CN204125179U - Heating element and hydrogenation furnace - Google Patents
Heating element and hydrogenation furnace Download PDFInfo
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- CN204125179U CN204125179U CN201420578304.1U CN201420578304U CN204125179U CN 204125179 U CN204125179 U CN 204125179U CN 201420578304 U CN201420578304 U CN 201420578304U CN 204125179 U CN204125179 U CN 204125179U
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Abstract
本实用新型是关于一种发热体及氢化炉，涉及多晶硅生产技术领域，解决的问题是提高分段式发热体连接处的强度。主要采用的技术方案为：发热体，包括：相对设置的两个发热棒以及连接梁，至少一个发热棒包括：第一段发热棒、第二段发热棒以及第一固定护套。其中，第二段发热棒的另一端为用于与电极连接的连接端。第一段发热棒的另一端与连接梁连接。第一段发热棒的一端与第二段发热棒的一端连接，第一固定护套套设在第一段发热棒与第二段发热棒上，位于第一段发热棒的一端与第二段发热棒的一端的连接处，以提高第一段发热棒的一端与第二段发热棒的一端的连接处的强度，能够通过增加氢化炉内的发热棒高度以及气流流量，从而提高氢化炉的生产效率。
The utility model relates to a heating element and a hydrogenation furnace, and relates to the technical field of polysilicon production. The problem to be solved is to improve the strength of the junction of the segmented heating element. The technical solution mainly adopted is: heating body, including: two heating rods and connecting beams arranged oppositely, at least one heating rod includes: first section heating rod, second section heating rod and first fixed sheath. Wherein, the other end of the second section of the heating rod is a connecting end for connecting with the electrode. The other end of the heating rod of the first section is connected with the connecting beam. One end of the first section of the heating rod is connected to one end of the second section of the heating rod, and the first fixed sheath is set on the first section of the heating rod and the second section of the heating rod, and is located between one end of the first section of the heating rod and the second section The connection of one end of the heating rod to improve the strength of the connection between one end of the first section of the heating rod and one end of the second section of the heating rod can increase the height of the heating rod and the air flow in the hydrogenation furnace, thereby improving the hydrogenation furnace. Productivity.
Description
技术领域technical field
本实用新型涉及多晶硅生产技术领域，特别是涉及一种用于氢化炉中的发热体及氢化炉。The utility model relates to the technical field of polysilicon production, in particular to a heating element used in a hydrogenation furnace and a hydrogenation furnace.
背景技术Background technique
在生产多晶硅的生产技术中，改良西门子法为主要的生产方法。在生产多晶硅棒的过程中，将四氯化硅(SiCl4)气体和氢气(H2)按一定比例混合后通往氢化炉，位于氢化炉内的石墨发热体在在通电后产生热能，在炉内温度达1200～1250℃时，四氯化硅和氢气会发生以下反应：SiCl4+H2＝SiHCl3+HCl。In the production technology of polysilicon, the improved Siemens method is the main production method. In the process of producing polycrystalline silicon rods, silicon tetrachloride (SiCl 4 ) gas and hydrogen (H 2 ) gas are mixed in a certain proportion and then passed to the hydrogenation furnace. The graphite heating element in the hydrogenation furnace generates heat after being energized. When the temperature in the furnace reaches 1200-1250°C, silicon tetrachloride and hydrogen will undergo the following reaction: SiCl 4 +H 2 =SiHCl 3 +HCl.
其中，石墨发热体由于本身材质的物理性质，在加工长度较长的石墨发热体时，所需的费用较高。为了节省成本，在加工制造石墨发热体时，石墨发热体一般为分段式，采用上段发热棒与下段发热棒分段制造。上段发热棒的一端与下段发热棒的一端上均开有内螺纹孔，将上段发热棒的一端的内螺纹孔与下段发热棒的一端的内螺纹孔通过一双头螺栓连接，以将上段发热棒与下段发热棒连接固定。Among them, due to the physical properties of the graphite heating element itself, the cost required for processing a graphite heating element with a long length is relatively high. In order to save cost, when processing and manufacturing graphite heating elements, graphite heating elements are generally segmented, and the upper heating rod and the lower heating rod are used for segmental manufacturing. One end of the upper heating rod and one end of the lower heating rod are both provided with internal threaded holes, and the internal threaded hole at one end of the upper heating rod is connected with the internal threaded hole at one end of the lower heating rod through a stud bolt to connect the upper heating rod It is connected and fixed with the heating rod of the lower section.
上述的分段制造方法虽然节省了成本，发明人发现:位于上段发热棒与下段发热棒的连接处的强度较低，导致了：Although the above segmented manufacturing method saves costs, the inventors found that: the strength at the connection between the upper heating rod and the lower heating rod is relatively low, resulting in:
1、石墨发热体的上段发热棒与下段发热棒的连接处很容易折断，造成了不必要的损失。1. The connection between the upper heating rod and the lower heating rod of the graphite heating element is easy to break, causing unnecessary losses.
2、在设备运转时，石墨发热体的上段发热棒与下段发热棒的连接处在受到气流的冲击下很容易折断或产生裂纹，降低了石墨发热体的寿命、增加了生产的成本。2. When the equipment is running, the connection between the upper heating rod and the lower heating rod of the graphite heating element is easily broken or cracked under the impact of the airflow, which reduces the life of the graphite heating element and increases the production cost.
3、在设备运转时，石墨发热体能够承受的气流压力、流量有限，对于氢化炉的生产能力受到了约束，无法增加气流流量，导致降低了氢化炉的生产效率。3. When the equipment is in operation, the graphite heating element can withstand the limited airflow pressure and flow rate, which restricts the production capacity of the hydrogenation furnace and cannot increase the air flow rate, resulting in a reduction in the production efficiency of the hydrogenation furnace.
实用新型内容Utility model content
有鉴于此，本实用新型提供一种发热体及氢化炉，主要目的在于提高分段式发热体连接处的强度。In view of this, the utility model provides a heating element and a hydrogenation furnace, the main purpose of which is to improve the strength of the joint of the segmented heating element.
为达到上述目的，本实用新型主要提供如下技术方案：In order to achieve the above object, the utility model mainly provides the following technical solutions:
一方面。本实用新型的实施例提供一种发热体，包括：相对设置的两个发热棒以及连接相对设置的两个发热棒的连接梁，所述至少一个发热棒包括：on the one hand. An embodiment of the present utility model provides a heating element, comprising: two oppositely arranged heating rods and a connecting beam connecting the oppositely arranged two heating rods, the at least one heating rod includes:
第一段发热棒、第二段发热棒以及第一固定护套。其中，The first section of heating rod, the second section of heating rod and the first fixed sheath. in,
所述第二段发热棒的另一端为用于与电极连接的连接端。The other end of the second section of the heating rod is a connecting end for connecting with an electrode.
所述第一段发热棒的另一端与所述连接梁连接。The other end of the first heating rod is connected to the connecting beam.
所述第一段发热棒的一端与所述第二段发热棒的一端连接，所述第一固定护套套设在所述第一段发热棒与所述第二段发热棒上，位于所述第一段发热棒的一端与所述第二段发热棒的一端的连接处。One end of the first section of the heating rod is connected to one end of the second section of the heating rod, and the first fixed sheath is set on the first section of the heating rod and the second section of the heating rod, and is located at the The connection between one end of the first section of the heating rod and one end of the second section of the heating rod.
本实用新型的目的及解决其技术问题还可采用以下技术措施进一步实现。The purpose of the utility model and the solution to its technical problems can also be further realized by adopting the following technical measures.
可选的，前述的发热体，其中所述第一固定护套的内壁上设有第一内螺纹。Optionally, the aforementioned heating element, wherein the inner wall of the first fixing sheath is provided with a first internal thread.
所述第一段发热棒的一端设有与所述第一固定护套的第一内螺纹配合的第一外螺纹。One end of the first section of the heating rod is provided with a first external thread that cooperates with the first internal thread of the first fixing sheath.
所述第二段发热棒的一端设有与所述第一固定护套的第一内螺纹配合的第二外螺纹。One end of the second section of the heating rod is provided with a second external thread that cooperates with the first internal thread of the first fixing sheath.
所述第一外螺纹与所述第二外螺纹分别锁定在所述第一内螺纹内。The first external thread and the second external thread are respectively locked in the first internal thread.
可选的，前述的发热体，其中所述第二段发热棒一端的直径值为D1。Optionally, in the aforementioned heating element, the diameter of one end of the second section of the heating rod is D 1 .
所述第二段发热棒另一端的直径值为D2。The diameter of the other end of the second heating rod is D 2 .
D2>D1。D 2 >D 1 .
可选的，前述的发热体，其中还包括：Optionally, the aforementioned heating element also includes:
第二固定护套。Second fixed sheath.
所述第二固定护套的内壁上设有第二内螺纹。A second internal thread is provided on the inner wall of the second fixing sheath.
所述二段发热棒的另一端设有与所述第二固定护套的第二内螺纹配合的第三外螺纹。The other end of the second section of the heating rod is provided with a third external thread that cooperates with the second internal thread of the second fixed sheath.
所述第三外螺纹从所述第二固定护套的第二内螺纹一端锁定在所述第二内螺纹内。The third external thread is locked into the second internal thread from one end of the second internal thread of the second fixing sheath.
所述第二固定护套的第二内螺纹另一端用于与所述电极的螺纹柱锁定。The other end of the second internal thread of the second fixing sheath is used for locking with the threaded column of the electrode.
可选的，前述的发热体，其中连接的所述第一段发热棒与所述第二段发热棒的总高度在2.1m～2.3m之间。Optionally, in the aforementioned heating element, the total height of the connected first section of heating rods and the second section of heating rods is between 2.1m and 2.3m.
所述第一段发热棒与所述第二段发热棒的直径在45mm～60mm之间。The diameters of the first heating rod and the second heating rod are between 45 mm and 60 mm.
可选的，前述的发热体，其中所述第一固定护套的长度在8～10cm。Optionally, the aforementioned heating element, wherein the length of the first fixing sheath is 8-10 cm.
可选的，前述的发热体，其中所述发热棒为实心石墨发热棒或空心石墨发热棒。Optionally, the aforementioned heating element, wherein the heating rod is a solid graphite heating rod or a hollow graphite heating rod.
另一方面，本实用新型的实施例提供一种氢化炉包括：On the other hand, the embodiment of the utility model provides a hydrogenation furnace comprising:
发热体以及炉体。Heating body and furnace body.
所述发热体包括：相对设置的两个发热棒以及连接相对设置的两个发热棒的连接梁，The heating body includes: two oppositely arranged heating rods and a connecting beam connecting the oppositely arranged two heating rods,
其中所述至少一个发热棒包括：第一段发热棒、第二段发热棒以及第一固定护套。其中，Wherein the at least one heating rod includes: a first section of heating rod, a second section of heating rod and a first fixed sheath. in,
所述第二段发热棒的另一端为用于与电极连接的连接端。The other end of the second section of the heating rod is a connecting end for connecting with an electrode.
所述第一段发热棒的另一端与所述连接梁连接。The other end of the first heating rod is connected to the connecting beam.
所述第一段发热棒的一端与所述第二段发热棒的一端连接，所述第一固定护套套设在所述第一段发热棒与所述第二段发热棒上，位于所述第一段发热棒的一端与所述第二段发热棒的一端的连接处。One end of the first section of the heating rod is connected to one end of the second section of the heating rod, and the first fixed sheath is set on the first section of the heating rod and the second section of the heating rod, and is located at the The connection between one end of the first section of the heating rod and one end of the second section of the heating rod.
所述第二段发热棒另一端的连接端与所述炉体的电极连接。The connecting end of the other end of the heating rod of the second section is connected to the electrode of the furnace body.
借由上述技术方案，本实用新型发热体及氢化炉至少具有下列优点：By virtue of the above technical solutions, the utility model heating element and hydrogenation furnace have at least the following advantages:
一、本实用新型提出的发热体的发热棒包括第一段发热棒、第二段发热棒以及第一固定护套。所述第一段发热棒的一端与所述第二段发热棒的一端连接，所述第一固定护套套设在所述第一段发热棒的一端与所述第二段发热棒的一端的连接处，以提高所述第一段发热棒的一端与所述第二段发热棒的一端的连接处的强度，降低了所述发热棒的折断率，节省了生产成本，同时增加了氢化炉的使用寿命。1. The heating rod of the heating element proposed by the utility model includes a first section of heating rod, a second section of heating rod and a first fixed sheath. One end of the first section of heating rod is connected to one end of the second section of heating rod, and the first fixed sheath is set on one end of the first section of heating rod and one end of the second section of heating rod to increase the strength of the connection between one end of the first section of the heating rod and one end of the second section of the heating rod, reduce the breakage rate of the heating rod, save production costs, and increase hydrogenation service life of the furnace.
二、本实用新型提出的发热体的发热棒包括第一段发热棒、第二段发热棒以及第一固定护套。所述第一段发热棒的一端与所述第二段发热棒的一端连接，所述第一固定护套套设在所述第一段发热棒的一端与所述第二段发热棒的一端的连接处，以提高所述第一段发热棒的一端与所述第二段发热棒的一端的连接处的强度，使所述发热棒能够承受更大承载力，从而能够通过增加氢化炉内的发热棒高度而提高单位时间发热量，再通过提高氢化炉内的气流流量提高氢化炉的生产效率。2. The heating rod of the heating element proposed by the utility model includes a first section of heating rod, a second section of heating rod and a first fixed sheath. One end of the first section of heating rod is connected to one end of the second section of heating rod, and the first fixed sheath is set on one end of the first section of heating rod and one end of the second section of heating rod to improve the strength of the connection between one end of the first section of the heating rod and one end of the second section of the heating rod, so that the heating rod can bear a greater bearing capacity, thereby being able to increase the strength of the hydrogenation furnace by increasing the The height of the heating rod can increase the calorific value per unit time, and then the production efficiency of the hydrogenation furnace can be improved by increasing the air flow in the hydrogenation furnace.
上述说明仅是本实用新型技术方案的概述，为了能够更清楚了解本实用新型的技术手段，并可依照说明书的内容予以实施，以下以本实用新型的较佳实施例并配合附图详细说明如后。The above description is only an overview of the technical solution of the utility model. In order to understand the technical means of the utility model more clearly and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiment of the utility model with accompanying drawings. back.
附图说明Description of drawings
图1是本实用新型的实施例一提供的一种发热体的结构示意图；Fig. 1 is a schematic structural view of a heating element provided by Embodiment 1 of the present invention;
图2是本实用新型的实施例二提供的一种氢化炉的结构示意图。Fig. 2 is a schematic structural view of a hydrogenation furnace provided by Embodiment 2 of the present invention.
具体实施方式Detailed ways
为更进一步阐述本实用新型为达成预定实用新型目的所采取的技术手段及功效,以下结合附图及较佳实施例，对依据本实用新型提出的发热体及氢化炉其具体实施方式、结构、特征及其功效，详细说明如后。在下述说明中，不同的“一实施例”或“实施例”指的不一定是同一实施例。此外，一或多个实施例中的特定特征、结构、或特点可由任何合适形式组合。In order to further elaborate the technical means and effects that the utility model adopts for reaching the predetermined utility model purpose, below in conjunction with the accompanying drawings and preferred embodiments, the specific implementation, structure, Features and their functions are described in detail below. In the following description, different "one embodiment" or "embodiment" do not necessarily refer to the same embodiment. Furthermore, the particular features, structures, or characteristics of one or more embodiments may be combined in any suitable manner.
如图1所示，本实用新型的实施例一提出的一种发热体包括：相对设置的两个发热棒10以及连接相对设置的两个发热棒10的连接梁20，所述至少一个发热棒10包括：第一段发热棒1、第二段发热棒2以及第一固定护套3。其中，所述第二段发热棒2的另一端为用于与电极连接的连接端。所述第一段发热棒1的另一端与所述连接梁20连接。所述第一段发热棒1的一端与所述第二段发热棒2的一端连接，所述第一固定护套3套设在所述第一段发热棒1与所述第二段发热棒2上，位于所述第一段发热棒1的一端与所述第二段发热棒2的一端的连接处。As shown in Figure 1, a heating element proposed by Embodiment 1 of the present utility model includes: two heating rods 10 arranged oppositely and a connecting beam 20 connecting the two heating rods 10 arranged oppositely, the at least one heating rod 10 includes: the first section of heating rod 1 , the second section of heating rod 2 and the first fixed sheath 3 . Wherein, the other end of the second section of the heating rod 2 is a connecting end for connecting with an electrode. The other end of the heating rod 1 of the first section is connected to the connecting beam 20 . One end of the first section of the heating rod 1 is connected to one end of the second section of the heating rod 2, and the first fixed sheath 3 is sleeved between the first section of the heating rod 1 and the second section of the heating rod 2, located at the connection between one end of the first section of heating rod 1 and one end of the second section of heating rod 2.
本实用新型实施例一提出的发热体的发热棒包括第一段发热棒、第二段发热棒以及第一固定护套。所述第一段发热棒的一端与所述第二段发热棒的一端连接，所述第一固定护套套设在所述第一段发热棒的一端与所述第二段发热棒的一端的连接处，以提高所述第一段发热棒的一端与所述第二段发热棒的一端的连接处的强度。使所述发热棒能够承受更大的承载力，从而能够通过增加氢化炉内的发热棒高度而提高单位时间发热量，再通过提高氢化炉内的气流流量提高氢化炉的生产效率。The heating rod of the heating element proposed in Embodiment 1 of the utility model includes a first section of heating rod, a second section of heating rod and a first fixed sheath. One end of the first section of heating rod is connected to one end of the second section of heating rod, and the first fixed sheath is set on one end of the first section of heating rod and one end of the second section of heating rod to increase the strength of the connection between one end of the first section of the heating rod and one end of the second section of the heating rod. The heating rod can bear a larger bearing capacity, so that the heating value per unit time can be increased by increasing the height of the heating rod in the hydrogenation furnace, and the production efficiency of the hydrogenation furnace can be improved by increasing the air flow in the hydrogenation furnace.
进一步的，如图1所示，本实用新型的一实施例中所述的发热体还提供如下的实施方式，其中所述第一固定护套3的内壁上设有第一内螺纹。所述第一段发热棒1的一端设有与所述第一固定护套3的第一内螺纹配合的第一外螺纹。所述第二段发热棒2的一端设有与所述第一固定护套3的第一内螺纹配合的第二外螺纹。所述第一外螺纹与所述第二外螺纹分别锁定在所述第一内螺纹内，使得所述第一固定护套能够通过螺纹的配合锁定在所述第一段发热棒与所述第二段的发热棒的连接处，便于组装。Further, as shown in FIG. 1 , the heating element described in an embodiment of the present invention also provides the following implementation, wherein the inner wall of the first fixing sheath 3 is provided with a first internal thread. One end of the heating rod 1 of the first section is provided with a first external thread matched with the first internal thread of the first fixing sheath 3 . One end of the second section of the heating rod 2 is provided with a second external thread that cooperates with the first internal thread of the first fixing sheath 3 . The first external thread and the second external thread are respectively locked in the first internal thread, so that the first fixing sheath can be locked between the first section of the heating rod and the first section of the heating rod through the cooperation of the threads. The connection of the two-stage heating rod is easy to assemble.
进一步的，为了增加所述发热棒的使用寿命，如图1所示，本实用新型的一实施例中所述的发热体还提供如下的实施方式，其中所述第二段发热棒2一端的直径值为D1。所述第二段发热棒2另一端的直径值为D2。D2>D1。在氢化炉运转过程中，由于反应温度高，氢化炉的电极须进行水冷以维持电极的温度在30℃以下，以保证电极不因温度过高而受损。位于与电极连接的所述第二段发热棒的另一端的温度的温差值较大，应力不均匀，很容易粉化、变细。将所述第二段发热棒另一端的直径增加，可以提高发热棒的使用寿命，运行时间由现有的500h可提高至960h。Further, in order to increase the service life of the heating rod, as shown in Figure 1, the heating element described in an embodiment of the present invention also provides the following implementation, wherein the second section of the heating rod 2 at one end The diameter value is D 1 . The diameter of the other end of the second heating rod 2 is D 2 . D 2 >D 1 . During the operation of the hydrogenation furnace, due to the high reaction temperature, the electrodes of the hydrogenation furnace must be water-cooled to keep the temperature of the electrodes below 30°C, so as to ensure that the electrodes will not be damaged due to excessive temperature. The temperature difference at the other end of the second section of the heating rod connected to the electrode is relatively large, the stress is uneven, and it is easy to pulverize and become thinner. Increasing the diameter of the other end of the heating rod in the second section can increase the service life of the heating rod, and the running time can be increased from the existing 500h to 960h.
进一步的，为了增加所述发热棒的使用寿命，如图1所示，本实用新型的一实施例中所述的发热体还提供如下的实施方式，其中还包括：第二固定护套4。所述第二固定护套4的内壁上设有第二内螺纹。所述二段发热棒2的另一端设有与所述第二固定护套4的第二内螺纹配合的第三外螺纹。所述第三外螺纹从所述第二固定护套4的第二内螺纹一端锁定在所述第二内螺纹内。所述第二固定护套4的第二内螺纹另一端用于与所述电极的螺纹柱锁定。所述第二固定套能够加固所述第二段发热棒另一端的强度。Further, in order to increase the service life of the heating rod, as shown in FIG. 1 , the heating element described in an embodiment of the present utility model also provides the following implementation, which also includes: a second fixing sheath 4 . The inner wall of the second fixing sheath 4 is provided with a second internal thread. The other end of the two-stage heating rod 2 is provided with a third external thread matched with the second internal thread of the second fixing sheath 4 . The third external thread is locked into the second internal thread from one end of the second internal thread of the second fixing sheath 4 . The other end of the second inner thread of the second fixing sheath 4 is used to lock with the threaded column of the electrode. The second fixing sleeve can reinforce the strength of the other end of the second section of the heating rod.
具体的，为了提高发热棒的发热量，本实用新型的一实施例中所述的发热体还提供如下的实施方式，其中连接的所述第一段发热棒与所述第二段发热棒的总高度在2.1m～2.3m之间。所述第一段发热棒与所述第二段发热棒的直径在45mm～60mm之间。使得安装有本实用新型提供的发热体的氢化炉的单位时间发热量较高，处理SiCl4和H2的混合气体量由现有的3～5t/h提高至8.5～9t/h。Specifically, in order to increase the calorific value of the heating rod, the heating element described in an embodiment of the present invention also provides the following implementation mode, wherein the connected first segment of the heating rod and the second segment of the heating rod The total height is between 2.1m and 2.3m. The diameters of the first heating rod and the second heating rod are between 45 mm and 60 mm. The hydrogenation furnace installed with the heating element provided by the utility model has a higher calorific value per unit time, and the amount of mixed gas for processing SiCl 4 and H 2 is increased from the existing 3-5 t/h to 8.5-9 t/h.
具体的，本实用新型的一实施例中所述的发热体还提供如下的实施方式，其中所述第一固定护套的长度在8～10cm。Specifically, the heating element described in an embodiment of the present utility model also provides the following implementation manner, wherein the length of the first fixing sheath is 8-10 cm.
具体的，本实用新型的一实施例中所述的发热体还提供如下的实施方式，其中所述发热棒为实心石墨发热棒或空心石墨发热棒。在所述发热棒为实心石墨发热棒时，可以节省制造成本。Specifically, the heating element described in an embodiment of the present invention also provides the following implementation, wherein the heating rod is a solid graphite heating rod or a hollow graphite heating rod. When the heating rod is a solid graphite heating rod, the manufacturing cost can be saved.
具体的，本实用新型的一实施例中所述的发热体还提供如下的实施方式，如图1所示，其中所述发热棒10通过螺母5锁定在所述连接梁20上。Specifically, the heating element described in an embodiment of the present invention also provides the following implementation, as shown in FIG. 1 , wherein the heating rod 10 is locked on the connecting beam 20 through a nut 5 .
如图2所示，本实用新型实施例二提供的一种氢化炉包括：发热体101以及炉体100。所述发热体101包括：相对设置的两个发热棒以及连接相对设置的两个发热棒的连接梁，其中所述至少一个发热棒包括：第一段发热棒、第二段发热棒以及第一固定护套。其中，所述第二段发热棒的另一端为用于与电极连接的连接端。所述第一段发热棒的另一端与所述连接梁连接。所述第一段发热棒的一端与所述第二段发热棒的一端连接，所述第一固定护套套设在所述第一段发热棒与所述第二段发热棒上，位于所述第一段发热棒的一端与所述第二段发热棒的一端的连接处。所述第二段发热棒另一端的连接端与所述炉体100的电极连接，以形成电极回路，产生热量。其中，所述发热体的数量一般采用多个，具体数量根据炉体的大小而定。As shown in FIG. 2 , a hydrogenation furnace provided by Embodiment 2 of the present invention includes: a heating element 101 and a furnace body 100 . The heating body 101 includes: two oppositely arranged heating rods and a connecting beam connecting the oppositely arranged two heating rods, wherein the at least one heating rod includes: a first segment of heating rods, a second segment of heating rods and a first segment of heating rods. Secure the sheath. Wherein, the other end of the second section of the heating rod is a connecting end for connecting with an electrode. The other end of the first heating rod is connected to the connecting beam. One end of the first section of the heating rod is connected to one end of the second section of the heating rod, and the first fixed sheath is set on the first section of the heating rod and the second section of the heating rod, and is located at the The connection between one end of the first section of the heating rod and one end of the second section of the heating rod. The connecting end of the other end of the second heating rod is connected to the electrode of the furnace body 100 to form an electrode circuit to generate heat. Wherein, the number of the heating elements is generally multiple, and the specific number depends on the size of the furnace body.
本实用新型实施例二提供的氢化炉的发热棒包括第一段发热棒、第二段发热棒以及第一固定护套。所述第一段发热棒的一端与所述第二段发热棒的一端连接，所述第一固定护套套设在所述第一段发热棒的一端与所述第二段发热棒的一端的连接处，以提高所述第一段发热棒的一端与所述第二段发热棒的一端的连接处的强度，降低了所述发热棒的折断率，增加了氢化炉的使用寿命，节省了生产成本。The heating rod of the hydrogenation furnace provided by the second embodiment of the utility model includes a first-section heating rod, a second-section heating rod and a first fixed sheath. One end of the first section of heating rod is connected to one end of the second section of heating rod, and the first fixed sheath is set on one end of the first section of heating rod and one end of the second section of heating rod to increase the strength of the connection between one end of the first section of the heating rod and one end of the second section of the heating rod, reduce the breakage rate of the heating rod, increase the service life of the hydrogenation furnace, and save production cost.
具体的所述氢化炉为多晶硅氢化炉。Specifically, the hydrogenation furnace is a polysilicon hydrogenation furnace.
以上所述，仅是本实用新型的较佳实施例而已，并非对本实用新型作任何形式上的限制，依据本实用新型的技术实质对以上实施例所作的任何简单修改、等同变化与修饰，均仍属于本实用新型技术方案的范围内。The above is only a preferred embodiment of the utility model, and does not limit the utility model in any form. Any simple modification, equivalent change and modification made to the above embodiments according to the technical essence of the utility model are all valid. Still belong to the scope of the technical solution of the utility model.
Claims (8)
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Address after: No. 16 Weiliu Road, New Chemical Materials Industrial Park, Shihezi Economic Development Zone, Xinjiang Uygur Autonomous Region, 832000 Patentee after: XINJIANG DAQO NEW ENERGY Co.,Ltd. Address before: Weiliu Road, New Chemical Materials Industrial Park, Shihezi Economic Development Zone, Xinjiang Uygur Autonomous Region, 832000 Patentee before: Xinjiang Daqo New Energy Co.,Ltd. |
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