CN203117796U - Fluid mass flow controller - Google Patents
Fluid mass flow controller Download PDFInfo
- Publication number
- CN203117796U CN203117796U CN 201320123275 CN201320123275U CN203117796U CN 203117796 U CN203117796 U CN 203117796U CN 201320123275 CN201320123275 CN 201320123275 CN 201320123275 U CN201320123275 U CN 201320123275U CN 203117796 U CN203117796 U CN 203117796U
- Authority
- CN
- China
- Prior art keywords
- flow controller
- fluid
- mass flow
- module
- fluid mass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Landscapes
- Flow Control (AREA)
Abstract
The utility model provides a wireless fluid mass flow controller which comprises a valve block (6), a sensor (5), a solenoid valve (4), a control circuit and a wireless transceiving element (1). The wireless fluid mass flow controller has the advantages that the problems caused by cable communication between the fluid mass flow controller and external equipment are solved and the blank of technology application is filled.
Description
Technical field
The utility model relates to a kind of fluid mass flow controller, relates in particular to a kind of wireless type fluid mass flow controller.
Background technology
The fluid mass flow controller is widely used in fluid measurement and the control of industries such as semiconductor manufacturing, vacuum coating, analysis, chemical industry, environment.Be different from volumeter, its flow accuracy is not subjected to hydrodynamic pressure, ambient temperature effect, so be specially adapted to precision measurement and the control of the fluid flow in the process control.
The digital communication mode that traditional fluid mass flow controller adopts is communication cable, but there is following problem: at first, under the situation that needs move, wanting moving belt has the controller of cable very inconvenient, when placing on the rotary table when controller, the connection of cable will cause the obstacle of rotation; Secondly, the connection of cable itself is exactly a comparatively loaded down with trivial details process, and such as when needing in the use occasion to connect fast, the communication cable of required connection is often more than one, and this just needs the cost regular hour; Moreover traditional controller emphasis is being measured and is being controlled the fluid in the process control, and whether less focused data collection is convenient; At last, traditional controller can only be controlled setting near controller, can't carry out Long-distance Control by the internet.
Still there is not the fluid mass flow controller based on wireless communication technique in the market.
The utility model content
For solving the problems of the technologies described above, inventor of the present utility model has developed a kind of fluid mass flow controller that can realize wireless telecommunications with external unit.
The utility model specifically provides a kind of fluid mass flow controller, comprising:
Valve body, described valve body is provided with fluid inlet and fluid egress point;
Sensor, described sensor links to each other with described fluid inlet, is used for measuring the flow of incoming fluid import and being translated into electric signal;
Solenoid valve, described solenoid valve links to each other with described fluid egress point, is used for the flow that flows out fluid egress point is controlled;
Control circuit, described control circuit is used for reception from the described electric signal of described sensor and is converted to flow output signal, then described flow output signal and preset flow rate setting signal are compared, according to comparative result described solenoid valve is sent steering order, thereby make the flow that flows out described fluid egress point remain preset flow rate;
It is characterized in that, also comprise:
The wireless receiving and dispatching element, described wireless receiving and dispatching element is connected on the described control circuit, for receiving with wireless mode and launching with the control signal of coming and going between the control terminal.
In preferred implementation of the present utility model, described sensor is the combination of thermal sensor, pressure transducer, air velocity transducer or the sensor.In another preferred implementation of the present utility model, described wireless receiving and dispatching element comprises the combination of WIFI module, GPRS module, gsm module, CDMA module, HIFI module, infrared module, bluetooth module or above-mentioned module, in order to receive and to launch described control signal.In another preferred implementation of the present utility model, described wireless receiving and dispatching element receives by the module that writes the industrial-controlled general line agreement and launches described control signal, and described industrial-controlled general line agreement is Modbus Transmission Control Protocol, Profibus agreement or DeviceNet agreement.In another preferred implementation of the present utility model, described control circuit comprises signal conditioning circuit, central treatment element and power amplification circuit.In the further preferred implementation of the utility model, described signal conditioning circuit comprises gain circuitry and compensating circuit, and described power amplification circuit comprises valve-driving circuit.In another preferred implementation of the present utility model, described wireless type fluid mass flow controller is used for the mass rate of gas is controlled.
The utility model has solved between fluid mass flow controller and the external unit by cable and has carried out installation that communication brings and the inconvenience of use aspect, has satisfied and has in time gathered in the control procedure and the needs of record data, has filled up the blank of technology application.
Description of drawings
Fig. 1 is the perspective view of an embodiment of the wireless type fluid mass flow controller in expression the utility model.
Fig. 2 is the internal structure synoptic diagram of an embodiment of expression wireless type fluid mass flow controller described in the utility model.
Fig. 3 is the internal control circuit synoptic diagram of an embodiment of expression wireless type fluid mass flow controller described in the utility model.
Fig. 4 is the internal operation principle schematic of expression wireless type fluid mass flow controller described in the utility model.
Fig. 5 is the course of work synoptic diagram of expression wireless type fluid mass flow controller described in the utility model in air supply system.
Description of reference numerals
1 wireless receiving and dispatching element
2 controller housings
3 power interfaces (being positioned on the circuit board)
4 solenoid valves
5 sensors
6 valve bodies
7 fluid inlets
8 fluid egress points
9 laminar flow vent diverters
10 flow output signals
11 flow setting signals
12 power supplys
Embodiment
Below in conjunction with accompanying drawing illustrative embodiments of the present utility model is elaborated.For for simplicity, alleged " flow controller " i.e. " fluid mass flow controller " of the present utility model hereinafter.
The flow controller of example is provided with opening at controller housing 2 shown in Fig. 1, and the power interface 3 that is positioned on the internal circuit board can be connected with external power source by this opening.Wireless receiving and dispatching element 1 is fixed on the shell 2, is connected with internal circuit board by cable, and its effect is to carry out wireless telecommunications (that is, reception and emission are with the control signal of coming and going between the control terminal).
Comprise combination of WIFI, GPRS, GSM, CDMA, HIFI, infrared, bluetooth or above-mentioned communication modes etc. applicable to wireless communication mode of the present utility model.Those skilled in the art can select suitable communication module based on above-mentioned wireless communication mode according to ordinary skill general knowledge.As a preferred limiting examples, flow controller adopts WIFI as communication modes.As another preferred limiting examples, flow controller by writing the industrial-controlled general line agreement module and wireless control terminal between carry out the signal transmission, described industrial-controlled general line agreement is Modbus Transmission Control Protocol, Profibus agreement or DeviceNet agreement.Be understood that easily according to the utility model, insert the internet, make control terminal insert the internet by wired or wireless mode simultaneously with wireless mode by making flow controller itself, can realize by the internet flow controller being carried out Long-distance Control.
Fig. 2 has further provided the internal structure synoptic diagram of the flow controller of example shown in Figure 1, and its internal structure comprises solenoid valve 4, sensor 5 and valve body 6.Schematically show the annexation between wireless receiving and dispatching element 1 and the circuit board among Fig. 2.Those skilled in the art can select right sensors based on above-mentioned wireless communication mode according to ordinary skill general knowledge.As the sensor that uses in the utility model, its instantiation includes but not limited to the combination of thermal sensor, pressure transducer, air velocity transducer or the sensor.
Fig. 3 and Fig. 4 have described the operation logic that the utility model fluid flow is controlled in an exemplary fashion.Fluid enters valve body 6 from fluid inlet 7, and shunts by laminar flow vent diverter 9.The part of fluid is through sensor 5, and the electric signal that produces enters bridge diagram, gain circuitry, compensating circuit (gain circuitry and compensating circuit are referred to as signal conditioning circuit in Fig. 4) in turn, obtains flow output signal 10.Flow output signal 10 is sent to display module (not shown) in the mode of wireless telecommunications, and this display module can be arranged at the flow controller surface, also can be arranged on the control terminal.Simultaneously, flow output signal 10 and preset flow rate setting signal 11 are compared in comparison control circuit, then according to comparative result, send the steering order that makes flow increase, reduce or remain unchanged (corresponding to the CPU among Fig. 4, i.e. central treatment element).Above-mentioned steering order is operated solenoid valve 4 by valve-driving circuit (corresponding to the power amplification circuit among Fig. 4), thereby the fluid flow of the fluid egress point 8 of flowing through is consistent with preset flow rate as far as possible.
In preferred embodiment, flow controller adopts 24V DC power supply to power; And the 24V power supply is converted to the 3.3V power supply by insulating power supply, wireless communication line is powered.
Fig. 5 has described the course of work of the utility model in air supply system in an exemplary fashion.One or more flow controllers and control terminal are connected into cordless communication network in the mode of wireless telecommunications separately, according to previously described internal work principle, with preset flow rate gas are sent into and to be treated air feed equipment.The utility model has been realized the wireless telecommunications between flow controller and the control terminal, and described control terminal can be but be not limited to iPad, smart mobile phone, notebook computer, desktop computer or those skilled in the art is the control terminal of the special exploitation of flow controller of the present utility model according to ordinary skill general knowledge.As mentioned before, flow controller can be sent to control terminal with flow output signal 10, and shows at the optional display module that arranges; Simultaneously, flow controller receives the flow setting signal 11 from control terminal, by the control of comparison control circuit realization to solenoid valve 4, thereby the fluid flow of the fluid egress point 8 of flowing through is consistent as far as possible with preset flow rate.
Flow controller described in the utility model can be used for the flow of all kinds of fluids is controlled, and described fluid can be gas and liquid.Those skilled in the art can select suitable components to be used for flow control at the flow morphology of controlling according to ordinary skill general knowledge.
Claims (7)
1. fluid mass flow controller comprises:
Valve body (6), described valve body (6) are provided with fluid inlet (7) and fluid egress point (8);
Sensor (5), described sensor (5) links to each other with described fluid inlet (7), is used for measuring the flow of incoming fluid import (7) and being translated into electric signal;
Solenoid valve (4), described solenoid valve (4) links to each other with described fluid egress point (8), is used for the flow that flows out fluid egress point (8) is controlled;
Control circuit, described control circuit is used for reception from the described electric signal of described sensor (5) and is converted to flow output signal (10), then described flow output signal (10) and preset flow rate setting signal (11) are compared, according to comparative result described solenoid valve (4) is sent steering order, thereby make the flow that flows out described fluid egress point (8) remain preset flow rate;
It is characterized in that, also comprise:
Wireless receiving and dispatching element (1), described wireless receiving and dispatching element (1) is connected on the described control circuit, for receiving with wireless mode and launching with the control signal of coming and going between the control terminal.
2. fluid mass flow controller as claimed in claim 1 is characterized in that, described sensor (5) is the combination of thermal sensor, pressure transducer, air velocity transducer or the sensor.
3. fluid mass flow controller as claimed in claim 1, it is characterized in that, described wireless receiving and dispatching element (1) comprises the combination of WIFI module, GPRS module, gsm module, CDMA module, HIFI module, infrared module, bluetooth module or above-mentioned module, in order to receive and to launch described control signal.
4. fluid mass flow controller as claimed in claim 3, it is characterized in that, described wireless receiving and dispatching element (1) receives by the module that writes the industrial-controlled general line agreement and launches described control signal, and described industrial-controlled general line agreement is Modbus Transmission Control Protocol, Profibus agreement or DeviceNet agreement.
5. fluid mass flow controller as claimed in claim 1 is characterized in that, described control circuit comprises signal conditioning circuit, central treatment element and power amplification circuit.
6. fluid mass flow controller as claimed in claim 5 is characterized in that, described signal conditioning circuit comprises gain circuitry and compensating circuit, and described power amplification circuit comprises valve-driving circuit.
7. as each described fluid mass flow controller among the claim 1-6, it is characterized in that described fluid mass flow controller is used for the mass rate of gas is controlled.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320123275 CN203117796U (en) | 2013-03-18 | 2013-03-18 | Fluid mass flow controller |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320123275 CN203117796U (en) | 2013-03-18 | 2013-03-18 | Fluid mass flow controller |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203117796U true CN203117796U (en) | 2013-08-07 |
Family
ID=48898125
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320123275 Expired - Lifetime CN203117796U (en) | 2013-03-18 | 2013-03-18 | Fluid mass flow controller |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203117796U (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104076830A (en) * | 2014-06-12 | 2014-10-01 | 北京七星华创电子股份有限公司 | Mass flow control device, system and method used for integrated gas delivery system |
| CN104407630A (en) * | 2014-11-19 | 2015-03-11 | 江苏天泽环保科技有限公司 | Control method of fluid flow control valve based on sensor network |
| US10883865B2 (en) | 2018-09-19 | 2021-01-05 | Swagelok Company | Flow restricting fluid component |
| US10890474B2 (en) | 2018-09-18 | 2021-01-12 | Swagelok Company | Fluid monitoring module arrangements |
| CN114459852A (en) * | 2021-12-29 | 2022-05-10 | 杭州电子科技大学 | Automatic generation and acquisition system and method of mixed gas based on Modbus |
| USD1043392S1 (en) | 2022-11-30 | 2024-09-24 | Swagelok Company | Flow monitoring device |
-
2013
- 2013-03-18 CN CN 201320123275 patent/CN203117796U/en not_active Expired - Lifetime
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104076830A (en) * | 2014-06-12 | 2014-10-01 | 北京七星华创电子股份有限公司 | Mass flow control device, system and method used for integrated gas delivery system |
| CN104407630A (en) * | 2014-11-19 | 2015-03-11 | 江苏天泽环保科技有限公司 | Control method of fluid flow control valve based on sensor network |
| CN104407630B (en) * | 2014-11-19 | 2017-09-22 | 江苏天泽环保科技有限公司 | A kind of control method of the fluid flow control valve based on sensor network |
| US10890474B2 (en) | 2018-09-18 | 2021-01-12 | Swagelok Company | Fluid monitoring module arrangements |
| US11781894B2 (en) | 2018-09-18 | 2023-10-10 | Swagelok Company | Fluid monitoring module arrangements |
| US10883865B2 (en) | 2018-09-19 | 2021-01-05 | Swagelok Company | Flow restricting fluid component |
| CN114459852A (en) * | 2021-12-29 | 2022-05-10 | 杭州电子科技大学 | Automatic generation and acquisition system and method of mixed gas based on Modbus |
| CN114459852B (en) * | 2021-12-29 | 2024-05-17 | 杭州电子科技大学 | Modbus-based mixed gas automatic generation and collection system and method |
| USD1043392S1 (en) | 2022-11-30 | 2024-09-24 | Swagelok Company | Flow monitoring device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN203117796U (en) | Fluid mass flow controller | |
| JP5255698B2 (en) | Wireless adapter for field devices with variable voltage drop | |
| CN105446303B (en) | With the industrial field device for reducing power consumption | |
| CN203519254U (en) | detection device and system of pressure sensor | |
| CN104568308A (en) | Detection device, method and system of pressure sensor | |
| CN103274352A (en) | MEMS module and control system based on same | |
| US11588511B2 (en) | Plug-in radio module for automation engineering | |
| CN105629828B (en) | Multi-protocols isolated form digital signal driving source | |
| TW200412010A (en) | Embedded internet integrated chip controlled valve actuator | |
| EP3646433B1 (en) | Field device charging power regulation | |
| CN203537414U (en) | Communication protocol conversion device based on embedded multi micro-control units | |
| CN109067421A (en) | Vibrating sensor with WIFI interface | |
| CN108282581A (en) | A kind of ultrasonic flowmeter parameter setting module based on Bluetooth communication | |
| CN101825495A (en) | Temperature multipoint monitoring system based on Bluetooth | |
| US20140295356A1 (en) | In situ flue gas analyzer with improved process communication | |
| CN201904810U (en) | Field bus protocol converter based on wireless technology | |
| CN108391256A (en) | A kind of low-power consumption bluetooth terminal based on NB-IoT technologies | |
| CN101252493A (en) | DeviceNet on site bus digital-analogy I/O communication apparatus based on non-standard wireless radio frequency technique | |
| CN206517440U (en) | A kind of wireless adapter of sensor | |
| CN217522962U (en) | Field devices and low-power wireless communication modules for loop-powered field devices | |
| CN201732304U (en) | Bluetooth technology based multi-point temperature monitoring system | |
| CN208094652U (en) | A kind of ultrasonic flowmeter parameter setting module based on Bluetooth communication | |
| CN201860337U (en) | Configurable remote I/O communication module | |
| CN203255964U (en) | MEMS (Micro Electro Mechanical Systems) module and control system based on same | |
| CN103528637A (en) | Liquid level sensing system chip |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: No. 23 and 25, No. 40, Beiyuan Road, Chaoyang District, Beijing 100012 Patentee after: Houlibo precision instrument (Beijing) Co.,Ltd. Address before: 100012 No. 40 Beiyuan Road, Beijing, Chaoyang District Patentee before: BEIJING HORIBA METRON INSTRUMENTS Co.,Ltd. |
|
| CP03 | Change of name, title or address | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130807 |
|
| CX01 | Expiry of patent term |