CN204206127U - Distributed acoustic surface resonator and surface acoustic wave sensor-based system - Google Patents
Distributed acoustic surface resonator and surface acoustic wave sensor-based system Download PDFInfo
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- CN204206127U CN204206127U CN201420432053.6U CN201420432053U CN204206127U CN 204206127 U CN204206127 U CN 204206127U CN 201420432053 U CN201420432053 U CN 201420432053U CN 204206127 U CN204206127 U CN 204206127U
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- 238000010897 surface acoustic wave method Methods 0.000 title claims abstract description 20
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- 230000005540 biological transmission Effects 0.000 description 4
- 238000013461 design Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000005086 pumping Methods 0.000 description 3
- 241000216843 Ursus arctos horribilis Species 0.000 description 2
- 238000000205 computational method Methods 0.000 description 2
- 238000013016 damping Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000002310 reflectometry Methods 0.000 description 2
- 238000003491 array Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
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- HTCXJNNIWILFQQ-UHFFFAOYSA-M emmi Chemical compound ClC1=C(Cl)C2(Cl)C3C(=O)N([Hg]CC)C(=O)C3C1(Cl)C2(Cl)Cl HTCXJNNIWILFQQ-UHFFFAOYSA-M 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- 239000010453 quartz Substances 0.000 description 1
- 238000007634 remodeling Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
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Abstract
The utility model discloses a kind of distributed acoustic surface resonator and surface acoustic wave sensor-based system, distributed acoustic surface resonator, comprise the first antenna, matching network, reflecting grating, and interdigital transducer, at least described reflecting grating and interdigital transducer are arranged on piezoelectric substrate, described matching network comprises the optimum Match network be made up of at least one electric capacity and at least one inductance, described optimum Match network is also parallel with switching circuit, described switching circuit comprises several branch roads be in parallel, each branch road is provided with at least one electric capacity and/or inductance component, each branch road of described switching circuit is also provided with the switch for controlling this branch road conducting state.A kind of distributed acoustic surface resonator of the present utility model, when matching network accesses different branch roads, the corresponding centre frequency of corresponding resonator, by the branch road that control break accesses, can change the centre frequency of resonator, circuit structure is simple, takes up room little.
Description
Technical field
The utility model relates to a kind of surface acoustic wave sensor, specifically, relates to a kind of distributed acoustic surface resonator.
Background technology
Radio-frequency (RF) identification (RFID, Radio Frequency Identification) technology is a kind of technology applying noncontact tag, and it automatically identifies destination object by radiofrequency signal and obtains related data.Single port surface acoustic wave (SAW) resonator namely belong in radio frequency identification product an important component part, comprise interdigital transducer (IDT) and reflecting grating, reflecting grating is for forming an acoustic resonant cavity, and interdigital transducer is for carrying out sound-electric mutual conversion.
Surface acoustic wave roundtrip superposition between reflecting grating that IDT encourages at substrate surface, when external signal driving frequency f equals the centre frequency f0 of SAW resonator, standing wave generation resonance will be formed in resonant cavity, resonance frequency f0 is the key character parameter of SAW resonator, extraneous perturbation change (reactance value as matching network changes), can bring the change of output center frequency f 0, the change of centre frequency f0 directly reflects information measured.
In distributed passive wireless acoustic surface wave temperature-sensing system, be respectively used to measure different parameters, therefore centre frequency is different, and object is the problem in order to prevent centre frequency from unanimously producing frequency interferences.But have the transducer of multiple centre frequency, corresponding have sensor construction complexity, the problem that cost of manufacture is high.
The Chinese patent application of Patent publication No CN101877073A; relate to a kind of can the surface acoustic wave radio frequency electronic tag of field programming; every root reflection grizzly bar two ends of described surface acoustic wave electronic tag are equipped with contact, and do not connect mutually between these distributed reflection grizzly bars; Described surface acoustic wave electronic tag also comprises the integrated circuit (IC) chip with switching function of setting stacked with it, the contact one_to_one corresponding of the reflecting grating array of the external contact harmony surface wave electronic tag of this integrated circuit (IC) chip is arranged, and by field programming control switch circuit, the open circuit between any two contacts of control distributed reflection grating array is connected with short circuit.This utility model combines with existing integrated circuit (IC) design, utilize the switch arrays that existing integrated circuit realizes, change open circuit and the short circuit of each reflection grizzly bar of reflecting grating array, realize the field-programmable of surface acoustic wave radio frequency electronic tag, strengthen multifunctionality and the flexibility of its design.But, the surface acoustic wave radio frequency electronic tag of this kind of structure has following deficiency: 1, by being arranged on reflecting grating by integrated circuit (IC) chip, a reflecting grating can only monitor a center frequency value, when multiple center frequency value monitored by needs, needing to arrange multiple reflecting grating, needing the piezoelectric substrate of larger area for installing reflecting grating accordingly, improve the manufacturing cost of transducer on the one hand, add the volume of transducer in addition on the one hand, be not suitable for the miniature requirement of market to product.2, because sound wave bounce transmission between reflecting grating has energy loss, when arranging multiple reflecting grating, sonic transmissions can be very large to the energy loss of last reflecting grating, corresponding sensitivity and reliability all can reduce, and after signal suffers larger energy loss, its transmission range also shorter.
Summary of the invention
The utility model takies bulky technical problem to solve existing surface acoustic wave sensor, provides a kind of SAW (Surface Acoustic Wave) resonator type vibrating sensor.
In order to solve the problems of the technologies described above, the utility model is achieved by the following technical solutions:
A kind of distributed acoustic surface resonator, comprise the first antenna, matching network, reflecting grating, and interdigital transducer, at least described reflecting grating and interdigital transducer are arranged on piezoelectric substrate, described matching network comprises the optimum Match network be made up of at least one electric capacity and at least one inductance, described optimum Match network is also parallel with switching circuit, described switching circuit comprises several branch roads be in parallel, each branch road is provided with at least one electric capacity and/or inductance component, each branch road of described switching circuit is also provided with the switch for controlling this branch road conducting state.
Further, described switching circuit is field programming control switch circuit, and the switch of each branch road of described switching circuit accepts the control of field programming control logic device.
Further, described field programming control logic device comprises the external contact of n group, one group of external contact is all in series with in each branch road of described field programming control switch circuit, the conducting state of external contact respectively organized by described field programming control logic device by programming Control, wherein n is not less than the circuitry number included by described switching circuit.
Further, described distributed acoustic surface resonator correspondence 2 at most
nindividual centre frequency.
Wherein, described optimum Match network is in series by the first electric capacity (C1) and the first inductance (L1) and forms, the two ends of the series circuit that described field programming control switch circuit in parallel forms at described optimum Match network.
Or described optimum Match network is in series by the first electric capacity (C1) and the first inductance (L1) and forms, and described field programming control switch circuit in parallel is at the two ends of described first inductance (L1).
Moreover described optimum Match network is in series by the first electric capacity (C1) and the first inductance (L1) and forms, and described field programming control switch circuit in parallel is at the two ends of described first electric capacity (C1).
Based on above-mentioned a kind of distributed acoustic surface resonator, the utility model provides a kind of distributed acoustic surface wave passive wireless sensor system simultaneously, comprise reader, signal processing module, described reader is provided with the second antenna, also comprises the distributed acoustic surface resonator as described in any one of claim 1-7 claim.
Compared with prior art, advantage of the present utility model and good effect are: a kind of distributed acoustic surface resonator of the present utility model, by arranging switching circuit in matching network, described switching circuit comprises several branch roads be in parallel, each branch road is provided with at least one electric capacity and/or inductance component, when matching network accesses different branch roads, the corresponding centre frequency of corresponding resonator, by the branch road that control break accesses, the centre frequency of resonator can be changed, circuit easily realizes, circuit structure is simple, take up room little, without the need to increasing the area of piezoelectric substrate, be conducive to saving cost.
After reading the detailed description of the utility model execution mode by reference to the accompanying drawings, other features of the present utility model and advantage will become clearly.
Accompanying drawing explanation
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only embodiments more of the present utility model, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is a kind of example structure schematic diagram of the distributed acoustic surface resonator that the utility model proposes;
Fig. 2 is the functional-block diagram of the matching network of distributed acoustic surface resonator in Fig. 1;
Fig. 3 is the circuit theory diagrams of matching network in Fig. 2;
Fig. 4 is the equivalent circuit diagram of matching network circuit in Fig. 3;
Fig. 5 is resonator equivalent-circuit model figure in embodiment three;
Fig. 6 is resonator reflectivity and frequency dependence figure in embodiment four;
Fig. 7 is the block diagram that the utility model says a kind of embodiment of distributed acoustic surface wave passive wireless sensor system proposed.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, be clearly and completely described the technical scheme in the utility model embodiment, obviously, described embodiment is only the utility model part embodiment, instead of whole embodiments.Based on the embodiment in the utility model, those of ordinary skill in the art are not making the every other embodiment obtained under creative work prerequisite, all belong to the scope of the utility model protection.
Embodiment one, shown in Figure 1, present embodiments provide a kind of distributed acoustic surface resonator, comprise antenna 101, matching network 102, reflecting grating 103, and interdigital transducer 104, at least reflecting grating 103 and interdigital transducer 104 are arranged on piezoelectric substrate 105, shown in Figure 2, matching network 102 comprises the optimum Match network be made up of at least one electric capacity and at least one inductance, this optimum Match network is also parallel with switching circuit, described switching circuit comprises several branch roads be in parallel, each branch road is provided with at least one electric capacity and/or inductance component, each branch road of described switching circuit is also provided with the switch for controlling this branch road conducting state.The operation principle of the distributed acoustic surface resonator of the present embodiment is: antenna 101 receives pumping signal, the present embodiment sets up switching circuit on matching network, by the branch road that control break accesses, the centre frequency of resonator can be changed, and then change the centre frequency that matching network accesses to interdigital transducer signal, achieve a resonator and its centre frequency of change can be set flexibly, in distributed passive wireless acoustic surface wave temperature-sensing system, be respectively used to measure different parameters, avoid the problem that centre frequency produces frequency interferences, circuit easily realizes, circuit structure is simple, take up room little, without the need to increasing the area of piezoelectric substrate, be conducive to saving cost.It should be noted that, the reactance component that each branch road is arranged can be individually electric capacity or inductance, also can be the combination of electric capacity and inductance, the arranging number and can arbitrarily combine of reactance component, meets its place branch road and the center frequency value of matching network changes by fashionable meeting.Distributed acoustic surface resonator in the present embodiment can be one port resonator or two-port resonators.
Embodiment two, this gives a kind of a kind of preferred circuit of distributed acoustic surface resonator, wherein, switching circuit adopts field programming control switch circuit, shown in Figure 3, the switch of each branch road of described switching circuit accepts the control of field programming control logic device P1.
As a preferred embodiment, field programming control logic device P1 comprises the external contact of n group, 3 groups of external contacts are given in the present embodiment Fig. 3, be respectively (M1, M2), (N1, N2), (Q1, Q2), these 3 groups of contacts access in 3 branch roads of switching circuit respectively, also be, one group of external contact is all in series with in each branch road of switching circuit, field programming control logic device P1 respectively organizes the conducting state of external contact by programming Control, such as, when field programming control logic device P1 controls (M1, M2) during conducting, the electric capacity C2 of its place branch road is access in matching network, access leg is controlled different by field programming control logic device P1, and then change the reactance value of matching network, and then change the centre frequency of matching network, wherein n is not less than the circuitry number included by described switching circuit.The present embodiment adopts field programming control logic device P1, for semi-custom, full custom circuit design.Can not only comprise fairly simple PROM, EPROM, EEPROM by field programmable logic device (PLD), also have the various ways such as middle-and-high-ranking PLA, PAL, GAL, EPLD, CPLD, FPGA.Can field programmable logic device for what meet that user's designing requirement occurs, there is low-power consumption, high speed, miniaturization, multi-functional, low cost, flexible design, can the advantage such as unlimited field programming repeatedly.They can record write data, control the characteristic of each port, and the electricity realized between each port connects and disconnects.
The circuitry number n of switching circuit is not limited to the present embodiment and illustrates, the conducting state of the external contact of field programming control logic device P1 control break, and in theory, distributed acoustic surface resonator is correspondence 2 at most
nindividual centre frequency, achieve the very big Function Extension of this distributed SAW (Surface Acoustic Wave) resonator, by means of only setting up field programming control logic device P1 in matching network, inspection center's frequency of multiple center resonators can be realized, and then can Distributed Detection various physical parameters in theory, and between each resonator, centre frequency be independent of each other.
In the present embodiment, optimum Match network is in series by the first electric capacity C1 and the first inductance L 1 and forms, the two ends of the series circuit that field programming control switch circuit in parallel as shown in Figure 3 forms at described optimum Match network.Switching circuit and optimum Match network jointly form T-shaped matching network or are PI type matching network.
Or described optimum Match network is in series by the first electric capacity C1 and the first inductance L 1 and forms, and described field programming control switch circuit in parallel is at the two ends of described first inductance L 1.
Moreover described optimum Match network is in series by the first electric capacity C1 and the first inductance L 1 and forms, and described field programming control switch circuit in parallel is at the two ends of described first electric capacity C1.Above-mentioned two schemes does not illustrate in the drawings, and be the modification of the first scheme, those skilled in the art do not pay creative work and can derive when seeing the first scheme, therefore not to repeat here.
Embodiment three, this example illustrates the general principle of distributed acoustic surface resonator in embodiment two, and owing to being in series with electric capacity and/or inductance respectively in each branch road, no matter any branch road newly accesses in matching network, all can change the reactance value of matching network.This gives another and be incorporated to mode, shown in Figure 4, the equivalent capacitive reactance of this matching network is C ', equivalent inductive reactance L ', and the computational methods of the resistance value Zeq2 of matching network are:
（1）
（2）
The general near resonator equivalent-circuit model of resonator as shown in Figure 5, in Fig. 5, C and L is respectively dynamic capacity because piezoelectric substrate elasticity and inertia cause and inductance, R is the dynamic electric resistor that damping causes, and C0 is the direct capacitance of interdigital transducer, and R0 is lead resistance.The equivalent circuit parameter of resonator comprises R0, R, L, C, C0 five parameters.
The impedance of resonator is the computational methods of Zeq1:
（3）
Zeq is the equiva lent impedance that resonator Zeq1 and matching network Zeq2 form structure, is the total resistance of total, therefore,
（4）
Generally, the characteristic impedance of conventional transmission line is 50 Ω, the centre frequency of the corresponding S11 of match point, the frequency that namely amplitude is minimum, and reflection coefficient is:
（5）
The graph of a relation of S11 and frequency f can be obtained, the centre frequency of the corresponding S11 of frequency f 0 that amplitude is minimum by formula (1 ~ 5).In matching network, electric capacity in external sensor or inductance be incorporated to network, the equivalence value of C1 or L1 can be caused to change, affect the value of Zeq2, the final curve chart affecting S11, can be there is corresponding change in the centre frequency that the minimum frequency f 0 of amplitude is whole resonator structure, corresponding change can occur the centre frequency that the minimum frequency f 0 of amplitude is whole resonator structure.
Embodiment four, this gives a kind of concrete structure of distributed acoustic surface resonator, and wherein, piezoelectric substrate adopts the thick ST quartz wafer of 0.35mm.The resonance frequency of resonator is selected in the ISM band of 433.92MHz, finger width 3.68 microns, refers to that accounting for duty ratio is decided to be 0.5.
Interdigital transducer thickness 2500 Ethylmercurichlorendimide, wavelength 7.19 microns, sound aperture 358 microns, interdigital 101 right, reflecting grating number 200 is right, and interdigital transducer finger and reflecting grating finger width of being separated by is 1.79 microns.Resonator equivalent circuit parameter lead resistance R0 is 5 ohm, the dynamic electric resistor R that damping causes is 63.3 ohm, the dynamic inductance L that piezoelectric substrate elasticity and inertia cause is 4.511 × 105nH, the dynamic capacity C that piezoelectric substrate elasticity and inertia cause is 2.983 × 10-7 nF, the direct capacitance C0 of interdigital transducer is 7.0 × 10-4nF, when C1=1.2pF and L1=96.1nH is optimum Match network, L2 is 20nH, L3 is 85nH, L4 is 92nH, if field programming control logic device P1 branch road control bit has 3, represent the conducting state of each branch road from left to right, be respectively: 000 represents that each contact all disconnects, resonator central frequency is 433.90MHz, 100 represent connecting terminal (M1, M2) conducting, resonator central frequency is 433.84MHz, 010 represents contact (N1, N2) conducting, and resonator central frequency is 433.86MHz, 001 represents contact (Q1, Q2) conducting, and now resonator central frequency is 433.88MHz, in addition, can also calculate field programming control logic device P1 coding in addition when being 101, resonator central frequency is 433.82MHz, when coding is 110, resonator central frequency is 433.81MHz, and resonator reflectivity S11 and frequency relation as shown in Figure 6, can find out that each centre frequency is different, also would not produce interference mutually.
Embodiment five, based on a kind of distributed acoustic surface resonator in embodiment one to three, present embodiments provide a kind of distributed acoustic surface wave passive wireless sensor system, shown in Figure 7, comprise reader, signal processing module, described reader is provided with the second antenna 201, also involving vibrations covers disposed on sensor is equipped with the first antenna 101, both are by communicating, shown in Figure 2, vibrating sensor also comprises matching network 102, reflecting grating 103, and interdigital transducer 104, at least reflecting grating 103 and interdigital transducer 104 are arranged on piezoelectric substrate 105, shown in Figure 3, matching network 102 comprises the optimum Match network be made up of at least one electric capacity C1 and at least one inductance L 1, this optimum Match network is also parallel with switching circuit, switching circuit comprises several branch roads be in parallel, each branch road is provided with at least one electric capacity and/or inductance component, each branch road of described switching circuit is also provided with the switch for controlling this branch road conducting state.The operation principle of the ripple passive wireless sensor system of the present embodiment is: reader sends pumping signal by the second antenna 201 to vibrating sensor, vibrating sensor receives pumping signal by the first antenna 101, vibrating sensor sets up switching circuit on matching network, by the branch road that control break accesses, the centre frequency of resonator can be changed, and then change the centre frequency that matching network accesses to interdigital transducer signal, achieve a resonator and its centre frequency of change can be set flexibly.
Certainly; above-mentioned explanation is not to restriction of the present utility model; the utility model is also not limited in above-mentioned citing, the change that those skilled in the art make in essential scope of the present utility model, remodeling, interpolation or replacement, also should belong to protection range of the present utility model.
Claims (8)
1. a distributed acoustic surface resonator, comprise the first antenna, matching network, reflecting grating, and interdigital transducer, at least described reflecting grating and interdigital transducer are arranged on piezoelectric substrate, it is characterized in that, described matching network comprises the optimum Match network be made up of at least one electric capacity and at least one inductance, described optimum Match network is also parallel with switching circuit, described switching circuit comprises several branch roads be in parallel, each branch road is provided with at least one electric capacity and/or inductance component, each branch road of described switching circuit is also provided with the switch for controlling this branch road conducting state.
2. distributed acoustic surface resonator according to claim 1, is characterized in that, described switching circuit is field programming control switch circuit, and the switch of each branch road of described switching circuit accepts the control of field programming control logic device.
3. distributed acoustic surface resonator according to claim 2, it is characterized in that, described field programming control logic device comprises the external contact of n group, one group of external contact is all in series with in each branch road of described field programming control switch circuit, the conducting state of external contact respectively organized by described field programming control logic device by programming Control, wherein n is not less than the circuitry number included by described switching circuit.
4. distributed acoustic surface resonator according to claim 3, is characterized in that, described distributed acoustic surface resonator is correspondence 2 at most
nindividual centre frequency.
5. the distributed acoustic surface resonator according to any one of claim 2-4, it is characterized in that, described optimum Match network is in series by the first electric capacity (C1) and the first inductance (L1) and forms, the two ends of the series circuit that described field programming control switch circuit in parallel forms at described optimum Match network.
6. the distributed acoustic surface resonator according to any one of claim 2-4, it is characterized in that, described optimum Match network is in series by the first electric capacity (C1) and the first inductance (L1) and forms, and described field programming control switch circuit in parallel is at the two ends of described first inductance (L1).
7. the distributed acoustic surface resonator according to any one of claim 2-4, it is characterized in that, described optimum Match network is in series by the first electric capacity (C1) and the first inductance (L1) and forms, and described field programming control switch circuit in parallel is at the two ends of described first electric capacity (C1).
8. a surface acoustic wave sensor-based system, is characterized in that, comprises reader, signal processing module, described reader is provided with the second antenna, also comprises the distributed acoustic surface resonator as described in any one of claim 1-7 claim.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105322912A (en) * | 2014-08-02 | 2016-02-10 | 软控股份有限公司 | Distributed surface acoustic wave resonator and surface acoustic wave sensing system |
| CN112787623A (en) * | 2020-12-28 | 2021-05-11 | 天通瑞宏科技有限公司 | Surface acoustic wave filter |
-
2014
- 2014-08-02 CN CN201420432053.6U patent/CN204206127U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105322912A (en) * | 2014-08-02 | 2016-02-10 | 软控股份有限公司 | Distributed surface acoustic wave resonator and surface acoustic wave sensing system |
| WO2016019756A1 (en) * | 2014-08-02 | 2016-02-11 | 软控股份有限公司 | Distributed surface acoustic wave resonator and surface acoustic wave sensing system |
| CN105322912B (en) * | 2014-08-02 | 2018-02-09 | 软控股份有限公司 | Distributed acoustic surface resonator and surface acoustic wave sensor-based system |
| CN112787623A (en) * | 2020-12-28 | 2021-05-11 | 天通瑞宏科技有限公司 | Surface acoustic wave filter |
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