CN204101825U - In a kind of semiconductor laser, micro optical lens realizes the accurate on-Line Monitor Device debug - Google Patents
In a kind of semiconductor laser, micro optical lens realizes the accurate on-Line Monitor Device debug Download PDFInfo
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- CN204101825U CN204101825U CN201420481418.4U CN201420481418U CN204101825U CN 204101825 U CN204101825 U CN 204101825U CN 201420481418 U CN201420481418 U CN 201420481418U CN 204101825 U CN204101825 U CN 204101825U
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- 230000003287 optical effect Effects 0.000 title claims abstract description 41
- 238000010521 absorption reaction Methods 0.000 claims description 8
- 230000005540 biological transmission Effects 0.000 claims description 4
- 238000003384 imaging method Methods 0.000 claims description 3
- 238000012544 monitoring process Methods 0.000 abstract description 9
- 238000000034 method Methods 0.000 abstract description 8
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- 239000007787 solid Substances 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 2
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- 230000008859 change Effects 0.000 description 1
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- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
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Abstract
The utility model provides the technical scheme that micro optical lens in a kind of semiconductor laser realizes the accurate on-Line Monitor Device debug and using method thereof, program the method adopts CCD as hot spot data acquisition element, based on beam splitter principle, debug in process at micro optical lens, on-line monitoring near field and far-field spot data simultaneously, by the best spatial location criterion of near field CCD hot spot data variation as micro optical lens turning axle, by the best spatial location criterion of far field CCD hot spot data variation as micro optical lens offset axis, the precise hard_drawn tuhes of semiconductor laser fast and slow axis beam divergence angle and directive property can be realized.This utility model has that level of integrated system is high, the accurate feature such as reliable of monitoring criterion, and the low divergence realized based on this utility model, the semiconductor laser of high directivity can be applicable to the various fields such as light-pumped solid state laser, medical treatment and industrial processes.
Description
Technical field
The utility model relates to laser technology application, and in especially a kind of semiconductor laser, micro optical lens realizes the accurate on-Line Monitor Device debug.
Background technology
In the prior art, there is due to semiconductor laser the advantages such as electro-optical efficiency is high, good reliability, miniaturization, all developed rapidly and widespread use in laser pumping source and direct application etc., particularly as the pumping source of solid state laser and fiber laser, promote the fast development of all solid state laser.Semiconductor laser is due to the non-axis symmetry waveguiding structure of itself, cause the angle of divergence of two axis larger and asymmetric, have a strong impact on its brightness and beam quality, the precise hard_drawn tuhes of the angle of divergence and directive property is the prerequisite basic condition that semiconductor laser moves towards backend application.
Micro optical lens (FAC lens, SAC lens, BTS lens etc.) has compact structure, lightweight, collimation coupling efficiency advantages of higher, that semiconductor laser beam realizes high pointing accuracy, the low first-selected device dispersing precise alignment, but such device causes its assembly precision requirement very high due to features such as focal length are little, size is little, General Requirements offset axis is to being sub-micrometer scale, the sub-milliradian magnitude of axial rotary.The domestic and international monitoring system debug for semiconductor laser micro optical lens precision cannot realize the on-line monitoring to micro optical lens six axle variable quantity simultaneously at present, need to debug in process switchable optics monitoring system back and forth at micro optical lens, and cannot the influencing each other of accurate measurements offset axis and turning axle, the precise hard_drawn tuhes requirement of semiconductor laser divergence angle and directive property cannot be reached.
Therefore the accurate in real time on-line monitoring that in semiconductor laser, micro optical lens precision is debug is the gordian technique that semiconductor laser realizes the angle of divergence and directive property precise hard_drawn tuhes always.
Utility model content
The purpose of this utility model, be exactly for the deficiency existing for prior art, and provide micro optical lens in a kind of semiconductor laser to realize the technical scheme of the accurate on-Line Monitor Device debug and using method thereof, micro optical lens is fixed on six axle minute adjustment framves by the program, adopt CCD as hot spot data acquisition element, based on beam splitter principle, debug in process in micro optical lens precision, on-line monitoring near field and far-field spot data simultaneously, utilize near field CCD hot spot data variation as the best spatial location criterion of micro optical lens turning axle, utilize far field CCD hot spot data variation as the best spatial location criterion of micro optical lens offset axis, the precise hard_drawn tuhes of semiconductor laser fast and slow axis beam divergence angle and directive property can be realized.
This programme is achieved by the following technical measures:
In semiconductor laser, micro optical lens realizes the accurate on-Line Monitor Device debug, and includes semiconductor laser, micro optical lens, six axle minute adjustment framves, near field spectroscope, near field cylindrical lens, near field CCD, near field PC end, far field spectroscope, far field cylindrical lens, far field CCD, far field PC end and absorption cell; The transmission path of the laser beam that semiconductor laser goes out is disposed with micro optical lens, near field spectroscope, far field spectroscope and absorption cell; The laser beam that semiconductor laser goes out is through directive near field spectroscope after the micro optical lens be fixed on six axle minute adjustment framves; By the laser beam after the dichroic mirror of near field through directive near field CCD after the cylindrical lens of near field; The data collected can be transferred near field PC and hold by near field CCD; Through spectroscopical laser beam directive far field, near field spectroscope; By the laser beam after the dichroic mirror of far field through directive far field CCD after the cylindrical lens of far field; The data collected can be transferred to far field PC and hold by far field CCD; Through far field spectroscopical laser beam directive absorption cell.
Preferred as this programme: the curvature of near field cylindrical lens distributes along the slow-axis direction of semiconductor laser; The spectroscopical reflectance near field is 1:1, and the incident angle of the spectroscopical laser beam in directive near field is 45 ° ± 1 °.
Preferred as this programme: the curvature of far field cylindrical lens distributes along the quick shaft direction of semiconductor laser; The spectroscopical reflectance in far field is 7:3; The incident angle of the spectroscopical laser beam in directive far field is 45 ° ± 1 °.
Preferred as this programme: the distance between the exiting surface of semiconductor laser and near field cylindrical lens is greater than the twice of near field cylindrical lens focal length.
Preferred as this programme: at semiconductor laser slow-axis direction and semiconductor laser quick shaft direction, the geometric center deviation of the spectroscopical folded light beam barycenter near field and near field cylindrical lens is all not more than ± 0.1mm, and the optimal imaging range deviation of near field CCD and near field cylindrical lens is not more than ± 1mm.
Preferred as this programme: at semiconductor laser slow-axis direction and semiconductor laser quick shaft direction, the geometric center deviation of the spectroscopical folded light beam barycenter in far field and far field cylindrical lens is all not more than ± 0.1mm, and the rear focus deviation of far field CCD and far field cylindrical lens is not more than ± 1mm.
The beneficial effect of this programme can be learnt according to describing of such scheme, because micro optical lens is fixed on six axle minute adjustment framves by the program, adopt CCD as hot spot data acquisition element, based on beam splitter principle, debug in process in micro optical lens precision, on-line monitoring near field and far-field spot data simultaneously, utilize near field CCD hot spot data variation as the best spatial location criterion of micro optical lens turning axle, utilize far field CCD hot spot data variation as the best spatial location criterion of micro optical lens offset axis, the precise hard_drawn tuhes of semiconductor laser fast and slow axis beam divergence angle and directive property can be realized.
As can be seen here, the utility model compared with prior art, there is the features such as level of integrated system is high, monitoring criterion is accurate reliable, the low divergence realized based on this utility model, the semiconductor laser of high directivity can be applicable to the various fields such as light-pumped solid state laser, medical treatment and industrial processes, have outstanding substantive distinguishing features and progress significantly, its beneficial effect implemented also is apparent.
Accompanying drawing explanation
Fig. 1 is the structural representation of the utility model embodiment.
In figure, 1 is semiconductor laser, and 2 is micro optical lens, and 3 is six axle minute adjustment framves, and 4 is near field spectroscope, 5 is near field cylindrical lens, and 6 is near field CCD, and 7 hold near field PC, and 8 is far field spectroscope, 9 is far field cylindrical lens, and 10 is far field CCD, and 11 hold for far field PC, and 12 is absorption cell.
Embodiment
For the technical characterstic of this programme can be clearly demonstrated, below by an embodiment, and in conjunction with its accompanying drawing, this programme is set forth.
First coordinate system is set: X-direction is semiconductor laser slow-axis direction, Y-direction is semiconductor laser quick shaft direction, Z-direction is semiconductor laser beam exit direction, micro optical lens is fixed on six axle adjusting brackets, semiconductor laser bright dipping is driven with direct supply, regulate six axle adjusting brackets, noise spectra of semiconductor lasers carries out preliminary collimation.
The semiconductor laser beam transmission path of preliminary collimation places the near field spectroscope that reflectance is 1:1, and the angle of near field spectroscope and incident laser beam constrains within the scope of (45 ± 1) °.
Near field cylindrical lens is placed in dichroic mirror beam Propagation path, near field, the angle of near field cylindrical lens and near field dichroic mirror light beam constrains within the scope of (0 ± 1) °, the distance of semiconductor laser exiting surface and near field cylindrical lens is greater than the twice of near field cylindrical lens focal length simultaneously, in X and Y-direction, the geometric center deviation of the spectroscopical folded light beam barycenter near field and near field cylindrical lens is all not more than ± 0.1mm, and the optimal imaging range deviation of near field CCD and near field cylindrical lens is not more than ± 1mm.
Near field spectroscope transmitted light beam transmission path places the far field spectroscope that reflectance is 7:3, and the angle of far field spectroscope and near field spectroscope transmitted light beam constrains within the scope of (45 ± 1) °.
Far field cylindrical lens is placed in dichroic mirror beam Propagation path, far field, the angle of far field cylindrical lens and far field dichroic mirror light beam constrains within the scope of (0 ± 1) °, in X and Y-direction, the geometric center deviation of the spectroscopical folded light beam barycenter in far field and far field cylindrical lens is all not more than ± 0.1mm, the rear focus deviation of far field CCD and far field cylindrical lens is not more than ± 1mm, spectroscopical for far field transmitted light beam is imported absorption cell simultaneously.
Six axle adjusting brackets are adopted to carry out minute adjustment to micro optical lens offset axis and turning axle, by the best spatial location criterion of near field CCD hot spot data variation as micro optical lens turning axle, by the best spatial location criterion of far field CCD hot spot data variation as micro optical lens offset axis, shadow-free around hot spot in requirement near field, the turning axle optimum position CCD of micro optical lens, leftmost side luminous point and rightmost side luminous point barycenter Y-direction deviation be not more than ± and 5 μm, all luminous point strength variances are less than ± and 0.1%; Reach minimum along Y-direction spot size in requirement far field, the offset axis optimum position CCD of micro optical lens.
The utility model is not only confined to above-mentioned embodiment, and persons skilled in the art are content disclosed in the utility model, other concrete embodiments can be adopted to implement the utility model and reached of the present utility model and realize object.Therefore, every employing project organization of the present utility model and thinking, carry out a bit or design that some points simply convert, change, all fall into the scope of the utility model protection.
Claims (6)
1. in semiconductor laser, micro optical lens realizes the accurate on-Line Monitor Device debug, and it is characterized in that: include semiconductor laser, micro optical lens, six axle minute adjustment framves, near field spectroscope, near field cylindrical lens, near field CCD, near field PC end, far field spectroscope, far field cylindrical lens, far field CCD, far field PC end and absorption cell; The transmission path of the laser beam that described semiconductor laser goes out is disposed with micro optical lens, near field spectroscope, far field spectroscope and absorption cell; The laser beam that described semiconductor laser goes out is through directive near field spectroscope after the micro optical lens be fixed on six axle minute adjustment framves; Described by the laser beam after the dichroic mirror of near field through directive near field CCD after the cylindrical lens of near field; The data collected can be transferred near field PC and hold by described near field CCD; Described through spectroscopical laser beam directive far field, near field spectroscope; Described by the laser beam after the dichroic mirror of far field through directive far field CCD after the cylindrical lens of far field; The data collected can be transferred to far field PC and hold by described far field CCD; Described through far field spectroscopical laser beam directive absorption cell.
2. in a kind of semiconductor laser according to claim 1, micro optical lens realizes the accurate on-Line Monitor Device debug, and it is characterized in that: the curvature of described near field cylindrical lens distributes along the slow-axis direction of semiconductor laser; The spectroscopical reflectance in described near field is 1:1, and the incident angle of the spectroscopical laser beam in directive near field is 45 ° ± 1 °.
3. in a kind of semiconductor laser according to claim 1, micro optical lens realizes the accurate on-Line Monitor Device debug, and it is characterized in that: the curvature of described far field cylindrical lens distributes along the quick shaft direction of semiconductor laser; The spectroscopical reflectance in described far field is 7:3; The incident angle of the spectroscopical laser beam in directive far field is 45 ° ± 1 °.
4. in a kind of semiconductor laser according to claim 1, micro optical lens realizes the accurate on-Line Monitor Device debug, and it is characterized in that: the distance between the exiting surface of described semiconductor laser and near field cylindrical lens is greater than the twice of near field cylindrical lens focal length.
5. in a kind of semiconductor laser according to claim 1, micro optical lens realizes the accurate on-Line Monitor Device debug, it is characterized in that: at semiconductor laser slow-axis direction and semiconductor laser quick shaft direction, the geometric center deviation of the spectroscopical folded light beam barycenter near field and near field cylindrical lens is all not more than ± 0.1mm, and the optimal imaging range deviation of near field CCD and near field cylindrical lens is not more than ± 1mm.
6. in a kind of semiconductor laser according to claim 1, micro optical lens realizes the accurate on-Line Monitor Device debug, it is characterized in that: at semiconductor laser slow-axis direction and semiconductor laser quick shaft direction, the geometric center deviation of the spectroscopical folded light beam barycenter in far field and far field cylindrical lens is all not more than ± 0.1mm, and the rear focus deviation of far field CCD and far field cylindrical lens is not more than ± 1mm.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420481418.4U CN204101825U (en) | 2014-08-26 | 2014-08-26 | In a kind of semiconductor laser, micro optical lens realizes the accurate on-Line Monitor Device debug |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201420481418.4U CN204101825U (en) | 2014-08-26 | 2014-08-26 | In a kind of semiconductor laser, micro optical lens realizes the accurate on-Line Monitor Device debug |
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| CN204101825U true CN204101825U (en) | 2015-01-14 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104155771A (en) * | 2014-08-26 | 2014-11-19 | 中国工程物理研究院应用电子学研究所 | Online monitoring device for micro-optics lens in semiconductor laser to be precisely adjusted and using method of online monitoring device |
| CN106787844A (en) * | 2016-06-21 | 2017-05-31 | 中国工程物理研究院应用电子学研究所 | Compact laser power supply |
| CN109211524A (en) * | 2018-12-10 | 2019-01-15 | 中国人民解放军国防科技大学 | High-power fiber laser parameter integrated synchronization test device |
| CN110148880A (en) * | 2019-06-04 | 2019-08-20 | 苏州星帆华镭光电科技有限公司 | The single pulse energy of passive Q-regulaitng laser automates adjusting method |
| CN113390615A (en) * | 2021-07-13 | 2021-09-14 | 王龙祥 | Device and method for testing comprehensive performance of fast axis lens |
-
2014
- 2014-08-26 CN CN201420481418.4U patent/CN204101825U/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104155771A (en) * | 2014-08-26 | 2014-11-19 | 中国工程物理研究院应用电子学研究所 | Online monitoring device for micro-optics lens in semiconductor laser to be precisely adjusted and using method of online monitoring device |
| CN106787844A (en) * | 2016-06-21 | 2017-05-31 | 中国工程物理研究院应用电子学研究所 | Compact laser power supply |
| CN109211524A (en) * | 2018-12-10 | 2019-01-15 | 中国人民解放军国防科技大学 | High-power fiber laser parameter integrated synchronization test device |
| CN110148880A (en) * | 2019-06-04 | 2019-08-20 | 苏州星帆华镭光电科技有限公司 | The single pulse energy of passive Q-regulaitng laser automates adjusting method |
| CN113390615A (en) * | 2021-07-13 | 2021-09-14 | 王龙祥 | Device and method for testing comprehensive performance of fast axis lens |
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Granted publication date: 20150114 |