CN205529122U - Electroplating system - Google Patents
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- CN205529122U CN205529122U CN201620197956.XU CN201620197956U CN205529122U CN 205529122 U CN205529122 U CN 205529122U CN 201620197956 U CN201620197956 U CN 201620197956U CN 205529122 U CN205529122 U CN 205529122U
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- 238000009713 electroplating Methods 0.000 title claims abstract description 79
- 239000000047 product Substances 0.000 description 21
- 239000011248 coating agent Substances 0.000 description 7
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Abstract
Description
技术领域 technical field
本实用新型有关一种电镀系统,特别是指一种可依照产品外形或产品吊挂配置型态不同,配合调整电力分布状态的电镀系统。 The utility model relates to an electroplating system, in particular to an electroplating system that can coordinately adjust the power distribution state according to different product shapes or product hanging configurations.
背景技术 Background technique
众所周知,“电镀”乃一种利用电解还原反应在物体上镀一层膜的方法,其所使用的机器设备,因电镀产品的不同而有所差异,而无论使用何种形式的机器设备,于电镀区内皆设计有数量不等的电极棒作为阳极,以使电镀液中产生金属离子的游离现象,被镀工件通常设计为阴极。 As we all know, "electroplating" is a method of coating a layer of film on an object by electrolytic reduction reaction. The machinery and equipment used in it vary with different electroplating products. Electrode rods of varying numbers are designed in the electroplating area as anodes, so that metal ions can be dissociated in the electroplating solution, and the workpiece to be plated is usually designed as a cathode.
于进行电镀作业时,则分别在阳极与阴极输入电压,令电镀液因电解反应而析出金属离子,且该些金属离子会沈积于阴极端,而在阴极还原后,形成镀着于被镀工件表面的金属镀层;目前已知的电镀系统,则可依电镀金属提供方式区分为溶解性阳极电镀系统及不溶解阳极电镀统。 During the electroplating operation, the voltage is input to the anode and the cathode respectively, so that the electroplating solution will precipitate metal ions due to the electrolytic reaction, and these metal ions will be deposited on the cathode end, and after the cathode is reduced, the plating will be formed on the plated surface. The metal coating on the surface of the workpiece; the currently known electroplating systems can be divided into soluble anodic electroplating systems and insoluble anodic electroplating systems according to the way the electroplated metal is provided.
在不溶解性阳极电镀系统中,当电流从阳极顶部流至阳极底部时,其电流量会因电阻而递减,换言之,在阳极顶部处,由于通过此处的电流较大,因此较多的金属离子被分解释放,而通过下方部位所通过的电流较通过上方部位的电流少,因此较少的金属离子被分解释放出来,进而在电镀槽中产生电力线分布并不均匀(即电流的密度分布不均匀)的现象。 In an insoluble anode plating system, as the current flows from the top of the anode to the bottom of the anode, the amount of current decreases due to resistance, in other words, at the top of the anode, there is more metal due to the higher current flowing through it. The ions are decomposed and released, and the current passing through the lower part is less than the current passing through the upper part, so less metal ions are decomposed and released, and then the distribution of electric force lines in the electroplating tank is not uniform (that is, the current density distribution is uneven. Uniformity) phenomenon.
此现象将造成产品位在电流密度大的地方镀层厚,反之产品位在电流密度小的地方则镀层薄;不但会因为产品表面的镀层不均匀而严重影响产品的质量(尤其是子产品),在某些情况下,电流密度过大(电力线过密)亦容易造成产品焦黑;因此,如何提供一种可依照产品外形或产品吊挂配置型态不同,配合调整电力分布状态的电镀系统,长久以来一直是产业界所亟欲解决的课题。 This phenomenon will cause the product to have a thick coating at a place with a high current density, whereas the product will have a thin coating at a place with a low current density; not only will the quality of the product (especially sub-products) be seriously affected due to the uneven coating on the surface of the product, In some cases, excessive current density (too dense power lines) can easily cause the product to be scorched; therefore, how to provide an electroplating system that can adjust the power distribution state according to the product shape or product hanging configuration is a long-term solution. It has always been a topic that the industry wants to solve urgently.
实用新型内容 Utility model content
本实用新型所解决的技术问题即在提供一种可依照产品外形或产品吊挂配置型态不同,配合调整电力分布状态的电镀统,为其主要目的者。 The technical problem to be solved by the utility model is to provide an electroplating system that can adjust the power distribution state according to the product shape or product hanging configuration, and its main purpose is.
本实用新型所采用的技术手段如下所述。 The technical means adopted in the utility model are as follows.
为了达到上述目的,本实用新型的电镀系统,于一电镀槽中配置有一阴极端,以及至少一阳极端;其中:该至少一阳极端设有复数个呈相互绝缘状态配置的阳极件,另有复数个导电件分别与各该阳极件电气连接。 In order to achieve the above object, the electroplating system of the present utility model is equipped with a cathode end and at least one anode end in an electroplating tank; wherein: the at least one anode end is provided with a plurality of anode parts that are mutually insulated, and A plurality of conductive elements are respectively electrically connected with each anode element.
利用上述结构特征,本实用新型的电镀系统,可透过对任一或任意数个阳极件通电的方式,于电镀槽中产生不同电力线分布状态;尤其,所欲电镀的产品外型或吊挂配置型态有所改变时,只需透过简单切换电流供应回路的方式,产生对应的电力线分布状态,不须更动原有阳极端设备,即可以更为积极、可靠的手段增加电镀质量,并能产生良好的效益。 Utilizing the above-mentioned structural features, the electroplating system of the present invention can generate different power line distribution states in the electroplating tank by electrifying any or any number of anode parts; especially, the appearance or hanging of the product to be electroplated When the configuration type is changed, it is only necessary to simply switch the current supply circuit to generate the corresponding power line distribution state, without changing the original anode terminal equipment, which can increase the electroplating quality in a more active and reliable way. And can produce good benefits.
依据上述结构特征,所述该至少一阳极端,设有一架体,各该阳极件呈相互绝缘的状态设于该架体上。 According to the above structural features, the at least one anode terminal is provided with a frame body, and each of the anode parts is arranged on the frame body in a state of being insulated from each other.
依据上述结构特征,所述该至少一阳极端,设有一架体,各该阳极件呈相互绝缘的状态设于该架体上;各该导电件固设于该架体上。 According to the above structural features, the at least one anode terminal is provided with a frame body, and each of the anode parts is installed on the frame body in a state of being insulated from each other; each of the conductive parts is fixed on the frame body.
依据上述结构特征,所述该电镀系统,进一步包括一供连接外部电源的分电盘,该分电盘供与各该阳极件所设置的导电件电气连接,该分电盘上设有复数供分别控制各该阳极件的电路导通与否的开关电路。 According to the above-mentioned structural features, the electroplating system further includes a distribution board for connecting to an external power supply, the distribution board is for electrically connecting with the conductive parts provided on each of the anode parts, and the distribution board is provided with a plurality of power supplies for respectively A switch circuit that controls the conduction or non-conduction of the circuit of each anode part.
依据上述结构特征,所述该电镀系统,进一步包括一供连接外部电源的分电盘,该分电盘供与各该阳极件所设置的导电件电气连接,该分电盘上设有复数供分别控制各该阳极件的电路导通与否的开关电路;该至少一阳极端,设有一架体,各该阳极件呈相互绝缘的状态设于该架体上;各该导电件固设于该架体上;该分电盘设有复数供分别与各该导电件电气连接的导线。 According to the above-mentioned structural features, the electroplating system further includes a distribution board for connecting to an external power supply, the distribution board is for electrically connecting with the conductive parts provided on each of the anode parts, and the distribution board is provided with a plurality of power supplies for respectively A switch circuit for controlling whether the circuit of each anode part is conducted or not; the at least one anode terminal is provided with a frame body, and each anode part is set on the frame body in a state of being insulated from each other; each conductive part is fixed on the frame body On the frame body; the distribution panel is provided with a plurality of wires for electrical connection with the conductive parts respectively.
依据上述结构特征,所述各该阳极件设有复数网孔。 According to the above structural features, each of the anode parts is provided with a plurality of mesh holes.
所述各该阳极件呈长方形的外型轮廓。 Each of the anode parts has a rectangular outline.
所述各该阳极件呈圆形的外型轮廓。 Each of the anode parts has a circular outline.
所述各该阳极件呈正方形的外型轮廓。 Each of the anode parts has a square outline.
所述各该阳极件呈椭圆形的外型轮廓。 Each of the anode parts has an oval outline.
所述各该阳极件呈三角形的外型轮廓。 Each of the anode parts has a triangular outline.
所述各该阳极件呈梯形的外型轮廓。 Each of the anode parts has a trapezoidal outline.
所述各该阳极件呈L形的外型轮廓。 Each of the anode parts has an L-shaped outline.
所述该至少一阳极端设有至少两种不同外型轮廓的阳极件。 The at least one anode end is provided with at least two kinds of anode elements with different outlines.
依据上述结构特征,所述该电镀系统,该阳极片连接一摆动装置。 According to the above structural features, in the electroplating system, the anode piece is connected to a swinging device.
依据上述结构特征,所述该电镀系统,该阳极端连接一摆动装置。 According to the above structural features, in the electroplating system, the anode end is connected to a swinging device.
依据上述结构特征,所述该电镀系统,该阴极端连接一摆动装置。 According to the above structural features, in the electroplating system, the cathode terminal is connected to a swinging device.
依据上述结构特征,所述该电镀系统,该架体连接一摆动装置。 According to the above structural features, in the electroplating system, the frame is connected with a swing device.
本实用新型所产生的技术效果如下。 The technical effects produced by the utility model are as follows.
本实用新型所揭露的电镀系统,主要利用具有复数可供分别控制电路导通与否的阳极件设计,使得以透过对任一或任意数个阳极件通电的方式,于电镀槽中产生不同电力线分布状态;尤其,所欲电镀的产品外型或吊挂配置型态有所改变时,只需透过简单切换电流供应回路的方式,产生对应的电力线分布状态,不须更动原有阳极端设备,即可以更为积极、可靠的手段增加电镀质量,并能产生良好的效益。 The electroplating system disclosed in the utility model mainly utilizes the design of a plurality of anode parts for separately controlling the conduction of the circuit, so that any or any number of anode parts can be energized to generate different voltages in the electroplating tank. Power line distribution status; especially, when the appearance of the product to be electroplated or the type of hanging configuration is changed, it is only necessary to simply switch the current supply circuit to generate the corresponding power line distribution status without changing the original positive Extreme equipment, which can increase the quality of electroplating in a more active and reliable way, and can produce good benefits.
附图说明 Description of drawings
图1为本实用新型的电镀系统基本组成架构图。 Fig. 1 is the basic structure diagram of the electroplating system of the present invention.
图2为本实用新型第一实施例的阳极端外观立体图。 Fig. 2 is a perspective view of the appearance of the anode end of the first embodiment of the present invention.
图3为本实用新型第二实施例的阳极端结构示意图。 Fig. 3 is a schematic diagram of the structure of the anode end of the second embodiment of the present invention.
图4为本实用新型第三实施例的阳极端结构示意图。 Fig. 4 is a schematic diagram of the structure of the anode end of the third embodiment of the present invention.
图5为本实用新型第四实施例的阳极端结构示意图。 Fig. 5 is a schematic diagram of the structure of the anode end of the fourth embodiment of the present invention.
图6为本实用新型第五实施例的阳极端使用状态示意图。 Fig. 6 is a schematic diagram of the use state of the anode end of the fifth embodiment of the present invention.
图7为本实用新型第六实施例的阳极端使用状态示意图。 Fig. 7 is a schematic diagram of the usage state of the anode end of the sixth embodiment of the present invention.
图号说明: Description of figure number:
10电镀槽 10 electroplating tanks
20阴极端 20 cathode terminal
30阳极端 30 anode ends
31架体 31 frames
32阳极件 32 anode pieces
321网孔 321 mesh
33导电件 33 conductive parts
40分电盘 40 minute panel
41导线 41 wires
50阳极片 50 anode sheets
70摆动装置。 70 swinging device.
具体实施方式 detailed description
本实用新型主要提供一种可依照产品外形或产品吊挂配置型态不同,配合调整电力分布状态的电镀系统,如图1所示,本实用新型的电镀系统,基本上于一电镀槽10中配置有一阴极端20,以及至少一阳极端30;其中:该至少一阳极端30设有复数个呈相互绝缘状态配置的阳极件32,另有复数个导电件33分别与各该阳极件32电气连接;于实施时,所述该至少一阳极端30,可进一步设有一架体31,各该阳极件32呈相互绝缘的状态设于该架体31上。 The utility model mainly provides an electroplating system that can adjust the power distribution state according to the shape of the product or the configuration of the hanging configuration of the product. A cathode terminal 20 and at least one anode terminal 30 are configured; wherein: the at least one anode terminal 30 is provided with a plurality of anode parts 32 arranged in a mutually insulated state, and a plurality of conductive parts 33 are electrically connected to each anode part 32 respectively. Connection; during implementation, the at least one anode end 30 may further be provided with a frame body 31 , and each of the anode parts 32 is arranged on the frame body 31 in a state of being insulated from each other.
原则上,本实用新型的电镀系统,于实际运作时,可将成对的阳极端30分别置于电镀槽10内部相对于阴极端20的两侧,且于阴极端20吊挂欲进行电镀的产品,使分别在阳极端30与阴极端20输入电流的状态下,令电镀槽10内的电镀液因电解反应而析出沈积于阴极端的金属离子,待金属离子于阴极还原后,形成镀着于产品表面的金属镀层。 In principle, in the actual operation of the electroplating system of the present invention, the paired anode ends 30 can be placed on both sides of the electroplating tank 10 relative to the cathode end 20, and the products to be electroplated are hung on the cathode end 20 , so that the electroplating solution in the electroplating tank 10 will precipitate metal ions deposited on the cathode end due to the electrolytic reaction under the state of inputting current at the anode end 30 and the cathode end 20 respectively, and after the metal ions are reduced at the cathode, a plated Metal coating on the surface of the product.
由于,本实用新型的电镀系统,设置复数可供分别控制电路导通与否的阳极件32,因此可透过对任一或任意数个阳极件32通电的方式,于电镀槽中产生不同电力线分布状态;尤其,所欲电镀的产品外型或吊挂配置型态有所改变时,只需透过简单切换电流供应回路的方式,产生对应的电力线分布状态,不须更动原有阳极端设备,即可以更为积极、可靠的手段增加电镀质量,并能产生良好的效益。 Since, the electroplating system of the present utility model is provided with a plurality of anode parts 32 which can be used to separately control the conduction of the circuit, it is possible to generate different power lines in the electroplating tank by energizing any or any number of anode parts 32. Distribution state; especially, when the appearance of the product to be electroplated or the type of hanging configuration is changed, it is only necessary to simply switch the current supply circuit to generate the corresponding distribution state of the power line without changing the original anode terminal Equipment, that is, it can increase the quality of electroplating in a more active and reliable way, and can produce good benefits.
如图2所示,在所述该至少一阳极端30,设有一架体31,且各该阳极件32呈相互绝缘的状态设于该架体31上的结构型态下,各该导电件33亦可固设于该架体31上,且各该导电件33的一端且相对伸出该架体31预先设定的长度为佳,不但较有利于整体阳极端30的安装架设,更较方便导电件33与外部电源电气连接。 As shown in FIG. 2 , at the at least one anode end 30, a frame body 31 is provided, and each of the anode parts 32 is arranged on the frame body 31 in a state of being insulated from each other. 33 can also be fixed on the frame body 31, and one end of each of the conductive parts 33 should relatively protrude from the preset length of the frame body 31, which is not only more conducive to the installation of the overall anode end 30, but also more convenient. It is convenient for the conductive member 33 to be electrically connected with an external power source.
如图3所示,本实用新型的电镀系统,可进一步包括一供连接外部电源的分电盘40,该分电盘40供与各该阳极件32所设置的导电件33电气连接,该分电盘40上设有复数供分别控制各该阳极件32的电路导通与否的开关电路。 As shown in Figure 3, the electroplating system of the present utility model can further include a distribution board 40 for connecting to an external power supply, and the distribution board 40 is for electrically connecting with the conductive members 33 provided with each anode member 32, the distribution board 40 The disc 40 is provided with a plurality of switch circuits for respectively controlling the conduction of the circuits of the anode parts 32 .
本实用新型的电镀系统,又以进一步包括一供连接外部电源的分电盘40,该分电盘40供与各该阳极件32所设置的导电件33电气连接,该分电盘40上设有复数供分别控制各该阳极件32的电路导通与否的开关电路;该至少一阳极端30,设有一架体31,各该阳极件32呈相互绝缘的状态设于该架体31上,各该导电件33固设于该架体31上,以及该分电盘40设有复数供分别与各该导电件33电气连接的导线41的结构型态呈现为佳。 The electroplating system of the present utility model further includes a distribution board 40 for connecting to an external power supply. A plurality of switch circuits for respectively controlling the conduction of the circuit of each anode piece 32; the at least one anode terminal 30 is provided with a frame body 31, and each of the anode pieces 32 is arranged on the frame body 31 in a mutually insulated state, It is preferable that each conductive element 33 is fixed on the frame body 31 and that the distribution board 40 is provided with a plurality of wires 41 electrically connected to each conductive element 33 respectively.
本实用新型的电镀统,在上揭各种可能实施的结构型态下,所述各该阳极件32设有复数网孔321,亦即所述该阳极件32可以呈网、篮的结构型态呈现,使其电镀槽中的金属离子得以获致较佳的流动性。 In the electroplating system of the present utility model, under various possible structural forms disclosed above, each of the anode parts 32 is provided with a plurality of mesh holes 321, that is, the anode parts 32 can be in the structure of a net or a basket state, so that the metal ions in the electroplating tank can obtain better fluidity.
以及,在上揭图2所示的实施例中,所述各该阳极件32呈长方形的外型轮廓;于实施时,所述各该阳极件32亦可呈如图3所示圆形的外型轮廓,或者呈如图4所示正方形的外型轮廓,甚至可以分别呈如图5当中所示椭圆形的外型轮廓、三角形的外型轮廓、梯形的外型轮廓及L形的外型轮廓;必要时,所述该至少一阳极端30,亦可设有至少两种不同外型轮廓的阳极件32。再者,亦可如图6所示,于实施时,所述各该阳极端30可进一步设置于阳极片50与阴极端20间,确保电镀质量;或可如图7所示,于实施时,该阳极端30可设置于阳极片50相对于阴极端20的另一侧;进一步,阴极端20、阳极端30及阳极片50可依其需求连接一摆动装置70,达到镀层更均匀的效果。 And, in the embodiment shown in Figure 2 above, each of the anode parts 32 has a rectangular outline; during implementation, each of the anode parts 32 can also be circular as shown in Figure 3 The external profile, or the external profile of a square as shown in Figure 4, can even be respectively an elliptical external profile, a triangular external profile, a trapezoidal external profile and an L-shaped external profile as shown in Figure 5. profile; if necessary, the at least one anode end 30 may also be provided with at least two anode parts 32 with different profiles. Furthermore, as shown in Figure 6, during implementation, each of the anode ends 30 can be further arranged between the anode sheet 50 and the cathode end 20 to ensure the quality of electroplating; or as shown in Figure 7, during implementation , the anode end 30 can be arranged on the other side of the anode piece 50 relative to the cathode end 20; further, the cathode end 20, the anode end 30 and the anode piece 50 can be connected with a swing device 70 according to their needs, so as to achieve a more uniform coating effect .
具体而言,本实用新型所揭露的电镀系统,主要利用具有复数可供分别控制电路导通与否的阳极件设计,使得以透过对任一或任意数个阳极件通电的方式,于电镀槽中产生不同电力线分布状态;尤其,所欲电镀的产品外型或吊挂配置型态有所改变时,只需透过简单切换电流供应回路的方式,产生对应的电力线分布状态,不须更动原有阳极端设备,即可以更为积极、可靠的手段增加电镀质量,并能产生良好的效益。 Specifically, the electroplating system disclosed in this utility model mainly utilizes the design of a plurality of anode parts that can be used to separately control the conduction of the circuit, so that any or any number of anode parts can be energized in the electroplating system. Different power line distribution states are generated in the tank; especially, when the appearance of the product to be electroplated or the hanging configuration type is changed, the corresponding power line distribution state can be generated by simply switching the current supply circuit, without changing Moving the original anode terminal equipment can increase the quality of electroplating in a more active and reliable way, and can produce good benefits.
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
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CN107190306A (en) * | 2016-03-15 | 2017-09-22 | 先丰通讯股份有限公司 | Electroplating system |
CN109518244A (en) * | 2018-12-27 | 2019-03-26 | 中国电子科技集团公司第二研究所 | The wafer copper-plating technique of coating edge effect can be weakened |
WO2020099947A1 (en) * | 2018-08-22 | 2020-05-22 | 盛青永致半导体设备(苏州)有限公司 | Electroplating device and electroplating method |
WO2021227853A1 (en) * | 2020-05-09 | 2021-11-18 | 京东方科技集团股份有限公司 | Electrode structure, and electrochemical deposition device and electrochemical deposition method therefor |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107190306A (en) * | 2016-03-15 | 2017-09-22 | 先丰通讯股份有限公司 | Electroplating system |
WO2020099947A1 (en) * | 2018-08-22 | 2020-05-22 | 盛青永致半导体设备(苏州)有限公司 | Electroplating device and electroplating method |
CN109518244A (en) * | 2018-12-27 | 2019-03-26 | 中国电子科技集团公司第二研究所 | The wafer copper-plating technique of coating edge effect can be weakened |
WO2021227853A1 (en) * | 2020-05-09 | 2021-11-18 | 京东方科技集团股份有限公司 | Electrode structure, and electrochemical deposition device and electrochemical deposition method therefor |
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