CN202972530U - Skid-mounted superpure ammonia field supply device - Google Patents
Skid-mounted superpure ammonia field supply device Download PDFInfo
- Publication number
- CN202972530U CN202972530U CN 201220501834 CN201220501834U CN202972530U CN 202972530 U CN202972530 U CN 202972530U CN 201220501834 CN201220501834 CN 201220501834 CN 201220501834 U CN201220501834 U CN 201220501834U CN 202972530 U CN202972530 U CN 202972530U
- Authority
- CN
- China
- Prior art keywords
- knock out
- ammonia tank
- out drum
- tank car
- heat pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 title claims abstract description 110
- 229910021529 ammonia Inorganic materials 0.000 title claims abstract description 50
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 46
- 230000001105 regulatory effect Effects 0.000 claims abstract description 19
- 239000011810 insulating material Substances 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 abstract description 13
- 238000011161 development Methods 0.000 abstract description 5
- 210000001503 joint Anatomy 0.000 abstract 1
- 230000008016 vaporization Effects 0.000 description 9
- 238000009834 vaporization Methods 0.000 description 8
- 239000002994 raw material Substances 0.000 description 6
- 229910002601 GaN Inorganic materials 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 238000005485 electric heating Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000008676 import Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000003032 molecular docking Methods 0.000 description 2
- 241001025261 Neoraja caerulea Species 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005842 biochemical reaction Methods 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 229910000069 nitrogen hydride Inorganic materials 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 239000006200 vaporizer Substances 0.000 description 1
Landscapes
- Filling Or Discharging Of Gas Storage Vessels (AREA)
Abstract
The utility model discloses a skid-mounted superpure ammonia field supply device, which includes a liquid ammonia tank truck, a buffer tank, an air-source heat pump water heating system, a constant pressure regulating valve bank, an automatic control system and a carrying vehicle, wherein both the liquid ammonia tank truck and the buffer tank are externally provided with jackets, and a pipeline of the liquid ammonia tank truck is connected with a water outlet of the air-source heat pump water heating system; the buffer tank is connected with an outlet of the liquid ammonia tank truck; a jacket inlet of the buffer tank is connected with a jacket outlet of the liquid ammonia tank truck through a pipeline; and the air-source heat pump water heating system is connected with a water inlet of an outlet pipeline of the liquid ammonia tank truck. With adoption of the system, the butt joint of the liquid ammonia tank truck and the heating system can be realized efficiently and conveniently, as a result, demand of a customer is met, no additional equipment is required, limitation on time, space and region is overcome, and further development of the company customer source is facilitated.
Description
Technical field
The utility model relates to a kind of vaporization constant pressure air feeding integrated device, particularly the on-the-spot air feeder of a kind of skid-mounted ultra-pure ammonia.
Background technique
In recent years, under the background of global concern low-carbon economy pattern, clean energy resource and power-saving technology are greatly developed in countries in the world, pay close attention to low-carbon economy.Under this background, LED technology and the related industry of China have obtained fast development.Especially the semiconductor lighting technology take the high brightness GaN-based blue-ray LED as core has been brought very large impact to lighting field, and becomes the focus of present global semiconductor area research and investment.Along with the fast development of the photoelectronic industries such as light emitting semiconductor device (LED), the monolithic design production capacity in industry has had the growth of explosion type, and the demand of upstream materials has been had more huge demand.
The 7N electronic grade ultrapure ammonia is a kind of important raw and processed materials in the LED industry, is the important foundation material that the MOCVD technology prepares GaN.Its basic principle is that ultra-pure ammonia is used for metallo-organic compound chemical vapor deposition (MOCVD) epitaxial process, and it issues biochemical reaction generation gallium nitride with the predecessor trimethyl gallium (Ga (CH3)) of metallorganic in High Temperature High Pressure:
Ga(CH3)3(g)+NH3(g)→GaN(s)+3CH4(g)。
Gallium nitride is the core of LED technology, is determining the development of LED industry.Therefore, the development of industry is had higher requirement to the supply of ultra-pure ammonia.At present, the consumption scale of the monomer factory in global LED industry to ultra-pure ammonia, the maximum flow of its supply is no more than 100Nm3/h, and in actual demand, and its quantity of LED factory that the flow of ultra-pure ammonia is surpassed 400Nm3/h increases sharply.
[0004] in current LED production process, the scene of widely used three kinds of ammonia tanks to ultra-pure ammonia (Y bottle, T bottle, ISO tank car) vaporization blowing model is as follows:
The canned mode of liquefied ammonia | The vaporization mode | Air demand | Voltage regulating mode |
The T bottle | Electric blanket covers the bottle heating | ≤ 12 Nm3/h | The manual pressure regulating valve combination |
The Y bottle | Electric blanket covers the bottle heating | ≤ 30 Nm3/h | The manual pressure regulating valve combination |
The ISO tank car | At the bottom of electric heating chuck heating tank | ≤ 96 Nm3/h | The manual pressure regulating valve combination |
Though above-mentioned several plenum system is adopted in a large number, have larger narrow limitation: all adopt Electric heating to realize the vaporization of liquefied ammonia, power consumption is larger; It is larger that the air supply system internal pressure is subjected to heating source temperature, flow etc. to affect fluctuation, makes the interior gas of supply air line that the possibility of potential liquefaction be arranged.The utility model patent (ZL 201120093007.4) of the grand gas companies of gold has been reported and has been replaced with air source heat pump hot water system that electric heating is energy-conservation to realize, not limit flow and the large flow vaporization constant pressure air feeding system of a kind of ultra-pure ammonia that can constant voltage output.Yet the ISO of this system tank car and heating operative installations adhere to different system separately, pipeline is longer, inconvenience is installed, and need the client to provide for oneself or rent air source hot pump water heater and water bath type vaporizer, increased user cost, be subjected to the region spacial influence larger, thereby limited its further extensive use.
Summary of the invention
In order to overcome defects, the utility model provides the system of the larger gas consumption demand in a kind of LED of satisfying client use gas scene, and this system is movably, can stablize the on-the-spot air feeder of a kind of skid-mounted ultra-pure ammonia of output.
The technical solution of the utility model is: the on-the-spot air feeder of a kind of skid-mounted ultra-pure ammonia, this device comprise liquefied ammonia tank car, knock out drum, air source heat pump hot water system, constant pressure regulating valve group and automatic control system and carry car.Described liquefied ammonia tank car and knock out drum outside all are designed with chuck, and described liquefied ammonia tank car pipeline is connected with the air source heat pump hot water system water outlet; Described knock out drum is connected with the outlet of liquefied ammonia tank car, described knock out drum JI is connected by pipeline with liquefied ammonia tank car JO, described air source heat pump hot water system is connected with liquefied ammonia tank car outlet line water intake, to guarantee that hot water circulates between tank car and knock out drum; Described voltage-regulating system connects the knock out drum outlet line, and described automatic control system is regulated pressure and the flow of voltage-regulating system, by the ammonia of voltage-regulating system output constant voltage.
Described knock out drum, air source heat pump hot water system, constant pressure regulating valve group and automatic control system are carried the car carrying with one jointly.
The chuck skin of described liquefied ammonia tank car and knock out drum wraps up with thermal insulating material, and chuck inside is provided with hot water cyclesystem.
The beneficial effects of the utility model are: adopt this system, can not only realize the effect of patent ZL 201120093007.4, and the efficient docking that has realized easily ISO liquefied ammonia tank car and heating system, satisfy client's demand and need not the client and increased subsidiary equipment, overcome the restriction of time, space and region, be conducive to further opening up of corporate client source; Adopt the jacketed type hot water cyclesystem to increase the utilization ratio of hot water, reduced thermal loss; The air feed that adopts knock out drum to prevent that not only Yin Wendu, pressure or some artificial operation factors from causing unstable or due to raw materials ammonia because the not enough liquefaction of heat supply causes damage to manufacturing mechanism, more can further purify to the finished product ammonia, guarantee the quality of air feed.
Description of drawings
Fig. 1 is the utility model structural representation;
Wherein: 1, liquefied ammonia tank car, 2, hot water jacket and thermal insulation layer, 3, knock out drum, 4, air source heat pump hot water system, 5, constant pressure regulating valve group, 6, automatic control system, 7, carry car, 8, automatic test system pipeline, 9, the hot water circuit pipeline, 10, the ammonia pipeline.
Embodiment
The present embodiment is the on-the-spot air feeder of a kind of skid-mounted ultra-pure ammonia, and this device comprises liquefied ammonia tank car 1, knock out drum 3, air source heat pump hot water system 4, constant pressure regulating valve group 5 and automatic control system 6 and carries car 7.
As shown in figure one, the on-the-spot air feeder of a kind of skid-mounted ultra-pure ammonia.According to customer demand, liquefied ammonia tank car 1 has the car 7 that carries of knock out drum 3, air source heat pump hot water system 4, constant pressure regulating valve group 5 and automatic control system 6 to enter simultaneously plant area with load, completes docking, and in figure, solid line represents pipeline, and dotted line represents control wiring.Liquefied ammonia tank car 1 is connected with knock out drum 3, and the chuck import is connected with the outlet of air source heat pump hot water system 4, and JO is connected with knock out drum chuck hot water inlet.Hot water enters raw material tank car chuck through air source heat pump hot water device 4 the raw material tank car is heated, the heat exchange area of vaporization liquefied ammonia keeps the surplus more than 100% to make liquid ammonia vaporization, can avoid the four seasons temperature difference and the long-time not good problem of heat transfer effect of vaporizing and making outside frosting and causing.Ammonia after vaporization enters knock out drum 3.
The entrance of knock out drum 3 is connected with the raw material tank car, and outlet is connected with constant pressure regulating valve group 5.Knock out drum 3 hot water jacket's imports export with raw material tank car 1 hot water jacket and are connected, outlet is connected with air source heat pump hot water system 4, guarantee the circulation of hot water between raw material tank car 1 and knock out drum 3 by air source heat pump hot water system 4, improved the utilization ratio of hot water.Be connected with the instrument such as temperature, pressure on knock out drum 3, control the water temperature in knock out drum, guarantee out that knock out drum is gaseous ammonia entirely.
Liquefied ammonia tank car 1 is provided by air source heat pump hot water system 4 with the thermal water source of knock out drum 3, and water heating system circulates with pump for what seal.Water heating system to the control of water temperature be limited to ± 1 ℃, guaranteed stability and the continuity of heating.
The ammonia outlet pipeline of knock out drum 3 is connected with voltage-regulating system, and regulator comprises constant pressure regulating valve group 5, temperature, pressure and flow instrument, is provided with automatic regulating valve in constant pressure regulating valve group 5.In the signals such as temperature, pressure, flow input automatic control system 6, this system regulates according to the SC sigmal control of input, the constant pressure regulating valve group, thus pressure and the flow of whole voltage-regulating system are regulated.
The pipeline that contacts with ultra-pure ammonia in system and parts all adopt the stainless steel of electropolishing to make.
Claims (3)
1. the on-the-spot air feeder of a skid-mounted ultra-pure ammonia, it is characterized in that this device comprises liquefied ammonia tank car, knock out drum, air source heat pump hot water system, constant pressure regulating valve group, automatic control system and carries car, described liquefied ammonia tank car and knock out drum outside all are designed with chuck, and described liquefied ammonia tank car pipeline is connected with the air source heat pump hot water system water outlet; Described knock out drum is connected with the outlet of liquefied ammonia tank car, described knock out drum JI is connected by pipeline with liquefied ammonia tank car JO, described air source heat pump hot water system is connected with liquefied ammonia tank car outlet line water intake, and described voltage-regulating system connects the knock out drum outlet line.
2. the on-the-spot air feeder of skid-mounted ultra-pure ammonia according to claim 1, is characterized in that described knock out drum, air source heat pump hot water system, constant pressure regulating valve group and automatic control system are jointly with car carrying in year.
3. the on-the-spot air feeder of skid-mounted ultra-pure ammonia according to claim 1, is characterized in that the chuck skin of described liquefied ammonia tank car and knock out drum wraps up with thermal insulating material, and chuck inside is provided with hot water cyclesystem.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 201220501834 CN202972530U (en) | 2012-09-28 | 2012-09-28 | Skid-mounted superpure ammonia field supply device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 201220501834 CN202972530U (en) | 2012-09-28 | 2012-09-28 | Skid-mounted superpure ammonia field supply device |
Publications (1)
Publication Number | Publication Date |
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CN202972530U true CN202972530U (en) | 2013-06-05 |
Family
ID=48513604
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN 201220501834 Expired - Lifetime CN202972530U (en) | 2012-09-28 | 2012-09-28 | Skid-mounted superpure ammonia field supply device |
Country Status (1)
Country | Link |
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CN (1) | CN202972530U (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106996513A (en) * | 2015-10-13 | 2017-08-01 | 株式会社堀场Stec | Gas control system and the control method for gas control system |
CN108506730A (en) * | 2018-05-09 | 2018-09-07 | 苏州卫鹏机电科技有限公司 | A kind of air supply system and its air supply method |
CN113685720A (en) * | 2021-08-25 | 2021-11-23 | 国网重庆市电力公司电力科学研究院 | A C5-PFK rapid inflation system and inflation method |
-
2012
- 2012-09-28 CN CN 201220501834 patent/CN202972530U/en not_active Expired - Lifetime
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106996513A (en) * | 2015-10-13 | 2017-08-01 | 株式会社堀场Stec | Gas control system and the control method for gas control system |
CN108506730A (en) * | 2018-05-09 | 2018-09-07 | 苏州卫鹏机电科技有限公司 | A kind of air supply system and its air supply method |
CN113685720A (en) * | 2021-08-25 | 2021-11-23 | 国网重庆市电力公司电力科学研究院 | A C5-PFK rapid inflation system and inflation method |
CN113685720B (en) * | 2021-08-25 | 2023-08-18 | 国网重庆市电力公司电力科学研究院 | C5-PFK rapid inflation system and inflation method |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CX01 | Expiry of patent term | ||
CX01 | Expiry of patent term |
Granted publication date: 20130605 |