CN203487225U - Planetary mechanism for improving coating uniformity - Google Patents

Abstract

The utility model belongs to the field of vacuum coating equipment, and is a planetary mechanism for improving the uniformity of coating. The planetary mechanism for improving coating uniformity includes a grease-free lubricating bearing, a self-rotating disk, a revolution disk, a rotating shaft, a workpiece hole, a pinion, an output shaft, and a fixed large gear. Wherein, the fixed large gear is fixed on the fixed shaft of the rotating mechanism of the ion sputtering coating machine, one end of the revolving disk meshes with the fixed large gear through the pinion, and the other end is fixed with the rotating shaft, and the rotating disk is connected to the rotating shaft through the output shaft. The pinion gears are connected, and the workpiece holes are evenly distributed on the rotating disk according to the circumference. The utility model has a simple structure and can be conveniently interchanged with the original high-speed disk. The rotating mechanisms (systems) located in the vacuum chamber do not use grease to lubricate, which ensures that the vacuum chamber is clean and free from pollution, and at the same time improves the high speed of the SPECTOR ion sputtering coating machine. The uniformity of the film prepared by the disk mechanism is especially suitable for users who have high precision requirements for optical films.

Description

A Planetary Mechanism for Improving Coating Uniformity

technical field

The utility model belongs to the field of vacuum coating equipment, and is a planetary mechanism for improving the uniformity of coating.

Background technique

At present, with the continuous improvement of the performance indicators of optical films, the traditional thermal evaporation coating method is no longer suitable for the preparation of some high-precision optical films, and the ion beam sputtering coating method has been more and more used in the high-precision optical film industry. For some users who require precise control of film thickness and uniformity, the optical film prepared by using the high-speed rotating workpiece disk equipped with the SPECTOR ion sputtering coating machine of veeco in the United States may not necessarily meet the user's requirements. The inherent defect of the equipment itself - there is inhomogeneity along the central ray direction of the workpiece disk, which leads to the deviation of the anisotropy parameter of the film surface of the part. Despite the correction of the correction plate, the accuracy still cannot meet the requirements of high-precision users. However, if you choose the planetary disk mechanism of Veeco, you cannot choose the high-speed disk mechanism. The two systems cannot be compatible and used interchangeably on one piece of equipment.

Contents of the invention

The purpose of this utility model is: in order to overcome the incompatibility between the planetary disk mechanism and the high-speed disk mechanism of the prior art SPECTOR ion sputtering coating machine, and propose a planetary mechanism that does not damage the original high-speed disk rotation mechanism of the equipment, so that the workpiece disk is changed from the original One degree of freedom is increased to two degrees of freedom, so as to improve the uniformity of the membrane surface, and at the same time, it can be easily and quickly interchanged with the high-speed disk device.

The technical solution of the utility model is: a planetary mechanism for improving coating uniformity, which includes a grease-free lubricating bearing, a self-rotating disk, a revolution disk, a rotating shaft, a workpiece hole, a small gear, an output shaft, and a fixed large gear, wherein , the fixed large gear is fixed on the fixed shaft of the rotating mechanism of the ion sputtering coating machine, one end of the revolving disk is meshed with the fixed large gear through the pinion, and the other end is fixed with the rotating shaft, and the rotating disk is connected to the small through the output shaft The gears are connected, and the workpiece holes are evenly distributed on the rotating disk according to the circumference.

The revolving disk is erected in the vacuum chamber.

The self-rotating disk is fixed on one end of the output shaft by screws, and the output shaft is fixed by a grease-free lubricating bearing arranged on the revolving disk.

The fixed bull gear is fixed on the fixed shaft of the rotating mechanism of the SPECTOR ion sputtering coating machine by screws.

The technical effect of the utility model is that the utility model does not destroy the original rotating system, space and sealing system of the equipment. The structure is simple, and it can be easily interchanged with the original high-speed disk. The rotating mechanisms (systems) in the vacuum chamber do not use grease lubrication, which ensures that the vacuum chamber is clean and free from pollution. The uniformity of the film produced by the institution.

Description of drawings

Figure 1 is a schematic diagram of the overall structure of the utility model.

In the figure: 1 is grease-free lubricating bearing; 2 is self-rotating plate; 3 is screw; 4 is revolution plate; 5 is nut; 6 is rotating shaft; 7 is workpiece hole; 8 is pinion; 9 is output shaft; 10 is Screw; 11 is a fixed bull gear; 12 is a screw.

Detailed ways

Below in conjunction with accompanying drawing and specific embodiment, the utility model is further described. The protection scope of the present utility model is not limited to the expression of the following content.

Referring to Fig. 1, the planetary mechanism used to improve the coating uniformity of the present invention includes a grease-free lubricating bearing 1, a self-rotating disk 2, a screw 3, a revolving disk 4, a nut 5, a rotating shaft 6, a workpiece hole 7, and a pinion 8 , output shaft 9, screw 10, fixed bull gear 11, screw 12. The fixed bull gear 11 is fixed on the fixed shaft of the rotating mechanism of the SPECTOR ion sputtering coating machine by the screw 12, and cannot move. The revolving disk 4 is erected in the vacuum chamber, one end is meshed with the fixed bull gear 11 through the pinion 8, and the other end is fixed with the rotating shaft 6 through the nut 5, the revolving disk 4 can be moved along with the The rotating shaft 6 rotates together. The self-rotating disk 2 is connected with the pinion 8 through the output shaft 9 , the non-grease lubricating bearing 1 and the screw 3 , and can rotate together with the revolving disk 4 . The workpiece holes 7 are evenly distributed on the rotating disk 2 according to the circumference, and are used for loading various coating substrates.

The planetary mechanism of the utility model is vertical during the coating process. When rotating, not only the revolution disk rotates around the central rotation axis, but also the autorotation disk can also rotate around the output shaft, thereby effectively improving the uniformity of film deposition in the coating process.

The planetary mechanism of the utility model can be conveniently and quickly exchanged with the original high-speed disk according to the demand without damaging any equipment hardware and vacuum sealing of the SPECTOR ion sputtering coating machine of veeco company, and is especially suitable for users who have high-precision requirements for optical films. .

The above descriptions are only preferred embodiments of the utility model, and are not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present utility model shall be included in the protection scope of the present utility model.

Claims (4)

1. A planetary mechanism for improving coating uniformity, characterized in that: comprising a grease-free lubricating bearing, a self-rotating disk, a revolving disk, a rotating shaft, a workpiece hole, a pinion, an output shaft, and a fixed bull gear, wherein the The fixed large gear is fixed on the fixed shaft of the rotating mechanism of the ion sputtering coating machine. One end of the revolving disk meshes with the fixed large gear through the pinion, and the other end is fixed with the rotating shaft. The self-rotating disk is connected with the pinion through the output shaft. The workpiece holes are evenly distributed on the rotary table according to the circumference. 2. The planetary mechanism for improving coating uniformity according to claim 1, wherein the revolving disk is erected in a vacuum chamber. 3. The planetary mechanism for improving coating uniformity according to claim 2, characterized in that: the rotating disk is fixed on one end of the output shaft by screws, and the output shaft is fixed by a grease-free lubricating bearing arranged on the revolving disk. 4. The planetary mechanism for improving coating uniformity according to claim 3, characterized in that: the fixed bull gear is fixed on the fixed shaft of the rotating mechanism of the SPECTOR ion sputtering coating machine by screws.

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