CN203587114U - Capacitive gyroscope for Z-axis micro-electromechanical system (MEMS) - Google Patents
Capacitive gyroscope for Z-axis micro-electromechanical system (MEMS) Download PDFInfo
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- CN203587114U CN203587114U CN201320630008.7U CN201320630008U CN203587114U CN 203587114 U CN203587114 U CN 203587114U CN 201320630008 U CN201320630008 U CN 201320630008U CN 203587114 U CN203587114 U CN 203587114U
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Abstract
The utility model discloses a capacitive gyroscope for a Z-axis micro-electromechanical system (MEMS). The capacitive gyroscope comprises a master mass block, a sub-mass block, a drive capacitor tank, a detection capacitor tank, a sensitive capacitor tank, a base, a center coupling structure, a lever, an anchor point and elastic beams, wherein fixed comb teeth of the drive and detection capacitor tanks are fixed on the base; movable comb teeth are connected with the master mass block; the fixed comb teeth of the sensitive capacitor tank are fixed on the base; the movable comb teeth are respectively connected with the sub-mass block and the lever through the elastic beams; the master mass block is connected to the anchor point through the elastic beams; the sub-mass block is connected with the center coupling structure through the elastic beams; the center coupling structure is connected with the lever through the elastic beams; and the lever is fixed on the anchor point through the elastic beams. The capacitive gyroscope for the Z-axis MEMS in the utility model has the characteristics of being small in volume, low in cost, high in accuracy, good in resistance to shock, and good in integration property.
Description
Technical field
The utility model relates to gyroscope, relates in particular to a kind of Z axis MEMS condenser type gyroscope.
Background technology
MEMS(MEMS – Micro Electro-Mechanical System MEMS (micro electro mechanical system)) gyroscope has the advantage that volume is little, cost is low, integration is good, therefore obtain applying more and more widely, in the product such as mobile terminal, camera are anti-shake as being applied in, game paddle, toy airplane, navigation.MEMS gyroscope is realized the detection of angular velocity signal based on coriolis force, have and drive and responsive two large divisions.Wherein, drive loop to make mass realize simple harmonic oscillation with certain frequency, when having turning rate input in the direction vertical with mass direction of motion, coriolis force can produce in the direction vertical with input angular velocity direction with mass direction of motion, thereby drive responsive end to produce sensitive signal, by this sensitive signal, detect the angular velocity of input.
The scheme that detects angular velocity in prior art has:
(1) conventional fiber-optic gyroscopes, the shortcoming of this scheme is for MEMS gyroscope, and conventional fiber-optic gyroscopes volume is large, and cost is high, is not suitable for consumer electronics.
(2) MEMS piezoelectric gyroscope, the shortcoming of this scheme is that the relative condenser type gyroscope of sensitivity is lower, and processing technology/material cost is higher, common use PZT(lead zirconate titanate) as piezoelectric, this type of piezoelectric ceramics process technology threshold is higher, mainly by Japan, is grasped.
(3) existing MEMS condenser type gyroscope, the shortcoming of conventional scheme is that structure is more complicated, shock resistance is poor, exists coupling to cause signal to interfere with each other between driving/responsive mode.
Utility model content
The purpose of this utility model is to propose a kind of Z axis MEMS condenser type gyroscope, to solve the problem that in prior art, gyroscope exists, it is little that the related gyroscope of the utility model has volume, low cost, high precision, shock resistance is good, and the feature that integration is good is particularly suitable for being used in the products such as anti-shake in mobile terminal, camera, game paddle, toy airplane, navigation.
To achieve these goals, the utility model proposes a kind of Z axis MEMS condenser type gyroscope, comprise substrate, a pair of matrix gauge block, at least one pair of drives capacitance group, at least one pair of sensitization capacitance group, central coupled structure, a pair of lever and anchor point, wherein said each matrix gauge block comprises two sub-masses;
Described central coupled structure, is formed in substrate, comprises two pairs of end points, its another end points is connected to respectively to the lever corresponding with this end points;
Described this is oppositely arranged in central coupled structure both sides matrix gauge block, one side anchor of each matrix gauge block is connected to an anchor point corresponding thereto, opposite side is connected on of a pair of end points of central coupled structure, two sub-masses in described each matrix gauge block interconnect, and are also provided with in described at least one pair of driving capacitance group between described this each matrix gauge block another anchor point corresponding thereto;
Each fixed fingers and movable comb of including of described at least one pair of driving capacitance group, wherein fixed fingers is fixed in described substrate, its movable comb is connected to respectively the sidewall of corresponding with it matrix gauge block near anchor point, and the fixed fingers of described each driving capacitance group receives as drive electrode the driving signal that peripheral circuit provides;
Described this to lever, be anchored to anchor point corresponding thereto respectively, and be connected to respectively the movable comb of described at least one pair of sensitization capacitance group of answering in contrast;
Each in described at least one pair of sensitization capacitance group includes fixed fingers and movable comb, wherein fixed fingers is fixed in described substrate, its movable comb is also connected to respectively corresponding with it protonatomic mass piece, and the fixed fingers of described sensitization capacitance group is provided for measuring the sensitive signal of additional magnitude of angular velocity as sensitive electrode.
It is little that the beneficial effect of this scheme of the present utility model is that the gyroscope obtaining by above-mentioned design has volume, low cost, and shock resistance is good, the feature that integration is good.
Preferably, described gyrostatic structure full symmetric.
Preferably, described gyroscope also comprises at least one pair of Detection capacitance group, described Detection capacitance group comprises fixed fingers and movable comb, wherein fixed fingers is fixed in described substrate, its movable comb is connected to respectively the sidewall of with it corresponding matrix gauge block near anchor point, the fixed fingers of described Detection capacitance group as detecting electrode by the capacitance variations signal feedback of Detection capacitance group to drive electrode.
Preferably, described capacitance group comprises two pairs of sensitization capacitance groups, and described two pairs of sensitization capacitance groups are symmetrical arranged, and in the fixed fingers of described sensitization capacitance group, in the fixed fingers of diagonal positions, is connected and forms a pair of sensitive electrode.
Preferably, between described central coupled structure and described matrix gauge block, described lever, between described matrix gauge block and described anchor point, between two sub-masses in described matrix gauge block, between described sensitization capacitance group and described protonatomic mass piece, described lever, between described lever and described anchor point, by elastic beam, connect respectively.
Preferably, described matrix gauge block and with it the elastic beam between corresponding anchor point be designed to there is larger rigidity at y direction of principal axis; Elastic beam between described matrix gauge block and described central coupled structure is designed to have larger rigidity at x direction of principal axis; Elastic beam between two sub-masses in described matrix gauge block is designed to have larger rigidity at x direction of principal axis; Elastic beam between the sensitization capacitance group of described protonatomic mass piece and with it correspondence is designed to have larger rigidity at y direction of principal axis; Elastic beam between described central coupled structure and described lever is designed to have larger rigidity at x direction of principal axis, and the elastic beam between the anchor point of described lever and with it correspondence is designed to have larger rigidity at y direction of principal axis.
Preferably, described central coupled structure is central rhombus coupled structure.
Preferably, it is larger that a pair of end points that described central rhombus coupled structure is connected with matrix gauge block is designed to rigidity at y direction of principal axis.
Preferably, described anchor point is arranged at the gyrostatic surrounding of condenser type.
Accompanying drawing explanation
Fig. 1 shows the related gyrostatic structural drawing of the utility model.
Fig. 2 shows the related gyrostatic partial view of the utility model under driven-mode.
Embodiment
Below in conjunction with accompanying drawing, embodiment of the present utility model is further described.
As shown in Figure 1, condenser type gyroscope according to embodiment of the present utility model comprises substrate D, a pair of driving capacitance group C11 and C12, a pair of Detection capacitance group C21 and C22, two couples of sensitization capacitance group C31, C32, C33 and C34, two matrix gauge block M1 and M2, the rhombus coupled structure A of central authorities, lever B1 and B2, be distributed in the anchor point 1-6 of total surrounding, and play the elastic beam of connection function.Wherein the first matrix gauge block M1 comprises the first protonatomic mass piece m11 and the 3rd protonatomic mass m21; The second matrix gauge block M2 comprises the second protonatomic mass piece m12 and the 4th protonatomic mass piece m22, and the first protonatomic mass piece m11 and the second protonatomic mass piece m12 just the same, the 3rd protonatomic mass m21 and the 4th protonatomic mass piece m22 are just the same.
The forward of definition take the central point of central rhombus coupled structure A as the x axle of the cartesian coordinate system of initial point points to right side, and the forward of y axle points to upside, and the forward of z axle points to x, the outside of y plane.The related gyrostatic structure of the utility model is along x axle and y axle full symmetric.
Described driving capacitance group C11 and C12 are separately positioned on left side and the right side of the first matrix gauge block M1 and the second matrix gauge block M2, the fixed fingers of wherein said driving capacitance group C11 and C12 is fixed on substrate D, the movable comb of described driving capacitance group C11 and C12 is connected with left side wall, the right side wall of the second matrix gauge block M2 with the first matrix gauge block M1 respectively, and the fixed fingers of described driving capacitance group C11 and C12 receives as drive electrode the driving signal that peripheral circuit provides.
Described Detection capacitance group C21 and C22 are separately positioned on left side and the right side of the first matrix gauge block M1 and the second matrix gauge block M2, and described Detection capacitance group C21 and C22 are separately positioned on left side and the right side of described driving capacitance group C11 and C12, the fixed fingers of described Detection capacitance group C21 and C22 is fixed on substrate D, the movable comb of described Detection capacitance group C21 and C22 respectively with the left side wall of the first matrix gauge block M1 and the second matrix gauge block M2, right side wall is connected, the fixed fingers of described Detection capacitance group C21 and C22 is as detecting electrode, the displacement that matrix gauge block is produced due to the electrostatic forcing of driving capacitance group, and then the variable signal of the Detection capacitance causing feeds back to drive electrode, form closed-loop control and drive signal to regulate, and then adjusting drives the Oscillation Amplitude of capacitance group.
Described the first and second sensitization capacitance group C31, C32 is arranged on the upside of matrix gauge block M1 and M2, the third and fourth sensitization capacitance group C33, C34 is arranged on the downside of matrix gauge block M1 and M2, described first to fourth sensitization capacitance group C31, C32, C33, the fixed fingers of C34 is fixed on described substrate D, the movable comb of the first sensitization capacitance group C31 is connected with the 3rd protonatomic mass piece m21 by the 4th elastic beam b4, due to the symmetry of gyroscope arrangement, the movable comb of the 4th sensitization capacitance group C34 is connected to the 3rd protonatomic mass piece m21 by corresponding elastic beam, second and the 3rd sensitization capacitance group C32, the movable comb of C33 is connected with the 4th protonatomic mass piece m22 by corresponding elastic beam, the movable comb of the first sensitization capacitance group C31 is also connected with the first lever B1 by the 5th elastic beam b5, due to the symmetry of gyroscope arrangement, the movable comb of the second sensitization capacitance group C32 is connected to the first lever B1 by corresponding elastic beam, the third and fourth sensitization capacitance group C33, the movable comb of C34 is connected with the second lever B2 by corresponding elastic beam, first, the 3rd sensitization capacitance group C31, the fixed fingers of C33 links together and forms a sensitive electrode, second, the 4th sensitization capacitance group C32, the fixed fingers of C34 links together and forms another sensitive electrode, by a pair of sensitive electrode, be provided for measuring the sensitive signal of additional magnitude of angular velocity.
One end of the left side wall of the first matrix gauge block M1 is connected with the first anchor point 1 by the first elastic beam b1, due to the symmetry of gyroscope arrangement, its other end is connected to the right side wall of the second anchor point 2, the second matrix gauge block M2 two ends by corresponding elastic beam are connected to corresponding the 4th anchor point 4 and the 3rd anchor point 3 by corresponding elastic beam respectively; One end of the first protonatomic mass piece m11 is connected to the 3rd protonatomic mass piece m21 by the 3rd elastic beam b3, due to the symmetry of gyroscope arrangement, its other end is connected to the 3rd protonatomic mass piece m21 by corresponding elastic beam, one end of the 3rd protonatomic mass piece m21 is connected with the left end point of central rhombus coupled structure A by the second elastic beam b2, wherein said central rhombus coupled structure A is formed on substrate D, due to the symmetry of gyroscope arrangement, its other end is connected to the left end point of central rhombus coupled structure A by corresponding elastic beam; Due to the symmetry of gyroscope arrangement, the second protonatomic mass piece m12 is connected to the 4th protonatomic mass piece m22 by corresponding elastic beam, and the 4th protonatomic mass piece m22 is connected to the right endpoint of central rhombus coupled structure A by corresponding elastic beam; The upper extreme point of the rhombus coupled structure A of central authorities is connected to the first lever B1 by the 5th elastic beam b5, the first lever B1 is anchored to the 5th anchor point 5 by the 6th elastic beam b6, due to the symmetry of gyroscope arrangement, the lower extreme point of the rhombus coupled structure A of central authorities is connected to the second lever B2 by corresponding elastic beam, and the second lever B2 is anchored to the 6th anchor point 6 by corresponding elastic beam.
In above-mentioned elastic beam, the first elastic beam b1 is designed to have larger rigidity at y direction of principal axis; The second elastic beam b2 is designed to have larger rigidity at x direction of principal axis; The 3rd elastic beam b3 is designed to have larger rigidity at x direction of principal axis; The 4th elastic beam b4 is designed to have larger rigidity at y direction of principal axis; The 5th elastic beam b5 is designed to have larger rigidity at x direction of principal axis, and the 6th elastic beam b6 is designed to have larger rigidity at y direction of principal axis.
Known according to the gyrostatic principle of work of capacitor resonance formula, at least there are two mode in it: driven-mode and responsive mode:
Driven-mode is that the first matrix gauge block M1 and the second matrix gauge block M2 do rightabout moving along x axle simultaneously.Its principle is: between drive electrode and matrix gauge block, battery lead plate spacing is asymmetric, therefore can form electric capacity, when applying alternating current to drive electrode, matrix gauge block applies 10V direct current, and when alternating current is timing, between drive electrode and matrix gauge block, produce repulsion, when exchanging when negative, between drive electrode and matrix gauge block, produce gravitation.Therefore when apply alternating current on drive electrode, while applying direct current on matrix gauge block, and by the design of above-mentioned the first elastic beam b1, can cause the first matrix gauge block M1 and the second matrix gauge block M2 to do reverse direction along x axle and move, and then drive driving capacitance group C11, Detection capacitance group C21, the first protonatomic mass piece m11, the 3rd protonatomic mass piece m21 and drive capacitance group C12, Detection capacitance group C22, the second protonatomic mass piece m12, the 4th protonatomic mass piece m22 along x axle, to do reverse direction and move; Because the 3rd protonatomic mass piece m21 and the 4th protonatomic mass piece m22 are connected in a left side of central rhombus coupled structure A, right endpoint, so can drive a left side of central rhombus coupled structure A, right endpoint, in the motion of x direction of principal axis, due to central rhombus coupled structure A, is worked as a left side, right endpoint is to approaching center position when motion, upper, lower extreme point is forced to upwards, under away from center position, move; Otherwise, work as a left side, right endpoint is when moving away from center position, upper, lower extreme point is forced to downwards, on approach center position and move.Now first to fourth sensitization capacitance group C31-C34 can be subject to from the 3rd protonatomic mass piece m21 and the 4th protonatomic mass piece m22 along the axial acting force of x, and then make the first lever B1 and the second lever B2 be subject to from the 3rd protonatomic mass piece m21 and the 4th protonatomic mass piece m22 along the axial acting force of x.
Because the first matrix gauge block M1 and the second matrix gauge block M2 trend towards doing rightabout moving along x axle under the effect of central rhombus coupled structure A, therefore the first lever B1 and the second lever B2 are subject to opposite direction simultaneously, the power that size is identical, the component size of this power on x axle is identical, opposite direction, cancel each other, the first lever B1 and the second lever B2 can not be subjected to displacement at x direction of principal axis, therefore the movable comb that is connected in the sensitization capacitance group of the first lever B1 and the second lever B2 both sides also can not be subjected to displacement, so the electric capacity of first to fourth sensitization capacitance group C31-C34 is constant under driven-mode.Due to the design of the 5th elastic beam b5, make the upper of central rhombus coupled structure A, easily there is moving along y axle in lower extreme point.The central authorities of the first lever B1 and the second lever B2 be subject to from central rhombus coupled structure A along the axial acting force of y, it is identical with the position of the 6th anchor point 6 that the application point of described acting force is connected the 5th anchor point 5 with the first lever B1 and the second lever B2, therefore the first lever B1 and the second lever B2 can not move, as shown in Figure 2.
Responsive mode is that the 3rd protonatomic mass piece m21 and the 4th protonatomic mass piece m22 do rightabout moving along y axle respectively, drive the first sensitization capacitance group C31, the 4th sensitization capacitance group C34 and the second sensitization capacitance group C32, the 3rd sensitization capacitance group C33 does rightabout moving along y axle respectively, and then drives the first lever B1 and the second lever B2 to do twisting motion in the same way take central authorities separately as fulcrum.Its principle is: due to the design of elastic beam, the 3rd protonatomic mass piece m21 and the 4th protonatomic mass piece m22 easily move along y direction of principal axis, and then drive the movable comb of sensitization capacitance group to move along y direction of principal axis with it, the electric capacity of first to fourth sensitization capacitance group C31-C34 is changed.Now due to the middle part of the first lever B1 and the second lever B2, pass through the support of the 5th anchor point 5 and the 6th anchor point 6, therefore limited the 3rd protonatomic mass piece m21 and the 4th protonatomic mass piece m22 moving in the same way along y axle, and due to leverage, the 3rd protonatomic mass piece m21 and the 4th protonatomic mass piece m22 more easily do rightabout moving along y axle.Now, because the first matrix gauge block M1 is connected with corresponding anchor point by corresponding elastic beam with the second matrix gauge block M2, the first protonatomic mass piece m11 and the second protonatomic mass piece m12 have been limited in the axial motion of y, so with driving capacitance group C11 and C12 that the first protonatomic mass piece m11 and the second protonatomic mass piece m12 are connected, the capacitance of Detection capacitance group C21 and C22 does not change.Now, the left and right end points of the rhombus coupled structure A of central authorities be subject to from the 3rd protonatomic mass piece m21 and the 4th protonatomic mass piece m22 along the axial acting force of y, but due to the left and right end points of described central rhombus coupled structure A, at y direction of principal axis, to be designed to rigidity larger, therefore deformation and displacement now do not occur central rhombus coupled structure A.
In the actual course of work, when the related gyroscope of the utility model is operated in driven-mode, the first matrix gauge block M1 and the second matrix gauge block M2 do rightabout vibrations along x axle, when being subject to the angular velocity rotating along z axle, can produce along the axial coriolis force of y, cause the 3rd protonatomic mass piece m21 and the 4th protonatomic mass piece m22 along y axle, to do rightabout moving respectively, and then drive the capacitance of first to fourth sensitization capacitance group C31-C34 to change, responsive mode as described above, and then the z axis angular rate being subject to is demarcated in the variation of capacitance that can be by detecting above-mentioned first to fourth sensitization capacitance group C31-C34.
The related gyrostatic beneficial effect of condenser type of the utility model has:
(1) gyroscope based on MEMS micro fabrication, volume is little, and average unit cost is low;
(2) described each capacitance group is along x axle, and y rotational symmetry, can reduce manufacturing deficiency by differential circuit, vibrations, the impact that noise etc. cause;
(3) central rhombus coupled structure A has limited the first matrix gauge block M1 and the second matrix gauge block M2 in x axle side
To motion in the same way, gyroscope is difficult for the frequency influence that is interfered, and has increased the axial shock resistance of x simultaneously.(" shake " here refers to the impact coming from the outside);
(4) lever construction, has limited the 3rd protonatomic mass piece m21 and the 4th protonatomic mass piece m22 moves in the same way along y is axial, and gyroscope is difficult for the frequency influence that is interfered, and has increased the axial shock resistance of y simultaneously.
Claims (9)
1. a Z axis MEMS condenser type gyroscope, is characterized in that: comprise substrate, a pair of matrix gauge block, at least one pair of drives capacitance group, at least one pair of sensitization capacitance group, central coupled structure, a pair of lever and anchor point, wherein said each matrix gauge block comprises two sub-masses;
Described central coupled structure, is formed in substrate, comprises two pairs of end points, its another end points is connected to respectively to the lever corresponding with this end points;
Described this is oppositely arranged in central coupled structure both sides matrix gauge block, one side anchor of each matrix gauge block is connected to an anchor point corresponding thereto, opposite side is connected on of a pair of end points of central coupled structure, two sub-masses in described each matrix gauge block interconnect, and are also provided with in described at least one pair of driving capacitance group between described this each matrix gauge block another anchor point corresponding thereto;
Each fixed fingers and movable comb of including of described at least one pair of driving capacitance group, wherein fixed fingers is fixed in described substrate, its movable comb is connected to respectively the sidewall of corresponding with it matrix gauge block near anchor point, and the fixed fingers of described each driving capacitance group receives as drive electrode the driving signal that peripheral circuit provides;
Described this to lever, be anchored to anchor point corresponding thereto respectively, and be connected to respectively the movable comb of described at least one pair of sensitization capacitance group of answering in contrast;
Each in described at least one pair of sensitization capacitance group includes fixed fingers and movable comb, wherein fixed fingers is fixed in described substrate, its movable comb is also connected to respectively corresponding with it protonatomic mass piece, and the fixed fingers of described sensitization capacitance group is provided for measuring the sensitive signal of additional magnitude of angular velocity as sensitive electrode.
2. Z axis MEMS condenser type gyroscope according to claim 1, is characterized in that: described gyrostatic structure full symmetric.
3. Z axis MEMS condenser type gyroscope according to claim 1 and 2, it is characterized in that: described gyroscope also comprises at least one pair of Detection capacitance group, described Detection capacitance group comprises fixed fingers and movable comb, wherein fixed fingers is fixed in described substrate, its movable comb is connected to respectively the sidewall of with it corresponding matrix gauge block near anchor point, the fixed fingers of described Detection capacitance group as detecting electrode by the capacitance variations signal feedback of Detection capacitance group to drive electrode.
4. single shaft MEMS condenser type gyroscope according to claim 1 and 2, it is characterized in that: described capacitance group comprises two pairs of sensitization capacitance groups, described two pairs of sensitization capacitance groups are symmetrical arranged, in the fixed fingers of described sensitization capacitance group, in the fixed fingers of diagonal positions, be connected and form a pair of sensitive electrode.
5. single shaft MEMS condenser type gyroscope according to claim 1, it is characterized in that: between described central coupled structure and described matrix gauge block, described lever, between described matrix gauge block and described anchor point, between two sub-masses in described matrix gauge block, between described sensitization capacitance group and described protonatomic mass piece, described lever, between described lever and described anchor point, by elastic beam, connect respectively.
6. single shaft MEMS condenser type gyroscope according to claim 5, is characterized in that: the elastic beam between the anchor point of described matrix gauge block and with it correspondence is designed to have larger rigidity at y direction of principal axis; Elastic beam between described matrix gauge block and described central coupled structure is designed to have larger rigidity at x direction of principal axis; Elastic beam between two sub-masses in described matrix gauge block is designed to have larger rigidity at x direction of principal axis; Elastic beam between the sensitization capacitance group of described protonatomic mass piece and with it correspondence is designed to have larger rigidity at y direction of principal axis; Elastic beam between described central coupled structure and described lever is designed to have larger rigidity at x direction of principal axis, and the elastic beam between the anchor point of described lever and with it correspondence is designed to have larger rigidity at y direction of principal axis.
7. single shaft MEMS condenser type gyroscope according to claim 1, is characterized in that: described central coupled structure is central rhombus coupled structure.
8. single shaft MEMS condenser type gyroscope according to claim 7, is characterized in that: it is larger that a pair of end points that described central rhombus coupled structure is connected with matrix gauge block is designed to rigidity at y direction of principal axis.
9. single shaft MEMS condenser type gyroscope according to claim 1 and 2, is characterized in that: described anchor point is arranged at the gyrostatic surrounding of condenser type.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107192384A (en) * | 2017-07-24 | 2017-09-22 | 深迪半导体(上海)有限公司 | A kind of MEMS three-axis gyroscopes |
| US11892467B2 (en) | 2020-12-18 | 2024-02-06 | Analog Devices, Inc. | Accelerometer with translational motion of masses |
| CN117739941A (en) * | 2024-02-21 | 2024-03-22 | 苏州亿波达微系统技术有限公司 | Single-axis MEMS gyroscope |
-
2013
- 2013-10-12 CN CN201320630008.7U patent/CN203587114U/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107192384A (en) * | 2017-07-24 | 2017-09-22 | 深迪半导体(上海)有限公司 | A kind of MEMS three-axis gyroscopes |
| CN107192384B (en) * | 2017-07-24 | 2022-04-05 | 深迪半导体(绍兴)有限公司 | MEMS triaxial gyroscope |
| US11892467B2 (en) | 2020-12-18 | 2024-02-06 | Analog Devices, Inc. | Accelerometer with translational motion of masses |
| CN117739941A (en) * | 2024-02-21 | 2024-03-22 | 苏州亿波达微系统技术有限公司 | Single-axis MEMS gyroscope |
| CN117739941B (en) * | 2024-02-21 | 2024-05-14 | 苏州亿波达微系统技术有限公司 | Single-axis MEMS gyroscope |
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Address after: 312030 Building 5, intelligent innovation center, 487 Kebei Avenue, Keqiao Economic and Technological Development Zone, Keqiao District, Shaoxing City, Zhejiang Province Patentee after: Shendi semiconductor (Shaoxing) Co.,Ltd. Address before: Room 302, building 2, 1690 Cailun Road, Zhangjiang High Tech Park, Pudong New Area, Shanghai, 201203 Patentee before: Senodia Technologies (Shanghai) Co.,Ltd. |
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Granted publication date: 20140507 |