CN203683662U - Novel graphite boat bearing pin - Google Patents
Novel graphite boat bearing pin Download PDFInfo
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- CN203683662U CN203683662U CN201420065400.6U CN201420065400U CN203683662U CN 203683662 U CN203683662 U CN 203683662U CN 201420065400 U CN201420065400 U CN 201420065400U CN 203683662 U CN203683662 U CN 203683662U
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- pin
- graphite boat
- bearing pin
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Abstract
The utility model discloses a graphite bearing pin which comprises a central shaft and a clamping part. The graphite bearing pin is characterized in that the clamping part is a cut-edge-arc-shaped; and the central shaft is connected with the clamping part through a clamping groove and a circular-truncated-cone-shaped transition. According to the graphite bearing pin disclosed by the utility model, the coating film coverage area is reduced and the film thickness uniformity is improved on the premise of ensuring the service life of the pin, the maintenance cost of a graphite boat is reduced, and the coating film quality is improved.
Description
Technical field
The utility model relates to plasma enhanced chemical vapor deposition (PECVD) technical field, particularly relates to a kind of being applicable on the interior graphite boat of plasma enhanced chemical vapor deposition tubular type furnace chamber for clamping the pin of silicon chip.
Background technology
Graphite boat is a kind of carrying tool that the surperficial using plasma enhanced chemical vapor deposition processes of the polycrystalline after the art breading such as making herbs into wool and diffusion or monocrystalline silicon piece is carried out silicon nitride film coating in plasma enhanced chemical vapor deposition (PECVD) tube furnace.Graphite boat, as shown in Figure 1, is made up of the graphite substrate 5 of multiple perforates or not perforate and the graphite pin 6 in order to carry silicon chip being arranged on substrate.
Geometrical dimension and the assembly precision of carrying pin (also have and be called process point, graphite plugs etc.), directly have influence on the reliability of silicon chip clamping and the success ratio that silicon chip is loaded in automatization.The quality of pin clamping silicon chip will directly have influence on coating quality, and the shielded area of retaining part and silicon chip is crossed conference affects the deposition quality of silicon nitride film, forms aberration; Too small, easily cause silicon chip to come off in deposition process.
Tradition carrying pin adopts circular configuration (see figure 2) and diamond structure (see figure 3), and circular configuration pin shielded area in to the silicon nitride deposition process of silicon chip is larger, and film uniformity is poor, and aberration sheet ratio is higher; Diamond structure pin, although less to the shielded area of silicon chip, aberration sheet ratio is also lower, and because contact surface is little, the wearing and tearing of pin draw-in groove depth direction are very fast, and after draw-in groove wearing and tearing, silicon chip embeds in draw-in groove, and it is large that shielded area just becomes thereupon.Another defect of rhombus pin is that sharp wedge angle can scratch silicon chip edge or be touched down in handling sheet process, loses draw-in groove effect, therefore, must frequently change pin, to guarantee coating quality.Dismounting pin frequently, has not only increased pin use cost, and can make the spoilage of boat sheet increase, and causes the increase of graphite boat maintenance cost.
Utility model content
The purpose of this utility model is to overcome deficiency of the prior art, proposes a kind of graphite boat carrying pin of novel texture.
The utility model proposes a kind of graphite boat carrying pin, comprise central shaft and retained part, it is characterized in that: described retained part is trimming circular arc, described central shaft is connected with described retained part by draw-in groove and truncated cone-shaped transition.
More preferably, described draw-in groove is flat, and width is 0.2-0.5mm, and more excellent is 0.28mm; Described draw-in groove bottom is 0.4-0.7mm with the distance at described trimming circular arc top, and more excellent is 0.55mm.
More preferably, the width of described trimming circular arc is 1.5-4.5 mm, and more excellent is 1.8mm.
More preferably, described truncated cone-shaped transition angle is 20 °-40 °, and more excellent is 30 °.
The graphite boat carrying pin of the novel texture the utility model proposes, under the prerequisite of life cycle that guarantees pin, has reduced plated film shielded area, has improved film uniformity, has reduced the maintenance cost of graphite boat, has improved coating quality.
Accompanying drawing explanation
Can describe in detail and appended graphic being further understood by following utility model about advantage of the present utility model and spirit.
Fig. 1 is existing graphite boat structural representation;
Fig. 2 and Fig. 3 are existing graphite boat bearing pins pin structure schematic diagram;
Fig. 4 is the utility model graphite boat bearing pins pin structure schematic diagram.
Embodiment
Describe specific embodiment of the utility model in detail below in conjunction with accompanying drawing.
As shown in Figure 4, the object of the graphite boat carrying pin of the novel texture the utility model proposes is in plasma enhanced chemical vapor deposition tubular type furnace chamber, the silicon chip on graphite boat to be carried out under the processing condition of silicon nitride film deposition, the use cost that reduces graphite boat in improving the quality of cvd nitride silicon cladding and passivation effect is research and development and the use of having implemented novel graphite pin and reach one of this order calibration method.Graphite boat carrying pin, comprise central shaft 7 and retained part 8, in order to reduce shielded area, we change the design of original retained part 8 Zheng garden carrying pins into the design of trimming circular arc, i.e. axis centered by the diameter in garden that forms block surface, on symmetry direction, respectively cut part circular arc, become trimming circular arc 2 parts.Central shaft 7 is connected with retained part 8 by draw-in groove 1 and truncated cone-shaped transition 4.The width of trimming circular arc 2 is 1.8mm, and scope is 1.5-4.5mm.In order to make the reaction gas physical efficiency silicon chip of flowing through smoothly, between the channel bottom of retained part 8 and trimming circular arc, be designed to truncated cone-shaped transition 4, angle is 20 °-40 °, and optimum angle is 30 °.It is the cylindrical flat of 0.28mm that the draw-in groove 1 of retained part 8 is designed to width, and width range is 0.2-0.5mm.The distance 3 at cylindrical draw-in groove 1 bottom and trimming circular arc top is 0.55mm, and optimum distance is 0.4-0.7mm.
The design of novel graphite pin is to have changed shape, adjustment pin draw-in groove width and the degree of depth of blocking position, after modification pin block surface size, is realized.On probation through many relevant enterprises, think that the shielded area of described new shape pin on plated film sheet is little, cvd nitride silicon cladding and good passivation effect, the ratio of doing over again of silicon chip is used traditional pin to reduce by 2% left and right, and coating quality is better than circular pin; The wear-resistant degree of pin increases, and life cycle is longer than rhombus pin, and meanwhile, novel pin does not have wedge angle, when handling sheet, is not easy to scratch silicon chip edge, and fragmentation rate is low, is not only suitable for artificial load, is equally applicable to mechanical automation load.
Described in this specification sheets is preferred embodiment of the present utility model, and above embodiment is only in order to the technical solution of the utility model to be described but not to restriction of the present utility model.All those skilled in the art comply with design of the present utility model by the available technical scheme of logical analysis, reasoning, or a limited experiment, all should be within scope of the present utility model.
Claims (4)
1. a graphite boat carrying pin, comprises central shaft and retained part, it is characterized in that: described retained part is trimming circular arc, and described central shaft is connected with described retained part by draw-in groove and truncated cone-shaped transition.
2. graphite boat carrying pin as claimed in claim 1, is characterized in that described draw-in groove is flat, and width is 0.2-0.5mm, and more excellent is 0.28mm; Described draw-in groove bottom is 0.4-0.7mm with the distance at described trimming circular arc top, and more excellent is 0.55mm.
3. graphite boat carrying pin as claimed in claim 1, the width that it is characterized in that described trimming circular arc is 1.5-4.5mm, more excellent is 1.8mm.
4. graphite boat carrying pin as claimed in claim 1, is characterized in that described truncated cone-shaped transition angle is 20 °-40 °, and more excellent is 30 °.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420065400.6U CN203683662U (en) | 2014-02-14 | 2014-02-14 | Novel graphite boat bearing pin |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420065400.6U CN203683662U (en) | 2014-02-14 | 2014-02-14 | Novel graphite boat bearing pin |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203683662U true CN203683662U (en) | 2014-07-02 |
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ID=51005586
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420065400.6U Expired - Lifetime CN203683662U (en) | 2014-02-14 | 2014-02-14 | Novel graphite boat bearing pin |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203683662U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109244020A (en) * | 2018-11-06 | 2019-01-18 | 通威太阳能（安徽）有限公司 | A kind of novel pipe PECD graphite boat stuck point |
-
2014
- 2014-02-14 CN CN201420065400.6U patent/CN203683662U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109244020A (en) * | 2018-11-06 | 2019-01-18 | 通威太阳能（安徽）有限公司 | A kind of novel pipe PECD graphite boat stuck point |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140702 |
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| CX01 | Expiry of patent term |