CN203980014U - A kind of integrated laser light illumination equipment - Google Patents
A kind of integrated laser light illumination equipment Download PDFInfo
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- CN203980014U CN203980014U CN201420370685.4U CN201420370685U CN203980014U CN 203980014 U CN203980014 U CN 203980014U CN 201420370685 U CN201420370685 U CN 201420370685U CN 203980014 U CN203980014 U CN 203980014U
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Abstract
The utility model relates to a kind of integrated laser light illumination equipment, it comprise integrated laser source, coupling device and with coupling device between adopt optical fiber to be connected lamp terminal; Between described integrated laser source and coupling device, be provided with light controlling device, described lamp terminal is by laser shunt, and a plurality of light conversion means that is connected to laser shunt by optical fiber forms; Described integrated laser source consists of semiconductor laser light source; In described light controlling device, include printing opacity position and shading position, printing opacity position adopts on-fixed mode with respect to the position of integrated form light source; Adopt the integrated laser light illumination equipment of technique scheme, it avoids having the direct excitation fluorescent material of laser of high-energy output density and the brightness supersaturation that causes, realized simultaneously and needed the laser generation area of power supply and the isolation of field of illumination, accomplished emergency lighting.
Description
Technical field
The utility model relates to a kind of lighting apparatus, especially a kind of integrated laser light illumination equipment.
Background technology
Along with energy demand is increasing and the anxiety of global resources, energy-saving illumination technology has received unprecedented concern.Wherein LED lighting device and laser illuminator system have the features such as energy-efficient, environmental protection due to it, have more and more been applied in landscape light in city, industrial lighting, domestic lighting, Automobile headlight and various long-distance night-vision monitoring application.
What at present solid state lighting was more ripe is LED illumination, but LED illumination exists high cost, brightness is on the low side and the bad light efficiency causing that dispels the heat under degradation problem, these problems are all the key factors of restriction LED development.Because the efficiency of the single luminescence unit of Light-Emitting Diode is lower, in order to obtain the light source of enough brightness, conventionally need to combine dozens of and even up to a hundred luminescence units.Quantity at luminescence unit is difficult under the prerequisite of lifting, and the power output that promotes individual devices has become and improved brightness and reduce costs the most effectively approach.Laser has the development of the features, particularly semiconductor laser technique such as energy density is high, good directionality, makes laser lighting technology step into forward major step.Laser diode can be used for substituting light emitting diode and coordinates fluorescent material to enter to realize the white light output of super brightness, thereby solves the key issues such as luminance shortage that current LED lighting device faces.White light source principle of luminosity and the LED of laser are similar, are all by excitated fluorescent powder, finally by colour mixture principle, realize white light.
But there is following defect in existing laser lighting technology: laser energy output density is high, is not suitable for direct excitated fluorescent powder.Because when laser cover is on fluorescent material, can there is obvious brightness supersaturation problem in them,, along with the raising of incident radiation density, optical power declines, therefore be not well positioned to meet the real needs of some application, prior art has yet to be improved and developed.
Utility model content
The technical problems to be solved in the utility model is to provide a kind of LASER Light Source lighting apparatus, the mode that it can irradiate by regulatable power and interval, the brightness supersaturation of avoiding the direct excitated fluorescent powder of laser to exist; Meanwhile, it can realize the isolation of power supply area and field of illumination, thereby realizes emergency lighting.
For solving the problems of the technologies described above, the utility model relates to a kind of integrated laser light illumination equipment, it comprise integrated laser source, coupling device and with coupling device between adopt optical fiber to be connected lamp terminal; Between described integrated laser source and coupling device, be provided with light controlling device, described lamp terminal is by laser shunt, and a plurality of light conversion means that is connected to laser shunt by optical fiber forms; Described integrated laser source consists of semiconductor laser light source; In described light controlling device, include printing opacity position and shading position, printing opacity position adopts on-fixed mode with respect to the position of integrated form light source.
For semiconductor laser, at a certain temperature, when drive current is during higher than threshold current, laser instrument Output of laser, and power output increases sharply along with the increase of drive current, and be approximated to linear rising relation.According to common definition, laser brightness is the luminous flux in unit are, and luminous flux is the physical quantity linear with laser output power.Therefore, can be by regulating the electric current of its power supply to realize the control to its power output, thus realize the adjusting of laser brightness.So adopt above-mentioned design, it,, by the regulation and control to integrated laser light illumination equipment operating current, can realize the regulation and control of its lighting power.
As a modification of the present invention, described integrated laser includes light source base in source, and a plurality of semiconductor laser being arranged in light source base; The irradiation light of a plurality of semiconductor lasers is all intersected in a bit, and the position that crosses is provided with collimation lens.Adopt above-mentioned design, it can be converted into parallel rays by the light crossing by collimation lens, thereby realizes the stability of illumination direction.
As a modification of the present invention, described light source base adopts rectangular susceptor, and its light direction of illumination of semiconductor laser being installed in light source base is horizontal direction; Between described semiconductor laser light source and collimation lens, be provided with collector lens.Adopt above-mentioned design, the horizontal mounting means of semiconductor laser makes a plurality of semiconductor lasers be convenient to installation and debugging, thereby can realize the efficiency of integrated laser light illumination equipment in producing and debugging, is increased.
As a modification of the present invention, in described light source base, be provided with the spherical groove towards collimation lens, a plurality of semiconductor lasers are evenly arranged in spherical groove, and the light direction of illumination of each semiconductor laser is all perpendicular to, the tangent plane of its position in spherical groove.Adopt above-mentioned design, it has realized crossing of a plurality of semiconductor laser light by spherical groove, thereby the quantity of integrated laser light illumination device interior parts is reduced, and make the portability of Whole Equipment, and job stability all increases.
As a modification of the present invention, described light controlling device includes circular shadow shield, and its marginal portion is provided with a plurality of equally distributed loopholes; In described shadow shield, be positioned at the loophole of extreme higher position over against collimation lens; Described shadow shield home position is provided with axis, and axis is connected to motor.Owing to causing that the oversaturated reason of fluorescent material is that fluorescent material is subject in the process of laser excitation, be stimulated and the actuation duration of the Continuous irradiation of luminous relative laser of response time long, cause fluorescent material to have little time deexcitation and stay in the level of higher energy level, and luminous intensity is reduced; So adopt above-mentioned design, it can drive shadow shield to rotate by motor, thereby by shadow shield, and the loophole intermittence being arranged on shadow shield blocks laser, and then prevents laser Continuous irradiation fluorescent material and cause brightness supersaturation.
As a modification of the present invention, described light conversion means is by laser frequency multiplier, and end is provided with the spherical hollow transparent body formation of fluorescent material; Described fluorescent material is fixed on transparent body inside by resin material encapsulation.Adopt above-mentioned design, laser frequency multiplier can transform optical maser wavelength, the wavelength that it is corresponded to actual needs; Fluorescent material can be converted into visible ray by laser beam, thereby realizes the effect of illumination.
As a modification of the present invention, in described light conversion means, between laser frequency multiplier and the spherical hollow transparent body, be provided with the light disperser being formed by biconcave lens; The end of the transparent body is fixed in the encapsulation of described fluorescent material, and its thickness is reduced to its surrounding gradually by the endpoint location of the transparent body.Adopt above-mentioned design, light means for diverging can will be dispersed from fibre-optic laser beam, so that exciting light can be radiated on fluorescent material uniformly; The visible ray that the thickness setting of fluorescent material can make laser beam transform through fluorescent material is more even.
Above-mentioned integrated laser light illumination equipment, its light that a plurality of semiconductor lasers are sent converges at a bit, and becomes horizontal laser beam by collimation lens.Meanwhile, in light controlling device, shadow shield rotation under motor drives, makes the intersection location of shadow shield and laser beam switch back and forth at loophole and light shielding part interdigit, thereby realizes the interval irradiation of LASER Light Source.Laser beam enters optical-fibre channel by coupling device is laggard, and transfers to laser shunt, and it is divided into multichannel according to actual needs by laser; After disperseing, laser enters in light conversion means, is translated into the wavelength of actual needs, and is exposed on fluorescent material via laser frequency multiplier, by fluorescent material, is translated into visible ray, and final realization thrown light on.
Adopt the integrated laser light illumination equipment of technique scheme, it is by regulating operating current to realize the adjustable of LASER Light Source illumination efficiency, and irradiate by the interval that light controlling device is realized LASER Light Source, thereby avoid thering is the direct excitation fluorescent material of laser of high-energy output density and the brightness supersaturation that causes; Meanwhile, above-mentioned integrated laser light illumination equipment adopts integrated laser light source as original excitation source, by the laser generating unit place of safety that is placed in, by Optical Fiber Transmission laser, in optical fiber, realize low-loss, long-distance transmissions, thereby realized, need the laser generation area of power supply and the isolation of field of illumination, by using optical fiber as the transmission medium of optical excitation signal, by laser, come that thereby excitation fluorescent material layer is luminous obtains visible illumination light, really accomplished emergency lighting.
Accompanying drawing explanation
Fig. 1 is embodiment 1 integrated laser light illumination equipment schematic diagram in the utility model;
Fig. 2 is light controlling device schematic diagram in the utility model;
Fig. 3 is light conversion means schematic diagram in the utility model;
Fig. 4 is embodiment 2 integrated laser light illumination equipment schematic diagrames in the utility model;
Reference numerals list:
1-light source base, 2-semiconductor laser, 3-collimation lens, 4-collector lens, 5-coupling device, 6-optical fiber, 7-laser shunt, 8-shadow shield, 9-loophole, 10-motor, 11-laser frequency multiplier, 12-biconcave lens, 13-transparent body, 14-fluorescent material, 15-spherical groove.
The specific embodiment
Below in conjunction with the drawings and specific embodiments, further illustrate the utility model, should understand the following specific embodiment and only for the utility model is described, be not used in restriction scope of the present utility model.It should be noted that, word 'fornt', 'back', " left side ", " right side ", "up" and "down" that use is described below refer to the direction in accompanying drawing, and word " interior " and " outward " refer to respectively the direction towards or away from specific features geometric center.
Embodiment 1
A kind of integrated laser light illumination equipment as shown in Figure 1, it comprises integrated laser source, coupling device 5 and the lamp terminals that are connected with 5 employing optical fiber 6 of coupling device.Described integrated laser source includes light source base 1, and a plurality of semiconductor laser 2 being arranged in light source base 1, and the irradiation light of a plurality of semiconductor lasers 2 is all intersected in a bit, and the position that crosses is provided with collimation lens 3; Described light source base 1 adopts rectangular susceptor, and semiconductor laser 2 its light direction of illuminations that are installed in light source base 1 are horizontal direction; Between described semiconductor laser light source 2 and collimation lens 3, be provided with collector lens 4.In the present embodiment, the infrared laser that the laser beam that LASER Light Source sends is 980nm.
Adopt above-mentioned design, it can be converted into parallel rays by the light crossing by collimation lens, thereby realize the stability of illumination direction, simultaneously, the horizontal mounting means of semiconductor laser makes a plurality of semiconductor lasers be convenient to installation and debugging, thereby can realize the efficiency of integrated laser light illumination equipment in producing and debugging, is increased.
For semiconductor laser, at a certain temperature, when drive current is during higher than threshold current, laser instrument Output of laser, and power output increases sharply along with the increase of drive current, and be approximated to linear rising relation.According to common definition, laser brightness is the luminous flux in unit are, and luminous flux is the physical quantity linear with laser output power.Therefore, can be by regulating the electric current of its power supply to realize the control to its power output, thus realize the adjusting of laser brightness.So adopt above-mentioned design, it,, by the regulation and control to integrated laser light illumination equipment operating current, can realize the regulation and control of its lighting power.
As shown in Figure 2, between described integrated laser source and coupling device 5, be provided with light controlling device, it is by being arranged between collimation lens and coupling device, and its plane of living in is perpendicular to circular shadow shield 8 formations of the beam direction in integrated laser source.Described circular shadow shield 8 marginal portions are provided with a plurality of equally distributed loopholes 9; In described shadow shield 8, be positioned at the loophole 9 of extreme higher position over against collimation lens 3; Described shadow shield 8 home positions are provided with axis, and axis is connected to motor 10.In light controlling device, motor speed is set to 36000rad/min, and loophole width is 1.5mm, and loophole spacing is 2mm, and shadow shield radius is 15cm.
Owing to causing that the oversaturated reason of fluorescent material is that fluorescent material is subject in the process of laser excitation, be stimulated and the actuation duration of the Continuous irradiation of luminous relative laser of response time long, cause fluorescent material to have little time deexcitation and stay in the level of higher energy level, and luminous intensity is reduced; So adopt above-mentioned design, it can drive shadow shield to rotate by motor, thereby by shadow shield, and the loophole intermittence being arranged on shadow shield blocks laser, and then prevents laser Continuous irradiation fluorescent material and cause brightness supersaturation.
As shown in Figure 3, described lamp terminal is by laser shunt 7, and a plurality of light conversion means that is connected to laser shunt 7 by optical fiber 6 forms.Described light conversion means is by laser frequency multiplier 11, and end is provided with the spherical hollow transparent body 13 formations of fluorescent material 14; Described fluorescent material 14 is fixed on the transparent body 13 inside by resin material encapsulation; Between laser frequency multiplier 11 and the spherical hollow transparent body 13, be provided with the light disperser being formed by biconcave lens 12; The end of the transparent body 13 is fixed in 14 encapsulation of described fluorescent material, and its thickness is reduced to its surrounding gradually by the endpoint location of the transparent body 13.In the present embodiment, fluorescent material adopts yellow fluorescent powder Y
3al
5o
12ce.
Adopt above-mentioned design, laser frequency multiplier can transform optical maser wavelength, the wavelength that it is corresponded to actual needs; Fluorescent material can be converted into visible ray by laser beam, thereby realizes the effect of illumination; Meanwhile, light means for diverging can will be dispersed from fibre-optic laser beam, so that exciting light can be radiated on fluorescent material uniformly; The visible ray that the thickness setting of fluorescent material can make laser beam transform through fluorescent material is more even.
In above-described embodiment, described optical fiber 6 adopts silica fibre.
Above-mentioned integrated laser light illumination equipment, its infrared laser that a plurality of semiconductor lasers are sent converges at a bit, and becomes horizontal infrared laser beam by collimation lens.Meanwhile, in light controlling device, shadow shield is rotation under motor drives, and the intersection location of shadow shield and laser beam is switched back and forth at loophole and light shielding part interdigit, thereby realize the laser that LASER Light Source sends, is discontinuous laser.Laser beam enters optical-fibre channel by coupling device is laggard, and transfers to laser shunt, and it is divided into multichannel according to actual needs by laser; After disperseing, laser enters in light conversion means, via laser frequency multiplier, be translated into the wavelength of actual needs, thereby be converted into blue light from infrared laser, blue light illumination is to the fluorescent material of implication yellow fluorescent powder, a blue laser part is absorbed by fluorescent material, and inspires gold-tinted; Another part blue light is not absorbed by fluorescent material, directly from fluorescent material layer, penetrates.The gold-tinted that fluorescent material sends and the blue light seeing through from fluorescent material layer are mixed into white light jointly.
By measuring respectively in the integrated laser light illumination equipment that adopts technique scheme, through Ear Mucosa Treated by He Ne Laser Irradiation fluorescent material later, and the light controlling device in dismounting the technical program, luminosity through Ear Mucosa Treated by He Ne Laser Irradiation fluorescent material later can be known, when removing light controlling device, the luminosity of fluorescent material is 42.1% when light controlling device is housed.
Adopt the integrated laser light illumination equipment of technique scheme, it is by regulating operating current to realize the adjustable of LASER Light Source illumination efficiency, and irradiate by the interval that light controlling device is realized LASER Light Source, thereby the brightness supersaturation of avoiding thering is the direct excitation fluorescent material of laser of high-energy output density and causing, thereby the incident radiation density of fluorescent material is preserved steadily, its luminosity is increased; Meanwhile, above-mentioned integrated laser light illumination equipment adopts integrated laser light source as original excitation source, by the laser generating unit place of safety that is placed in, by Optical Fiber Transmission laser, in optical fiber, realize low-loss, long-distance transmissions, thereby realized, need the laser generation area of power supply and the isolation of field of illumination, by using optical fiber as the transmission medium of optical excitation signal, by laser, come that thereby excitation fluorescent material layer is luminous obtains visible illumination light, really accomplished emergency lighting.
Embodiment 2
As shown in Figure 4, a kind of integrated laser light illumination equipment, it comprises integrated laser source, coupling device 5 and the lamp terminals that are connected with 5 employing optical fiber 6 of coupling device.Described integrated laser source includes light source base 1, and a plurality of semiconductor laser 2 being arranged in light source base 1, and the irradiation light of a plurality of semiconductor lasers 2 is all intersected in a bit, and the position that crosses is provided with collimation lens 3; In described light source base 1, be provided with the spherical groove 15 towards collimation lens 3, a plurality of semiconductor lasers 2 are evenly arranged in spherical groove 15, and the light direction of illumination of each semiconductor laser 2 is all perpendicular to, the tangent plane of its position in spherical groove 15.In the present embodiment, the infrared laser that the laser beam that LASER Light Source sends is 980nm.
Adopt above-mentioned design, it has realized crossing of a plurality of semiconductor laser light by spherical groove, thereby make under prerequisite that integrated laser light illumination equipment crosses at the laser of guaranteeing a plurality of laser instruments, the quantity of internal part is reduced, thereby make the portability of Whole Equipment, and job stability all increases.
As shown in Figure 2, between described integrated laser source and coupling device 5, be provided with light controlling device, it is by being arranged between collimation lens and coupling device, and its plane of living in is perpendicular to circular shadow shield 8 formations of the beam direction in integrated laser source.Described circular shadow shield 8 marginal portions are provided with a plurality of equally distributed loopholes 9; In described shadow shield 8, be positioned at the loophole 9 of extreme higher position over against collimation lens 3; Described shadow shield 8 home positions are provided with axis, and axis is connected to motor 10.In light controlling device, motor speed is set to 40000rad/min, and loophole width is 2mm, and loophole spacing is 1.5mm, and shadow shield radius is 30cm.
As shown in Figure 3, described lamp terminal is by laser shunt 7, and a plurality of light conversion means that is connected to laser shunt 7 by optical fiber 6 forms.Described light conversion means is by laser frequency multiplier 11, and end is provided with the spherical hollow transparent body 13 formations of fluorescent material 14; Described fluorescent material 14 is fixed on the transparent body 13 inside by resin material encapsulation; Between laser frequency multiplier 11 and the spherical hollow transparent body 13, be provided with the light disperser being formed by biconcave lens 12; The end of the transparent body 13 is fixed in 14 encapsulation of described fluorescent material, and its thickness is reduced to its surrounding gradually by the endpoint location of the transparent body 13.In the present embodiment, fluorescent material adopts yellow fluorescent powder Y
3al
5o
12:ce and red fluorescence powder CaAlSiN
3: Eu.
In above-described embodiment, described optical fiber 6 adopts plastic optical fiber.
Above-mentioned integrated laser light illumination equipment, its infrared laser that a plurality of semiconductor lasers are sent converges at a bit, and becomes horizontal infrared laser beam by collimation lens.Meanwhile, in light controlling device, shadow shield is rotation under motor drives, and the intersection location of shadow shield and laser beam is switched back and forth at loophole and light shielding part interdigit, thereby realize the laser that LASER Light Source sends, is discontinuous laser.Laser beam enters optical-fibre channel by coupling device is laggard, and transfers to laser shunt, and it is divided into multichannel according to actual needs by laser.After disperseing, laser enters in light conversion means, and laser is converted into blue light through laser frequency multiplier, and blue light illumination is on the fluorescent material surface scribbling containing yellow fluorescent powder and red fluorescence powder, and a blue laser part is absorbed by fluorescent material, and inspires gold-tinted or ruddiness; Another part blue light is not absorbed by fluorescent material, directly from fluorescent material layer, penetrates.The light that fluorescent material sends and the light seeing through from fluorescent material layer are mixed into white light jointly.
By measuring respectively in the integrated laser light illumination equipment that adopts technique scheme, through Ear Mucosa Treated by He Ne Laser Irradiation fluorescent material later, and the light controlling device in dismounting the technical program, luminosity through Ear Mucosa Treated by He Ne Laser Irradiation fluorescent material later can be known, when removing light controlling device, the luminosity of fluorescent material is 37.6% when light controlling device is housed.
In the present embodiment, all the other feature & benefits are all identical with embodiment 1.
Claims (7)
1. an integrated laser light illumination equipment, is characterized in that, described integrated laser light illumination equipment comprise integrated laser source, coupling device and with coupling device between adopt optical fiber to be connected lamp terminal; Between described integrated laser source and coupling device, be provided with light controlling device, described lamp terminal is by laser shunt, and a plurality of light conversion means that is connected to laser shunt by optical fiber forms; Described integrated laser source consists of semiconductor laser light source; In described light controlling device, include printing opacity position and shading position, printing opacity position adopts on-fixed mode with respect to the position of integrated form light source.
2. according to integrated laser light illumination equipment claimed in claim 1, it is characterized in that, described integrated laser includes light source base in source, and a plurality of semiconductor laser being arranged in light source base; The irradiation light of a plurality of semiconductor lasers is all intersected in a bit, and the position that crosses is provided with collimation lens.
3. according to integrated laser light illumination equipment claimed in claim 2, it is characterized in that, described light source base adopts rectangular susceptor, and its light direction of illumination of semiconductor laser being installed in light source base is horizontal direction; Between described semiconductor laser light source and collimation lens, be provided with collector lens.
4. according to integrated laser light illumination equipment claimed in claim 2, it is characterized in that, in described light source base, be provided with the spherical groove towards collimation lens, a plurality of semiconductor lasers are evenly arranged in spherical groove, the light direction of illumination of each semiconductor laser is all perpendicular to, the tangent plane of its position in spherical groove.
5. according to the integrated laser light illumination equipment described in claim 1 to 4 any one, it is characterized in that, described light controlling device includes circular shadow shield, and its marginal portion is provided with a plurality of equally distributed loopholes; In described shadow shield, be positioned at the loophole of extreme higher position over against collimation lens; Described shadow shield home position axis, axis is connected to motor.
6. according to integrated laser light illumination equipment claimed in claim 1, it is characterized in that, described light conversion means is by laser frequency multiplier, and end is provided with the spherical hollow transparent body formation of fluorescent material; Described fluorescent material is fixed on transparent body inside by resin material encapsulation.
7. according to integrated laser light illumination equipment claimed in claim 6, it is characterized in that, in described light conversion means, between laser frequency multiplier and the spherical hollow transparent body, be provided with the light disperser being formed by biconcave lens; The end of the transparent body is fixed in the encapsulation of described fluorescent material, and its thickness is reduced to its surrounding gradually by the endpoint location of the transparent body.
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105066043A (en) * | 2015-09-01 | 2015-11-18 | 北京大学东莞光电研究院 | A car headlight based on laser-excited phosphor |
| CN105933662A (en) * | 2016-05-31 | 2016-09-07 | 南京邮电大学 | Active infrared monitoring system based on optical fiber energy transmission |
| CN107543781A (en) * | 2017-07-06 | 2018-01-05 | 南开大学 | Scattered light intensity is distributed detection system |
| CN108692230A (en) * | 2018-06-15 | 2018-10-23 | 上海翰远节能科技有限公司 | A kind of laser fiber fishing lamp |
| CN110056808A (en) * | 2018-01-18 | 2019-07-26 | 深圳市绎立锐光科技开发有限公司 | Laser light emitting device |
| CN112433419A (en) * | 2017-02-24 | 2021-03-02 | 大立光电股份有限公司 | Shading sheet, optical lens group, imaging lens and electronic device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105066043A (en) * | 2015-09-01 | 2015-11-18 | 北京大学东莞光电研究院 | A car headlight based on laser-excited phosphor |
| CN105933662A (en) * | 2016-05-31 | 2016-09-07 | 南京邮电大学 | Active infrared monitoring system based on optical fiber energy transmission |
| CN105933662B (en) * | 2016-05-31 | 2019-01-01 | 南京邮电大学 | The Active Infrared Monitoring System of energy is passed based on optical fiber |
| CN112433419A (en) * | 2017-02-24 | 2021-03-02 | 大立光电股份有限公司 | Shading sheet, optical lens group, imaging lens and electronic device |
| CN107543781A (en) * | 2017-07-06 | 2018-01-05 | 南开大学 | Scattered light intensity is distributed detection system |
| CN107543781B (en) * | 2017-07-06 | 2021-03-16 | 南开大学 | Scattered light intensity distribution detection system |
| CN110056808A (en) * | 2018-01-18 | 2019-07-26 | 深圳市绎立锐光科技开发有限公司 | Laser light emitting device |
| CN108692230A (en) * | 2018-06-15 | 2018-10-23 | 上海翰远节能科技有限公司 | A kind of laser fiber fishing lamp |
| CN113226632A (en) * | 2021-03-31 | 2021-08-06 | 长江存储科技有限责任公司 | Laser system for cutting semiconductor structure and operation method thereof |
| US12106985B2 (en) | 2021-03-31 | 2024-10-01 | Yangtze Memory Technologies Co., Ltd. | Laser dicing system and method for dicing semiconductor structure including cutting street |
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