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CN203057505U - Piezoelectric Ceramic Array Thin Film - Google Patents

Piezoelectric Ceramic Array Thin Film Download PDF

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Publication number
CN203057505U
CN203057505U CN201220686571.1U CN201220686571U CN203057505U CN 203057505 U CN203057505 U CN 203057505U CN 201220686571 U CN201220686571 U CN 201220686571U CN 203057505 U CN203057505 U CN 203057505U
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piezoelectric ceramic
piezoelectric
ceramic array
piezoelectric vibration
film according
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王超
张丽宏
李刚
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AAC Technologies Holdings Changzhou Co Ltd
AAC Technologies Holdings Nanjing Co Ltd
AAC Technologies Pte Ltd
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AAC Acoustic Technologies Shenzhen Co Ltd
ACC Acoustic Technologies Shenzhen Co Ltd
AAC Acoustic Technologies Changzhou Co Ltd
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Abstract

The utility model provides a piezoelectric ceramic array film, comprising a base material and multiple vibration units. The multiple vibration units are arranged on the base material in a mutually independent manner; and each vibration unit comprises a piezoelectric ceramic layer and at least one pair of electrode layers, wherein the piezoelectric ceramic layer is arranged between the at least one pair of electrode layers. The piezoelectric ceramic array film of the utility model employs the mutually independent piezoelectric vibration units to realize diversified control modes; and can realize complex functions such as providing complex feedback signals and demodulating sound signals which can be heard by the ears.

Description

压电陶瓷阵列薄膜Piezoelectric Ceramic Array Thin Film

技术领域technical field

本实用新型涉及一种控制模式多样化的的压电陶瓷阵列薄膜。The utility model relates to a piezoelectric ceramic array film with diversified control modes.

背景技术Background technique

现有压电陶瓷阵列薄膜的振动层中的陶瓷层是一大张完整的陶瓷片,只是其上的电极层被分割成了多个小块,但电极层的各个小块仍然相互连接,在利用逆压电效应时,整张压电陶瓷阵列薄膜只能接收一个输入信号,同时也只有一个振动状态,无法实现复杂的功能,无法提供更好的触觉体验。在利用压电效应时,无论按压压电陶瓷阵列薄膜的哪个位置都只有一个输出信号,因此只能提供非常简单的反馈信号。The ceramic layer in the vibrating layer of the existing piezoelectric ceramic array film is a large complete ceramic sheet, but the electrode layer on it is divided into multiple small pieces, but each small piece of the electrode layer is still connected to each other. When the inverse piezoelectric effect is used, the entire piezoelectric ceramic array film can only receive one input signal and only one vibration state, which cannot realize complex functions and provide a better tactile experience. When using the piezoelectric effect, no matter where the piezoelectric ceramic array film is pressed, there is only one output signal, so it can only provide a very simple feedback signal.

由于陶瓷层是一大张完整的陶瓷片,在输入超声信号时难以形成多个边界固定的小单元,因此难以在空气中产生非线性效应,无法解调出人耳可听的声音信号。Since the ceramic layer is a large and complete ceramic sheet, it is difficult to form multiple small units with fixed boundaries when the ultrasonic signal is input, so it is difficult to generate nonlinear effects in the air, and it is impossible to demodulate sound signals audible to the human ear.

实用新型内容Utility model content

本实用新型主要解决的技术问题是现有压电陶瓷阵列薄膜无法实现复杂的功能、无法提供复杂的反馈信号和无法解调出人耳可听的声音信号。The technical problem mainly solved by the utility model is that the existing piezoelectric ceramic array film cannot realize complex functions, cannot provide complex feedback signals, and cannot demodulate sound signals audible to human ears.

为了解决上述技术问题,本实用新型实施例公开了一种压电陶瓷阵列薄膜,所述压电陶瓷阵列薄膜包括基材和多个压电振动单元,所述多个压电振动单元相互独立的设置在所述基材上,每个所述压电振动单元包括压电陶瓷层和至少一对电极层,所述压电陶瓷层夹设在所述至少一对电极层之间。In order to solve the above technical problems, the embodiment of the utility model discloses a piezoelectric ceramic array film, the piezoelectric ceramic array film includes a base material and a plurality of piezoelectric vibration units, and the plurality of piezoelectric vibration units are independent of each other Arranged on the substrate, each of the piezoelectric vibration units includes a piezoelectric ceramic layer and at least one pair of electrode layers, and the piezoelectric ceramic layer is sandwiched between the at least one pair of electrode layers.

在本实用新型的一较佳实施例中,每个所述压电振动单元在同一时间接收的驱动信号相同或者相异。In a preferred embodiment of the present invention, the driving signals received by each of the piezoelectric vibration units at the same time are the same or different.

在本实用新型的一较佳实施例中,所述压电陶瓷阵列薄膜包括保护层,所述压电振动单元位于所述基材和所述保护层之间。In a preferred embodiment of the present invention, the piezoelectric ceramic array film includes a protective layer, and the piezoelectric vibration unit is located between the substrate and the protective layer.

在本实用新型的一较佳实施例中,所述基材和所述保护层均为韧性材料。In a preferred embodiment of the present invention, both the base material and the protective layer are tough materials.

在本实用新型的一较佳实施例中,所述压电陶瓷阵列薄膜包括填充介质,所述填充介质位于所述基材和所述保护层之间。In a preferred embodiment of the present invention, the piezoelectric ceramic array film includes a filling medium, and the filling medium is located between the base material and the protective layer.

在本实用新型的一较佳实施例中,每个所述压电振动单元包括驱动信号线和焊点,所述焊点与所述电极层焊接,所述驱动信号线与所述焊点连接。In a preferred embodiment of the present invention, each piezoelectric vibration unit includes a driving signal line and a welding point, the welding point is welded to the electrode layer, and the driving signal line is connected to the welding point .

在本实用新型的一较佳实施例中,所述多个压电振动单元在所述基材表面呈阵列分布。In a preferred embodiment of the present invention, the plurality of piezoelectric vibration units are distributed in an array on the surface of the substrate.

在本实用新型的一较佳实施例中,每个所述压电振动单元的面积小于等于0.25平方厘米。In a preferred embodiment of the present invention, the area of each piezoelectric vibration unit is less than or equal to 0.25 square centimeters.

在本实用新型的一较佳实施例中,所述压电振动单元为矩形、圆形、三角形或者梯形。In a preferred embodiment of the present utility model, the piezoelectric vibration unit is rectangular, circular, triangular or trapezoidal.

在本实用新型的一较佳实施例中,所述压电陶瓷阵列薄膜的厚度大于等于1毫米。In a preferred embodiment of the present invention, the thickness of the piezoelectric ceramic array film is greater than or equal to 1 mm.

相较于现有技术,本实用新型的所述压电陶瓷阵列薄膜采用相互独立的压电振动单元,可以实现多样化的控制模式,其可以实现复杂的功能,能够提供复杂的反馈信号,还能解调出人耳可听的声音信号。Compared with the prior art, the piezoelectric ceramic array film of the present invention adopts independent piezoelectric vibration units, which can realize diversified control modes, realize complex functions, provide complex feedback signals, and It can demodulate the sound signal audible to the human ear.

附图说明Description of drawings

为了更清楚地说明本实用新型实施例中的技术方案,下面将对实施例描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本实用新型的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其它的附图,其中:In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings that need to be used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings in the following description are only some implementations of the present invention. For example, for those of ordinary skill in the art, other drawings can also be obtained based on these drawings without creative work, wherein:

图1是本实用新型压电陶瓷阵列薄膜一较佳实施例的立体结构示意图;Fig. 1 is the schematic diagram of the three-dimensional structure of a preferred embodiment of the piezoelectric ceramic array film of the present invention;

图2是图1所示压电陶瓷阵列薄膜的俯视示意图;Fig. 2 is a schematic top view of the piezoelectric ceramic array film shown in Fig. 1;

图3是图1所示压电陶瓷阵列薄膜的部分结构剖面示意图;3 is a schematic cross-sectional view of a partial structure of the piezoelectric ceramic array film shown in FIG. 1;

图4是图1所示压电陶瓷阵列薄膜的阵列分布举例;Fig. 4 is an example of the array distribution of the piezoelectric ceramic array film shown in Fig. 1;

图5是本实用新型压电陶瓷阵列薄膜的多个压电振动单元振动的示意图;Fig. 5 is a schematic diagram of the vibration of multiple piezoelectric vibration units of the piezoelectric ceramic array film of the present invention;

图6是本实用新型压电陶瓷阵列薄膜的凸起和凹陷控制效果示意图。Fig. 6 is a schematic diagram of the protrusion and depression control effect of the piezoelectric ceramic array film of the present invention.

具体实施方式Detailed ways

下面将对本实用新型实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅是本实用新型的一部分实施例,而不是全部的实施例。基于本实用新型中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其它实施例,都属于本实用新型保护的范围。The following will clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, not all of them. Based on the embodiments of the present utility model, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the scope of protection of the present utility model.

本实用新型实施例公开了一种压电陶瓷阵列薄膜,请参阅图1和图2,所述压电陶瓷阵列薄膜1的厚度大于等于1毫米,其包括基材10和多个压电振动单元11,所述多个压电振动单元11相互独立的设置在所述基材10上。其中,所述基材10为起承载作用的一层平面材料,其可以是柔软可弯折的材料(如柔性板),也可以是有一定硬度而不可弯折的材料(如金属板或硬塑料平面),还可以是由多层材料层叠而成。The embodiment of the utility model discloses a piezoelectric ceramic array film, please refer to Fig. 1 and Fig. 2, the thickness of the piezoelectric ceramic array film 1 is greater than or equal to 1 millimeter, and it includes a substrate 10 and a plurality of piezoelectric vibration units 11. The plurality of piezoelectric vibration units 11 are independently arranged on the base material 10 . Wherein, the base material 10 is a layer of plane material that acts as a load bearing, which can be a soft and bendable material (such as a flexible plate), or a material with a certain hardness that cannot be bent (such as a metal plate or a hard plate). plastic plane), and can also be formed by laminating multiple layers of materials.

所述多个压电振动单元11在所述基材10表面呈阵列分布,每个所述压电振动单元11的形状可以为矩形、圆形、三角形、梯形或者其它合适的多边形。每个所述压电振动单元11包括压电陶瓷层12和至少一对电极层13,所述压电陶瓷层12夹设在所述至少一对电极层13之间。其中,所述压电陶瓷层12可以由多层压电陶瓷组成,当然,所述压电陶瓷层12的材料并不局限于压电陶瓷,也可以是其它合适的压电材料。请参阅图3,每个所述压电振动单元11之间具有一定的物理独立性,相邻的压电振动单元11之间填充以空气或某种介质材料14以调整所述压电陶瓷阵列薄膜1的整体振动特性。在本实施例中,每个所述压电振动单元11的面积小于等于0.25平方厘米,也就是说,每个所述压电振动单元11的尺寸是如此之小,使得在每一次触摸过程中,使用者都可以同时触摸到多个所述压电振动单元11。The plurality of piezoelectric vibration units 11 are distributed in an array on the surface of the substrate 10 , and the shape of each piezoelectric vibration unit 11 may be a rectangle, a circle, a triangle, a trapezoid or other suitable polygons. Each of the piezoelectric vibration units 11 includes a piezoelectric ceramic layer 12 and at least one pair of electrode layers 13 , and the piezoelectric ceramic layer 12 is sandwiched between the at least one pair of electrode layers 13 . Wherein, the piezoelectric ceramic layer 12 may be composed of multilayer piezoelectric ceramics. Of course, the material of the piezoelectric ceramic layer 12 is not limited to piezoelectric ceramics, and may also be other suitable piezoelectric materials. Please refer to Fig. 3, each of the piezoelectric vibration units 11 has a certain physical independence, and the adjacent piezoelectric vibration units 11 are filled with air or some kind of dielectric material 14 to adjust the piezoelectric ceramic array Bulk vibration properties of membrane 1. In this embodiment, the area of each piezoelectric vibration unit 11 is less than or equal to 0.25 square centimeters, that is, the size of each piezoelectric vibration unit 11 is so small that during each touch , the user can touch multiple piezoelectric vibration units 11 at the same time.

进一步的,请参阅图3,所述压电陶瓷阵列薄膜1还可以包括保护层15和填充介质14,所述压电振动单元11和所述填充介质14均位于所述基材10和所述保护层15之间。所述保护层15和所述基材10可以都是韧性材料,两者的材料甚至可以相同。Further, please refer to FIG. 3 , the piezoelectric ceramic array film 1 may also include a protective layer 15 and a filling medium 14, and the piezoelectric vibration unit 11 and the filling medium 14 are located between the substrate 10 and the filling medium 14. Between the protective layers 15. Both the protective layer 15 and the base material 10 may be tough materials, and the materials of the two may even be the same.

每个所述压电振动单元11包括驱动信号线16和焊点17,所述焊点17与所述电极层13焊接,所述驱动信号线16与所述焊点17连接,每个所述压电振动单元11之间都相对独立,但是给其提供驱动信号的所述驱动信号线16可以以某种形式相互导通。Each of the piezoelectric vibration units 11 includes a driving signal line 16 and a welding point 17, the welding point 17 is welded to the electrode layer 13, the driving signal line 16 is connected to the welding point 17, and each of the The piezoelectric vibrating units 11 are relatively independent, but the driving signal lines 16 that provide driving signals to them can be connected to each other in some form.

所述驱动信号线16的驱动信号由一信号生成模块(图未示)提供,此驱动信号经过功放模块(图未示)来驱动所述压电振动单元11。其中,每个所述压电振动单元11在同一时间接收的驱动信号可以相同,也可以不同。当每个所述压电振动单元11在同一时间接收的驱动信号不同时,其根据各自的驱动信号产生各种不同的运动,从而可以提供丰富的控制模式,以下举例说明所述压电陶瓷阵列薄膜1的多种控制模式。The driving signal of the driving signal line 16 is provided by a signal generation module (not shown in the figure), and the driving signal drives the piezoelectric vibration unit 11 through a power amplifier module (not shown in the figure). Wherein, the driving signals received by each of the piezoelectric vibration units 11 at the same time may be the same or different. When each of the piezoelectric vibration units 11 receives different driving signals at the same time, they will generate various motions according to their respective driving signals, thereby providing abundant control modes. The piezoelectric ceramic array is illustrated below with an example Multiple control modes for film 1.

控制模式一:当输入的驱动信号为交流信号时,由于每个压电振动单元11在不断地做弯曲变化,就产生振动,且其振动的频率与输入信号的频率相关,振动的幅度由信号的幅度来决定,多个相邻压电振动单元11同时给相同交流信号也可增强振幅。这种控制模式可以用于生成虚拟触觉(Haptics)。Control Mode 1: When the input drive signal is an AC signal, since each piezoelectric vibration unit 11 is constantly bending and changing, it generates vibration, and the frequency of its vibration is related to the frequency of the input signal, and the amplitude of the vibration is determined by the signal The amplitude is determined by the amplitude, and multiple adjacent piezoelectric vibration units 11 can also increase the amplitude by giving the same AC signal at the same time. This control mode can be used to generate virtual haptics (Haptics).

控制模式二:当输入的驱动信号为直流信号时,假如压电振动单元11可以从自由状态双向弯曲,则可以实现在自由平面上稳定的凸起和凹陷效果;假如压电振动单元11只能单向弯曲,则只能稳定实现凸起和凹陷中的一种效果。增加直流信号的幅度可增加凸起和凹陷的相对位移。此外,多个相邻压电振动单元11同时给相同的直流信号也可增加相对位移。这种控制模式也可以用于生成虚拟触觉。Control Mode 2: When the input drive signal is a DC signal, if the piezoelectric vibration unit 11 can bend bidirectionally from a free state, then a stable protrusion and depression effect on a free plane can be achieved; if the piezoelectric vibration unit 11 can only With one-way bending, only one of the effects of protrusion and depression can be stably achieved. Increasing the magnitude of the DC signal increases the relative displacement of the bumps and dips. In addition, multiple adjacent piezoelectric vibration units 11 can also increase the relative displacement by giving the same DC signal at the same time. This mode of control can also be used to generate virtual haptics.

控制模式三:在因逆压电效应产生形变的同时,所述压电陶瓷阵列薄膜1还同时存在压电效应,在外来受力的作用下产生形变,进而产生电信号,不同位置的所述压电振动单元11产生信号就可反映不同位置受到的压力,并且同时可以采集多个点的压力信号(点数上限与所述压电振动单元11的个数相同),对产生的压力信号进行分析就可产生各种复杂的控制信号。这种控制模式可以用于触摸控制、手写控制和虚拟按键等功能。Control Mode 3: While the piezoelectric ceramic array film 1 is deformed due to the inverse piezoelectric effect, the piezoelectric ceramic array film 1 also has a piezoelectric effect, which deforms under the action of an external force, and then generates an electrical signal. The signal generated by the piezoelectric vibration unit 11 can reflect the pressure received by different positions, and at the same time, the pressure signal of multiple points can be collected (the upper limit of the number of points is the same as the number of the piezoelectric vibration unit 11), and the generated pressure signal can be analyzed Various complex control signals can be generated. This control mode can be used for functions such as touch control, handwriting control and virtual keys.

控制模式四:所述压电陶瓷阵列薄膜1可以等效为可辐射超声波的超声参量阵阵列,如果对输入的超声波信号进行信号处理再由所述压电陶瓷阵列薄膜1发出,由于超声波在空气中的非线性效应,可以解调出人耳可听的信号,并且由于超声的特性,此信号在空气中的传播有极强的指向性(私密性强)和极远的传播距离(低能量衰减)。Control Mode 4: The piezoelectric ceramic array film 1 can be equivalent to an ultrasonic parameter array that can radiate ultrasonic waves. If the input ultrasonic signal is processed and then sent out by the piezoelectric ceramic array film 1, since the ultrasonic The non-linear effect in the medium can demodulate the signal audible to the human ear, and due to the characteristics of ultrasound, the propagation of this signal in the air has extremely strong directivity (strong privacy) and extremely long propagation distance (low energy attenuation).

请参阅图4,当所述振动方式以图4方式进行阵列分布时,区域A和区域B各自包含至少一个所述压电振动单元,当区域A中的压电振动单元以第一频率进行振动的同时,区域B中的压电振动单元以第二频率进行振动,而除了区域A和区域B以外的区域C中的压电振动单元都静止。此时触摸区域A、区域B和区域C可以同时体验到不同的振动感受。Please refer to Fig. 4, when the vibration mode is distributed in an array in the manner shown in Fig. 4, the regions A and B each contain at least one piezoelectric vibration unit, and when the piezoelectric vibration unit in the region A vibrates at the first frequency At the same time, the piezoelectric vibration units in the area B vibrate at the second frequency, and the piezoelectric vibration units in the area C except for the area A and the area B are all stationary. At this time, touching area A, area B, and area C can experience different vibration sensations at the same time.

请参阅图5,图5中左侧部分为区域划分图,右侧部分为时间-振幅示意图,以压电振动单元为圆形为例,A'、B'、C'为三个半径依次增加的同心圆所围成的三个区域,A′中的压电振动单元输入信号为①,B′中的压电振动单元输入信号为②,C′中的压电振动单元输入信号为③。三个输入信号的幅度相同,但相位依次相差90°。在这种驱动方式下,A'、B'和C'共同形成波浪状振动模式。Please refer to Figure 5. The left part of Figure 5 is the area division diagram, and the right part is the time-amplitude schematic diagram. Taking the piezoelectric vibration unit as a circle as an example, A', B', and C' are three radii that increase in turn The input signal of the piezoelectric vibration unit in A' is ①, the input signal of the piezoelectric vibration unit in B' is ②, and the input signal of the piezoelectric vibration unit in C' is ③. The three input signals have the same amplitude but are sequentially out of phase by 90°. In this driving mode, A', B' and C' together form a wave-like vibration mode.

再请参阅图6,图6中左侧部分为压电振动单元排列示意图,右侧部分为时间-振幅示意图,再以压电振动单元为圆形为例,一部分压电振动单元A″被输入直流信号①',另一部分压电振动单元11B″被输入直流信号②'。A″从平衡位置偏移一定距离,B″从平衡位置以与A″反方向偏移一定距离。A″和B″都保持在各自的偏移位置不变,则所述压电陶瓷阵列薄膜1的表面就产生交错相间的凸起和凹陷。如果对凸起和凹陷的信号幅值、作用压电振动单元位置进行更复杂的处理,所感受到的感觉会产生多种不同的变化。Please refer to Fig. 6 again. The left part in Fig. 6 is a schematic diagram of the piezoelectric vibration unit arrangement, and the right part is a time-amplitude schematic diagram. Taking the piezoelectric vibration unit as a circle as an example, a part of the piezoelectric vibration unit A" is input DC signal ①', and another part of the piezoelectric vibration unit 11B" is input with DC signal ②'. A "displaces a certain distance from the equilibrium position, and B " displaces a certain distance from the equilibrium position in the opposite direction to A ". Both A " and B " remain at their respective offset positions, and the piezoelectric ceramic array film 1 produces alternating protrusions and depressions. If more complex processing is performed on the signal amplitudes of the protrusions and depressions and the position of the piezoelectric vibration unit, the sensations experienced will produce many different changes.

综上所述,本实用新型的所述压电陶瓷阵列薄膜采用相互独立的压电振动单元,可以实现多样化的控制模式,其可以实现复杂的功能,能够提供复杂的反馈信号,还能解调出人耳可听的声音信号。In summary, the piezoelectric ceramic array film of the present invention adopts independent piezoelectric vibration units, which can realize diversified control modes, realize complex functions, provide complex feedback signals, and solve Calls up an audible signal audible to the human ear.

以上所述仅为本实用新型的实施例,并非因此限制本实用新型的专利范围,凡是利用本实用新型说明书内容所作的等效结构或等效流程变换,或直接或间接运用在其它相关的技术领域,均同理包括在本实用新型的专利保护范围内。The above descriptions are only examples of the present utility model, and are not intended to limit the patent scope of the present utility model. Any equivalent structure or equivalent process transformation made by using the content of the utility model description, or directly or indirectly used in other related technologies Fields are all included in the scope of patent protection of the utility model in the same way.

Claims (10)

1.一种压电陶瓷阵列薄膜,其特征在于,包括基材和多个压电振动单元,所述多个压电振动单元相互独立的设置在所述基材上,每个所述压电振动单元包括压电陶瓷层和至少一对电极层,所述压电陶瓷层夹设在所述至少一对电极层之间。1. A piezoelectric ceramic array film, characterized in that it comprises a base material and a plurality of piezoelectric vibration units, the plurality of piezoelectric vibration units are independently arranged on the base material, each of the piezoelectric The vibration unit includes a piezoelectric ceramic layer and at least one pair of electrode layers, and the piezoelectric ceramic layer is interposed between the at least one pair of electrode layers. 2.根据权利要求1所述的压电陶瓷阵列薄膜,其特征在于,每个所述压电振动单元在同一时间接收的驱动信号相同或者相异。2 . The piezoelectric ceramic array film according to claim 1 , wherein the driving signals received by each of the piezoelectric vibration units at the same time are the same or different. 3.根据权利要求1所述的压电陶瓷阵列薄膜,其特征在于,所述压电陶瓷阵列薄膜包括保护层,所述压电振动单元位于所述基材和所述保护层之间。3 . The piezoelectric ceramic array film according to claim 1 , wherein the piezoelectric ceramic array film comprises a protective layer, and the piezoelectric vibration unit is located between the substrate and the protective layer. 4 . 4.根据权利要求3所述的压电陶瓷阵列薄膜,其特征在于,所述基材和所述保护层均为韧性材料。4 . The piezoelectric ceramic array thin film according to claim 3 , wherein both the substrate and the protective layer are tough materials. 5.根据权利要求3所述的压电陶瓷阵列薄膜,其特征在于,所述压电陶瓷阵列薄膜包括填充介质,所述填充介质位于所述基材和所述保护层之间。5 . The piezoelectric ceramic array thin film according to claim 3 , wherein the piezoelectric ceramic array thin film comprises a filling medium, and the filling medium is located between the base material and the protective layer. 6.根据权利要求1所述的压电陶瓷阵列薄膜,其特征在于,每个所述压电振动单元包括驱动信号线和焊点,所述焊点与所述电极层焊接,所述驱动信号线与所述焊点连接。6. The piezoelectric ceramic array film according to claim 1, wherein each piezoelectric vibration unit includes a driving signal line and a welding point, the welding point is welded to the electrode layer, and the driving signal Wires are connected to the pads. 7.根据权利要求1所述的压电陶瓷阵列薄膜,其特征在于,所述多个压电振动单元在所述基材表面呈阵列分布。7. The piezoelectric ceramic array film according to claim 1, wherein the plurality of piezoelectric vibration units are distributed in an array on the surface of the substrate. 8.根据权利要求1所述的压电陶瓷阵列薄膜,其特征在于,每个所述压电振动单元的面积小于等于0.25平方厘米。8 . The piezoelectric ceramic array film according to claim 1 , wherein the area of each piezoelectric vibration unit is less than or equal to 0.25 square centimeters. 9.根据权利要求1所述的压电陶瓷阵列薄膜,其特征在于,所述压电振动单元为矩形、圆形、三角形或者梯形。9 . The piezoelectric ceramic array thin film according to claim 1 , wherein the piezoelectric vibration unit is rectangular, circular, triangular or trapezoidal. 10.根据权利要求1所述的压电陶瓷阵列薄膜,其特征在于,所述压电陶瓷阵列薄膜的厚度大于等于1毫米。10. The piezoelectric ceramic array thin film according to claim 1, characterized in that the thickness of the piezoelectric ceramic array thin film is greater than or equal to 1 mm.
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US11650621B2 (en) * 2019-08-16 2023-05-16 Samsung Display Co., Ltd. Circuit board having sound generator and display device including the same
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