CN205175641U - Detection apparatus for air hydrostatic guideway air supporting vibration experiment platform - Google Patents
Detection apparatus for air hydrostatic guideway air supporting vibration experiment platform Download PDFInfo
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Abstract
本实用新型涉及一种空气静压导轨气浮振动实验平台的检测装置，属于精密设备性能的检测领域。本实用新型压膜传感器固定在支撑平台中心位置，压力调节阀和压力表安装于气浮块进气管上，气浮块进气管安装于气浮块一侧，配重块放置于气浮块上，过渡板通过压片安装于配重块上，振动传感器Ⅰ与振动传感器Ⅱ通过螺纹连接安装于过渡板的竖直与水平方向，位移传感器固定于支撑平台和气浮块上，气膜间隙调整垫片放置于支撑平台已经刻画好的位置，180°反射镜通过压片放置于配重块上，90°反射镜安装于支架上且位于180°反射镜正上方，激光干涉仪安装在90°反射镜一侧。本实用新型便于实现不同的气膜厚度的调节，气膜厚度对微振动的影响实验结果更加真实可靠。
The utility model relates to a detection device for an air suspension vibration experiment platform of an air static pressure guide rail, belonging to the detection field of precision equipment performance. The pressure film sensor of the utility model is fixed at the center of the support platform, the pressure regulating valve and the pressure gauge are installed on the air intake pipe of the air float block, the air intake pipe of the air float block is installed on one side of the air float block, and the counterweight is placed on the air float block , the transition plate is installed on the counterweight through the pressing piece, the vibration sensor Ⅰ and the vibration sensor Ⅱ are installed in the vertical and horizontal directions of the transition plate through threaded connection, the displacement sensor is fixed on the support platform and the air floating block, and the air film gap adjustment pad The sheet is placed on the position that has been marked on the support platform, the 180° reflector is placed on the counterweight by pressing the sheet, the 90° reflector is installed on the bracket and directly above the 180° reflector, and the laser interferometer is installed on the 90° reflection Mirror side. The utility model facilitates the adjustment of different air film thicknesses, and the experimental results of the influence of the air film thickness on micro-vibration are more real and reliable.
Description
技术领域 technical field
本实用新型涉及一种空气静压导轨气浮振动实验平台的检测装置，属于精密设备性能的检测领域。 The utility model relates to a detection device for an air suspension vibration experiment platform of an air static pressure guide rail, belonging to the detection field of precision equipment performance.
背景技术 Background technique
气体静压气浮导轨具有摩擦功耗低、运动精度高、低速时不出现爬行和蠕动、运动平稳、寿命长、无污染等一系列优点，广泛应用于三坐标测量机、超精密机床、电子加工、医疗器械领域。近年来，出现在应用于光刻机超精密气浮台平面上的静压气浮轴承,要求具有纳米级的运动定位精度。在实际使用过程中，从高气压气体的入口至出口的极短时间内，气体流态发生多次改变，从而引发气浮块振动。因流态引发的气浮块的振动分为以下两种形式，其一为微振动，它主要是由于气膜内部与支撑台面之间各点作用力分布不均匀产生的气膜间隙在平衡位置附近发生一定微幅值的有规律的上下或偏摆振动，振动幅值为几纳米到几十纳米之间，频率从几十赫兹到几千赫兹，对流场反作用不大，是一种稳态振动。但是随着超精密运动平台对运动精度要求的不断提高，微振动已经成为制约气浮支撑技术发展的重大问题。其二，当系统内部或者外部受到某种干扰，其频率与轴承系统的固有频率时，轴承会出现高频率的振动啸叫，学术界称为气锤振动现象，气锤振动幅值大，破坏气膜内气体流态，严重影响静压导轨的使用精度。气浮导轨这种特有的振动现象是制约其提高定位精度、进给精度、加工精度、和测量精度的重大问题，测量标定振动的幅值、频率、加速度对于提高静压导轨的使用精度和从根本上研究解决气浮振动的方法具有重大意义，本专利提出一种空气静压导轨气浮振动实验平台搭建与检测装置，可以检测不同类型节流器的气浮块，在不同进气压力和不同气膜厚度下的振动特性。 Gas static pressure air bearing guideway has a series of advantages such as low friction power consumption, high motion precision, no crawling and peristalsis at low speed, stable motion, long life, and no pollution. It is widely used in three-coordinate measuring machines, ultra-precision machine tools, electronic Processing, medical equipment field. In recent years, the hydrostatic air bearings that appear on the plane of ultra-precision air bearings for lithography machines require nanometer-level motion positioning accuracy. In the actual use process, the gas flow state changes many times in a very short time from the inlet to the outlet of the high-pressure gas, which causes the air floating block to vibrate. The vibration of the air floating block caused by the flow state is divided into the following two forms, one is micro vibration, which is mainly due to the uneven distribution of force between the inside of the air film and the support table, and the air film gap is at the equilibrium position. Regular up-and-down or yaw vibrations of a certain micro-amplitude occur nearby. The vibration amplitude is between a few nanometers and tens of nanometers, and the frequency is from tens of Hz to several thousand Hz. It has little reaction to the flow field and is a kind of stable state vibration. However, with the continuous improvement of the motion accuracy requirements of ultra-precision motion platforms, micro-vibration has become a major problem restricting the development of air bearing technology. Second, when the system is disturbed internally or externally, and its frequency is the same as the natural frequency of the bearing system, the bearing will experience high-frequency vibration and howling, which is called air hammer vibration phenomenon in academia. The air hammer vibration amplitude is large and damages The gas flow state in the gas film seriously affects the use accuracy of the static pressure guide rail. The unique vibration phenomenon of air bearing guide rail is a major problem that restricts its improvement of positioning accuracy, feeding accuracy, machining accuracy, and measurement accuracy. Fundamentally, it is of great significance to study the method to solve the air flotation vibration. This patent proposes an aerostatic guide rail air flotation vibration experimental platform construction and detection device, which can detect the air flotation blocks of different types of restrictors. Vibration characteristics at different air film thicknesses.
公开号为CN102261984A的中国发明专利介绍了一种静压汽浮轴承振动特性的检测装置，加载利用安装在支架上的压力气腔和丝杠，该方法导致由于高压进气气体引发的静压轴承的振动传递到系统振动，测量振动误差较大。 The Chinese invention patent with the publication number CN102261984A introduces a detection device for the vibration characteristics of a static pressure air bearing. The loading uses the pressure air chamber and the lead screw installed on the bracket. The vibration is transmitted to the system vibration, and the measurement vibration error is relatively large.
相比之下，本专利采用配重块加载，在加载稳定后进行振动测试，可以有效减小由于负载变化时产生的干扰信号对测试结果的影响，减小测量误差，提高测量精度，保证测量结果准确性。 In contrast, this patent uses a counterweight to load, and the vibration test is carried out after the loading is stable, which can effectively reduce the influence of the interference signal generated when the load changes on the test results, reduce the measurement error, improve the measurement accuracy, and ensure the measurement Result accuracy.
发明内容 Contents of the invention
针对现有技术测量振动误差较大等不足，本实用新型提供了一种空气静压导轨气浮振动实验平台的检测装置。 Aiming at the shortcomings of the prior art, such as relatively large measurement vibration errors, the utility model provides a detection device for an aerostatic guide rail air flotation vibration experiment platform.
本实用新型的技术方案是：一种空气静压导轨气浮振动实验平台的检测装置，包括隔振平台1、支撑平台2、气浮块3、气浮块进气管4、压力调节阀5、压力表6、配重块7、位移传感器8、压膜传感器9、振动传感器Ⅰ10、振动传感器Ⅱ11、气膜间隙调整垫片12、压片13、过渡板14、支架15、激光干涉仪16、180°反射镜17、90°反射镜18、基座19； The technical solution of the utility model is: a detection device for an air static pressure guide rail air flotation vibration experiment platform, including a vibration isolation platform 1, a support platform 2, an air flotation block 3, an air flotation block intake pipe 4, a pressure regulating valve 5, Pressure gauge 6, counterweight 7, displacement sensor 8, pressure film sensor 9, vibration sensor I10, vibration sensor II11, gas film gap adjustment gasket 12, pressure piece 13, transition plate 14, bracket 15, laser interferometer 16, 180° reflector 17, 90° reflector 18, base 19;
所述隔振平台1安放于基座19上，支撑平台2放置于水平的隔振平台1上，压膜传感器9固定在支撑平台2中心位置，压力调节阀5和压力表6安装于气浮块进气管4上，气浮块进气管4安装于气浮块3一侧，配重块7放置于气浮块3上，过渡板14通过压片13安装于配重块7上，振动传感器Ⅰ10与振动传感器Ⅱ11分别通过螺纹连接安装于过渡板14的竖直与水平方向，位移传感器8固定于支撑平台2和气浮块3上，气膜间隙调整垫片12放置于支撑平台2已经刻画好的位置，180°反射镜17通过压片13放置于配重块7上，90°反射镜18安装于支架15上且位于180°反射镜17正上方，激光干涉仪16安装在90°反射镜18一侧且激光干涉仪16接收器的位置与90°反射镜18同高，可以保证振动特征测量的准确性。 The vibration isolation platform 1 is placed on the base 19, the support platform 2 is placed on the horizontal vibration isolation platform 1, the pressure film sensor 9 is fixed at the center of the support platform 2, the pressure regulating valve 5 and the pressure gauge 6 are installed on the air float On the air block intake pipe 4, the air block air intake pipe 4 is installed on one side of the air block 3, the counterweight 7 is placed on the air block 3, the transition plate 14 is installed on the counterweight 7 through the pressing piece 13, and the vibration sensor Ⅰ10 and vibration sensor Ⅱ11 are respectively installed in the vertical and horizontal directions of the transition plate 14 through screw connection, the displacement sensor 8 is fixed on the supporting platform 2 and the air floating block 3, and the air film gap adjusting gasket 12 is placed on the supporting platform 2 and has been described. The position of the 180° reflector 17 is placed on the counterweight 7 through the pressing plate 13, the 90° reflector 18 is installed on the bracket 15 and is located directly above the 180° reflector 17, and the laser interferometer 16 is installed on the 90° reflector 18 side and the position of the laser interferometer 16 receiver is at the same height as the 90° reflector 18, which can ensure the accuracy of vibration characteristic measurement.
所述支撑平台2为大理石支撑平台。 The support platform 2 is a marble support platform.
所述配重块7与气浮块3的直径相同，从而实现垂直方向上测试装置的质心与其几何圆心重合，保证该装置的测试精度。 The diameter of the counterweight 7 is the same as that of the air floating block 3, so that the center of mass of the test device in the vertical direction coincides with its geometric center, ensuring the test accuracy of the device.
所述气膜间隙调整垫片12为微米金属化薄膜（1微米-19微米）。 The air film gap adjusting gasket 12 is a micron metallized film (1 micron-19 micron).
本实用新型的工作原理是： The working principle of the utility model is:
在检测气膜间隙不同对于微振动的影响时，利用压力调节阀5控制节流器进气孔压力，保证每次实验时具有相同的进气压力，添加不同质量的配重块7。在检测不同进气压力对微振动的影响时，增加不同的气膜间隙调整垫片12控制气膜间隙，利用压力调节阀5控制节流器进气孔压力，保证每次实验时具有不同的进气压力，此时每次试验应配有相同质量的配重块7。在检测气膜间隙不同对于气锤振动的影响时，利用压力调节阀5控制节流器进气孔压力，直至静压导轨发出低鸣的嗡嗡声，保证每次实验时具有相同的进气压力，添加不同质量的配重块7。在检测不同进气压力对气锤振动的影响时，增加不同的气膜间隙调整垫片12控制气膜间隙，利用压力调节阀5控制节流器进气孔压力，直至静压导轨发出低鸣的嗡嗡声，此后试验控制压力调节阀，使压力不断增加，此时每次试验应配有相同质量的配重块7。利用位移传感器8测量大理石支撑平台2的上表面与气浮块3的下表面垂直距离即气膜间隙厚度，利用压膜传感器测量气膜内压力分布状况，振动传感器Ⅰ10与振动传感器Ⅱ11分别测量气浮块水平与竖直方向的加速度信号，利用激光干涉仪16测量振动的幅值特性。 When detecting the influence of different air film gaps on micro-vibration, the pressure regulating valve 5 is used to control the air inlet pressure of the restrictor to ensure the same air inlet pressure in each experiment, and a counterweight 7 of different mass is added. When detecting the influence of different intake pressures on micro-vibration, different air film gap adjustment gaskets 12 are added to control the air film gap, and the pressure regulating valve 5 is used to control the pressure of the air inlet hole of the restrictor to ensure that each experiment has a different At this time, each test should be equipped with a counterweight 7 of the same mass. When detecting the influence of different air film gaps on the vibration of the air hammer, use the pressure regulating valve 5 to control the pressure of the air inlet hole of the restrictor until the static pressure guide rail emits a low buzzing sound, so as to ensure the same air intake in each experiment Pressure, add the counterweight 7 of different quality. When detecting the influence of different intake pressures on the vibration of the air hammer, add different air film gap adjustment gaskets 12 to control the air film gap, and use the pressure regulating valve 5 to control the pressure of the air inlet hole of the restrictor until the static pressure guide rail emits a low sound After that, the test controls the pressure regulating valve to increase the pressure continuously. At this time, each test should be equipped with a counterweight 7 of the same quality. Use the displacement sensor 8 to measure the vertical distance between the upper surface of the marble support platform 2 and the lower surface of the air floating block 3, that is, the thickness of the air film gap. For the acceleration signals in the horizontal and vertical directions of the floating block, a laser interferometer 16 is used to measure the amplitude characteristic of the vibration.
本实用新型的有益效果是：压力调节方便，便于通过数据观察进气压力对振动特性的影响；便于实现不同的气膜厚度的调节，气膜厚度对微振动的影响实验结果更加真实可靠；装置工艺简洁，操作便捷；试验台整体搭建方便、经济可行。 The beneficial effects of the utility model are: the pressure adjustment is convenient, it is convenient to observe the influence of the intake pressure on the vibration characteristics through the data; The process is simple and the operation is convenient; the overall construction of the test bench is convenient and economical.
附图说明 Description of drawings
图1为本实用新型的结构示意图； Fig. 1 is the structural representation of the utility model;
图2为本实用新型中气浮块与气膜间隙微调垫片安装示意图的俯视图； Fig. 2 is the top view of the installation diagram of the air floating block and the air film gap fine-tuning gasket in the utility model;
图中各标号：1-隔振平台；2-支撑平台；3-气浮块；4-气浮块进气管；5-压力调节阀；6-压力表；7-配重块；8-位移传感器；9-压膜传感器；10-振动传感器Ⅰ；11-振动传感器Ⅱ；12-气膜间隙调整垫片；13-压片；14-过渡板；15-支架；16-激光干涉仪；17-180o反射镜；18-90o反射镜；19-基座。 Each label in the figure: 1-vibration isolation platform; 2-supporting platform; 3-air floating block; 4-intake pipe of air floating block; Sensor; 9-pressure film sensor; 10-vibration sensor Ⅰ; 11-vibration sensor Ⅱ; 12-gas film gap adjustment gasket; 13-pressure sheet; 14-transition plate; 15-bracket; 16-laser interferometer; 17 -180 o reflector; 18-90 o reflector; 19-base.
具体实施方式 detailed description
实施例1：如图1-2所示，一种空气静压导轨气浮振动实验平台的检测装置，包括隔振平台1、支撑平台2、气浮块3、气浮块进气管4、压力调节阀5、压力表6、配重块7、位移传感器8、压膜传感器9、振动传感器Ⅰ10、振动传感器Ⅱ11、气膜间隙调整垫片12、压片13、过渡板14、支架15、激光干涉仪16、180°反射镜17、90°反射镜18、基座19； Embodiment 1: As shown in Figure 1-2, a detection device for an air-static rail air-flotation vibration experiment platform, including a vibration-isolation platform 1, a support platform 2, an air-floating block 3, an air-floating block intake pipe 4, a pressure Regulating valve 5, pressure gauge 6, counterweight 7, displacement sensor 8, pressure film sensor 9, vibration sensor Ⅰ10, vibration sensor Ⅱ11, air film gap adjustment gasket 12, pressure piece 13, transition plate 14, bracket 15, laser Interferometer 16, 180° reflector 17, 90° reflector 18, base 19;
所述隔振平台1安放于基座19上，支撑平台2放置于水平的隔振平台1上，压膜传感器9固定在支撑平台2中心位置，压力调节阀5和压力表6安装于气浮块进气管4上，气浮块进气管4安装于气浮块3一侧，配重块7放置于气浮块3上，过渡板14通过压片13安装于配重块7上，振动传感器Ⅰ10与振动传感器Ⅱ11分别通过螺纹连接安装于过渡板14的竖直与水平方向，位移传感器8固定于支撑平台2和气浮块3上，气膜间隙调整垫片12放置于支撑平台2已经刻画好的位置，180°反射镜17通过压片13放置于配重块7上，90°反射镜18安装于支架15上且位于180°反射镜17正上方，激光干涉仪16安装在90°反射镜18一侧且激光干涉仪16接收器的位置与90°反射镜18同高。 The vibration isolation platform 1 is placed on the base 19, the support platform 2 is placed on the horizontal vibration isolation platform 1, the pressure film sensor 9 is fixed at the center of the support platform 2, the pressure regulating valve 5 and the pressure gauge 6 are installed on the air float On the air block intake pipe 4, the air block air intake pipe 4 is installed on one side of the air block 3, the counterweight 7 is placed on the air block 3, the transition plate 14 is installed on the counterweight 7 through the pressing piece 13, and the vibration sensor Ⅰ10 and vibration sensor Ⅱ11 are respectively installed in the vertical and horizontal directions of the transition plate 14 through screw connection, the displacement sensor 8 is fixed on the supporting platform 2 and the air floating block 3, and the air film gap adjusting gasket 12 is placed on the supporting platform 2 and has been described. The position of the 180° reflector 17 is placed on the counterweight 7 through the pressing plate 13, the 90° reflector 18 is installed on the bracket 15 and is located directly above the 180° reflector 17, and the laser interferometer 16 is installed on the 90° reflector 18 side and the position of the laser interferometer 16 receiver is the same height as the 90° reflector 18.
所述支撑平台2为大理石支撑平台。 The support platform 2 is a marble support platform.
所述配重块7与气浮块3的直径相同。 The diameter of the counterweight 7 is the same as that of the air floating block 3 .
所述气膜间隙调整垫片12为微米金属化薄膜。 The air film gap adjusting gasket 12 is a micron metallized film.
实施例2：如图1-2所示，一种空气静压导轨气浮振动实验平台的检测装置，包括隔振平台1、支撑平台2、气浮块3、气浮块进气管4、压力调节阀5、压力表6、配重块7、位移传感器8、压膜传感器9、振动传感器Ⅰ10、振动传感器Ⅱ11、气膜间隙调整垫片12、压片13、过渡板14、支架15、激光干涉仪16、180°反射镜17、90°反射镜18、基座19； Embodiment 2: As shown in Figure 1-2, a detection device for an air flotation vibration experiment platform with an aerostatic guide rail, including a vibration isolation platform 1, a support platform 2, an air flotation block 3, an air flotation block intake pipe 4, a pressure Regulating valve 5, pressure gauge 6, counterweight 7, displacement sensor 8, pressure film sensor 9, vibration sensor Ⅰ10, vibration sensor Ⅱ11, air film gap adjustment gasket 12, pressure piece 13, transition plate 14, bracket 15, laser Interferometer 16, 180° reflector 17, 90° reflector 18, base 19;
所述隔振平台1安放于基座19上，支撑平台2放置于水平的隔振平台1上，压膜传感器9固定在支撑平台2中心位置，压力调节阀5和压力表6安装于气浮块进气管4上，气浮块进气管4安装于气浮块3一侧，配重块7放置于气浮块3上，过渡板14通过压片13安装于配重块7上，振动传感器Ⅰ10与振动传感器Ⅱ11分别通过螺纹连接安装于过渡板14的竖直与水平方向，位移传感器8固定于支撑平台2和气浮块3上，气膜间隙调整垫片12放置于支撑平台2已经刻画好的位置，180°反射镜17通过压片13放置于配重块7上，90°反射镜18安装于支架15上且位于180°反射镜17正上方，激光干涉仪16安装在90°反射镜18一侧且激光干涉仪16接收器的位置与90°反射镜18同高。 The vibration isolation platform 1 is placed on the base 19, the support platform 2 is placed on the horizontal vibration isolation platform 1, the pressure film sensor 9 is fixed at the center of the support platform 2, the pressure regulating valve 5 and the pressure gauge 6 are installed on the air float On the air block intake pipe 4, the air block air intake pipe 4 is installed on one side of the air block 3, the counterweight 7 is placed on the air block 3, the transition plate 14 is installed on the counterweight 7 through the pressing piece 13, and the vibration sensor Ⅰ10 and vibration sensor Ⅱ11 are respectively installed in the vertical and horizontal directions of the transition plate 14 through screw connection, the displacement sensor 8 is fixed on the supporting platform 2 and the air floating block 3, and the air film gap adjusting gasket 12 is placed on the supporting platform 2 and has been described. The position of the 180° reflector 17 is placed on the counterweight 7 through the pressing plate 13, the 90° reflector 18 is installed on the bracket 15 and is located directly above the 180° reflector 17, and the laser interferometer 16 is installed on the 90° reflector 18 side and the position of the receiver of the laser interferometer 16 is at the same height as the 90° reflector 18.
所述配重块7与气浮块3的直径相同。 The diameter of the counterweight 7 is the same as that of the air floating block 3 .
所述气膜间隙调整垫片12为微米金属化薄膜。 The air film gap adjusting gasket 12 is a micron metallized film.
实施例3：如图1-2所示，一种空气静压导轨气浮振动实验平台的检测装置，包括隔振平台1、支撑平台2、气浮块3、气浮块进气管4、压力调节阀5、压力表6、配重块7、位移传感器8、压膜传感器9、振动传感器Ⅰ10、振动传感器Ⅱ11、气膜间隙调整垫片12、压片13、过渡板14、支架15、激光干涉仪16、180°反射镜17、90°反射镜18、基座19； Embodiment 3: As shown in Figure 1-2, a detection device for an air flotation vibration experiment platform with an aerostatic guide rail, including a vibration isolation platform 1, a support platform 2, an air flotation block 3, an air flotation block intake pipe 4, a pressure Regulating valve 5, pressure gauge 6, counterweight 7, displacement sensor 8, pressure film sensor 9, vibration sensor Ⅰ10, vibration sensor Ⅱ11, air film gap adjustment gasket 12, pressure piece 13, transition plate 14, bracket 15, laser Interferometer 16, 180° reflector 17, 90° reflector 18, base 19;
所述隔振平台1安放于基座19上，支撑平台2放置于水平的隔振平台1上，压膜传感器9固定在支撑平台2中心位置，压力调节阀5和压力表6安装于气浮块进气管4上，气浮块进气管4安装于气浮块3一侧，配重块7放置于气浮块3上，过渡板14通过压片13安装于配重块7上，振动传感器Ⅰ10与振动传感器Ⅱ11分别通过螺纹连接安装于过渡板14的竖直与水平方向，位移传感器8固定于支撑平台2和气浮块3上，气膜间隙调整垫片12放置于支撑平台2已经刻画好的位置，180°反射镜17通过压片13放置于配重块7上，90°反射镜18安装于支架15上且位于180°反射镜17正上方，激光干涉仪16安装在90°反射镜18一侧且激光干涉仪16接收器的位置与90°反射镜18同高。 The vibration isolation platform 1 is placed on the base 19, the support platform 2 is placed on the horizontal vibration isolation platform 1, the pressure film sensor 9 is fixed at the center of the support platform 2, the pressure regulating valve 5 and the pressure gauge 6 are installed on the air float On the air block intake pipe 4, the air block air intake pipe 4 is installed on one side of the air block 3, the counterweight 7 is placed on the air block 3, the transition plate 14 is installed on the counterweight 7 through the pressing piece 13, and the vibration sensor Ⅰ10 and vibration sensor Ⅱ11 are respectively installed in the vertical and horizontal directions of the transition plate 14 through screw connection, the displacement sensor 8 is fixed on the supporting platform 2 and the air floating block 3, and the air film gap adjusting gasket 12 is placed on the supporting platform 2 and has been described. The position of the 180° reflector 17 is placed on the counterweight 7 through the pressing plate 13, the 90° reflector 18 is installed on the bracket 15 and is located directly above the 180° reflector 17, and the laser interferometer 16 is installed on the 90° reflector 18 side and the position of the laser interferometer 16 receiver is the same height as the 90° reflector 18.
所述支撑平台2为大理石支撑平台。 The support platform 2 is a marble support platform.
实施例4：如图1-2所示，一种空气静压导轨气浮振动实验平台的检测装置，包括隔振平台1、支撑平台2、气浮块3、气浮块进气管4、压力调节阀5、压力表6、配重块7、位移传感器8、压膜传感器9、振动传感器Ⅰ10、振动传感器Ⅱ11、气膜间隙调整垫片12、压片13、过渡板14、支架15、激光干涉仪16、180°反射镜17、90°反射镜18、基座19； Embodiment 4: As shown in Figure 1-2, a detection device for an air flotation vibration experiment platform with an aerostatic guide rail, including a vibration isolation platform 1, a support platform 2, an air flotation block 3, an air flotation block intake pipe 4, a pressure Regulating valve 5, pressure gauge 6, counterweight 7, displacement sensor 8, pressure film sensor 9, vibration sensor Ⅰ10, vibration sensor Ⅱ11, air film gap adjustment gasket 12, pressure piece 13, transition plate 14, bracket 15, laser Interferometer 16, 180° reflector 17, 90° reflector 18, base 19;
所述隔振平台1安放于基座19上，支撑平台2放置于水平的隔振平台1上，压膜传感器9固定在支撑平台2中心位置，压力调节阀5和压力表6安装于气浮块进气管4上，气浮块进气管4安装于气浮块3一侧，配重块7放置于气浮块3上，过渡板14通过压片13安装于配重块7上，振动传感器Ⅰ10与振动传感器Ⅱ11分别通过螺纹连接安装于过渡板14的竖直与水平方向，位移传感器8固定于支撑平台2和气浮块3上，气膜间隙调整垫片12放置于支撑平台2已经刻画好的位置，180°反射镜17通过压片13放置于配重块7上，90°反射镜18安装于支架15上且位于180°反射镜17正上方，激光干涉仪16安装在90°反射镜18一侧且激光干涉仪16接收器的位置与90°反射镜18同高。 The vibration isolation platform 1 is placed on the base 19, the support platform 2 is placed on the horizontal vibration isolation platform 1, the pressure film sensor 9 is fixed at the center of the support platform 2, the pressure regulating valve 5 and the pressure gauge 6 are installed on the air float On the air block intake pipe 4, the air block air intake pipe 4 is installed on one side of the air block 3, the counterweight 7 is placed on the air block 3, the transition plate 14 is installed on the counterweight 7 through the pressing piece 13, and the vibration sensor Ⅰ10 and vibration sensor Ⅱ11 are respectively installed in the vertical and horizontal directions of the transition plate 14 through screw connection, the displacement sensor 8 is fixed on the supporting platform 2 and the air floating block 3, and the air film gap adjusting gasket 12 is placed on the supporting platform 2 and has been described. The position of the 180° reflector 17 is placed on the counterweight 7 through the pressing plate 13, the 90° reflector 18 is installed on the bracket 15 and is located directly above the 180° reflector 17, and the laser interferometer 16 is installed on the 90° reflector 18 side and the position of the laser interferometer 16 receiver is the same height as the 90° reflector 18.
上面结合附图对本实用新型的具体实施方式作了详细说明，但是本实用新型并不限于上述实施方式，在本领域普通技术人员所具备的知识范围内，还可以在不脱离本实用新型宗旨的前提下作出各种变化。 The specific implementation of the utility model has been described in detail above in conjunction with the accompanying drawings, but the utility model is not limited to the above-mentioned implementation. Various changes are made.
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