CN203936803U - A kind of slurry conveyer - Google Patents
A kind of slurry conveyer Download PDFInfo
- Publication number
- CN203936803U CN203936803U CN201420318513.2U CN201420318513U CN203936803U CN 203936803 U CN203936803 U CN 203936803U CN 201420318513 U CN201420318513 U CN 201420318513U CN 203936803 U CN203936803 U CN 203936803U
- Authority
- CN
- China
- Prior art keywords
- output
- slurry
- spray orifice
- passage
- ground flat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000002002 slurry Substances 0.000 title claims abstract description 41
- 239000007921 spray Substances 0.000 claims abstract description 25
- 238000007599 discharging Methods 0.000 claims abstract description 6
- 230000000994 depressogenic effect Effects 0.000 claims description 4
- 238000000034 method Methods 0.000 abstract description 7
- 238000012423 maintenance Methods 0.000 abstract description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000012530 fluid Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
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- Mechanical Treatment Of Semiconductor (AREA)
Abstract
The utility model discloses a kind of slurry conveyer, comprise body and output, body has the end of discharging, and this body can be driven and in original place, a ground flat top beat; Output is provided with passage and is communicated with the spray orifice of this passage with plural number, and passage extends along central shaft, and spray orifice is along being arranged in output, and each spray orifice is towards ground flat, this output is hubbed at and discharges end, makes pulp flow in passage, and flows to this ground flat from this spray orifice respectively, thus, it is simple in structure, easy to use, can be in process of lapping distributed slurry equably, can suitably control the use amount of slurry, the distribution arrangement of slurry and scope, and be convenient to clean and maintenance.
Description
Technical field
The utility model relates to slurry conveyer, relates in particular to a kind of slurry conveyer for cmp.
Background technology
Present semiconductor wafer is all to go out thousands of electric crystals with solid or multilayer wiring mode framework, therefore utilize cmp (CMP) to process semiconductor wafer surface, and then allow flattening wafer surface, become the important step of semiconductor crystal wafer processing procedure.
Current chemical-mechanical grinding device is mainly a large amount of slurries to be directly injected into the grinding pad surface of rotation, slurry is again along with the rotation of grinding pad enters between wafer and grinding pad, to reach the effect of grinding, cleaning and lubricated wafer, make crystal column surface be polished out suitable surface quality state.
But, due to above-mentioned with single injection slurry in the mode of grinding pad, easily allowing a large amount of slurries be dispersed in cannot polished scope, the distribution of slurry is very inhomogeneous, therefore the use of slurry is too wasted, increase cost and environmental issue, also cannot promote the grinding effect of semiconductor crystal wafer simultaneously.
Utility model content
The purpose of this utility model provides a kind of slurry conveyer, its can be in process of lapping distributed slurry equably, can suitably control the use amount of slurry, the distribution arrangement of slurry and scope, and be convenient to clean and maintenance.
According to an aspect of the present utility model, a kind of slurry conveyer is provided, comprise body and output, body has the end of discharging, and this body can be driven and in original place, a ground flat top beat; Output is provided with passage and is communicated with the spray orifice of this passage with plural number, and passage extends along central shaft, and spray orifice is along being arranged in output, and each spray orifice is towards ground flat, this output is hubbed at and discharges end, makes pulp flow in passage, and flows to this ground flat from this spray orifice respectively.
In some embodiments: output is body, and spray orifice is arranged in a linear in the tube wall of output.
In some embodiments: discharge end and have top, this top has first side, and this first side is concaved with depressed part, this below, top forms the sidewall of two spaces, and output is hubbed between two side.
In some embodiments: body also includes positioning end, discharge between end and positioning end and be provided with body portion, this body portion bottom surface is provided with plural number towards the nozzle of ground flat.
In some embodiments: output is removably hubbed at and discharges end.
The utility model is simple in structure, easy to use, its can be in process of lapping distributed slurry equably, can suitably control the use amount of slurry, the distribution arrangement of slurry and scope, and be convenient to clean and maintenance.
Accompanying drawing explanation
Fig. 1 is the top view of a kind of slurry conveyer of the utility model;
Fig. 2 is the stereogram of a kind of slurry conveyer of the utility model;
Fig. 3 be a kind of slurry conveyer of the utility model discharge end structure schematic diagram;
Fig. 4 is the output structural representation of a kind of slurry conveyer of the utility model;
Fig. 5 is the top view that is applied to chemical-mechanical grinding device of a kind of slurry conveyer of the present invention.
The specific embodiment
Below in conjunction with accompanying drawing explanation, the utility model is described in further detail.
As Figure 1-5, a kind of slurry conveyer, comprise body 10 and output 60, body 10 have discharge end 20 with positioning end 30, discharge between end 20 and positioning end 30 and there is body portion 40, body 10 is located at grinder station (not shown) by positioning end 30, body 10 can be driven and in ground flat 50 original place, top beats.Discharge end 20 and have top 22, top 22 has first side 24, and first side 24 is concaved with depressed part 26, makes 22 belows, top form the sidewall 28 of two spaces.Body portion 40 bottom surfaces are separately provided with plural nozzle 42, and wherein nozzle 42 is positioned at depressed part 26.Body 10 inside can conducting in order to the cleaning fluid of washing, cleaning semiconductor wafer and grinding pad, cleaning fluid is sprayed towards ground flat 50 via each nozzle 42.
Output 60 is body, output 60 inside have passage 62, passage 62 extends output 60 along central shaft 63, output 60 is provided with plural number and from outer peripheral face, is communicated in the spray orifice 64 of passage 62, spray orifice 64 extends the tube wall of output 60 along predefined paths, spray orifice 64 is arranged in a straight line in tube wall 66 along the central shaft 63 that is parallel to output 60, and each spray orifice 64 is towards ground flat 50.It should be noted that, spray orifice 64 also can be according to non-rectilinear mode, and for example curve-like is arranged in tube wall 66.Output 60 two ends are hubbed at discharges end 20 two side 28, output 60 is formed and cross at 22 belows, top of discharging end 20, simultaneously contiguous and be parallel to first side 24.The passage 62 of output 60 is communicated to the slurry of body 10 guided inside, and passage 62 use are for pulp flow, and flows to ground flat 50 from each spray orifice 64.
Because body 10 can be located to deflection grinder station, when body 10 deflections and discharge end and 20 be positioned at ground flat 50 tops, owing to depositing difference dimensionally between spray orifice 64 and traditional slurry output body, the aperture size of spray orifice 64 is less than the aperture of traditional slurry output body, the slurry that plural number spray orifice 64 flows out can be wire and spray towards ground flat 50 directions, the ground flat 50 that sees through again rotation makes slurry be uniformly coated on ground flat 50, can a large amount of pulp sprayings not wasted as the ground flat as commonly used chemical-mechanical grinding device.
In addition, because being hubbed at, output 60 discharges end 20, output 60 can need and adjustment angle according to using, or even dismantle in discharging end 20, allow spray orifice 64 with respect to the position adjustment of discharging end 20, be coated with direction and region along with output 60, increase the scope of application of cmp processing procedure, and the enhancement effect of being convenient to maintenance.
In sum, this new structure is simple, easy to use, its can be in process of lapping distributed slurry equably, can suitably control the use amount of slurry, the distribution arrangement of slurry and scope, and be convenient to clean and maintenance.
The above is only a kind of embodiment of the present utility model; it should be pointed out that to those skilled in the art, do not departing under the prerequisite of the utility model creation design; can also make some similar distortion and improvement, within these also should be considered as protection domain of the present utility model.
Claims (5)
1. a slurry conveyer, is characterized in that: comprise body and output, described body has the end of discharging, and this body can be driven and in original place, a ground flat top beat; Described output is provided with passage and is communicated with the spray orifice of this passage with plural number, described passage extends along central shaft, described spray orifice is along being arranged in described output, and each spray orifice is towards described ground flat, described in being hubbed at, this output discharges end, make pulp flow in described passage, and flow to this ground flat from this spray orifice respectively.
2. a kind of slurry conveyer according to claim 1, is characterized in that: described output is body, and described spray orifice is arranged in a linear in the tube wall of described output.
3. a kind of slurry conveyer according to claim 1, it is characterized in that: described in discharge end there is top, this top has first side, this first side is concaved with depressed part, this below, top forms the sidewall of two spaces, and described output is hubbed between two side.
4. a kind of slurry conveyer according to claim 1, is characterized in that: described body also includes positioning end, described in discharge between end and positioning end and be provided with body portion, this body portion bottom surface is provided with plural number towards the nozzle of described ground flat.
5. a kind of slurry conveyer according to claim 1, is characterized in that: described in described output is removably hubbed at, discharge end.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420318513.2U CN203936803U (en) | 2014-06-16 | 2014-06-16 | A kind of slurry conveyer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420318513.2U CN203936803U (en) | 2014-06-16 | 2014-06-16 | A kind of slurry conveyer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203936803U true CN203936803U (en) | 2014-11-12 |
Family
ID=51856150
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420318513.2U Expired - Fee Related CN203936803U (en) | 2014-06-16 | 2014-06-16 | A kind of slurry conveyer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203936803U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111958479A (en) * | 2020-07-21 | 2020-11-20 | 北京烁科精微电子装备有限公司 | Polishing device and chemical mechanical planarization equipment |
-
2014
- 2014-06-16 CN CN201420318513.2U patent/CN203936803U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111958479A (en) * | 2020-07-21 | 2020-11-20 | 北京烁科精微电子装备有限公司 | Polishing device and chemical mechanical planarization equipment |
| CN111958479B (en) * | 2020-07-21 | 2022-06-28 | 北京烁科精微电子装备有限公司 | Polishing device and chemical mechanical planarization equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C53 | Correction of patent for invention or patent application | ||
| C56 | Change in the name or address of the patentee |
Owner name: CENG GUOFAN Free format text: FORMER NAME: CHEN YICHI |
|
| CB03 | Change of inventor or designer information |
Inventor after: Zeng Guofan Inventor after: Liao Jingran Inventor after: Zhang Yili Inventor after: Chen Yichi Inventor before: Chen Yichi Inventor before: Liao Jingran Inventor before: Zhang Yili Inventor before: Zeng Guofan |
|
| COR | Change of bibliographic data |
Free format text: CORRECT: INVENTOR; FROM: CHEN YICHI LIAO JINGRAN ZHANG YICHONG CENG GUOFAN TO: CENG GUOFAN LIAO JINGRAN ZHANG YICHONG CHEN YICHI |
|
| CP03 | Change of name, title or address |
Address after: 413400, No. 12, Gu Shan Road, Lantau Peak community, peach blossom Town, Taojiang County, Hunan Province, 1589 Patentee after: Zeng Guofan Patentee after: Liao Jingran Patentee after: Zhang Yili Patentee after: Chen Yichi Address before: 414000 No. 8, No. 309, happy village, Changling refinery, Yunxi District, Yueyang, Hunan Patentee before: Chen Yichi Patentee before: Liao Jingran Patentee before: Zhang Yili Patentee before: Zeng Guofan |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141112 Termination date: 20150616 |
|
| EXPY | Termination of patent right or utility model |