CN203216257U - Pushed slab kiln for compounding and sintering vanadium nitride through microwave-electric hybrid heating - Google Patents

Abstract

The utility model discloses a vanadium nitride microwave and electric mixed heating and firing pusher kiln. The pusher kiln body is sequentially connected with a kiln airtight chamber (1), a microwave suppression furnace body (2), and a microwave drying oven. Furnace body (3), microwave low temperature heating furnace body (4), microwave low temperature holding furnace body (5), microwave medium temperature heating furnace body (6), electric heating high temperature heating furnace body (7), electric heating high temperature holding furnace body ( 8), slow cooling furnace body (9), water-cooled furnace body (10) and kiln outlet airtight chamber (11). The utility model is a vanadium nitride microwave and electric hybrid heating synthesis firing pusher kiln with fast reaction speed, high quality of processing materials, high heating matching performance and high energy efficiency.

Description

A vanadium nitride microwave and electric hybrid heating synthesis firing pusher kiln

technical field

The utility model relates to a pusher kiln, in particular to a pusher kiln for vanadium nitride microwave and electric mixed heating synthesis firing.

Background technique

Nitrogen exists in the form of compounds in vanadium-containing non-quenched and tempered steel, and its main function is to strengthen the effect of vanadium precipitation strengthening and grain refinement, thereby improving the strength and welding properties of the steel, and saving the amount of vanadium. The direct addition of vanadium nitride can add nitrogen and vanadium at the same time, the process is simple and has a high yield, so it has been used more and more.

The preparation of conventional vanadium nitride adopts high-temperature carbothermal reduction and nitriding treatment in a vacuum furnace or an atmospheric continuous electric furnace. The vacuum method has complicated process and low productivity; although the normal pressure continuous electric furnace method has high productivity and simple process, the product temperature is uneven, the insulation material loss is serious, and the power consumption is high.

Utility model content

The technical problem to be solved by the utility model is to provide a vanadium nitride microwave and electric hybrid heating synthesis firing pusher kiln with fast reaction speed, high quality of processing materials, high heating matching performance and high energy efficiency.

In order to solve the above-mentioned technical problems, the vanadium nitride microwave and electric hybrid heating and firing pusher kiln provided by the utility model include a pusher kiln body, and the kiln airtight chamber, Microwave suppression furnace, microwave drying furnace, microwave low temperature heating furnace, microwave low temperature holding furnace, microwave medium temperature heating furnace, electric heating high temperature heating furnace, electric heating high temperature holding furnace, slow cooling furnace, water cooling furnace And out of the kiln airtight chamber, the connection between the electric heating high temperature heating furnace body and the microwave medium temperature heating furnace body is provided with a microwave shielding device, in the microwave drying furnace body, microwave low temperature heating furnace body, microwave low temperature holding furnace body and A microwave energy feeding system is provided on the microwave medium temperature heating furnace body, an electric heating system is provided on the electric heating high temperature heating furnace body and the electric heating high temperature holding furnace body, and the microwave energy feeding system is connected with a cooling water system, The push plate kiln body is equipped with a temperature measuring system, a heat preservation system, a refractory material, an exhaust system, an atmosphere system and a control system.

The airtight doors of the kiln inlet airtight chamber and the kiln outlet airtight chamber are designed with a double sealing structure: the first rubber sealing ring is used for air sealing, and the second sealing ring is used for microwave shielding to prevent microwave leakage when the airtight door is opened.

The kiln-in airtight chamber and the kiln-exit airtight chamber are respectively provided with a swing rod type travel switch mechanism: the rotating shaft of the swing rod passes through the furnace wall of the airtight chamber, part of which is inside the airtight chamber and part of which is outside the airtight chamber. The sliding support of the above-mentioned pendulum rotating shaft.

The refractory materials of the microwave low-temperature heating furnace body and the microwave low-temperature heat preservation furnace body are alkali-resistant refractory materials.

The refractory material of the microwave medium-temperature heating furnace body is 95# corundum ceramic furnace tube with a density ≥ 3.0g/cm ³ .

The refractory material of the electric heating high temperature heating furnace body adopts graphite furnace tube.

The slow-cooling furnace body adopts thinning insulation materials in the furnace body to increase the heat dissipation capacity of the insulation layer to slowly cool the materials. At the same time, in order to reduce the temperature rise on the surface of the furnace body, a water-cooled jacket is added to the surface of the furnace body.

The water-cooled furnace body is composed of a furnace cavity, a water jacket and a slide bar. The gap between the furnace cavity and the sagger is maintained at 10 mm, and the sagger slides on the slide bar. The material of the slide bar is Graphite, so that the heat of the sagger is quickly transferred to the furnace cavity, and is taken away by the cooling water.

The heat preservation system adopts alumina ceramic fiber board in the microwave heating section, which has good microwave penetration and low self-heating ability; conventional heat preservation materials are used in the electric heating section, and microwave shielding is set at the joint of the microwave heating section and the electric heating section to prevent Microwaves leak into conventional insulation to heat the insulation.

The vanadium nitride microwave and electric hybrid heating and firing pusher kiln adopting the above-mentioned technical scheme consists of an airtight chamber for entering the kiln, a microwave suppression furnace body, a microwave drying furnace body, a microwave low temperature heating furnace body, a microwave low temperature holding furnace body, and a microwave medium temperature furnace body. Heating furnace body, electric heating high temperature heating furnace body, electric heating high temperature holding furnace body, slow cooling furnace body, water cooling furnace body, kiln outlet airtight chamber, microwave energy feeding system, electric heating system, cooling water system, temperature measurement system, heat preservation System, refractory material, exhaust system, atmosphere system and control system. The airtight door for entering and exiting the airtight chamber of the kiln is designed with a double sealing structure: the rubber sealing ring is used for air sealing, and the other sealing ring is used for microwave shielding to prevent microwave leakage when the airtight door is opened. The airtight chamber of entering and exiting the kiln is equipped with a swing rod type travel switch mechanism: the rotating shaft of the swing rod passes through the furnace wall of the airtight chamber, part of which is in the airtight chamber and part of which is outside the airtight chamber, forming a radio frequency antenna and radiating microwaves to the outside. Graphite is used as the sliding support of the rotating shaft of the pendulum, so that it forms an equipotential body with the furnace body and does not radiate microwaves to the outside. The microwave suppression furnace body makes the microwave radiated by the microwave heating furnace body attenuated in the microwave suppression furnace body, effectively reducing the microwave radiation intensity of the airtight chamber. The microwave drying furnace body is designed according to the characteristics of vanadium nitride synthesis and firing raw materials and microwave coupling. The moisture contained in the raw material is fully volatilized and dried in this furnace section. The microwave energy fed into the microwave drying furnace is adapted to the production capacity. The drying temperature is controlled below 100°C, and the heating rate is 5°C/min. The drying temperature is controlled by turning on and off the microwave source. During the drying process of the microwave drying furnace, the weight loss rate of the material is fast, the weight loss is heavy, and the discharge port of the volatile matter from the furnace cavity is required to be large. In order to prevent microwave leakage from the exhaust port, the exhaust port with microwave shielding device is designed. The volatile matter in the microwave drying furnace body is alkaline during the drying process, which is highly corrosive to refractory materials. The furnace cavity is built with alkali-resistant refractory materials. The heating temperature of the microwave low-temperature heating furnace body is from 100°C to 600°C, including three heating sections: 100-200°C high-temperature drying stage, 200-400°C debinding stage, and 400-600°C reduction of high-valent vanadium carbon to low-priced vanadium heating stage. In the microwave low-temperature heating furnace body heating section, the 100-200°C high-temperature drying stage is used, and the heating rate of the 100-200°C high-temperature drying stage is 3°C/min. In the microwave low-temperature heating furnace body heating section, the heating rate is 5°C/min in the 200-400°C debinding stage, and in the 200-400°C high-temperature drying stage. In the heating section of the microwave low-temperature heating furnace body, the high-valent vanadium carbon is reduced to low-valent vanadium at 400-600°C, and the heating rate is 3°C/min during the high-temperature drying stage at 400-600°C. The heating temperature of the microwave low-temperature insulation furnace body is from 600 ° C to 600 ° C, and the temperature is kept for 10 minutes. The heating temperature of the microwave medium-temperature heating furnace body is from 600°C to 1300°C, including two heating sections: 600-900°C low-valent vanadium carbonization stage, and 900-1300°C low-valent vanadium carbonization and nitriding stage. In the heating section of the microwave medium-temperature heating furnace body, the low-valent vanadium carbonization stage is at 600-900°C, and the heating rate at the low-valent vanadium carbonization stage at 600-900°C is 5°C/min. In the heating section of the microwave medium-temperature heating furnace body, the 900-1300°C low-valent vanadium carbide nitriding stage, and the heating rate of the 600-1300°C low-valent vanadium carbide nitriding stage are 3°C/min. The heating temperature of the electric heating high-temperature heating furnace body is from 1300 to 1520°C, and the heating rate is 6°C/min. The slow-cooling furnace body adopts thinned insulation materials in the furnace body to increase the heat dissipation capacity of the insulation layer so that the materials can be cooled slowly. The microwave energy feeding system consists of a microwave power supply, a magnetron, a circulator and a water load. According to the load characteristics and temperature curve in the furnace cavity, the position of the microwave feeding port is designed to optimize the distribution of the microwave field in the furnace. The microwave energy feeding system can realize the online replacement of the magnetron. The electric heating system consists of silicon-molybdenum rods and rectifier transformers. The microwave is confined in the graphite furnace tube, and the silicon-molybdenum rod heating tube is installed outside the furnace tube. The cooling water system is composed of valves, pressure gauges, pipes, water flow switches, etc. It maintains the same pressure and flow of multi-point water supply, automatically controls the switch of the magnetron, and protects the magnetron to work under the protection of cooling water.

The thermal insulation system adopts alumina ceramic fiber board in the microwave heating section, which has good microwave penetration and low self-heating capacity. Conventional insulation materials are used in the electric heating section, and microwave shielding is set at the junction of the microwave heating section and the electric heating section to prevent microwave leakage In the conventional thermal insulation material, the thermal insulation material is heated.

The refractory material is made of alumina, silicon oxide and silicon carbide mixed and fired in a certain proportion, including the furnace tube and the sagger. Its low-temperature dielectric constant is between 15 and 25. At low temperatures, the refractory material is used as an auxiliary heating material to absorb microwaves. Heat, so that the material quickly heats up. On the other hand, due to its low dielectric constant, the microwave can penetrate the sagger and heat the material with microwave radiation.

The exhaust system has a microwave shielding device to prevent microwave leakage from the exhaust port.

The atmosphere system adopts multi-point gas supply, adjusts the flow rate of each gas supply point, and controls the pressure curve of the kiln inner chamber atmosphere.

The control system adopts isolation technology to isolate the microwave power supply and the control power supply, and shield the microwave from interfering with the control system.

Microwave heating is a material preparation method that has developed rapidly in recent years. Microwave heating has direct bulk heating characteristics and non-thermal effect, which can activate the reactants and reduce the reaction temperature, especially avoiding the cold area formed by the carbon gasification process inside the material in the carbothermal reduction reaction under conventional heating conditions, and can quickly make the inside of the material Simultaneous heating with the outside; the material reacts thoroughly and uniformly, thus forming a single uniform phase. At the same time, industrial microwave ovens have simple equipment, a high degree of automation, and are easy to maintain; microwave heating has high efficiency and saves electricity by 30% to 70% compared with traditional methods, greatly reducing production costs.

In the synthesis and firing process of vanadium nitride, when the temperature reaches 1300°C, the metallization is serious, the microwave absorption energy is poor, and the utilization rate of microwave heating energy in the high temperature section is reduced. The use of microwave and electric hybrid heating can use carbon heat reduction at low temperatures, strong microwave absorption, rapid response, high efficiency and energy saving, and direct use of electric heating at high temperatures.

Microwave heating has the characteristics of immediacy, integrity, selectivity, high efficiency and safety. Compared with the traditional heating method, microwave heating can shorten the reaction time, simplify the process, and the comprehensive energy consumption is only 30-40% of the traditional electrothermal method. The synthesis mechanism of the microwave synthesis process is essentially different from the conventional process. Microwave heating can activate the reactants, reduce the activation energy of the reaction, and enhance the diffusion mechanism. Simultaneous heating can heat the inside and outside of the material at the same time, without thermal hysteresis, and avoids the formation of carbon gasification inside the material in the carbothermal reduction reaction under conventional heating conditions. cold area. The material reacts thoroughly and uniformly, resulting in a single homogeneous phase.

The utility model combines the advantages of microwave heating and electric heating: when the temperature is lower than 1300 DEG C, there are many volatiles in the synthesis and firing of vanadium nitride, which seriously damages refractory materials and heat preservation materials. Electric heating is used for slow temperature rise, long discharge time for volatile matter, and the exhaust system occupies a long kiln. Microwave heating can overcome the above shortcomings. The synthetic raw material of vanadium nitride contains carbon, which has good coupling performance with microwave, and the temperature rises quickly and volatilizes. The substance volatilizes quickly and the energy consumption is low. When the temperature is higher than 1300°C, the vanadium nitride metallizes and forms a conductor, which has poor coupling performance with microwaves, reduces the utilization rate of microwave energy, and consumes high energy. The use of electric heating in this temperature range is conducive to the uniformity, stability and stability of the temperature field. energy saving.

The utility model is a vanadium nitride microwave and electric mixed heating and firing pusher kiln with fast reaction speed, high quality of processing materials, high heating matching performance and high energy efficiency, which reduces the heat capacity and thermal inertia of the kiln and reduces the kiln temperature. The heating and cooling time of the furnace during use improves the service life of insulation materials and refractory materials.

Description of drawings

Fig. 1 is a front view of the structure of the utility model.

Fig. 2 is a top view of the structure of the utility model.

Figure 3 is a schematic diagram of the structure of the sealing device for entering and exiting the airtight chamber of the kiln.

Figure 4 is a schematic diagram of the structure of the pendulum-type travel switch mechanism for entering and exiting the airtight chamber of the kiln.

Fig. 5 is a schematic diagram of the structure of the microwave suppression furnace body device at the inlet end of the kiln.

Fig. 6 Schematic diagram of the structure of the microwave shielding device in the furnace.

Fig. 7 is a schematic structural diagram of the microwave shielding device at the exhaust port.

Figure 8 is a schematic diagram of the cooling water design principle.

Detailed ways

Below in conjunction with accompanying drawing, the utility model is described in further detail with regard to the specific embodiment.

Referring to Figure 1 and Figure 2, the pusher kiln body is sequentially connected with a kiln airtight chamber 1, a microwave suppression furnace body 2, a microwave drying furnace body 3, a microwave low-temperature heating furnace body 4, a microwave low-temperature holding furnace body 5, and a microwave Medium temperature heating furnace body 6, electric heating high temperature heating furnace body 7, electric heating high temperature holding furnace body 8, slow cooling furnace body 9, water cooling furnace body 10 and kiln airtight chamber 11, electric heating high temperature heating furnace body 7 and microwave medium temperature heating A microwave shielding device is provided at the joint of the furnace body 6, and a microwave energy feeding system 12 is provided on the microwave drying furnace body 3, the microwave low-temperature heating furnace body 4, the microwave low-temperature holding furnace body 5 and the microwave medium-temperature heating furnace body 6. The high temperature heating furnace body 7 and the electric heating high temperature heat preservation furnace body 8 are equipped with an electric heating system 13, the microwave energy feeding system 12 is connected with a cooling water system 14, and the push plate kiln body 21 is equipped with a temperature measuring system 15, a heat preservation system 16, a refractory Material 17, exhaust system 18, atmosphere system 19 and control system 20. The gaskets at the joints of each furnace body shield the microwaves at the joints and seal the air; microwave on-line detectors are installed at the entrance and exit of the kiln, and the microwave leakage exceeds the standard alarm; the power of the push plate kiln is driven by a hydraulic station.

The airtight doors of the kiln inlet airtight chamber 1 and the kiln outlet airtight chamber 11 are designed with a double sealing structure, see Figure 3, the first rubber sealing ring 22 is for air sealing, and the tenth sealing ring 23 is for microwave shielding to prevent the airtight door from opening. Microwave leakage.

The kiln-entry airtight chamber 1 and the kiln-exit airtight chamber 11 are respectively equipped with a swing rod travel switch mechanism, see Fig. 4, the swing rod rotation shaft 31 passes through the airtight chamber furnace wall 32, part of which is inside the airtight chamber, and part of which is outside the airtight chamber. A radio frequency antenna is formed to radiate microwaves to the outside. Graphite 33 is used as the sliding support of the swing rod rotating shaft 31, so that it forms an equipotential body with the furnace body and does not radiate microwaves to the outside.

Referring to Fig. 5 for the microwave suppression furnace body 2, a plurality of microwave suppression sheets 41 are welded in the furnace cavity, and the distance between the microwave suppression sheets 41 is L=λ/4+nλ/2mm (n=0,1,2,3...), λ is the wavelength of the microwave to be suppressed, so that the microwave radiated from the microwave heating furnace body is attenuated in the microwave suppression furnace body, effectively reducing the microwave radiation intensity of the airtight chamber.

The microwave drying furnace body 3 is designed according to the coupling characteristics of vanadium nitride synthesis and firing raw materials and microwaves. The moisture contained in the raw material is fully volatilized and dried in this furnace section.

The microwave energy fed into the microwave drying furnace body 3 is suitable for the production capacity, the drying temperature is controlled below 100°C, and the heating rate is 5°C/min. The drying temperature is controlled by turning on and off the microwave source.

The microwave drying furnace body 3 has a fast material weight loss rate during the drying process, and the material loss is heavy, and the discharge port for volatile matter to be discharged from the furnace cavity is required to be large. In order to prevent microwaves from leaking from the exhaust port, an exhaust port with a microwave shielding device is designed, as shown in Figure 7. Several microwave cut-off waveguides 51 are welded in the vent hole to shield microwave leakage.

The volatile matter of the microwave drying furnace body 3 is alkaline during the drying process, and is highly corrosive to refractory materials, so alkali-resistant refractory materials are used.

The heating temperature of microwave low-temperature heating furnace body 4 is from 100°C to 600°C, including three heating sections: 100-200°C high-temperature drying stage, 200-400°C debinding stage, and 400-600°C reduction of high-valent vanadium carbon to low-priced vanadium heating phase.

The heating rate of the microwave low-temperature heating furnace body 4 heating section 100-200°C high-temperature drying stage is 3°C/min.

The microwave low-temperature heating furnace body 4 is in the heating section 200-400°C debinding stage, and the heating rate is 5°C/min.

Microwave low-temperature heating furnace body 4 is in the heating section 400-600°C where high-valent vanadium carbon is reduced to low-valent vanadium, and the heating rate is 3°C/min.

The heating temperature of the microwave low-temperature insulation furnace body 5 is from 600°C to 600°C, and the temperature is kept for 10 minutes.

The heating temperature of microwave medium-temperature heating furnace body 6 is from 600°C to 1300°C, including two heating sections: 600-900°C low-valent vanadium carbonization stage, and 900-1300°C low-valent vanadium carbonization and nitriding stage.

The microwave medium-temperature heating furnace body 6 is in the 600-900°C low-valent vanadium carbonization stage in the heating section, and the heating rate is 5°C/min.

The microwave medium-temperature heating furnace body 6 is in the heating section 900-1300°C low-valent vanadium carbide nitriding stage, and the heating rate is 3°C/min.

The refractory material of microwave medium-temperature heating furnace body 6 is 95# corundum ceramic furnace tube with a density ≥ 3.0g/cm ³ .

The high-temperature heating furnace body 7 is electrically heated, the heating temperature is from 1300 to 1520° C., and the heating rate is 6° C./min.

Electric heating high-temperature heating furnace body 7, refractory material adopts graphite furnace tube.

A microwave shielding device is provided at the junction of the electrically heated high-temperature heating furnace body 7 and the microwave medium-temperature heating furnace body 6 , as shown in FIG. 6 .

The slow cooling body of furnace 9 adopts the insulation material in the body of the thinning furnace to increase the heat dissipation capacity of the insulation layer so that the material is slowly cooled to prevent the sharp cooling at high temperature from causing the sagger to crack. At the same time, in order to reduce the temperature rise on the surface of the furnace body, a water cooling jacket is added to the surface of the furnace body.

The water-cooled furnace body 10 is composed of a furnace cavity, a water jacket and a sliding bar. The gap between the furnace cavity and the sagger is maintained at 10 mm, and the sagger slides on the sliding bar. Cooling water away.

The microwave energy feeding system 12 is composed of a microwave power supply, a magnetron, a circulator and a water load. According to the load characteristics and temperature curve in the furnace cavity, the position of the microwave feeding port is designed to optimize the distribution of the microwave field in the furnace.

The microwave energy feeding system 12 can realize the online replacement of the magnetron.

Electric heating system 13 is made up of silicon-molybdenum rod and rectifier transformer. The microwave is confined in the graphite furnace tube, the silicon molybdenum rod heating tube is installed outside the furnace tube, and the graphite furnace tube shields the influence of the microwave on the silicon molybdenum rod heating element.

The cooling water system 14 is composed of valves, pressure gauges, pipes, water flow switches, etc., to maintain consistent multi-point water supply pressure and flow, automatically control the switch of the magnetron, and protect the magnetron to work under the condition of cooling water protection. See Figure 8. In order to maintain consistent multi-point water supply pressure and flow, the water inlet sequence is opposite to the water outlet sequence, that is, the first-in-last-out principle, and valves are installed on each inlet and outlet pipeline to facilitate online maintenance.

The heat preservation system 16 adopts alumina ceramic fiber board in the microwave heating section, which has good microwave penetration and low self-heating capacity. Conventional insulation materials are used in the electric heating section, and microwave shielding is provided at the junction of the microwave heating section and the electric heating section.

The refractory material 17 is formed by mixing and firing alumina, silicon oxide and silicon carbide in a certain proportion. Includes stove tube and sagger. Its low-temperature dielectric constant is between 15 and 25. At low temperatures, the refractory material acts as an auxiliary heating material to absorb microwave heat and heat up the material quickly. On the other hand, due to its low dielectric constant, the microwave can penetrate the sagger and heat the material with microwave radiation.

The exhaust system 18 has a microwave shielding device. Referring to FIG. 7 , several microwave cut-off waveguides 51 are welded in the exhaust hole to shield microwave leakage and prevent microwave leakage from the exhaust port.

The atmosphere system 19 adopts multi-point gas supply, adjusts the flow rate of each gas supply point, and controls the pressure curve of the kiln inner chamber atmosphere.

The control system 20 adopts isolation technology, and the microwave power supply and the control power supply are isolated by an isolation transformer to shield the microwave from interfering with the control system.

Claims (6)

1. A vanadium nitride microwave and electric mixed heating and firing pusher kiln, comprising a pusher kiln body, characterized in that: the pusher kiln body is sequentially connected with a kiln airtight chamber (1), Microwave suppression furnace body (2), microwave drying furnace body (3), microwave low temperature heating furnace body (4), microwave low temperature holding furnace body (5), microwave medium temperature heating furnace body (6), electric heating high temperature heating furnace body ( 7), electric heating high temperature heat preservation furnace body (8), slow cooling furnace body (9), water cooling furnace body (10) and kiln airtight chamber (11), the electric heating high temperature heating furnace body (7) and microwave A microwave shielding device is provided at the junction of the medium-temperature heating furnace body (6), and the microwave drying furnace body (3), the microwave low-temperature heating furnace body (4), the microwave low-temperature holding furnace body (5) and the microwave medium-temperature heating furnace body (6) is provided with a microwave energy feeding system (12), and an electric heating system (13) is provided on the electric heating high temperature heating furnace body (7) and the electric heating high temperature holding furnace body (8). The microwave energy feeding system (12) is connected with a cooling water system (14), and the pusher kiln body is equipped with a temperature measurement system (15), a heat preservation system (16), a refractory material (17), and an exhaust system (18) , atmosphere system (19) and control system (20). 2. The vanadium nitride microwave and electric hybrid heating and firing pusher kiln according to claim 1, characterized in that: the airtight doors of the kiln inlet airtight chamber (1) and the kiln outlet airtight chamber (11) It is designed as a double sealing structure: the first rubber sealing ring (22) performs air sealing, and the second sealing ring (23) performs microwave shielding to prevent microwave leakage when the airtight door is opened. 3. The vanadium nitride microwave and electric hybrid heating and firing pusher kiln according to claim 1 or 2, characterized in that: the kiln-in airtight chamber (1) and the kiln-out airtight chamber (11) are respectively Equipped with a swing rod type travel switch mechanism: the swing rod rotation shaft (31) passes through the furnace wall (32) of the airtight chamber, part of which is in the airtight chamber and part of which is outside the airtight chamber, and graphite (33) is used as the swing rod to rotate Sliding support for shaft (31). 4. The vanadium nitride microwave and electric hybrid heating and firing pusher kiln according to claim 1 or 2, characterized in that: the microwave low temperature heating furnace body (4), the microwave low temperature holding furnace body (5) The refractory material adopts alkali-resistant refractory material. 5. The vanadium nitride microwave and electric hybrid heating and firing pusher kiln according to claim 1 or 2, characterized in that: the refractory material of the microwave medium-temperature heating furnace body (6) adopts 95# corundum ceramic furnace Tube, density ≥ 3.0g/cm ³ . 6. The vanadium nitride microwave and electric hybrid heating and firing pusher kiln according to claim 1 or 2, characterized in that the refractory material of the electric heating high temperature heating furnace body (7) is graphite furnace tube. the

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