CN204424231U - Silicon slice corrosion hand basket - Google Patents

Abstract

A silicon wafer etching basket, comprising a basket substrate made of polytetrafluoroethylene, handles are provided on both sides of the basket substrate, and its special feature is: the gap between the top of the handle and the top surface of the slot The distance is 30cm-50cm; there are multiple slots with openings facing upwards on the base of the basket. The front and back of the slots are open and the inner bottom surface is concave arc-shaped. There are openings respectively; under the base body of the basket, there is an "L" type push plate made of polytetrafluoroethylene, and the flat plate and vertical plate of the "L" type push plate are attached to the outer bottom surface of the base body 1 of the basket respectively. and the bottom of the front end of the basket base 1, the push plate is provided with baffles corresponding to the gaps, the baffles are drawn upward from the opening, and locking screws are provided on the side plates of the push plate . The advantages are: safe operation, no acid splashing when put into the pickling tank; high strength and long service life.

Description

Silicon wafer etching basket

technical field

The utility model relates to a silicon chip corrosion basket used when corroding the surface of silicon chips in large quantities.

Background technique

During the growth process of single crystal silicon, there will be some other impurities or the instability of atomic arrangement, which will cause errors in the crystal arrangement, resulting in the generation of point defects and line defects. For such point defects and line defects, it is necessary to observe with the aid of microscopes, electron microscopes and other instruments. It is also possible to use the preferential etching method on the surface of silicon atoms, that is, place the silicon wafer horizontally in the pickling tank, and the defective parts (linear traces) can be observed with the naked eye. For large-diameter silicon wafers, it is inconvenient to take because of the large diameter of the silicon wafers. Putting the silicon wafers into the acid will easily cause acid liquid to splash and cause injury to operators. In addition, the silicon wafer has a large diameter and a large surface area, requiring more acid to completely treat the silicon surface, so the processing cost is high.

Contents of the invention

The purpose of the utility model is to solve the above-mentioned problems existing in the prior art, and provide a silicon wafer etching basket, which is safe in operation and low in processing cost when performing selective etching on silicon wafers.

The utility model is achieved in that:

A silicon wafer etching basket, comprising a basket substrate made of polytetrafluoroethylene, handles are provided on both sides of the basket substrate, and its special feature is: the gap between the top of the handle and the top surface of the slot The distance is 30cm-50cm; there are multiple slots with openings facing upwards on the base of the basket. The front and back of the slots are open and the inner bottom surface is concave arc-shaped. There are openings respectively; under the base body of the basket, there is an "L" type push plate made of polytetrafluoroethylene, and the flat plate and vertical plate of the "L" type push plate are attached to the outer bottom surface of the base body 1 of the basket respectively. and the bottom of the front end of the basket base 1, baffles respectively corresponding to the notches are provided on the push plate, and the baffles are drawn upward from the corresponding openings, and locks are provided on the vertical plate of the push plate. Tighten the screws.

A plurality of liquid holes are arranged on the base of the basket to enhance the circulation of the pickling solution and improve the pickling effect.

The utility model has the advantages of:

1. Since there are handles on both sides of the base of the basket, it can ensure safe operation.

2. Since the silicon wafer is vertically placed in the slot of the basket, the bottom surface of the slot is concave and arc-shaped, so that the silicon wafer can be placed stably, and the acid solution will not splash when it is placed in the pickling tank.

3. Adjust the lateral position of the baffle by sliding the push plate, and fix the push plate and the basket base together with the locking screws, so that the silicon wafers are placed in the corresponding space to prevent the silicon wafers from being damaged due to tipping.

4. Using acid-resistant materials, integrated design, high strength and long service life.

Description of drawings

Fig. 1 is a structural representation of the utility model.

In the figure: 1-basket base, 2-handle, 3-slot, 4-notch, 5-push plate, 6-baffle plate, 7-lock screw, 8-fluid hole.

Detailed ways

A silicon chip corrosion basket, comprising a basket substrate 1 made of polytetrafluoroethylene, handles 2 are provided on both sides of the basket substrate 1, the distance between the top of the handle 2 and the top surface of the slot 3 It is 30cm-50cm, and the present embodiment is 40cm. A plurality of slots 3 with upward openings are arranged on the basket base 1. The front and back of the slots 3 are open and the inner bottom surface is concave arc-shaped. The bottom of the basket base 1 is provided with a port 4 corresponding to each slot 3, and a plurality of liquid holes 8 are provided on the base 1 of the basket; The "L"-shaped push plate 5, the flat plate and vertical plate of the "L"-shaped push plate 5 are attached to the outer bottom surface of the basket base 1 and the bottom of the front end of the basket base 1 respectively, and the push plate 5 is respectively provided with The baffle plate 6 corresponding to each notch 4 is integrated with the push plate 5 and drawn upward from the corresponding opening 4 , and a locking screw 7 is provided on the vertical plate of the push plate 5 .

During operation, divide the silicon wafer and put it upright into the slot 3, then slide the push plate 5 to make the baffle plate 6 in a suitable position, tighten the locking screw 7, and then put it into the pickling tank. Handle the handle with acid gloves.

Claims (2)

1. A kind of silicon chip corrodes carrying basket, comprises the carrying basket substrate that material is polytetrafluoroethylene, and described carrying basket substrate both sides are provided with handle, it is characterized in that: between the top of described handle and the top surface of slot The distance is 30cm-50cm; there are multiple slots with openings facing upwards on the base of the basket. The front and back of the slots are open and the bottom surface is concave arc-shaped. Ports are provided respectively; an "L" push plate made of polytetrafluoroethylene is arranged under the base of the basket, and the flat plate and vertical plate of the "L" push plate are attached to the outer surface of the base (1) of the basket respectively. The bottom surface and the bottom of the front end of the basket base (1) are provided with baffles respectively corresponding to the notches on the push plate. The top surface of the push plate is provided with baffles respectively corresponding to the notches, and locking screws are provided on the side plates of the push plate. 2. The silicon wafer etching basket according to claim 1, characterized in that: a plurality of liquid holes are provided on the basket base.