CN204727982U - A kind of straight pulling silicon single crystal furnace overall guide shell of cured charcoal felt - Google Patents
A kind of straight pulling silicon single crystal furnace overall guide shell of cured charcoal felt Download PDFInfo
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- CN204727982U CN204727982U CN201520456323.1U CN201520456323U CN204727982U CN 204727982 U CN204727982 U CN 204727982U CN 201520456323 U CN201520456323 U CN 201520456323U CN 204727982 U CN204727982 U CN 204727982U
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- 239000003610 charcoal Substances 0.000 title claims abstract description 62
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 43
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 43
- 239000010703 silicon Substances 0.000 title claims abstract description 43
- 239000013078 crystal Substances 0.000 title claims abstract description 41
- 238000004519 manufacturing process Methods 0.000 claims abstract description 15
- 230000004888 barrier function Effects 0.000 claims abstract description 4
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 13
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 15
- 230000008569 process Effects 0.000 abstract description 6
- 238000005265 energy consumption Methods 0.000 abstract description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 23
- 239000007789 gas Substances 0.000 description 23
- 239000000758 substrate Substances 0.000 description 20
- 238000000576 coating method Methods 0.000 description 18
- 239000011248 coating agent Substances 0.000 description 16
- 102100023170 Nuclear receptor subfamily 1 group D member 1 Human genes 0.000 description 15
- 238000005229 chemical vapour deposition Methods 0.000 description 12
- 239000004215 Carbon black (E152) Substances 0.000 description 11
- 229930195733 hydrocarbon Natural products 0.000 description 11
- 150000002430 hydrocarbons Chemical class 0.000 description 11
- 239000000843 powder Substances 0.000 description 11
- 238000002360 preparation method Methods 0.000 description 11
- 238000007711 solidification Methods 0.000 description 11
- 230000008023 solidification Effects 0.000 description 11
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 10
- 238000003763 carbonization Methods 0.000 description 10
- 229910002804 graphite Inorganic materials 0.000 description 10
- 239000010439 graphite Substances 0.000 description 10
- 239000002904 solvent Substances 0.000 description 10
- 238000000151 deposition Methods 0.000 description 8
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 6
- 239000002994 raw material Substances 0.000 description 6
- 239000003085 diluting agent Substances 0.000 description 5
- 229910052757 nitrogen Inorganic materials 0.000 description 5
- 238000000746 purification Methods 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- 238000002791 soaking Methods 0.000 description 5
- 238000005520 cutting process Methods 0.000 description 4
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 4
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 4
- 230000003245 working effect Effects 0.000 description 4
- 230000001680 brushing effect Effects 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 239000002131 composite material Substances 0.000 description 3
- 238000005336 cracking Methods 0.000 description 3
- 239000001294 propane Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- YLQBMQCUIZJEEH-UHFFFAOYSA-N Furan Chemical compound C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 2
- IUHFWCGCSVTMPG-UHFFFAOYSA-N [C].[C] Chemical class [C].[C] IUHFWCGCSVTMPG-UHFFFAOYSA-N 0.000 description 2
- 229910021431 alpha silicon carbide Inorganic materials 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- CREMABGTGYGIQB-UHFFFAOYSA-N carbon carbon Chemical compound C.C CREMABGTGYGIQB-UHFFFAOYSA-N 0.000 description 2
- 239000011203 carbon fibre reinforced carbon Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000013178 mathematical model Methods 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 2
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 2
- 229920003987 resole Polymers 0.000 description 2
- 229920001187 thermosetting polymer Polymers 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 125000002541 furyl group Chemical group 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000002893 slag Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
- Ceramic Products (AREA)
Abstract
A kind of straight pulling silicon single crystal furnace overall guide shell of cured charcoal felt, is made up of guide shell ear (1), guide shell conically shaped portion (2) and top coat (3); Described guide shell ear (1) and guide shell conically shaped portion (2) are formed by cured charcoal felt manufacture, and described cured charcoal felt density is 0.4 ~ 0.7g/cm
3; Cone match is taked in described guide shell ear and junction, guide shell conically shaped portion; Described top coat is physical barrier.The overall guide shell of the utility model cured charcoal felt, effectively can improve the heat-insulating property of overall guide shell in applied at elevated temperature process, reduce power save energy consumption about 10%, reduce crystal pulling cost, improve crystal pulling yield rate and efficiency simultaneously.
Description
Technical field
The utility model relates to a kind of straight pulling silicon single crystal furnace guide shell, is specifically related to the overall guide shell of a kind of straight pulling silicon single crystal furnace cured charcoal felt.
Technical background
The silicon single crystal of about 85% adopts vertical pulling method (CZ method) to produce.Silicon crystal bar size maximizes day by day, and for ensureing the quality of silicon crystal, save the energy, reduce Carbon emission, silicon crystal growth oven thermal field generally uses guide shell.Guide shell mainly plays high-temperature gas guide functions, therefore, requires that it has good resistance toheat and certain mechanical property; Also thermal and insulating performance will be had, to ensure that the silicon liquid of silicon liquid radially, in the silicon rod drawn and crucible in crucible has suitable thermograde vertically.In addition, use guide shell can reduce the argon gas flowing whirlpool born of the same parents of upper of furnace body, and then reduce the deposition of SiO on single crystal growing furnace top, thus guarantee that pulled crystal silicon rod has very high quality.
At present, vertical pulling silicon crystal growing furnace guide shell mostly be by the outer graphite tube-felt body of thin-wall conical sandwich-thin-wall conical in the built-up type guide shell that forms of graphite tube.Because graphite product intensity is low, high-temperature hot shock stability is poor, and thermal conductivity is high, and work-ing life is short, general use about 3 months, and change frequent, purity is also lower; And, current silicon single crystal crystal pulling size is increasing, require that guide shell size also increases thereupon, therefore, the materials consumption of graphite guide shell increases, course of processing yield rate is low, and be easy to damage in transport, carrying, use procedure, more and more difficulty meets the use properties of CZ vertical pulling method monocrystalline silicon production to guide shell and the requirement of unfailing performance.
In addition, also have part external flow guiding cylinder and inner draft tube to be made up of carbon-carbon composites in recent years, inner core is generally wrapped up by soft felt or cured charcoal felt is made, but the inside and outside guide shell price of carbon-carbon composites is very expensive.Along with being growing more intense of photovoltaic market competition, reducing energy consumption, save cost, enhancing productivity becomes the core of technical development.Guide shell is placed in directly over crucible, easily produce under silicon steam and oxidizing gas effect and corrode and cracking, in the total cost of monocrystalline silicon growing, have certain ratio, the unexpected damage of guide shell likely causes crucible, heater failure, even causes whole thermal field to damage.Therefore, guide shell is improved most important for the cost control of monocrystalline silicon growing with reduction guide shell cost for work-ing life.
At present, existing graphite guide shell and charcoal-charcoal guide shell ubiquity problem: is that cost is high; Two is easily occur that outside surface is oxidized after using, and overall cracking, falls the phenomenons such as block, thus make troubles to production, affect Business Economic Benefit; Three is that when using, in-site installation is loaded down with trivial details, affects working efficiency.
" preparation method of monocrystalline silicon draw machines thermal field charcoal/charcoal draft tube " disclosed in No. 200610043187.9, Chinese invention patent application and " single-crystal furnace guide shell and production technique thereof " disclosed in No. 200810030750.8 all relates to the preparation method of carbon/carbon composite guide shell, the raw materials consumption of its guide shell is many, the guide shell of preparation is also shorter for work-ing life, and the price of charcoal-charcoal guide shell is very expensive.And 200810030750.8 disclosed " single-crystal furnace guide shell and production technique thereof ", separate top layer and nexine by expanded graphite paper or template as slow infiltration layer in preparation process, thus also there is density gradient in its guide shell prepared, and this more affects its work-ing life.200910310354.5 disclosed " a kind of CZ silicon crystal growth oven carbon-carbon composite guide shells and preparation method thereof ", the apparent density on its carbon-carbon composite top layer of preparing reaches 1.4 ~ 1.7g/ cm
3, the cycle of chemical vapour deposition is long, there is top layer Density inhomogeneity simultaneously, there is cracking, falls the phenomenons such as slag, affect the quality of silicon single crystal in use procedure; And its production cost is higher.
Utility model content
The technical problems to be solved in the utility model is, overcome the above-mentioned defect that prior art exists, provide one to make good integrity, long service life, reliability is high, easy to operate, and raw materials consumption is few, the overall guide shell of energy-conservation straight pulling silicon single crystal furnace cured charcoal felt.
The technical scheme that the utility model solves the employing of its technical problem is: the overall guide shell of a kind of straight pulling silicon single crystal furnace cured charcoal felt, is made up of guide shell ear, guide shell conically shaped portion and top coat; Described guide shell ear and guide shell conically shaped portion are formed by cured charcoal felt manufacture, and the density of described cured charcoal felt is 0.4 ~ 0.7g/ cm
3; (preferably 0.5 ~ 0.6g/ cm
3) described guide shell ear and junction, guide shell conically shaped portion take cone match; Described top coat is physical barrier.
Further, the tapering of described guide shell ear and junction, guide shell conically shaped portion is: 91 degree of < tapering≤130 degree.
Further, described top coat is coat of silicon carbide, coat-thickness preferably 35 ~ 45 μm.
The utility model straight pulling silicon single crystal furnace overall guide shell of cured charcoal felt, can manufacture in accordance with the following methods:
(1) Design and manufacture guide shell ear mold and guide shell conically shaped portion mold;
(2) design the shape and size of charcoal felt: the charcoal felt felt body thickness selected by base and deformation performance press the geomery founding mathematical models in guide shell ear and guide shell conically shaped portion, calculate the shape and size of charcoal felt on different positions; And size cutting blanking accordingly;
(3) body preparation: the charcoal felt of step (2) institute cutting is soaked or brushing thermosetting resin, after charcoal felt soaks into, by design requirements, it be stacked on guide shell ear mold from level to level and be wrapped on guide shell conically shaped portion mold from level to level, firmly compacting base substrate;
(4) base substrate solidification: base substrate step (3) completed sends into curing oven, and solidification value is 100 ~ 250 DEG C, and set time is 4 ~ 8h;
(5) base substrate charing: base substrate step (4) being completed solidification sends into charring furnace, and carbonization temperature is 650 ~ 1200 DEG C, carbonization time 20 ~ 40h;
(6) machining base substrate and assembling: the base substrate that step (4) completes charing is carried out mechanical workout, processing guide shell ear (1) profile and the conical surface, processing guide shell conically shaped portion (2) physical dimension and the conical surface matched with guide shell ear (1), be then assembled into overall guide shell by the guide shell ear (1) after mechanical workout and guide shell conically shaped portion (2) by cone match;
(7) top coat:
A () coating paste configures: coating paste configures by the raw material of following weight ratio, carborundum powder: Graphite Powder 99: solvent=1:(0.1 ~ 5): (1 ~ 10), fully mixes each raw material, namely obtains coating paste;
B obtained for step (a) coating paste is evenly coated on the outside surface of the overall guide shell that step (6) is assembled into by (), coat-thickness is 30 ~ 50 μm;
(8) coating curing: be positioned in curing oven by the guide shell after step (7) coating process and be cured, solidification value is 100 ~ 150 DEG C, time 2-4h;
(9) chemical vapour deposition intensive treatment: the guide shell after step (8) process is placed in chemical vapor deposition stove, hydrocarbon gas is adopted to carry out chemical vapour deposition, depositing temperature is 900 ~ 1200 DEG C, depositing time 10 ~ 100h, hydrocarbon gas flow is 30 ~ 50L/min, and diluent gas nitrogen flow is 15 ~ 30L/min;
(10) high temperature purification treatment: the guide shell after step (9) process is placed in High Temperature Furnaces Heating Apparatus, heat up most 1600 ~ 2200 DEG C, soaking time 10 ~ 30h, is cooled to less than 300 DEG C, comes out of the stove and get product.
Described carborundum powder is α-SiC powder, and granularity is 800 ~ 2500 orders; Described Graphite Powder 99 granularity is 800 ~ 2000 orders; Described solvent is one or more mixture of silicon sol, furane resin, epoxy resin or resol.
The hydrocarbon gas of described chemical vapour deposition is the one in methane, propane or propylene.
The utility model compared with prior art, has following advantage:
(1) the overall guide shell of the utility model cured charcoal felt can improve the heat-insulating property of overall guide shell in applied at elevated temperature process effectively, reduces power, energy efficient about 10%, reduces crystal pulling cost.
(2) the overall guide shell good integrity of the utility model cured charcoal felt, long service life, reliability is high, can improve crystal pulling yield rate and efficiency.
(3) the utility model straight pulling silicon single crystal furnace overall guide shell of cured charcoal felt, lighter in weight, installs, dismounting is all more convenient.
Accompanying drawing explanation
Fig. 1 is the structural representation of the overall guide shell of the utility model straight pulling silicon single crystal furnace cured charcoal felt;
Wherein: 1-guide shell ear, 2-guide shell conically shaped portion, 3-top coat.
Embodiment
Below in conjunction with drawings and Examples, the utility model is described in further detail.
Embodiment 1
As shown in Figure 1, the overall guide shell embodiment of straight pulling silicon single crystal furnace cured charcoal felt of the present invention, comprises guide shell ear 1, guide shell conically shaped portion 2 and top coat 3; Guide shell ear 1 and guide shell conically shaped portion 2 are formed by cured charcoal felt manufacture, and its density is 0.4g/ cm
3; Cone match is taked in guide shell ear 1 and junction, guide shell conically shaped portion 2, and tapering is 91 degree; Top coat (3) is physical barrier, is specially coat of silicon carbide, and coat-thickness is 35 μm.
The overall guide shell of described straight pulling silicon single crystal furnace cured charcoal felt, make in accordance with the following methods:
(1) Design and manufacture guide shell ear 1 mold and guide shell conically shaped portion 2 mold;
(2) design the shape and size of charcoal felt: the charcoal felt felt body thickness selected by base and deformation performance press the geomery founding mathematical models (i.e. the stereoscopic model of round platform) in guide shell ear 1 and guide shell conically shaped portion 2, calculate the shape and size of different positions charcoal felt; And size cutting blanking accordingly;
(3) body preparation: by the charcoal felt brushing thermosetting resin of step (2) institute cutting, be specially furane resin, after the brushing of charcoal felt, by design requirements, it be stacked on guide shell ear 1 mold from level to level and be wrapped on guide shell conically shaped portion 2 mold from level to level, firmly compacting base substrate;
(4) base substrate solidification: base substrate step (3) completed sends into curing oven, controlling solidification value is 150 DEG C, and set time is 6h;
(5) base substrate charing: base substrate step (4) being completed solidification sends into charring furnace, and controlling carbonization temperature is 650 DEG C, carbonization time 40h;
(6) machining base substrate and assembling: the base substrate that step (4) completes charing is carried out mechanical workout, according to design shape and dimensioned guide shell ear 1 profile and the conical surface, processing guide shell conically shaped portion 2 profile and the conical surface matched with guide shell ear 1, be then assembled into overall guide shell by the guide shell ear 1 after mechanical workout and guide shell conically shaped portion 2 by cone match;
(7) top coat:
A () coating paste is prepared: coating paste forms by the preparation of raw material of following weight ratio: carborundum powder: Graphite Powder 99: solvent=1: 2: 5, is fully mixed by each raw material, namely obtains coating paste; Carborundum powder is α-SiC, and granularity is 800 orders; Graphite Powder 99 granularity is 800 orders; Solvent is furane resin.
B obtained for step (a) coating paste is evenly coated on the outside surface of the overall guide shell that step (6) is assembled into by (), coat-thickness is 30 μm;
(8) coating curing: be positioned in curing oven by the guide shell after step (7) coating process and be cured, solidification value is 100 DEG C, time 4h;
(9) chemical vapour deposition intensive treatment: the guide shell after step (8) process is placed in chemical vapor deposition stove, hydrocarbon gas is adopted to carry out chemical vapour deposition, concrete employing propane gas carries out chemical vapour deposition, depositing temperature is 1000 DEG C, depositing time 30h, hydrocarbon gas flow is 30L/min, and diluent gas nitrogen flow is 30L/min;
(10) high temperature purification treatment: the guide shell after step (9) process is placed in High Temperature Furnaces Heating Apparatus, heat up most 2200 DEG C, soaking time 10h, is cooled to less than 300 DEG C, comes out of the stove, get product.
Through practical application, adopt the overall guide shell of the straight pulling silicon single crystal furnace of the present invention cured charcoal felt, the isometrical power drop 4kw(of czochralski silicon monocrystal declines 12%); The overall guide shell good integrity of cured charcoal felt of the present invention, long service life, the life-span reaches 70 stoves (graphite guide shell is generally 40 stoves), and reliability improves, and efficiency improves 10%; The overall guide shell density ratio of cured charcoal felt of the present invention is lower and evenly, lighter in weight, installs, dismounting is all more convenient.
Embodiment 2
The difference of the present embodiment and embodiment 1 is only, guide shell ear 1 and guide shell conically shaped portion 2 are formed by cured charcoal felt manufacture, and its density is 0.7g/ cm
3; Cone match is taked in guide shell ear 1 and junction, guide shell conically shaped portion 2, and tapering is 130 degree; Coat-thickness is 45 μm.
The difference of preparation method is only: step (4) base substrate solidification value is 250 DEG C, and set time is 4h;
Step (5) base substrate carbonization temperature is 1200 DEG C, carbonization time 20h;
Step (7) top coat: (a) coating paste is prepared, carborundum powder: Graphite Powder 99: solvent=1: 5: 10, and carborundum powder granularity is 2500 orders; Graphite Powder 99 granularity is 2000 orders; Solvent is silicon sol; B () coat-thickness is 50 μm;
Step (8) coating curing temperatures is 150 DEG C, time 2h;
Step (9) chemical vapour deposition temperature is 1200 DEG C, depositing time 10h, and hydrocarbon gas flow is 40L/min, and diluent gas nitrogen flow is 25L/min; Hydrocarbon gas adopts methane gas;
Step (10) high temperature purification treatment temperature 1600 DEG C, soaking time 30h.
Remaining with embodiment 1.
Through practical application, adopt the overall guide shell of the straight pulling silicon single crystal furnace of the present invention cured charcoal felt, the isometrical power drop 3kw(of czochralski silicon monocrystal declines 9%); The overall guide shell good integrity of cured charcoal felt of the present invention, long service life, the life-span reaches 72 stoves (graphite guide shell is generally 40 stoves), and reliability improves, and efficiency improves 10%; The overall guide shell density ratio of cured charcoal felt of the present invention is lower and evenly, lighter in weight, installs, dismounting is all more convenient.
Embodiment 3
The difference of the present embodiment and embodiment 1 is only, guide shell ear 1 and guide shell conically shaped portion 2 are formed by cured charcoal felt manufacture, and its density is 0.5g/ cm
3; Cone match is taked in guide shell ear 1 and junction, guide shell conically shaped portion 2, and tapering is 100 degree; Coat-thickness is 40 μm.
The difference of preparation method is only: step (4) base substrate solidification value is 100 DEG C, and set time is 8h;
Step (5) base substrate carbonization temperature is 800 DEG C, carbonization time 30h;
Step (7) top coat: (a) coating paste is prepared, carborundum powder: Graphite Powder 99: solvent=1: 0.1: 1, and carborundum powder granularity is 1500 orders; Graphite Powder 99 granularity is 1000 orders; Solvent is epoxy resin; B () coat-thickness is 40 μm;
Step (8) coating curing temperatures is 130 DEG C, time 3h;
Step (9) chemical vapour deposition temperature is 900 DEG C, depositing time 100h, and hydrocarbon gas flow is 50L/min, and diluent gas nitrogen flow is 15L/min; Hydrocarbon gas adopts propylene gas;
Step (10) high temperature purification treatment temperature 2000 DEG C, soaking time 20h.
Remaining with embodiment 1.
Through practical application, adopt the overall guide shell of the straight pulling silicon single crystal furnace of the present invention cured charcoal felt, the isometrical power drop 3.5kw(of czochralski silicon monocrystal declines 10%); The overall guide shell good integrity of cured charcoal felt of the present invention, long service life, the life-span reaches 75 stoves (graphite guide shell is generally 40 stoves), and reliability improves, and efficiency improves 10%; The overall guide shell density ratio of cured charcoal felt of the present invention is lower and evenly, lighter in weight, installs, dismounting is all more convenient.
Embodiment 4
The difference of the present embodiment and embodiment 1 is only, guide shell ear 1 and guide shell conically shaped portion 2 are formed by cured charcoal felt manufacture, and its density is 0.6g/ cm
3; Cone match is taked in guide shell ear 1 and junction, guide shell conically shaped portion 2, and tapering is 105 degree; Coat-thickness is 45 μm.
The difference of preparation method is only: step (4) base substrate solidification value is 180 DEG C, and set time is 5h; Step (5) base substrate carbonization temperature is 700 DEG C, carbonization time 35h; Step (7) top coat: (a) coating paste is prepared, carborundum powder: Graphite Powder 99: solvent=1: 3: 8, and carborundum powder granularity is 1000 orders; Graphite Powder 99 granularity is 1500 orders; Solvent is resol; B () coat-thickness is 45 μm; Step (8) coating curing temperatures is 120 DEG C, time 4h; Step (9) chemical vapour deposition temperature is 990 DEG C, depositing time 30h, and hydrocarbon gas flow is 35L/min, and diluent gas nitrogen flow is 35L/min; Hydrocarbon gas adopts propane gas; Step (10) high temperature purification treatment temperature 1800 DEG C, soaking time 25h.
Remaining with embodiment 1.
Through practical application, adopt the overall guide shell of the straight pulling silicon single crystal furnace of the present invention cured charcoal felt, the isometrical power drop 4.5kw(of czochralski silicon monocrystal declines 13.5%); The overall guide shell good integrity of cured charcoal felt of the present invention, long service life, the life-span reaches 73 stoves (graphite guide shell is generally 40 stoves), and reliability improves, and efficiency improves 12%; The overall guide shell density ratio of cured charcoal felt of the present invention is lower and evenly, lighter in weight, installs, dismounting is all more convenient.
The above is only preferred embodiment of the present invention, not imposes any restrictions the present invention, every above embodiment is done according to the technology of the present invention essence any amendment, change and equivalent structure transformation, all still belong to the protection domain of technical solution of the present invention.
Claims (8)
1. the straight pulling silicon single crystal furnace overall guide shell of cured charcoal felt, is characterized in that, be made up of guide shell ear (1), guide shell conically shaped portion (2) and top coat (3); Described guide shell ear (1) and guide shell conically shaped portion (2) are formed by cured charcoal felt manufacture, and described cured charcoal felt density is 0.4 ~ 0.7g/ cm
3; Cone match is taked in described guide shell ear and junction, guide shell conically shaped portion; Described top coat is physical barrier.
2. the overall guide shell of straight pulling silicon single crystal furnace cured charcoal felt according to claim 1, is characterized in that: described guide shell ear (1) with the tapering of guide shell conically shaped portion (2) junction is: 91 degree of < tapering≤130 degree.
3. the overall guide shell of straight pulling silicon single crystal furnace cured charcoal felt according to claim 1 and 2, is characterized in that: described top coat (3) is coat of silicon carbide.
4. the overall guide shell of straight pulling silicon single crystal furnace cured charcoal felt according to claim 1 and 2, is characterized in that: the thickness of described top coat (3) is 35 ~ 45 μm.
5. the overall guide shell of straight pulling silicon single crystal furnace cured charcoal felt according to claim 3, is characterized in that: the thickness of described top coat (3) is 35 ~ 45 μm.
6. the overall guide shell of straight pulling silicon single crystal furnace cured charcoal felt according to claim 1 and 2, is characterized in that: the density of described cured charcoal felt is 0.5 ~ 0.6g/ cm
3.
7. the overall guide shell of straight pulling silicon single crystal furnace cured charcoal felt according to claim 3, is characterized in that: the density of described cured charcoal felt is 0.5 ~ 0.6g/ cm
3.
8. the overall guide shell of straight pulling silicon single crystal furnace cured charcoal felt according to claim 4, is characterized in that: the density of described cured charcoal felt is 0.5 ~ 0.6g/ cm
3.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111172585A (en) * | 2018-11-12 | 2020-05-19 | 上海新昇半导体科技有限公司 | Reflecting screen of single crystal growth furnace and single crystal growth furnace |
| CN113862773A (en) * | 2021-08-12 | 2021-12-31 | 成都裕鸢航空智能制造股份有限公司 | Long-life guide cylinder and preparation method thereof |
-
2015
- 2015-06-30 CN CN201520456323.1U patent/CN204727982U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111172585A (en) * | 2018-11-12 | 2020-05-19 | 上海新昇半导体科技有限公司 | Reflecting screen of single crystal growth furnace and single crystal growth furnace |
| CN113862773A (en) * | 2021-08-12 | 2021-12-31 | 成都裕鸢航空智能制造股份有限公司 | Long-life guide cylinder and preparation method thereof |
| CN113862773B (en) * | 2021-08-12 | 2022-10-25 | 成都裕鸢航空智能制造股份有限公司 | Long-life guide cylinder and preparation method thereof |
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