灵敏度的膜片存在着技术不成熟，工艺复杂，材料温度特性和力学特性差等不足。 The Fabry-Perot (F-P) cavity miniature fiber optic pressure sensor usually has a quartz capillary structure and a diaphragm structure. Due to the thick capillary wall, the pressure sensor with quartz capillary structure has low sensitivity to pressure perception, and due to the influence of factors such as the gas in the chamber and the thermal expansion and contraction of the quartz tube, it is highly sensitive to temperature, so it is suitable for measurement accuracy requirements. Wide range of pressure measurements without high. Theoretically, the diaphragm structure can obtain higher sensitivity, but there are disadvantages such as immature technology, complicated process, and poor temperature and mechanical properties of materials in the manufacture of high-sensitivity diaphragms on the fiber end face.
实用新型内容 Utility model content
本实用新型所要解决的技术问题是提供一种机械灵敏度高、反射率高，而且耐高温，温度效应小，适合于不同温度环境下的压力测量，能实现规模化、集成化生产，提高传感器芯片生产效益，降低成本的光纤传感探头。 The technical problem to be solved by the utility model is to provide a kind of high mechanical sensitivity, high reflectivity, high temperature resistance, small temperature effect, suitable for pressure measurement under different temperature environments, which can realize large-scale and integrated production, and improve the sensor chip. Production benefits, cost-reduced fiber optic sensing probes.
本实用新型解决上述技术问题的技术方案如下：一种光纤传感探头，包括玻璃体，所述玻璃体的一侧设置有凹槽，所述凹槽的槽口处设置有硼硅敏感薄膜。 The technical solution of the utility model to solve the above-mentioned technical problems is as follows: an optical fiber sensing probe includes a glass body, a groove is arranged on one side of the glass body, and a borosilicate sensitive film is arranged at the notch of the groove.
本实用新型的有益效果是：硼硅敏感薄膜的机械灵敏度高，压力测量的分辨率高，最小分辨率达62Pa，高温稳定性更好，适合于不同温度环境下的压力测量，且灵敏度达到0.51nw/KPa，使本装置具有良好的线性度、灵敏度和重复性。 The beneficial effects of the utility model are: the mechanical sensitivity of the borosilicate sensitive film is high, the resolution of pressure measurement is high, the minimum resolution reaches 62Pa, the high temperature stability is better, it is suitable for pressure measurement under different temperature environments, and the sensitivity reaches 0.51 nw/KPa, the device has good linearity, sensitivity and repeatability.
在上述技术方案的基础上，本实用新型还可以做如下改进。 On the basis of the above technical solutions, the utility model can also be improved as follows.
进一步，所述硼硅敏感薄膜与所述玻璃体之间设置有反射膜，所述硼硅敏感薄膜与所述反射膜一体成型，所述反射膜密封所述凹槽，在所述玻璃体内构成真空腔。 Further, a reflective film is provided between the borosilicate sensitive film and the glass body, the borosilicate sensitive film and the reflective film are integrally formed, the reflective film seals the groove, and a vacuum is formed in the glass body cavity.
采用上述进一步方案的有益效果是：反射膜能增强本装置的反射率，提升灵敏度。 The beneficial effect of adopting the above further solution is that the reflective film can enhance the reflectivity of the device and improve the sensitivity.
进一步，所述硼硅敏感薄膜和所述反射膜之间设置有阻挡层，所述阻挡层由金属制成。 Further, a barrier layer is provided between the borosilicate sensitive thin film and the reflective film, and the barrier layer is made of metal.
进一步，所述硼硅敏感薄膜和所述反射膜的上端设置有保护层，所述保护层由金属制成。 Further, a protective layer is provided on the upper ends of the borosilicate sensitive thin film and the reflective film, and the protective layer is made of metal.
采用上述进一步方案的有益效果是：保护层能对硼硅敏感薄膜和反射膜进行保护，提升硼硅敏感薄膜和反射膜的结构强度，不易脱落。 The beneficial effect of adopting the above further solution is that the protective layer can protect the borosilicate sensitive thin film and the reflective film, improve the structural strength of the borosilicate sensitive thin film and the reflective film, and are not easy to fall off.
进一步，所述反射膜为铝反射膜。 Further, the reflective film is an aluminum reflective film.
采用上述进一步方案的有益效果是：铝反射膜的反光率高，能有效提升本装置的反射率。 The beneficial effect of adopting the above further solution is that the reflective rate of the aluminum reflective film is high, which can effectively improve the reflective rate of the device.
进一步，所述玻璃体远离所述硼硅敏感薄膜的一端固定连接有单模光纤。 Further, the end of the glass body away from the borosilicate sensitive film is fixedly connected with a single-mode optical fiber.
采用上述进一步方案的有益效果是：单模光纤便于信号传输。 The beneficial effect of adopting the above further solution is that the single-mode optical fiber is convenient for signal transmission.
附图说明 Description of drawings
图1为本实用新型一种光纤传感探头的结构示意图； Fig. 1 is the structural representation of a kind of optical fiber sensing probe of the utility model;
图2为本实用新型一种光纤传感探头制备方法的流程图。 Fig. 2 is a flow chart of a method for preparing an optical fiber sensing probe of the present invention.
附图中，各标号所代表的部件列表如下： In the accompanying drawings, the list of parts represented by each label is as follows:
210、玻璃体，220、硼硅敏感薄膜，230、反射膜，240、真空腔，250、单模光纤。 210, vitreous body, 220, borosilicate sensitive film, 230, reflective film, 240, vacuum chamber, 250, single-mode optical fiber.
具体实施方式 detailed description
以下结合附图对本实用新型的原理和特征进行描述，所举实例只用于解释本实用新型，并非用于限定本实用新型的范围。 The principles and features of the present utility model are described below in conjunction with the accompanying drawings, and the examples given are only used to explain the utility model, and are not used to limit the scope of the utility model.
如图1所示，一种光纤传感探头，包括玻璃体210，所述玻璃体210的一侧设置有凹槽，所述凹槽的槽口处设置有硼硅敏感薄膜220；硼硅敏感薄膜的机械灵敏度高，压力测量的分辨率高，最小分辨率达62Pa，高温稳定性更好，可在1000℃以内进行压力测量，且灵敏度达到0.51nw/Kpa,所述硼硅敏感薄膜220与所述玻璃体210之间设置有反射膜230，所述硼硅敏感薄膜220与所述反射膜230一体相连，所述反射膜230密封所述凹槽，在所述玻璃体210内构成真空腔240，反射膜230的反光率高，能有效提升本装置的反射率。所述硼硅敏感薄膜220和所述反射膜230之间设置有阻挡层，所述阻挡层由金属钛制成，提升了硼硅敏感薄膜220和反射膜230的结构强度。所述玻璃体210远离所述硼硅敏感薄膜220的一端固定连接有单模光纤250，单模光纤便于信号传输。 As shown in Figure 1, an optical fiber sensing probe includes a glass body 210, a groove is provided on one side of the glass body 210, and a borosilicate sensitive film 220 is provided at the notch of the groove; High mechanical sensitivity, high resolution of pressure measurement, minimum resolution up to 62Pa, better high temperature stability, pressure measurement within 1000°C, and sensitivity up to 0.51nw/Kpa, the borosilicate sensitive film 220 is compatible with the A reflective film 230 is arranged between the glass bodies 210, the borosilicate sensitive film 220 is integrally connected with the reflective film 230, the reflective film 230 seals the groove, and a vacuum chamber 240 is formed in the glass body 210, and the reflective film 230 has a high reflectivity, which can effectively improve the reflectivity of the device. A barrier layer is provided between the borosilicate sensitive film 220 and the reflective film 230 , and the barrier layer is made of metal titanium, which improves the structural strength of the borosilicate sensitive film 220 and the reflective film 230 . The end of the glass body 210 away from the borosilicate sensitive film 220 is fixedly connected with a single-mode optical fiber 250 , and the single-mode optical fiber is convenient for signal transmission.
优选的，所述硼硅敏感薄膜220和所述反射膜230的上端设置有保护层，所述保护层由金属金制成，能有效保护硼硅敏感薄膜220和反射膜230，提升硼硅敏感薄膜220和反射膜230的结构强度。 Preferably, the upper ends of the borosilicate sensitive film 220 and the reflective film 230 are provided with a protective layer, and the protective layer is made of metal gold, which can effectively protect the borosilicate sensitive film 220 and the reflective film 230, and improve the borosilicate sensitive film 220 and the reflective film 230. The structural strength of the thin film 220 and the reflective film 230.
优选的，所述反射膜230为铝反射膜，铝反射膜的反射率高，且成本低，技术成熟，便于加工。 Preferably, the reflective film 230 is an aluminum reflective film, which has high reflectivity, low cost, mature technology, and is easy to process.
如图2所示，一种光纤传感探头制备方法，包括 As shown in Figure 2, a kind of optical fiber sensing probe preparation method comprises
对玻璃体210的一侧进行光刻腐蚀得凹槽； A groove is obtained by photoetching one side of the glass body 210;
将硼源片正对晶体硅进行硼扩散，对晶体硅的硼扩散面进行磁控溅射反射得到反射膜230，硼源片正对晶体硅进行硼扩散的扩散温度为1100～1250℃，扩散时间为3～5个小时；然后对反射膜230进行光刻，光刻后与玻璃体210凹槽的槽口真空键合，在玻璃体210内构成真空腔240； The boron source sheet is performing boron diffusion on the crystalline silicon, and performing magnetron sputtering reflection on the boron diffusion surface of the crystalline silicon to obtain a reflective film 230. The time is 3 to 5 hours; then photolithography is performed on the reflective film 230, and after photolithography, it is vacuum bonded with the notch of the groove of the glass body 210 to form a vacuum chamber 240 in the glass body 210;
对晶体硅远离反射膜230的一面进行自停止腐蚀，通过四甲基氢氧化铵对晶体硅进行自停止腐蚀，腐蚀温度在50℃～80℃，时长为10～18个小时，去除硅衬底，得与反射膜230一体成型的硼硅薄膜220； Perform self-stop etching on the side of the crystalline silicon away from the reflective film 230, and perform self-stop etching on the crystalline silicon through tetramethylammonium hydroxide. The etching temperature is 50°C-80°C, and the duration is 10-18 hours, and the silicon substrate is removed. , to obtain a borosilicate thin film 220 integrally formed with the reflective film 230;
将玻璃体210远离硼硅薄膜220的一侧与单模光纤250激光键合，得光纤传感探头。 The side of the glass body 210 away from the borosilicate film 220 is laser bonded to the single-mode optical fiber 250 to obtain an optical fiber sensing probe.
在上述实施例中，所述硼扩散的温度是一个相对宽泛的范围，在1000～1500℃这个温度范围内都是可行的，温度低，扩散速度慢一些，生产效率相对较低，扩散效果相对较好，温度高，则扩散速度较快，同时产品的不良率有所上升，实践中在整个温度区间产品的成品率还是有保证的。对于腐蚀温度而言，一般50℃～80℃就可以了，当然把上限温度提升到120℃速度也差不多，时间差不多在10个小时以上，高温腐蚀的情况下，时间有望控制在6个小时左右，最长腐蚀时间需要18个小时。 In the above embodiments, the temperature of the boron diffusion is in a relatively wide range, and it is feasible in the temperature range of 1000-1500°C. The temperature is low, the diffusion speed is slower, the production efficiency is relatively low, and the diffusion effect is relatively low. Better, if the temperature is high, the diffusion speed will be faster, and at the same time, the defect rate of the product will increase. In practice, the yield rate of the product in the entire temperature range is still guaranteed. For the corrosion temperature, generally 50°C to 80°C is enough. Of course, the speed of raising the upper limit temperature to 120°C is almost the same, and the time is about 10 hours or more. In the case of high temperature corrosion, the time is expected to be controlled at about 6 hours. , the longest corrosion time takes 18 hours.
采用高温浓硼扩散自停止腐蚀技术制备的硼硅薄膜，温度特性好，与玻璃体键合粘附性极高，不脱落，硼硅薄膜表面溅射金属，反射率高，测量的灵敏度高；本工艺与CMOS工艺兼容，可批量生产，提高器件的灵敏度和线性度，实现微型化、降低生产成本。 The borosilicate film prepared by high-temperature concentrated boron diffusion self-stop corrosion technology has good temperature characteristics, high adhesion to the glass body, and does not fall off. The surface of the borosilicate film is sputtered with metal, with high reflectivity and high measurement sensitivity; The process is compatible with the CMOS process, can be produced in batches, improves the sensitivity and linearity of the device, realizes miniaturization, and reduces production costs.
以上所述仅为本实用新型的较佳实施例，并不用以限制本实用新型，凡在本实用新型的精神和原则之内，所作的任何修改、等同替换、改进等，均应包含在本实用新型的保护范围之内。 The above descriptions are only preferred embodiments of the present utility model, and are not intended to limit the present utility model. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present utility model shall be included in this utility model. within the scope of protection of utility models.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105509940A (en) * | 2016-01-19 | 2016-04-20 | 莆田学院 | Optical fiber sensing probe and preparation method |
| CN106643908A (en) * | 2017-01-16 | 2017-05-10 | 深圳大学 | Method for preparing temperature-pressure sensor, temperature-pressure sensor structure and temperature-pressure measuring system and method |
| CN109186642A (en) * | 2018-08-16 | 2019-01-11 | 长春理工大学 | A kind of insertion type optical fiber sensing probe |
| CN110412683A (en) * | 2018-04-28 | 2019-11-05 | 福州高意光学有限公司 | A kind of production method and application of optical fiber structure |
-
2016
- 2016-01-19 CN CN201620049058.XU patent/CN205538040U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105509940A (en) * | 2016-01-19 | 2016-04-20 | 莆田学院 | Optical fiber sensing probe and preparation method |
| CN106643908A (en) * | 2017-01-16 | 2017-05-10 | 深圳大学 | Method for preparing temperature-pressure sensor, temperature-pressure sensor structure and temperature-pressure measuring system and method |
| CN110412683A (en) * | 2018-04-28 | 2019-11-05 | 福州高意光学有限公司 | A kind of production method and application of optical fiber structure |
| CN109186642A (en) * | 2018-08-16 | 2019-01-11 | 长春理工大学 | A kind of insertion type optical fiber sensing probe |
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