CN203187762U - Vacuum boiling electrodeposition device - Google Patents
Vacuum boiling electrodeposition device Download PDFInfo
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- CN203187762U CN203187762U CN 201320206292 CN201320206292U CN203187762U CN 203187762 U CN203187762 U CN 203187762U CN 201320206292 CN201320206292 CN 201320206292 CN 201320206292 U CN201320206292 U CN 201320206292U CN 203187762 U CN203187762 U CN 203187762U
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- 238000004070 electrodeposition Methods 0.000 title claims abstract description 44
- 238000009835 boiling Methods 0.000 title claims abstract description 28
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- 239000004800 polyvinyl chloride Substances 0.000 claims description 2
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- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
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Abstract
Description
技术领域 technical field
本实用新型涉及一种真空沸腾电沉积装置,属于电化学加工技术及设备领域。 The utility model relates to a vacuum boiling electrodeposition device, which belongs to the field of electrochemical processing technology and equipment.
背景技术 Background technique
电铸技术是一种精密特种加工方法,具有很高的复制精度和重复精度,已被成功应用于电子器件、微波器件、火箭发动机部件、电加工电极等的制造。但是电铸技术本身还存在着一些缺陷和局限性,如在电铸过程中,会有氢从阴极表面析出,并以气泡的形式滞留在阴极表面,阻碍金属沉积,造成铸件表面出现麻点、针孔等缺陷,使电铸层的物理、机械性能下降。另外,由于尖端放电效应的影响,电铸层表面易产生积瘤、应力等缺陷,造成电铸层均匀性差,整体沉积速度下降。这些问题的存在,严重阻碍了电铸工艺技术整体水平的提高及电铸技术的应用和发展。 Electroforming technology is a precision special processing method with high replication accuracy and repeatability. It has been successfully applied to the manufacture of electronic devices, microwave devices, rocket engine components, and electrical machining electrodes. However, there are still some defects and limitations in the electroforming technology itself. For example, during the electroforming process, hydrogen will be precipitated from the surface of the cathode and remain on the surface of the cathode in the form of bubbles, which hinders the deposition of metal and causes pitting on the surface of the casting. Defects such as pinholes degrade the physical and mechanical properties of the electroformed layer. In addition, due to the influence of the tip discharge effect, the surface of the electroformed layer is prone to defects such as buildup and stress, resulting in poor uniformity of the electroformed layer and a decrease in the overall deposition rate. The existence of these problems has seriously hindered the improvement of the overall level of electroforming technology and the application and development of electroforming technology.
围绕这些问题,国内外技术人员进行了长期的探索,提出了大量具有工程应用效果的解决方案。乌克兰的SHVAB(Mass transfer in fluidized beds of inert particles[J].Journal of Applied Electrochemistry, 2000,30:1285-1298)把惰性粒子引入电解液中,以利用电解液的流动带动惰性粒子在阴极面上形成碰撞、摩擦、扰动等效应,获得了传质效果显著增强、扩散层大幅度减薄和晶粒进一步细化的积极效果。专利号为CN 101871108 A的中国发明专利公开了一种“电解液真空沸腾式高速电沉积方法及装置”,该方法提出将沉积工艺置于真空环境中实施,可以快速排出气泡,减少针孔缺陷,防止有害氧化物生成,并获得了不错的效果。如果把惰性粒子加入上述真空沸腾式电沉积的电解液中,以利用电解液表面沸腾过程中的气泡爆破冲击、抽吸等作用,同样也能带动其中的惰性粒子形成碰撞、摩擦、扰动等效应,从而进一步提升电解液真空沸腾电沉积技术的工艺特性与质量。但是常规电沉积装置以及现有电解液真空沸腾电沉积装置均不能满足电解液中含有惰性粒子的使用要求。因此需要开发一种能适用于电解液中含有惰性粒子的真空表面沸腾电沉积装置。 Around these problems, technical personnel at home and abroad have conducted long-term explorations and proposed a large number of solutions with engineering application effects. Ukraine's SHVAB (Mass transfer in fluidized beds of inert particles[J].Journal of Applied Electrochemistry, 2000,30:1285-1298) introduces inert particles into the electrolyte to use the flow of the electrolyte to drive the inert particles on the cathode surface Effects such as collision, friction and disturbance are formed, and the positive effect of significantly enhanced mass transfer effect, greatly reduced diffusion layer and further refined grains has been obtained. The Chinese invention patent with the patent number CN 101871108 A discloses a "electrolyte vacuum boiling type high-speed electrodeposition method and device", which proposes that the deposition process be carried out in a vacuum environment, which can quickly discharge air bubbles and reduce pinhole defects , to prevent the formation of harmful oxides, and achieved good results. If the inert particles are added to the electrolytic solution of the above-mentioned vacuum boiling type electrodeposition, in order to utilize the effects of bubble explosion impact and suction during the surface boiling process of the electrolyte, it can also drive the inert particles to form collision, friction, disturbance and other effects. , so as to further improve the process characteristics and quality of the electrolyte vacuum boiling electrodeposition technology. However, neither the conventional electrodeposition device nor the existing electrolytic solution vacuum boiling electrodeposition device can meet the use requirement that the electrolyte solution contains inert particles. Therefore, it is necessary to develop a vacuum surface boiling electrodeposition device suitable for electrolytes containing inert particles.
发明内容 Contents of the invention
本实用新型目的在于为电解液中含有惰性粒子的电解液真空沸腾电沉积方法提供一种装置,以进一步增大沉积速度,提升电沉积层质量。 The purpose of the utility model is to provide a device for the vacuum boiling electrodeposition method of the electrolyte containing inert particles, so as to further increase the deposition speed and improve the quality of the electrodeposited layer.
为解决上述问题,本实用新型通过以下技术方案实现。 In order to solve the above problems, the utility model is realized through the following technical solutions.
一种真空沸腾电沉积装置,包括由阴极、阳极、电解液以及密闭电沉积槽组成的电沉积系统和由循环泵、可编程序编辑器PLC、流量调节阀、精细过滤器及初级过滤网组成的电解液循环过滤系统,并且所述电解液中含有不导电的惰性粒子,所述循环泵为双向变量泵。 A vacuum boiling electrodeposition device, including an electrodeposition system composed of a cathode, an anode, an electrolyte, and a closed electrodeposition tank, and composed of a circulation pump, a programmable editor PLC, a flow regulating valve, a fine filter, and a primary filter. The electrolyte circulation filter system, and the electrolyte contains non-conductive inert particles, and the circulation pump is a two-way variable pump.
所述电解液中的惰性粒子的密度与电解液密度相近,两者密度差不超过±5%。惰性粒子密度接近电解液密度,在电解液中呈悬浮状态,有利于惰性粒子的均匀分布。 The density of the inert particles in the electrolyte is similar to that of the electrolyte, and the difference between the two densities does not exceed ±5%. The density of the inert particles is close to that of the electrolyte, and they are suspended in the electrolyte, which is conducive to the uniform distribution of the inert particles.
所述电解液中的惰性粒子的粒径在0.5~1.2 mm之间。惰性粒子直径过小,则惰性粒子在电解液中分散不好;直径过大,则惰性粒子与阴极碰撞频率下降,对扩散层的扰动作用下降;当惰性粒子直径在0.5~1.2 mm之间时,惰性粒子在电解液中均匀分布,对扩散层扰动作用最好。 The particle size of the inert particles in the electrolyte is between 0.5 mm and 1.2 mm. If the diameter of the inert particles is too small, the inert particles will not be well dispersed in the electrolyte; if the diameter is too large, the collision frequency between the inert particles and the cathode will decrease, and the disturbance to the diffusion layer will decrease; , the inert particles are evenly distributed in the electrolyte, which has the best disturbance effect on the diffusion layer.
所述电解液中所含的惰性粒子在电解液中的体积含量为5%~10%。惰性粒子的体积含量过大,则会增大电阻,造成电力线畸变,影响沉积层质量;过小则惰性粒子与扩散层碰撞减少,扰动效果下降。 The volume content of the inert particles contained in the electrolyte is 5%-10%. If the volume content of the inert particles is too large, the resistance will be increased, causing distortion of the electric force line and affecting the quality of the deposition layer; if it is too small, the collision between the inert particles and the diffusion layer will be reduced, and the disturbance effect will be reduced.
所述电解液中的惰性粒子为有机玻璃微球、环氧树脂(无填料)颗粒、聚氯乙烯粒子等耐酸碱腐蚀的粒子状物质。 The inert particles in the electrolyte are organic glass microspheres, epoxy resin (no filler) particles, polyvinyl chloride particles and other acid and alkali corrosion resistant particulate matter.
所述初级过滤网孔径比电解液中惰性粒子粒径小50~100μm,由耐酸碱腐蚀的材质制备而成,如涤纶网、尼龙网、不锈钢网等,安装在密闭电沉积槽内侧壁并罩住进、出液口。这样可以有效的防止惰性粒子通过初级过滤网,进入循环泵,影响泵的正常工作。 The pore size of the primary filter is 50-100 μm smaller than that of the inert particles in the electrolyte, and it is made of acid and alkali corrosion-resistant materials, such as polyester mesh, nylon mesh, stainless steel mesh, etc., installed on the inner wall of the closed electrodeposition tank and Cover the inlet and outlet. This can effectively prevent inert particles from passing through the primary filter and entering the circulation pump, affecting the normal operation of the pump.
所述双向变量泵能在可编程序编辑器PLC编程控制下作周期性的正反向转动。由于循环泵周期性的正反转动,可以实现对两个初级过滤网的交替冲刷,减少进液口惰性粒子在初级过滤网上的吸附,防止堵塞。 The two-way variable pump can perform periodic forward and reverse rotation under the programming control of the programmable editor PLC. Due to the periodic forward and reverse rotation of the circulation pump, the alternate flushing of the two primary filter screens can be realized, reducing the adsorption of inert particles on the primary filter screen at the liquid inlet and preventing blockage.
本实用新型与现有技术相比,具有以下优点及突出效果。 Compared with the prior art, the utility model has the following advantages and outstanding effects.
1.提高了沉积速度。当阴极电解液真空沸腾时,伴随着阴极大量气泡逸出、膨胀、爆裂,由于气泡爆裂时所形成的冲击或抽吸作用,势必带动惰性粒子运动。一方面,由于惰性粒子的剧烈扰动使电解液浓度趋于均匀;另一方面,惰性粒子不断地做无规则运动,通过碰撞并摩擦扰动阴极面扩散层,大大减少了扩散层厚度,增大了扩散层内金属离子的浓度,加快了液相传质过程,提高了传质效率,进而增大了极限电流密度。 1. Increased deposition rate. When the catholyte is boiling in vacuum, a large number of bubbles escape, expand, and burst in the cathode, and the impact or suction formed when the bubbles burst will inevitably drive the movement of the inert particles. On the one hand, due to the violent disturbance of the inert particles, the concentration of the electrolyte tends to be uniform; on the other hand, the inert particles continue to move irregularly, and disturb the diffusion layer on the cathode surface through collision and friction, which greatly reduces the thickness of the diffusion layer and increases the The concentration of metal ions in the diffusion layer accelerates the liquid phase mass transfer process, improves the mass transfer efficiency, and then increases the limiting current density.
2.细化了晶粒,提高电沉积层质量。由于惰性粒子的碰撞、摩擦以及整平效果,可以扰动结晶过程,减少沉积缺陷,提高沉积层表面质量。 2. The crystal grains are refined, and the quality of the electrodeposited layer is improved. Due to the collision, friction and leveling effect of the inert particles, the crystallization process can be disturbed, the deposition defects can be reduced, and the surface quality of the deposited layer can be improved.
附图说明 Description of drawings
图1为本实用新型一种真空沸腾电沉积装置的一个具体实施例的结构示意图。 Fig. 1 is a structural schematic diagram of a specific embodiment of a vacuum boiling electrodeposition device of the present invention.
图中:1、阳极,2、密闭电沉积槽,3、初级过滤网,4、进液口,5、阴极,6、精细过滤器,7、流量调节阀,8、可编程控制器PLC,9、循环泵,10、精细过滤器,11、流量调节阀,12、扩散层,13、初级过滤网,14、出液口,15、气泡,16、惰性粒子,17、电解液。 In the figure: 1. Anode, 2. Sealed electrodeposition tank, 3. Primary filter, 4. Liquid inlet, 5. Cathode, 6. Fine filter, 7. Flow regulating valve, 8. Programmable controller PLC, 9. Circulation pump, 10. Fine filter, 11. Flow regulating valve, 12. Diffusion layer, 13. Primary filter, 14. Liquid outlet, 15. Air bubbles, 16. Inert particles, 17. Electrolyte. the
具体实施方式 Detailed ways
如附图1所示,下面以电沉积镍片的具体实例对本实用新型做进一步说明。具体操作步骤如下。
As shown in accompanying
(1)将阳极1、阴极5固定在电沉积槽2中,两者上下相对水平布置,相距35 mm,并分别连接电沉积电源正负极。
(1) Fix the
(2)向电沉积槽2中加入含有有机玻璃微球16的电解液17(其中电解液17中有机玻璃微球16的体积含量为8%,有机玻璃微球16的粒径为0.8 mm),然后将电沉积槽2密封。
(2) Add
(3)开启电解液循环系统及其他系统(图中未画出),待观察到阴极5表面电解液17达到稳定沸腾时,开启电沉积电源,进行电沉积。
(3) Turn on the electrolyte circulation system and other systems (not shown in the figure), and when it is observed that the
(4)打开可编程控制器PLC8控制双向变量泵9每隔5 min改变一次转向。
(4) Turn on the programmable controller PLC8 to control the two-way
(5)待镀层达到所要求得厚度,关闭电沉积电源及其他各系统,取出电沉积件并清洗、干燥。 (5) After the coating reaches the required thickness, turn off the electrodeposition power supply and other systems, take out the electrodeposition parts, clean and dry them.
Claims (9)
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