CN203498246U - Glass substrate making device and glass supply pipe - Google Patents
Glass substrate making device and glass supply pipe Download PDFInfo
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- CN203498246U CN203498246U CN201320530155.7U CN201320530155U CN203498246U CN 203498246 U CN203498246 U CN 203498246U CN 201320530155 U CN201320530155 U CN 201320530155U CN 203498246 U CN203498246 U CN 203498246U
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- glass
- pipe
- melten glass
- temperature
- supply
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- 239000011521 glass Substances 0.000 title claims abstract description 566
- 239000000758 substrate Substances 0.000 title claims abstract description 110
- 238000010438 heat treatment Methods 0.000 claims abstract description 56
- 238000002844 melting Methods 0.000 claims abstract description 29
- 230000008018 melting Effects 0.000 claims abstract description 28
- 238000004519 manufacturing process Methods 0.000 claims description 42
- 238000009434 installation Methods 0.000 claims description 15
- 239000000155 melt Substances 0.000 claims description 10
- 239000006060 molten glass Substances 0.000 abstract description 10
- 239000006260 foam Substances 0.000 abstract 1
- 238000001816 cooling Methods 0.000 description 67
- 229910006404 SnO 2 Inorganic materials 0.000 description 23
- 239000005357 flat glass Substances 0.000 description 22
- 238000000034 method Methods 0.000 description 22
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 22
- 239000000203 mixture Substances 0.000 description 20
- 238000005352 clarification Methods 0.000 description 18
- 229910052751 metal Inorganic materials 0.000 description 17
- 239000002184 metal Substances 0.000 description 17
- 239000004973 liquid crystal related substance Substances 0.000 description 16
- 239000001301 oxygen Substances 0.000 description 16
- 229910052760 oxygen Inorganic materials 0.000 description 16
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 15
- 238000010521 absorption reaction Methods 0.000 description 13
- 239000000470 constituent Substances 0.000 description 13
- 238000006722 reduction reaction Methods 0.000 description 12
- 229910001260 Pt alloy Inorganic materials 0.000 description 11
- 229910052697 platinum Inorganic materials 0.000 description 11
- 238000005259 measurement Methods 0.000 description 10
- 229910000831 Steel Inorganic materials 0.000 description 9
- 229910052783 alkali metal Inorganic materials 0.000 description 9
- 238000009792 diffusion process Methods 0.000 description 9
- 239000007789 gas Substances 0.000 description 9
- 238000000465 moulding Methods 0.000 description 9
- 239000010959 steel Substances 0.000 description 9
- 150000001340 alkali metals Chemical class 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 239000007788 liquid Substances 0.000 description 6
- 230000000630 rising effect Effects 0.000 description 6
- 230000032258 transport Effects 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 5
- 238000000354 decomposition reaction Methods 0.000 description 5
- 238000007599 discharging Methods 0.000 description 5
- 238000007667 floating Methods 0.000 description 5
- 230000001590 oxidative effect Effects 0.000 description 5
- 238000010792 warming Methods 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 229910052744 lithium Inorganic materials 0.000 description 4
- 229910052700 potassium Inorganic materials 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- 229910052708 sodium Inorganic materials 0.000 description 4
- 239000007921 spray Substances 0.000 description 4
- 230000002195 synergetic effect Effects 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 239000011449 brick Substances 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 239000004615 ingredient Substances 0.000 description 3
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N iron oxide Inorganic materials [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 3
- NDLPOXTZKUMGOV-UHFFFAOYSA-N oxo(oxoferriooxy)iron hydrate Chemical compound O.O=[Fe]O[Fe]=O NDLPOXTZKUMGOV-UHFFFAOYSA-N 0.000 description 3
- 239000012071 phase Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000010583 slow cooling Methods 0.000 description 3
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 230000033228 biological regulation Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 238000000265 homogenisation Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 239000007791 liquid phase Substances 0.000 description 2
- 238000007726 management method Methods 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 230000003278 mimic effect Effects 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 239000005864 Sulphur Substances 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 229910000420 cerium oxide Inorganic materials 0.000 description 1
- 239000000567 combustion gas Substances 0.000 description 1
- 238000005094 computer simulation Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000004031 devitrification Methods 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000010828 elution Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- 150000002926 oxygen Chemical class 0.000 description 1
- FGIUAXJPYTZDNR-UHFFFAOYSA-N potassium nitrate Chemical compound [K+].[O-][N+]([O-])=O FGIUAXJPYTZDNR-UHFFFAOYSA-N 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000006479 redox reaction Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000005361 soda-lime glass Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- 238000007669 thermal treatment Methods 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 238000004017 vitrification Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B5/00—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture
- C03B5/16—Special features of the melting process; Auxiliary means specially adapted for glass-melting furnaces
- C03B5/225—Refining
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Glass Melting And Manufacturing (AREA)
- Glass Compositions (AREA)
Abstract
The utility model provides a glass substrate making device and a glass supply pipe. When molten glass flowing from a melting furnace is guided into a clarifying tank by using the glass supply pipe, the molten glass is quickly and uniformly heated, thus effectively removing foams from the molten glass. When a glass substrate is made, the glass supply pipe supplying the molten glass to the tubular clarifying tank heating the molten glass from the internal face is used. At least a part of the glass supply pipe comes into contact with the molten glass, so that the molten glass is heated from the glass supply pipe. At the moment, the pipe section shape of a part of the glass supply pipe is an elliptical shape with a long axis and a short axis and any one of a rounded corner shape or chamfered corner shape in a rectangular shape with long sides and short sides. An intra-pipe heating source in contact with the molten glass can be arranged in the glass supply pipe.
Description
Technical field
The utility model relates to a kind of manufacturing installation and glass supply-pipe of manufacturing the glass substrate of glass substrate.
Background technology
Generally speaking glass substrate is by after frit melting generation melten glass, via melten glass is configured as to the step of glass substrate, manufactures.In described step, the clarifying treatment that the micro-bubble that carries out that melten glass is included is removed.Clarifying treatment is by one side, to heat the clarifying tank of tubulose, and one side makes allotment have the melten glass of finings by clarifying tank, utilizes the redox reaction of finings the bubble in melten glass is removed and carried out.
More specifically, temperature and then raising by through the thick melten glass melting make finings performance function in clarifying tank, thereby make bubble float froth breaking, then, by reducing temperature, and make complete froth breaking and remaining vesicle solution absorption in melten glass.That is, clarifying treatment comprises the absorption processing that makes bubble float the defoaming treatment of froth breaking and make melten glass absorption vesicle.
Be known as and effectively carry out this clarifying treatment, and forming above-mentioned tubulose clarifying tank or melten glass is being sent in the material of glass supply-pipe of clarifying tank, adopt platinum or platinum alloy (patent documentation 1).Though platinum or platinum alloy are high price, fusing point is high, also excellent to the erosion resistance of melten glass, therefore can be preferably for tubulose clarifying tank and then glass supply-pipe.
[background technology document]
[patent documentation]
The special table of [patent documentation 1] Japanese Patent 2006-522001 communique
In recent years, because reducing the viewpoint of carrying capacity of environment, as the finings of glass, replace As
2o
3and use SnO
2.Yet, SnO
2exist and As
2o
3compare the problem that froth breaking ability is lower and so on.
And, the glass substrate that utilizes aforesaid method to make is being used as to FPD (flat panel display, flat-panel monitor) with in the situation of glass substrate, owing to forming semiconductor element at FPD with the surface of glass substrate, so, FPD adopts complete alkali-free metal with glass substrate, even if or to contain be also that degree can semiconductor element not impacted contains micro-alkali-metal glass.Yet, completely not containing or trace contain alkali-metal glass and soda-lime glass etc. and contain in a large number alkali-metal glassy phase ratio, exist high temperature viscosity higher, in manufacturing processed, be difficult for removing the problem of bubble and so in melten glass.
Utility model content
[utility model problem to be solved]
Therefore, the purpose of this utility model is to provide a kind of manufacturing installation and glass supply-pipe of glass substrate, can be when manufacturing glass substrate, from melten glass, effectively remove bubble, thereby reduce the bubble that remains in glass substrate, more specifically, using glass supply-pipe, when the melten glass flowing out from calciner is imported to clarifying tank, melten glass is heated up fast and equably, thereby effectively remove bubble in melten glass.
[technique means of dealing with problems]
A form of the present utility model is a kind of manufacturing installation of manufacturing the glass substrate of glass substrate.This manufacturing installation comprises:
Calciner, melts frit, makes melten glass;
Glass supply-pipe, it is the pipe that transmits described melten glass, and one side heats described melten glass from the inner-wall surface of this pipe, and one side transmits described melten glass; And
Tubulose clarifying tank, by the described melten glass one side transmitting from described glass supply-pipe, from inner-wall surface heating, one side is carried out froth breaking.
Described melten glass contacts and is heated from described glass supply-pipe via at least a portion with described glass supply-pipe,
The tube section shape of a described part for described glass supply-pipe is to have the elliptical shape of major axis and minor axis and have in the rectangular shape of long limit and minor face, bight to be become to the shape of circle or by the arbitrary shape in the shape of bight chamfering.
Other forms of the present utility model are a kind of to supply with the glass supply-pipe of described melten glass from the tubulose clarifying tank of inner-wall surface heating and melting glass.
Described melten glass is via contacting with at least a portion of described glass supply-pipe, and is heated from described glass supply-pipe, and
The tube section shape of a described part for described glass supply-pipe is to have the elliptical shape of major axis and minor axis and have in the rectangular shape of long limit and minor face, bight to be become to the shape of circle or by the arbitrary shape in the shape of bight chamfering.
Now, the length that the tube section of a preferred described part is shaped as horizontal direction is longer than the flat pattern of vertical direction.
Other forms of the present utility model are a kind of manufacturing installations of manufacturing the glass substrate of glass substrate.This manufacturing installation comprises:
Calciner, melts frit, makes melten glass;
Glass supply-pipe, it is the pipe that transmits described melten glass, and one side heats described melten glass from the inner-wall surface of this pipe, and one side transmits described melten glass; And
Tubulose clarifying tank, by the described melten glass one side transmitting from described glass supply-pipe, from inner-wall surface heating, one side is carried out froth breaking;
Described melten glass is via contacting with at least a portion of described glass supply-pipe, and is heated from described glass supply-pipe, and
At described glass supply-pipe, be not only provided with the wall heating source that heats described melten glass from the inner-wall surface of described glass supply-pipe, and in the pipe of described glass supply-pipe, be provided with heating source in the pipe contacting with described melten glass.
Other forms of the present utility model are glass supply-pipes that a kind of clarifying tank to the tubulose from inner-wall surface heating and melting glass is supplied with described melten glass.
Now, described melten glass is via contacting with at least a portion of described glass supply-pipe, and is heated from described glass supply-pipe.
At described glass supply-pipe, be not only provided with the wall heating source that heats described melten glass from the inner-wall surface of described glass supply-pipe, and in the pipe of described glass supply-pipe, be provided with heating source in the pipe contacting with described melten glass.
[effect of utility model]
According to the manufacturing installation of the glass substrate of above-mentioned form and glass supply-pipe, when using glass supply-pipe that melten glass is imported to clarifying tank, melten glass can be heated up fast and equably.Therefore, can in the step of carrying out described froth breaking, effectively will steep removal.
Accompanying drawing explanation
Fig. 1 is the block diagram of manufacture method of the glass substrate of present embodiment.
Fig. 2 is the figure that schematically shows the manufacturing installation of the sheet glass of implementing to melt step～cut-out step in the manufacture method of glass substrate of present embodiment.
Fig. 3 (a) is the figure that the device of the clarification steps of main expression enforcement present embodiment forms.
Fig. 3 (b) is the figure that the tube section shape of the glass supply-pipe of implementing clarification steps is described.
Fig. 4 is the main figure that represents to implement the forming step of present embodiment and the device formation of cut-out step.
Fig. 5 is the figure that the melting step of present embodiment a to example of the temperature history till forming step is described.
Contained O in melten glass when Fig. 6 means the defoaming treatment of carrying out present embodiment
2output and the figure of the relation of heat-up rate.
Fig. 7 means contained SO in the hole in the glass that makes bubble reproduction remaining in glass substrate
2the figure of the measurement result of content.
Fig. 8 means the figure of the relation of bubble grade when the experimental furnace of the temperature history that utilizes the melten glass shown in mimic diagram 5 is made glass substrate and cooling rate.
Fig. 9 means the figure of the relation of the bubble grade that is present in while using the device of the manufacture glass substrate shown in Fig. 2 to manufacture glass substrate in glass substrate and cooling rate.
Figure 10 (a) means that the 1st clarifying tank of present embodiment is the figure of variation example of the tube section shape of glass supply-pipe.
Figure 10 (b) means that the 1st clarifying tank of present embodiment is the figure of variation example of the tube section shape of glass supply-pipe.
Figure 10 (c) is that explanation is as the figure of the inside heating source of the variation example of present embodiment.
Figure 10 (d) is the figure of the example gained of heating source in tube section direction is observed the pipe shown in (c).
[explanation of symbol]
200 fusing devices
201 melt groove
202 clarifying tanks (the 2nd finer)
202a, 202b, 202c metal flange processed
203 steel basins
203a agitator
204 glass supply-pipes (the 1st finer)
205 glass supply-pipes (the 3rd finer)
206 glass supply-pipes
Heating source in 204a pipe
300 building mortions
310 moldinies
312 feed troughs
313 lower end
320 environment insulating elements
330 cooling rollers
335 cooling units
350a～350d transports roller
340 forming furnaces
350 leers
400 shut-off devices
Embodiment
Below, the manufacture method of the glass substrate of present embodiment is described.
(the whole summary of the manufacture method of glass substrate)
Fig. 1 is the block diagram of manufacture method of the glass substrate of present embodiment.
The manufacture method of glass substrate mainly comprises melting step (ST1), clarification steps (ST2), homogenization step (ST3), supplying step (ST4), forming step (ST5), slow cooling step (ST6) and cuts off step (ST7).Other comprise grinding steps, polishing step, cleaning step, inspection step and packaging step etc., and will in packaging step, through a plurality of glass substrates of lamination, be transported to the businessman of delivery point of destination.
Fig. 2 is the figure that schematically shows the manufacturing installation of the sheet glass that melts step (ST1)～cut-out step (ST7).This device as shown in Figure 2, mainly has fusing device 200, building mortion 300 and shut-off device 400.Fusing device 200 mainly has the groove 201 of melting, clarifying tank 202, steel basin 203 and glass supply-pipe 204,205,206.In addition, glass supply-pipe 204,205 is as described below is not only the metal tube flowing through for melten glass MG, and possesses clarification function, so be in fact also clarifying tank.Below glass supply-pipe 204 is called to the 1st finer 204, clarifying tank 202 is called the 2nd finer 202, and glass supply-pipe 205 is called the 3rd finer 205.In addition, the 1st finer the 204, the 3rd finer 205 connecting between each groove after melting groove 201 and till building mortion 300, glass supply-pipe 206 and the 2nd finer 202 are comprised to platinum or platinum alloy pipe with the main part of steel basin 203.The 1st finer 204 and the 3rd finer 205 both can be drum, or also can be groove shape.
In melting step (ST1), by using the energising of not shown flame and electrode to heat, and by interpolation SnO
2as finings and be supplied to the frit melting in groove 201 and melt, thus, obtain melten glass.Particularly, use not shown raw material throwing device, make frit M be supplied to dispersedly the liquid level of melten glass G.The gas-phase heating that frit M is reached a high temperature because of flame slowly melts, and melts in melten glass MG.Melten glass MG heats and heats up because of energising.
Clarification steps (ST2) is at least implemented in the 1st finer the 204, the 2nd finer 202 and the 3rd finer 205.In clarification steps, the melten glass MG in the 1st finer 204 is heated up, and make to comprise O contained in melten glass MG
2, CO
2or SO
2bubble etc. gaseous constituent absorbs because of the SnO as finings
2reduction reaction and the O that produces
2grow up, and float to the liquid level of melten glass MG and discharge.And, in clarification steps, because declining, the temperature of melten glass MG causes the interior drops of the gaseous constituent in bubble and by SnO
2the SnO of reduction reaction gained because the temperature of melten glass MG declines, carry out oxidizing reaction, thus, the O in melten glass MG in remaining bubble
2etc. gaseous constituent, in melten glass MG, again absorbed, thereby bubble disappears.The oxidizing reaction of finings and reduction reaction are to be undertaken by adjusting the temperature of melten glass MG.The temperature adjustment of melten glass MG is to be undertaken by adjusting the temperature of the 1st finer the 204, the 2nd finer 202, the 3rd finer 205.The temperature adjustment of each clarifying tank be utilize the water cooler of the indirect heating of each groove of heater heats make the direct-electrifying heating of electric current inflow pipe self or to use the surrounding that is configured in the 1st finer the 204, the 2nd finer 202, the 3rd finer 205 and then air-cooled, water-cooled indirectly cooling, the combination of arbitrary heating, method of cooling or these methods such as the air spray attachment of the 1st finer the 204, the 2nd finer the 202, the 3rd finer 205 or atomized water spray is carried out.And, in Fig. 2, the groove of clarifying is divided into the 1st finer the 204, the 2nd finer the 202, the 3rd finer 205 these 3 parts, but certainly also can and then carries out sectionalization.
The adjustment of the temperature of the melten glass MG of present embodiment is that of employing aforesaid method is direct-electrifying heating.Particularly, not shown metal flange processed by electric current is arranged in the 2nd finer 202 being supplied with to the 1st finer 204 of melten glass MG, and be arranged between the not shown metal flange processed of the 2nd finer 202 mobile (arrow in Fig. 3 (a)), and then, make electric current be arranged on the not shown metal flange processed of the 2nd finer 202, be arranged between the not shown metal flange processed of the 2nd finer 202 in melten glass MG downstream side and flow (arrow in Fig. 3 (a)) with relative this metal rim, and adjust the temperature of melten glass MG.Present embodiment is to make each fixing electric current flow into the 1st region between metal flange processed and the 2nd region between metal flange processed, by the 1st finer 204 and the 2nd finer 202 energising heating, and the temperature of adjustment melten glass MG, but this energising heating is not defined in the temperature of being undertaken by the energising heating in 2 regions and adjusts, also can carry out the energising heating in 1 region, or, the heating of switching in more than 3 regions, thus carry out the temperature adjustment of melten glass MG.
Homogenization step (ST3) is to utilize agitator 203a to stir the melten glass MG in the steel basin 203 of supplying with through the 3rd finer 205, and carries out the homogenizing of glass ingredient.Steel basin 203 also can arrange more than 2.
Supplying step (ST4) is to make melten glass pass glass supply-pipe 206 to be supplied to building mortion 300.
Building mortion 300 is implemented as shape step (ST5) and slow cooling step (ST6).
Forming step (ST5) is to make melten glass be configured as plate glass G, makes the streamline of plate glass G.Present embodiment is to adopt the overflow downdraw of using following molding 310.Slow cooling step (ST6) be mobile plate glass G after being shaped is carried out cooling, to avoid the inner strain that produces.
Cutting off step (ST7) is in shut-off device 400, the plate glass G supplying with is cut into the length of regulation from building mortion 300, thus, obtains sheet glass.By the glass substrate through cutting off and then cut into the size of regulation, make the glass substrate of target size.Then, implement end surface grinding, polishing and the cleaning glass substrate of glass, and then inspection is packed the glass substrate of passed examination product after having the defects such as still or streak as end article.
(clarification steps)
Fig. 3 (a) is the figure that the device formation of clarification steps is carried out in main expression.Clarification steps comprises froth breaking step and absorption step.In froth breaking step, melten glass MG is warming up to more than 1630 ℃, thus the SnO of finings
2make oxygen evolution, and make the existing bubble B of melten glass MG adsorb this oxygen, thereby the bubble diameter of existing bubble B is expanded.Thus, utilization because the temperature of melten glass MG rises, make to steep gaseous constituent in B in press rise caused bubble diameter expansion, with the temperature of the melten glass MG synergistic effect that the viscosity of caused melten glass MG declines that rises, the speed of floating of bubble B improves, thereby promotes froth breaking.
Absorb to process be with defoaming treatment on the contrary, utilization by reduce the temperature of melten glass MG make melten glass MG again absorb oxygen in the bubble B in melten glass MG, with the decline synergistic effect of the interior drops that makes to steep the gaseous constituent in B of temperature by melten glass MG, bubble diameter is dwindled, in melten glass MG, make to steep B and disappear.
In addition, froth breaking step is with 2 ℃/min of above heat-up rates, the temperature of melten glass MG to be warming up to more than 1630 ℃.For realizing the intensification of this melten glass, bear the tube section shape flat pattern that becomes as described below of the glass supply-pipe 204 of a part of froth breaking step.About being described below in this respect.In addition, the temperature that so-called 2 ℃/min of above heat-up rates refer to melten glass MG for example, reaches for example, in the scope of clarifying temp (1630～1700 ℃) melten glass MG average heating speed from the temperature (1580 ℃, and 1560～1620 ℃) that melts the melten glass MG after step is more than 2 ℃/min.
The 1st finer the 204, the 2nd finer 202 and the 3rd finer 205 are by giving said temperature course to melten glass MG, and carry out the froth breaking of melten glass MG and the device of the absorption of bubble B.Therefore, possess and the 1st finer the 204, the 2nd finer 202 and the 3rd finer 205 can be heated, are cooled to the such temp regulating function of target temperature.
The 1st finer the 204, the 2nd finer 202 and the temperature adjustment separately of the 3rd finer 205 are to use the direct-electrifying heating that each clarifying tank himself is switched on, or be configured in each groove not shown well heater around to the water cooler of the indirect heating of clarifying tank and then air-cooled, water-cooled indirectly cooling, to wantonly 1 methods such as the air spray attachment of each clarifying tank and atomized water sprays, or the combination of these methods and carrying out.
So, for in froth breaking step, with 2 ℃/min of above heat-up rates, the temperature of melten glass MG is warming up to more than 1630 ℃, so, tube section as the glass supply-pipe 204 of the 1st clarifying tank is shaped as elliptical shape, and the length that becomes horizontal direction is longer than the flat pattern of vertical direction.That is, as shown in Fig. 3 (b), with length (overall dimension) D of the vertical direction of the tube section shape with respect to glass supply-pipe 204
1, the length of horizontal direction (overall dimension) D
2elongated mode, forms glass supply-pipe 204.By making the tube section shape of glass supply-pipe 204 become flat pattern, and the surface-area of the melten glass MG of the inner-wall surface as heating source that makes glass supply-pipe 204 while being heated with melten glass MG contact becomes and is greater than the surface-area that melten glass is heated from inner-wall surface in the past in having the long-pending just round pipe of identical tube section.In other words, the area that melten glass contacts with inner-wall surface as heating source is greater than the situation of toroidal pipe through the ratio of the amount of the melten glass MG of glass supply-pipe 204 with respect to melten glass MG.Therefore, melten glass MG is heated with larger surface-area from inner-wall surface, so, the temperature of melten glass MG can be heated up fast and equably.; melten glass MG is because contacting with at least a portion of glass supply-pipe 204; and be heated from glass supply-pipe 204; and the tube section shape of a part for glass supply-pipe 204 is that the surface-area of the melten glass MG that is heated becomes large mode, for example than the pipe with positive circular section, becomes large mode, presents the elliptical shape with major axis and minor axis.
In addition, present embodiment is the length D of horizontal direction
2be longer than vertical direction D
1flat pattern, but can be also the length D of horizontal direction
2be shorter than vertical direction D
1flat pattern.Yet, because glass supply-pipe 204 is the pipes that are connected with melting groove 201, so, if consider, the melten glass of the homogeneous fully melting is taken out to the shape that preferably melten glass of bottom can be taken out from the bottom of dissolving tank 201.Therefore, the length D of preferred levels direction
2be longer than the length D of vertical direction
1flat pattern (elliptical shape).And, in the present embodiment, as the tube section shape of the glass supply-pipe 204 of the 1st clarifying tank, be that the total length that spreads all over pipe is elliptical shape, and become flat pattern, but in a part for glass supply-pipe 204, tube section shape also can become elliptical shape and flat pattern.
With Fig. 3 (a), illustrate in greater detail clarification.
The aqueous melting glass MG that melts and more contain the bubble B that the decomposition reaction because of frit generates in melting groove 201 is directed into the 1st finer 204.
In the 1st finer 204, utilize as the platinum of main body of the 1st finer 204 or the heating of platinum alloy pipe melten glass MG be heated to more than 1630 ℃, thereby promote the reduction reaction of finings, thus, by a large amount of oxygen evolution to melten glass MG.In melten glass MG, existing bubble B is not only because the temperature rising of melten glass MG causes that the bubble diameter under the rise effect of steeping B composition of gases within pressure expands, and the oxygen discharging because of the reduction reaction of finings enters in bubble B diffusely, because of this synergistic effect, the bubble diameter of existing bubble B expands.Now, melten glass MG is heated to 1630 ℃ of above temperature with 2 ℃/min of above heat-up rates.
Then, this melten glass MG is directed into the 2nd finer 202.
The top open space that the 2nd finer 202 is different from the 1st finer 204, the 2 finer 202 inside is the environment space of gas phase, and the bubble B in melten glass MG can float to the liquid level of melten glass MG and is released into outside melten glass MG.
In the 2nd finer 202, utilization maintains 1630 ℃ of above high temperature as the platinum of the main body of the 2nd finer 202 or the heating of platinum alloy pipe continuously by melten glass MG, thereby the bubble B in melten glass MG floats towards the top of the 2nd finer 202, and in the liquid skin breakage of melten glass MG, thus by melten glass MG froth breaking.Especially, for example, if melten glass MG is heated to 1630 ℃ of above (reaching 1630～1700 ℃), SnO
2cause post reduction reaction.Now, such as in the situation that making the glass substrate for plane display devices such as liquid-crystal display, the viscosity of glass is because of the temperature rising of melten glass MG, and become, applicable bubble B floats and the viscosity (200～800poise) of froth breaking.
Herein, in the top open space above the 2nd finer 202, break and the gaseous constituent that discharges outside not shown air release mouth is released into the 2nd finer 202.In the 2nd finer 202, because steeping, B floats and froth breaking is directed into the 3rd finer 205 by the melten glass MG floating after the bubble B removal that speed and diameter are larger.
In the present embodiment, for example, shown in Fig. 3 (a), from the 2nd finer 202, to the 3rd finer 205, can flow into respectively the electric current in 2 different regions of extending on forming the platinum of main body or the length direction of platinum alloy pipe by control, and carry out the intensification of melten glass MG.And, can be by control the electric current flow into respectively in more than 3 different zones of extending on forming the platinum of main body of finer or the length direction of platinum alloy pipe, and carry out the intensification of melten glass MG.
In this way, the intensification that makes melten glass MG is undertaken by the electric current of controlling at least 2 the different regions that flow into respectively finer, effectively carry out defoaming treatment aspect better.
In the 3rd finer 205, cooling (by suppressing degree of heat) of the platinum by the main body as the 3rd finer 205 or platinum alloy pipe and melten glass MG is cooling.Owing to utilizing this cooling temperature that makes melten glass MG to decline, so, steep floating and froth breaking of B, remaining compared with the pressure drop of the gaseous constituent in vesicle B, bubble diameter slowly diminishes.And then, if the temperature of melten glass MG reaches below 1600 ℃, in defoaming treatment, because of SnO
2the part of SnO of reduction reaction gained absorb oxygen and be about to become again SnO
2.Therefore, the oxygen as gaseous constituent in bubble B is again absorbed in melten glass MG, and bubble B more diminishes, thereby in melten glass MG, is absorbed and finally disappearance.Now, melten glass MG is cooled with average more than 2 ℃/min speed in the temperature range of 1600 ℃ to 1500 ℃.
In the example shown in Fig. 3 (a), the finer of carrying out clarification steps is divided into the 1st finer the 204, the 2nd finer 202 and the 3rd finer 205 these 3 parts, but clarifying tank can and then carry out sectionalization certainly.By after clarifying tank sectionalization, can carry out more meticulously the temperature adjustment of melten glass MG.Especially, clarifying tank sectionalization is beneficial to when the kind of change melten glass MG or the meltage and easily carries out temperature adjustment.
And, in the above description for simplifying, and melten glass MG is warming up to till 1630 ℃ in the 1st finer 204, in the 2nd finer 202, carry out the floating and froth breaking of bubble B of melten glass MG, in the 3rd finer 205, utilize the cooling of melten glass MG and make melten glass MG steep the mode that B absorbs, by each clarifying tank partition functionality describe, but each clarifying tank also can be completely partition functionality not.The part of the length direction that both can be configured to the 2nd finer 202 till midway heats up melten glass MG, also can by the length direction of the 2nd finer 202 midway between the 3rd finer 205, be configured to the part that makes melten glass MG start cooling.
In the present embodiment, can by measure the 1st finer the 204, the 2nd finer 202, the 3rd finer 205 surface temperature, be the surface temperature in the outside of the melten glass MG clarifying tank of not flowing through, control temperature, and heat-up rate, the cooling rate of management melten glass MG.Can pass through computer simulation, and utilize the flow velocity of melten glass MG and the condition of temperature be supplied to finer, precompute the 1st finer the 204, the 2nd finer 202 and the 3rd finer 205 surface temperature, and in the 1st finer the 204, the 2nd finer 202 and the 3rd finer 205 relation of the medial temperature (mean value of temperature in clarifying tank with the melten glass MG of temperature distribution) of mobile melten glass MG.Therefore, can utilize above-mentioned relation according to the surface temperature after measured in the outside of finer, calculate heat-up rate and cooling rate, and management heat-up rate and cooling rate.In addition, the flow velocity of melten glass MG can calculate according to the volume of each device, the amount that flows into the melten glass MR of the per unit time in building mortion 300.And the temperature of melten glass MG can calculate according to the viscosity of glass and thermal conductivity.
In this way, after defoaming treatment, the temperature of melten glass MG is in the temperature range of 1600 ℃ to 1500 ℃ as described below with the object that for example more than 2 ℃/min cooling rates is lowered the temperature, reduces the bubble number of per unit quality remaining in the glass substrate as end article.So-called bubble refers to and has with the volume of predefined bubble, the bubble of the equal above volume of the volume of the bubble of for example diameter 20 μ m herein.
In addition, although the faster interior remaining bubble number of glass substrate that more can reduce of above-mentioned cooling rate, this minimizing effect is to follow above-mentioned cooling rate rise and constantly diminish.Preferred above-mentioned cooling rate is more than 3 ℃/min.In addition, the upper limit of above-mentioned cooling rate arranges especially, but in the situation that glass substrate is manufactured in industrialization, according to following former thereby take 50 ℃/min as the upper limit.
That is,, if the cooling rate of melten glass MG is too fast, the oxygen in the bubble B of melten glass MG is melted the phenomenon that glass MG absorbs again and is hindered, final, has bubble B himself nondecreasing possibility in melten glass MG.And, even if the thermal conductivity of glass is at high temperature also less, it is 20～50W/ (mK) left and right, therefore, and then melten glass MG is rapid cooling as long as do not take special means, only can carry out cooling from the outside of the 3rd finer 205, therefore in the situation that above-mentioned cooling rate is accelerated, cause only that near the melten glass MG outside surface of the 3rd finer 205 is coolingly, and the melten glass MG of the central part of the 3rd finer 205 still maintains high temperature.That is, cause in the 3rd finer 205, between the outer surface part of melten glass MG and central part, temperature head becomes large.In this case, by the problem producing from middle crystallization of the melten glass MG of outer surface part and so on.And, in the 3rd finer 205, if between the outer surface part and central part of melten glass MG, under becoming large state, the temperature head of melten glass MG stirs melten glass MG, the glass that temperature head is larger mixes mutually, therefore not only produce bubble B, and the easily obstruction uniformity aspect the composition of glass that becomes.And, be to accelerate the cooling rate of melten glass MG, and must increase the heat radiation from the 3rd finer 205, so, must make to support the thickness attenuation of the bracing members such as floater guide block (backup brick) of the platinum of the 3rd finer 205 or the main body of platinum alloy pipe.Yet the intensity of equipment declines the thickness attenuation corresponding to bracing member.Therefore, in the situation that glass substrate is made in industrialization, the cooling rate of arbitrarily accelerating melten glass MG only can cause above-mentioned and so on problem, thereby it is suitable to feel embarrassed to mention.
According to above situation, preferred molten glass MG is limited to 50 ℃/min, more preferably 35 ℃/min in the cooling rate of 1600 ℃ to 1500 ℃.That is, in the present embodiment, preferred above-mentioned cooling rate is 2 ℃/min～50 ℃/min, more preferably 3 ℃/min～35 ℃/min.
(forming step)
Fig. 4 is the figure that main expression forms the device formation of step and cut-out step.Building mortion 300 comprises forming furnace 340 and leer 350.
Forming furnace 340 and leer 350 are surrounded and formed by the not shown furnace wall that comprises the refractory materialss such as refractory brick.Forming furnace 340 is to be arranged on vertical top with respect to leer 350.The furnace interior space surrounding in the furnace wall by forming furnace 340 and leer 350, is provided with molding 310, environment insulating element 320, cooling roller 330, cooling unit 335 and transports roller 350a～350d.
Molding 310 is through the continuous mobile melten glass MG of glass supply-pipe 206 shown in Fig. 2, to be configured as plate glass G from fusing device 200.Melten glass while being supplied to molding 310 reaches the temperature that becomes log η=4.3～5.7 for viscosities il (poise).Though the temperature of this melten glass MG because of glass types different, if glass for liquid crystal display for example, the temperature of this melten glass MG is 1200～1300 ℃.Thus, in building mortion 300, make the streamline of the plate glass G of vertical below.Molding 310 is the elongated structural body that comprise refractory brick etc., and as shown in Figure 4, cross section is wedge shape.On the top of molding 310, be provided with the feed trough 312 of the stream that becomes guiding melten glass.Feed trough 312 is being located at the supplying opening of building mortion 300, is connected, and constantly through the mobile melten glass MG of the 3rd finer 205, along feed trough 312, flows with the 3rd finer 205.The downstream of the streamline of the more past melten glass of the degree of depth of feed trough 312 becomes more shallow, and melten glass MG overflows towards vertical below from feed trough 312.
The melten glass overflowing from feed trough 312 flows down along vertical walls and the inclined wall of the both sides of molding 310 sidewall.Melten glass mobile on sidewall, at lower end 313 interflow of the molding 310 shown in Fig. 4, is configured as 1 plate glass G.
Near below the lower end 313 of molding 310, be provided with environment insulating element 320.Environment insulating element 320 is heat insulating components of pair of plate-shaped, and to clip the mode of the both sides of plate glass G, is arranged on the both sides of the thickness direction of plate glass G.Environment insulating element 320 separates gap with the degree not contacting with plate glass G.Environment insulating element 320 is by the internal space of forming furnace 340 is isolated, and the furnace interior space of top of blocking-up environment insulating element 320 and the heat between the furnace interior space of below move.
Below environment insulating element 320, be provided with cooling roller 330.Cooling roller 330 is near the plate glass G Surface Contacts two ends with the width of plate glass G, by plate glass G tractive downward, plate glass G is stretched as to the thickness of expection, and the both ends of plate glass G are cooling.
Below forming furnace 340, with being interval with of stipulating, transport roller 350a～350d, and these transport roller 350a～350d along downward direction traction plate glass G.In illustrated mode, be provided with 4 pairs and transport roller, but also can arrange more than 5 pairs.The space of the below of forming furnace 340 becomes the furnace interior space of leer 350.Transport roller 350a～350d and there is separately roller pair, and to clip the mode of the both sides of plate glass G, be arranged on the both side ends of the width of plate glass G.
(glass composition)
Utilize the glass substrate that the manufacture method of the glass substrate of present embodiment is manufactured can be preferably for glass substrate for plane display device.For example, have not containing the arbitrary composition in Li, Na and K, even if or contain at least any composition in Li, Na and K, but in Li, Na and K, the total amount of contained composition is that glass below 2 quality % forms, effectively bring into play aspect the effect of present embodiment better.Glass forms preferably illustration composition shown below.
(a) SiO
2: 50～70 quality %,
(b) B
2o
3: 1～18 quality %,
(c) Al
2o
3: 10～25 quality %,
(d) MgO:0～10 quality %,
(e) CaO:0～20 quality %,
(f) SrO:0～20 quality %,
(g) BaO:0～10 quality %,
(h) RO:5～20 quality % (wherein, R is at least a kind that is selected from Mg, Ca, Sr and Ba, and RO is the total of composition contained in MgO, CaO, SrO and BaO),
(i) R '
2o: over below 0.1 quality % and 2.0 quality %, (wherein, R ' is for being selected from least a kind in Li, Na and K and R '
2o is Li
2o, Na
2o and K
2the total of contained composition in O),
(j) at least a kind of metal oxide being selected from tin oxide, ferric oxide and cerium oxide etc. adds up to 0.05～1.5 quality %.
In addition, above-mentioned (i) and composition (j) are also nonessential, but can contain (i) and composition (j).In above-mentioned glass, do not contain in fact As
2o
3and PbO, and contain SnO
2.In addition, according to the viewpoint of environmental problem and preferably in fact also not containing Sb
2o
3.
And, R ' (i)
2o content also can be 0 quality %.
Except mentioned component, the glass substrate of present embodiment is the characteristic of various physics, melting, clarification and the shaping of adjusting glass, and also can contain various other oxide compounds.As the example of other such oxide compounds, be not limited to below, but can enumerate TiO
2, MnO, ZnO, Nb
2o
5, MoO
3, Ta
2o
5, WO
3, Y
2o
3, and La
2o
3.
And, in the present embodiment, SnO
2the composition of easy devitrified glass, so, for improving clarification property one side, one side do not cause devitrification, preferably its containing ratio is 0.01～0.5 quality %, more preferably 0.05～0.3 quality %, and then preferred 0.1～0.3 quality %.
While comprising ferric oxide in above-mentioned metal oxide, above-mentioned ferric oxide preferably its content is 0.01～0.1 quality %, more preferably 0.01～0.08 quality %.
And, the R ' of above-mentioned (i)
2o is in the situation that using glass substrate as liquid crystal display glass substrate or OLED display, preferably do not contain in fact, or using not and to contain being formed on glass substrate the degree trace that the TFT (Thin Film Transistor (thin film transistor)) of glass surface impacts as liquid crystal display glass substrate or OLED display.Can by glass venturesomely trace contain mentioned component, and one side not to TFT impact by the thermal expansion of glass always in fixed range, one side improves the basicity of glass, and the metal of valence change is easily oxidized, thus performance clarification property.And, R '
2o can reduce the resistivity of glass, promotes meltability.Therefore, R '
2the total containing ratio of O is 0～2.0 quality %, more preferably surpasses 0.1 quality % and below 1.0 quality %, and then preferred 0.2～0.5 quality %.In addition, preferably not containing Li
2o, Na
2o, and in mentioned component, also contains and is difficult to the K that semiconductor element impacted from glass elution most
2o.Preferred K
2the containing ratio of O is 0～2.0 quality %, more preferably 0.1～1.0 quality %, and then preferred 0.2～0.5 quality %.
The glass substrate of present embodiment is that viscosity in the clarifying temp of melten glass MG is higher than containing in a large number glass substrate of alkali etc., to obtain preferably as the such characteristic of glass substrate of using in liquid-crystal display or OLED display etc., so, in defoaming treatment, bubble to float speed easily slack-off.When the glass substrate of present embodiment is the glass substrate of formation liquid-crystal display or OLED display etc., for example, preferably the viscosity of the melten glass MG at the temperature of 1630 ℃ is 130～350poise.
(temperature history of melten glass)
Fig. 5 is till the figure that an example of the temperature history of forming step describes to the melting step in present embodiment.
In the manufacture of the glass substrate of present embodiment, frit used is the mode becoming as the chemical constitution of target, weighs various raw materials, mixes preferably and makes frit.Now, by SnO
2as finings, with specified amount, add in frit.To be added with and make in this way SnO
2frit render to and melt in groove 201, with high temperature, melt, make melten glass MG.Render to the frit melting in groove 201 and decompose after reaching the decomposition temperature of its composition, and become melten glass MG because of Vitrification.Melten glass MG be in melting groove 201, flow when, one side makes temperature rising, one side enters the 1st finer 204 (glass supply-pipe 204) near the bottom that melts groove 201.
Therefore,, in melting groove 201, certainly the temperature T 1 in the moment of throwing in frit, till enter the temperature T 3 in the moment of the 1st finer 204 (glass supply-pipe 204), there is the temperature history that the temperature of melten glass MG rises reposefully.In addition, in Fig. 5, be T1 < T2 < T3, but also can be T2=T3 or T2 > T3, at least as long as T1 < T3.
Between the not shown metal flange processed of the 1st finer 204 and the not shown metal flange processed of the 2nd finer 202, make fixing current flowing, by the heating of switching on of the platinum of the 1st finer 204 or platinum alloy pipe, thus, and then between the not shown metal flange processed of the 2nd finer 202 and not shown another metal flange processed of the 2nd finer 202, make fixing current flowing, by the heating of switching on of the platinum of the 2nd finer 202 or platinum alloy, thus, make to enter into the melten glass MG of the 1st finer 204, with 2 ℃/min of above heat-up rates, from temperature T 3, be warmed up to SnO
2for example, till discharging the temperature T 4 (more than 1630 ℃, and then preferably 1650～1700 ℃) of oxygen rapidly.It is as described below that heat-up rate is made as 2 ℃/min of above reasons, at heat-up rate, is more than 2 ℃/min in the situation that, O
2the burst size of gas is large by rapid change.In addition, temperature T 3 is larger with the difference of temperature T 4, SnO in melten glass MG
2the O discharging
2measure more, thereby promote froth breaking.Therefore, preferably temperature T 4 exceeds for example 50 ℃ of left and right than temperature T 3.Now, glass supply-pipe 204 as the 1st clarifying tank has the tube section shape shown in Fig. 3 (b), so heating surface area when melten glass MG is heated with the inner-wall surface contact of glass supply-pipe 204 as heating source is greater than in the long-pending lower tube section shape of identical tube section and is just round equivalent-effect transistor.Therefore, the heat-up rate that can make melten glass MG is more than 2 ℃/min, till being positively warming up to temperature T 4.
And then, the melten glass MG entering in the 2nd finer 202 is maintained to the temperature T 5 roughly the same with temperature T 4 from temperature T 4.In addition, the temperature in temperature T 3～temperature T 5 regulates to adopt in the present embodiment leads to electrically heated mode by each clarifying tank, but is not defined in which.For example, also can adopt the indirect heating that is configured in each clarifying tank not shown well heater around, carry out said temperature adjusting.
Now, by melten glass MG is heated to more than 1630 ℃, and promote the SnO as finings
2reduction reaction.Thus, by a large amount of oxygen evolution in melten glass MG.In melten glass MG, existing bubble B is not only because the temperature rising of melten glass MG causes that the bubble diameter under the rise effect of steeping B composition of gases within pressure expands, and the oxygen discharging because of the reduction reaction of described finings enters in bubble B diffusely, because this synergistic effect bubble diameter expands.
The bubble B that bubble diameter expands is according to Stokes'theorem, and the speed of floating of bubble B accelerates, thereby promotes bubble B to float, break.
Even if in the 2nd finer 202, melten glass MG also maintains 1630 ℃ of above high temperature continuously, so the bubble B in melten glass MG floats the liquid surface to melten glass MG, and in liquid skin breakage, thus, carries out melten glass MG froth breaking.
Defoaming treatment is in Fig. 5, and the temperature of melten glass MG rises to temperature T 4 from temperature T 3, then, maintaining the temperature T 5 roughly the same with temperature T 4 during implement.In Fig. 5, T4 and T5 are roughly the same, but also can be T4 < T5, or can be T4 > T5.
In addition, it is to take the 1st finer 204 to describe as example that the temperature of melten glass MG reaches temperature T 4, but also can in the 2nd finer 202, carry out.
Secondly, the melten glass MG entering after the 3rd finer 205 from the 2nd finer 202 is the remaining bubble B of absorption, and from temperature T 5, for example, via temperature T 6 (1600 ℃), be cooled to the temperature T 7 (temperature that is applicable to whipping step, for example, though and because glass nitre kind is different from the type of whipping appts, be 1500 ℃.) till.
Because the temperature of melten glass MG declines, and do not produce bubble B, do not float and froth breaking, the pressure of the gaseous constituent in melten glass MG in remaining vesicle also declines, and bubble diameter diminishes step by step.And if then the temperature of melten glass MG reaches below 1600 ℃, SnO is (because of SnO
2the SnO of reduction gained) a part absorbs oxygen and is about to become again SnO
2.Therefore, the oxygen in melten glass MG in remaining bubble B is again absorbed in melten glass MG, and it is less that vesicle becomes.This vesicle is melted glass MG and absorbs, and final vesicle disappears.
Because the oxidizing reaction of this SnO absorbs in bubble B the O as gaseous constituent
2processing be absorb to process, and till dropping to temperature T 7 from temperature T 5 via temperature T 6 during implement.In Fig. 5, the cooling rate of temperature T 5～T6 is faster than the cooling rate of temperature T 6～T7, but the cooling rate of temperature T 5～T6 also can be slower than or equal the cooling rate of temperature T 6～T7.At least, when this absorbs processing, preferably make the temperature of melten glass MG with more than 2 ℃/min cooling rates, lower the temperature in the temperature range of 1600 ℃ to 1500 ℃.Yet it is large that the cooling rate when making melten glass MG in the condition of high temperature more becomes, and suppresses in early days following SO
2diffusion, thus the SO being adsorbed in bubble B reduced
2aspect, preferably the cooling rate of temperature T 5～T6 is faster than the cooling rate of temperature T 6～T7.That is,, in absorb processing, the cooling rate of preferred molten glass MG in the temperature range below 1500 ℃ is slower than the cooling rate in the temperature range of 1600 ℃ to 1500 ℃.
And, can, by making the cooling rate of temperature T 6～T7 be slower than the cooling rate of temperature T 5～T6, and simultaneously reduce, be adsorbed on the SO steeping in B
2, one side is dwindled outer surface part in the 3rd finer 205 (glass supply-pipe 205) of the melten glass MG flowing in steel basin 203 and the temperature head between central part.
In addition, consider that the productivity of glass substrate promotes and equipment cost reduction aspect, and preferably in absorbing and processing, the cooling rate of the temperature range of the cooling rate of melten glass MG in the temperature range below 1500 ℃ faster than 1600 ℃ to 1500 ℃.In addition, carrying out, in the temperature controlled situation of this melten glass MG, the flow adjuster of adjusting being supplied to the amount of the melten glass MG of forming step being preferably set.
And, the SO adsorbing in one side reduces bubble B
2one side utilizes the temperature treatment adjustment of the melten glass MG in glass supply-pipe 206 to be supplied to the aspect of amount of the melten glass MG of forming step, preferably in absorb processing, the cooling rate of melten glass MG in the temperature range below 1500 ℃ is slower than the cooling rate in the temperature range of 1600 ℃ to 1500 ℃.Thus, will not be processed into special shape by glass supply-pipe 206, or needn't beyond glass supply-pipe 206, flow adjuster be set, just can easily adjust the amount that flows into the melten glass MG in forming step.And, can dwindle outer surface part in the glass supply-pipe 206 that flows into the melten glass MG in forming step and the temperature head between central part.
After above-mentioned absorption is processed, or absorb processing midway, melten glass MG enters steel basin 203.The composition that steel basin 203 reduces in melten glass MG is uneven, by melten glass MG homogenizing.In addition, in steel basin 203, sustainable enforcement is processed in above-mentioned absorption.After this, melten glass MG is cooled to be applicable to the temperature T 8 of the shaping in forming step, for example, till 1200～1300 ℃.
As mentioned above, between clarification steps and forming step, comprise the whipping step that the composition of melten glass MG is stirred in heterogeneity.Melt step and be the high temperature T 3 of temperature T 1 when starting than the melting of melten glass MG, melten glass MG is supplied to clarification steps.Clarification steps is, with the temperature lower than temperature T 7, melten glass MG is supplied to whipping step.Whipping step is the temperature that to take with respect to viscosities il (poise) be log η=4.3～5.7, and melten glass MG is supplied to forming step.Forming step be in the temperature of melten glass MG under the state of 1200～1300 ℃ for example, melten glass MG is configured as to plate glass.In addition, the liquid phase viscosity of preferred glass substrate is more than log η=4, and the liquidus temperature of preferred glass substrate is 1050 ℃～1270 ℃.Can be by being made as this liquid phase viscosity and liquidus temperature, and applicable overflow downdraw is as manufacturing process.
Fig. 6 is the measurement result of carrying out in experimental furnace, and means while carrying out defoaming treatment O contained in melten glass
2output and the figure of the relation of heat-up rate.Heat-up rate is the V-bar in the temperature range of 1550 ℃ to 1640 ℃.Glass substrate for this mensuration has the identical glass composition of glass substrate for display for the liquid crystal less with alkali metal content, and uses SnO
2as finings.Particularly, use and there is the liquid crystal glass substrate for display that glass shown below forms, and obtain the measurement result shown in Fig. 6.
SiO
2: 60 quality %
Al
2o
3: 19.5 quality %
B
2o
3: 10 quality %
CaO:5.3 quality %
SrO:5 quality %
SnO
2: 0.2 quality %
Known according to Fig. 6, for improving O
2output, and make the heat-up rate of melten glass MG be 2 ℃/min above.In addition, in the measurement result of Fig. 6, CO
2by other glass substrates are overlapped and are formed with on empty glass substrate, and by the gas (CO in cavity
2) sealing, and under this state by each glass substrate heating and fusing, thus, in melten glass MG, as bubble, exist.For realizing this heat-up rate, present embodiment is made as flat pattern using the tube section shape of the glass supply-pipe 204 as the 1st finer 204.As the glass supply-pipe 204 of the 1st finer 204 pipe long-pending with thering is identical tube section (equivalent pipe), compare, with larger heating surface area, to melten glass, give heat, so, can make the temperature of melten glass heat up fast and equably.
In present embodiment, heat-up rate there is no the substantive upper limit, but for example 10 ℃/min following.Glass because of thermal conductivity less, therefore for making heat-up rate increase, and must increase area of heat transfer.For increasing area of heat transfer, and enumerate, the internal diameter of the 1st finer 204 as metal tube or the 2nd finer 202 etc. is formed less, and then the 1st finer 204 or the 2nd finer 202 etc. is formed longer in the longitudinal direction.And, for increasing area of heat transfer, and enumerate, the temperature of the 1st finer 204 or the 2nd finer 202 etc. is brought up to than till the obvious high temperature of the temperature of melten glass MG.Yet, if the internal diameter of the 1st finer 204 or the 2nd finer 202 etc. is formed less, spout and the 1st finer 204 or the 2nd finer 202 etc. is formed in the longitudinal direction longer, cause glass substrate manufacturing installation to maximize, so not good enough.And, if the temperature of the 1st finer 204 or the 2nd finer 202 etc. is brought up to than the temperature of melten glass MG obviously till high temperature, there is Yin Gaowen and cause the possibility of glass substrate manufacturing installation breakage.Therefore, preferably in the substance of heat-up rate, be limited to below 10 ℃/min.According to above situation, preferably heat-up rate is 2 ℃/min～10 ℃/min, more preferably 3 ℃/min～8 ℃/min, and then preferably 3 ℃～6.5 ℃/min.In this scope, can effectively carry out defoaming treatment, thereby bubble remaining in glass substrate is reduced effectively.
And, as mentioned above, the absorption of the bubble carrying out after defoaming treatment process be by melten glass MG in the temperature range of 1600 ℃ to 1500 ℃, with 2 ℃/min of above cooling rates, lower the temperature.This absorbs processing is to implement according to the reason of following explanation.
Thereby in temperature T 3, to melten glass MG being heated up in temperature T 4, reach temperature T 5 during, melten glass MG is warmed up to SnO
2the temperature that oxygen evolution is reduced is more than 1600～1630 ℃, so, in the bubble in melten glass MG, not only promote SnO
2the absorption of the oxygen discharging, and reach a high temperature and promote to be dissolved in the O in melten glass MG
2, CO
2, SO
2diffusion, thereby also by the O being dissolved in melten glass MG
2, CO
2, SO
2be adsorbed onto in above-mentioned bubble B.In addition, gaseous constituent changes because of glass ingredient the melting degree in melten glass MG, but at SO
2situation under, the relative melting degree of the glass that alkali metal component content is more is higher, even if alkali-free metal ingredient or to contain also the melting degree that the glass substrate for using in the such liquid crystal display glass substrate of a small amount of present embodiment can melt in melten glass MG lower.Be used for the glass substrate of liquid crystal display glass substrate originally as frit, do not add artificially S (sulphur) composition, but as the impurity in raw material, or in melting groove 201 combustion gases (large so gas used, city gas, propane gas etc.), in, as impurity, contain micro-ly.Therefore, oxidized as the contained S composition of these impurity and become SO
2, and enter diffusely in bubble B contained in melten glass MG.SO
2because being difficult to again be absorbed, remain in bubble B.This phenomenon and in the past used As
2o
3during as finings, compare, show particularly significantly.
By SnO
2in situation about forming as the glass of finings, the melten glass MG hold-time is at high temperature longer, more promotes SO in melten glass MG
2to the diffusion in existing bubble B.Can think that its reason is, after reaching a high temperature, SO
2velocity of diffusion in melten glass MG accelerates, thereby easily enters in bubble B.
After this, while carrying out melten glass MG cooling from temperature T 5 to temperature T 7, because of SnO
2the SnO of reduction gained absorbs O because of oxidizing reaction
2be oxidized.Therefore, be present in the O in bubble B remaining in melten glass MG
2by SnO, absorbed.Yet, still maintain the SO in melten glass MG
2or CO
2to the diffusion in existing bubble B.Therefore, in temperature T 5 in the gaseous constituent in bubble B in during temperature T 7, SO
2, CO
2concentration higher than temperature T 3 in during temperature T 5.Especially, present embodiment melten glass MG used is the less composition of alkali metal content, therefore, and SO
2melting degree in melten glass MG is less.Therefore, one and SO
2as gas adsorption in bubble B, this SO
2in absorbing processing, will be difficult to be absorbed in melten glass MG.
Above, in temperature T 5 to during temperature T 7, the O in bubble B
2because the oxidizing reaction of SnO is absorbed by SnO, but still maintain SO
2, CO
2to the diffusion in existing bubble B, can be between short-term during this period by making, and reduce SO
2, CO
2to the diffusion in existing bubble B, thus the growth that suppresses to steep B.Therefore, during processing to the absorption of temperature T 7 in temperature T 5 in, because melten glass MG lowers the temperature with more than 2 ℃/min cooling rates in the temperature range of 1600 ℃ to 1500 ℃, therefore, the bubble number suppressing in glass substrate as described below.
Fig. 7 means contained SO in the hole of reproducing the bubble B in glass
2the figure of measurement result of content, and represent SO
2the content dependency of holding time for temperature condition and the temperature of glass.The size of the black circle in Fig. 7 represents to steep the size of B, and represents SO
2content.
Glass substrate has the above-mentioned liquid crystal less with alkali-metal content and forms with the identical glass of glass substrate for display, and contains SnO
2as finings.The liquid crystal display glass substrate that the glass that while particularly, using the measurement result that has and obtain Fig. 6, the glass substrate of made is identical forms.
At the melten glass that this glass is formed, be configured as artificially on tabular glass substrate and offer hole, and in the both sides of offering porose glass substrate, under oxygen environment, clip the glass substrate that glass of the same race forms, thus, will be filled with O
2hole as bubble, reproduce.To there is the glass substrate in this hole, change 1200 ℃ of above temperature and temperature multiplely and hold time and implement thermal treatment, utilize gasometry, measure the SO in hole
2content.Due to glass substrate is heated to more than 1200 ℃, so glass substrate becomes molten state, thereby can reproduce remaining bubble B in melten glass.
Known according to Fig. 7, at more than 1500 ℃ temperature roughly, be filled with O
2hole in contain SO
2.Especially known, more become high temperature, and then temperature hold time longer, SO
2content more increase.This situation means the SO dissolving in the glass that reaches molten state
2diffusion Yin Gaowen and promoted, thereby be adsorbed in hole.
Therefore, during preferably by melten glass MG, the absorption after defoaming treatment is processed, be cooled to rapidly and be less than 1500 ℃, in present embodiment, preferably melten glass MG is lowered the temperature with more than 2 ℃/min cooling rates in the temperature range of 1600 ℃ to 1500 ℃.
The figure of the measurement result of the bubble grade that Fig. 8 produces when meaning and making glass substrate in the experimental furnace of temperature history of the melten glass MG being presented on shown in mimic diagram 5 and the relation of cooling rate.Cooling rate is the V-bar in the temperature range of 1600 ℃ to 1500 ℃.The glass substrate of made has the liquid crystal less with alkali metal content and forms with the identical glass of glass substrate for display, and by SnO
2as finings.The liquid crystal display glass substrate that the glass that while particularly, using the measurement result that has and obtain Fig. 6, the glass substrate of made is identical forms.
If known cooling rate is less than 2 ℃/min, steep the rapid rising of grade.In addition, so-called bubble grade means that take the bubble number of cooling rate per unit glass quality while being made as 10 ℃/min is benchmark, and bubble number with which kind of degree worsens.For example steep the grade 3 bubble number while representing to be made as 10 ℃/min with respect to cooling rate and be the bubble number of 3 times.
According to Fig. 8, for reducing bubble grade, and preferably cooling rate is made as more than 2 ℃/min.
Fig. 9 means and presents the device that uses the glass substrate shown in shop drawings 2, the figure of the measurement result of the relation of existing bubble grade and cooling rate in the glass substrate while making glass substrate.Now, the temperature history of melten glass MG is got the course shown in Fig. 5.Cooling rate is the V-bar in the temperature range of 1600 ℃ to 1500 ℃.The glass substrate of made has the liquid crystal less with alkali metal content and forms with the identical glass of glass substrate for display, and uses SnO
2as finings.The liquid crystal display glass substrate that the glass that while particularly, using the measurement result that has and obtain Fig. 6, the glass substrate of made is identical forms.So-called bubble grade means which kind of degree the bubble number of per unit quality when cooling rate is made as 8 ℃/min worsens with as benchmark, bubble number.For example, bubble number when steeping class 5 and representing to be made as 8 ℃/min with respect to cooling rate is the bubble number of 5 times.
Known according to Fig. 9, if cooling rate is less than 2 ℃/min, steep grade by rapid rising.Therefore, if known, make melten glass MG in the temperature range of 1600 ℃ to 1500 ℃, with 2 ℃/min of above cooling rates, lower the temperature, steep grade and will reduce.Known according to Fig. 9, for example, when cooling rate is 3 ℃/min～8 ℃/min, can reduce bubble grade aspect more effective.
As mentioned above, due to the SO that can reduce in melten glass
2bubble number, so, can also can reduce and become the bubble that rotates the core in the hole producing because of the agitating vane in whipping step, final, can reduce the bubble number in glass substrate.This effect is in the manufacture method of the less glass substrate of the content that forms BaO or SrO as glass, particularly remarkable.
More specifically, mostly using forming contained MgO, CaO as glass, SrO, BaO are added in raw material as carbonate, and its decomposition temperature is that MgO is minimum, CaO, SrO, BaO uprise successively.That is, decomposition temperature is higher, starts to discharge CO
2temperature higher.From above-mentioned situation, if after defoaming treatment, melten glass MG lowers the temperature, and decomposition temperature is got over Gao Zeyue and in high temperature, started to absorb CO
2.For example, BaO starts to absorb CO near 1300 ℃
2.
Yet, as glass, forming and in relatively high temperature province, starting to absorb CO
2baO or the manufacture of the less glass substrate of the content of SrO in, CO
2absorption be that the viscosity of melten glass MG uprises rear beginning from the temperature of melten glass MG declines.Herein, CO
2if the viscosity of melten glass MG is low, rapid diffusion in melten glass MG.Therefore, after the viscosity from melten glass MG uprises, (after temperature step-down) starts to carry out CO
2in the manufacture method of the glass substrate absorbing, CO
2easily as bubble, remain in melten glass MG.
As in the embodiment described in, if reduce the SO existing as the gaseous constituent of steeping in melten glass
2, as mentioned above, even if easy remaining CO
2the manufacture of glass substrate, also can suppress to produce the bubble of the core that becomes hole, result, also can reduce as the bubble number in the glass substrate of end article.According to above situation, the content that present embodiment is applicable to BaO is the manufacture of the glass substrate of 0～1.0 quality %, and and then the applicable manufacture method that does not contain in fact the glass substrate of BaO.And the content that present embodiment is applicable to SrO is the manufacture of the glass substrate of 0～3.0 quality %, and then be applicable to not containing in fact the manufacture method of the glass substrate of SrO.
(changing example)
Figure 10 (a), Figure 10 (b) mean the figure as the variation example of the tube section shape of the glass supply-pipe 204 of the 1st clarifying tank of present embodiment.Tube section shape can be both that the surface-area of the melten glass that is heated becomes large mode, for example than the pipe with positive circular section, become large mode, elongated essentially rectangular shape in the horizontal direction as shown in Figure 10 (a) can be also by the cross-sectional shape of the bight linearity chamfering gained of the elongated essentially rectangular shape of horizontal direction as shown in Figure 10 (b).Particularly, tube section shape can be to have that bight in the rectangular shape of long limit and minor face becomes the shape (Figure 10 (a)) of circle or through the shape (Figure 10 (b)) of chamfering.Even if these tube section shapes, the surface-area of the melten glass MG being heated with the inner-wall surface contact that becomes heating source of glass supply-pipe 204 is also greater than the surface-area of the melten glass being heated from the inner-wall surface with the long-pending just round pipe in the past of the tube section identical with glass supply-pipe 204.Therefore, melten glass MG is heated with larger surface-area, so, the temperature of melten glass MG can be heated up fast and equably.That is, will there is the sectional area long-pending consistent with the tube section of glass supply-pipe 204 as the 1st clarifying tank and cross-sectional shape for just round pipe is as benchmark.Now, after the inner-wall surface that is glass supply-pipe 204 with the 1st clarifying tank with the tube section shape shown in Figure 10 (a), Figure 10 (b) contacts, the surface-area that is heated of melten glass MG is greater than at cross-sectional shape and melten glass MG and the surface-area of the melten glass MG that is heated from the inner-wall surface of pipe for just round Flow In A Circular Tube.So, the melten glass MG shown in Figure 10 (a), Figure 10 (b) is usingd larger surface-area and is heated from the inner-wall surface as heating source of glass supply-pipe 204, so, the temperature of melten glass MG can be heated up fast and equably.Therefore, in the clarifying tank that carries out froth breaking, can effectively bubble be removed.
Figure 10 (c) is that explanation is as the figure of heating source in the pipe of the variation example of present embodiment.As shown in Figure 10 (c), at glass supply-pipe 204, except the wall heating source of the inner-wall surface heating and melting glass MG from glass supply-pipe 204, also can become large mode with the surface-area of the melten glass that is heated, in the pipe of glass supply-pipe 204, heating source 204a in the pipe contacting with melten glass MG is set.Figure 10 (d) is the figure of heating source 204a gained in tube section direction is observed the pipe shown in Figure 10 (c).The tube section of glass supply-pipe 204 is shaped as just round.Due to heating source 204a in this pipe being set, therefore just round even if the tube section of glass supply-pipe 204 is shaped as, melten glass MG melten glass MG when this glass supply-pipe 204 flows contacts with heating source and the surface-area of the melten glass MG that is heated also becomes large.; due to heating source 204a in the pipe shown in Figure 10 (c), Figure 10 (d) is arranged in glass supply-pipe 204, the surface-area of the melten glass MG being heated therefore melten glass MG contacts with heating source becomes and is greater than that melten glass MG melten glass MG when this Flow In A Circular Tube contacts with the inner-wall surface of pipe and the surface-area of the melten glass that is heated from inner-wall surface.Therefore, melten glass MG is heated with larger surface-area, so, the temperature of melten glass MG can be heated up fast and equably.Therefore,, in carrying out the clarifying tank of froth breaking, can effectively bubble be removed.Certainly, the tube section shape of glass supply-pipe 204 is not necessary for just round, also can have such tube section shape shown in Fig. 3 (b), Figure 10 (a), Figure 10 (b).
In addition, this case creator confirms to have above-mentioned effect by simulating.
Above, the manufacture method of glass substrate of the present utility model is had been described in detail, but the utility model is not defined in above-mentioned embodiment, certainly, within not departing from the scope of spirit of the present utility model, can implements various improvement or change.
Claims (6)
1. a manufacturing installation for glass substrate, supplies to manufacture glass substrate, it is characterized in that comprising:
Calciner, melts frit, makes melten glass;
Glass supply-pipe, it is the pipe that transmits described melten glass, and one side heats described melten glass from the inner-wall surface of this pipe, and one side transmits described melten glass; And
Tubulose clarifying tank, by the described melten glass one side transmitting from described glass supply-pipe, from inner-wall surface heating, one side is carried out froth breaking;
Described melten glass contacts and is heated from described glass supply-pipe via at least a portion with described glass supply-pipe,
The tube section shape of a described part for described glass supply-pipe is the elliptical shape with major axis and minor axis, and has and in the rectangular shape of long limit and minor face, bight is become to the shape of circle or by the arbitrary shape in the shape of bight chamfering.
2. the manufacturing installation of glass substrate according to claim 1, is characterized in that: the tube section shape of a described part is that the length of horizontal direction is longer than the flat pattern of vertical direction.
3. a manufacturing installation for glass substrate, supplies to manufacture glass substrate, it is characterized in that comprising:
Calciner, melts frit, makes melten glass;
Glass supply-pipe, it is the pipe that transmits described melten glass, and one side heats described melten glass from the inner-wall surface of this pipe, and one side transmits described melten glass; And
Tubulose clarifying tank, by the described melten glass one side transmitting from described glass supply-pipe, from inner-wall surface heating, one side is carried out froth breaking;
Described melten glass is via contacting with at least a portion of described glass supply-pipe, and is heated from described glass supply-pipe, and
At described glass supply-pipe, be not only provided with the wall heating source that heats described melten glass from the inner-wall surface of described glass supply-pipe, and in the pipe of described glass supply-pipe, be provided with heating source in the pipe contacting with described melten glass.
4. a glass supply-pipe, to supplying with described melten glass from the tubulose clarifying tank of inner-wall surface heating and melting glass, is characterized in that:
Described melten glass is via contacting with at least a portion of described glass supply-pipe, and is heated from described glass supply-pipe, and
The tube section shape of a described part for described glass supply-pipe is to have the elliptical shape of major axis and minor axis and have in the rectangular shape of long limit and minor face, bight to be become to the shape of circle or by the arbitrary shape in the shape of bight chamfering.
5. glass supply-pipe according to claim 4, is characterized in that: the tube section shape of a described part is that the length of horizontal direction is longer than the flat pattern of vertical direction.
6. a glass supply-pipe, to supplying with described melten glass from the tubulose clarifying tank of inner-wall surface heating and melting glass, and
Described melten glass is via contacting with at least a portion of described glass supply-pipe, and is heated from described glass supply-pipe, and
Not only be provided with the wall heating source that heats described melten glass from the inner-wall surface of described glass supply-pipe, and in the pipe of described glass supply-pipe, be provided with heating source in the pipe contacting with described melten glass.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012218609A JP5777590B2 (en) | 2012-09-28 | 2012-09-28 | Glass substrate manufacturing method and glass substrate manufacturing apparatus |
| JP2012-218609 | 2012-09-28 |
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| Publication Number | Publication Date |
|---|---|
| CN203498246U true CN203498246U (en) | 2014-03-26 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320530155.7U Expired - Lifetime CN203498246U (en) | 2012-09-28 | 2013-08-28 | Glass substrate making device and glass supply pipe |
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| JP (1) | JP5777590B2 (en) |
| CN (1) | CN203498246U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106316077A (en) * | 2015-06-30 | 2017-01-11 | 旭硝子株式会社 | Molten glass supply device, glass plate manufacturing device and glass plate manufacturing method |
| CN109205997A (en) * | 2017-06-30 | 2019-01-15 | 安瀚视特控股株式会社 | The manufacturing method and glass substrate manufacturing device of glass substrate |
| CN109982980A (en) * | 2016-12-14 | 2019-07-05 | 日本电气硝子株式会社 | The pre-heating mean of the supporting structure of glass supply pipe, glass sheet manufacturing device, glass sheet manufacturing method and glass supply pipe |
| CN109970319A (en) * | 2017-12-27 | 2019-07-05 | 安瀚视特控股株式会社 | The manufacturing method and glass substrate manufacturing device of glass substrate |
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| WO2016153947A1 (en) | 2015-03-23 | 2016-09-29 | Corning Incorporated | Apparatus and method for heating a metallic vessel |
| US10633276B2 (en) | 2015-10-21 | 2020-04-28 | Corning Incorporated | Apparatus and method for heating a metallic vessel |
| KR102417853B1 (en) * | 2017-12-08 | 2022-07-06 | 코닝 인코포레이티드 | Glass manufacturing apparatus and glass manufacturing method |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5024045B2 (en) * | 2005-07-26 | 2012-09-12 | 旭硝子株式会社 | Platinum or platinum alloy hollow tube backup structure |
| JP4076578B1 (en) * | 2007-09-11 | 2008-04-16 | 株式会社フルヤ金属 | Hollow tube and glass melting apparatus using the same |
| JP2009120430A (en) * | 2007-11-13 | 2009-06-04 | Furuya Kinzoku:Kk | Telescopic tube |
| JP4790783B2 (en) * | 2008-11-05 | 2011-10-12 | ＡｖａｎＳｔｒａｔｅ株式会社 | Manufacturing method of glass plate |
| US8408029B2 (en) * | 2009-11-17 | 2013-04-02 | Corning Incorporated | Method for thermally conditioning molten glass |
| JPWO2012133467A1 (en) * | 2011-03-31 | 2014-07-28 | ＡｖａｎＳｔｒａｔｅ株式会社 | Manufacturing method of glass plate |
-
2012
- 2012-09-28 JP JP2012218609A patent/JP5777590B2/en active Active
-
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106316077A (en) * | 2015-06-30 | 2017-01-11 | 旭硝子株式会社 | Molten glass supply device, glass plate manufacturing device and glass plate manufacturing method |
| CN106316077B (en) * | 2015-06-30 | 2019-06-11 | Ａｇｃ株式会社 | Molten glass supply apparatus, manufacturing apparatus of glass plate, and manufacturing method of glass plate |
| CN109982980A (en) * | 2016-12-14 | 2019-07-05 | 日本电气硝子株式会社 | The pre-heating mean of the supporting structure of glass supply pipe, glass sheet manufacturing device, glass sheet manufacturing method and glass supply pipe |
| CN109982980B (en) * | 2016-12-14 | 2021-11-02 | 日本电气硝子株式会社 | Support structure for glass supply pipe, apparatus for manufacturing sheet glass, method for manufacturing sheet glass, and method for preheating glass supply pipe |
| CN109205997A (en) * | 2017-06-30 | 2019-01-15 | 安瀚视特控股株式会社 | The manufacturing method and glass substrate manufacturing device of glass substrate |
| CN109970319A (en) * | 2017-12-27 | 2019-07-05 | 安瀚视特控股株式会社 | The manufacturing method and glass substrate manufacturing device of glass substrate |
| CN109970319B (en) * | 2017-12-27 | 2021-11-09 | 安瀚视特控股株式会社 | Method for manufacturing glass substrate, and glass substrate manufacturing apparatus |
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| Publication number | Publication date |
|---|---|
| JP5777590B2 (en) | 2015-09-09 |
| JP2014070001A (en) | 2014-04-21 |
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