CN204085464U - A kind of surface profile measurement worktable in place - Google Patents

Abstract

The utility model discloses an in-situ surface topography detection workbench, which comprises a machine base and a microscope. The machine base includes a lower bottom plate and an upper frame body. The lower base plate can be erected above the upper surface of the lower base plate in the way of translation and sliding in the front and rear directions. The front or rear side of the lower base plate is equipped with an X-axis translation drive device that controls the front and rear sliding of the upper frame. The placement platform can be translated left and right along the upper frame, and the upper frame is equipped with a Y-axis translation drive device that controls the left and right movement of the placement platform. The placement platform is vertically equipped with a mounting column, and the mounting column is equipped with a mounting block that can move up and down. The microscope is installed on the above-mentioned mounting block, and a Z-axis lifting drive device for controlling the vertical movement of the mounting block is installed on the mounting column. The beneficial effects of the utility model: it can realize on-site and off-line measurement, has a wide application range, and has the characteristics of a simple, reasonable and compact overall structure.

Description

An in-situ surface topography detection workbench

technical field

The utility model relates to a detection workbench, in particular to an in-position surface topography detection workbench.

Background technique

Precise shape detection is a very important part of modern technology. The quality of the product is controlled by detecting the structural size or the accuracy of the surface shape of the object to be tested. There are various detection methods for shape detection. Among them, the measurement technology of optical non-contact detection method can obtain accurate shape data of the surface of the object to be measured in a non-destructive way. It has been widely used in various industries, especially On-site detection of the object to be tested.

The most important part of the existing in-situ shape detection system is the displacement workbench, which is a generalized operation platform with an operation surface for direct or indirect clamping or placing the object to be measured, which can be adjusted for displacement. Most of the traditional displacement tables adopt a two-layer superimposed structure, that is, the parts that move in the X-axis axial direction and the parts that move in the Y-axis axial direction are distributed on the upper and lower layers. It is large and has a complex structure, so that the displacement table cannot perform real-time on-site measurement due to space constraints during the on-site measurement. The measured object can only be disassembled and placed on the displacement table for detection. come to trouble.

In view of the above-mentioned reasons, the inventor has done in-depth research on the above-mentioned defects of the detection workbench, and this case arises from it.

Utility model content

The purpose of the utility model is to provide an in-situ surface topography detection workbench which is simple in structure, compact in size, wide in application range and can be used for on-site real-time measurement.

The technical scheme of the utility model is as follows: an in-situ surface topography detection workbench, including a base and a microscope, the base includes a lower bottom plate and an upper frame, and the upper frame is a hollow with an open upper end. The frame body, the above-mentioned upper frame body can be erected above the upper surface of the above-mentioned lower bottom plate in a manner that can translate and slide along the front and rear directions of the lower bottom plate, and the front side or the rear side of the above-mentioned lower bottom plate is provided with an X-axis translation drive for controlling the front and rear sliding of the upper frame body device, the upper end surface of the above-mentioned upper frame is provided with a placement platform that can translate left and right along the upper frame, and the above-mentioned upper frame is provided with a Y-axis translation drive device that controls the left and right movement of the placement platform, and the above-mentioned placement platform is installed vertically. A column, the above-mentioned installation column is provided with a mounting block that can move up and down, the above-mentioned microscope is installed on the above-mentioned mounting block, and a Z-axis lifting drive device that controls the vertical movement of the mounting block is installed on the above-mentioned mounting column.

The left and right sides of the upper surface of the lower base plate are respectively protruded with X-axis guide rails extending along the front and rear directions of the lower base plate, and the upper surface of the above-mentioned X-axis guide rail is protruded with X-axis slide rails extending along the length direction of the X-axis guide rail. The left and right outer walls of the above-mentioned upper frame body are provided with an L-shaped mounting block whose one arm is fixed to the above-mentioned upper frame body, and the other arm is above the above-mentioned X-axis slide rail, and the other arm of the above-mentioned L-shaped mounting block is fixed. There is an X-axis guide slider which is erected on the X-axis slide rail and slides along the X-axis slide rail.

The above-mentioned X-axis translation driving device includes an X-axis stepping motor, an X-axis screw rod and an X-axis slider. An installation convex plate is extended on the front side wall of the above-mentioned lower base plate, and the above-mentioned X-axis stepping motor is fixedly installed on the above-mentioned installation convex plate. on the board, and the output shaft of the above-mentioned X-axis stepping motor is arranged backward, and the above-mentioned X-axis screw rod is arranged horizontally and extends along the front and back direction of the above-mentioned lower bottom plate. The front end of the X-axis screw rod moves through the front and rear ends of the above-mentioned screw rod base, and the front end of the above-mentioned X-axis screw rod is connected with the output shaft of the above-mentioned X-axis stepping motor through a motor coupling, and the above-mentioned X-axis The rear end of the screw rod is screwed and locked on the front side of the above-mentioned upper frame, the above-mentioned X-axis slider is set outside the above-mentioned X-axis screw rod, and the above-mentioned X-axis slider is threadedly connected with the above-mentioned X-axis screw rod , the above-mentioned X-axis slider is fixedly connected to the front side wall of the above-mentioned upper frame.

The X-axis slider includes a front side plate, a left side plate and a right side plate, the front ends of the left side plate and the right side plate are integrally connected with the left and right sides of the front side plate respectively, The rear end of the plate and the rear end of the right side plate are respectively fixedly connected with the front side wall of the upper frame.

The above-mentioned Y-axis translation driving device includes a Y-axis stepping motor, a Y-axis screw rod and a Y-axis slider. The above-mentioned Y-axis stepping motor is fixedly installed on the inner bottom surface of the above-mentioned upper frame, and the output shaft of the above-mentioned Y-axis stepping motor Set to the left or right, the above-mentioned Y-axis screw rod is placed horizontally, and extends along the left-right direction of the above-mentioned upper frame body, the first end of the above-mentioned Y-axis screw rod is connected to the above-mentioned Y-axis stepping motor through a motor coupling The output end of the above-mentioned Y-axis screw is connected, the second end of the above-mentioned Y-axis screw rod is screwed and locked on the left side wall or the right side wall of the above-mentioned upper frame, the above-mentioned Y-axis slider is sleeved outside the above-mentioned Y-axis screw rod, and The above-mentioned Y-axis slider is threadedly connected with the above-mentioned Y-axis screw rod.

The upper surfaces of the front and rear sides of the upper frame are locked with Y-axis slide rails extending along the left and right directions of the upper frame. The slider, the two above-mentioned Y-axis guide sliders and the above-mentioned Y-axis slider are all locked and connected with the above-mentioned placing platform.

The above-mentioned installation column is locked on the above-mentioned placement platform, and the above-mentioned Z-axis lifting drive device includes a Z-axis stepping motor and a Z-axis screw rod. The shaft screw is located on the left or right side wall of the above-mentioned installation column, and the above-mentioned installation block is provided with a Z-axis slider that is sleeved outside the above-mentioned Z-axis screw, and the above-mentioned Z-axis slider and the above-mentioned Z-axis screw Thread fit connection, the above-mentioned Z-axis stepping motor is installed on the above-mentioned installation column, and is below the above-mentioned Z-axis screw rod, the output shaft of the above-mentioned Z-axis stepping motor is connected with the lower end of the above-mentioned Z-axis screw rod, and the above-mentioned Z-axis The upper end of the shaft screw rod is flexibly connected with the above-mentioned installation column.

A winding wheel is fixed on the top surface of the above-mentioned installation column, and a counterweight is suspended on the right side wall or the left side wall of the above-mentioned installation column. The weight is matched, a sling is arranged above the above-mentioned counterweight, the first end of the above-mentioned sling is fixedly connected to the above-mentioned counterweight, and the second end of the above-mentioned sling bypasses the above-mentioned winding wheel and extends downward to The above-mentioned mounting block is fixedly connected with the above-mentioned Z-axis slider.

A grating ruler is installed on the above-mentioned mounting block.

After adopting the above scheme, the utility model has beneficial effects: the X-axis translation driving device is located outside the upper frame, and the Y-axis translation driving device is located inside the upper frame, so that the X-axis movement and Y-axis movement of the placing platform belong to coplanar movement , can greatly shorten the overall height and space, and is small in size. It is suitable for installation on the workbench of the object to be measured for on-site measurement. It has a wide range of applications and has the characteristics of simple, reasonable and compact overall structure. At the same time, the microscope is installed in the On the block, the mounting block moves up and down on the mounting column. In this way, the distance between the microscope and the object to be measured can be adjusted during detection, so that the microscope can move to the position where the shape of the object to be measured is the most clear image, so that the image collected by the microscope It is relatively clear, which in turn makes the detection accuracy of the shape detection system higher.

Description of drawings

Fig. 1 is the structural representation of the utility model;

Fig. 2 is another structural representation of the utility model (omitting microscope);

Fig. 3 is a partial structural schematic diagram of the utility model.

in:

Microscope 1 Lens 11

Lower base plate 2 X-axis guide rail 21

X-axis slide rail 211 Mounting convex plate 22

Screw base 221 upper frame 3

L-shaped mounting block 31 X-axis guide slider 311

Y-axis slide rail 32 Y-axis guide slider 33

Screw base 34 X-axis stepping motor 41

X-axis screw 42 X-axis slider 43

Motor coupling 44 Placement platform 5

Y-axis stepper motor 61 Y-axis screw 62

Y-axis slider 63 Motor coupling 64

Install column 7 Install block 71

Z-axis slider 711 Mounting bump 72

Reel 73 Counterweight 74

Sling 75 Z-axis stepping motor 81

Z-axis screw 82 Grating counter 9

Detailed ways

An in-situ surface topography detection workbench of the present utility model, as shown in Figure 1-3, includes a machine base and a microscope 1, the machine base includes a lower bottom plate 2 and an upper frame body 3, the lower bottom plate 2 is a square plate, The upper frame body 3 is a hollow square frame body with an open upper end, and the upper frame body 3 can be erected above the upper surface of the lower base plate 2 in a manner of translating and sliding along the front and rear directions of the lower base plate 2, that is, the left and right upper surfaces of the lower base plate 2 X-axis guide rails 21 extending along the front-rear direction of the lower base plate 2 are protruded on both sides, and X-axis slide rails 211 extending along the length direction of the X-axis guide rails 21 are protruded on the upper surface of the X-axis guide rails 21. The upper frame body The left and right sides of the 3 are provided with an L-shaped mounting block 31 whose one arm is fixed to the upper frame body 3, and the other arm is above the X-axis slide rail 211, and the other arm of the L-shaped mounting block 31 is fixed with a The X-axis guide slider 311 erected on the X-axis slide rail 211 and sliding along the X-axis slide rail 211 can realize the upper frame body 3 on the lower base plate 2 through the cooperation of the X-axis slide rail 211 and the X-axis guide slider 311. Slide to install.

The front side of the lower base plate 2 is provided with an X-axis translation driving device that controls the upper frame body 3 to slide forward and backward. The X-axis translation driving device includes an X-axis stepping motor 41, an X-axis screw rod 42 and an X-axis slider 43. The front side wall of 2 is extended with a mounting convex plate 22, and the mounting convex plate 22 and the lower bottom plate 2 can form a convex character structure. The X-axis stepping motor 41 is fixedly installed on the mounting convex plate 22, and the X-axis stepping motor The output shaft of 41 is set towards the rear, and the X-axis screw rod 42 is laid flat and extends along the front and rear direction of the lower base plate 2. The upper surface of the installation convex plate 22 is fixed with a screw rod seat 221, and the front end of the X-axis screw rod 42 is movable. Pass the front and rear ends of the screw rod seat 221, and the front end of the X-axis screw rod 42 is connected with the output shaft of the X-axis stepping motor 41 through the motor coupling 44, and the rear end of the X-axis screw rod 42 Movably extend into the front side wall of the upper frame body 3, the screw rod seat 221 can play a rotatable supporting role to the X-axis screw rod 42, the X-axis slider 43 is sleeved outside the X-axis screw rod 42, and the X The shaft slide block 43 is threadedly connected with the X-axis screw mandrel 42, and the X-axis slide block 43 includes a front side plate, a left side plate and a right side plate, and the front end of the left side plate and the front end of the right side plate are connected with the front side plate of the front side plate respectively. The left and right sides are integrally formed and connected, the rear end of the left side plate and the rear end of the right side plate are respectively fixedly connected with the front side wall of the upper frame body 3, and the front side plate is provided with a hole for the X-axis screw rod 42 to pass through. A through hole, an internal thread screwed with the external thread of the X-axis screw rod 42 is installed in the through hole, and the screw mounting of the X-axis slider 43 on the X-axis screw rod 42 can be realized through the cooperation of the internal and external threads. When the X-axis translation driving device works, start the X-axis stepping motor 41, and the X-axis stepping motor 41 drives the X-axis screw mandrel 42 to rotate, and the X-axis screw mandrel 42 only rotates and cannot be moved, and the X-axis slide block 43 is screwed on the X-axis Outside the screw mandrel 42, like this, the rotation of the X-axis screw mandrel 42 can make the X-axis slider 43 slide back and forth along the X-axis screw mandrel 42, and the forward and backward sliding of the X-axis slider 43 can drive the upper frame body 3 to slide back and forth.

The upper end surface of the upper frame body 3 is provided with a placement platform 5 that can translate left and right along the upper frame body 3. The placement platform 5 is covered on the upper end port of the upper frame body 3. The front and rear sides of the upper frame body 3 A Y-axis slide rail 32 extending along the left-right direction of the upper frame body 3 is fixed on the upper surface of the upper frame body 3. The Y-axis slide rail 32 is provided with a Y-axis guide slider 33 sliding along the Y-axis slide rail 32. The Y-axis slide rails 33 on both sides The shaft guide slider 33 is locked and connected with the placement platform 5, and the sliding installation of the placement platform 5 on the upper frame body 3 can be realized through the Y-axis slide rail 32 and the Y-axis guide slider 33. The upper frame body 3 is provided with a control Place the Y-axis translation driving device that moves left and right on the platform 5. The Y-axis translation driving device includes a Y-axis stepping motor 61, a Y-axis screw rod 62 and a Y-axis slider 63. The Y-axis stepping motor 61 is fixedly installed on the upper frame 3, and the output shaft of the Y-axis stepping motor 61 is set to the right, and the Y-axis screw rod 62 is placed flat and extends along the left and right directions of the upper frame body 3. The inner bottom surface of the upper frame body 3 is fixed There is a screw seat 34, and the first end of the Y-axis screw 62 moves through the screw seat 34 to the output end of the Y-axis stepping motor, and passes through the motor coupling 64 and the Y-axis stepping motor 61. The output end is connected, and the second end of the Y-axis screw rod 62 is movably inserted into the right side wall of the upper frame body 3 for placement, and the Y-axis slider 63 is sleeved outside the Y-axis screw rod 62. The placement platform 5 and the Y-axis The slide block 63 is locked and connected, and the Y-axis slide block 63 is provided with an installation through hole for the Y-axis screw rod 62 to pass through. Internal threads, through the cooperation of the internal and external threads, the threaded connection between the Y-axis slider 63 and the Y-axis screw rod 62 can be realized. When the Y-axis translation drive device works, start the Y-axis stepping motor 61, and the Y-axis stepping motor 61 drives the Y-axis screw mandrel 62 to rotate, and the rotation of the Y-axis screw mandrel 62 can make the Y-axis slider 63 move along the Y-axis screw mandrel 62 The axial direction slides, and the sliding of the Y-axis slide block 63 can make the placement platform 5 translate left and right.

The placement platform 5 is vertically provided with an installation column 7, the installation column 7 is locked on the placement platform 5, the installation column 7 is provided with a mounting block 71 that can move up and down, the microscope 1 is installed on the installation block 71, and the installation column 7 The Z-axis lifting drive device that controls the installation block 71 to move up and down is installed. The Z-axis lift drive device includes a Z-axis stepper motor 81 and a Z-axis screw mandrel 82. Extend, and the Z-axis screw rod 82 is at the right side wall of the installation column 7, the installation block 71 is provided with a Z-axis slider 711 sleeved outside the Z-axis screw rod 82, and the Z-axis slider 711 and the Z-axis wire The rod 82 is threaded and connected, and the Z-axis slider 711 is provided with an installation through hole for the Z-axis screw rod 82 to pass through. The internal thread of the Z-axis stepper motor 81 is installed on the installation column 7, and is below the Z-axis screw rod 82. The output shaft of the Z-axis stepper motor 81 is connected with the lower end of the Z-axis screw rod 82. Z The upper end of the shaft screw rod 82 is movably connected with the installation column 7, that is, the upper end of the right side wall of the installation column 7 is protruded with an installation bump 72, and the upper end of the Z-axis screw rod 82 is tightly fitted into the installation bump 72 Inside. When the Z-axis lifting drive device is working, the Z-axis stepping motor 81 is started, and the Z-axis stepping motor 81 drives the Z-axis screw rod 82 to rotate, and the rotation of the Z-axis screw rod 82 makes the Z-axis slider 711 move along the Z-axis screw rod 82 Sliding up and down, the sliding of the Z-axis slider 711 enables the microscope 1 to move up and down.

In the present invention, the mounting block 71 is located at the rear side of the microscope 1 and is equipped with a grating counter 9 .

An in-situ surface topography detection workbench of the utility model can be placed on a corresponding machine tool workbench and fixed when in-situ detection is used. For example, in-position detection is performed on the grinding wheel of a grinding machine. The specific operation is: firstly fix the lower base plate 2 on the working surface of the grinding machine, and connect the microscope 1 and the grating counter to the PC accordingly. After the wiring is completed, start the X-axis translation drive device, and The frame body 3 translates, and the microscope 1 installed on the column 7 translates together. When the microscope 1 is directly below the grinding wheel, the X-axis translation drive device is turned off, and the lens 11 of the microscope 1 is set upwards. Then, the Z-axis lift drive device is started. The installation block 71 can be adjusted up and down. The distance between the microscope 1 and the grinding wheel can be adjusted accordingly by the up and down of the installation block 71, so that the microscope 1 can automatically focus. After the monitor screen observed by the inspector on the PC reaches a certain clear image, turn off the Z axis. Lifting drive device, finally, in-position detection of the axial direction of the grinding wheel, and input corresponding commands on the PC control interface, so that the upper frame 3 moves in the Y-axis direction, so that the microscope 1 completes the data collection of the grinding wheel axial line And image collection, and repeat this action, and the sequence image f(x,y,n) collected at the same time, where n represents the image sequence number, is sent to the PC, and the PC uses the focus superposition algorithm (SML operator) to calculate Find the focus measure of each point, and the n value corresponding to the maximum value of the focus measure obtained at each point is the clear image at this height position. After finding the position n, multiply the n value by the time of two adjacent image acquisitions of the microscope The actual stroke of the upper frame, so as to obtain the depth of different positions in the image, so that the in-position detection of the grinding wheel can be completed. This kind of three-dimensional reconstruction method of the grinding wheel surface based on aggregation synthesis is well known, and will not be described in detail here. ; After the detection is completed, the lower bottom plate 2 can be disassembled from the work surface of the grinder. If on-site detection is not required, the detection workbench can be matched with other micro-motion two-dimensional platforms, that is, the micro-motion two-dimensional platform is placed on the placement platform 5, and the lens 11 of the microscope 1 is set downward to realize offline detection. .

The beneficial effects of the utility model are as follows:

1. The X-axis translation drive device is located outside the upper frame 3, and the Y-axis translation drive device is located inside the upper frame 3, so that the X-axis movement and Y-axis movement of the placing platform 5 belong to the coplanar movement, which can greatly shorten the overall height space. Small in size, it is suitable for installation on the workbench of the object to be measured for in-situ measurement, and has a wide range of applications.

2. It can realize on-site detection and offline detection, has strong follow-up, high flexibility in use, and has the characteristics of simple, reasonable and compact overall structure.

3. The movement of the X, Y, and Z axes is realized by the cooperation of the screw and the motor, and the movement is relatively stable. At the same time, the movement of the X, Y, and Z axes is counted by the grating counter, which can obtain efficient, stable and high-precision positioning .

4. The distance between the microscope and the object to be measured can be adjusted during detection, so that the microscope can move to the position where the shape of the object to be measured is the highest and clearest, so that the image collected by the microscope is clearer, and then the detection accuracy of the shape detection system can be improved. higher.

In the utility model, the top surface of the installation column 7 is fixed with a winding wheel 73, and a counterweight 74 is suspended on the left side wall of the installation column 7. The weight of the counterweight 74 is the same as that of the installation block 71 and installed on the installation. The weight of the microscope 1 on the block 71 matches, the top of the counterweight 74 is provided with a sling 75, the first end of the sling 75 is fixedly connected with the counterweight 74, and the second end of the sling 75 goes around the winding The wheel 73 extends downwards to the Z-axis slider 711, and is fixedly connected with the Z-axis slider 711; thus, the balance weight 74 is used to balance the load on the mounting block 71, greatly avoiding the detection work The measurement accuracy of the microscope 1 is affected by the fretting or up-and-down sliding caused by the unbalanced moment when the stage moves, which ensures the measurement accuracy of the microscope 1 .

The above-mentioned embodiments and drawings do not limit the product form and style of the present utility model, and any appropriate changes or modifications made by those skilled in the art should be considered as not departing from the patent scope of the present utility model.

Claims (9)

1. An in-situ surface topography detection workbench, comprising a machine base and a microscope, is characterized in that: the above-mentioned machine base includes a lower base plate and an upper frame body, and the above-mentioned upper frame body is a hollow frame body whose upper end is an open shape, and the above-mentioned The upper frame is erected above the upper surface of the lower bottom plate in a manner that can translate and slide along the front and rear directions of the lower bottom plate, and an X-axis translation drive device is provided on the front or rear side of the lower bottom plate to control the front and rear sliding of the upper frame. The upper end surface of the upper frame is provided with a placement platform that can translate left and right along the upper frame, and the upper frame is provided with a Y-axis translation drive device that controls the left and right movement of the placement platform, and the placement platform is vertically provided with installation columns. A mounting block that can move up and down is arranged on the mounting column, the microscope is mounted on the mounting block, and a Z-axis lifting drive device that controls the vertical movement of the mounting block is installed on the mounting column. 2. A kind of in-position surface topography detection workbench according to claim 1, characterized in that: the left and right sides of the upper surface of the above-mentioned lower base plate are respectively convexly provided with X-axis guide rails extending along the front and rear direction of the lower base plate, and the above-mentioned The upper surface of the X-axis guide rail is protrudingly provided with an X-axis slide rail extending along the length direction of the X-axis guide rail. On the left and right outer walls of the above-mentioned upper frame body, one arm is fixed to the above-mentioned upper frame body, and the other arm is in the The L-shaped mounting block above the X-axis slide rail, and the other arm of the L-shaped mounting block is fixed with an X-axis guide slider mounted on the X-axis slide rail and sliding along the X-axis slide rail. 3. A kind of in-position surface topography detection workbench according to claim 1, is characterized in that: above-mentioned X-axis translation driving device comprises X-axis stepper motor, X-axis screw mandrel and X-axis slide block, and above-mentioned lower base plate There is a mounting convex plate extending on the front side wall of the above-mentioned X-axis stepping motor, and the above-mentioned X-axis stepping motor is fixedly installed on the above-mentioned mounting convex plate, and the output shaft of the above-mentioned X-axis stepping motor is set backward, and the above-mentioned X-axis screw rod is placed horizontally. And extend along the front and rear directions of the above-mentioned lower base plate, the upper surface of the above-mentioned installation convex plate is fixed with a screw seat, the front end of the above-mentioned X-axis screw rod moves through the front and rear ends of the above-mentioned screw rod seat, and the above-mentioned X-axis screw rod The front end of the above-mentioned X-axis stepper motor is connected to the output shaft of the above-mentioned X-axis stepping motor through a motor coupling, the rear end of the above-mentioned X-axis screw rod is screwed and locked on the front side of the above-mentioned upper frame, and the above-mentioned X-axis slider The above-mentioned X-axis screw rod is sleeved, and the above-mentioned X-axis slider is threadedly connected with the above-mentioned X-axis screw rod, and the above-mentioned X-axis slider is fixedly connected with the front side wall of the above-mentioned upper frame. 4. An in-situ surface topography detection workbench according to claim 3, wherein said X-axis slider comprises a front side plate, a left side plate and a right side plate, and the front end of said left side plate and said The front end of the right side plate is integrally connected with the left and right sides of the front side plate respectively, and the rear ends of the left side plate and the right side plate are respectively fixedly connected with the front side wall of the upper frame. 5. An in-situ surface topography detection workbench according to claim 1, characterized in that: the above-mentioned Y-axis translation drive device includes a Y-axis stepping motor, a Y-axis screw and a Y-axis slider, and the above-mentioned Y-axis The stepper motor is fixedly installed on the inner bottom surface of the above-mentioned upper frame, the output shaft of the above-mentioned Y-axis stepper motor is set facing left or right, and the above-mentioned Y-axis screw rod is arranged horizontally and extends along the left-right direction of the above-mentioned upper frame The first end of the above-mentioned Y-axis screw rod is connected to the output end of the above-mentioned Y-axis stepping motor through a motor coupling, and the second end of the above-mentioned Y-axis screw rod is screwed and locked on the upper frame body. On the left side wall or the right side wall, the above-mentioned Y-axis slider is sleeved outside the above-mentioned Y-axis screw rod, and the above-mentioned Y-axis slider is threadedly connected with the above-mentioned Y-axis screw rod. 6. An in-situ surface topography detection workbench according to claim 5, characterized in that: the upper surfaces of the front and rear sides of the upper frame are locked with a Y extending along the left and right directions of the upper frame. The above-mentioned Y-axis slide rail is covered with a Y-axis guide slider that slides along the above-mentioned Y-axis slide rail, and the two above-mentioned Y-axis guide sliders and the above-mentioned Y-axis slider are both locked and connected to the above-mentioned placement platform. 7. An in-situ surface topography detection workbench according to claim 1, characterized in that: the above-mentioned installation column is locked on the above-mentioned placement platform, and the above-mentioned Z-axis lifting drive device includes a Z-axis stepping motor and a Z-axis Screw rod, the above-mentioned Z-axis screw rod is set upright, and extends along the up and down direction of the above-mentioned installation column, and the above-mentioned Z-axis screw rod is located at the left side wall or the right side wall of the above-mentioned installation column, and the above-mentioned installation block is provided with a sleeve The Z-axis slider outside the above-mentioned Z-axis screw rod, and the above-mentioned Z-axis slider is threadedly connected with the above-mentioned Z-axis screw rod, and the above-mentioned Z-axis stepping motor is installed on the above-mentioned installation column and is located below the above-mentioned Z-axis screw rod , the output shaft of the above-mentioned Z-axis stepping motor is connected to the lower end of the above-mentioned Z-axis screw rod, and the upper end of the above-mentioned Z-axis screw rod is movably connected to the above-mentioned installation column. 8. An in-situ surface topography detection workbench according to claim 7, characterized in that: a winding wheel is fixed on the top surface of the above-mentioned installation column, and the right side wall or the left side wall of the above-mentioned installation column A counterweight is suspended in the air, and the weight of the above-mentioned counterweight matches the weight of the above-mentioned installation block and the microscope installed on the installation block. A suspension rope is arranged above the above-mentioned counterweight, and the first end of the above-mentioned suspension rope is connected to the above-mentioned counterweight. The block is fixedly connected, and the second end of the suspension rope goes around the above-mentioned reel and extends downward to the above-mentioned installation block, and is fixedly connected with the above-mentioned Z-axis slider. 9. An in-situ surface topography detection workbench according to claim 1, characterized in that a grating scale is installed on the above-mentioned mounting block.