CN204535846U - Measure the optical fiber grating sonic device of high-frequency transducer near-field acoustic pressure distribution - Google Patents
Measure the optical fiber grating sonic device of high-frequency transducer near-field acoustic pressure distribution Download PDFInfo
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Abstract
本实用新型公开了一种测量高频换能器近场声压分布的光纤光栅水听器。传统压电陶瓷或PVDF超声水听器空间分辨率低、对高频声波散射强。本实用新型包括D型标准单模光纤、聚合物脊型薄膜光波导布拉格光栅和聚合物涂覆填充层;D型标准单模光纤为侧面抛光形成填涂槽的氧化硅标准单模光纤;聚合物脊型薄膜光波导布拉格光栅覆盖D型标准单模光纤的填涂槽底面,聚合物涂覆填充层覆盖在聚合物脊型薄膜光波导布拉格光栅上;聚合物脊型薄膜光波导布拉格光栅包括聚合物脊型薄膜光波导和光栅刻线。本实用新型可解决高频换能器声场测量效率低、精度差、声压灵敏度低的问题,适用于高频声场的近场特性测量。
The utility model discloses an optical fiber grating hydrophone for measuring the near-field sound pressure distribution of a high-frequency transducer. Traditional piezoelectric ceramic or PVDF ultrasonic hydrophones have low spatial resolution and strong scattering of high-frequency sound waves. The utility model comprises a D-type standard single-mode optical fiber, a polymer ridge-shaped film optical waveguide Bragg grating and a polymer coating filling layer; the D-type standard single-mode optical fiber is a silicon oxide standard single-mode optical fiber whose side is polished to form a coating groove; polymerization The object ridge type thin film optical waveguide Bragg grating covers the bottom surface of the D-type standard single-mode optical fiber filling groove, and the polymer coating filling layer covers the polymer ridge type thin film optical waveguide Bragg grating; the polymer ridge type thin film optical waveguide Bragg grating includes Polymer Ridge Thin Film Optical Waveguides and Grating Scribes. The utility model can solve the problems of low measurement efficiency, poor precision and low sound pressure sensitivity of the high-frequency transducer sound field, and is suitable for near-field characteristic measurement of the high-frequency sound field.
Description
技术领域 technical field
本实用新型属于高频超声场测量领域,具体涉及一种测量高频换能器近场声压分布的光纤光栅水听器。 The utility model belongs to the field of high-frequency ultrasonic field measurement, in particular to an optical fiber grating hydrophone for measuring the near-field sound pressure distribution of a high-frequency transducer.
背景技术 Background technique
随着医疗超声的广泛使用,高频换能器得到越来越广泛的应用,对其声场特性尤其是近场声压分布的测量正引起人们的关注。高频换能器的声场特性通常是通过水听器进行检测,而其近场声压分布则通过水听器空间扫描获取不同位置的声信号(幅度、相位)后经数据处理获得。考虑到近场测量时需尽可能减少水听器对待测声场的扰动,一般要求水听器的有效尺寸应远小于声波波长的四分之一。另外,根据奈奎斯特采样定律,声压信号采集的准确性和有效性由单个波长内的采样数据点密度来决定,而采样点的密度取决于水听器的有效尺寸和空间扫描精度。综合考虑上述两个因素,减小水听器敏感元件的有效尺寸,方能精准测量绘制高频换能器的近场声压分布。传统的水听器通常采用压电陶瓷或者PVDF薄膜作为敏感元件制备而成,受限于设计制作工艺,其有效尺寸一般在几毫米到数十个毫米量级。对于工作频率在1MHz乃至更高频率的高频换能器,对应的声波波长在1.5mm以下,根据前述结论,传统水听器将无法精准绘制换能器的近场声压分布。 With the widespread use of medical ultrasound, high-frequency transducers are used more and more widely, and the measurement of their sound field characteristics, especially the near-field sound pressure distribution, is attracting people's attention. The sound field characteristics of high-frequency transducers are usually detected by hydrophones, and the near-field sound pressure distribution is acquired by spatial scanning of hydrophones to obtain acoustic signals (amplitude, phase) at different positions and then obtained by data processing. Considering the need to reduce the disturbance of the hydrophone to the sound field to be measured as much as possible during near-field measurement, it is generally required that the effective size of the hydrophone should be much smaller than a quarter of the wavelength of the sound wave. In addition, according to the Nyquist sampling law, the accuracy and effectiveness of sound pressure signal acquisition are determined by the density of sampling data points within a single wavelength, and the density of sampling points depends on the effective size and spatial scanning accuracy of the hydrophone. Considering the above two factors comprehensively and reducing the effective size of the sensitive element of the hydrophone, the near-field sound pressure distribution of the high-frequency transducer can be accurately measured and drawn. Traditional hydrophones are usually made of piezoelectric ceramics or PVDF films as sensitive elements, which are limited by the design and manufacturing process, and their effective size is generally on the order of a few millimeters to tens of millimeters. For high-frequency transducers with a working frequency of 1 MHz or higher, the corresponding sound wave wavelength is below 1.5 mm. According to the above conclusions, traditional hydrophones will not be able to accurately map the near-field sound pressure distribution of the transducer.
得益于光纤的尺寸小(标准单模或多模光纤的直径仅为0.1mm)、复用能力强等优势以及光纤光栅传感技术的迅猛发展,采用光纤光栅作为水听器的敏感元件,成为时下的研究和开发热点,有望解决小尺寸阵列和大规模复用等工程应用问题。其中,光纤布拉格光栅(FBG)是采用光刻技术在光纤纤芯处形成折射率周期分布的光栅,其光栅周期(栅距在微米量级)远小于高频声波的波长,因此采用FBG作为水听器的敏感元件能获得远高于传统压电水听器的空间分辨力和指向性,从而满足高频水听器近场测量对于空间分辨率和声场微扰的基本要求。但裸光纤光栅用作水听器往往存在声压灵敏度低的问题(仅0.007nm/MPa),因此在实际的工程应用中,通常是采用复杂的外部结构增敏技术和更高精度的波长解调技术;前者将增大水听器的尺寸从而降低空间分辨率和测量准确性,而后者将增加系统复杂度和检测难度。另外值得一提的是,采用外部结构增敏技术的FBG水听器只能作为单阵元的器件使用,失去了光纤可阵列化的固有优势。因此,通过内部结构增敏来提高水听器的声压灵敏度,有望实现高频换能器的近场声压分布的准确测量。 Thanks to the small size of the optical fiber (standard single-mode or multi-mode optical fiber diameter is only 0.1mm), strong multiplexing capability and the rapid development of fiber grating sensing technology, fiber grating is used as the sensitive element of the hydrophone. It has become a current research and development hotspot, and it is expected to solve engineering application problems such as small-scale arrays and large-scale multiplexing. Among them, the fiber Bragg grating (FBG) is a grating with a periodic distribution of refractive index formed at the fiber core by photolithography. The sensitive components of the earphone can obtain much higher spatial resolution and directivity than the traditional piezoelectric hydrophone, thus meeting the basic requirements for spatial resolution and sound field perturbation in the near-field measurement of high-frequency hydrophones. However, bare fiber gratings used as hydrophones often have the problem of low sound pressure sensitivity (only 0.007nm/MPa). Therefore, in practical engineering applications, complex external structure sensitization technology and higher-precision wavelength resolution are usually used. The former will increase the size of the hydrophone and thus reduce the spatial resolution and measurement accuracy, while the latter will increase the complexity of the system and the difficulty of detection. It is also worth mentioning that the FBG hydrophone using the external structure sensitization technology can only be used as a single-array device, which loses the inherent advantage of optical fiber arraying. Therefore, improving the sound pressure sensitivity of the hydrophone by sensitizing the internal structure is expected to achieve accurate measurement of the near-field sound pressure distribution of the high-frequency transducer.
光纤光栅水听器的声压灵敏度与氧化硅玻璃材料的杨氏模量有关,采用杨氏模量更小的材料对水听器敏感元件的内部结构进行增敏设计,有望提高声压灵敏度,改善上述存在的问题。高分子聚合物材料的杨氏模量(1GPa)相比氧化硅玻璃(70GPa)要小得多,同时它也是制作集成光波导器件的基本材料,具有成本低廉、光传输损耗低、折射率高、器件尺寸小、易于集成等优点。采用目前已经十分成熟的半导体薄膜等大规模光电器件集成工艺(甩膜、光刻、纳米压印等技术),可以制备出光学性能优良的聚合物微纳光波导及布拉格光栅波导结构。另一方面,采用侧面抛光技术制备出D型结构的光纤作为光波导和光传感的基元,也已得到成熟广泛的应用。若将聚合物薄膜波导布拉格光栅与D型结构光纤复合作为水听器的敏感元件,利用D型光纤的光导特性和倏逝波耦合效应以及聚合物光栅的高声压灵敏度优势,从而能够实现高频声场近场性能的精准测量,同时有望实现弱声高频信号探测领域的突破。 The sound pressure sensitivity of the fiber grating hydrophone is related to the Young's modulus of the silica glass material. Using materials with a smaller Young's modulus to enhance the sensitivity design of the internal structure of the hydrophone's sensitive components is expected to improve the sound pressure sensitivity. Improve the above existing problems. The Young's modulus (1GPa) of polymer materials is much smaller than that of silica glass (70GPa), and it is also the basic material for making integrated optical waveguide devices, with low cost, low optical transmission loss, and high refractive index. , small device size, easy integration and other advantages. Using the currently mature semiconductor film and other large-scale optoelectronic device integration processes (film throwing, photolithography, nanoimprinting, etc.), polymer micro-nano optical waveguides and Bragg grating waveguide structures with excellent optical properties can be prepared. On the other hand, optical fibers with D-shaped structure prepared by side polishing technology have also been mature and widely used as the basic unit of optical waveguides and optical sensors. If the polymer thin film waveguide Bragg grating and the D-structure optical fiber are combined as the sensitive element of the hydrophone, the advantages of the light-guiding characteristics and evanescent wave coupling effect of the D-type optical fiber and the high sound pressure sensitivity of the polymer grating can be used to achieve high Accurate measurement of the near-field performance of the high-frequency sound field, and at the same time is expected to achieve a breakthrough in the field of weak-sound high-frequency signal detection.
发明内容 Contents of the invention
本实用新型的目的在于针对传统的压电陶瓷或者PVDF超声水听器尺寸大、空间分辨率低、对高频声波散射强以及普通的裸光纤光栅水听器声压灵敏度低等问题,提供一种测量高频换能器近场声压分布的光纤光栅水听器,该光纤光栅水听器具有结构紧凑、空间分辨率高、声压灵敏度高和可阵列化等优势,可解决高频换能器声场测量时存在的效率低下、精度差、声压灵敏度低等一系列问题,适用于高频声场的近场特性测量。 The purpose of this utility model is to solve the problems of traditional piezoelectric ceramics or PVDF ultrasonic hydrophones with large size, low spatial resolution, strong scattering of high-frequency sound waves, and low sound pressure sensitivity of ordinary bare fiber grating hydrophones, etc., to provide a A fiber grating hydrophone for measuring the near-field sound pressure distribution of a high-frequency transducer. The fiber grating hydrophone has the advantages of compact structure, high spatial resolution, high sound pressure sensitivity, and arrayability. A series of problems such as low efficiency, poor precision, and low sound pressure sensitivity exist in the measurement of the sound field of the transducer, and it is suitable for the near-field characteristic measurement of the high-frequency sound field.
本实用新型是通过以下技术方案来实现的: The utility model is achieved through the following technical solutions:
本实用新型包括D型标准单模光纤、聚合物脊型薄膜光波导布拉格光栅和聚合物涂覆填充层;所述的D型标准单模光纤为侧面抛光形成填涂槽的氧化硅标准单模光纤;所述的聚合物脊型薄膜光波导布拉格光栅覆盖D型标准单模光纤的填涂槽底面,聚合物涂覆填充层覆盖在聚合物脊型薄膜光波导布拉格光栅上;聚合物脊型薄膜光波导布拉格光栅包括聚合物脊型薄膜光波导和光栅刻线;所述的光栅刻线通过紫外光曝光制作在聚合物脊型薄膜光波导中。 The utility model comprises a D-type standard single-mode optical fiber, a polymer ridge-type film optical waveguide Bragg grating and a polymer coating filling layer; Optical fiber; the polymer ridge-type thin-film optical waveguide Bragg grating covers the bottom surface of the D-type standard single-mode optical fiber, and the polymer coating filling layer covers the polymer ridge-type thin-film optical waveguide Bragg grating; the polymer ridge-type The thin-film optical waveguide Bragg grating includes polymer ridge-type thin-film optical waveguide and grating reticles; the grating reticles are made in the polymer ridge-type thin-film optical waveguide by ultraviolet light exposure.
所述填涂槽的长度为5~10mm,槽深为1~2μm。 The length of the filling and coating groove is 5-10 mm, and the groove depth is 1-2 μm.
所述聚合物涂覆填充层的材料为聚胺。 The material of the polymer coating filling layer is polyamine.
所述聚合物脊型薄膜光波导的长度为3~8mm,厚度为1~2μm。 The length of the polymer ridge film optical waveguide is 3-8 mm, and the thickness is 1-2 μm.
所述聚合物脊型薄膜光波导的材料可以为聚甲基丙烯酸甲酯、聚苯乙烯或聚碳酸酯。 The material of the polymer ridge film optical waveguide may be polymethyl methacrylate, polystyrene or polycarbonate.
所述的光栅刻线呈周期变化,周期为572~660nm,形成的光栅总长度为4~8mm。 The grating lines change periodically, the period is 572-660nm, and the total length of the formed grating is 4-8mm.
本实用新型具有的有益效果是:本实用新型具有结构紧凑、尺寸小、空间分辨力好、声压灵敏度高、可阵列化且阵元之间相幅一致性好的特点,适用于高频换能器的近场声压分布测量,可实现200kHz及以上的高频换能器的近场探测。 The beneficial effects of the utility model are: the utility model has the characteristics of compact structure, small size, good spatial resolution, high sound pressure sensitivity, arrayable and good phase-amplitude consistency between array elements, and is suitable for high-frequency switching Near-field sound pressure distribution measurement of transducers, which can realize near-field detection of high-frequency transducers of 200kHz and above.
附图说明 Description of drawings
图1为本实用新型的结构示意图。 Fig. 1 is the structural representation of the utility model.
图中:1、D型标准单模光纤,2、聚合物脊型薄膜光波导布拉格光栅,3、聚合物涂覆填充层。 In the figure: 1. D-type standard single-mode optical fiber, 2. Polymer ridge-type film optical waveguide Bragg grating, 3. Polymer coating filling layer.
具体实施方式 Detailed ways
下面结合附图及实施例对本实用新型作详细描述。 Below in conjunction with accompanying drawing and embodiment the utility model is described in detail.
如图1所示,测量高频换能器近场声压分布的光纤光栅水听器,由D型标准单模光纤1、聚合物脊型薄膜光波导布拉格光栅2和聚合物涂覆填充层3组成;D型标准单模光纤1为侧面抛光形成填涂槽的氧化硅标准单模光纤,填涂槽的长度为5~10mm,槽深(纤芯下抛深度)为1~2μm;聚合物脊型薄膜光波导布拉格光栅2覆盖D型标准单模光纤1的填涂槽底面;聚合物涂覆填充层3覆盖在聚合物脊型薄膜光波导布拉格光栅2上;聚合物涂覆填充层3的材料为聚胺,用于封装保护和进一步声增敏;聚合物脊型薄膜光波导布拉格光栅2由聚合物脊型薄膜光波导和光栅刻线组成;聚合物脊型薄膜光波导的长度为3~8mm,厚度为1~2μm,材料可以为聚甲基丙烯酸甲酯、聚苯乙烯或聚碳酸酯;光栅刻线通过紫外光曝光制作在聚合物脊型薄膜光波导中,呈周期变化,周期为572~660nm,形成的光栅总长度为4~8mm。 As shown in Figure 1, the fiber Bragg grating hydrophone for measuring the near-field sound pressure distribution of the high-frequency transducer consists of a D-type standard single-mode fiber 1, a polymer ridge-shaped thin-film optical waveguide Bragg grating 2 and a polymer-coated filling layer 3 components; D-type standard single-mode optical fiber 1 is a silicon oxide standard single-mode optical fiber whose side is polished to form a coating groove. The ridge type film optical waveguide Bragg grating 2 covers the bottom surface of the filling groove of the D-type standard single-mode fiber 1; the polymer coating filling layer 3 covers the polymer ridge type film optical waveguide Bragg grating 2; the polymer coating filling layer The material of 3 is polyamine, which is used for encapsulation protection and further acoustic sensitization; polymer ridge film optical waveguide Bragg grating 2 is composed of polymer ridge film optical waveguide and grating lines; the length of polymer ridge film optical waveguide The thickness is 3-8mm, and the thickness is 1-2μm. The material can be polymethyl methacrylate, polystyrene or polycarbonate; the grating lines are made in the polymer ridge-shaped film optical waveguide by ultraviolet light exposure, which is periodically changed. , the period is 572-660nm, and the total length of the formed grating is 4-8mm.
该测量高频换能器近场声压分布的光纤光栅水听器的工作原理如下: The working principle of the fiber grating hydrophone for measuring the near-field sound pressure distribution of the high-frequency transducer is as follows:
将该光纤光栅水听器的传感单元置于声场中,待测声信号垂直作用在聚合物涂覆填充层3上,使聚合物涂覆填充层3产生沿光纤轴向的振动分量。该振动分量有如下两方面的作用:首先,聚合物涂覆填充层3的受迫振动将直接作用于聚合物脊型薄膜光波导布拉格光栅2上,使得光栅栅距发生与待测声信号相同频率的变化;由于聚合物涂覆填充层3的杨氏模量比氧化硅玻璃小得多,因此产生的应变相对更大,由此产生的光栅反射谱的频移量也更大。其次,聚胺材料的轴向振动分量也会被D型标准单模光纤1的填涂槽的两个抛光端面反射,形成一个声学共振腔,该共振腔有助于对声信号进一步放大,其共振频率由共振腔的腔长和聚胺材料中的声速所决定。在光与光栅相互作用及光信号检测方面,入射光(宽带的连续光源)从光纤的一个端面耦合进来并沿着光纤传播到抛光处,即聚合物脊型薄膜光波导布拉格光栅2处,一部分的光能量将以倏逝光的形式耦合进入到聚合物脊型薄膜光波导布拉格光栅2中,随后被光栅反射后形成反射光谱;剩余光能量将从光纤的另一端面透过,形成透射光谱。由于透射光谱中含有比重较大的未与光栅相互作用的光信号,因此信噪比相对反射光谱要差,在实际应用中选择测试反射光谱的频移。在待测声信号的作用下,通过测量反射光谱信号的频移,即可获得待测声场对应的声压强度、相位以及振幅等信息。 The sensing unit of the fiber grating hydrophone is placed in the sound field, and the sound signal to be measured acts vertically on the polymer-coated filling layer 3, so that the polymer-coated filling layer 3 generates a vibration component along the fiber axis. This vibration component has the following two effects: First, the forced vibration of the polymer-coated filling layer 3 will directly act on the polymer ridge-shaped film optical waveguide Bragg grating 2, so that the grating pitch is the same as the acoustic signal to be measured Frequency change; since the Young's modulus of the polymer-coated filling layer 3 is much smaller than that of vitreous silica, the resulting strain is relatively larger, and the resulting frequency shift of the grating reflection spectrum is also larger. Secondly, the axial vibration component of the polyamine material will also be reflected by the two polished end faces of the D-type standard single-mode optical fiber 1 filling the coating groove, forming an acoustic resonant cavity, which helps to further amplify the acoustic signal, and its The resonant frequency is determined by the cavity length of the resonant cavity and the sound velocity in the polyamide material. In terms of the interaction between light and grating and optical signal detection, the incident light (broadband continuous light source) is coupled in from one end face of the optical fiber and propagates along the optical fiber to the polishing place, that is, the polymer ridge-type film optical waveguide Bragg grating 2, a part The light energy will be coupled into the polymer ridge film optical waveguide Bragg grating 2 in the form of evanescent light, and then reflected by the grating to form a reflection spectrum; the remaining light energy will pass through the other end of the fiber to form a transmission spectrum . Since the transmission spectrum contains a large proportion of optical signals that do not interact with the grating, the signal-to-noise ratio is worse than that of the reflection spectrum. In practical applications, the frequency shift of the reflection spectrum is chosen to be tested. Under the action of the sound signal to be measured, by measuring the frequency shift of the reflected spectral signal, information such as the sound pressure intensity, phase, and amplitude corresponding to the sound field to be measured can be obtained.
以下结合具体数值说明该光纤光栅水听器对高频换能器近场声压分布的测量效果。 The measurement effect of the fiber grating hydrophone on the near-field sound pressure distribution of the high-frequency transducer is described below in conjunction with specific numerical values.
若填涂槽的长度(即声共振腔腔长)为5mm,则对应的共振声波波长l为10mm,聚胺材料的声速c为2000m/s,则根据f=c/l计算可得共振频率f为200kHz。即,该光纤光栅水听器除了对任意频率的声信号有响应之外,对200kHz的声信号尤其敏感。 If the length of the filling groove (that is, the length of the acoustic resonance cavity) is 5mm, the corresponding resonance acoustic wave wavelength l is 10mm, and the sound velocity c of the polyamine material is 2000m/s, then the resonance frequency can be calculated according to f=c/l f is 200kHz. That is, the fiber grating hydrophone is particularly sensitive to the acoustic signal of 200 kHz, in addition to responding to the acoustic signal of any frequency.
上述具体实施方式用于解释说明本实用新型,而不是对本实用新型进行限制,在本实用新型的精神和权利要求的保护范围内,对本实用新型做出的任何修改和改变,都落入本实用新型的保护范围。 The above specific embodiments are used to explain the utility model, rather than to limit the utility model. Within the spirit of the utility model and the protection scope of the claims, any modifications and changes made to the utility model fall into the scope of the utility model. A new type of protection.
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