CN202880858U - Double-micromirror rotary scanning device - Google Patents
Double-micromirror rotary scanning device Download PDFInfo
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- CN202880858U CN202880858U CN 201220240895 CN201220240895U CN202880858U CN 202880858 U CN202880858 U CN 202880858U CN 201220240895 CN201220240895 CN 201220240895 CN 201220240895 U CN201220240895 U CN 201220240895U CN 202880858 U CN202880858 U CN 202880858U
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Abstract
The utility model discloses a double-micromirror rotary scanning device which comprises micro drivers, plane springs, a ring-shaped lens and a round lens. Output ends of the micro drivers are connected with input ends of the plane springs, output ends of the plane springs are respectively connected with input ends of the ring-shaped lens and the round lens, and each device comprises one ring-shaped lens, one round lens, eight plane springs and eight micro drivers. The ring-shaped lens and the round lens are connected with four plane springs, and each plane spring is connected with the micro driver. Based on existing materials and micromachining craft at present, a 90-degree optical reflection angle can be obtained, the double-micromirror rotary scanning device completes 360-degree circular scanning, and the axial length of a scanning device is obviously shortened.
Description
Technical field
The utility model relates to a kind of mems device for rotary optical scanning, the rotation sweep device that particularly makes up based on two micro mirrors.
Background technology
Miniature rotation optical scanning device has very important application in optics based endoscopic imaging field.The image probe that is integrated with miniature rotation optical scanning device can be finished 360 degree circular scannings in the pipeline (such as blood vessel, alimentary canal etc.) of the various diameters of human body, thereby obtains two-dimensional cross sectional image or three-dimensional spiral scan image.
Usually, miniature rotation optical scanning device all adopts the Miniature rotating motor based on piezoelectricity or static drive principle.Its diameter is generally about 4-5mm, but its length is longer, has a strong impact on the crooked flexibility of the image probe at its place.In order to overcome its length issue, some R﹠D institution has researched and developed slim supersonic motor in the world, but has no at present its extensive application; Other seminar have developed the scanning micro-mirror that adopts silicon micromachining technology to make, electric heating twin shaft scanning micro-mirror (Journal of Micromechanics and Microengineering 18 such as exploitations such as the Janak Singh of Singapore Institute of Microelectronics, 025001,2008) and at exploration (the IEEE Journal of Selected Topics in Quantum Electronics of circular scanning application facet, Vol.15, Issue 6, pp.1432-1438,2009).Based on result of study and the materialogy analysis of this group, electric heating twin shaft scanning micro-mirror still can't reach the mechanical deflection angle about 45 degree at present, therefore can not ideally incident ray bending 90 be spent with the vertical incidence imageable target.
The utility model proposes a kind of pair of micro mirror rotation sweep device, can address the above problem based on present current material and micro fabrication, obtain the optical reflection angle of 90 degree, and finish 360 degree circular scannings.
The utility model content
The purpose of this utility model is to propose a kind of pair of micro mirror rotation sweep device, can obtain the optical reflection angle of 90 degree based on present current material and micro fabrication, and finishes 360 degree circular scannings.
For achieving the above object, the utility model adopts technical scheme to be: it comprises microdrive, plane spring, annular eyeglass and circular eyeglass.The output of microdrive links to each other with the input of plane spring, and the output of plane spring links to each other with the input of annular eyeglass and circular eyeglass respectively; Each device comprises 1 annular eyeglass, 1 circular eyeglass, 8 plane springs and 8 microdrives, and each links to each other annular eyeglass and circular eyeglass with 4 plane springs, and each plane spring links to each other with 1 microdrive;
Described microdrive adopts micro-processing technology to make, based on the electrothermal drive principle, and by multilayer material, such as silicon, silica, metal, the compositions such as metal oxide are used for the electric drive signal of outside input is converted to mechanical deformation by the bimetal leaf effect;
Described plane spring adopts micro-processing technology to make, and by multilayer material, such as silicon, the compositions such as silica are used for the displacement of microdrive one end is passed to annular eyeglass and circular eyeglass;
Described annular eyeglass is annular, adopts micro-processing technology to make, by multilayer material, and such as silicon, silica, metal, the compositions such as metal oxide are used for reflection through the incident ray of circular eyeglass reflection, and one side is coated with high reflectance coating;
Described circular eyeglass is circular, adopts micro-processing technology to make, by multilayer material, and such as silicon, silica, metal, the compositions such as metal oxide are used for reflecting the light of direct incident, and the surface relative with annular eyeglass reflective surface is coated with high reflectance coating;
Operation principle of the present utility model is such: the electric drive signal of outside input, be generally the CF sine waveform, and the electric drive signal that is input to different microdrives has fixing phase difference, is generally 90 degree; Drive current makes metal or the silicon heater in the microdrive produce heat, and the temperature of microdrive is risen.Microdrive is that multilayer material consists of, and different materials has different thermal coefficient of expansions, and therefore along with temperature rises, deformation can occur microdrive, to the less material curving of thermal coefficient of expansion.One end of microdrive is fixed on the silicon chip, and the other end is connected on annular eyeglass and the circular eyeglass by plane spring.Under the effect of the electric drive signal of out of phase, deformation alternately occurs in each microdrive in order, makes annular eyeglass and circular eyeglass lift and point to the different directions that cover 360 degree.Because annular eyeglass is relative with the high reflectance coating of circular eyeglass, incident ray at first shines the circular eyeglass center, reflexes on the annular eyeglass through circular eyeglass, reflexes to imageable target through annular eyeglass again.The angle of lifting of annular eyeglass and circular eyeglass is 22.5 degree, thus incident ray through two secondary reflections after, compare with incident direction and to have rotated 90 degree.Therefore, two micro mirror rotation sweep devices can obtain the optical reflection angle of 90 degree, and finish 360 degree circular scannings.
The utility model has following advantage owing to adopted technique scheme:
1, based on present current material and micro fabrication, can obtain the optical reflection angle of 90 degree, and finish 360 degree circular scannings;
2, obviously shortened the axial length of scanning device.
Description of drawings
Fig. 1 is structural representation of the present utility model;
Fig. 2 is incident beam 90-degree rotation schematic diagram;
Fig. 3 is 4 passage electric drive signal waveforms;
Fig. 4 is eyeglass 360 degree circular scanning schematic diagrames.
The specific embodiment
The utility model is described in further detail below in conjunction with drawings and Examples: as shown in Figure 1, it comprises microdrive 1, plane spring 2, annular eyeglass 3 and circular eyeglass 4.The output of microdrive 1 links to each other with the input of plane spring 2, and the output of plane spring 2 links to each other with the input of annular eyeglass 3 and circular eyeglass 4 respectively; Each device comprises 1 annular eyeglass 3,1 circular eyeglass 4,8 plane springs 2 and 8 microdrives 1, and annular eyeglass 3 respectively links to each other with 4 plane springs 2 with circular eyeglass 4, and each plane spring 2 links to each other with 1 microdrive 1;
Described microdrive 1 adopts micro-processing technology to make, based on the electrothermal drive principle, and by multilayer material, such as silicon, silica, metal, the compositions such as metal oxide are used for the electric drive signal of outside input is converted to mechanical deformation by the bimetal leaf effect;
Described plane spring 2 adopts micro-processing technology to make, and by multilayer material, such as silicon, the compositions such as silica are used for the displacement of microdrive 1 one ends is passed to annular eyeglass 3 and circular eyeglass 4;
Described annular eyeglass 3 is annular, adopts micro-processing technology to make, by multilayer material, and such as silicon, silica, metal, the compositions such as metal oxide are used for reflection through the incident ray of circular eyeglass 4 reflections, and one side is coated with high reflectance coating;
Described circular eyeglass 4 is circular, adopts micro-processing technology to make, by multilayer material, and such as silicon, silica, metal, the compositions such as metal oxide are used for reflecting the light of direct incident, and the surface relative with annular eyeglass 3 reflective surfaces is coated with high reflectance coating;
Operation principle of the present utility model is such: the electric drive signal of outside input, and make metal or silicon heater in the microdrive 1 produce heat, the temperature of microdrive 1 is risen.Microdrive 1 consists of for multilayer material, and different materials has different thermal coefficient of expansions, and therefore along with temperature rises, deformation can occur microdrive 1, to the less material curving of thermal coefficient of expansion.One end of microdrive 1 is fixed on the silicon chip, and the other end is connected on annular eyeglass 3 and the circular eyeglass 4 by plane spring 2.According to shown in Figure 2, because annular eyeglass 3 is relative with the high reflectance coating of circular eyeglass 4, incident ray at first shines circular eyeglass 4 centers, reflexes on the annular eyeglass 3 through circular eyeglass 4, reflexes to imageable target through annular eyeglass 3 again.The angle of lifting of annular eyeglass 3 and circular eyeglass 4 is 22.5 degree, thus incident ray through two secondary reflections after, compare with incident direction and to have rotated 90 degree.Shown in Fig. 3-4,4 passage electric drive signals are generally the CF sine waveform, and the electric drive signal that is input to different microdrives 1 has fixing phase difference, are generally 90 degree; Under the effect of the electric drive signal of out of phase, deformation alternately occurs in each microdrive 1 in order, makes annular eyeglass 3 and circular eyeglass 4 lift and point to the different directions that cover 360 degree.Therefore, get the optical reflection angles of 90 degree behind incident ray process circular eyeglass and annular eyeglass 2 secondary reflections, and finish 360 degree circular scannings.
The mechanical deflection angle of annular eyeglass described in the utility model and circular eyeglass is (0-45) degree.
Claims (6)
1. two micro mirror rotation sweep device, it is characterized in that: it comprises microdrive, plane spring, annular eyeglass and circular eyeglass, the output of microdrive links to each other with the input of plane spring, and the output of plane spring links to each other with the input of annular eyeglass and circular eyeglass respectively; Each device comprises 1 annular eyeglass, 1 circular eyeglass, 8 plane springs and 8 microdrives, and each links to each other annular eyeglass and circular eyeglass with 4 plane springs, and each plane spring links to each other with 1 microdrive.
2. a kind of pair of micro mirror rotation sweep device as claimed in claim 1 is characterized in that: described microdrive adopts micro-processing technology to make, based on the electrothermal drive principle.
3. a kind of pair of micro mirror rotation sweep device as claimed in claim 1, it is characterized in that: the mechanical deflection angle of described annular eyeglass and circular eyeglass is the 0-45 degree.
4. a kind of pair of micro mirror rotation sweep device as claimed in claim 1 is characterized in that: described plane spring adopts micro-processing technology to make.
5. a kind of pair of micro mirror rotation sweep device as claimed in claim 1 is characterized in that: described annular eyeglass is annular, adopts micro-processing technology to make, and one side is coated with high reflectance coating.
6. a kind of pair of micro mirror rotation sweep device as claimed in claim 1 is characterized in that: described circular eyeglass adopts micro-processing technology to make for circular, and the surface relative with annular eyeglass reflective surface is coated with high reflectance coating.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220240895 CN202880858U (en) | 2012-05-28 | 2012-05-28 | Double-micromirror rotary scanning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220240895 CN202880858U (en) | 2012-05-28 | 2012-05-28 | Double-micromirror rotary scanning device |
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| Publication Number | Publication Date |
|---|---|
| CN202880858U true CN202880858U (en) | 2013-04-17 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 201220240895 Expired - Fee Related CN202880858U (en) | 2012-05-28 | 2012-05-28 | Double-micromirror rotary scanning device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102674232A (en) * | 2012-05-28 | 2012-09-19 | 凝辉(天津)科技有限责任公司 | Double-micromirror rotary scanning device |
| CN106249403A (en) * | 2016-09-10 | 2016-12-21 | 上海大学 | The method strengthening MEMS micromirror resistance ability |
-
2012
- 2012-05-28 CN CN 201220240895 patent/CN202880858U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102674232A (en) * | 2012-05-28 | 2012-09-19 | 凝辉(天津)科技有限责任公司 | Double-micromirror rotary scanning device |
| CN102674232B (en) * | 2012-05-28 | 2014-11-05 | 凝辉(天津)科技有限责任公司 | Double-micromirror rotary scanning device |
| CN106249403A (en) * | 2016-09-10 | 2016-12-21 | 上海大学 | The method strengthening MEMS micromirror resistance ability |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130417 Termination date: 20140528 |