CN204628723U - Slit - Google Patents

Abstract

Mode of execution disclosed herein relates in general to a kind of slit, comprising: shell, at least one the substrate delivery port having sidewall and formed in described sidewall, and described shell has the internal volume limited by described sidewall; Slit valve, is placed in described shell, and can be positioned to depart between the open position of described substrate delivery port and the closed position sealing described substrate delivery port; Bumper assembly, be placed on the edge at least one face of described slit valve, described bumper assembly comprises the first shock absorber hardware be made up of the first material and the second shock absorber hardware be made up of the second material, and described second material is different from described first material.

Description

Slit

Technical field

Mode of execution disclosed herein relates in general to a kind of slit valve and a kind of slit for sealed chamber.

Background technique

In semiconductor, flat panel display, photovoltaic/solar panel and other base plate processing system, common trooping, to connect or to troop/the assembled arrangement vacuum chamber (namely feed locking cavity, transfer chamber, treatment chamber) of arranged in series is so that treatment substrate.These systems can single or batch substrate mode treatment substrate.During processing, substrate can be sent to chamber neutralization and send out from chamber, must maintain in these chambers or set up vacuum.In order to allow chamber interior of coming in and going out, and can vacuumizing be carried out, usually providing the substrate delivery port of the shape of slit formed through chamber wall to hold the substrate processed.(such as, sealing) substrate delivery port is opened and closed by slit.

Slit comprises slit valve, activates described slit valve movably to open or close substrate delivery port.When slit valve departs from substrate delivery port, between two vacuum chambers, transmit one or more substrate by substrate delivery port.When being closed by slit valve and sealing slit valve port, substrate turnover vacuum chamber can not be transmitted through substrate delivery port, and vacuum chamber keeps sealing.Such as, two vacuum chambers that slit connects can comprise process or transfer chamber, and described chamber needs periodically to isolate with charging locking cavity, maintains the vacuum in process or transfer chamber when determining chamber vent with convenient charging lock.

In general, the service speed of slit valve is very important to the output of base plate processing system.But when slit valve opens and closes, door operation causes large vibrations or vibration faster.Vibrations can make loosen particles in vacuum chamber and dispersion, thus can produce defect on substrate.This may at Organic Light Emitting Diode (organic light emitting diode; In the process of OLED) substrate and thin-film package (thin film encapsulation; TFE) be even more important in technique, because pollution should be remained on bottom line in these techniques.In addition, large vibrations are passed in time and fastening piece can be made to loosen, and increase the component wear to slit valve and slit.

Therefore, a kind of slit that can shake lower seal chamber in reduction is needed.

Model utility content

Mode of execution disclosed herein relates in general to the apparatus and method using slit sealed vacuum chamber.In one embodiment, slit comprises: shell, at least one the substrate delivery port having sidewall and formed in described sidewall, and described shell has the internal volume limited by described sidewall; Slit valve, is placed in described shell, and between the open position that can be positioned disengaging substrate delivery port and the closed position of hermetic sealing substrate delivery port; And bumper assembly, be placed on the edge at least one face of slit valve, described bumper assembly comprises the first shock absorber hardware be made up of the first material and the second shock absorber hardware be made up of the second material, and described second material is different from described first material.

In another embodiment, slit comprises: shell, at least one the substrate delivery port having sidewall and formed in described sidewall, and described shell has the internal volume limited by described sidewall; Slit valve, is placed in described shell, and between the open position that can be positioned disengaging substrate delivery port and the closed position of hermetic sealing substrate delivery port; Actuator, is coupled to slit valve, and can operate with travelling slit valve between an open position and a closed; And bumper assembly, be placed on the parallel edge at least one face of slit valve, described bumper assembly comprises the first shock absorber hardware be made up of the first material and the second shock absorber hardware be made up of the second material, and described second material is different from described first material.

In another embodiment, slit comprises: shell, at least one the substrate delivery port having sidewall and formed in described sidewall, and described shell has the internal volume limited by described sidewall; Slit valve, is placed in described shell, and between the open position that can be positioned disengaging substrate delivery port and the closed position of hermetic sealing substrate delivery port; With multiple first shock absorber hardware and multiple second shock absorber hardware, described shock absorber hardware is placed on the edge at least one face of slit valve along the longitudinal shaft of slit valve.

By being used alone or combinationally using bumper assembly with flow control circuit described herein, desirably reduce the vibrations of slit operation period or rock.Therefore, advantageously maintaining while slit valve opens and closes fast, the pollution risk brought by the particle freely shaken during reducing process.In addition, mode of execution disclosed herein is advantageously allowed and is improved the slit valve operating time, and can not reduce the reliability of the mechanical part of slit.In addition, the slit vertical air cylinder speed that advantageously utilizes single group valve to control on both directions up and down.

Accompanying drawing explanation

Therefore, for understanding above-mentioned feature structure of the present utility model in detail, can refer to mode of execution and be described in more detail summarizing above, some of them mode of execution is illustrated in accompanying drawing.But, it should be noted that accompanying drawing only illustrates exemplary embodiment, and therefore these accompanying drawings not for being considered as the restriction of the utility model category because the utility model can allow other equal effective mode of execution.

Fig. 1 is the schematic cross sectional views of two chambers connected by slit.

Fig. 2 A is the side cross-sectional view of a mode of execution of slit.

Fig. 2 B is the front view of the slit valve of Fig. 2 A.

Fig. 2 C is second plate of Fig. 2 A and the amplification partial cross section view of sidewall.

Fig. 3 and Fig. 4 is the side cross-sectional view of the slit of the slit valve illustrated in diverse location.

Fig. 5 A to Fig. 5 C is the partial schematic isometric view of the mode of execution of second shock absorber hardware that can use together with the slit of Fig. 2 A.

Fig. 6 A to Fig. 6 C is the isometric view that the mode of execution of multiple Install and configure is shown of the second shock absorber hardware.

Fig. 7 is the schematic diagram of a mode of execution of the flow control circuit of the slit that can be used for application drawing 2A, Fig. 3 and Fig. 4.

Fig. 8 and Fig. 9 illustrates the plotted curve in slit operation period described herein time dependent force value.

In order to promote understanding, in the conceived case, similar elements symbol has been used in reference to the similar elements that all figure share.Should imagine, element disclosed in a mode of execution can be advantageously used in other mode of execution and without the need to repeating.

Symbol description

Component symbol list

102 vacuum chambers

104 vacuum chambers

106 slit

108 ports

110A port

110B port

112 slit valves

114 charging locking chamber systems

116 slit

118 robots

120 flow control circuits

130 controllers

132 storagies

134 support circuit

136 CPU

200 shells

202 sidewalls

204 tops

Bottom 206

208 internal volumes

210A passage

210B passage

212 bumper assemblies

213A first shock absorber hardware

213B second shock absorber hardware

214 bars

215 grooves

216 holes

218 door actuators

220 Sealings

222 pedestals

224 first plates

226 second plates

228A face

228B face

230 contact surfaces

232 contact surfaces

236 O shape rings

238 plate actuators

239 black boies

240 sensors

500A I band

The solid P band of 500B

The hollow P band of 500C

505 main bodys

510 mounting portions

515 openings

524 venting gas appliance

600 fastening pieces

605 mounting plates

702 air cylinders

704 pistons

706 internal volumes

708 CDA supplies

710 air supply valves

712 first flow control valves

714 second control valves

716 high conductivity exhaust lines

718 conduction switches

720 the 3rd flow control valves

722 low conductivity exhaust lines

730 tops

732 bottoms

800 plotted curves

900 plotted curves

Embodiment

Mode of execution disclosed herein relates in general to the apparatus and method using slit to seal one or more vacuum chamber.Slit utilizes flexibility or flexible member prevent rocking of vacuum chamber or shake, thus prevents the vibrations of improper particle and/or process contamination.Hereafter will describe mode of execution about slit and chamber, described slit and chamber can the AKT America companies of subsidiary of Applied Materials of purchased from American Santa Clara city.But should will understand, use other slit and other chamber, comprise those slit and chamber of being sold by other MANUFACTURER, described mode of execution still can have effectiveness.

Fig. 1 is the schematic cross sectional views of two vacuum chambers 102,104 coupled by slit 106.Vacuum chamber 102,104 comprises substrate delivery port 108,110A, and described substrate delivery port is formed in vacuum chamber 102,104 to allow that substrate enters and exit respective chamber 102,104.Slit 106 can be operated with at least one in sealed vacuum chamber 102,104, the environment of vacuum chamber 102,104 is isolated from each other.Slit 106 comprises door 112, described door can move between the first location and the second location, at least one in this primary importance in hermetic sealing substrate delivery port 108,110A of described door, and allow in this second place by substrate delivery port 108,110A transferring substrates between vacuum chamber 102,104.

In one embodiment, vacuum chamber 102 comprises the treatment chamber for performing technique to substrate, and vacuum chamber 104 comprises transfer chamber.When operating as transfer chamber, substrate is sent to charging by delivery port 110B and locks chamber system 114 and send out from charging locking chamber system 114 by vacuum chamber 104, and substrate is sent to vacuum chamber 102 (when using as processing chamber) and sends out from vacuum chamber 102.The second slit 116 can be settled between charging locking chamber system 114 and vacuum chamber 104.In addition, vacuum chamber 104 can comprise the robot 118 for transmitting substrate between delivery port 110A and 110B.Although the second slit 116 can be similar to slit 106 with operating aspect in structure, description is herein limited to operation and the structure of slit 106.

When operating as treatment chamber, vacuum chamber 102 can be configured to perform thermal process to substrate in a low pressure environment.In one embodiment, slit 106 can be can operate with sealed vacuum chamber 102 in the chamber during making process containing low pressure.Other thermal process that the thermal process performed by vacuum chamber 102 comprises deposition, etching, annealing, implantation and formed on substrate in electronic device.Therefore, when slit 106 effective sealing vacuum chamber 102, slit 106 sealed vacuum chamber 104 can not be needed.

In one embodiment, flow control circuit 120 is coupled to all parts of slit 106, so that the operation of slit valve 112.Hereafter will further describe flow control circuit 120 in more detail about Fig. 7.In addition, controller 130 is coupled to flow control circuit 120 and is coupled to all parts of slit 106 so that control to slit valve 112, described controller comprises central processing unit (central processing unit; CPU) 136, the support circuit 134 of storage 132 and CPU 136.For the ease of the control to above-described valve assembly and control loop, CPU 136 can be one of any form general-purpose computer processor that can be used in industrial environment.Storage 132 is coupled to CPU 136.Storage 132 or computer fetch medium can be the one or more kinds in the storage that can be easy to obtain, and described storage is random access memory (random access memory such as; RAM), ROM (read-only memory) (read only memory; ROM), the Local or Remote number storage of floppy disk, hard disk or other form any.Support circuit 134 is coupled to CPU 136, for supporting described processor in a usual manner.These circuit comprise cache memory, power supply, clock circuit, input/output circuitry system and subtense angle etc.In storage 132, all methods being used for the operation of control gate as described herein are generally saved as software routines.Also store and/or software routine by the 2nd CPU (not shown), described 2nd CPU is away from the hardware controlled by CPU 136.

Fig. 2 A is the side cross-sectional view of a mode of execution of slit 106.Slit 106 generally comprises shell 200, and described shell has limit the top 204 of internal volume 208, bottom 206 and sidewall 202 in shell 200.Relative passage 210A, 210B is formed to align substantially with substrate delivery port 108,110A respectively through sidewall 202.Passage 210A, 210B are generally sized to allow and extend there through transferring substrates turnover vacuum chamber 102 and vacuum chamber 104.

Slit 106 comprises the slit valve 112 be placed in the internal volume 208 of shell 200 further.Slit valve 112 comprises the first plate 224 and the second plate 226, and described two plates are coupled to pedestal 222 with relative relation.First plate 224 and the second plate 226 are coupled to plate actuator 238, and described plate actuator is configured to promotion first plate 224 and the second plate 226 towards sidewall 202.One or two in first plate 224 and the second plate 226 can be coupled to black box 239, described black box can be bellows device, makes to hold plate actuator 238 at least in part.Each first plate 224 and the second plate 226 have face 228A, 228B respectively.Each 228A, 228B are configured such that when plate actuator 238 in the closing operation in slit 106 promotes the first plate 224 and the second plate 226 towards the inner contact surface 230,232 close to sidewall 202 during sidewall 202.

As discussed above, when vacuum chamber 102 operates as treatment chamber, slit 106 can be can operate with sealed vacuum chamber 102 in the chamber during making process containing low pressure.Therefore, when slit valve 112 in the closed position middle time, between contact surface 230 and face 228A, provide Sealing.Comprise O shape ring 236 to seal the first plate 224, first plate 224 completely against sidewall 202, described O shape ring abutting contact surface 230 in closing operation is pressed.O shape ring 236 provides the fluid-tight seal between the face 228A of the first plate 224 and the contact surface 230 of sidewall 202.

In some embodiments, not necessarily need by slit 106 sealed vacuum chamber 104.Such as, after from vacuum chamber 104 to the substrate transport process of vacuum chamber 102, in the internal volume 208 of vacuum chamber 102, vacuum chamber 104 and slit 106, pressure is balanced substantially.But, when closedown slit valve 112 when providing Sealing between the face 228A and the contact surface 230 of sidewall 202 of the first plate 224, effective sealing vacuum chamber 102.At this moment, the pressure lower than the pressure of internal volume 208 and vacuum chamber 104 can be decompressed to by aspiration vacuum chamber 102.If do not have aspiration vacuum chamber 104, the pressure so in vacuum chamber 104 can be shared with the internal volume 208 of slit 106.Therefore, although the contact between the face 228B of the second plate 226 and the contact surface 232 of sidewall 202 can be provided during the closing operation of slit 106, fluid-tight seal for operation and nonessential.Therefore, the second plate 226 comprises bumper assembly 212, promotes described bumper assembly abutting contact surface 232 in closing operation.

Fig. 2 B is the front view of the slit valve 112 of Fig. 2 A, and a mode of execution of bumper assembly 212 is shown.Bumper assembly 212 comprises multiple contact element, is such as placed in the first shock absorber hardware 213A on the major opposing side (i.e. parallel edge) of the face 228B of slit valve 112 and the second shock absorber hardware 213B.One or more groove 215 can be formed on the Zhong Huofu side, secondary side of the face 228A of slit valve 112.Groove 215 can be made to be shaped to connect with the surface (shown in Fig. 2 A) of shell 200, such as in the viewgraph of cross-section of Fig. 2 A unshowned passage 210B secondary side on.

Each first shock absorber hardware 213A and the second shock absorber hardware 213B can comprise the component extending the contact surface 232 (shown in Fig. 2 A) to contact sidewall 202 from the surface of the face 228B of the second plate 226.Each first shock absorber hardware 213A and the second shock absorber hardware 213B can comprise different materials or comprise differing material properties.In one embodiment, bumper assembly 212 comprises bi-material layers bumper assembly, and described bi-material layers bumper assembly has two shock absorber hardware of different nature.Such as, the comparable each first shock absorber hardware 213A of each second shock absorber hardware 213B more easily compresses.

In one embodiment, each first shock absorber hardware 213A can comprise durable, elasticity, heat-resisting elastomeric material, such as fluorinated polymer material, such as teflon (polytetrafluoroethylene; PTFE), such as material or polyether-ether-ketone (polyetheretherketone; PEEK).In one embodiment, each second shock absorber hardware 213B can comprise than the softer or more squeezable material of the first shock absorber hardware 213A.Each second shock absorber hardware 213B can comprise durable, elasticity, heat-resisting material, such as rubber or elastomeric material, i.e. fluoroelastomer material, such as material, or other FKM elastomer (as in ASTM D1418 define).In one embodiment, the first shock absorber hardware 213A comprises the first material, and described first material has the character larger than the second quality of second material of the second shock absorber hardware 213B.Described character can be hardness or compressibility.In one embodiment, the hardness of first material of the first shock absorber hardware 213A is about 60 Shore D (in Shore D hardness scale), and the hardness of second material of the second shock absorber hardware 213B is for about 75 Shore A (in Xiao A hardness scale) are to about 90 Shore A.

One or two comprised conductive material in first shock absorber hardware 213A and the second shock absorber hardware 213B, the contact surface 232 (shown in Fig. 2 A) of described conductive material contacts sidewall 202 to form electrical connection between this conductive material and this contact sidewall 202.Such as, when the face 228B of the second plate 226 is made up of conducting metal, and when the sidewall 202 (shown in Fig. 2 A) of shell 200 is made up of conductive metallic material, at least one had conduction property in first shock absorber hardware 213A and the second shock absorber hardware 213B is to provide electrical connection (such as, grounding connection).Therefore, if apply radio frequency (radio frequency during technique in vacuum chamber 102; RF), so slit valve 112 is grounded.

If need electrical properties in one or two in the first shock absorber hardware 213A and the second shock absorber hardware 213B, the elastomeric material with conductive filler so can be used.In one embodiment, each first shock absorber hardware 213A can comprise plastics or polymeric material, such as perfluor ether material, such as PFA (perfluoroalkoxy alkane; PFA).Conductive filler comprises the fiber of metal granule, conductive fiber or coated with conductive material.Conductive material comprises heating resisting metal material, such as nickel, stainless steel, gold, silver etc.Other conductive filler comprises carbon dust, carbon fiber, carbon nano-tube, carbon nanometer foam, carbon aerogels and above-mentioned combination, and described conductive filler can coated with conductive material being dispersed in polymeric material.In one embodiment, each first shock absorber hardware 213A can comprise the PFA with carbon fiber, and described carbon fiber scribbles metallic material (such as nickel).Therefore, the first shock absorber hardware 213A can be conduction to form the electrical connection between the face 228B of the second plate 226 and the contact surface 232 (shown in Fig. 2 A) of sidewall 202 in a closed position.

In one embodiment, each first shock absorber hardware 213A can across the face 228B of slit valve 112 and the second shock absorber hardware 213B alternately.In alternately configuring, across face 228B, the first shock absorber hardware 213A can be positioned laterally to close to the second shock absorber hardware 213B.In one embodiment, each first shock absorber hardware 213A and the second shock absorber hardware 213B can comprise length L, and each first shock absorber hardware 213A and the length L of the second shock absorber hardware 213B can be substantially identical.In other embodiments, the length L of the first shock absorber hardware 213A can be different from the length L of the second shock absorber hardware 213B.In one embodiment, the length L of comparable the second adjacent shock absorber hardware 213B of the length L of each first shock absorber hardware 213A is larger.

The length L of the second shock absorber hardware 213B and/or number can be selected based on surface area needed for the second shock absorber hardware 213B relative to the first shock absorber hardware 213A surface area.In one embodiment, the second shock absorber hardware 213B is about 8:5 with the ratio of the first shock absorber hardware 213A.As explained in more detail below, the ratio of the second shock absorber hardware 213B, number, length and/or location can reduce to determine needed for shaking during the closing operation of slit 106.

Fig. 2 C is second plate 226 of Fig. 2 A and the amplification partial cross section view of sidewall 202.As shown in cross section, the first shock absorber hardware 213A and the second shock absorber hardware 213B is oriented to the protruding face 228B away from the second plate 226.In addition, compared with the protrusion distance of the first shock absorber hardware 213A, the second shock absorber hardware 213B is from the larger distance of the face 228B projection of the second plate 226 (namely extending).First shock absorber hardware 213A and the gradual change protrusion distance of the second shock absorber hardware 213B allow the second shock absorber hardware 213B before the Contact of the first shock absorber hardware 213A and contact surface 232, contact the contact surface 232 of sidewall 202.Therefore, in the closing operation of slit 106, the second shock absorber hardware 213B touched sidewall 202 before the first shock absorber hardware 213A.

When the material of the second shock absorber hardware 213B more soft than the material of the first shock absorber hardware 213A submissiveer time, the second shock absorber hardware 213B absorbs the most of initial impact in closing operation.In addition, the first shock absorber hardware 213A aligns along the longitudinal shaft of slit valve 112 substantially with the second shock absorber hardware 213B.But based on different protrusion distance, the first shock absorber hardware 213A aligns substantially in the first plane different from second plane of the second shock absorber hardware 213B.Therefore, in one embodiment, each second shock absorber hardware 213B is used as shock absorber, and although the first shock absorber hardware 213A can compress to some extent, described first shock absorber hardware can be used as " the hard interdiction piece " of slit valve 112 to prevent metal and Metal Contact in closing operation.In closing operation, the second shock absorber hardware 213B can be compressed to the first shock absorber hardware 213A extended distance place or near, contact with at least part of between contact surface 232 to allow one or more first shock absorber hardware 213A.But, absorb the initial vibration in closing operation by the second shock absorber hardware 213B, thus greatly reduce the vibrations during closing operation in slit 106.

In some embodiments, the distance that can arrange in the contact surface 232 of sidewall 202 and the first shock absorber hardware 213A and the second shock absorber hardware 213B between one or two is to reduce the vibrations in slit 106 further.In one embodiment, all originate in the first distance D' and the second distance D of contact surface 232 and " represent that the vibration damper of slit valve 112 is in the open position to contact gap.First distance D' shows the distance between contact surface 232 and the second shock absorber hardware 213B.First distance D' provides a gap, and described gap allows vertical (Z-direction) of slit valve 112 in shell 200 (shown in Fig. 2 A) mobile and contactless between the second shock absorber hardware 213B and sidewall 202." show the distance between contact surface 232 and the first shock absorber hardware 213A, described distance is larger than the first distance D' for second distance D.First distance D' and second distance D " can the minimum displacement distance reducing slit valve 112 with transverse direction (X-direction); especially during the closing operation of slit 106, also minimize the first shock absorber hardware 213A and the contact between the second shock absorber hardware 213B and sidewall 202 simultaneously.Therefore, minimum range minimizes vibrations by the inertial force limited in slit valve 112 during the transverse shifting in closing operation.In one embodiment, the first distance D' can be about 1.5 millimeters (mm) to about 0.9mm, all 1.1mm according to appointment or larger.In one embodiment, second distance D " can be about 3.6mm to about 2.8mm, all 3.2mm according to appointment or larger.

In Fig. 2 A, Fig. 3 and Fig. 4, more specifically explain structure and the operating parameter of slit 106, described accompanying drawing is the side cross-sectional view of the slit 106 of the slit valve 112 illustrated in diverse location.By the bar 214 extended through hole 216, slit valve 112 is coupled to door actuator 218, described hole is through the bottom 206 of shell 200 and is formed.Door actuator 218 can be air cylinder or pneumatic linear actuator.In one embodiment, door actuator 218 is vertical orientation, two dynamic air cylinder.Sealing 220 (such as bellows device) can be settled around hole 216 to seal to be formed between the bottom 206 and door actuator 218 of shell 200, thus the sealed inside volume 208 of shell 200 is provided.

Door actuator 218 is configured to move between the raised position as illustrated in figs. 2 a and 3 of travelling slit valve 112 in the internal volume 208 of shell 200 and dipping as shown in Figure 4.In raised position, as Fig. 2 A and Fig. 3 finding, slit valve 112 is arranged in internal volume 208 to make the first plate 224 and the second plate 226 align with passage 210A, 210B respectively.In dipping, as seen in Figure 4, slit valve 112 is placed near the bottom of internal volume 208 of shell 200, and wherein the first plate 224 and the second plate 226 depart from passage 210A, 210B, are transferred through slit 106 to make substrate by passage 210A, 210B.As shown in Figure 3, slit valve 112 is also configured to sealing channel 210A, 210B when being in raised position, and this promotes the first plate 224 by use plate actuator 238 and the second plate 226 realizes against sidewall 202.Plate actuator 238 can be configured to transverse direction (X-direction) enlargement and contraction makes the first plate 224 and the second plate 226 relative to each other move in a controlled manner.

Slit 106 comprises the sensor 240 being coupled to controller 130 further.Sensor 240 can be configured to the position of the slit valve 112 determined in internal volume 208, and position information is supplied to controller 130.In one embodiment, sensor 240 can be included in the flag sensor being coupled to slit 106 near the position of the end stroke position of door actuator 218.

In general, flow control circuit 120 and controller 130 can use the reading of sensor 240 to determine should the acceleration of timing changing slit valve 112 and rate of deceleration and speed, makes slit valve 112 rapidly and mobilely between the raised and lowered positions reposefully can have rocking and shaking of reduction simultaneously.Controller 130 can control the expansion of slit valve 112 (i.e. plate actuator 238) further, has rocking and shaking of reduction to make the first plate 224 contact sidewall 202 reposefully with the second plate 226.

Fig. 5 A to Fig. 5 C is the partial schematic isometric view of the mode of execution of the second shock absorber hardware 213B that can use together with slit 106.Fig. 5 A illustrates I band 500A, and Fig. 5 B and Fig. 5 C illustrates P band, and one is solid P band 500B and another is hollow P band 500C.Each I band 500A and P band 500B and 500C comprises the main body 505 be made up of compressible elastomeric material disclosed herein.Each I band 500A and P band 500B and 500C also comprises at least one mounting portion 510 of the face 228B for being coupled to the second plate 226.Mounting portion 510 can be the material identical with main body 505, or mounting portion 510 can be made up of the material harder than the material of main body 505.In some embodiments, main body 505 can have opening 515.Opening 515 can increase the elastic property of main body 505 further, thus increases the shock absorption character of the second shock absorber hardware 213B.

Fig. 6 A to Fig. 6 C is the isometric view of the mode of execution that the second shock absorber hardware 213B the second shock absorber hardware 213B being coupled to the multiple Install and configure of the face 228B of the second plate 226 is shown.One or more fastening piece 600 can be settled to be coupled to the face 228B of the second plate 226 through mounting portion 510.In some embodiments, fastening piece 600 directly can be coupled to the mounting portion 510 of the second shock absorber hardware 213B.In other embodiments, can use mounting plate 605, described mounting plate is made up of the harder more durable material of the material than main body 505 and/or mounting portion 510.

Fig. 7 is the schematic diagram of a mode of execution of flow control circuit 120, and described flow control circuit is coupled to door actuator 218 and raises with selectivity and reduce the slit valve 112 of Fig. 2 A, Fig. 3 and Fig. 4.As shown in Figure 7, door actuator 218 is two dynamic vertical air cylinders 702, and is coupled to slit valve 112 by bar 214, and described vertical air cylinder has the piston 704 be placed in air cylinder internal volume 706.Sensor 240 is positioned at the terminal position of air cylinder 702 to detect the end when piston 704 moves closer to the stroke position in door actuator 218.

By air supply valve 710, first flow control valve 712 and second control valve 714 by clean dry air (clean dry air; CDA) supply 708 is fluidly coupled to air cylinder 702 so that air selectivity is supplied to air cylinder 702.In the illustrated embodiment, air supply valve 710 comprises the first state, and CDA supply 708 selectivity is coupled to the top 730 of air cylinder by described first state, and bottom 732 selectivity of air cylinder is coupled to venting gas appliance.In one embodiment, air supply valve 710 also comprises the second state, and CDA supply 708 selectivity is coupled to the bottom 732 of air cylinder by described second state, and top 730 selectivity of air cylinder is coupled to venting gas appliance.

Air supply valve 710 can be diverter valve, plunger valve, position control valve, pneumatic valve, solenoid valve or other suitable valve.First flow control valve 712 can control the flow rate that air enters the top 730 of air cylinder 702, provides the full flow rate flowed out from top 730 simultaneously.Similarly, second control valve 714 can control the flow rate that air enters the bottom 732 of air cylinder 702, provides the full flow rate flowed out from the bottom 732 of air cylinder simultaneously.Air is supplied to bottom to cause bar 214 to extend (to raise bar 214 and slit valve 112 (in z-direction), and air is supplied to top and causes bar 214 to retract (to reduce bar 214 and slit valve 112 (in z-direction).Control the conductivity that air cylinder 702 is vented and control acceleration and the deceleration of bar 214, and therefore control and move by slit valve 112 level of vibration caused.

Flow control circuit 120 comprises high conductivity exhaust line 716 and low conductivity exhaust line 722 further, by conduction switch 718, described exhaust line fluid is coupled to air cylinder 702, to allow that discharging air outward in the internal volume 706 of air cylinder 702 is to venting gas appliance 724.High conductivity line 716 or low conductivity line 722 selectivity are coupled to air cylinder 702 to change from the exhaust flow rate air cylinder 702 by conduction switch 718.In one embodiment, conducting switch 718 can be diverter valve, plunger valve, position control valve, pneumatic valve, solenoid valve or other suitable valve.Flow control circuit 120 optionally comprises the 3rd flow control valve 720, and described 3rd flow control valve is placed in low conductivity exhaust line 722.3rd flow control valve 720 can control by the flow rate of low conductivity exhaust line 722 to venting gas appliance to reduce further from the deflation rate air cylinder 702.The conductivity of high conductivity exhaust line 716 is larger than the conductivity of low conductivity exhaust line 722, and such as, goes out at least 80% greatly.In one embodiment, high conductivity exhaust line 716 has the flow rate being greater than about 650 public liter/min (L/min) to about 700L/min.In one embodiment, low conductivity exhaust line 722 has the flow rate being less than about 75L/min.

Flow control circuit 120 can be used for controlling the operation of slit 106, reduces vibrations to make in short time period vertical travelling slit valve 112 in a controlled manner.Flow control circuit 120 can accelerate, slow down and/or steadily stop and starting slit valve 112 movement to be minimized in the vibrations of the opening and closing operation period of slit 106.

Use traffic control loop 120 can make slit valve 112 steadily can arrive raised position with the speed slowed down, and does not cause shake the essence of slit 106 or rock to make slit valve 112.In one embodiment, compared with conventional single line vent systems, the vibrations put in slit 106 are reduced about 90% by flow control circuit 120.In another embodiment, by flow control circuit 120, slit valve 112 is slowed down, to make the gravity (g) the slit valve 112 pairs of slit 106 stopped in raised position being applied to many about 0.3g's.In one embodiment, slit valve 112 moves to raised position the cumulative time that 142mm expends from dipping is about 0.9 second.In another embodiment, by flow control circuit 120, slit valve 112 is slowed down, to make the power slit valve 112 pairs of slit 106 stopped in dipping being applied to many 0.4g's.In one embodiment, the cumulative time that slit valve 112 expends from raised position to the mobile 142mm that dips is about 0.8 second.

After arrival raised position, slit valve 112 can be operated and come closing passage 210A, 210B (shown in Fig. 2 A).Use gas (such as CDA) that the first plate 224 of slit valve 112 and the second plate 226 are expanded towards sidewall 202.By the second flow control circuit (not shown), gas is incorporated in plate actuator 238 (shown in Fig. 2 A), makes it be separated (namely towards the contact surface 232 (shown in Fig. 2 A) of sidewall 202 with mobile first plate 224 with the second plate 226.Although not shown, the second flow circuit can be configured to identical with flow control circuit 120 in one embodiment.

Referring to Fig. 2 A, before initial contact just between O shape ring and the contact surface 230 of 236 shells 200, and before the initial contact just between the second shock absorber hardware 213B and the contact surface 232 of shell 200, the first plate 224 and the second plate 226 move a segment distance relative to (in the X direction) away from each other.The mobile of the first plate 224 and the second plate 226 can be made subsequently to slow down, thus to make between O shape ring 236 and the contact surface 230 of shell 200 and can controlled exposure between the second shock absorber hardware 213B and the contact surface 232 of shell 200.In one embodiment, controller 130 can control to enter the flow rate of gas of plate actuator 238 to control the spreading rate (i.e. the transverse shifting of the first plate 224 and the second plate 226) of slit valve 112.The reduction flow rate provided by controller controls the first plate 224 and moves with the second plate 226 speed be separated, and the contact therefore between control O shape ring 236 and the contact surface 230 of shell 200 and between the second shock absorber hardware 213B and the contact surface 232 of shell 200.Such as, when the first plate 224 and the second plate 226 adjoin contact surface 230,232 respectively, flow rate of gas can be reduced to slow down the movement of the first plate 224 and the second plate 226, to make O shape ring 236 abutting contact surface 230 steadily compress, and bumper assembly 212 (specifically the second shock absorber hardware 213B) abutting contact surface 232 is steadily compressed.

Fig. 8 and Fig. 9 be illustrate the operation period of slit 106 time dependent force value and specifically when transverse shifting first plate 224 and the second plate 226 time plate actuator 238 operation period time dependent force value plotted curve.Fig. 8 illustrates that the plotted curve 800 of door sealing operation (closedown) and Fig. 9 illustrate a plotted curve 900 that Kaifeng (opening) operates.As shown in the figure, the force value of door sealing operation is about 0.04g's, and for the force value even less (0.02g's) of decapping operation.

By contrast, conventional slot valve assembly system is tested, and these systems produce the power of about 0.1g's or larger.Therefore, the mode of execution of slit 106 described herein is used to achieve vibrations reduction 60%.

Therefore, by being used alone or combinationally using bumper assembly 212 with flow control circuit 120 described herein, desirably reduce the vibrations of slit 106 operation period or rock.Therefore, while advantageously maintaining the quick opening and closing of slit valve 112, the pollution risk brought by the particle freely shaken during reducing process.In addition, mode of execution disclosed herein is advantageously allowed and is improved the slit valve operating time, and can not reduce the reliability of the mechanical part of slit 106.In addition, the slit 106 vertical air cylinder speed that advantageously utilizes single group valve to control on both directions up and down.

Although foregoing teachings is for mode of execution of the present utility model, other and further mode of execution can be designed when not deviating from basic categories of the present utility model, and determine category of the present utility model by claims above.

Claims (23)

1. a slit, is characterized in that, described slit comprises:

Shell, at least one the substrate delivery port that there is sidewall and formed in described sidewall, described shell has the internal volume limited by described sidewall;

Slit valve, is placed in described shell, and can be positioned to depart between the open position of described substrate delivery port and the closed position sealing described substrate delivery port; With

Bumper assembly, be placed on the edge at least one face of described slit valve, described bumper assembly comprises the first shock absorber hardware be made up of the first material and the second shock absorber hardware be made up of the second material, and described second material is different from described first material.

2. slit as claimed in claim 1, it is characterized in that, described bumper assembly comprises multiple first shock absorber hardware and multiple second shock absorber hardware.

3. slit as claimed in claim 2, is characterized in that, described first shock absorber hardware replaces with the parallel sides of described second shock absorber hardware along described.

4. slit as claimed in claim 2, is characterized in that, described first shock absorber hardware is from the second shock absorber hardware described in described projection first Distance geometry from described protruding second distance, and described second distance is larger than described first distance.

5. slit as claimed in claim 2, it is characterized in that, the second shock absorber hardware is about 8:5 with the ratio of the first shock absorber hardware.

6. slit as claimed in claim 1, it is characterized in that, described first shock absorber hardware from described projection in this first plane with described second shock absorber hardware from described projection the second plane, described first plane is different from described second plane.

7. slit as claimed in claim 1, it is characterized in that, described first material comprises the first hardness and described second material comprises the second hardness, and described in wherein said first hardness ratio, the second hardness is larger.

8. slit as claimed in claim 7, it is characterized in that, described bumper assembly comprises multiple first shock absorber hardware and multiple second shock absorber hardware, and described first shock absorber hardware and described second shock absorber hardware along described parallel sides alternately.

9. slit as claimed in claim 1, it is characterized in that, described bumper assembly comprises multiple first shock absorber hardware and multiple second shock absorber hardware, and at least one of each in described first shock absorber hardware or described second shock absorber hardware comprises conductive material.

10. a slit, described slit comprises:

Shell, at least one the substrate delivery port that there is sidewall and formed in described sidewall, described shell has the internal volume limited by described sidewall;

Slit valve, is placed in described shell, and can be positioned to depart between the open position of described substrate delivery port and the closed position sealing described substrate delivery port;

Actuator, is coupled to described slit valve, and can operate with described slit valve mobile between described open position and described closed position; With

Bumper assembly, be placed on the parallel edge at least one face of described slit valve, described bumper assembly comprises the first shock absorber hardware be made up of the first material and the second shock absorber hardware be made up of the second material, and described second material is different from described first material.

11. slit as claimed in claim 10, is characterized in that, described bumper assembly comprises multiple first shock absorber hardware and multiple second shock absorber hardware.

12. slit as claimed in claim 11, is characterized in that, the first shock absorber hardware is from the second shock absorber hardware described in described projection first Distance geometry from described protruding second distance, and described second distance is larger than described first distance.

13. slit as claimed in claim 11, is characterized in that, described first shock absorber hardware and described second shock absorber hardware are alternately.

14. slit as claimed in claim 11, it is characterized in that, along each described first shock absorber hardware in longitudinal shaft location of described slit valve, and each described first shock absorber hardware is along the first planar projections, and described first plane is different from the second plane of described second shock absorber hardware.

15. slit as claimed in claim 11, it is characterized in that, the second shock absorber hardware is about 8:5 with the ratio of the first shock absorber hardware.

16. slit as claimed in claim 10, it is characterized in that, described bumper assembly comprises multiple first shock absorber hardware and multiple second shock absorber hardware, and at least one of each in described first shock absorber hardware or described second shock absorber hardware comprises conductive material.

17. 1 kinds of slit, described slit comprises:

Shell, at least one the substrate delivery port that there is sidewall and formed in described sidewall, described shell has the internal volume limited by described sidewall;

Slit valve, is placed in described shell, and can be positioned to depart between the open position of described substrate delivery port and the closed position sealing described substrate delivery port; With

Multiple first shock absorber hardware and multiple second shock absorber hardware, described first shock absorber hardware and described second shock absorber hardware are placed on the edge at least one face of described slit valve along the longitudinal shaft of described slit valve.

18. slit as claimed in claim 17, it is characterized in that, each described first shock absorber hardware from described projection in this first plane with each described second shock absorber hardware from described projection the second plane, described first plane is different from described second plane.

19. slit as claimed in claim 17, is characterized in that, described first shock absorber hardware is from the second shock absorber hardware described in described projection first Distance geometry from described protruding second distance, and described second distance is larger than described first distance.

20. slit as claimed in claim 17, is characterized in that, described first shock absorber hardware and described second shock absorber hardware along described parallel sides alternately.

21. slit as claimed in claim 17, it is characterized in that, each described first shock absorber hardware comprises the material with the first hardness and each described second shock absorber hardware comprises the material with the second hardness, and described in wherein said first hardness ratio, the second hardness is larger.

22. slit as claimed in claim 17, is characterized in that, each described first shock absorber hardware comprises conductive material.

23. slit as claimed in claim 17, it is characterized in that, the second shock absorber hardware is about 8:5 with the ratio of the first shock absorber hardware.