CN203945368U - Robot device - Google Patents
Robot device Download PDFInfo
- Publication number
- CN203945368U CN203945368U CN201420357984.4U CN201420357984U CN203945368U CN 203945368 U CN203945368 U CN 203945368U CN 201420357984 U CN201420357984 U CN 201420357984U CN 203945368 U CN203945368 U CN 203945368U
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- Prior art keywords
- hand
- robot device
- loading
- turning cylinder
- wrist
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 21
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 21
- 239000010703 silicon Substances 0.000 claims abstract description 21
- 210000000707 wrist Anatomy 0.000 claims abstract description 17
- 230000033001 locomotion Effects 0.000 claims abstract description 11
- 230000001360 synchronised effect Effects 0.000 claims description 14
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 8
- 210000004247 hand Anatomy 0.000 claims description 4
- 238000007599 discharging Methods 0.000 claims description 3
- 230000003028 elevating effect Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 22
- 230000008569 process Effects 0.000 abstract description 22
- 238000005516 engineering process Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000001225 therapeutic effect Effects 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Manipulator (AREA)
Abstract
The utility model discloses a kind of robot device, comprise manipulator and drive unit, wherein, manipulator comprises base, mechanical arm, wrist and loads hand; Base is linear hinged mechanical arm and wrist successively for supporting, and the end of wrist is provided with loads hand for picking and placeing silicon chip; Drive unit is installed on base inside, for horizontally rotate/stretching motion of driving device hand; In addition, load hand and be at least 2 and there is respectively in the horizontal direction preset angles, respectively load hand and be fixedly connected with a turning cylinder and horizontally rotate motion around its vertical axial line; Also be provided with load hand-drive station, be located at turning cylinder above or below, for drive load hand-screw go to predeterminated position; Position local device, is installed on loading on hand, for locking the position angle that loads hand.A kind of robot device that the utility model provides can effectively completely cut off intersection in handling process and stain, and reduces costs, the occupation of land space of simplified structure, saving robot device.
Description
Technical field
The utility model belongs to semiconductor integrated circuit manufacturing equipment field, relates to a kind of robot device, relates to particularly a kind of robot device that transports silicon chip.
Background technology
Manipulator is the automated machine device that obtains at present broad practice in robot technical field, can see its figure in fields such as industry manufacture, therapeutic treatment, entertainment service, military affairs and space probations.Although their form is had nothing in common with each other, they have a common feature, can accept exactly instruction, and certain accurately navigating on three-dimensional (or two dimension) space is a bit carried out operation.Manipulator is also widely used in semiconductor integrated circuit manufacturing technology field, along with the development of semiconductor integrated circuit manufacturing technology, silicon chip is stain to control and require also more and more higher.
Current existing robot device generally adopts singlehanded robot device, carry out carrying process and process the silicon chip after front and PROCESS FOR TREATMENT, but the silicon chip of singlehanded robot device before due to meeting Continuous Contact PROCESS FOR TREATMENT and the silicon chip after PROCESS FOR TREATMENT, tend to form in handling process by manipulator intersect and stain.As shown in Figure 1 and Figure 2, Fig. 1, Fig. 2 are the structural representation of existing machinery arm device, comprise base 1, mechanical arm 2, the wrist 3 connecting successively and load hand 4, and wrist 3 and mechanical arm 2 form movable joint and drive loading hand 4 to carry silicon chip 5.Existing machinery arm device arranges single loading hand 4, and single loading hand 4 conventionally easily forms to intersect and stains in handling process.
For avoiding manipulator Silicon Wafers, the carrying of silicon chip also can adopt complicated many arms robot device, existing many arms robot device comprises two separate mechanical arms, two independently the end of mechanical arm all connect paw come respectively carrying process process before and PROCESS FOR TREATMENT after silicon chip to completely cut off contamiaative transmission.But there is the problems such as complex structure, cost is high, occupation of land space is large in existing many arms robot device conventionally.Therefore, provide a kind of robot device, in the intersection contamination of avoiding in handling process, reduce costs and become those skilled in the art's problem demanding prompt solution.
Utility model content
Technical problem to be solved in the utility model is to provide a kind of robot device, and simplified structure when avoiding the intersection contamination in handling process, reduces costs.
In order to solve the problems of the technologies described above, the utility model provides a kind of robot device, comprises manipulator and drive unit, wherein,
Described manipulator comprises base, mechanical arm, wrist and loads hand; Described base is linear hinged mechanical arm and wrist successively for supporting, and the end of described wrist is provided with loads hand for picking and placeing silicon chip;
Described drive unit is installed on described base inside, for driving horizontally rotate/stretching motion of described manipulator;
Described loading hand is at least 2 and have respectively in the horizontal direction preset angles, respectively loads hand and is fixedly connected with a turning cylinder and horizontally rotates motion around its vertical axial line;
Load hand-drive station, be located at described turning cylinder above or below, for driving described loading hand-screw to go to predeterminated position; Wherein, described loading hand-drive station has lifting shaft, can move up and down, and when loading hand needs switch, described lifting shaft moves and drives described turning cylinder rotation to the direction of described turning cylinder, thereby drives described loading hand-screw to go to predeterminated position;
Position local device, is installed on described loading on hand, for locking the position angle of described loading hand.
Preferably, described loading hand-drive station also comprises pedestal, stepper motor and synchronous toothed belt, and described stepper motor drives described lifting shaft to move up and down by described synchronous toothed belt.
Preferably, described loading hand-drive station also comprises pedestal, oscillating cylinder and synchronous toothed belt, and described oscillating cylinder drives described lifting shaft to move up and down by described synchronous toothed belt.
Preferably, described turning cylinder surface is provided with a groove, and described lifting shaft is provided with and the corresponding boss of described groove.
Preferably, described loading hand is multiple, and respectively loads hand and be uniformly distributed in the horizontal direction.
Preferably, described loading hand is 2, and keeps 180 ° between 2 loading hands.
Preferably, described mechanical arm is that 2 joints or 2 joints are above and to be linearity hinged successively.
Preferably, described base is cylinder, and it can do and rotate and elevating movement around self vertical axial line.
Preferably, described loading is provided with circular vacuum cup on hand for picking up or discharging target silicon chip.
Compared with existing scheme, hand is loaded at least two of the robot device settings that the utility model provides, load hand to predeterminated position by rotation, silicon chip before carrying process is processed respectively and after PROCESS FOR TREATMENT, can effectively completely cut off intersection in handling process and stain, reduce costs, the occupation of land space of simplified structure, saving robot device.
Brief description of the drawings
In order to be illustrated more clearly in the technical scheme in the utility model embodiment, to the accompanying drawing of required use in embodiment be briefly described below, apparently, accompanying drawing in the following describes is only embodiment more of the present utility model, for those of ordinary skill in the art, do not paying under the prerequisite of creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is the structural representation of existing machinery arm device;
Fig. 2 is the top view of existing machinery arm device;
Fig. 3 is the structural representation of the utility model robot device;
Fig. 4 is the top view of the utility model robot device;
Fig. 5 is the structural representation that the utility model loads hand-drive station.
Number in the figure is described as follows:
1, base; 2, mechanical arm; 3, wrist; 4, load hand; 5, silicon chip; 6, turning cylinder; 7, load hand-drive station; 71, pedestal; 72, stepper motor; 73, synchronous toothed belt; 74, lifting shaft; 75, boss.
Detailed description of the invention
For making the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with accompanying drawing, embodiment of the present utility model is described in further detail.Those skilled in the art can understand other advantages of the present utility model and effect easily by the disclosed content of this description.The utility model can also be implemented or be applied by other different detailed description of the invention, and the every details in this description also can be based on different viewpoints and application, carries out various modifications or change not deviating under spirit of the present utility model.
Above-mentioned and other technical characterictic and beneficial effect, be elaborated to robot device of the present utility model in connection with embodiment and accompanying drawing 3 to Fig. 5.Fig. 3 is the structural representation of the utility model robot device; Fig. 4 is the utility model robot device top view; Fig. 5 is the structural representation that the utility model loads hand-drive station.
As shown in Figures 3 to 5, the utility model provides a kind of robot device, comprises manipulator and drive unit, and wherein, described manipulator comprises base 1, mechanical arm 2, wrist 3 and loads hand 4; Base 1 is linear hinged mechanical arm 2 and wrist 3 successively for supporting, and the end of wrist 3 is provided with loads hand 4 for picking and placeing or clamp silicon chip 5; Drive unit is installed on base 1 inside, for horizontally rotate/stretching motion of driving device hand; In addition, load hand 4 and be at least 2 and there is respectively in the horizontal direction preset angles, respectively load hand 4 and be fixedly connected with a turning cylinder 6 and horizontally rotate motion around its vertical axial line; Also comprise load hand-drive station 7, be located at turning cylinder 6 above or below, for driving each loading hand 4 to rotate to predeterminated position; Wherein, load hand-drive station 7 and there is lifting shaft 74, can move up and down, while needing exchange to load hand 4 position, lifting shaft 74 moves and drives turning cylinder 6 to rotate to the direction of turning cylinder 6, thereby drive loading hand 4 to rotate to predeterminated position, in the time that loading hand 4 arrives predeterminated position, lifting shaft 74 is away from turning cylinder 6; Position local device, is installed on described loading hand 4, for locking the position angle of described loading hand 4.
In the present embodiment, described loading hand 4 is preferably 2, and keeps 180 ° between 2 loading hands 4, and loading hand 4 also can be multiple, is preferably in the horizontal direction and is uniformly distributed.Arbitrary loading hand 4 preferably remains on described wrist 3 front ends and protects 3 fair row with described wrist.In the process of carrying silicon chip 5, the position of loading hand 4 by exchange, carrying process is processed the silicon chip after front and PROCESS FOR TREATMENT respectively, and then realizes the function of many arms robot device.On described loading hand 4, be equipped with circular vacuum cup for picking up or discharging silicon chip 5.
In the present embodiment, described base 1 is cylinder, and it can do and rotate and elevating movement around self vertical axial line, and base 1 below also can be provided with slide rail or roller for movable base 1.
Hand 4 is loaded at least two of the robot device settings that the utility model provides, load hand 4 to predeterminated position by loading 7 rotations of hand-drive station, silicon chip before carrying process is processed respectively and after PROCESS FOR TREATMENT, can effectively completely cut off intersection in handling process and stain, reduce costs, the occupation of land space of simplified structure, saving robot device.
As shown in Figure 5, described loading hand-drive station 7 is for driving each loading hand 4 to rotate to predeterminated position, it comprises pedestal 71, lifting shaft 74, stepper motor 72 and synchronous toothed belt 73, and described stepper motor 72 drives lifting shaft 74 to move up and down by described synchronous toothed belt 73.Or described loading hand-drive station 7 comprises pedestal 71, lifting shaft 74, oscillating cylinder and synchronous toothed belt 73, described oscillating cylinder drives described lifting shaft 74 to move up and down by described synchronous toothed belt 73.Described turning cylinder 6 surfaces are provided with a groove, and described lifting shaft 74 is provided with and the corresponding boss of described groove.
While loading the position of hands 4 by 7 exchanges of loading hand-drive station, lifting shaft 74 on pedestal 71 rises, boss 75 on lifting shaft 74 sticks into the groove on turning cylinder 6, stepper motor 72 drives the boss 75 on lifting shaft 74 to rotate by synchronous toothed belt 73, boss 75 drives turning cylinder 6 to rotate by draw-in groove, also drive loading hand 4 to rotate simultaneously, by the step-by-step impulse of control step motor 72, can control loading hand 4 rotates to predeterminated position, preferably will load hand 4 Rotate 180 degree, reach the object of exchange loading hand 4 positions.Then, the lifting shaft 74 that loads hand-drive station 7 declines, and boss 75 is separated with turning cylinder 6, completes exchange and loads hand position.
Above-mentioned explanation illustrates and has described some preferred embodiments of the present utility model, but as previously mentioned, be to be understood that the utility model is not limited to disclosed form herein, should not regard the eliminating to other embodiment as, and can be used for various other combinations, amendment and environment, and can, in utility model contemplated scope described herein, change by technology or the knowledge of above-mentioned instruction or association area.And the change that those skilled in the art carry out and variation do not depart from spirit and scope of the present utility model, all should be in the protection domain of the utility model claims.
Claims (9)
1. a robot device, comprises manipulator and drive unit, wherein,
Described manipulator comprises base, mechanical arm, wrist and loads hand; Described base is linear hinged mechanical arm and wrist successively for supporting, and the end of described wrist is provided with loads hand for picking and placeing silicon chip;
Described drive unit is installed on described base inside, for driving horizontally rotate/stretching motion of described manipulator; It is characterized in that: also comprise:
Described loading hand is at least 2 and have respectively in the horizontal direction preset angles, respectively loads hand and is fixedly connected with a turning cylinder and horizontally rotates motion around its vertical axial line;
Load hand-drive station, be located at described turning cylinder above or below, for driving described loading hand-screw to go to predeterminated position; Wherein, described loading hand-drive station has lifting shaft, can move up and down, and when loading hand needs switch, described lifting shaft moves and drives described turning cylinder rotation to the direction of described turning cylinder, thereby drives described loading hand-screw to go to predeterminated position;
Position local device, is installed on described loading on hand, for locking the position angle of described loading hand.
2. robot device according to claim 1, is characterized in that, described loading hand-drive station also comprises pedestal, stepper motor and synchronous toothed belt, and described stepper motor drives described lifting shaft to move up and down by described synchronous toothed belt.
3. robot device according to claim 1, is characterized in that, described loading hand-drive station also comprises pedestal, oscillating cylinder and synchronous toothed belt, and described oscillating cylinder drives described lifting shaft to move up and down by described synchronous toothed belt.
4. robot device according to claim 1, is characterized in that, described turning cylinder surface is provided with a groove, and described lifting shaft is provided with and the corresponding boss of described groove.
5. robot device according to claim 1, is characterized in that, described loading hand is multiple, and respectively loads hand and be uniformly distributed in the horizontal direction.
6. robot device according to claim 1, is characterized in that, described loading hand is 2, and keeps 180 ° between 2 loading hands.
7. according to the arbitrary described robot device of claim 1～6, it is characterized in that, described mechanical arm is that 2 joints or 2 joints are above and to be linearity hinged successively.
8. according to the arbitrary described robot device of claim 1～6, it is characterized in that, described base is cylinder, and it can do and rotate and elevating movement around self vertical axial line.
9. according to the arbitrary described robot device of claim 1～6, it is characterized in that, described loading is provided with circular vacuum cup on hand for picking up or discharging target silicon chip.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420357984.4U CN203945368U (en) | 2014-06-30 | 2014-06-30 | Robot device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420357984.4U CN203945368U (en) | 2014-06-30 | 2014-06-30 | Robot device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203945368U true CN203945368U (en) | 2014-11-19 |
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ID=51887427
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420357984.4U Expired - Lifetime CN203945368U (en) | 2014-06-30 | 2014-06-30 | Robot device |
Country Status (1)
| Country | Link |
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| CN (1) | CN203945368U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107263547A (en) * | 2017-08-10 | 2017-10-20 | 北京中科通用能源环保有限责任公司 | Manipulator distributing device |
| CN107363824A (en) * | 2017-07-21 | 2017-11-21 | 重庆奥沃斯机器人有限公司 | Mechanical arm |
| CN108486532A (en) * | 2018-03-12 | 2018-09-04 | 昆山国显光电有限公司 | A kind of carrying device of evaporation source |
| CN113213151A (en) * | 2021-04-29 | 2021-08-06 | 广东安达智能装备股份有限公司 | Assembling method of multi-angle rotating and inclining assembling system |
-
2014
- 2014-06-30 CN CN201420357984.4U patent/CN203945368U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107363824A (en) * | 2017-07-21 | 2017-11-21 | 重庆奥沃斯机器人有限公司 | Mechanical arm |
| CN107263547A (en) * | 2017-08-10 | 2017-10-20 | 北京中科通用能源环保有限责任公司 | Manipulator distributing device |
| CN108486532A (en) * | 2018-03-12 | 2018-09-04 | 昆山国显光电有限公司 | A kind of carrying device of evaporation source |
| CN113213151A (en) * | 2021-04-29 | 2021-08-06 | 广东安达智能装备股份有限公司 | Assembling method of multi-angle rotating and inclining assembling system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20141119 |
|
| CX01 | Expiry of patent term |