CN203589449U - ESD protection device - Google Patents
ESD protection device Download PDFInfo
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- CN203589449U CN203589449U CN201320626858.XU CN201320626858U CN203589449U CN 203589449 U CN203589449 U CN 203589449U CN 201320626858 U CN201320626858 U CN 201320626858U CN 203589449 U CN203589449 U CN 203589449U
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- electrode layer
- sparking electrode
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- discharge electrode
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- 239000002245 particle Substances 0.000 claims abstract description 13
- 239000011810 insulating material Substances 0.000 claims description 8
- 239000000463 material Substances 0.000 abstract description 17
- 239000004020 conductor Substances 0.000 abstract 1
- 239000012212 insulator Substances 0.000 abstract 1
- 230000015572 biosynthetic process Effects 0.000 description 15
- 238000000034 method Methods 0.000 description 15
- 238000010304 firing Methods 0.000 description 13
- 238000004519 manufacturing process Methods 0.000 description 13
- 239000002562 thickening agent Substances 0.000 description 13
- 238000007650 screen-printing Methods 0.000 description 7
- 238000005520 cutting process Methods 0.000 description 6
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 5
- 239000000843 powder Substances 0.000 description 5
- 239000002002 slurry Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
- 238000002788 crimping Methods 0.000 description 4
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 239000011230 binding agent Substances 0.000 description 3
- 239000000470 constituent Substances 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 239000012299 nitrogen atmosphere Substances 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 229920001296 polysiloxane Polymers 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 239000001856 Ethyl cellulose Substances 0.000 description 1
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
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- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- -1 contain 2.0~60.0wt% Inorganic materials 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229920001249 ethyl cellulose Polymers 0.000 description 1
- 235000019325 ethyl cellulose Nutrition 0.000 description 1
- 229910052839 forsterite Inorganic materials 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- HCWCAKKEBCNQJP-UHFFFAOYSA-N magnesium orthosilicate Chemical compound [Mg+2].[Mg+2].[O-][Si]([O-])([O-])[O-] HCWCAKKEBCNQJP-UHFFFAOYSA-N 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
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- 238000010023 transfer printing Methods 0.000 description 1
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- 229910052721 tungsten Inorganic materials 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
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Abstract
The utility model aims to provide an ESD protection device which is provided with a couple of opposite discharge electrode layers across a narrow interval and provided with a relatively small discharge initial voltage. The ESD protection device (100) comprises a ceramic green body (6); a first discharge electrode layer (2) and a second discharge electrode layer (4) which are oppositely disposed in the ceramic green body (6) across an interval (G) in a layer-shaped manner; and a plurality of external electrodes (12, 12) formed on the surface of the ceramic green body (6) and electrically connected with the first discharge electrode layer (2) or the second discharge electrode layer (4), wherein end faces (2a, 4a) of the first discharge electrode layer (2) and the second discharge electrode layer (4) protrude relative to a surface (D), located between the first discharge electrode layer (2) and the second discharge electrode layer (4), of the ceramic green body (6), and a protection film (11) containing conductor particles and insulator materials is formed on the surface of the ceramic green body (6) so as to cover the protruded end faces (2a, 4a) of the first discharge electrode layer (2) and the second discharge electrode layer (4).
Description
Technical field
The utility model relates to esd protection device.
Background technology
In the past, for semiconductor device, electronic circuit are carried out to electrostatic protection, used for example patent documentation 1(WO2008/146514) shown in ESD(Electro-Static Discharge: static discharge) protection device.
The cutaway view of the esd protection device 200 shown in patent documentation 1 has been shown in Fig. 8.
In cavity, be formed with pair of discharge electrodes layer 102,104 in 107, its end face 102a, 104a are across interval G and relatively.Below pair of discharge electrodes layer 102,104 and opposed area 109 thereof, be formed with electric discharge auxiliary electrode layer 103.Electric discharge auxiliary electrode layer 103 contains conductive particle and insulating material.
On the surface of ceramic body 106, be formed with the multiple outer electrodes 112,112 that are electrically connected with sparking electrode layer 102,104.
The discharge ionization voltage of esd protection device 200 can reduce by the interval G reducing between end face 102a, the 104a of sparking electrode layer 102,104.
Prior art document
Patent documentation
Patent documentation 1:WO2008/146514
Utility model content
Utility model technical problem to be solved
In the manufacture method of existing esd protection device, end face 102a, 104a are across interval G and relative pair of discharge electrodes layer the 102, the 104th forms by for example silk screen printing.
But, because the printing position precision of silk screen printing is not high, therefore, be difficult to form end face 102a, 104a across narrow interval G and relative pair of discharge electrodes layer 102,104, thereby be difficult to obtain the esd protection device that discharge ionization voltage is less.
The purpose of this utility model is to provide a kind of esd protection device and manufacture method thereof, and this esd protection device possesses across narrow interval and relative pair of discharge electrodes layer, and its discharge ionization voltage is less.
The technological means of dealing with problems
To achieve these goals, esd protection device of the present utility model is characterised in that, comprising: ceramic body; In the inside of ceramic body across interval with laminated form relatively and the first sparking electrode layer and the second sparking electrode layer that arrange; And be formed on the surface of ceramic body and the multiple outer electrodes that are electrically connected with the first sparking electrode layer or the second sparking electrode layer; the end face of the first sparking electrode layer and the second sparking electrode layer is outstanding with respect to the surface of the ceramic body between the first sparking electrode layer and the second sparking electrode layer; on the surface of ceramic body, be formed with the diaphragm that comprises conductive particle and insulating material, to cover the outstanding end face of the first sparking electrode layer and the second sparking electrode layer.
In addition, the manufacture method of esd protection device of the present utility model is characterised in that, comprises following operation: the operation of preparing multi-disc the first ceramic green sheet; Prepare at least operation of a slice the second ceramic green sheet; Preparation is fired the sparking electrode layer of firing shrinkage that shrinkage is less than the second ceramic green sheet and is formed by the operation of thickener; On an interarea of the first ceramic green sheet stipulating, be coated with sparking electrode layer formation thickener in multi-disc the first ceramic green sheet, thereby form the operation of the first sparking electrode layer of not firing; On the first sparking electrode layer, be laminated to the operation of few a slice the second ceramic green sheet; On the second ceramic green sheet being laminated on the first sparking electrode layer, be coated with sparking electrode layer formation thickener, thereby form the operation of the second sparking electrode layer of not firing; On the second sparking electrode layer, be laminated to few a slice the first ceramic green sheet and carry out crimping, thus the operation of formation duplexer; Using the face in the cross section that comprises the first sparking electrode layer and the second sparking electrode layer as divisional plane, the operation that duplexer is cut apart; The operation that duplexer after cutting apart is fired; On the surface of duplexer, form the diaphragm that contains conductive particle and insulating material, to cover the operation of divisional plane of the first sparking electrode layer and the second sparking electrode layer; And on the surface of the duplexer after cutting apart, form the operation of the multiple outer electrodes that are electrically connected with the first sparking electrode layer or the second sparking electrode layer.
The effect of utility model
According to the utility model, can obtain possessing across narrow interval and relative pair of discharge electrodes layer and the less esd protection device of discharge ionization voltage.
Accompanying drawing explanation
Fig. 1 (A) is the stereogram of the esd protection device 100 of the utility model execution mode; Fig. 1 (B) is the major part stereogram of esd protection device 100; Fig. 1 (C) is the cutaway view of esd protection device 100, corresponding to the A-A line of Fig. 1 (A).
Fig. 2 is the stereogram that represents the manufacture method operation used of the esd protection device 100 of the utility model execution mode.
Fig. 3 is the follow-up of Fig. 2, is the major part stereogram that represents the manufacture method operation used of the esd protection device 100 of the utility model execution mode.
Fig. 4 is the follow-up of Fig. 3, is the major part stereogram that represents the manufacture method operation used of the esd protection device 100 of the utility model execution mode.
Fig. 5 is the follow-up of Fig. 4, is the major part stereogram that represents the manufacture method operation used of the esd protection device 100 of the utility model execution mode.
Fig. 6 is the follow-up of Fig. 5; represent the manufacture method operation used of the esd protection device 100 of the utility model execution mode; Fig. 6 (A) is major part stereogram, and Fig. 6 (B) is the cutaway view corresponding to the A-A line of Fig. 6 (A).
Fig. 7 is the follow-up of Fig. 6, represents the manufacture method operation used of the esd protection device 100 of the utility model execution mode, and Fig. 7 (A) is stereogram, and Fig. 7 (B) is the cutaway view corresponding to the A-A line of Fig. 7 (A).
Fig. 8 is the cutaway view of existing esd protection device 200.
Embodiment
Below, with reference to the accompanying drawings, execution mode of the present utility model example is described.
The esd protection device 100 of the utility model execution mode has been shown in Fig. 1.
As shown in Fig. 1 (A), esd protection device 100 possesses ceramic body 6, by the first ceramic green sheet 1,1,1 with the second ceramic green sheet 3 is stacked and crimping is integral and form.The BAS material that the materials'use of ceramic body 6 for example mixes various materials centered by Ba, Al, Si.
In the inside of ceramic body 6, as shown in Fig. 1 (B), Fig. 1 (C), be provided with across interval and with laminated form relative, the first sparking electrode layer 2 and the second sparking electrode layer 4 that by Cu etc., are formed.Between the first sparking electrode layer 2 and the second sparking electrode layer 4, be formed with the second ceramic green sheet 3 that forms ceramic body 6.By changing the thickness of this second ceramic green sheet 3, can control the interval between the first sparking electrode layer 2 and the second sparking electrode layer 4.
On the surperficial D of ceramic body 6, as shown in Fig. 1 (A), Fig. 1 (C), be formed with diaphragm 11, to cover outstanding end face 2a, the 4a of the first sparking electrode layer 2 and the second sparking electrode layer 4.Diaphragm 11 contains the conductive particle for example being formed by Al etc. and the insulating material being formed by silicones or epoxy resin etc.
On the surface of ceramic body 6, as shown in Fig. 1 (A), be formed with the multiple outer electrodes 12,12 that are electrically connected with the first sparking electrode layer 2 or the second sparking electrode layer 4.
Between the end face 4a of the esd protection device 100 with said structure by the end face 2a at the first sparking electrode layer 2 or interarea 2b and the second sparking electrode layer 4 or interarea 2b, there is creeping discharge or gas discharge carries out work.The diaphragm 11 that contains conductive particle has electric discharge miscellaneous function, thereby reduces the discharge ionization voltage of esd protection device 100.
As mentioned above, esd protection device 100 is as shown in Fig. 1 (C), and the first sparking electrode layer 2 and the second sparking electrode layer 4 end face 2a, 4a and interarea 2b, 4b is separately that interval G is relative across beeline.Utilize manufacture method described later, can the thickness of the second ceramic green sheet 3 be formed very littlely.Thereby, can interval G be set very littlely, thereby reduce the discharge ionization voltage of esd protection device 100.
In addition, as mentioned above, not only end face 2a, the 4a of the first sparking electrode layer 2, the second sparking electrode layer 4 are relative, and interarea 2b, the 4b of the first sparking electrode layer 2, the second sparking electrode layer 4 are also relative.Therefore, the relative area of the first sparking electrode layer 2 and the second sparking electrode layer 4 increases, and can improve the continuous performance of esd protection device 100.
Below, with reference to Fig. 1~Fig. 7, an example of the manufacture method of the esd protection device 100 to the utility model execution mode describes.
First, the sparking electrode layer formation thickener of preparing to form the first ceramic green sheet 1 and second ceramic green sheet 3 of ceramic body 6 and forming the first sparking electrode layer 2 and the second sparking electrode layer 4.
By the various materials centered by Ba, Al, Si according to the rules ratio concoct and mix, at 800~1000 ℃, fire temporarily, form thus BAS material.For BAS material, for example Ba is converted into BaO, contain 4.0~50.0wt%, Al is converted into Al2O3, contain 2.0~60.0wt%, Si is converted into SiO2, contain 4.0~70.0wt%.The pulverizing that utilizes zirconia ball grinding machine obtained BAS material to be carried out 12 hours, thereby the insulating material being formed by BAS material of formation average grain diameter approximately 1 μ m.In this insulating material, add the organic solvents such as toluene or alcohol and mixed.Afterwards, add adhesive, plasticizer, be obtained by mixing slurry.
Then, by scraping the skill in using a kitchen knife in cookery, slurry being shaped and being dried, is the first ceramic green sheet of 5 μ m thereby form multi-disc thickness.And by same method, forming at least a slice thickness is the second ceramic green sheet of 10 μ m etc.By controlling as described above the component ratio of slurry, make the first ceramic green sheet and the second ceramic green sheet to fire shrinkage (fire rear size/fire front size) be 85%.
Then, the alumina powder that by particle diameter is 0.5~1.0 μ m mixes with the Cu powder that average grain diameter is about 2 μ m, and in the binder resin being formed by ethyl cellulose etc., add solvent, they are carried out to Agitation and mixing with three rollers, thereby form sparking electrode layer formation thickener.In addition, the ratio of alumina powder and Cu particle is 80wt%, and the ratio of binder resin and solvent is 20wt%, in this ratio, mixes.In addition, alumina powder and Cu particle mix with the ratio of 95vol% and 5vol% respectively.By being controlled to mixed proportion as described above, the formation of sparking electrode layer is 86~90% by the shrinkage of firing of thickener.This fires shrinkage and is set as being greater than the shrinkage of firing of the first ceramic green sheet 1 and the second ceramic green sheet 3.
Then, as shown in Figure 2, in multi-disc the first ceramic green sheet 1, on an interarea of the first ceramic green sheet of regulation, by silk screen printing, be coated with sparking electrode layer formation thickener, thereby form the first sparking electrode layer 2 of not firing.The thickness of the first sparking electrode layer 2 is for example 10 μ m.
Then, as shown in Figure 3, on the first sparking electrode layer 2, stacked the second ceramic green sheet 3.In addition, in Fig. 3, represent the first sparking electrode layer 2 with solid line, and dot in the first ceramic green sheet 1 and second ceramic green sheet 3(Fig. 4~Fig. 6 too).
Then, as shown in Figure 4, on the second ceramic green sheet 3 being laminated on the first sparking electrode layer 2, by silk screen printing, be coated with sparking electrode layer formation thickener, thereby form the second sparking electrode layer 4 of not firing.The thickness of the second sparking electrode layer 4 is for example 10 μ m.
Then, as shown in Figure 5, on the second sparking electrode layer 4, stacked multi-disc the first ceramic green sheet 1(illustrates multi-disc the first ceramic green sheet 1 as one) and carry out crimping.
Then, be formed with on the lower surface of the first ceramic green sheet 1 of the first sparking electrode layer 2 on an interarea, stacked multi-disc the first ceramic green sheet 1(illustrates multi-disc the first ceramic green sheet 1 as one) and carry out crimping.Consequently, the duplexer 10 that formation thickness is 0.3mm, it has the ceramic body 6 consisting of the first ceramic green sheet 1,1,1 and the second ceramic green sheet 3.
Then,, as shown in Fig. 6 (A), using the face in the cross section that comprises the first sparking electrode layer 2 and the second sparking electrode layer 4 as divisional plane D, by using min-cutter to cut, thereby cut apart duplexer 10.Duplexer 10 after cutting apart is of a size of for example 1.0mm × 0.5mm × 0.3mm.On divisional plane D, as shown in Fig. 6 (B), G spaced apart and relative the first sparking electrode layer 2 and the second sparking electrode layer 4 end face 2a, 4a separately exposes.
Then, the duplexer after cutting apart 10 being placed in to N2 atmosphere fires.Because the shrinkage of firing of the first ceramic green sheet 1 and the second ceramic green sheet 3 is less than sparking electrode layer and forms by the shrinkage of firing of thickener, therefore, as shown in Figure 7, end face 2a, the 4a of the first sparking electrode layer 2, the second sparking electrode layer 4 are with respect to the divisional plane D of the ceramic body 6 between the first sparking electrode layer 2 and the second sparking electrode layer 4 and give prominence to.Consequently, not only to separate beeline be interval G and relatively for end face 2a, the 4a of the first sparking electrode layer 2, the second sparking electrode layer 4, and it is interval G and relative that the first sparking electrode layer 2 and interarea 2b, the 4b of the second sparking electrode 4 also separate beeline.
Then, as shown in Figure 7, on the surface of duplexer 10, be coated with conducting paste sintering, thereby form the multiple outer electrodes 12,12 that are electrically connected with the first sparking electrode layer 2 or the second sparking electrode layer 4.
Then; on the divisional plane D of the first sparking electrode 2 respect to one another and the second sparking electrode layer 4; the material that coating comprises the conductive particle being formed by Al etc. and the insulating material being formed by silicones or epoxy resin etc., having formed figure is the diaphragm 11 shown in Fig. 1.
Finally, on outer electrode 12,12, by plating, form the film being formed by Ni and Sn, thereby complete esd protection device 100.
According to the manufacture method of the esd protection device 100 shown in above-mentioned; because the print thickness precision of silk screen printing is higher; can between the first sparking electrode layer 2 and the second sparking electrode layer 4, form the second ceramic green sheet 3 that thickness is less, and can the interval G between the first sparking electrode layer 2 and the second sparking electrode layer 4 be set littlely.
In addition,, by adopting silk screen printing, cutting so lower-cost method, with regard to forming, separate narrow interval G and relative the first sparking electrode layer 2 and the second sparking electrode layer 4.
In addition, only need fire by cutting after having cut apart duplexer 10 outstanding the first sparking electrode layer 2 and the second sparking electrode layer 4 with regard to forming with respect to the surperficial D of the ceramic body 6 between the first sparking electrode layer 2 and the second sparking electrode layer 4.
In addition, related esd protection device and the manufacture method thereof of execution mode of the present utility model is not limited to foregoing, as long as follow the design of utility model, can carry out various changes.
For example, in the above-described embodiment, the ceramic body 6 material used various materials that have been mixing centered by Ba, Al, Si and the BAS material that forms, but also can use the material that adds glass and obtain in forsterite or in CrZrO3, add glass and material of obtaining etc.
In addition, sparking electrode layer has formed with the materials'use of the conductive particle comprising in thickener Cu, but also can use the combination of Ag, Pd, Pt, Al, Ni, W or these elements.
In addition, the formation of sparking electrode layer by alumina powder, Cu particle, binder resin and solvent are formed, is fired shrinkage but also can further add the ceramic materials such as silica, zirconia to control with thickener.
In addition, the formation of sparking electrode layer is not limited to foregoing by thickener and the second ceramic green sheet 3 constituent and mixed proportion separately, as long as sparking electrode layer forms the shrinkage of firing of firing shrinkage and be set as being less than the second ceramic green sheet 3 with thickener, can be constituent and mixed proportion arbitrarily.
In addition, as shown in Figure 3, stacked a slice the second ceramic green sheet 3 on the first sparking electrode layer 2, but also can stacked multi-disc.
In addition, as shown in Figure 4, on the second ceramic green sheet 3, by silk screen printing, form the second sparking electrode layer 4, but also can form the second sparking electrode layer 4 by transfer printing.
In addition, as shown in Fig. 3~Fig. 5, on the first ceramic green sheet 1 that is formed with the first sparking electrode layer 2, be laminated with the second ceramic green sheet 3, and formed the second sparking electrode layer 4 on this second ceramic green sheet 3, but its formation order is not limited to this.
For example, prepare first to be respectively formed with the first ceramic green sheet 1 of the first sparking electrode layer 2 and to be formed with the second ceramic green sheet 3 of the second sparking electrode layer 4.Then, stacked the second ceramic green sheet 3 on the first ceramic green sheet 1.In execution mode of the present utility model, also can adopt above-mentioned formation order.
Also for example, first, prepare respectively to stack gradually the first cascade body forming and the second duplexer being laminated by the second sparking electrode layer 4, the first ceramic green sheet 1 by the first ceramic green sheet 1, the first sparking electrode layer 2, the second ceramic green sheet 3.Then, the folded body of the stacked second layer on first cascade body.In execution mode of the present utility model, also can adopt above-mentioned formation order.
In addition, as shown in Figure 6, a duplexer 10 is divided into 2 duplexers 10, but also can forms the duplexer 10 of mother substrate state, thereby this duplexer 10 is divided into a large amount of duplexer 10.
In addition, duplexer 10 is placed in to N2 atmosphere and fires, but also can be placed in the inert gas atmospheres such as Ar or Ne, fire.In addition, in the case of the first sparking electrode layer 2 and the second sparking electrode layer 4 be by the material that oxidation can not occur, formed, also can in air atmosphere, fire.
In addition, the first ceramic green sheet 1 and the second ceramic green sheet 3 are formed by same slurry, but also can form the first ceramic green sheet 1 and the second ceramic green sheet 3 with constituent or the different slurry of mixed proportion.
In addition, as shown in Fig. 1 (C), the surface of the part that end face 2a, the 4a of the first sparking electrode layer 2 and the second sparking electrode layer 4 is not relative with the second sparking electrode layer 4 with respect to the first sparking electrode layer 2 in ceramic body 6 is outstanding, but end face 2a, 4a can be configured on the same face with this surface D, also can cave in respect to this surface D.
In this case, the shrinkage of firing of firing shrinkage and be configured to be equal to or greater than the first sparking electrode layer 2 and the second sparking electrode layer 4 of the first ceramic green sheet.
Label declaration
1 first ceramic green sheet
2 first sparking electrode layers
The end face of 2a the first sparking electrode layer
The interarea of 2b the first sparking electrode layer
3 second ceramic green sheets
4 second sparking electrode layers
The end face of 4a the second sparking electrode layer
The interarea of 4b the second sparking electrode layer
6 ceramic bodies
10 duplexers
11 diaphragms
12 outer electrodes
100 esd protection devices
G interval
D surface, divisional plane
Claims (1)
1. an esd protection device, is characterized in that, comprising:
Ceramic body;
In the inside of described ceramic body across interval with laminated form relatively and the first sparking electrode layer and the second sparking electrode layer that arrange; And
Be formed on the surface of described ceramic body and the multiple outer electrodes that are electrically connected with described the first sparking electrode layer or described the second sparking electrode layer,
The end face of described the first sparking electrode layer and described the second sparking electrode layer is outstanding with respect to the surface of the described ceramic body between described the first sparking electrode layer and described the second sparking electrode layer,
On the surface of described ceramic body, be formed with the diaphragm that comprises conductive particle and insulating material, to cover the outstanding end face of described the first sparking electrode layer and described the second sparking electrode layer.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2012-227098 | 2012-10-12 | ||
JP2012227098A JP5605413B2 (en) | 2012-10-12 | 2012-10-12 | ESD protection device and manufacturing method thereof |
Publications (1)
Publication Number | Publication Date |
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CN203589449U true CN203589449U (en) | 2014-05-07 |
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Application Number | Title | Priority Date | Filing Date |
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CN201320626858.XU Expired - Lifetime CN203589449U (en) | 2012-10-12 | 2013-10-11 | ESD protection device |
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JP (1) | JP5605413B2 (en) |
CN (1) | CN203589449U (en) |
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CN209571285U (en) | 2016-09-30 | 2019-11-01 | 株式会社村田制作所 | Electronic component |
CN108695685A (en) * | 2017-03-29 | 2018-10-23 | 卓英社有限公司 | Chip-shaped surge absorber |
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US6013358A (en) * | 1997-11-18 | 2000-01-11 | Cooper Industries, Inc. | Transient voltage protection device with ceramic substrate |
JPH10270145A (en) * | 1997-03-28 | 1998-10-09 | Tdk Corp | Discharge gap element and surge protection device |
JP2000311764A (en) * | 1999-04-26 | 2000-11-07 | Tokin Corp | Surge absorbing element, and manufacture thereof |
-
2012
- 2012-10-12 JP JP2012227098A patent/JP5605413B2/en active Active
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- 2013-10-11 CN CN201320626858.XU patent/CN203589449U/en not_active Expired - Lifetime
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JP2014082003A (en) | 2014-05-08 |
JP5605413B2 (en) | 2014-10-15 |
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