Utility model content
The technical problems to be solved in the utility model is to provide a kind of unidirectional or two-way TVS package assembling that capacitive diode assembly can be adopted to improve transient response speed.
According to the utility model, a kind of Transient Voltage Suppressor package assembling is provided, it is characterized in that, comprising: packaging frame, comprise multiple pin; First capacitive diode assembly, is arranged on the first pin in described multiple pin; And first Zener diode, be arranged on the second pin in described multiple pin, wherein, described first capacitive diode assembly is electrically connected via the first bonding line with between described first Zener diode.
Preferably, described first capacitive diode assembly comprises the diode of two reverse parallel connections.
Preferably, described first capacitive diode assembly is singulated dies, comprising the conductive path of the doped region for short circuit opposite types.
Preferably, described conductive path comprises metal level or conductive channel.
Preferably, described first Zener diode is unidirectional or bi-directional zener diode.
Preferably, any one end of described first capacitive diode assembly is electrically connected with any one end of described first Zener diode.
Preferably, described package assembling also comprises: the second capacitive diode assembly, is arranged on described second pin; And the second Zener diode assembly, be arranged on described first pin, wherein, described second capacitive diode assembly is electrically connected via the second bonding line with between described second Zener diode.
Preferably, described package assembling also comprises: the second capacitive diode assembly, is arranged on described first pin; And the second Zener diode assembly, be arranged on the 3rd pin in described multiple pin, wherein, described second capacitive diode assembly is electrically connected via the second bonding line with between described second Zener diode.
Preferably, described package assembling also comprises: the second capacitive diode assembly, is arranged on the 3rd pin in described multiple pin; And the second Zener diode assembly, be arranged on described first pin, wherein, described second capacitive diode assembly is electrically connected via the second bonding line with between described second Zener diode.
Preferably, described first capacitive diode assembly is identical with the structure of described second capacitive diode assembly, and described first Zener diode is identical with the structure of described second Zener diode.
Adopt capacitive diode assembly as non-polar electric capacity according to the Transient Voltage Suppressor package assembling of embodiment of the present utility model.This capacitive diode assembly comprises the first diode and second diode of reverse parallel connection, has almost identical forward characteristic in the two directions.In preferred package assembling, any lead-in wire of capacitive diode assembly can be connected with any lead-in wire of Zener diode, and the connection error that can reduce due to semiconductor device causes the possibility of wafer damage.
Described ultra-low capacitance capacitive diode assembly can realize on very little chip area, drastically increases the applicability of semiconductor device integration packaging, makes device architecture be applicable to multiple different packing forms.Because Semiconductor substrate is directly drawn as another electrode, can reduce by 1 bonding gold wire when encapsulating, cost of manufacture can be reduced significantly, being conducive to industrialization.
In described package assembling, described ultra-low capacitance capacitive diode assembly is connected with Zener diode, on the voltage of Zener diode, only increases the conduction voltage drop of 0.7V, change the electrology characteristic of Zener diode hardly.Such as, by described ultra-low capacitance capacitive diode assembly and a forward voltage 0.8V, reverse breakdown voltage 20V, electric capacity is that the Zener diode Series Package of 20pF is in a shell, a forward voltage 1.5V will be obtained, reverse breakdown voltage 20.7V, and electric capacity only has the ultra-low capacitance TVS package assembling less than 1pF.Because capacitive diode assembly has ultralow capacitance, therefore, the response speed of TVS package assembling can be improved, widen the range of application of all kinds of device greatly, thus can be applied in the data transmission network of high frequency.
Embodiment
In more detail the utility model is described hereinafter with reference to accompanying drawing.In various figures, identical element adopts similar Reference numeral to represent.For the sake of clarity, the various piece in accompanying drawing is not drawn in proportion.In addition, may some known part not shown.
Be to be understood that, when describing certain structure, when one deck, region are called be positioned at another layer, another region " above " or " top " time, can refer to be located immediately at another layer, another over, or itself and another layer, also comprise other layer or region between another region.Further, if this structure overturn, this one deck, a region will be positioned at another layer, another region " below " or " below ".If the form of presentation of " A is directly on B " or " A also adjoins with it on B " in order to describe the situation being located immediately at another layer, another over, will be adopted herein.
In addition, mention the first conduction type and the second conduction type when describing the conduction type of semi-conducting material, wherein the first conduction type is one of P type and N-type, and the second conduction type is another in P type and N-type.
The utility model can present in a variety of manners, below will describe some of them example.
Fig. 2 illustrates the circuit diagram of the Transient Voltage Suppressor (i.e. TVS device) according to the utility model embodiment.This TVS device is unidirectional TVS device, comprises the capacitive diode assembly and Zener diode ZD that are one another in series and connect.The first end of capacitive diode assembly is as the signal end I/O of TVS device, and the second end is connected with the negative electrode of Zener diode ZD.The anode of Zener diode ZD is as the earth terminal GND of TVS device.Capacitive diode assembly comprises the first diode D1 and the second diode D2 that are connected in antiparallel each other.
Different from the prior art shown in Fig. 1, the first diode D1 and the second diode D2 is connected in antiparallel, and forms capacitive diode assembly C1.In capacitive diode assembly C1, the anode of the first diode D1 and the negative electrode of the second diode D2 are connected to the first end of capacitive diode assembly C1 jointly, and the negative electrode of the first diode D1 and the anode of the second diode D2 are connected to second end of capacitive diode assembly C1 jointly.Capacitive diode assembly C1 utilizes the low pressure drop of diode forward and the characteristic of low on-resistance, thus realizes the electrical characteristics of ultra-low capacitance biphase rectification.
In the TVS device shown in Fig. 2, capacitive diode assembly C1 and Zener diode ZD is connected in series.Because capacitive diode assembly C1 has almost identical forward characteristic in the two directions, therefore, this capacitive diode assembly C1 can as non-polar electric capacity.In TVS device, any one with the second end of the first end of capacitive diode assembly C1 can be connected with the negative electrode of Zener diode ZD.As mentioned below, the non-polar properties of capacitive diode assembly C1 is favourable, not only compatible with single to two-way TVS device, and can simplified manufacturing technique.
In unidirectional TVS device, capacitive diode assembly C1 only increases the conduction voltage drop of 0.7V, changes the electrology characteristic of former TVS device hardly.Such as, when the Zener diode being 20pF by capacitive diode assembly C1 and a forward voltage 0.8V, reverse breakdown voltage 20V, electric capacity is connected, to obtain a forward voltage 1.5V, reverse breakdown voltage 20.7V, and electric capacity only there is the ultra-low capacitance TVS device less than 1pF.
When surge occurs, if bear positive voltage between signal end I/O and earth terminal GND, then the first diode D1 conducting, Zener diode ZD bears reverse voltage.If the numerical value of positive voltage is higher than the puncture voltage of Zener diode ZD, then produce the electric current of the reverse flow along the forward of the first diode and Zener diode, thus play the effect that unidirectional ESD protects.
In the circuit diagram shown in Fig. 2, capacitive diode assembly C1 and Zener diode ZD is connected in series.In the product of reality, capacitive diode assembly C1 and Zener diode ZD can be integrated on same semiconductor chip, or be respectively formed to form independent device on different semiconductor chips, as long as according to both connections shown in Fig. 2.
If capacitive diode assembly C1 and Zener diode ZD is formed on different semiconductor chips; manufacturing process both then can optimizing respectively more neatly; make capacitive diode assembly C1 provide low capacitance to improve the transient response speed of TVS device, Zener diode provides high-breakdown-voltage to obtain required protection voltage level.After forming capacitive diode assembly C1 and Zener diode ZD respectively, both bonding line connections can be adopted, and be encapsulated in a shell.
In the embodiment shown in Figure 2, second end of capacitive diode assembly C1 is connected with the negative electrode of Zener diode.In alternate embodiments, because capacitive diode assembly C1 is nonpolarity, second end of capacitive diode assembly C1 can be connected with the anode of Zener diode.In the embodiment that this substitutes, the negative electrode of Zener diode as the first end of the signal end I/O of Transient Voltage Suppressor, capacitive diode assembly C1 as the earth terminal GND of Transient Voltage Suppressor.
Fig. 3 illustrates the structural representation of a kind of capacitive diode assembly used in Transient Voltage Suppressor.This capacitive diode assembly comprises the diode of two reverse parallel connections formed on a semiconductor substrate.
As shown in Figure 3, P++ type Semiconductor substrate 101 forms N-type epitaxial loayer 103.The thickness of epitaxial loayer 103 is such as greater than 2 μm.P+ type isolated area 104 extends to Semiconductor substrate 101 from the surface of epitaxial loayer 103 through epitaxial loayer 103, thus in epitaxial loayer 103, limit the first active area of the first diode and the second active area of the second diode.Isolated area 104 by the first active area and the second active area spaced.Correspondingly, isolated area 104 comprises the peripheral part around the first active area and the second active area, and by the spaced mid portion in the first active area and the second active area.
P++ type doped region 110 is positioned at the first active area, extends to epitaxial loayer 103 from epitaxial loayer 103 surface.Such as, the doping content of doped region 110 is for being greater than 1.0 × 10
18cm
-3.N++ doped region 111 is positioned at the second active area, extends to epitaxial loayer 103 from epitaxial loayer 103 surface.Such as, the doping content of doped region 111 is for being greater than 8.0 × 10
19cm
-3.
Insulating barrier 120 is positioned at above epitaxial loayer 103.First interconnecting line 107 and the second interconnecting line 108 are such as formed by same metal level.First interconnecting line 107 arrives the top surface of epitaxial loayer 103 and isolated area 104 through insulating barrier 120, thus the two is electrically connected to each other.Second interconnecting line 108 arrives the top surface of doped region 110 and 111 through insulating barrier 120, thus the two is electrically connected to each other.Second interconnecting line 108 also for the electrical connection between external circuit, such as, as signal end I/O.
In the capacitive diode assembly of this embodiment, adopt interconnecting line 107 by epitaxial loayer 103 and isolated area 104 short circuit each other, make that doped region 110, epitaxial loayer 103, current path (as indicated by a dashed arrow in the figure) between isolated area 104 and Semiconductor substrate 101 only exist a PN junction.Thus, form the PN junction of the first diode between doped region 110 and epitaxial loayer 103, between Semiconductor substrate 101 and epitaxial loayer 103, form the PN junction of the second diode, thus realize the basic structure of the first diode and the second diode respectively.
Metal layer on back 160 is formed, as earth terminal GND at the back side of Semiconductor substrate 101.First diode and the second diode adopt Semiconductor substrate 101 and the second interconnecting line 108 to be connected in antiparallel.
This capacitive diode assembly comprises the first diode and second diode of reverse parallel connection, utilizes the low pressure drop of diode forward and the characteristic of low on-resistance to realize the electrical characteristics of ultra-low capacitance biphase rectification.This capacitive diode assembly can be used for unidirectional or two-way TVS device as non-polar electric capacity.
Fig. 4 illustrates the structural representation of the another kind of capacitive diode assembly used in Transient Voltage Suppressor.This capacitive diode assembly comprises the diode of two reverse parallel connections formed on a semiconductor substrate.
As shown in Figure 4, P++ type Semiconductor substrate 101 forms N-type epitaxial loayer 103.The thickness of epitaxial loayer 103 is such as greater than 2 μm.P+ type isolated area 104 extends to Semiconductor substrate 101 from the surface of epitaxial loayer 103 through epitaxial loayer 103, thus in epitaxial loayer 103, limit the first active area of the first diode and the second active area of the second diode.Isolated area 104 by the first active area and the second active area spaced.Correspondingly, isolated area 104 comprises the peripheral part around the first active area and the second active area, and by the spaced mid portion in the first active area and the second active area.
P++ type doped region 110 is positioned at the first active area, extends to epitaxial loayer 103 from epitaxial loayer 103 surface.Such as, the doping content of doped region 110 is for being greater than 1.0 × 10
18cm
-3.N++ doped region 111 is positioned at the second active area, extends to epitaxial loayer 103 from epitaxial loayer 103 surface.Such as, the doping content of doped region 111 is for being greater than 8.0 × 10
19cm
-3.
Insulating barrier 120 is positioned at above epitaxial loayer 103.Conductive channel 107, through insulating barrier 120 and epitaxial loayer 103, enters in Semiconductor substrate 101, thus epitaxial loayer 103 and Semiconductor substrate 101 is electrically connected to each other.Interconnecting line 108 arrives the top surface of doped region 110 and 111 through insulating barrier 120, thus the two is electrically connected to each other.Interconnecting line 108 also for the electrical connection between external circuit, such as, as signal end I/O.
In the capacitive diode assembly of this embodiment, adopt conductive channel 107 by epitaxial loayer 103 and Semiconductor substrate 101 short circuit each other, make that doped region 110, epitaxial loayer 103, current path (as indicated by a dashed arrow in the figure) between conductive channel 107 and Semiconductor substrate 101 only exist a PN junction.Thus, form the PN junction of the first diode between doped region 110 and epitaxial loayer 103, between Semiconductor substrate 101 and epitaxial loayer 103, form the PN junction of the second diode, thus realize the basic structure of the first diode and the second diode respectively.
Metal layer on back 160 is formed, as earth terminal GND at the back side of Semiconductor substrate 101.First diode and the second diode adopt Semiconductor substrate 101 and interconnecting line 108 to be connected in antiparallel.
This capacitive diode assembly comprises the first diode and second diode of reverse parallel connection, utilizes the low pressure drop of diode forward and the characteristic of low on-resistance to realize the electrical characteristics of ultra-low capacitance biphase rectification.This capacitive diode assembly can be used for unidirectional or two-way TVS device as non-polar electric capacity.
Fig. 5 illustrates the vertical view of the Transient Voltage Suppressor package assembling according to the utility model first embodiment, sectional view and circuit diagram.
In the drawings, for the sake of clarity, two pins 201 and 202 of packaging frame are only shown, and encapsulating compound are not shown.Be appreciated that in the chip of reality, encapsulating compound encapsulates the semiconductor device be arranged on pin, and a part for pin exposes and is used for external electrical connections from encapsulating compound.
As shown in Figure 5, capacitive diode assembly C1 and Zener diode ZD1 is arranged on pin 201 and 202 respectively.Capacitive diode assembly C1 comprise the first interconnecting line 211, second interconnecting line 213 and therebetween semiconductor laminated 212.See Fig. 3 and Fig. 4, the first interconnecting line 211 and the second interconnecting line 213 are such as formed by metal level respectively.Semiconductor laminated 212 multiple semiconductor layer and/or the doped regions comprising different doping type, thus the diode of two reverse parallel connections can be formed.Zener diode ZD1 comprise the first interconnecting line 221, second interconnecting line 223 and therebetween semiconductor laminated 222.In this embodiment, Zener diode ZD1 can be any one in unidirectional and bi-directional zener diode, and common process can be adopted to make.
Such as by means of solder, first interconnecting line 211 of capacitive diode assembly C1 is electrically connected with the first pin 201, and first interconnecting line 221 of Zener diode ZD1 is electrically connected with the second pin 202.In the inside of package assembling, adopt a bonding line, second interconnecting line 213 of capacitive diode assembly C1 is electrically connected to each other with second interconnecting line 223 of Zener diode ZD1.This package assembling provides the configured in series of capacitive diode assembly C1 and Zener diode ZD1.
As mentioned previously, the capacitive diode assembly C1 adopting two diode compositions of reverse parallel connection is favourable, because can obtain ultra-low capacitance and almost whole electrology characteristics of reservation Zener diode.Adopt the capacitive diode assembly of ultra-low capacitance, in package assembling, the configured in series of capacitive diode assembly and Zener diode achieves ultra-low capacitance.Further, capacitive diode assembly C1 is non-polar.Therefore do not need when being arranged on packaging frame to distinguish first interconnecting line of capacitive diode assembly C1 and the polarity of the second interconnecting line, thus capacitive diode assembly C1 can be placed easily on packaging frame.As shown in Figure 5 c, any lead-in wire of capacitive diode assembly C1 can be connected with one of the anode and negative electrode of Zener diode ZD1.This package assembling connection error that can reduce due to semiconductor device causes the possibility of wafer damage.
Fig. 6 illustrates the vertical view of the Transient Voltage Suppressor package assembling according to the utility model second embodiment, sectional view and circuit diagram.
In the drawings, for the sake of clarity, two pins 201 and 202 of packaging frame are only shown, and encapsulating compound are not shown.Be appreciated that in the chip of reality, encapsulating compound encapsulates the semiconductor device be arranged on pin, and a part for pin exposes and is used for external electrical connections from encapsulating compound.
As shown in Figure 6, capacitive diode assembly C1 and Zener diode ZD2 is arranged on pin 201, and capacitive diode assembly C2 and Zener diode ZD1 is arranged on pin 202.Capacitive diode assembly C1 comprise the first interconnecting line 211, second interconnecting line 213 and therebetween semiconductor laminated 212.See Fig. 3 and Fig. 4, the first interconnecting line 211 and the second interconnecting line 213 are such as formed by metal level respectively.Semiconductor laminated 212 multiple semiconductor layer and/or the doped regions comprising different doping type, thus the diode of two reverse parallel connections can be formed.The structure of capacitive diode assembly C2 and the similar of capacitive diode assembly C1, comprise the first interconnecting line 231, second interconnecting line 233 and therebetween semiconductor laminated 232.Zener diode ZD1 comprise the first interconnecting line 221, second interconnecting line 223 and therebetween semiconductor laminated 222.In this embodiment, Zener diode ZD1 is such as bi-directional zener diode, and common process can be adopted to make.The similar of Zener diode ZD2 and Zener diode ZD1, comprise the first interconnecting line 241, second interconnecting line 243 and therebetween semiconductor laminated 242.
Such as by means of solder, first interconnecting line 211 of capacitive diode assembly C1, first interconnecting line 231 of Zener diode ZD2 are electrically connected with the first pin 201, and first interconnecting line 221 of Zener diode ZD1, first interconnecting line 241 of capacitive diode assembly C2 are electrically connected with the second pin 202.In the inside of package assembling, adopt two bonding lines, second interconnecting line 213 of capacitive diode assembly C1 is electrically connected to each other with second interconnecting line 223 of Zener diode ZD1, and second interconnecting line 243 of capacitive diode assembly C2 is electrically connected to each other with second interconnecting line 233 of Zener diode ZD2.This package assembling provides the configured in series of capacitive diode assembly C1 and Zener diode ZD1, the configured in series of capacitive diode assembly C2 and Zener diode ZD2.Further, adopt pin 201 and 202 respectively as public input and output.
Adopt the capacitive diode assembly of ultra-low capacitance, in package assembling, the configured in series of capacitive diode assembly and Zener diode achieves ultra-low capacitance.Further, capacitive diode assembly C1 and C2 is non-polar.Therefore do not need when being arranged on packaging frame to distinguish first interconnecting line of capacitive diode assembly C1 and C2 and the polarity of the second interconnecting line, thus capacitive diode assembly C1 and C2 can be placed easily on packaging frame.As fig. 6 c, any lead-in wire of capacitive diode assembly C1, C2 can be connected with any lead-in wire of Zener diode ZD1, ZD2.This package assembling connection error that can reduce due to semiconductor device causes the possibility of wafer damage.
Fig. 7 illustrates the vertical view of the Transient Voltage Suppressor package assembling according to the utility model the 3rd embodiment, sectional view and circuit diagram.
In the drawings, for the sake of clarity, three pins 201,202 and 203 of packaging frame are only shown, and encapsulating compound are not shown.Be appreciated that in the chip of reality, encapsulating compound encapsulates the semiconductor device be arranged on pin, and a part for pin exposes and is used for external electrical connections from encapsulating compound.
As shown in Figure 7, Zener diode ZD1 and ZD2 is arranged on pin 201, and capacitive diode assembly C1 is arranged on pin 202, and capacitive diode assembly C2 is arranged on pin 203.Capacitive diode assembly C1 comprise the first interconnecting line 211, second interconnecting line 213 and therebetween semiconductor laminated 212.See Fig. 3 and Fig. 4, the first interconnecting line 211 and the second interconnecting line 213 are such as formed by metal level respectively.Semiconductor laminated 212 multiple semiconductor layer and/or the doped regions comprising different doping type, thus the diode of two reverse parallel connections can be formed.The structure of capacitive diode assembly C2 and the similar of capacitive diode assembly C1, comprise the first interconnecting line 221, second interconnecting line 223 and therebetween semiconductor laminated 222.Zener diode ZD1 comprise the first interconnecting line 231, second interconnecting line 233 and therebetween semiconductor laminated 232.In this embodiment, Zener diode ZD1 is such as unidirectional or bi-directional zener diode, and common process can be adopted to make.The similar of Zener diode ZD2 and Zener diode ZD1, comprise the first interconnecting line 241, second interconnecting line 243 and therebetween semiconductor laminated 242.
Such as by means of solder, first interconnecting line 231 of Zener diode ZD1 and first interconnecting line 241 of Zener diode ZD2 are electrically connected with the first pin 201, first interconnecting line 211 of capacitive diode assembly C1 is electrically connected with the second pin 202, and first interconnecting line 221 of capacitive diode assembly C2 is electrically connected with the 3rd pin 203.In the inside of package assembling, adopt two bonding lines, second interconnecting line 213 of capacitive diode assembly C1 is electrically connected to each other with second interconnecting line 233 of Zener diode ZD1, and second interconnecting line 223 of capacitive diode assembly C2 is electrically connected to each other with second interconnecting line 243 of Zener diode ZD2.This package assembling provides the configured in series of capacitive diode assembly C1 and Zener diode ZD1 and the configured in series of capacitive diode assembly C2 and Zener diode ZD2.Further, adopt pin 201 as public input, adopt pin 202 and 203 respectively as two outputs.
Adopt the capacitive diode assembly of ultra-low capacitance, in package assembling, the configured in series of capacitive diode assembly and Zener diode achieves ultra-low capacitance.Further, capacitive diode assembly C1 and C2 is non-polar.Therefore do not need when being arranged on packaging frame to distinguish first interconnecting line of capacitive diode assembly C1 and C2 and the polarity of the second interconnecting line, thus capacitive diode assembly C1 and C2 can be placed easily on packaging frame.As shown in Figure 7 c, any lead-in wire of capacitive diode assembly C1, C2 can be connected with any lead-in wire of Zener diode ZD1, ZD2.This package assembling connection error that can reduce due to semiconductor device causes the possibility of wafer damage.
Fig. 8 illustrates the vertical view of the Transient Voltage Suppressor package assembling according to the utility model the 4th embodiment, sectional view and circuit diagram.
In the drawings, for the sake of clarity, three pins 201,202 and 203 of packaging frame are only shown, and encapsulating compound are not shown.Be appreciated that in the chip of reality, encapsulating compound encapsulates the semiconductor device be arranged on pin, and a part for pin exposes and is used for external electrical connections from encapsulating compound.
As shown in Figure 8, capacitive diode assembly C1 and C2 is arranged on pin 201, and Zener diode ZD1 is arranged on pin 202, and Zener diode ZD1 is arranged on pin 203.Capacitive diode assembly C1 comprise the first interconnecting line 211, second interconnecting line 213 and therebetween semiconductor laminated 212.See Fig. 3 and Fig. 4, the first interconnecting line 211 and the second interconnecting line 213 are such as formed by metal level respectively.Semiconductor laminated 212 multiple semiconductor layer and/or the doped regions comprising different doping type, thus the diode of two reverse parallel connections can be formed.The structure of capacitive diode assembly C2 and the similar of capacitive diode assembly C1, comprise the first interconnecting line 221, second interconnecting line 223 and therebetween semiconductor laminated 222.Zener diode ZD1 comprise the first interconnecting line 231, second interconnecting line 233 and therebetween semiconductor laminated 232.In this embodiment, Zener diode ZD1 is such as unidirectional or bi-directional zener diode, and common process can be adopted to make.The similar of Zener diode ZD2 and Zener diode ZD1, comprise the first interconnecting line 241, second interconnecting line 243 and therebetween semiconductor laminated 242.
Such as by means of solder, first interconnecting line 211 of capacitive diode assembly C1 and first interconnecting line 221 of capacitive diode assembly C2 are electrically connected with the first pin 201, first interconnecting line 231 of Zener diode ZD1 is electrically connected with the second pin 202, and first interconnecting line 241 of Zener diode ZD2 is electrically connected with the 3rd pin 203.In the inside of package assembling, adopt two bonding lines, second interconnecting line 213 of capacitive diode assembly C1 is electrically connected to each other with second interconnecting line 233 of Zener diode ZD1, and second interconnecting line 223 of capacitive diode assembly C2 is electrically connected to each other with second interconnecting line 243 of Zener diode ZD2.This package assembling provides the configured in series of capacitive diode assembly C1 and Zener diode ZD1 and the configured in series of capacitive diode assembly C2 and Zener diode ZD2.Further, adopt pin 201 as public output, adopt pin 202 and 203 respectively as two inputs.
Adopt the capacitive diode assembly of ultra-low capacitance, in package assembling, the configured in series of capacitive diode assembly and Zener diode achieves ultra-low capacitance.Further, capacitive diode assembly C1 and C2 is non-polar.Therefore do not need when being arranged on packaging frame to distinguish first interconnecting line of capacitive diode assembly C1 and C2 and the polarity of the second interconnecting line, thus capacitive diode assembly C1 and C2 can be placed easily on packaging frame.As shown in Figure 8 c, any lead-in wire of capacitive diode assembly C1, C2 can be connected with any lead-in wire of Zener diode ZD1, ZD2.This package assembling connection error that can reduce due to semiconductor device causes the possibility of wafer damage.
In the above description, known structural element and step are not described in detail.But it will be appreciated by those skilled in the art that and by various technological means, corresponding structural element and step can be realized.In addition, in order to form identical structural element, those skilled in the art can also design the not identical method with method described above.In addition, although respectively describing each embodiment above, this is not also meaning that the measure in each embodiment can not advantageously be combined.
Above embodiment of the present utility model is described.But these embodiments are only used to the object illustrated, and are not intended to limit scope of the present utility model.Scope of the present utility model is by claims and equivalents thereof.Do not depart from scope of the present utility model, those skilled in the art can make multiple substituting and amendment, and these substitute and amendment all should drop within scope of the present utility model.