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CN205384407U - Reflective digital holographic microscope of dual wavelength - Google Patents

Reflective digital holographic microscope of dual wavelength Download PDF

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Publication number
CN205384407U
CN205384407U CN201620182264.8U CN201620182264U CN205384407U CN 205384407 U CN205384407 U CN 205384407U CN 201620182264 U CN201620182264 U CN 201620182264U CN 205384407 U CN205384407 U CN 205384407U
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prism
laser
achromatic
wavelength
lens
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钟金钢
李仕萍
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Jinan University
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Abstract

The utility model discloses a reflective digital holographic microscope of dual wavelength, including first laser instrument, second laser instrument, cube beam splitter prism, optical distance extender, first speculum, dispersion prism, cube beam combining prism and camera device, still include the second mirror, achromatic lens, achromatic microscope objective and sample platform. The utility model is used for the micro - formation of image of reflective the sample surface 3D, the light path of laser beam sharing and the optical element of two bundles of different wavelength for the device structure is simple relatively, and manufacturing cost is lower, and is simpler during the use, convenient to popularize and use.

Description

一种双波长反射式数字全息显微镜A dual-wavelength reflective digital holographic microscope

技术领域technical field

本实用新型涉及数字全息成像技术领域,具体涉及一种双波长反射式数字全息显微镜。The utility model relates to the technical field of digital holographic imaging, in particular to a dual-wavelength reflective digital holographic microscope.

背景技术Background technique

数字全息(DigitalHolography),是普通全息术、计算机技术、电子摄像技术相结合的产物。数字全息术和普通全息术的记录过程基本相同,不同的是用CCD、CMOS等电子摄像器件代替全息干版来记录全息图,并将记录的全息图存入计算机。数字全息术的再现过程和普通全息术也不同,其是用数值计算方法对存入计算机的全息图进行全息再现。和普通全息术比较,数字全息有以下优点:Digital Holography (Digital Holography) is the product of the combination of ordinary holography, computer technology, and electronic imaging technology. The recording process of digital holography and ordinary holography is basically the same, the difference is that CCD, CMOS and other electronic imaging devices are used instead of holographic dry plates to record holograms, and the recorded holograms are stored in the computer. The reproduction process of digital holography is also different from that of ordinary holography. It uses numerical calculation methods to perform holographic reproduction on holograms stored in computers. Compared with ordinary holography, digital holography has the following advantages:

(一)由于用电子摄像器件代替全息干版来记录全息图,所需的曝光时间可以很短,没有化学银盐干版的湿处理过程,可连续记录运动物体的各个瞬间过程,实现视频下的连续实时在线全息记录;(1) Since the electronic imaging device is used to replace the holographic dry plate to record the hologram, the required exposure time can be very short, without the wet processing process of the chemical silver salt dry plate, it can continuously record the various instantaneous processes of the moving object, and realize video recording. continuous real-time online holographic recording;

(二)通过数字再现,可以同时得到物光波的强度分布和位相分布的定量图像。(2) Quantitative images of the intensity distribution and phase distribution of the object light wave can be simultaneously obtained through digital reconstruction.

数字全息显微镜是数字全息技术和显微成像技术结合的产物,可以对微小物体进行显微成像,在生物医学等方面具有重要的应用前景。现有的数字全息显微镜的工作过程分为二个步骤,一是用CCD或CMOS记录经光波干涉形成的全息图,然后将全息图存入计算机;二是用计算机模拟光学衍射过程,通过数值计算来实现被记录物体的全息再现。通过全息再现,可以同时获得被记录物体的幅度图像和位相图像,而位相图像包含了被记录物体的三维信息,因此大多数应用是利用位相图像。Digital holographic microscope is the product of the combination of digital holographic technology and microscopic imaging technology, which can perform microscopic imaging of tiny objects, and has important application prospects in biomedicine and other fields. The working process of the existing digital holographic microscope is divided into two steps, one is to use CCD or CMOS to record the hologram formed by light wave interference, and then store the hologram in the computer; the other is to use the computer to simulate the optical diffraction process, through numerical calculation To realize the holographic reproduction of the recorded object. Through holographic reconstruction, the magnitude image and phase image of the recorded object can be obtained at the same time, and the phase image contains the three-dimensional information of the recorded object, so most applications use the phase image.

由于不论参与干涉的两光波的位相差是多少,全息再现算法获得的位相值都是介于之间的,因此存在称之为包裹位相或位相不确定的问题。为了获取被记录物体的真实位相图像,就必须进行位相解包裹处理。但是,由于不连续或突变的出现,在不连续或突变点,位相解包裹会出现错误。为了更有效地对不连续或突变点进行位相解包裹,有人提出了双波长数字全息技术,即采用具有两种波长的激光束来记录全息图,利用两种波长分别对应的包裹位相图像联合进行位相解包裹。Because no matter how much the phase difference of the two light waves participating in the interference is, the phase value obtained by the holographic reconstruction algorithm is between between, so there exists what is called the wrapped phase or Uncertain phase problem. In order to obtain the real phase image of the recorded object, phase unwrapping must be performed. However, due to the occurrence of discontinuities or mutations, at the point of discontinuities or mutations, errors in phase unwrapping occur. In order to more effectively unwrap the phase of discontinuous or abrupt points, someone proposed a dual-wavelength digital holography technology, which uses laser beams with two wavelengths to record holograms, and uses the wrapped phase images corresponding to the two wavelengths to jointly perform Phase unwrapping.

双波长数字全息技术,相对单波长数字全息技术,在全息记录装置上,要考虑以下两方面的问题:一是要保证两种波长分别对应的包裹位相图像的同一位置像素点对应样品的同一点;二是要保证两种波长分别对应的全息干涉条纹的方向有一较大角度,使得双波长复合全息图傅里叶谱中,与两个波长对应的一级分量尽量分离。为了满足上述条件,目前采用的双波长数字全息记录装置过于复杂(JonasKühn,TristanColomb,FrédéricMontfort,FlorianCharrière,YvesEmery,EtienneCuche,PierreMarquet,andChristianDepeursinge.Real-timedual-wavelengthdigitalholographicmicroscopywithasinglehologramacquisition[J].OpticsExpress,2007,15(12):7231-7242.),不利于推广应用。Dual-wavelength digital holographic technology, compared with single-wavelength digital holographic technology, in the holographic recording device, the following two issues should be considered: one is to ensure that the same position pixel of the package phase image corresponding to the two wavelengths corresponds to the same point of the sample The second is to ensure that the directions of the holographic interference fringes corresponding to the two wavelengths have a relatively large angle, so that in the Fourier spectrum of the dual-wavelength composite hologram, the primary components corresponding to the two wavelengths are separated as much as possible. In order to meet the above conditions, the current dual-wavelength digital holographic recording device is too complicated (Jonas Kühn, Tristan Colomb, Frédéric Montfort, Florian Charrière, Yves Emery, Etienne Cuche, Pierre Marquet, and Christian Depeursinge. Real-time dual-wavelength digital holographic microscopy with asingle hologram acquisition [J]. :7231-7242.), which is not conducive to popularization and application.

实用新型内容Utility model content

本实用新型的目的是解决现有技术的缺陷,提供一种双波长反射式数字全息显微镜,用于反射式样品表面3D显微成像,采用的技术方案如下:The purpose of this utility model is to solve the defects of the prior art and provide a dual-wavelength reflective digital holographic microscope for 3D microscopic imaging of reflective sample surfaces. The technical scheme adopted is as follows:

一种双波长反射式数字全息显微镜,包括第一激光器、第二激光器、立方分束棱镜、光程延长器、第一反射镜、色散棱镜、立方合束棱镜和摄像器件,还包括第二反射镜、消色差透镜、消色差显微物镜、样品台和计算机;其中,第一反射镜、色散棱镜和立方合束棱镜的相对位置使得两种波长分别对应的全息干涉条纹的方向不一致;第一激光器和第二激光器输出两束波长不同的光束,两光束分别沿立方分束棱镜两个不同侧面的法线方向射入立方分束棱镜内,从立方分束棱镜的另两个侧面的法线方向分别各出射一束双波长混合的激光束;其中一束为参考光束,参考光束经光程延长器、第一反射镜反射入色散棱镜,色散棱镜将光束分离成传播方向稍有不同的两单波长激光束,两单波长激光束再一起射入一立方合束棱镜,再射入摄像器件内;另一束为物光束,物光束经第二反射镜反射入立方合束棱镜,再经消色差透镜和消色差显微物镜照射放置在样品台上的样品,被样品反射的光经过消色差显微物镜和消色差透镜射入立方合束棱镜内,将样品成像到摄像器件的像传感面上和参考光束进行干涉,形成双波长复合全息图;全息图被摄像器件拍摄后,存入计算机进行全息再现。A dual-wavelength reflective digital holographic microscope, including a first laser, a second laser, a cubic beam splitting prism, an optical path extender, a first reflector, a dispersion prism, a cubic beam combining prism, and an imaging device, and also includes a second reflection mirror, achromat lens, achromat microscope objective lens, sample stage and computer; wherein, the relative positions of the first reflector, dispersion prism and cubic beam combining prism make the directions of the holographic interference fringes corresponding to the two wavelengths respectively inconsistent; the first The laser and the second laser output two beams of different wavelengths, and the two beams are respectively injected into the cubic beam splitting prism along the normal direction of two different sides of the cubic beam splitting prism, and from the normal of the other two sides of the cubic beam splitting prism Each direction emits a beam of dual-wavelength mixed laser beams; one of them is a reference beam, and the reference beam is reflected into the dispersion prism by the optical path extender and the first mirror, and the dispersion prism separates the beam into two beams with slightly different propagation directions. The single-wavelength laser beam, the two single-wavelength laser beams are injected into a cubic beam-combining prism together, and then injected into the camera device; the other beam is the object beam, which is reflected by the second reflector into the cubic beam-combining prism, and then The achromatic lens and the achromatic microscopic objective lens irradiate the sample placed on the sample stage, and the light reflected by the sample enters the cubic beam combining prism through the achromatic microscopic objective lens and the achromatic lens, and the sample is imaged to the image transmission device of the imaging device. The sensing surface interferes with the reference beam to form a dual-wavelength compound hologram; after the hologram is captured by the camera device, it is stored in the computer for holographic reproduction.

本实用新型中,可以沿光轴方向适当移动调整消色差显微物镜、消色差透镜及样品台,从而使得消色差显微物镜和消色差透镜对样品的像面位于摄像器件的像传感面上;光程延长器可调,使参考光束和物光束到达摄像器件的像传感面的光程差小于激光器的相干长度。In the utility model, the achromatic microscopic objective lens, the achromatic lens and the sample stage can be appropriately moved and adjusted along the optical axis direction, so that the image surface of the achromatic microscopic objective lens and the achromatic lens to the sample is located on the image sensing surface of the imaging device Above; the optical path extender is adjustable, so that the optical path difference between the reference beam and the object beam reaching the image sensing surface of the imaging device is smaller than the coherence length of the laser.

作为优选,所述第一激光器和第二激光器间隔九十度设置。Preferably, the first laser and the second laser are arranged at intervals of 90 degrees.

作为优选,本实用新型还包括依次设置于第一激光器与立方分束棱镜之间的第一空间光滤波器和第一扩束准直透镜,依次设置于第二激光器与立方分束棱镜之间的第二空间光滤波器和第二扩束准直透镜。Preferably, the utility model also includes a first spatial light filter and a first beam expander collimating lens arranged sequentially between the first laser and the cubic beam splitting prism, and sequentially arranged between the second laser and the cubic beam splitting prism The second spatial light filter and the second beam expander collimating lens.

空间光滤波器和扩束准直透镜分别对激光器发出的光束进行滤波和扩束准直。The spatial light filter and the beam expander and collimator lens respectively filter and expand the beam and collimate the beam emitted by the laser.

作为优选,消色差显微物镜的后焦点和消色差透镜的前焦点重合,构成一组合光学系统。Preferably, the rear focal point of the achromatic microscope objective lens coincides with the front focal point of the achromatic lens to form a combined optical system.

作为优选,消色差透镜为正透镜。Preferably, the achromatic lens is a positive lens.

与现有技术相比,本实用新型的有益效果:Compared with the prior art, the utility model has the beneficial effects:

本实用新型用于反射式样品表面3D显微成像,两束不同波长的激光束共用一个光路和光学元件,使得装置结构相对简单,制造成本更低,使用时更加简单,便于推广使用。The utility model is used for 3D microscopic imaging of reflective sample surfaces. Two laser beams with different wavelengths share one optical path and optical elements, so that the device structure is relatively simple, the manufacturing cost is lower, and the use is simpler, which is convenient for popularization and use.

附图说明Description of drawings

图1是本实用新型的结构示意图。Fig. 1 is a structural representation of the utility model.

具体实施方式detailed description

下面结合附图和实施例对本实用新型做进一步详细说明。Below in conjunction with accompanying drawing and embodiment the utility model is described in further detail.

实施例:如图1所示,一种双波长反射式数字全息显微镜,包括第一激光器1、第二激光器2、立方分束棱镜7、光程延长器8、第一反射镜9、色散棱镜10、立方合束棱镜11和摄像器件17,还包括第二反射镜12、消色差透镜13、消色差显微物镜14和样品台16,其中,第一反射镜9、色散棱镜10和立方合束棱镜11的相对位置使得两种波长分别对应的全息干涉条纹的方向不一致,第一激光器1和第二激光器2输出两束波长不同的光束,两光束分别沿立方分束棱镜7两个不同侧面的法线方向射入立方分束棱镜7内,从立方分束棱镜7的另两个侧面的法线方向分别各出射一束双波长混合的激光束,其中一束为参考光束,参考光束经光程延长器8、第一反射镜9反射入色散棱镜10,色散棱镜10将光束分离成传播方向稍有不同的两单波长激光束,两单波长激光束再一起射入一立方合束棱镜11,再射入摄像器件17内;另一束为物光束,物光束经第二反射镜反射入立方合束棱镜11,再经消色差透镜13和消色差显微物镜14照射放置在样品台上的样品15,被样品反射的光经过消色差显微物镜14和消色差透镜13射入立方合束棱镜11内,将样品15成像到摄像器件17的像传感面上和参考光束进行干涉,形成双波长复合全息图;全息图被摄像器件17拍摄后,存入计算机18进行全息再现。Embodiment: As shown in Figure 1, a dual-wavelength reflective digital holographic microscope includes a first laser 1, a second laser 2, a cubic beam splitting prism 7, an optical path extender 8, a first reflecting mirror 9, and a dispersion prism 10. Cube beam combining prism 11 and imaging device 17 also include second reflector 12, achromatic lens 13, achromatic microscope objective lens 14 and sample stage 16, wherein, first reflector 9, dispersion prism 10 and cube combiner The relative position of the beam prism 11 makes the directions of the holographic interference fringes corresponding to the two wavelengths inconsistent. The first laser 1 and the second laser 2 output two beams of different wavelengths, and the two beams are respectively along two different sides of the cubic beam splitting prism 7. The normal direction of the beam-splitting prism is injected into the cubic beam-splitting prism 7, and a beam of dual-wavelength mixed laser beams is respectively emitted from the normal direction of the other two sides of the cubic beam-splitting prism 7, one of which is a reference beam, and the reference beam passes through The optical path extender 8 and the first reflector 9 are reflected into the dispersion prism 10, and the dispersion prism 10 separates the light beam into two single-wavelength laser beams with slightly different propagation directions, and the two single-wavelength laser beams are injected into a cubic beam combining prism together 11, and then shoot into the imaging device 17; the other beam is the object beam, which is reflected by the second mirror into the cubic beam combining prism 11, and then irradiated by the achromatic lens 13 and the achromatic microscope objective lens 14 and placed on the sample stage On the sample 15, the light reflected by the sample is injected into the cubic beam combining prism 11 through the achromatic microscope objective lens 14 and the achromatic lens 13, and the sample 15 is imaged onto the image sensing surface of the imaging device 17 to interfere with the reference beam , to form a dual-wavelength composite hologram; after the hologram is photographed by the imaging device 17, it is stored in the computer 18 for holographic reproduction.

本实施例中,可以沿光轴方向适当移动调整消色差显微物镜14、消色差透镜13及样品台16,从而使得消色差显微物镜14和消色差透镜13对样品的像面位于摄像器件17的像传感面上;光程延长器8可调,使参考光束和物光束到达摄像器件的像传感面的光程差小于激光器的相干长度。In this embodiment, the achromatic microscopic objective lens 14, the achromatic lens 13, and the sample stage 16 can be moved and adjusted appropriately along the optical axis direction, so that the image plane of the achromatic microscopic objective lens 14 and the achromatic lens 13 to the sample is positioned at the imaging device. 17 on the image sensing surface; the optical path extender 8 is adjustable, so that the optical path difference between the reference beam and the object beam reaching the image sensing surface of the imaging device is smaller than the coherence length of the laser.

所述第一激光器1和第二激光器2间隔九十度设置。The first laser 1 and the second laser 2 are arranged at an interval of ninety degrees.

本实施例还包括依次设置于第一激光器1与立方分束棱镜7之间的第一空间光滤波器3和第一扩束准直透镜5,依次设置于第二激光器2与立方分束棱镜7之间的第二空间光滤波器4和第二扩束准直透镜6。This embodiment also includes a first spatial light filter 3 and a first beam expander collimating lens 5 arranged sequentially between the first laser 1 and the cubic beam splitter 7, and sequentially arranged between the second laser 2 and the cubic beam splitter prism 7 between the second spatial light filter 4 and the second beam expander collimating lens 6 .

空间光滤波器和扩束准直透镜分别对激光器发出的光束进行滤波和扩束准直。The spatial light filter and the beam expander and collimator lens respectively filter and expand the beam and collimate the beam emitted by the laser.

本实施例中,消色差显微物镜14的后焦点和消色差透镜13的前焦点重合,构成一组合光学系统。In this embodiment, the rear focal point of the achromatic microscope objective lens 14 coincides with the front focal point of the achromatic lens 13 to form a combined optical system.

本实施例中,消色差透镜13为正透镜。In this embodiment, the achromatic lens 13 is a positive lens.

本实施例中,第一激光器1为输出功率为3mW、波长为λ=632.8nm的红光氦氖激光器;第二激光器2为输出功率为3mW、波长为λ=594nm的黄光氦氖激光器;空间滤波器3和4由针孔和20倍显微物镜组成;扩束准直透镜5和6为焦距为60mm、直径30mm的K9玻璃平凸透镜;立方分束棱镜7和立方合束棱镜11采用棱长为25.4mm、分光比为1:1的K9玻璃立方分光棱镜;光程延长器8由4个K9玻璃镀银、直径40mm的平面反射镜组成;色散棱镜10为棱长为25.4mm、K9玻璃45度等边三棱镜;反射镜9和12为K9玻璃镀银、直径40mm的平面反射镜;消色差正透镜13用一个直径25.4mm、焦距60mm的双胶合消色差正透镜;消色差显微物镜14用复消色差物镜;摄像器件17采用CCD摄像机。In this embodiment, the first laser 1 is a red helium-neon laser with an output power of 3mW and a wavelength of λ=632.8nm; the second laser 2 is a yellow helium-neon laser with an output power of 3mW and a wavelength of λ=594nm; Spatial filters 3 and 4 are composed of pinholes and 20 times microscope objective lenses; beam expander collimating lenses 5 and 6 are K9 glass plano-convex lenses with a focal length of 60 mm and a diameter of 30 mm; cubic beam splitting prism 7 and cubic beam combining prism 11 adopt K9 glass cube dichroic prism with an edge length of 25.4mm and a splitting ratio of 1:1; the optical path extender 8 is composed of four K9 glass silver-coated flat mirrors with a diameter of 40mm; the dispersion prism 10 is a prism with an edge length of 25.4mm K9 glass 45 degree equilateral triangular prism; reflector 9 and 12 are flat reflectors of K9 glass silver-plated and diameter 40mm; The micro-objective lens 14 is an apochromatic objective lens; the imaging device 17 is a CCD camera.

Claims (5)

1.一种双波长反射式数字全息显微镜,其特征在于,包括第一激光器、第二激光器、立方分束棱镜、光程延长器、第一反射镜、色散棱镜、立方合束棱镜和摄像器件,还包括第二反射镜、消色差透镜、消色差显微物镜、样品台和计算机;其中,第一反射镜、色散棱镜和立方合束棱镜的相对位置使得两种波长分别对应的全息干涉条纹的方向不一致;第一激光器和第二激光器输出两束波长不同的光束,两光束分别沿立方分束棱镜两个不同侧面的法线方向射入立方分束棱镜内,从立方分束棱镜的另两个侧面的法线方向分别各出射一束双波长混合的激光束;其中一束为参考光束,参考光束经光程延长器、第一反射镜反射入色散棱镜,色散棱镜将光束分离成传播方向稍有不同的两单波长激光束,两单波长激光束再一起射入一立方合束棱镜,再射入摄像器件内;另一束为物光束,物光束经第二反射镜反射入立方合束棱镜,再经消色差透镜和消色差显微物镜照射放置在样品台上的样品,被样品反射的光经过消色差显微物镜和消色差透镜射入立方合束棱镜内,将样品成像到摄像器件的像传感面上和参考光束进行干涉,形成双波长复合全息图;全息图被摄像器件拍摄后,存入计算机进行全息再现。1. A dual-wavelength reflective digital holographic microscope, characterized in that it comprises a first laser, a second laser, a cubic beam splitting prism, an optical path extender, the first reflector, a dispersion prism, a cubic beam combining prism and an imaging device , also includes a second mirror, an achromatic lens, an achromatic microscope objective, a sample stage and a computer; wherein, the relative positions of the first mirror, the dispersion prism and the cubic beam combining prism make the holographic interference fringes corresponding to the two wavelengths respectively The directions are inconsistent; the first laser and the second laser output two beams with different wavelengths, and the two beams are respectively injected into the cubic beam-splitting prism along the normal directions of two different sides of the cubic beam-splitting prism, and from the other side of the cubic beam-splitting prism The normal direction of the two sides emits a beam of dual-wavelength mixed laser beams respectively; one of them is a reference beam, and the reference beam is reflected into the dispersive prism by the optical path extender and the first reflector, and the dispersive prism separates the beam into propagation Two single-wavelength laser beams with slightly different directions, the two single-wavelength laser beams are injected into a cubic beam combining prism together, and then injected into the imaging device; the other beam is the object beam, and the object beam is reflected into the cube by the second reflector. The beam-combining prism irradiates the sample placed on the sample stage through the achromatic lens and the achromatic microscope objective lens, and the light reflected by the sample enters the cubic beam-combining prism through the achromatic microscope objective lens and the achromatic lens to image the sample The image sensing surface of the imaging device interferes with the reference beam to form a dual-wavelength composite hologram; after the hologram is captured by the imaging device, it is stored in the computer for holographic reproduction. 2.根据权利要求1所述的一种双波长反射式数字全息显微镜,其特征在于,所述第一激光器和第二激光器间隔九十度设置。2 . The dual-wavelength reflective digital holographic microscope according to claim 1 , wherein the first laser and the second laser are arranged at an interval of 90 degrees. 3.根据权利要求1所述的一种双波长反射式数字全息显微镜,其特征在于,还包括依次设置于第一激光器与立方分束棱镜之间的第一空间光滤波器和第一扩束准直透镜,依次设置于第二激光器与立方分束棱镜之间的第二空间光滤波器和第二扩束准直透镜。3. A dual-wavelength reflective digital holographic microscope according to claim 1, further comprising a first spatial light filter and a first beam expander sequentially arranged between the first laser and the cubic beam splitting prism The collimator lens is a second spatial light filter and a second beam expander collimator lens arranged sequentially between the second laser and the cubic beam splitting prism. 4.根据权利要求1所述的一种双波长反射式数字全息显微镜,其特征在于,消色差显微物镜的后焦点和消色差透镜的前焦点重合,构成一组合光学系统。4. A dual-wavelength reflective digital holographic microscope according to claim 1, characterized in that the rear focal point of the achromatic microscope objective coincides with the front focal point of the achromatic lens to form a combined optical system. 5.根据权利要求1所述的一种双波长反射式数字全息显微镜,其特征在于,消色差透镜为正透镜。5. A dual-wavelength reflective digital holographic microscope according to claim 1, wherein the achromatic lens is a positive lens.
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CN109116708A (en) * 2018-10-19 2019-01-01 许之敏 A kind of dual wavelength reflective digital holographic microscope
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