CN203027218U - Surface acoustic wave filter - Google Patents
Surface acoustic wave filter Download PDFInfo
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- CN203027218U CN203027218U CN 201320069533 CN201320069533U CN203027218U CN 203027218 U CN203027218 U CN 203027218U CN 201320069533 CN201320069533 CN 201320069533 CN 201320069533 U CN201320069533 U CN 201320069533U CN 203027218 U CN203027218 U CN 203027218U
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- acoustic wave
- surface acoustic
- interdigital transducer
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- 238000010897 surface acoustic wave method Methods 0.000 title claims abstract description 142
- 230000005611 electricity Effects 0.000 claims abstract description 3
- 239000000463 material Substances 0.000 claims description 16
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 239000010949 copper Substances 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 206010062717 Increased upper airway secretion Diseases 0.000 claims description 3
- 208000026435 phlegm Diseases 0.000 claims description 3
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 claims description 2
- JRBRVDCKNXZZGH-UHFFFAOYSA-N alumane;copper Chemical compound [AlH3].[Cu] JRBRVDCKNXZZGH-UHFFFAOYSA-N 0.000 claims description 2
- 239000004411 aluminium Substances 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 239000010931 gold Substances 0.000 claims description 2
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 claims description 2
- 239000010453 quartz Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 230000008859 change Effects 0.000 abstract description 2
- 239000002131 composite material Substances 0.000 description 5
- 238000012360 testing method Methods 0.000 description 5
- 229910016570 AlCu Inorganic materials 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
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- 238000004891 communication Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000018109 developmental process Effects 0.000 description 2
- 208000001491 myopia Diseases 0.000 description 2
- 230000004379 myopia Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000011056 performance test Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
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- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
The utility model discloses a surface acoustic wave filter, it includes a plurality of surface acoustic wave syntonizers, every surface acoustic wave syntonizer includes interdigital transducer and reflection bars, at least part surface acoustic wave syntonizer is high impedance surface acoustic wave syntonizer, the interdigital transducer of high impedance surface acoustic wave syntonizer is two that set up side by side, two interdigital transducers share two reflection bars, the output bus bar of first interdigital transducer is connected with the input bus bar electricity of second interdigital transducer, the input bus bar of first interdigital transducer and the output bus bar of second interdigital transducer are located same end; the two reflective gratings are located on the outer side of the two interdigital transducers. The utility model discloses under the same impedance, high impedance surface acoustic wave syntonizer has more and indicates the logarithm or shorter aperture, has weakened the electric current on every transducer finger for under the prerequisite that does not change surface acoustic wave filter electric property, improved surface acoustic wave filter's power bearing capacity by a wide margin.
Description
Technical field
The utility model relates to the improvement of Surface Acoustic Wave Filter technology, and particularly a kind of low-loss surface acoustic wave impedance element filter that has the high power holding capacity, works in radio frequency band belongs to the Surface Acoustic Wave Filter technical field.
Background technology
Surface Acoustic Wave Filter has that operating frequency is high, volume is little, be suitable for the characteristics such as large-scale production, is widely used in wireless communication field.Surface acoustic wave impedance element filter is produced on the piezoelectricity base material, and the main body that consists of surface acoustic wave impedance element filter is SAW (Surface Acoustic Wave) resonator.Existing SAW (Surface Acoustic Wave) resonator structure as shown in Figure 1, be made of the interdigital transducer of tape input busbar 1 and output busbar 2 and two reflecting gratings 4,5 that are positioned at interdigital transducer both sides, its input busbar 1 and output busbar 2 are positioned at interdigital transducer two ends.Signal is by input busbar 1 input interdigital transducer and by output busbar 2 output interdigital transducers; 3 is the interdigital transducer finger, and its live width is by the decision of Surface Acoustic Wave Filter operating frequency, and operating frequency is higher, and the finger live width is narrower.
Along with the development of the communication technology, Surface Acoustic Wave Filter is constantly towards future developments such as high frequency, low-loss, high power holding capacity.Because the operating frequency of Surface Acoustic Wave Filter and the finger live width of interdigital transducer are inverse ratio, the filter operating frequency is higher, interdigital transducer finger live width is thinner, this makes Surface Acoustic Wave Filter power bearing ability when high-frequency work reduce, and has limited the range of application of Surface Acoustic Wave Filter.
Application number is that " 99125838.X ", denomination of invention disclose a kind of impedance element membrane structure-borne noise surface wave filter that is comprised of conventional SAW (Surface Acoustic Wave) resonator structure for the Chinese invention patent of " Surface Acoustic Wave Filter ", but do not proposed the solution of Surface Acoustic Wave Filter high power holding capacity.
Summary of the invention
For the above-mentioned deficiency that power bearing ability reduces when the high-frequency work of Surface Acoustic Wave Filter in prior art, the purpose of this utility model is to provide a kind of high frequency, low-loss surface acoustic wave impedance element filter, this surface acoustic wave impedance element filter can under the prerequisite that guarantees the excellent electric property of filter, have higher power bearing ability.
To achieve these goals, the technical solution adopted in the utility model is such:
a kind of Surface Acoustic Wave Filter with high power holding capacity, this surface acoustic wave filter circuit structure is the impedance element circuit structure, it comprises some SAW (Surface Acoustic Wave) resonator, each SAW (Surface Acoustic Wave) resonator comprises tape input busbar and the interdigital transducer of output busbar and two reflecting gratings that are positioned at the interdigital transducer both sides, it is characterized in that: at least part of SAW (Surface Acoustic Wave) resonator is the high impedance SAW (Surface Acoustic Wave) resonator, the interdigital transducer of high impedance SAW (Surface Acoustic Wave) resonator is for referring to that logarithm is complete and two of being arranged side by side, two interdigital transducers share two reflecting gratings, the input busbar of the first interdigital transducer is connected with input port, the output busbar of the first interdigital transducer is electrically connected to the input busbar of the second interdigital transducer, the output busbar of the second interdigital transducer is connected with output port, the input busbar of the first interdigital transducer and the output busbar of the second interdigital transducer are positioned at same end, the output busbar of the first interdigital transducer and the input busbar of the second interdigital transducer are positioned at same end, two reflecting gratings are positioned at the outside of two interdigital transducers.
This Surface Acoustic Wave Filter is produced on the piezoelectricity base material, and the piezoelectricity base material is lithium niobate, lithium tantalate or quartz, perhaps releases voltage electricity base material by reducing phlegm and internal heat of above-mentioned material making.
The electrode film material that consists of this Surface Acoustic Wave Filter is one or more in the materials such as aluminium, aluminium copper, copper or gold, and described electrode film can be individual layer, can be also the multilayer that superposes up and down.
This Surface Acoustic Wave Filter is single-ended input/output structure, is perhaps the balance inputting and outputting circuit structure.
Compared to existing technology, the utlity model has following advantage:
1, the utility model is applied to the high impedance SAW (Surface Acoustic Wave) resonator in the making of Surface Acoustic Wave Filter, under identical impedance, the high impedance SAW (Surface Acoustic Wave) resonator is than conventional resonator structure, have more finger logarithm or shorter aperture, weakened the electric current on every transducer finger, make under the prerequisite that does not change the Surface Acoustic Wave Filter electrical property, significantly improved the power bearing ability of Surface Acoustic Wave Filter.
2, reduce phlegm and internal heat by employing and release the electric substrate material, can solve the static burn phenomenon that piezoelectric substrate is at high temperature produced by pyroelectric effect, further improve the power holding capacity of filter.
3, by adopting the Surface Acoustic Wave Filter structure of high power holding capacity, select copper, golden contour electrical conductivity materials, or use the combination electrode film that is formed by stacking up and down by Ti/AlCu/Ti/AlCu multi-layered electrode film, can further improve the power bearing ability of filter.
Description of drawings
Fig. 1-conventional SAW (Surface Acoustic Wave) resonator structure chart.
Fig. 2-the utility model high power holding capacity Surface Acoustic Wave Filter embodiment 1 structural representation.
Fig. 3-the utility model high impedance SAW (Surface Acoustic Wave) resonator structure chart.
Fig. 4-embodiment 1 median filter and conventional filter electric performance test be comparison diagram as a result.
Fig. 5-the utility model high power holding capacity Surface Acoustic Wave Filter embodiment 2 structural representations.
Embodiment
The utility model is described in further detail below in conjunction with accompanying drawing.
Referring to Fig. 2, the utlity model has the Surface Acoustic Wave Filter of high power holding capacity, its basic circuit structure is the impedance element circuit structure, consisting of main body is some SAW (Surface Acoustic Wave) resonator, and each SAW (Surface Acoustic Wave) resonator comprises tape input busbar and the interdigital transducer of output busbar and two reflecting gratings that are positioned at the interdigital transducer both sides.At least part of SAW (Surface Acoustic Wave) resonator of the utility model is the high impedance SAW (Surface Acoustic Wave) resonator, being that SAW (Surface Acoustic Wave) resonator can be all the high impedance SAW (Surface Acoustic Wave) resonator, can be partly also that high impedance SAW (Surface Acoustic Wave) resonator, part are the conventional structure SAW (Surface Acoustic Wave) resonator.high impedance SAW (Surface Acoustic Wave) resonator design feature is (referring to Fig. 3), can find out on scheming, the interdigital transducer of the utility model high impedance SAW (Surface Acoustic Wave) resonator is for referring to that logarithm is complete and two of being arranged side by side, two interdigital transducers share two reflecting gratings 18, 19, the input busbar 13 of the first interdigital transducer is connected with input port, the output busbar of the first interdigital transducer is electrically connected to the input busbar of the second interdigital transducer to form and shares busbar 15, the output busbar 14 of the second interdigital transducer is connected with output port, the input busbar 13 of the first interdigital transducer and the output busbar 14 of the second interdigital transducer are positioned at same end, the output busbar of the first interdigital transducer and the input busbar of the second interdigital transducer are positioned at same end.Therefore two interdigital transducer essence are the cascaded structure that is arranged side by side, consist of the composite fork finger transducer after series connection, the input busbar 13 of the first interdigital transducer is the input busbar of composite fork finger transducer, and the output busbar 14 of the second interdigital transducer is the output busbar of composite fork finger transducer.Two reflecting gratings 18,19 are positioned at the outside of two interdigital transducers that are arranged side by side, be that the other reflecting grating of first interdigital transducer is positioned at the end away from another interdigital transducer, the other reflecting grating of another interdigital transducer is positioned at the end away from first interdigital transducer.
Label 13,14,15 in Fig. 3 is the surface acoustic wave interdigital transducer busbar, wherein, label 13 is the output busbar for input busbar, label 14, label 15 is two busbars after interdigital transducer is electrically connected to side by side, and signal is by input busbar 13 input composite fork finger transducers and by output busbar 14 output surface acoustic wave composite fork finger transducers; 16 is the interdigital transducer finger, and also by the decision of Surface Acoustic Wave Filter operating frequency, operating frequency is higher for its live width, and the finger live width is narrower; 17 are adjacent two fingers with same phase.
The impedance of SAW (Surface Acoustic Wave) resonator and resonator refer to that logarithm N, finger-hole footpath W myopia is inverse relation.If the finger logarithm of conventional structure SAW (Surface Acoustic Wave) resonator is N, the finger-hole footpath is W, and its corresponding resistance value is Z.The total finger logarithm of this high impedance SAW (Surface Acoustic Wave) resonator is also N, and the finger-hole footpath is W, and it is equivalent to two and refers to that logarithms are N/2, and the aperture is the conventional structure SAW (Surface Acoustic Wave) resonator series connection of W, the impedance series connection that namely to be equivalent to two impedances be 2Z, and its total impedance is 4Z.Therefore, under identical finger logarithm and finger-hole footpath condition, the impedance myopia of high impedance SAW (Surface Acoustic Wave) resonator is four times of conventional structure SAW (Surface Acoustic Wave) resonator impedance.
When resonator during as impedance element filter a part of, for satisfying the impedance matching between resonator, and to make the input and output impedance of filter be 50 Ω, and the impedance of resonator is definite value often.Under identical impedance and finger-hole footpath condition, the finger logarithm of high impedance SAW (Surface Acoustic Wave) resonator is four times that the conventional structure SAW (Surface Acoustic Wave) resonator refers to logarithm.Refer to the increase of logarithm, make the current reduction that passes through on every finger, thereby improved the power bearing ability of SAW (Surface Acoustic Wave) device.
Fig. 2 is a kind of typical high power holding capacity surface acoustic wave filter circuit structure, and its six SAW (Surface Acoustic Wave) resonator S1, S2, S3, S4, P1, P2 are all the high impedance SAW (Surface Acoustic Wave) resonator, and S1, S2, S3, S4 connect successively, consists of series resonator; P1 is connected in parallel between S1, S2, and P2 is connected in parallel between S3, S4, and P1, P2 are parallel resonator; 6 is the input busbar of whole filter, and 7 is the output busbar of whole filter; Label 8,9,10 is the signal connecting line between resonator; 11,12 is parallel resonator ground connection busbar.
Fig. 4 is that operating frequency is 1268MHz, the frequency response test result comparison diagram of the filter that adopts high power holding capacity Surface Acoustic Wave Filter that the high impedance SAW (Surface Acoustic Wave) resonator forms and formed by conventional SAW (Surface Acoustic Wave) resonator, wherein, dotted line is the test result of high power holding capacity Surface Acoustic Wave Filter, and solid line is conventional Surface Acoustic Wave Filter test result.Can find from the contrast of test result, two kinds of filters have similar frequency response characteristic, show that high power holding capacity Surface Acoustic Wave Filter structure can not worsen performance of filter.
Through anti-power test, result shows, when the filter operating frequency was 1268MHz, the tolerance power of traditional Surface Acoustic Wave Filter structure was 10dBm, and the tolerance power of the utility model Surface Acoustic Wave Filter structure is more than 20dBm.By adjusting the filter electrode material, as the combination electrode film that adopts high conductivity material Cu or be formed by stacking up and down by Ti/AlCu/Ti/AlCu multi-layered electrode film, more than filter tolerance power can be brought up to 30dBm.
Fig. 5 is another kind of high power holding capacity Surface Acoustic Wave Filter typical structure schematic diagram, and its five SAW (Surface Acoustic Wave) resonator S1, S2, S3, P1, P2 are all the high impedance SAW (Surface Acoustic Wave) resonator, and S1, S2, S3 connect successively, consists of series resonator; P1 is connected in parallel between S1, S2, and P2 is connected in parallel between S2, S3, and P1, P2 are parallel resonator; 20 is the input busbar of whole filter, and 21 is the output busbar of whole filter; Label 22,23 is the signal connecting line between resonator; 24,25 is parallel resonator ground connection busbar.
Explanation is at last, above embodiment is only unrestricted in order to the technical solution of the utility model to be described, although with reference to preferred embodiment, the utility model is had been described in detail, those of ordinary skill in the art is to be understood that, can modify or be equal to replacement the technical solution of the utility model, and not breaking away from aim and the scope of technical solutions of the utility model, it all should be encompassed in the middle of claim scope of the present utility model.
Claims (4)
1. Surface Acoustic Wave Filter, this surface acoustic wave filter circuit structure is the impedance element circuit structure, it comprises some SAW (Surface Acoustic Wave) resonator, each SAW (Surface Acoustic Wave) resonator comprises tape input busbar and the interdigital transducer of output busbar and two reflecting gratings that are positioned at the interdigital transducer both sides, it is characterized in that: at least part of SAW (Surface Acoustic Wave) resonator is the high impedance SAW (Surface Acoustic Wave) resonator, the interdigital transducer of high impedance SAW (Surface Acoustic Wave) resonator is for referring to that logarithm is complete and two of being arranged side by side, two interdigital transducers share two reflecting gratings, the input busbar of the first interdigital transducer is connected with input port, the output busbar of the first interdigital transducer is electrically connected to the input busbar of the second interdigital transducer, the output busbar of the second interdigital transducer is connected with output port, the input busbar of the first interdigital transducer and the output busbar of the second interdigital transducer are positioned at same end, the output busbar of the first interdigital transducer and the input busbar of the second interdigital transducer are positioned at same end, two reflecting gratings are positioned at the outside of two interdigital transducers.
2. Surface Acoustic Wave Filter according to claim 1, it is characterized in that: this Surface Acoustic Wave Filter is produced on the piezoelectricity base material, and the piezoelectricity base material is lithium niobate, lithium tantalate or quartz, perhaps releases voltage electricity base material by reducing phlegm and internal heat of making of above-mentioned material.
3. Surface Acoustic Wave Filter according to claim 1, it is characterized in that: the electrode film material that consists of this Surface Acoustic Wave Filter is one or more in the materials such as aluminium, aluminium copper, copper or gold, and described electrode film is individual layer or the multilayer of stack up and down.
4. Surface Acoustic Wave Filter according to claim 1, it is characterized in that: this Surface Acoustic Wave Filter is single-ended input/output structure, is perhaps the balance inputting and outputting circuit structure.
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| CN 201320069533 CN203027218U (en) | 2013-02-06 | 2013-02-06 | Surface acoustic wave filter |
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| CN 201320069533 CN203027218U (en) | 2013-02-06 | 2013-02-06 | Surface acoustic wave filter |
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Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103078603A (en) * | 2013-02-06 | 2013-05-01 | 中国电子科技集团公司第二十六研究所 | Surface acoustic wave filter with high power bearing capacity |
| CN104467734A (en) * | 2014-11-07 | 2015-03-25 | 深圳华远微电科技有限公司 | Surface acoustic wave filter for GPS and BDS and miniaturization packaging technology of surface acoustic wave filter |
| CN104467735A (en) * | 2014-11-07 | 2015-03-25 | 深圳华远微电科技有限公司 | Impedance element type surface acoustic wave filter with high anti-static capacity |
| WO2016090851A1 (en) * | 2014-12-13 | 2016-06-16 | 中国电子科技集团公司第二十六研究所 | High-frequency surface-mounted acoustic surface transverse wave resonance filter having high out-of-band rejection |
| CN106877838A (en) * | 2017-01-16 | 2017-06-20 | 深圳华远微电科技有限公司 | SAW filter |
| CN106911317A (en) * | 2017-02-07 | 2017-06-30 | 深圳华远微电科技有限公司 | SAW resonator |
| CN107395154A (en) * | 2017-06-30 | 2017-11-24 | 扬州大学 | A kind of single-chip integration surface acoustic wave filtering unit |
| CN107404303A (en) * | 2016-04-25 | 2017-11-28 | 株式会社村田制作所 | Acoustic wave device |
| CN108768333A (en) * | 2018-05-30 | 2018-11-06 | 扬州大学 | Floating compound interdigital structure of one kind and preparation method thereof |
| CN111879853A (en) * | 2020-07-16 | 2020-11-03 | 中国科学院声学研究所 | Surface acoustic wave resonant detector of shear wave mode |
| CN112953439A (en) * | 2021-04-08 | 2021-06-11 | 江苏卓胜微电子股份有限公司 | Surface acoustic wave resonator and radio frequency filter |
| CN114421923A (en) * | 2022-01-11 | 2022-04-29 | 无锡市好达电子股份有限公司 | High-performance surface acoustic wave filter |
| CN116633312A (en) * | 2023-07-24 | 2023-08-22 | 常州承芯半导体有限公司 | Filter and method for forming filter |
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2013
- 2013-02-06 CN CN 201320069533 patent/CN203027218U/en not_active Expired - Lifetime
Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103078603B (en) * | 2013-02-06 | 2016-05-18 | 中国电子科技集团公司第二十六研究所 | Surface acoustic wave filter with high power bearing capacity |
| CN103078603A (en) * | 2013-02-06 | 2013-05-01 | 中国电子科技集团公司第二十六研究所 | Surface acoustic wave filter with high power bearing capacity |
| CN104467734A (en) * | 2014-11-07 | 2015-03-25 | 深圳华远微电科技有限公司 | Surface acoustic wave filter for GPS and BDS and miniaturization packaging technology of surface acoustic wave filter |
| CN104467735A (en) * | 2014-11-07 | 2015-03-25 | 深圳华远微电科技有限公司 | Impedance element type surface acoustic wave filter with high anti-static capacity |
| CN104467734B (en) * | 2014-11-07 | 2017-10-20 | 深圳华远微电科技有限公司 | GPS and BDS SAW filters and its small-sized encapsulated technique |
| CN104467735B (en) * | 2014-11-07 | 2018-07-20 | 深圳华远微电科技有限公司 | A kind of impedance element type SAW filter with strong antistatic effect |
| WO2016090851A1 (en) * | 2014-12-13 | 2016-06-16 | 中国电子科技集团公司第二十六研究所 | High-frequency surface-mounted acoustic surface transverse wave resonance filter having high out-of-band rejection |
| CN107404303B (en) * | 2016-04-25 | 2020-10-16 | 株式会社村田制作所 | Elastic wave device |
| CN107404303A (en) * | 2016-04-25 | 2017-11-28 | 株式会社村田制作所 | Acoustic wave device |
| CN106877838A (en) * | 2017-01-16 | 2017-06-20 | 深圳华远微电科技有限公司 | SAW filter |
| CN106911317A (en) * | 2017-02-07 | 2017-06-30 | 深圳华远微电科技有限公司 | SAW resonator |
| CN107395154A (en) * | 2017-06-30 | 2017-11-24 | 扬州大学 | A kind of single-chip integration surface acoustic wave filtering unit |
| CN107395154B (en) * | 2017-06-30 | 2020-06-02 | 扬州大学 | Monolithic integration surface acoustic wave filter assembly |
| CN108768333A (en) * | 2018-05-30 | 2018-11-06 | 扬州大学 | Floating compound interdigital structure of one kind and preparation method thereof |
| CN111879853A (en) * | 2020-07-16 | 2020-11-03 | 中国科学院声学研究所 | Surface acoustic wave resonant detector of shear wave mode |
| CN112953439A (en) * | 2021-04-08 | 2021-06-11 | 江苏卓胜微电子股份有限公司 | Surface acoustic wave resonator and radio frequency filter |
| CN114421923A (en) * | 2022-01-11 | 2022-04-29 | 无锡市好达电子股份有限公司 | High-performance surface acoustic wave filter |
| CN116633312A (en) * | 2023-07-24 | 2023-08-22 | 常州承芯半导体有限公司 | Filter and method for forming filter |
| CN116633312B (en) * | 2023-07-24 | 2023-10-24 | 常州承芯半导体有限公司 | Filter and method for forming filter |
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Effective date of registration: 20220609 Address after: No.23 Xiyong Avenue, Shapingba District, Chongqing 401332 Patentee after: CHINA ELECTRONICS TECHNOLOGY GROUP CORPORATION CHONGQING ACOUSTIC-OPTIC-ELECTRONIC CO.,LTD. Address before: 400060 Chongqing Nanping Nan'an District No. 14 Huayuan Road Patentee before: CHINA ELECTRONICS TECHNOLOGY GROUP CORPORATION NO.26 Research Institute |
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