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CN202975044U - High-reliability fiber bragg grating acceleration sensor with automatic temperature compensation function - Google Patents

High-reliability fiber bragg grating acceleration sensor with automatic temperature compensation function Download PDF

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CN202975044U
CN202975044U CN 201220745706 CN201220745706U CN202975044U CN 202975044 U CN202975044 U CN 202975044U CN 201220745706 CN201220745706 CN 201220745706 CN 201220745706 U CN201220745706 U CN 201220745706U CN 202975044 U CN202975044 U CN 202975044U
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fiber grating
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熊燕玲
钟少龙
盛立文
杨文龙
沈涛
李乔艺
梁欢
李守铎
王丽
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Harbin University of Science and Technology
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Abstract

具有自温补功能的高可靠光纤光栅加速度传感器,属于光纤传感技术领域。它解决了传统光纤光栅传感器灵敏度低,可靠性差的问题。它包括菱形梁、振动粱、质量块和光纤光栅,菱形梁包括菱形筒和四个方形梁;菱形筒的横截面为菱形;四个方形梁顺时针固定在该菱形筒的四个角对应的外侧壁上,且均在同一平面上;位于菱形筒两个锐角对应外侧壁的两个方形梁的上表面设置有U形凹槽;振动粱包括增敏凹槽、振动臂和固定座;固定座通过增敏凹槽与振动臂固接为一体;振动臂末端卡在质量块上表面的凹槽中;位于菱形筒两个钝角对应外侧壁的两个方形梁的末端固定在振动粱的增敏凹槽上,光纤光栅嵌入在菱形梁的凹槽内并延伸出该凹槽。适用于光纤传感技术领域。

Figure 201220745706

The invention relates to a highly reliable fiber grating acceleration sensor with self-warming compensation function, which belongs to the technical field of optical fiber sensing. It solves the problems of low sensitivity and poor reliability of traditional fiber grating sensors. It includes a rhomboid beam, a vibrating beam, a mass block and an optical fiber grating. The rhomboid beam includes a rhombus tube and four square beams; the cross section of the rhombus tube is rhombus; the four square beams are fixed clockwise on the four corners of the rhombus tube. On the outer wall, and all on the same plane; the upper surface of the two square beams located at the two acute angles of the rhombus corresponding to the outer wall is provided with a U-shaped groove; the vibrating beam includes a sensitivity-increasing groove, a vibrating arm and a fixed seat; The seat is fixedly connected with the vibrating arm through the sensitization groove; the end of the vibrating arm is stuck in the groove on the upper surface of the mass block; On the sensitive groove, the fiber grating is embedded in the groove of the diamond beam and extends out of the groove. It is suitable for the technical field of optical fiber sensing.

Figure 201220745706

Description

具有自温补功能的高可靠光纤光栅加速度传感器Highly Reliable Fiber Bragg Grating Acceleration Sensor with Self-warming Compensation Function

技术领域technical field

本实用新型涉及一种光纤光栅加速度传感器,属于光纤传感技术领域。The utility model relates to an optical fiber grating acceleration sensor, which belongs to the technical field of optical fiber sensing.

背景技术Background technique

目前,光纤布拉格光栅(Fiber Bragg Grating,FBG,简称光纤光栅)传感技术已经在国内外得到广泛应用,如桥梁、大坝、隧道、建筑等土木工程结构的温度和应力变形监测,滑坡、泥石流等地质灾害监测,开关柜、变压器、电缆、架空线等输变电设备在线测温,油罐、隧道等火灾自动报警,压力容器、起重机械等特种设备结构安全监测以及矿井结构安全监测等等。At present, fiber Bragg Grating (Fiber Bragg Grating, FBG, referred to as fiber grating) sensing technology has been widely used at home and abroad, such as temperature and stress deformation monitoring of civil engineering structures such as bridges, dams, tunnels, buildings, landslides, debris flows, etc. Geological disaster monitoring, online temperature measurement of switch cabinets, transformers, cables, overhead lines and other power transmission and transformation equipment, automatic fire alarms for oil tanks and tunnels, structural safety monitoring of special equipment such as pressure vessels and hoisting machinery, and mine structure safety monitoring, etc. wait.

振动的研究和测试是现代工业发展的一项基础,在科学技术、国民经济和国防领域有着广泛的应用。振动传感器所测量的振动信号可以通过振动加速度或振动幅度来表征,因此振动信号的检测有基于振动加速度的振动检测和基于振动幅度的振动检测的两种方案,而前者是主要的检测方案。根据振动信号物理检测方式的不同,又可以分为电检测式加速度传感器和光检测式加速度传感器。The research and testing of vibration is a basis for the development of modern industry, and has a wide range of applications in the fields of science and technology, national economy and national defense. The vibration signal measured by the vibration sensor can be characterized by vibration acceleration or vibration amplitude. Therefore, the detection of vibration signals has two schemes: vibration detection based on vibration acceleration and vibration detection based on vibration amplitude, and the former is the main detection scheme. According to the different physical detection methods of vibration signals, it can be divided into electric detection type acceleration sensor and optical detection type acceleration sensor.

电检测加速度传感器利用振动敏感机构感知振动加速度,振动敏感机构主要由敏感质量块、弹性元件和转换元件构成。电检测加速度传感器主要包括电磁感应式、电容式和压电式三种。在振动加速度的作用下,敏感质量块感知振动加速度而产生运动或应力变化,带动与之相连的转换元件如电磁线圈、电容极板运动或产生压电晶片的应力变化,电磁线圈在永磁体的磁场中运动切割磁力线而产生感生电压、电容极板的位置变化改变电容值的大小、压电晶片的应力变化产生的压电信号,从而通过电信号的变化感知振动信号。电检测加速度传感器的敏感器的电输出信号一般十分微弱,需要电信号检测单元中放大电路提供增益,因此电信号检测单元与振动敏感器通常必须封装在同一封装结构中构成加速度传感器,也就是说电信号检测单元与振动敏感器两者是不能分离的。电检测加速度传感器同时还必须自带电源或外部供电。电检测加速度传感器的特点是易受到电磁干扰、信号传输距离近、需要电源供电,因此限制电检测加速度传感器在一些场合如存在电磁干扰、现场供电困难、远距离传输的应用。The electric detection acceleration sensor uses the vibration sensitive mechanism to sense the vibration acceleration, and the vibration sensitive mechanism is mainly composed of a sensitive mass block, an elastic element and a conversion element. Electric detection acceleration sensors mainly include electromagnetic induction type, capacitive type and piezoelectric type. Under the action of vibration acceleration, the sensitive mass senses the vibration acceleration and produces motion or stress changes, which drives the conversion elements connected to it, such as electromagnetic coils, capacitor plates to move or produce stress changes in piezoelectric wafers. The electromagnetic coils in the permanent magnet The movement in the magnetic field cuts the magnetic force lines to generate induced voltage, the position change of the capacitor plate changes the capacitance value, and the piezoelectric signal is generated by the stress change of the piezoelectric chip, so that the vibration signal is perceived through the change of the electrical signal. The electrical output signal of the sensor of the electrical detection acceleration sensor is generally very weak, and the amplification circuit in the electrical signal detection unit is required to provide gain. Therefore, the electrical signal detection unit and the vibration sensor must usually be packaged in the same package structure to form an acceleration sensor. That is to say The electrical signal detection unit and the vibration sensor are inseparable. The electrical detection acceleration sensor must also have its own power supply or external power supply. The electrical detection acceleration sensor is characterized by being susceptible to electromagnetic interference, short signal transmission distance, and requiring power supply, which limits the application of the electrical detection acceleration sensor in some occasions such as the presence of electromagnetic interference, difficulty in on-site power supply, and long-distance transmission.

光检测式加速度传感器利用光信号检测物体的振动,包括非接触式和接触式两种主要形式。非接触式加速度传感器主要是利用光信号直接检测物体某部位表面的振动幅度(即位移)来感知振动,属于绝对振动测量,有光纤位移检测、激光三角法、激光器外腔振荡法等方法。非接触式加速度传感器还有一种方式是利用光信号检测物体某部位表面的振动速度导致的反射或散射光信号的多普勒频移来感知振动。接触式加速度传感器与振动物体固定连接,利用振动敏感机构感知物体振动加速度,振动敏感机构主要由敏感质量块、弹性元件和转换元件构成。由于光纤传感器具有体积小、重量轻、耐腐蚀、抗电磁干扰、适于易燃易爆环境,通常利用光纤来实现,称为光纤加速度传感器或光纤加速度计。光纤加速度传感器根据敏感原理可以分为相位调制型、波长调制型和光强调制型。相位调制型光纤加速度传感器主要利用多种方式将振动信号转化为光相位的变化,然后利用光纤干涉仪,如法布里-珀罗(F-P)干涉仪、迈克尔逊干涉仪、马赫-曾德尔(M-Z)干涉仪来检测相位的变化。这种光纤加速度传感器具有灵敏度高的优点,但光纤干涉仪结构复杂、存在稳定性问题,实用化较为困难,成本也较高。The light detection type acceleration sensor uses the light signal to detect the vibration of the object, including two main forms of non-contact type and contact type. The non-contact acceleration sensor mainly uses the optical signal to directly detect the vibration amplitude (ie displacement) of the surface of a certain part of the object to sense the vibration. It belongs to the absolute vibration measurement. There are methods such as optical fiber displacement detection, laser triangulation method, and laser external cavity oscillation method. Another way of the non-contact acceleration sensor is to use the optical signal to detect the Doppler frequency shift of the reflected or scattered light signal caused by the vibration velocity of the surface of a certain part of the object to sense the vibration. The contact acceleration sensor is fixedly connected with the vibrating object, and uses the vibration sensitive mechanism to sense the vibration acceleration of the object. The vibration sensitive mechanism is mainly composed of a sensitive mass block, an elastic element and a conversion element. Because the fiber optic sensor has small size, light weight, corrosion resistance, anti-electromagnetic interference, and is suitable for flammable and explosive environments, it is usually realized by using optical fiber, which is called an optical fiber acceleration sensor or an optical fiber accelerometer. Optical fiber acceleration sensors can be divided into phase modulation type, wavelength modulation type and light intensity modulation type according to the sensitive principle. The phase-modulated fiber optic acceleration sensor mainly uses a variety of methods to convert vibration signals into optical phase changes, and then uses fiber optic interferometers, such as Fabry-Perot (F-P) interferometers, Michelson interferometers, Mach-Zehnder ( M-Z) interferometer to detect phase changes. This fiber optic acceleration sensor has the advantage of high sensitivity, but the fiber optic interferometer has a complex structure and stability problems, making it difficult to be practical and costly.

波长调制型光纤加速度传感器主要基于光纤光栅(FBG)传感技术,通过敏感机构带动FBG应力变形,导致FBG反射波长的变化,利用波长解调得到加速度信号。光纤光栅加速度传感器除具备光纤传感器固有的优点外,由于其输出表征信号为光栅反射的光信号的中心波长,属于数字量,所以具有优异的传输特性(不受光源波动及长距离传输光纤引入衰减的影响),而且通过不同波长复用可以方便地实现准分布式测量。可以广泛应用于核爆试验、航空航天工程等国防尖端技术领域及水利水工结构、桥梁和建筑结构、机械设备等的加速度监测与测量。The wavelength-modulated fiber-optic acceleration sensor is mainly based on fiber-optic grating (FBG) sensing technology. The FBG stress deformation is driven by the sensitive mechanism, resulting in the change of the FBG reflection wavelength, and the acceleration signal is obtained by wavelength demodulation. In addition to the inherent advantages of fiber optic sensors, the fiber grating acceleration sensor has excellent transmission characteristics (not subject to light source fluctuations and attenuation introduced by long-distance transmission fibers) because its output signal is the central wavelength of the optical signal reflected by the grating, which is a digital quantity impact), and quasi-distributed measurement can be easily realized by multiplexing different wavelengths. It can be widely used in nuclear explosion tests, aerospace engineering and other cutting-edge national defense technology fields, as well as acceleration monitoring and measurement of water conservancy and hydraulic structures, bridges and building structures, mechanical equipment, etc.

由于光纤光栅本身对温度及应变同时敏感,在使用光纤光栅做为加速度传感器敏感元件时会受到温度的影响而导致测量精度大大降低;此外,光纤光栅虽然具有良好的轴向抗拉伸疲劳能力,但一旦其受力方向偏离轴向,极易被剪切力折断。针对这些实际工程应用问题,本实用新型提出一种既能消除温度影响又能避免光纤光栅断裂的具有自温补功能的高可靠光纤光栅加速度传感器。Since the fiber grating itself is sensitive to temperature and strain at the same time, when the fiber grating is used as the sensitive element of the acceleration sensor, it will be affected by the temperature and the measurement accuracy will be greatly reduced; in addition, although the fiber grating has good axial tensile fatigue resistance, But once its force direction deviates from the axial direction, it is easily broken by shear force. Aiming at these practical engineering application problems, the utility model proposes a highly reliable fiber grating acceleration sensor with self-warming compensation function which can eliminate temperature influence and avoid fiber grating fracture.

实用新型内容Utility model content

本实用新型的目的是针对传统光纤光栅传感器灵敏度低,可靠性差的问题,提供一种具有自温补功能的高可靠光纤光栅加速度传感器。The purpose of the utility model is to provide a highly reliable fiber grating acceleration sensor with a self-warming compensation function for the problems of low sensitivity and poor reliability of traditional fiber grating sensors.

具有自温补功能的高可靠光纤光栅加速度传感器,该传感器包括菱形梁、振动粱、质量块和光纤光栅;Highly reliable fiber grating acceleration sensor with self-heating compensation function, the sensor includes diamond beams, vibrating beams, mass blocks and fiber gratings;

所述菱形梁包括菱形筒和四个方形梁;The rhomboid beams include rhombus tubes and four square beams;

所述菱形筒的横截面为菱形;所述四个方形梁顺时针固定在该菱形筒的四个角对应的外侧壁上;The cross-section of the rhomboid tube is rhombus; the four square beams are fixed clockwise on the outer walls corresponding to the four corners of the rhomboid tube;

所述菱形筒和四个方形梁位于同一平面上;The rhomboid tube and the four square beams are located on the same plane;

位于菱形筒两个锐角对应外侧壁的两个方形梁的上表面设置有U形凹槽;U-shaped grooves are arranged on the upper surfaces of the two square beams located on the two acute angles of the diamond-shaped cylinder corresponding to the outer walls;

所述振动粱包括增敏凹槽、振动臂和固定座;The vibrating beam includes a sensitivity-increasing groove, a vibrating arm and a fixing seat;

固定座通过增敏凹槽与振动臂固接为一体;The fixing seat is fixedly connected with the vibrating arm through the sensitization groove;

质量块为上表面的中心线开有凹槽的长方体结构,振动梁的振动臂的末端卡在所述凹槽中;The mass block is a cuboid structure with a groove on the center line of the upper surface, and the end of the vibrating arm of the vibrating beam is stuck in the groove;

所述位于菱形筒两个钝角对应外侧壁的两个方形梁的末端固定在振动粱的增敏凹槽上,The ends of the two square beams located at the two obtuse angles of the rhomboid cylinder corresponding to the outer side walls are fixed on the sensitization grooves of the vibrating beam,

光纤光栅嵌入在菱形梁的凹槽内并延伸出菱形梁凹槽。Fiber gratings are embedded in and extend out of the grooves of the diamond beams.

本实用新型的优点是:本传感器在振动梁上加工有增敏凹槽,提高了对加速度的检测灵敏度。The utility model has the advantages that: the sensor is processed with a sensitivity-increasing groove on the vibrating beam, which improves the detection sensitivity of the acceleration.

本实用新型通过增加了菱形梁,实现了光纤光栅受力变形方向与振动梁受力变形方向的坐标轴正交转换,隔绝了振动梁弯曲变形产生的剪切力,保证光纤光栅始终处于直线拉伸状态,提高了光纤光栅加速度传感器的长期可靠性。The utility model realizes the coordinate axis orthogonal conversion between the force deformation direction of the fiber grating and the force deformation direction of the vibration beam by adding a rhombus beam, isolates the shear force generated by the bending deformation of the vibration beam, and ensures that the fiber grating is always in a linear stretching state , which improves the long-term reliability of the fiber grating acceleration sensor.

本实用新型可通过改变振动梁与菱形梁的各自热膨胀系数,抵消光纤光栅加速度传感器的温度漂移,提高在实际工程中对加速度的检测精度。The utility model can offset the temperature drift of the fiber grating acceleration sensor by changing the respective thermal expansion coefficients of the vibrating beam and the rhombic beam, and improve the detection accuracy of the acceleration in actual engineering.

附图说明Description of drawings

图1为本实用新型菱形梁1的结构示意图;Fig. 1 is the structural representation of the utility model rhombic beam 1;

图2为本实用新型振动粱2的结构示意图;Fig. 2 is the structural representation of the utility model vibrating beam 2;

图3为本实用新型的结构示意图。Fig. 3 is a structural schematic diagram of the utility model.

具体实施方式Detailed ways

具体实施方式一:下面结合图1至图3说明本实施方式,Specific Embodiment 1: The present embodiment will be described below in conjunction with FIG. 1 to FIG. 3 ,

本实施方式所述的具有自温补功能的高可靠光纤光栅加速度传感器,该传感器包括菱形梁1、振动粱2、质量块3和光纤光栅5;The high-reliability fiber grating acceleration sensor with self-warming compensation function described in this embodiment includes a rhombic beam 1, a vibrating beam 2, a mass block 3 and a fiber grating 5;

所述菱形梁1包括菱形筒1-1和四个方形梁1-2;The rhomboid beam 1 includes a rhombus tube 1-1 and four square beams 1-2;

所述菱形筒1-1的横截面为菱形;所述四个方形梁1-2顺时针固定在该菱形筒1-1的四个角对应的外侧壁上;The cross section of the rhomboid tube 1-1 is rhombus; the four square beams 1-2 are fixed clockwise on the outer side walls corresponding to the four corners of the rhomboid tube 1-1;

所述菱形筒1-1和四个方形梁1-2位于同一平面上;The rhomboid tube 1-1 and the four square beams 1-2 are located on the same plane;

位于菱形筒1-1两个锐角对应外侧壁的两个方形梁的上表面设置有U形凹槽;U-shaped grooves are arranged on the upper surfaces of the two square beams located at the two acute angles of the rhombus tube 1-1 corresponding to the outer side walls;

所述振动粱2包括增敏凹槽2-1、振动臂2-2和固定座2-3;The vibrating beam 2 includes a sensitizing groove 2-1, a vibrating arm 2-2 and a fixing seat 2-3;

固定座2-3通过增敏凹槽2-1与振动臂2-2固接为一体;The fixing seat 2-3 is fixedly connected with the vibrating arm 2-2 through the sensitization groove 2-1;

质量块3为上表面的中心线开有凹槽的长方体结构,振动梁2的振动臂2-2的末端卡在所述凹槽中;The mass block 3 is a cuboid structure with a groove on the center line of the upper surface, and the end of the vibration arm 2-2 of the vibration beam 2 is stuck in the groove;

所述位于菱形筒1-1两个钝角对应外侧壁的两个方形梁的末端固定在振动粱2的增敏凹槽2-1上,The ends of the two square beams located at the two obtuse angles of the rhombus tube 1-1 corresponding to the outer side walls are fixed on the sensitization groove 2-1 of the vibrating beam 2,

光纤光栅5嵌入在菱形梁1的凹槽内并延伸出菱形梁1凹槽。The fiber grating 5 is embedded in the groove of the diamond beam 1 and extends out of the groove of the diamond beam 1 .

具体实施方式二:下面结合图1至图3说明本实施方式,本实施方式为对实施方式一的进一步说明,本实施方式所述振动梁2的固定座2-2的上表面中心线的两侧开有两个螺孔。Specific embodiment two: The present embodiment will be described below in conjunction with Fig. 1 to Fig. 3. This embodiment is a further description of the first embodiment. There are two screw holes on the side.

工作原理:working principle:

本实用新型的一种能实现温度自动补偿功能,基于振动梁和菱形梁的双金属热膨胀系数差异消除光纤光栅加速度传感器的温度漂移效应;同时借助菱形梁实现了光纤光栅受力变形方向与振动梁受力变形方向的坐标变换,消除振动梁弯曲变形产生的剪切力导致的光纤光栅断裂问题。The utility model can realize the automatic temperature compensation function, and eliminate the temperature drift effect of the fiber grating acceleration sensor based on the difference of the bimetallic thermal expansion coefficient between the vibrating beam and the rhombic beam; at the same time, the force deformation direction of the fiber grating and the force of the vibrating beam are realized by means of the rhombus beam The coordinate transformation of the deformation direction eliminates the problem of fiber grating fracture caused by the shear force generated by the bending deformation of the vibrating beam.

其光信号经传输光纤到达固定于振动梁上的光纤光栅,由于光纤光栅具有波长选择特性,当入射波长满足布拉格反射条件时,将有部分正向传输的光被耦合为反向传输模,并沿原光路反射回光纤。本技术的关键在于振动梁具有一个增敏凹槽,光纤光栅预先固定在菱形梁上,然后再将菱形梁固定在振动梁增敏凹槽的两侧。当振动梁端部的质量块在加速度作用下产生反向的惯性力后,固定在增敏凹槽上的菱形梁会发生更大的应力变形,从而使菱形梁上固定的光纤光栅具有对加速度更加灵敏的检测能力。在本实用新型中,菱形梁与振动梁采用两种具有不同热膨胀系数的金属材质,由此实现了对光纤光栅加速度传感器温度漂移的自动补偿;同时,菱形梁的受力方向与光纤光栅的受力方向相垂直,使光纤光栅始终工作在直线拉伸状态,避免了振动梁弯曲产生的剪切力造成的光纤光栅断裂问题,极大提高了光纤光栅加速度传感器的可靠性。因此,本实用新型从根本上解决了光纤光栅加速度传感器的温度漂移问题和长期可靠性问题,从而满足了实际工程的应用要求。The optical signal reaches the fiber grating fixed on the vibrating beam through the transmission fiber. Since the fiber grating has wavelength selective characteristics, when the incident wavelength satisfies the Bragg reflection condition, part of the forward transmission light will be coupled into the reverse transmission mode, and It is reflected back to the fiber along the original optical path. The key of this technology is that the vibrating beam has a sensitizing groove, the fiber grating is pre-fixed on the diamond-shaped beam, and then the rhomboid beam is fixed on both sides of the sensitizing groove of the vibrating beam. When the mass block at the end of the vibrating beam produces a reverse inertial force under the action of acceleration, the rhomboid beam fixed on the intensifying groove will undergo greater stress deformation, so that the fiber grating fixed on the rhombus beam has a More sensitive detection capability. In the utility model, the diamond beam and the vibrating beam adopt two kinds of metal materials with different thermal expansion coefficients, thereby realizing automatic compensation for the temperature drift of the fiber grating acceleration sensor; at the same time, the force direction of the diamond beam and the fiber grating The force direction is perpendicular to each other, so that the fiber grating always works in a straight-line tension state, avoiding the problem of fiber grating fracture caused by the shear force generated by the bending of the vibrating beam, and greatly improving the reliability of the fiber grating acceleration sensor. Therefore, the utility model fundamentally solves the problem of temperature drift and long-term reliability of the fiber grating acceleration sensor, thereby meeting the application requirements of practical engineering.

光纤光栅传感技术是光纤传感中可靠性高、实用性强并可波分复用的传感技术。它是采用激光照射法,由中心波长为235nm~248nm的激光光斑经透镜和反射镜多次光路调节后,形成光强均匀分布的长方形激光光斑,然后借助相位掩模板,使激光光斑图形化,沿石英单模光纤轴向形成亮暗相间的等周期衍射条纹,最终导致被图形化光斑照射区域内光纤的折射率发生周期性改变(通过大量的工艺研究,光纤被光斑照射区域的长度通常控制在8mm-15mm),照射完成后,单模光纤被照射加工过的区域就具备了布拉格反射特性-当满足布拉格条件的特定波长窄带光入射后,会被该区域反射后沿入射光路原路返回,而其他波长的光信号则被正常透射,通常将光纤的这段区域称为布拉格光栅(Fiber BraggGrating),简称光纤光栅(FBG)。FBG窄带反射谱的中心波长由光栅的等效折射率和折射率变化周期决定,物理量如应变、温度会通过弹光效应、热光效应改变光栅的等效折射率和折射率变化周期,从而使FBG反射谱的中心波长发生漂移,通过用光谱仪或光纤光栅波长解调装置检测FBG反射谱的中心波长变化,可实现对物理量信息的解调。这种技术只有光纤的栅区才对应变和温度敏感,光纤的其他部分对它物理量不敏感,因此,基于FBG波长编码特性,FBG和光纤本身是一体化的,光源强度及其他因素造成的光衰减都不会影响FBG测量精度,同时在一根光纤上可并接或串接多个具有不同中心波长的FBG传感器进行多点分布式传感测量。Fiber Bragg grating sensing technology is a sensing technology with high reliability, strong practicability and wavelength division multiplexing in optical fiber sensing. It adopts the laser irradiation method, and the laser spot with the center wavelength of 235nm to 248nm is adjusted by the lens and mirror for multiple times to form a rectangular laser spot with uniform distribution of light intensity, and then the laser spot is patterned with the help of a phase mask. Light and dark equiperiod diffraction fringes are formed along the axial direction of the quartz single-mode fiber, which eventually leads to periodic changes in the refractive index of the fiber in the area irradiated by the patterned spot In 8mm-15mm), after the irradiation is completed, the irradiated and processed area of the single-mode fiber has Bragg reflection characteristics - when the narrow-band light of a specific wavelength that meets the Bragg condition is incident, it will be reflected by the area and return along the original path of the incident light path , while optical signals of other wavelengths are normally transmitted, this area of the fiber is usually called Fiber Bragg Grating (Fiber BraggGrating), referred to as Fiber Bragg Grating (FBG). The central wavelength of the FBG narrow-band reflection spectrum is determined by the equivalent refractive index and the period of the refractive index change of the grating. Physical quantities such as strain and temperature will change the equivalent refractive index and the period of the refractive index change of the grating through the elastic-optic effect and thermo-optic effect, so that The central wavelength of the FBG reflection spectrum drifts, and the demodulation of the physical quantity information can be realized by detecting the change of the central wavelength of the FBG reflection spectrum with a spectrometer or a fiber grating wavelength demodulation device. In this technology, only the gate region of the fiber is sensitive to strain and temperature, and other parts of the fiber are not sensitive to its physical quantity. Therefore, based on the FBG wavelength coding characteristics, the FBG and the fiber itself are integrated, and the light source intensity and other factors cause light Attenuation will not affect the FBG measurement accuracy, and multiple FBG sensors with different central wavelengths can be connected in parallel or in series on one optical fiber for multi-point distributed sensing measurement.

光强调制型光纤加速度传感器具有结构简单、成本低廉等优点,可以分为透射式、偏振式和反射式三种。透射式光纤加速度传感器的通常结构发射光纤与敏感质量块相固连,而连接探测器的接收光纤与被测体相固接。在振动加速度的作用下,发射光纤与接收光纤产生相对位移,接收光纤的光信号强度受振动加速度调制。其接收光纤可以为单路,也可以为双路,采用双路接收光纤可以消除光源波动的影响。Light intensity modulated fiber optic acceleration sensors have the advantages of simple structure and low cost, and can be divided into three types: transmission type, polarization type and reflection type. The usual structure of the transmission optical fiber acceleration sensor is that the transmitting optical fiber is fixedly connected to the sensitive mass, and the receiving optical fiber connected to the detector is fixedly connected with the measured body. Under the action of the vibration acceleration, the relative displacement of the transmitting optical fiber and the receiving optical fiber occurs, and the optical signal intensity of the receiving optical fiber is modulated by the vibration acceleration. Its receiving optical fiber can be single-path or double-path, and the influence of light source fluctuation can be eliminated by adopting dual-path receiving optical fiber.

Claims (2)

1.具有自温补功能的高可靠光纤光栅加速度传感器,其特征在于:该传感器包括菱形梁(1)、振动粱(2)、质量块(3)和光纤光栅(5);1. A highly reliable fiber grating acceleration sensor with self-warming compensation function, characterized in that: the sensor includes a diamond beam (1), a vibrating beam (2), a mass (3) and a fiber grating (5); 所述菱形梁(1)包括菱形筒(1-1)和四个方形梁(1-2);The rhomboid beam (1) includes a rhomboid tube (1-1) and four square beams (1-2); 所述菱形筒(1-1)的横截面为菱形;所述四个方形梁(1-2)顺时针固定在该菱形筒(1-1)的四个角对应的外侧壁上;The cross section of the rhomboid tube (1-1) is rhombus; the four square beams (1-2) are fixed clockwise on the outer walls corresponding to the four corners of the rhomboid tube (1-1); 所述菱形筒(1-1)和四个方形梁(1-2)位于同一平面上;The rhomboid tube (1-1) and the four square beams (1-2) are located on the same plane; 位于菱形筒(1-1)两个锐角对应外侧壁的两个方形梁的上表面设置有U形凹槽;U-shaped grooves are arranged on the upper surfaces of the two square beams located at the two acute angles of the rhombus tube (1-1) corresponding to the outer side walls; 所述振动粱(2)包括增敏凹槽(2-1)、振动臂(2-2)和固定座(2-3);The vibrating beam (2) includes a sensitizing groove (2-1), a vibrating arm (2-2) and a fixing seat (2-3); 固定座(2-3)通过增敏凹槽(2-1)与振动臂(2-2)固接为一体;The fixing seat (2-3) is fixedly connected with the vibrating arm (2-2) through the sensitization groove (2-1); 质量块(3)为上表面的中心线开有凹槽的长方体结构,振动梁(2)的振动臂(2-2)的末端卡在所述凹槽中;The mass block (3) is a cuboid structure with a groove on the center line of the upper surface, and the end of the vibration arm (2-2) of the vibration beam (2) is stuck in the groove; 所述位于菱形筒(1-1)两个钝角对应外侧壁的两个方形梁的末端固定在振动粱(2)的增敏凹槽(2-1)上,The ends of the two square beams corresponding to the outer sidewalls of the two obtuse angles of the rhombus (1-1) are fixed on the sensitization groove (2-1) of the vibrating beam (2), 光纤光栅(5)嵌入在菱形梁(1)的凹槽内并延伸出菱形梁(1)凹槽。The optical fiber grating (5) is embedded in the groove of the diamond beam (1) and extends out of the groove of the diamond beam (1). 2.根据权利要求1所述的具有自温补功能的高可靠光纤光栅加速度传感器,其特征在于:所述振动梁(2)的固定座(2-2)的上表面中心线的两侧开有两个螺孔。2. The highly reliable fiber grating acceleration sensor with self-warming compensation function according to claim 1, characterized in that: the two sides of the upper surface center line of the fixed seat (2-2) of the vibrating beam (2) are opened There are two screw holes.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103983806A (en) * 2014-05-28 2014-08-13 武汉理工大学 Fiber bragg grating high-frequency acceleration sensor based on flexible hinges
CN113295424A (en) * 2021-06-23 2021-08-24 东北农业大学 Automobile engine knock sensor based on fiber grating array

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103983806A (en) * 2014-05-28 2014-08-13 武汉理工大学 Fiber bragg grating high-frequency acceleration sensor based on flexible hinges
CN103983806B (en) * 2014-05-28 2016-08-24 武汉理工大学 A kind of fiber grating high frequency acceleration transducer based on flexible hinge
CN113295424A (en) * 2021-06-23 2021-08-24 东北农业大学 Automobile engine knock sensor based on fiber grating array

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