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CN205514536U - Frequency domain optics chromatographic device that is concerned with - Google Patents

Frequency domain optics chromatographic device that is concerned with Download PDF

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Publication number
CN205514536U
CN205514536U CN201620058457.2U CN201620058457U CN205514536U CN 205514536 U CN205514536 U CN 205514536U CN 201620058457 U CN201620058457 U CN 201620058457U CN 205514536 U CN205514536 U CN 205514536U
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sample
automatically controlled
light
beam splitter
mercury lamp
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高鹏
凌福日
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Huazhong University of Science and Technology
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Huazhong University of Science and Technology
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Abstract

The utility model discloses a frequency domain optics chromatographic device that is concerned with belongs to terahertz relevant tomographic image technical field now, and the relevant chromatographic device speed of current optics is slow, with high costs, the utility model discloses a frequency domain optics chromatographic device that is concerned with owing to need not refer to the along -track scanning of mirror, has accelerated formation of image speed including mercury lamp, the beam splitter, the automatically controlled two -dimensional translation table who is used for across -track scanning, the objective table that is used for placing the sample, reference mirror, diffraction grating, automatically controlled one -dimensional translation platform, the detector that produce THz greatly. Mode with the scanning of dot matrix CCD replaces area array CCD, has reduced the cost of system's device. And this structure adopts the wide range mercury lamp can reach 100 mu m as light source, vertical imaging resolution.

Description

一种频域光学相干层析装置A frequency domain optical coherence tomography device

技术领域technical field

本实用新型属于太赫兹相干层析成像技术领域,更具体地,涉及一种频域光学相干层析装置。The utility model belongs to the technical field of terahertz coherence tomography, and more specifically relates to a frequency-domain optical coherence tomography device.

背景技术Background technique

光学相干层析成像技术(Optical Coherence Tomography,OCT)作为一种全新的光学断层成像技术,其使用的光源波长较长,以其无辐射、非侵入、高分辨及高探测灵敏度等特点,在临床医学领域广泛应用。Optical coherence tomography (Optical Coherence Tomography, OCT), as a new optical tomography technology, uses a longer wavelength light source, and is widely used in clinical Widely used in medical field.

传统的OCT技术为时域OCT,其特点是需要参考臂的深度扫描,对应样品的不同深度。深度扫描限制了时域OCT的采集速度,影响了其更广泛的应用。The traditional OCT technology is time-domain OCT, which is characterized by the need for depth scanning of the reference arm, corresponding to different depths of the sample. Deep scanning limits the acquisition speed of time-domain OCT, which affects its wider application.

而最近兴起的频域OCT技术使用面阵CCD进行数据采集,通过采集干涉光谱并傅立叶变换得到样品内部一个深度方向的全部信息,不过目前市场上响应频段在太赫兹波段的面阵CCD数量少,价格高,制约了该系统的进一步发展。The recently emerging frequency-domain OCT technology uses area array CCD for data acquisition, and obtains all the information in a depth direction inside the sample by collecting interference spectrum and Fourier transform. The high price restricts the further development of the system.

实用新型内容Utility model content

针对现有技术中成像速度慢、成本高的缺陷,本实用新型的目的旨在解决以上技术问题。Aiming at the defects of slow imaging speed and high cost in the prior art, the purpose of this utility model is to solve the above technical problems.

为实现上述目的,本实用新型提供了一种频域光学相干层析装置,所述装置包括产生THz的高稳定性中压汞灯、分束器、用于横向扫描的电控二维平移台、用于放置样品的载物台、参考反射镜、衍射光栅、电控一维平移台、探测器;To achieve the above purpose, the utility model provides a frequency-domain optical coherence tomography device, which includes a high-stability medium-pressure mercury lamp generating THz, a beam splitter, and an electronically controlled two-dimensional translation stage for lateral scanning , the stage used to place the sample, the reference mirror, the diffraction grating, the electronically controlled one-dimensional translation stage, and the detector;

所述汞灯的出射光经分束器分别通过样品臂和参考臂,经过干涉再通过所述衍射光栅后被所述探测器所接收;The outgoing light of the mercury lamp passes through the sample arm and the reference arm respectively through the beam splitter, and is received by the detector after passing through the diffraction grating after interference;

所述样品臂包括用于所述横向扫描的电控二维平移台和所述用于放置样品的载物台,用于将光入射到所述样品内部并反射回来;The sample arm includes an electronically controlled two-dimensional translation stage for the lateral scanning and the stage for placing the sample, which is used to inject light into the sample and reflect it back;

所述参考臂包括所述参考反射镜,用于将光进行反射并与通过所述样品臂的光进行干涉;the reference arm includes the reference mirror for reflecting light and interfering with light passing through the sample arm;

所述探测器位于所述电控一维平台上。The detector is located on the electronically controlled one-dimensional platform.

优选地,所述装置还包括对所述探测器输出的探测信号进行放大处理的锁相放大器;记录所述锁相放大器输出信号的电脑;以及控制所述电控二维平移台以及所述电控一维平移台的控制器。Preferably, the device further includes a lock-in amplifier for amplifying the detection signal output by the detector; a computer for recording the output signal of the lock-in amplifier; and controlling the electronically controlled two-dimensional translation stage and the electronic Controller for one-dimensional translation stage.

优选地,所述装置还包括孔径光阑,所述孔径光阑在光路上位于所述分束器之前,用于控制光斑尺寸大小并且增加干涉对比度;Preferably, the device further includes an aperture stop, the aperture stop is located before the beam splitter on the optical path, and is used to control the spot size and increase the interference contrast;

优选地,分束器是由在Mylar薄膜上制作的金属光栅构成的,其透射反射比为4:1;Preferably, the beam splitter is made of a metal grating made on a Mylar film, and its transmission-reflection ratio is 4:1;

总体而言,通过本实用新型所构思的以上技术方案,与现有技术相比,能够取得以下有益效果:Generally speaking, compared with the prior art, the above technical solutions conceived by the utility model can achieve the following beneficial effects:

(1)本结构与传统的时域光学相干层析技术相比,由于不需要参考镜的纵向扫描,大大加快了成像速度。用点阵CCD扫描的方式取代面阵CCD,降低了系统装置的成本。而且本结构采用宽谱汞灯作为光源,纵向成像分辨率可以达到100μm。(1) Compared with the traditional time-domain optical coherence tomography technology, this structure greatly speeds up the imaging speed because it does not need the longitudinal scanning of the reference mirror. The area array CCD is replaced by the dot matrix CCD scanning method, which reduces the cost of the system device. Moreover, the structure uses a broad-spectrum mercury lamp as a light source, and the longitudinal imaging resolution can reach 100 μm.

附图说明Description of drawings

图1是频域光学相干层析系统示意图;Fig. 1 is a schematic diagram of a frequency-domain optical coherence tomography system;

图2是汞灯输出光谱图。Figure 2 is a graph of the mercury lamp output spectrum.

具体实施方式detailed description

为了使本实用新型的目的、技术方案及优点更加清楚明白,以下结合附图及实施例,对本实用新型进行进一步详细说明。应当理解,此处所描述的具体实施例仅仅用以解释本实用新型,并不用于限定本实用新型。In order to make the purpose, technical solution and advantages of the utility model clearer, the utility model will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model, and are not intended to limit the utility model.

为了解决现有技术存在的不足,本实用新型提供频域光学相干层析系统与方法,利用宽频太赫兹的弱相干原理,可以实现对待测样品的高精度三维图像重构。与此同时,由于频域OCT系统无需移动参考镜进行轴向扫描,可以一次得到所有深度数据,所以加快了成像速度。实验结果表明,太赫兹相干层析成像技术的纵向分辨率小于100μm。该技术在高精度太赫兹无损探测领域具有很好的应用前景,为太赫兹无损探测领域提供了一种全新的实验方法。In order to solve the shortcomings of the existing technology, the utility model provides a frequency-domain optical coherence tomography system and method, which can realize high-precision three-dimensional image reconstruction of the sample to be tested by using the weak coherence principle of broadband terahertz. At the same time, since the frequency-domain OCT system does not need to move the reference mirror for axial scanning, it can obtain all the depth data at one time, so the imaging speed is accelerated. Experimental results show that the longitudinal resolution of terahertz coherence tomography is less than 100 μm. This technology has a good application prospect in the field of high-precision terahertz nondestructive detection, and provides a new experimental method for the field of terahertz nondestructive detection.

本实用新型的频域光学相干层析系统与方法,包括产生THz的高稳定性中压汞灯1,具有聚焦、准直作用的第一镀金离轴抛物面镜2和第二镀金离轴抛物面镜3,控制进入干涉仪的光斑尺寸大小并且增加干涉对比度的孔径光阑4,对高稳定性中压汞灯发出的THz波进行周期调制以供探测器探测的斩波器5,分束器6是由在Mylar薄膜上制作的金属光栅构成的,其透射反射比为4:1,位于参考臂7上对参考光起聚焦作用的第三镀金离轴抛物面镜8,位于参考臂上的镀金高反镜9,位于样品臂10上对样品光起聚焦和准直作用的第四镀金离轴抛物面镜11,位于样品臂上的用于横向扫描的电控二维平移台12,由一片镀铝的高反射镜构成的用于放置样品13的载物台14,位于接收端15的对来自样品臂10和参考臂7的光干涉后的信号进行衍射的衍射光栅16,经过聚焦透镜17将衍射光汇聚,由放置在电控一维平移台19上的Golay点阵探测器18接收,对Golay点阵探测器18输出的探测信号进行放大处理的锁相放大器20,记录锁相放大器输出信号的电脑21,以及控制位于样品臂的电控二维平移台12以及位于接收端的电控一维平移台19的控制器22。The frequency-domain optical coherence tomography system and method of the utility model include a high-stability medium-pressure mercury lamp 1 generating THz, a first gold-plated off-axis parabolic mirror 2 and a second gold-plated off-axis parabolic mirror with focusing and collimating functions 3. Aperture stop 4 to control the size of the light spot entering the interferometer and increase the interference contrast, chopper 5 to periodically modulate the THz wave emitted by the high-stability medium-pressure mercury lamp for detection by the detector, and beam splitter 6 It is composed of a metal grating made on Mylar film, and its transmission-reflection ratio is 4:1. The third gold-plated off-axis parabolic mirror 8 located on the reference arm 7 to focus the reference light, and the gold-plated height on the reference arm Anti-mirror 9, the fourth gold-plated off-axis parabolic mirror 11 on the sample arm 10 to focus and collimate the sample light, and the electronically controlled two-dimensional translation stage 12 for lateral scanning on the sample arm, consisting of a piece of aluminum plated The stage 14 for placing the sample 13 made of a high reflection mirror, the diffraction grating 16 at the receiving end 15 that diffracts the signal after the light interference from the sample arm 10 and the reference arm 7, passes through the focusing lens 17 to diffract the The light is converged, received by the Golay dot matrix detector 18 placed on the electronically controlled one-dimensional translation platform 19, and the lock-in amplifier 20 that amplifies the detection signal output by the Golay dot matrix detector 18 records the output signal of the lock-in amplifier. A computer 21, and a controller 22 for controlling the electronically controlled two-dimensional translation stage 12 at the sample arm and the electronically controlled one-dimensional translation stage 19 at the receiving end.

下面结合附图对本实用新型的具体实施方式作进一步详细地说明。Below in conjunction with accompanying drawing, the specific embodiment of the present utility model is described in further detail.

步骤1:初始化电控二维平移台到横向扫描初始点,初始化电控一维平移台使其沿衍射光斑进行横向扫描。与此同时高稳定性汞灯1输出覆盖1THz-20THz频率范围THz波,经过镀金离轴抛物面镜2,3、孔径光阑4及斩波器5后入射到分束器6上,分为参考光和样品光。参考光经镀金离轴抛物面镜8入射到镀金高反镜9上被反射回来,经过镀金离轴抛物面镜再次入射到分束器上。同时样品光经镀金离轴抛物面镜11入射到样品内部并被反射回来,经过镀金离轴抛物面镜再次入射到分束器上,要保证光源发出的入射光,参考臂反射回的参考光,样品臂反射回的样品光聚焦在分束器的同一点上。Step 1: Initialize the electronically controlled two-dimensional translation stage to the initial point of lateral scanning, and initialize the electronically controlled one-dimensional translation stage to perform lateral scanning along the diffraction spot. At the same time, the high-stability mercury lamp 1 outputs THz waves covering the frequency range of 1THz-20THz. After passing through the gold-plated off-axis parabolic mirrors 2 and 3, the aperture diaphragm 4 and the chopper 5, it is incident on the beam splitter 6, and is divided into reference light and sample light. The reference light is incident on the gold-plated high reflection mirror 9 through the gold-plated off-axis parabolic mirror 8 and is reflected back, and is incident on the beam splitter again through the gold-plated off-axis parabolic mirror. At the same time, the sample light enters the sample through the gold-plated off-axis parabolic mirror 11 and is reflected back, and then enters the beam splitter again through the gold-plated off-axis parabolic mirror 11. It is necessary to ensure that the incident light emitted by the light source and the reference light reflected by the reference arm are safe to the sample. The sample light reflected back by the arms is focused at the same point on the beam splitter.

步骤2:根据迈克尔逊干涉仪原理,重新经过分束器的样品光和参考光满足相干条件,产生包含样品内部结构信息的干涉信号,经过衍射光栅16将复合光分成单色光,经聚焦透镜17聚焦后的光谱被Golay点阵探测器18沿光轴垂直方向扫描探测,将光信号转变为包含样品内部结构信息的电信号。Step 2: According to the principle of Michelson interferometer, the sample light and reference light re-passed through the beam splitter meet the coherence condition, and generate an interference signal containing the internal structure information of the sample. The composite light is divided into monochromatic light by the diffraction grating 16, and passed through the focusing lens 17 The focused spectrum is scanned and detected by the Golay lattice detector 18 along the vertical direction of the optical axis, and the optical signal is converted into an electrical signal containing the internal structure information of the sample.

步骤3:通过锁相放大器20对该电信号进行锁相放大处理并被电脑所收集。这样便完成了一次深度成像,然后利用电控二维平移台对样品表面进行二维扫描,最终完成对样品的三维成像。Step 3: Perform lock-in amplification processing on the electric signal through the lock-in amplifier 20 and collect it by the computer. In this way, a depth imaging is completed, and then the electronically controlled two-dimensional translation stage is used to scan the surface of the sample in two dimensions, and finally the three-dimensional imaging of the sample is completed.

步骤4:对电脑采集到的三维数据进行相关的数据处理,结合相关软件进行三维重构。Step 4: Perform relevant data processing on the 3D data collected by the computer, and perform 3D reconstruction in combination with relevant software.

由弱相干光的干涉理论可知,辐射源的相干长度其中λ0为辐射源的中心波长,Δλ为辐射源的光谱宽度。仅当参考臂和样品臂之间的光程差小于相干长度,两束光才会出现干涉现象。为了实现高精度的纵向成像,要求所使用光源具有较短的相干长度,即具有较宽的辐射光谱。实验所选择的太赫兹辐射源为高稳定性汞灯,其输出光谱如图2所示,输出频率主要集中在1THz-10THz及11THz-20THz。According to the interference theory of weakly coherent light, the coherence length of the radiation source Where λ 0 is the central wavelength of the radiation source, and Δλ is the spectral width of the radiation source. Interference between the two beams occurs only when the optical path difference between the reference arm and the sample arm is less than the coherence length. In order to achieve high-precision longitudinal imaging, the light source used is required to have a short coherence length, that is, a wide radiation spectrum. The terahertz radiation source selected in the experiment is a high-stability mercury lamp, and its output spectrum is shown in Figure 2. The output frequencies are mainly concentrated in 1THz-10THz and 11THz-20THz.

频域OCT由于其特性拥有着最大探测深度。如果参考镜的虚像位置位于样品表面,那么深度di处所对应的余弦函数的周期为π/nidi,ΔkFWHM中所包含干涉条纹总数Mi为:可以得到从而可以看出样品轴向深度所有散射点具有不同的干涉条纹总数,轴向最深处对应的频率最高。在本系统中,通过设置点阵探测器采样间隔来得到采样点数量为N,由于干涉谱的对称性,能检测到的最大干涉条纹总数为N/2,从而得到了频域OCT系统的最大成像深度d为:其中n为样品的平均折射率,Δλ为光谱宽度。Frequency-domain OCT has the largest depth of detection due to its characteristics. If the virtual image position of the reference mirror is located on the sample surface, then the period of the cosine function corresponding to the depth d i is π/ ni d i , and the total number of interference fringes M i contained in Δk FWHM is: can get Therefore, it can be seen that all scattering points in the axial depth of the sample have different total numbers of interference fringes, and the deepest part in the axial direction corresponds to the highest frequency. In this system, the number of sampling points is N by setting the sampling interval of the lattice detector. Due to the symmetry of the interference spectrum, the maximum number of interference fringes that can be detected is N/2, thus obtaining the maximum frequency domain OCT system The imaging depth d is: where n is the average refractive index of the sample, and Δλ is the spectral width.

本领域的技术人员容易理解,以上所述仅为本实用新型的较佳实施例而已,并不用以限制本实用新型,凡在本实用新型的精神和原则之内所作的任何修改、等同替换和改进等,均应包含在本实用新型的保护范围之内。Those skilled in the art can easily understand that the above descriptions are only preferred embodiments of the present utility model, and are not intended to limit the present utility model. Any modifications, equivalent replacements and modifications made within the spirit and principles of the present utility model Improvements and the like should all be included within the protection scope of the present utility model.

Claims (4)

1. a domain optical coherence chromatographic apparatus, described device include produce the mercury lamp of THz, beam splitter, for transversal scanning Automatically controlled two-dimension translational platform, for placing the object stage of sample, reference mirror, diffraction grating, automatically controlled one-dimensional translation stage, detection Device;
The emergent light of described mercury lamp respectively by sample arm and reference arm, passes through described diffraction grating through interfering through beam splitter again Received by described detector afterwards;
Described sample arm includes the automatically controlled two-dimension translational platform for described transversal scanning and the described object stage for placing sample, For light being incided described sample interior and reflecting;
Described reference arm includes described reference mirror, for carrying out reflecting and doing with by the light of described sample arm by light Relate to;
Described detector is positioned in described automatically controlled one-dimensional platform.
2. device as claimed in claim 1, it is characterised in that described device also includes the detection letter exporting described detector Number it is amplified the lock-in amplifier processed;Record the computer of described lock-in amplifier output signal;And control described automatically controlled Two-dimension translational platform and the controller of described automatically controlled one-dimensional translation stage.
3. device as claimed in claim 1, it is characterised in that described device also includes that aperture diaphragm, described aperture diaphragm exist Before being positioned at described beam splitter in light path, it is used for controlling spot size size and increasing interference contrast.
4. device as claimed in claim 1, it is characterised in that beam splitter is by the metal grating made on Mylar thin film Constituting, its Transflective ratio is for 4:1.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105534481A (en) * 2016-01-21 2016-05-04 华中科技大学 Frequency domain optical coherence tomograghy device and method
CN107036549A (en) * 2016-12-30 2017-08-11 华中科技大学 A kind of terahertz imaging device based on coherent tomographic

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105534481A (en) * 2016-01-21 2016-05-04 华中科技大学 Frequency domain optical coherence tomograghy device and method
CN107036549A (en) * 2016-12-30 2017-08-11 华中科技大学 A kind of terahertz imaging device based on coherent tomographic

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