[go: up one dir, main page]

CN202759740U - Apparatus for mounting electronic components - Google Patents

Apparatus for mounting electronic components Download PDF

Info

Publication number
CN202759740U
CN202759740U CN 201220300006 CN201220300006U CN202759740U CN 202759740 U CN202759740 U CN 202759740U CN 201220300006 CN201220300006 CN 201220300006 CN 201220300006 U CN201220300006 U CN 201220300006U CN 202759740 U CN202759740 U CN 202759740U
Authority
CN
China
Prior art keywords
height
substrate
mentioned
surface model
component mounting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN 201220300006
Other languages
Chinese (zh)
Inventor
山崎登
木村知博
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of CN202759740U publication Critical patent/CN202759740U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Supply And Installment Of Electrical Components (AREA)

Abstract

一种电子部件安装用装置,在通过曲面模型近似基板的翘曲变形而校正作业高度的方式中,能够同时提高作业高度的近似精度和生产性。以通过夹紧机构使两边的侧端部在上下方向上被限制位置的矩形状的基板(3)为对象,在通过曲面模型近似基板(3)的翘曲变形而校正作业高度的方式中,基于测定基板(3)所设定的预定的测定点(Pm)的高度而求出高度测定数据和预先求出按压构件(2b)的位置限制面的高度而存储的固定数据即限制面高度数据(Hf1~10)来运算四次曲面模型。由此,能够使近似精度提高,并且能够使必要的高度测定点的数量减少而缩短高度测定的所需时间。

An electronic component mounting apparatus capable of improving both the approximation accuracy of the working height and the productivity in a method of calibrating the working height by approximating the warping deformation of the substrate with a curved surface model. For a rectangular substrate (3) whose positions are restricted in the vertical direction by a clamping mechanism, the working height is corrected by approximating the warping deformation of the substrate (3) with a curved surface model, Obtain height measurement data based on the measurement of the height of the predetermined measurement point (Pm) set on the substrate (3), and the fixed data that is stored as the fixed data that calculates the height of the position regulation surface of the pressing member (2b) in advance, that is, the regulation surface height data (Hf1~10) to operate the quartic surface model. Accordingly, the approximation accuracy can be improved, and the time required for height measurement can be shortened by reducing the number of necessary height measurement points.

Description

电子部件安装用装置Devices for Mounting Electronic Components

技术领域 technical field

本实用新型涉及一种以基板作为对象执行电子部件安装用的作业的电子部件安装用装置。The utility model relates to an electronic component mounting device which uses a substrate as an object to perform electronic component mounting operations.

背景技术 Background technique

将电子部件安装于基板而生产安装基板的电子部件安装线是连接将电子部件接合用的焊膏或粘结剂等粘性体涂布于基板的涂布装置、将电子部件装配于涂布后的基板的部件安装装置等具有不同的作业功能的多个电子部件安装用装置而构成。上述电子部件安装用装置从上游侧向下游侧传送基板,同时通过各装置所具有的部件安装头、涂布头等作业头,相对于基板进行部件装配作业、粘性体的涂布作业等按各装置预定的电子部件安装用的作业。An electronic component mounting line that mounts electronic components on a substrate to produce a mounted substrate is connected to a coating device that applies a viscous material such as solder paste or adhesive for bonding electronic components to the substrate, and mounts the electronic component on the substrate after coating. A substrate component mounting device or the like is configured by having a plurality of electronic component mounting devices with different work functions. The above-mentioned electronic component mounting equipment conveys the substrate from the upstream side to the downstream side, and at the same time, the component mounting operation and the coating operation of the viscous body are performed on the substrate by the component mounting head, the coating head and other operation heads included in each device. Scheduled work for the installation of electronic components.

近年来,伴随电子设备的小型化且高功能化的进展,组装在电子设备中的安装基板谋求高密度且高精度的安装方式而进行小型化且薄化,会容易产生基板的翘曲变形。例如,在缺乏刚性的薄型的树脂制的基板等中,具有在基板面上局部的变形状态表示不同的复杂的翘曲变形的情况。因此,在将电子部件接合用的树脂涂布于基板面的涂布装置中,因基板的翘曲变形引起涂布嘴与基板面的涂布高度按作业部位而不同,故不能确保正常的涂布量和涂布形状,成为下一工序的安装不良的原因。另外,在装配电子部件的部件安装装置中,若将形成有焊锡凸块的电子部件直接装配于产生有复杂翘曲变形的基板,则焊锡凸块不能正常地焊接到基板的电极,容易产生导通不良、接合强度不足等接合不良。In recent years, along with progress in miniaturization and high functionality of electronic equipment, mounting substrates assembled in electronic equipment have been miniaturized and thinned in pursuit of high-density and high-precision mounting methods, and warping deformation of the substrate is likely to occur. For example, in a thin resin substrate lacking in rigidity, the state of local deformation on the surface of the substrate may show different complicated warping deformation. Therefore, in the coating device that coats the resin for bonding electronic components on the substrate surface, the coating height between the coating nozzle and the substrate surface varies according to the working position due to the warping deformation of the substrate, so normal coating cannot be ensured. The amount of cloth and the shape of the application become the cause of poor installation in the next process. In addition, in a component mounting device for assembling electronic components, if the electronic components formed with solder bumps are directly mounted on a substrate with complex warping deformation, the solder bumps cannot be normally welded to the electrodes of the substrate, and lead-off is likely to occur. poor connection, insufficient joint strength, etc.

作为极力防止因上述基板的翘曲变形引起的不良情况的对策,公知如下技术:根据在基板面上所设定的多个测定位置的高度测定结果来准备对预先基板面的形状进行数学表达式近似的曲面模型,在作业执行时,使用该曲面模型来求出作业位置中的作业高度而校正(例如参照专利文献1)。在该专利文献所示的现有技术例中,通过在基板面通常的测定位置以外设定辅助测定位置,从而防止测定位置位于切口部的情况等因基板面的不连续引起的局部的位移量的增减对曲面模型的假想的影响。As a countermeasure to prevent as much as possible the disadvantages caused by the above-mentioned warping deformation of the substrate, a technique is known in which a mathematical expression is prepared for the shape of the substrate surface in advance based on the results of height measurement at a plurality of measurement positions set on the substrate surface. The approximate curved surface model is used to obtain and correct the working height at the working position when the work is performed (for example, refer to Patent Document 1). In the prior art example shown in this patent document, by setting an auxiliary measurement position other than the normal measurement position on the substrate surface, local displacement due to discontinuity of the substrate surface, such as when the measurement position is located at a notch, is prevented. The effect of the increase or decrease on the hypothetical surface model.

现有技术文献prior art literature

专利文献patent documents

专利文献1:国际公开第2007/063763号公报Patent Document 1: International Publication No. 2007/063763

但是,包括上述专利文献所示的例子,在以由数学表达式表示的曲面模型来近似基板面的翘曲变形的现有技术中,具有如下问题:由于曲面模型所使用的近似式的精度,产生不能以实际的作业状态下的基板的翘曲变形所需的精度近似的情况。即,在实际的作业状态下,基板的相对的两边的侧端部被夹紧机构夹紧,在上述两侧端部中基板的上下位置被限制,成为与自由状态下的翘曲变形不同的形状。However, including the examples shown in the above-mentioned patent documents, in the prior art that approximates the warping deformation of the substrate surface with a curved surface model represented by a mathematical expression, there is a problem that the accuracy of the approximate expression used in the curved surface model is Sometimes it cannot be approximated with the accuracy required for the warpage deformation of the substrate in the actual working state. That is, in the actual working state, the side ends of the opposite sides of the substrate are clamped by the clamping mechanism, and the upper and lower positions of the substrate are restricted in the above-mentioned two side ends, which is different from the warping deformation in the free state. shape.

在上述两端处被限制位置而固定状态的情况下,基板的翘曲变形因两端被限制位置而具有拐点,在现有技术使用的二次曲面的近似中,使曲面形状的近似精度提高到必要水准是困难的。另外,为了使近似精度提高,若采用更高次的曲面模型,则必要的高度测定点的数量增加而高度测定所需的时间延迟,从而造成生产性降低。由此,在现有的电子部件安装用装置以及电子部件安装用装置中的作业执行方法中,在通过曲面模型近似基板的翘曲变形而校正作业高度的方式中,存在难以同时提高作业高度的近似精度和生产性的问题。In the case of the above-mentioned fixed state where the positions of both ends are restricted, the warping deformation of the substrate has an inflection point due to the restricted positions of both ends, and in the approximation of the quadratic surface used in the prior art, the approximation accuracy of the curved surface shape is improved. Getting to the necessary level is difficult. Also, if a higher-order curved surface model is used in order to improve the approximation accuracy, the number of necessary height measurement points will increase, and the time required for height measurement will be delayed, resulting in decreased productivity. Therefore, in the method of correcting the working height by approximating the warping deformation of the substrate with a curved surface model in the conventional electronic component mounting device and the work execution method in the electronic component mounting device, it is difficult to increase the working height at the same time. Problems of approximation accuracy and productivity.

实用新型内容 Utility model content

因此,本实用新型的目的在于提供一种电子部件安装用装置,在通过曲面模型近似基板的翘曲变形而校正作业高度的方式中,能够既提高作业高度的近似精度又提高生产性。Therefore, an object of the present invention is to provide an electronic component mounting apparatus capable of improving the approximation accuracy of the working height and improving the productivity in a method of calibrating the working height by approximating the warping deformation of the substrate with a curved surface model.

本实用新型技术方案1涉及的电子部件安装用装置,以通过夹紧机构使相对的两边的侧端部在上下方向上被限制位置的矩形状的基板为对象,执行电子部件安装用的预定的作业,上述电子部件安装用装置的特征在于,具有:作业动作机构,通过使作业头相对于上述基板中上述作业被执行的作业位置升降从而执行上述作业;存储部,存储表示上述夹紧机构的位置限制面的高度位置的限制面高度数据;高度测定单元,测定上述被限制位置的基板的上面所设定的预定的测定点的高度位置而求出高度测定数据;翘曲形状计算部,基于上述限制面高度数据以及上述高度测定数据,求出由数学表达式近似表示在上述被限制位置的状态下的上述基板的翘曲形状的曲面模型;以及作业控制部,基于通过上述曲面模型导出的上述作业位置的高度位置来控制上述作业动作机构,从而使上述作业头执行上述作业。The device for mounting electronic components according to claim 1 of the present invention is aimed at a rectangular substrate whose position is restricted in the vertical direction by the side ends of opposite sides by a clamping mechanism, and executes a predetermined operation for mounting electronic components. The above-mentioned electronic component mounting device is characterized in that it has: a working operation mechanism for performing the above-mentioned work by raising and lowering the work head relative to the work position on the above-mentioned substrate where the above-mentioned work is performed; The height data of the restriction surface of the height position of the position restriction surface; the height measurement unit measures the height position of the predetermined measurement point set on the upper surface of the substrate at the restricted position to obtain the height measurement data; the warpage shape calculation part is based on The height data of the restriction surface and the height measurement data obtain a curved surface model that approximates the warped shape of the substrate in the state of the restricted position by a mathematical expression; The height position of the above-mentioned operation position is used to control the above-mentioned operation mechanism, so that the above-mentioned operation head performs the above-mentioned operation.

技术方案2涉及如技术方案1所述的电子部件安装用装置,其特征在于,上述曲面模型为将表示上述基板表面中的任意点的高度位置的Z坐标通过表示该任意点的水平方向的位置的X坐标以及Y坐标的四次式求出的四次曲面模型。Claim 2 relates to the device for mounting electronic components according to Claim 1, wherein the curved surface model is formed by passing the Z coordinate representing the height position of an arbitrary point on the surface of the substrate through the horizontal direction position of the arbitrary point. The quartic surface model obtained by the quartic formula of X coordinate and Y coordinate.

根据本实用新型,以通过夹紧机构使两边的侧端部在上下方向上被限制位置的矩形状的基板为对象,在通过曲面模型近似基板的翘曲变形而校正作业高度的方式中,通过基于测定基板的上面所设定的预定的测定点的高度而求出的高度测定数据和预先求出夹紧机构的位置限制面的高度而存储的限制面高度数据来运算曲面模型,由此能够使用高次的曲面模型而使近似精度提高,并且能够使必要的高度测定点的数量减少而缩短高度测定的所需时间,能够同时提高作业高度的近似精度和生产性。According to the present invention, the work height is corrected by approximating the warping deformation of the substrate with a curved surface model for a rectangular substrate whose positions are restricted in the vertical direction by the clamping mechanism. The curved surface model can be calculated based on the height measurement data obtained by measuring the height of a predetermined measurement point set on the upper surface of the substrate and the height data of the restriction surface obtained by obtaining the height of the position restriction surface of the clamp mechanism in advance and stored. Using a high-order curved surface model improves the approximation accuracy, reduces the number of required height measurement points, shortens the time required for height measurement, and improves both the approximation accuracy and productivity of the working height.

附图说明 Description of drawings

图1是表示本实用新型的一个实施方式的部件安装装置的结构的俯视图。FIG. 1 is a plan view showing the structure of a component mounting device according to one embodiment of the present invention.

图2是本实用新型的一个实施方式的部件安装装置中的基板传送机构以及夹紧机构的结构说明图。FIG. 2 is a structural explanatory diagram of a board transfer mechanism and a clamping mechanism in the component mounting device according to the embodiment of the present invention.

图3(a)和3(b)是本实用新型的一个实施方式的部件安装装置中的夹紧机构的功能说明图。3( a ) and 3 ( b ) are functional explanatory diagrams of the clamping mechanism in the component mounting device according to one embodiment of the present invention.

图4是本实用新型的一个实施方式的部件安装装置中的安装头以及高度测定单元的结构说明图。FIG. 4 is a configuration explanatory diagram of a mounting head and a height measuring unit in the component mounting device according to the embodiment of the present invention.

图5是本实用新型的一个实施方式的部件安装装置中的安装头所进行的部件安装动作的说明图。5 is an explanatory diagram of a component mounting operation performed by a mounting head in the component mounting device according to the embodiment of the present invention.

图6是本实用新型的一个实施方式的部件安装装置中基板的翘曲变形近似所使用的曲面模型的说明图。6 is an explanatory diagram of a curved surface model used for approximating warping deformation of the substrate in the component mounting device according to the embodiment of the present invention.

图7(a)和7(b)是本实用新型的一个实施方式的部件安装装置中基板上所设定的高度测定的测定点配置的说明图。7( a ) and 7 ( b ) are explanatory diagrams illustrating the arrangement of measurement points for height measurement set on the substrate in the component mounting device according to the embodiment of the present invention.

图8是表示本实用新型的一个实施方式的部件安装装置的控制系统的结构的框图。FIG. 8 is a block diagram showing a configuration of a control system of a component mounting device according to an embodiment of the present invention.

图9是表示本实用新型的一个实施方式的电子部件安装用装置中的作业执行方法的处理流程图。FIG. 9 is a processing flowchart showing a job execution method in the electronic component mounting device according to the embodiment of the present invention.

具体实施方式 Detailed ways

接着参照附图说明本实用新型的实施方式。首先参照图1~图4说明部件安装装置1的整体结构。部件安装装置1为将电子部件安装于基板而制造安装基板的电子部件安装线所使用的电子部件安装用装置,以通过夹紧机构使相对的两边的侧端部在上下方向上被限制位置的矩形状的基板3为对象,具有执行电子部件安装用的预定的作业即部件安装作业的功能。Next, embodiments of the present utility model will be described with reference to the drawings. First, the overall structure of the component mounting apparatus 1 will be described with reference to FIGS. 1 to 4 . The component mounting device 1 is an electronic component mounting device used for mounting electronic components on a substrate to manufacture an electronic component mounting line for mounting the substrate. The rectangular substrate 3 serves as a target, and has a function of performing component mounting work, which is a predetermined work for mounting electronic components.

在图1中,在基座1a的中央部沿着X方向(基板传送方向)配置基板传送机构2。基板传送机构2传送从上游侧送入的矩形状的基板3,并且具有将基板3定位于以下说明的部件安装机构的安装作业位置的功能,而且具有并行配置的两条传送轨道2a。在基板传送机构2的中央部具有用于下支撑所送入的基板3的基板下支撑机构2c、以及从上方按压并夹紧通过基板下支撑机构2c顶起的基板3的相对的两边的侧端部的按压构件2b。In FIG. 1 , a substrate transfer mechanism 2 is disposed along the X direction (substrate transfer direction) at the central portion of a susceptor 1 a. The substrate conveying mechanism 2 conveys the rectangular substrate 3 fed from the upstream side, has a function of positioning the substrate 3 at the mounting operation position of the component mounting mechanism described below, and has two conveying rails 2 a arranged in parallel. In the central portion of the substrate conveying mechanism 2, there is a substrate lower support mechanism 2c for lowering the substrate 3 that is carried in, and the sides that press and clamp the opposite sides of the substrate 3 lifted up by the substrate lower support mechanism 2c from above. The pressing member 2b at the end.

在基板传送机构2的两侧配置有供给安装对象的电子部件的部件供给部4。在部件供给部4并列配置有多个带式送料器5,带式送料器5具有将保持于输送带的部件间隔送到以下说明的部件安装机构的取出位置的功能。在基座1a上面的X方向的一端部上配置有Y轴移动台6,在Y轴移动台6连接有沿着Y方向可自由滑动的两台X轴移动台7。在X轴移动台7分别安装有沿着X方向可自由滑动的、与激光位移计10一体移动的安装头8。Component supply units 4 for supplying electronic components to be mounted are arranged on both sides of the substrate conveyance mechanism 2 . A plurality of tape feeders 5 are arranged in parallel in the component supply unit 4 , and the tape feeders 5 have a function of delivering components held on the conveyor belt to a take-out position of a component mounting mechanism described below at intervals. A Y-axis moving table 6 is disposed on one end portion of the upper surface of the base 1 a in the X direction, and two X-axis moving tables 7 are connected to the Y-axis moving table 6 , which can slide freely along the Y direction. Mounting heads 8 that are slidable along the X direction and that move integrally with the laser displacement gauge 10 are attached to the X-axis moving tables 7 .

安装头8为由多个单位保持头9构成的多连型头,通过安装于单位保持头9下端部的吸附嘴9a(参照图4)从带式送料器5真空吸附而保持安装对象的电子部件14。Y轴移动台6以及X轴移动台7构成使安装头8移动的头移动机构。通过驱动头移动机构,安装头8在部件供给部4与定位于基板传送机构2的基板3之间移动,通过在基板3上升降安装头8,将保持的电子部件14安装于基板3。The mounting head 8 is a multi-connected head composed of a plurality of unit holding heads 9, and holds the electronics to be mounted by vacuum suction from the tape feeder 5 through the suction nozzle 9a (refer to FIG. 4 ) installed at the lower end of the unit holding head 9. Part 14. The Y-axis moving table 6 and the X-axis moving table 7 constitute a head moving mechanism for moving the mounting head 8 . By driving the head moving mechanism, the mounting head 8 moves between the component supply unit 4 and the substrate 3 positioned on the substrate transfer mechanism 2 , and the electronic component 14 held is mounted on the substrate 3 by lifting the mounting head 8 on the substrate 3 .

使安装头8以及安装头8移动的头移动机构构成从部件供给部4取出部件而安装于基板3的部件安装机构。而且,在电子部件安装用装置中,该部件安装机构以及基板传送机构2成为作业动作机构,通过使作业头即安装头8相对于基板3上作业被执行的作业位置升降而执行部件安装用的预定的作业。The head moving mechanism that moves the mounting head 8 and the mounting head 8 constitutes a component mounting mechanism that takes out components from the component supply unit 4 and mounts them on the substrate 3 . In addition, in the electronic component mounting device, the component mounting mechanism and the substrate conveying mechanism 2 serve as a working operation mechanism, and the mounting head 8, which is the working head, is raised and lowered relative to the working position on the substrate 3 where the work is performed, so that the component mounting is performed. Scheduled jobs.

在X轴移动台7的下面分别安装有与安装头8一体移动的基板识别照相机11。通过驱动头移动机构使基板识别照相机11向保持于基板传送机构2的基板3的上方移动,基板识别照相机11拍摄形成于基板3的识别标记。在部件供给部4与基板传送机构2之间的安装头8的移动路径配置有部件识别照相机12、吸附嘴容纳部13。通过进行从部件供给部4取出了部件的安装头8沿着预定方向通过部件识别照相机12上方的扫描动作,部件识别照相机12拍摄保持于安装头8的状态的部件。在吸附嘴容纳部13中与部件种类对应而容纳保持有多个安装于单位保持头9的吸附嘴9a。通过安装头8进入吸附嘴容纳部13而进行吸附嘴交换动作,能够与部件种类对应而交换安装于单位保持头9的吸附嘴9a。Board recognition cameras 11 that move integrally with the mounting heads 8 are mounted on the lower surfaces of the X-axis moving tables 7 . The substrate recognition camera 11 is moved above the substrate 3 held by the substrate conveyance mechanism 2 by driving the head moving mechanism, and the substrate recognition camera 11 takes an image of the recognition mark formed on the substrate 3 . A component recognition camera 12 and a suction nozzle accommodating portion 13 are arranged on a moving path of the mounting head 8 between the component supply unit 4 and the substrate transfer mechanism 2 . The component recognition camera 12 takes an image of the component held by the mounting head 8 by performing a scanning operation in which the mounting head 8 that has taken out the component from the component supply unit 4 passes above the component recognition camera 12 in a predetermined direction. A plurality of suction nozzles 9 a attached to the unit holding head 9 are housed and held in the suction nozzle housing portion 13 corresponding to the type of components. When the mounting head 8 enters the nozzle accommodating portion 13 to perform a nozzle exchange operation, the nozzles 9a mounted on the unit holding head 9 can be exchanged according to the type of parts.

参照图2、图3(a)和3(b)说明基板传送机构2的构成以及功能。如图2所示,基板传送机构2由并行配置的两条传送轨道2a构成,且在传送轨道2a的内侧沿着传送方向设置有输送机机构20。通过在基板3的两侧端部与输送机机构20的上面抵接的状态下驱动输送机机构20,基板3沿着基板传送方向被传送。在基板传送机构2的中央部,与部件安装机构的作业位置对应而配置有基板下支撑机构2c。The configuration and function of the substrate transfer mechanism 2 will be described with reference to FIG. 2 , and FIGS. 3( a ) and 3 ( b ). As shown in FIG. 2 , the substrate transfer mechanism 2 is composed of two transfer rails 2 a arranged in parallel, and a conveyor mechanism 20 is provided inside the transfer rails 2 a along the transfer direction. By driving the conveyor mechanism 20 in a state where both end portions of the substrate 3 are in contact with the upper surface of the conveyor mechanism 20 , the substrate 3 is conveyed along the substrate conveyance direction. In the central portion of the substrate transfer mechanism 2, a substrate lower support mechanism 2c is arranged corresponding to the working position of the component mounting mechanism.

基板下支撑机构2c构成为通过升降机构23使水平的板状的基底部21升降(箭头a),并且在基底部21的上面装配有从下面侧支撑基板3的下支撑框、下支撑栓等下支撑构件(图示省略)。在基底部21的两侧端部竖立设置有夹紧构件22,并且通过驱动升降机构23使得夹紧构件22升降从而相对于按压构件2b的下面的位置限制面2d进退。由此,夹入基板3的相对的两边的侧端部而夹紧固定,能够在上下方向上进行位置限制。因此,升降机构23、基底部21、夹紧构件22以及按压构件2b构成将基板3的相对的两边的侧端部在上下方向上进行位置限制的夹紧机构。The substrate lower support mechanism 2c is configured to raise and lower the horizontal plate-shaped base part 21 (arrow a) by the elevating mechanism 23, and a lower support frame for supporting the substrate 3 from the lower side, a lower support pin, etc. are mounted on the upper surface of the base part 21. Lower support member (illustration omitted). Clamping members 22 are vertically provided on both side ends of the base portion 21 , and the clamping members 22 are raised and lowered by driving the elevating mechanism 23 to advance and retreat relative to the lower position regulating surface 2 d of the pressing member 2 b. Thereby, the side end parts of the two opposing sides of the board|substrate 3 are sandwiched and clamped and fixed, and positional regulation can be performed in an up-down direction. Therefore, the elevating mechanism 23 , the base portion 21 , the clamp member 22 , and the pressing member 2 b constitute a clamp mechanism that restricts the position of the side ends of the opposite sides of the substrate 3 in the vertical direction.

图3(a)表示从上游侧交接到基板传送机构2的基板3通过输送机机构20支撑相对的两边的侧端部而传送到基板下支撑机构2c的状态。在该状态下,基板3维持该工序之前的因热经历、加工外力等引起的翘曲变形状态,在所示的例子中,成为向上凸的单纯的上翘曲变形。图3(b)表示为了夹紧基板3的两侧端部而使基板下支撑机构2c动作的状态。即,通过驱动升降机构23使基底部21上升(箭头b),与夹紧构件22一起上升(箭头c),由此基板3的两侧端部夹入夹紧构件22的上端面与位置限制面2d之间而被夹紧固定。3( a ) shows a state where the substrate 3 delivered to the substrate transfer mechanism 2 from the upstream side is conveyed to the substrate lower support mechanism 2 c by supporting the side ends of opposite sides by the conveyor mechanism 20 . In this state, the substrate 3 maintains the warped deformation state caused by the heat history, processing external force, etc. before the process, and in the example shown, becomes a simple upward warped deformation that is convex upward. FIG. 3( b ) shows a state in which the substrate lower support mechanism 2 c is operated to clamp both side ends of the substrate 3 . That is, by driving the elevating mechanism 23, the base part 21 is raised (arrow b), and rises together with the clamping member 22 (arrow c), so that both side ends of the substrate 3 are sandwiched by the upper end surface of the clamping member 22 and positionally restricted. It is clamped and fixed between the faces 2d.

而且,由于该夹紧固定,基板3的翘曲变形状态发生变化。即,基板3的两侧端部通过夹紧构件22被按压到平面形状的位置限制面2d,故在该范围内基板3成为没有面位移的平面状态。而且,在该平面范围过渡到基板3的本来的上翘曲变形范围的部分中,呈现出表示向上凹的上曲率面R1与向上凸的下曲率面R2边界的曲线PI。该曲线PI呈现于基板3的两侧端部,并且图3(b)所示的夹紧固定状态下的基板3的翘曲变形在上述两个曲线PI所夹着的中间范围内呈向上凸的上翘曲形状。Furthermore, due to this clamping and fixing, the warped deformation state of the substrate 3 changes. That is, since both end portions of the substrate 3 are pressed against the planar position regulating surface 2d by the clamp member 22, the substrate 3 becomes a planar state without plane displacement within this range. In addition, a curve PI representing the boundary between the upwardly concave upper curvature surface R1 and the upwardly convex lower curvature surface R2 appears in the portion where the planar range transitions to the original upward warping deformation range of the substrate 3 . This curve PI appears on both sides of the substrate 3, and the warping deformation of the substrate 3 in the clamped and fixed state shown in FIG. up-warped shape.

接着参照图4、图5说明安装头8的构成以及功能。如图4所示,安装头8具有多个(在此为四个)单位保持头9,并且在各单位保持头9的下端部以可自由装卸的方式安装有吸附嘴9a。通过使安装头8所具有的真空吸引系统动作而从吸附嘴9a真空吸引,吸附嘴9a吸附保持电子部件14。由吸附嘴9a保持电子部件14的安装头8通过进行在基板3上移动而使吸附嘴9a升降的部件安装动作,从而在基板3的部件安装点安装有电子部件14。Next, the configuration and functions of the mounting head 8 will be described with reference to FIGS. 4 and 5 . As shown in FIG. 4 , mounting head 8 has a plurality of (here, four) unit holding heads 9 , and suction nozzles 9 a are detachably attached to the lower ends of each unit holding heads 9 . The electronic component 14 is sucked and held by the suction nozzle 9 a by vacuum suction from the suction nozzle 9 a by operating the vacuum suction system included in the mounting head 8 . The mounting head 8 holding the electronic component 14 by the suction nozzle 9 a moves on the substrate 3 to move the suction nozzle 9 a up and down to mount the electronic component 14 on the component mounting point of the substrate 3 .

在该部件安装动作中,由于基板3为产生了翘曲变形的状态,故如图5所示,上面3a中的部件安装点的高度位置H1与假想基板3为完全的平面状态的情况的正规高度位置H0相差因翘曲变形引起的高度误差ΔH。若忽视该高度误差ΔH而将正规高度位置H0作为安装基准高度由单位保持头9进行部件安装动作,则在使保持了电子部件14的吸附嘴9a相对于上面3a下降时,会以高度误差ΔH压入基板3并承受过大的押圧负荷,从而对电子部件14造成损坏。In this component mounting operation, since the substrate 3 is warped and deformed, as shown in FIG. The height position H0 differs by the height error ΔH caused by warping deformation. If this height error ΔH is neglected and the normal height position H0 is used as the mounting reference height to carry out component mounting operation by the unit holding head 9, when the suction nozzle 9a holding the electronic component 14 is lowered relative to the upper surface 3a, the height error ΔH will be increased. The electronic component 14 is damaged by pressing into the substrate 3 and receiving an excessive pressure load.

另外,相反而言在高度位置H1低于正规高度位置H0而高度误差ΔH为负值的情况下,在部件安装动作中电子部件14在落地到上面3a之前停止吸附嘴9a的下降,在该状态下吸附嘴9a的吸附保持被解除,故容易产生因电子部件14的落下引起的安装位置的位置偏差。为了防止因上述基板3的翘曲变形引起的部件安装作业的不良情况,在本实施方式中,在部件安装作业之前测定基板3的翘曲变形的状态,校正部件安装高度即部件安装点的高度位置。In addition, conversely, when the height position H1 is lower than the regular height position H0 and the height error ΔH is a negative value, the electronic component 14 stops the descent of the suction nozzle 9a before landing on the upper surface 3a during the component mounting operation. Since the suction and holding of the lower suction nozzle 9a is released, positional deviation of the mounting position due to the falling of the electronic component 14 is likely to occur. In order to prevent the failure of the component mounting work due to the above-mentioned warping deformation of the substrate 3, in this embodiment, the state of the warping deformation of the substrate 3 is measured before the component mounting operation, and the component mounting height, that is, the height of the component mounting point is corrected. Location.

该翘曲变形状态的测定使用以与安装头8一体地自由移动的方式设置的激光位移计10来进行。即,如图4所示,在安装头8以测定方向朝向下面侧的方式设置有激光位移计10,并且通过使安装头8移动,能够使激光位移计10位于被基板传送机构2定位的基板3的任意的测定点Pm的上方。通过高度测定部34(参照图8)接收由激光位移计10获取的测定信号,求出对于测定点Pm的测定高度位置Hm。而且,基于以预先设定的多个测定点Pm为对象而求出的多个测定高度位置Hm的数据,生成使用数学表达式近似翘曲变形状态的基板3的上面3a的曲面形状的曲面模型,在实际的部件安装作业中,按作为对象的部件安装点来使用曲面模型算出部件安装高度。The measurement of this warpage deformation state is performed using the laser displacement meter 10 installed so that it can move integrally with the mounting head 8 . That is, as shown in FIG. 4 , the laser displacement gauge 10 is provided on the mounting head 8 so that the measurement direction faces the lower side, and by moving the mounting head 8, the laser displacement gauge 10 can be positioned on the substrate positioned by the substrate conveying mechanism 2. 3 above any measurement point Pm. The measurement signal acquired by the laser displacement gauge 10 is received by the height measurement part 34 (refer FIG. 8), and the measurement height position Hm with respect to the measurement point Pm is calculated|required. Then, based on the data of a plurality of measurement height positions Hm obtained for a plurality of preset measurement points Pm, a curved surface model is generated that approximates the curved surface shape of the upper surface 3a of the substrate 3 in a state of warping deformation using a mathematical expression. , in the actual component mounting work, the component mounting height is calculated using the surface model for each target component mounting point.

参照图6说明以上述目的使用的曲面模型。图6表示曲面模型3*,用于近似基板3的上面的三维形状。曲面模型3*为以下述以及图6所示的四次式(1)表示的四次曲面模型,并且通过表示作业位置3*a的水平方向位置的X坐标以及Y坐标的四次式求出表示基板3的表面中的任意作业位置3*a的高度位置的Z坐标。即,通过规定四次式(1)中的十五个系数a~o,确定四次曲面模型。z=ax4+bx3y+cx2y2+dxy3+ey4+fx3+gx2y+hxy2+iy3+jx2+kxy+ly2+mx+ny+o····(1)A curved surface model used for the above purpose will be described with reference to FIG. 6 . FIG. 6 shows a curved surface model 3 * for approximating the three-dimensional shape of the upper surface of the substrate 3 . The curved surface model 3* is a quartic surface model represented by the quartic equation (1) shown below and shown in FIG. Z-coordinate indicating the height position of an arbitrary working position 3*a on the surface of the substrate 3 . That is, by specifying the fifteen coefficients a~o in the quartic equation (1), the quartic surface model is determined. z=ax 4 +bx 3 y+cx 2 y 2 +dxy 3 +ey 4 +fx 3 +gx 2 y+hxy 2 +iy 3 +jx 2 +kxy+ly 2 +mx+ny+o... (1)

如上述那样,在两侧端部被夹紧固定而被限制位置的状态下的基板3的翘曲形状在两个曲线PI所夹着的中间范围呈向上凸的上翘曲形状,故作为曲面模型采用以上述四次式表示的四次曲面模型是恰当的。而且,在求出部件安装高度时,通过四次式(1)求出与各部件安装点的位置坐标(x,y)对应的z坐标值,作为该部件安装点的部件安装高度。由此,也考虑在现有技术使用的二次曲面模型的近似方法中被忽视的拐点附近的形状变化,能够算出更高的近似精度的部件安装高度。As mentioned above, the warping shape of the substrate 3 in the state where both ends are clamped and fixed and the position is restricted is an upwardly convex warping shape in the middle range sandwiched by the two curves PI, so it is a curved surface. It is appropriate for the model to adopt the quartic surface model represented by the above quartic formula. Then, when obtaining the component mounting height, the z-coordinate value corresponding to the position coordinates (x, y) of each component mounting point is obtained from the quaternary equation (1) as the component mounting height of the component mounting point. Thereby, the shape change in the vicinity of the inflection point, which was neglected in the approximation method of the quadric surface model used in the prior art, is also taken into consideration, and the component mounting height with higher approximation accuracy can be calculated.

接着参照图7(a)和7(b)说明为了规定四次式(1)中的十五个系数a~o而使用的高度数据。如图7(a)所示,由基板传送机构2传送且被基板下支撑机构2c定位保持的基板3分成如下范围来考虑:表示基板3通过夹紧构件22按压于两个按压构件2b的位置限制面2d(参照图3(a)和3(b))而位置被限制的范围的位置限制范围3f,以及位于被位置限制范围3f夹着的并产生翘曲变形的翘曲变形范围3c。Next, altitude data used to define the fifteen coefficients a to o in the quartic equation (1) will be described with reference to FIGS. 7( a ) and 7 ( b ). As shown in FIG. 7(a), the substrate 3 conveyed by the substrate conveying mechanism 2 and positioned and held by the substrate lower support mechanism 2c is divided into the following ranges for consideration: Indicates that the substrate 3 is pressed by the clamping member 22 to the position of the two pressing members 2b A position restriction range 3f in which the position is restricted by the restriction surface 2d (see FIGS. 3( a ) and 3 ( b )), and a warping deformation range 3 c sandwiched between the position restriction range 3 f and causing warping deformation.

在本实施方式中,在两侧的位置限制范围3f内分别设定有五个固定高度数据点Pf(i)(i=1~5,i=6~10),在翘曲变形范围3c内设定有以3行5列的格子状排列的测定点Pm(i,j)(i=1~5,j=1~3)。对于上述点中的固定高度数据点Pf(i),由于设定在固定的按压构件2b的位置限制面2d,故为与基板3本身的固有的翘曲变形无关而总是视为一定的固定高度数据。因此,若作为最初的固定数据赋予该高度位置,则以后不必进行测定。即,为了确定图6所示的曲面模型,在各个基板3上仅以属于翘曲变形范围3c的测定点Pm(i,j)为对象进行激光位移计10的高度测定即可。In this embodiment, five fixed height data points Pf(i) (i=1~5, i=6~10) are respectively set in the position limitation range 3f on both sides, and within the warping deformation range 3c Measurement points Pm(i, j) (i=1 to 5, j=1 to 3) arranged in a lattice form of 3 rows and 5 columns are set. Among the above points, the fixed height data point Pf(i) is set on the position limiting surface 2d of the fixed pressing member 2b, so it is always considered to be fixed regardless of the inherent warping deformation of the substrate 3 itself. altitude data. Therefore, if this height position is given as the first fixed data, it is not necessary to perform measurement thereafter. That is, in order to determine the curved surface model shown in FIG. 6 , it is only necessary to measure the height of the laser displacement gauge 10 on each substrate 3 only at the measurement point Pm(i,j) belonging to the warpage deformation range 3c.

由此,如图7(b)所示,求出表示位置限制范围3f内的固定高度数据点Pf(i)的高度位置的固定高度位置Hf(i)(i=1~5,i=6~10)和表示翘曲变形范围3c内的测定点Pm(i,j)的高度位置的测定高度位置Hm(i,j)(i=1~5,j=1~3)。固定高度位置Hf(i)为表示夹紧机构的位置限制面2d的高度位置的高度数据,测定高度位置Hm(i,j)为测定被限制位置的基板3的上面3a所设定的预定的测定点Pm的高度位置而求出的高度数据。Thus, as shown in Figure 7(b), the fixed height position Hf(i) (i=1~5, i=6 ~10) and the measurement height position Hm(i, j) (i=1~5, j=1~3) representing the height position of the measurement point Pm(i, j) within the warpage deformation range 3c. The fixed height position Hf(i) is the height data indicating the height position of the position limiting surface 2d of the clamping mechanism, and the measured height position Hm(i, j) is a predetermined value set by measuring the upper surface 3a of the substrate 3 at the restricted position. Height data obtained by measuring the height position of the point Pm.

在此,虽然求出共计二十五点的高度数据,但对于其中的十个固定高度位置Hf(i),不进行激光位移计10的实际的高度测定而进行数据获取,故能够大幅缩短高度测定所需的时间。此外,为了确定四次式(1)所具有的十五个未知的系数,并非需要二十五点的高度数据的全部,故适当取舍上述高度数据而使用。Here, although a total of twenty-five points of height data are obtained, for ten of the fixed height positions Hf(i), data acquisition is performed without actual height measurement by the laser displacement meter 10, so the height can be greatly shortened. Measure the time required. In addition, in order to determine the fifteen unknown coefficients of the quartic equation (1), not all of the height data of twenty-five points is required, so the above-mentioned height data is appropriately selected and used.

而且,在基板3上在相当于侧端部的位置限制范围3f存在切口部、开口部等不连续部分,若实际通过激光位移计10进行高度测定,则产生不能获取正确表示上面3a的高度位置的高度数据的情况。即使在上述情况下,如本实施方式那样,通过使用作为预先固定数据赋予的固定高度位置Hf(i),也能够获取用于求出总是上面3a的曲面形状的适当的高度数据,能够排除因不连续部分错误而作为高度测定的对象的近似误差。Moreover, there are discontinuous parts such as notches and openings in the position restriction range 3f corresponding to the side end on the substrate 3, and if the height measurement is actually performed by the laser displacement meter 10, it may not be possible to obtain a height position that accurately represents the upper surface 3a. The case of height data. Even in the above case, as in the present embodiment, by using the fixed height position Hf(i) provided as fixed data in advance, it is possible to obtain appropriate height data for obtaining the curved surface shape of the upper surface 3a at all times, and it is possible to exclude Approximation error that is the object of height measurement due to discontinuity error.

接着参照图8说明控制系统的结构。作业控制部30通过基于存储部31所存储的各种程序和数据来控制机构驱动部32,从而执行预定的作业动作。即,通过机构驱动部32被作业控制部30控制而驱动作业动作机构33即前述的部件安装机构以及基板传送机构2,预定的作业即部件安装作业被执行。Next, the configuration of the control system will be described with reference to FIG. 8 . The work control unit 30 controls the mechanism drive unit 32 based on various programs and data stored in the storage unit 31 to execute predetermined work operations. That is, when the mechanism driving unit 32 is controlled by the operation control unit 30 to drive the operation operation mechanism 33 , that is, the aforementioned component mounting mechanism and the substrate transfer mechanism 2 , a predetermined operation, that is, the component mounting operation is performed.

在存储部31存储有作业动作程序31a、限制面高度数据31b、高度测定数据31c、曲面模型数据31d。作业动作程序31a为用于执行部件安装作业的动作程序。限制面高度数据31b为图7所示的固定高度位置Hf(i),并且作为固定高度数据存储有以当初的位置限制面2d为对象而进行高度测定的结果。即,存储部31存储夹紧机构的位置限制面2d的高度位置所表示的限制面高度数据31b。高度测定数据31c为图7所示的测定高度位置Hm(i,j),存储有按各基板3分别测定的数据。曲面模型数据31d是基于限制面高度数据31b以及高度测定数据31c通过运算而求出的、近似表示基板3的翘曲形状的曲面模型的数据。The storage unit 31 stores a work operation program 31a, regulation surface height data 31b, height measurement data 31c, and curved surface model data 31d. The work operation program 31a is an operation program for executing component mounting work. The regulation surface height data 31b is fixed height position Hf(i) shown in FIG. That is, the storage unit 31 stores the regulating surface height data 31b indicated by the height position of the position regulating surface 2d of the clamp mechanism. The height measurement data 31 c is the measured height position Hm(i, j) shown in FIG. 7 , and data measured for each substrate 3 is stored. The curved surface model data 31d is data of a curved surface model approximately representing the warped shape of the substrate 3 obtained by calculation based on the restriction surface height data 31b and the height measurement data 31c.

高度测定部34基于以各基板3为对象并通过激光位移计10进行的高度测定结果,进行求出表示各测定点Pm的高度位置的高度测定数据31c的处理。因此,高度测定部34以及激光位移计10构成高度测定单元,测定被限制位置的基板3的上面所设定的预定的测定点Pm的高度位置而求出高度测定数据。所求出的高度测定结果作为高度测定数据31c存储于存储部31。The height measurement unit 34 performs a process of obtaining height measurement data 31c indicating the height position of each measurement point Pm based on the height measurement results performed by the laser displacement gauge 10 for each substrate 3 . Therefore, the height measurement unit 34 and the laser displacement gauge 10 constitute a height measurement unit, and measure the height position of a predetermined measurement point Pm set on the upper surface of the substrate 3 whose position is restricted to obtain height measurement data. The obtained height measurement results are stored in the storage unit 31 as height measurement data 31c.

翘曲变形计算部35基于限制面高度数据31b以及高度测定数据31c,进行求出曲面模型的运算处理,该曲面模型为由数学表达式(在此为四次曲面式)近似表示在两侧端部被夹紧固定而被限制位置的状态下的基板3的翘曲形状。所求出的曲面模型作为曲面模型数据31d存储于存储部31。而且,在使作业头(在此为安装头8)执行预定的作业(在此为部件安装作业)时,作业控制部30基于使用曲面模型数据31d而导出的作业位置的高度位置,控制作业动作机构33。The warpage calculation unit 35 performs calculation processing to obtain a curved surface model approximately represented by a mathematical expression (here, a quartic surface expression) on both sides based on the restriction surface height data 31b and the height measurement data 31c. The warped shape of the substrate 3 in a state where the portion is clamped and fixed and the position is restricted. The obtained curved surface model is stored in the storage unit 31 as curved surface model data 31d. Furthermore, when causing the work head (here, the mounting head 8) to perform a predetermined work (here, the component mounting work), the work control unit 30 controls the work movement based on the height position of the work position derived using the curved surface model data 31d. agency33.

接着安装图9的流程说明在部件安装装置1中以被限制位置的基板3为对象而执行电子部件安装用的预定作业的电子部件安装用装置中的作业执行方法。首先,将表示夹紧机构的位置限制面的高度位置的限制面高度数据31b存储于存储部31(ST1)(存储工序)。即,在按压构件2b的位置限制面2d上测定固定高度数据点Pf(i)的高度位置,从而求出固定高度位置Hf(i)来作为限制面高度数据31b。Next, the flow of FIG. 9 will describe the job execution method in the electronic component mounting device that executes the scheduled job for electronic component mounting on the substrate 3 whose position is restricted in the component mounting device 1 . First, the regulation surface height data 31b indicating the height position of the position regulation surface of the clamp mechanism is stored in the storage unit 31 (ST1) (storage step). That is, the height position of the fixed height data point Pf(i) is measured on the position regulating surface 2d of the pressing member 2b to obtain the fixed height position Hf(i) as the regulating surface height data 31b.

之后,若作业已开始,则使安装头8在被基板下支撑机构2c传送的基板3的上方移动,通过激光位移计10顺次测定被夹紧机构限制位置的基板3的上面所设定的预定的测定点Pm的高度位置,从而求出高度测定数据31c(ST2)(高度测定工序)。此时,由于与固定高度数据点Pf(i)的高度位置相当的固定高度位置Hf(i)已作为限制面高度数据31b而已知,故不必进行测定,能够有效地执行高度测定。Afterwards, if the operation has started, the mounting head 8 is moved above the substrate 3 conveyed by the substrate lower support mechanism 2c, and the upper surface of the substrate 3, which is limited by the clamping mechanism, is sequentially measured by the laser displacement meter 10. The predetermined height position of the point Pm is measured to obtain the height measurement data 31c (ST2) (height measurement step). At this time, since the fixed height position Hf(i) corresponding to the height position of the fixed height data point Pf(i) is already known as the regulation surface height data 31b, it is not necessary to perform measurement, and the height measurement can be efficiently performed.

接着,通过翘曲变形计算部35基于存储部31所存储的限制面高度数据31b以及高度测定数据31c进行运算处理,求出由数学表达式近似表示在被夹紧机构限制位置的状态下的基板3的翘曲形状的曲面模型(ST3)(翘曲形状计算工序)。由此,求出图6所示的四次曲面模型,作为曲面模型数据31d存储于存储部31。Next, the warpage calculation unit 35 performs arithmetic processing based on the height data 31b of the control surface and the height measurement data 31c stored in the storage unit 31, and obtains the state of the substrate in the state of being restricted by the clamping mechanism by a mathematical expression. Curved surface model of 3 (ST3) (warped shape calculation step). As a result, the quartic surface model shown in FIG. 6 is obtained and stored in the storage unit 31 as curved surface model data 31d.

接着,通过四次曲面模型导出作业位置的高度位置(ST4)。即,通过将图6所示的曲面模型3*的任意的作业位置3*a中的x坐标、y坐标代入到四次曲面模型,从而导出该作业位置3*a中的z坐标作为该作业位置的高度位置。此时,由于使用四次曲面模型作为用于高度位置的导出的曲面模型,故对于在两侧端部被夹紧机构位置限制的状态下的基板3中的拐点附近,也能够确保良好的曲面近似精度。Next, the height position of the working position is derived from the quartic surface model ( ST4 ). That is, by substituting the x-coordinates and y-coordinates in an arbitrary work position 3*a of the curved surface model 3* shown in FIG. 6 into the quartic surface model, the z-coordinate in the work position 3*a is derived as the work The height position of the position. At this time, since a quartic surface model is used as the surface model for deriving the height position, a good curved surface can be ensured also for the vicinity of the inflection point in the substrate 3 in a state where both side ends are restricted by the position of the clamp mechanism. Approximate precision.

而且,通过基于导出的高度位置来控制作业动作机构,使作业头执行作业(ST5)(作业控制工序)。即,使通过吸附嘴9a保持了电子部件14的安装头8在基板3的上方移动,基于导出的高度位置使吸附嘴9a相对于上面3a下降,从而执行将电子部件14安装于部件安装点的部件安装作业。由于在该部件安装中用于安装电子部件14的高度位置以高精度被近似校正,故能够防止因安装动作中的高度位置的不良引起的不良情况。Then, the work head is caused to perform work by controlling the work operation mechanism based on the derived height position (ST5) (work control step). That is, the mounting head 8 holding the electronic component 14 by the suction nozzle 9a is moved above the substrate 3, and the suction nozzle 9a is lowered with respect to the upper surface 3a based on the derived height position, whereby the electronic component 14 is mounted on the component mounting point. Component installation work. Since the height position for mounting the electronic component 14 is approximately corrected with high precision in this component mounting, it is possible to prevent problems caused by a defect in the height position during the mounting operation.

如上述说明那样,本实施方式所示的电子部件安装用装置以及电子部件安装用装置中的作业执行方法如下:以通过夹紧机构使两边的侧端部在上下方向上被限制位置的矩形状的基板3为对象,在通过曲面模型近似基板3的翘曲变形而校正作业高度的方式中,基于测定基板3的上面3a所设定的预定的测定点Pm的高度而求出的高度测定数据31c和预先求出夹紧机构的位置限制面2d的高度而存储的限制面高度数据31b来运算曲面模型。由此,能够使用高次的曲面模型而使近似精度提高,并且能够使必要的高度测定点的数量减少而缩短高度测定的所需时间,能够同时提高作业高度的近似精度和生产性。As described above, the electronic component mounting device and the electronic component mounting device shown in the present embodiment have a work execution method as follows: a rectangular shape with side ends on both sides restricted in the vertical direction by a clamp mechanism In the method of correcting the working height by approximating the warping deformation of the substrate 3 with a curved surface model, based on the height measurement data obtained by measuring the height of the predetermined measurement point Pm set on the upper surface 3a of the substrate 3 31c and the regulating surface height data 31b stored in which the height of the position regulating surface 2d of the clamping mechanism is obtained in advance, and the curved surface model is calculated. Thereby, the approximation accuracy can be improved by using a high-order curved surface model, the number of required height measurement points can be reduced, the time required for height measurement can be shortened, and the approximation accuracy and productivity of the working height can be improved at the same time.

此外,在上述实施方式中,作为电子部件安装用装置示出了通过安装头8将电子部件14安装于基板3的部件安装装置1的例子,但本实用新型不仅限于部件安装装置1,只要是通过使涂布头相对基板升降而进行树脂涂布作业的树脂涂布装置等使作业头升降而执行预定作业的结构,则成为本实用新型的适用对象。In addition, in the above-mentioned embodiment, the example of the component mounting apparatus 1 which mounts the electronic component 14 on the board|substrate 3 by the mounting head 8 was shown as the apparatus for electronic component mounting, but this invention is not limited to the component mounting apparatus 1, as long as it is A resin coating device, such as a resin coating device that lifts and lowers the coating head relative to the substrate to carry out the resin coating operation, has a structure in which the operation head is raised and lowered to perform a predetermined operation, and becomes an application object of the present invention.

产业上的可利用性Industrial availability

本实用新型的电子部件安装用装置具有能够同时提高作业高度的近似精度和生产性的效果,在使作业头在基板上升降而执行作业的电子部件安装领域中有用。The electronic component mounting device of the present invention has the effect of improving the approximation accuracy and productivity of the work height at the same time, and is useful in the field of electronic component mounting in which work is performed by lifting and lowering the work head on the substrate.

Claims (2)

1. electronic unit apparatus for mounting, be limited the rectangular-shaped substrate of position as object take the side end that makes relative both sides by clamp system at above-below direction, carry out electronic unit the predetermined operation of usefulness is installed, above-mentioned electronic unit apparatus for mounting is characterised in that to have:
The operation actuating mechanism, thereby by making the operation head carry out above-mentioned operation with respect to the job position lifting that above-mentioned operation in the aforesaid substrate is performed;
Storage part, the restriction face altitude information of the height and position of the position limitation face of the above-mentioned clamp system of storage expression;
The elevation measurement unit, measure the above-mentioned substrate that is limited the position the predetermined measuring point that sets above height and position and obtain the elevation measurement data;
The warped shapes calculating part based on above-mentioned restriction face altitude information and above-mentioned elevation measurement data, is obtained the surface model by the warped shapes of the aforesaid substrate of mathematic(al) representation approximate representation under the above-mentioned state that is limited the position; And
The operation control part is controlled above-mentioned operation actuating mechanism based on the height and position of the above-mentioned job position of deriving by above-mentioned surface model, thereby is made above-mentioned operation head carry out above-mentioned operation.
2. electronic unit apparatus for mounting as claimed in claim 1 is characterized in that,
The quartic surface model that above-mentioned surface model is obtained for the quarternary quantic of the X coordinate of the position of the horizontal direction of Z coordinate by representing this arbitrfary point of the height and position that will represent the arbitrfary point in the aforesaid substrate surface and Y coordinate.
CN 201220300006 2011-06-20 2012-06-20 Apparatus for mounting electronic components Expired - Fee Related CN202759740U (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011-135949 2011-06-20
JP2011135949A JP5688564B2 (en) 2011-06-20 2011-06-20 Electronic component mounting apparatus and work execution method for electronic component mounting

Publications (1)

Publication Number Publication Date
CN202759740U true CN202759740U (en) 2013-02-27

Family

ID=47673048

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 201220300006 Expired - Fee Related CN202759740U (en) 2011-06-20 2012-06-20 Apparatus for mounting electronic components

Country Status (2)

Country Link
JP (1) JP5688564B2 (en)
CN (1) CN202759740U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110637508A (en) * 2017-05-24 2019-12-31 株式会社富士 Measurement position determining device
CN111434202A (en) * 2017-12-07 2020-07-17 雅马哈发动机株式会社 Work device for mounted object
CN111656882A (en) * 2018-03-07 2020-09-11 株式会社富士 Component mounting system

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105103668B (en) * 2013-03-29 2018-09-18 富士机械制造株式会社 Production equipment
CN105532083B (en) * 2013-12-11 2018-08-28 雅马哈发动机株式会社 Element fixing apparatus
JPWO2016125780A1 (en) * 2015-02-06 2017-08-31 シャープ株式会社 Magnetic measuring device, magnetic measuring unit, magnetic measuring system, and magnetic measuring method
JP6582240B2 (en) * 2016-02-23 2019-10-02 パナソニックIpマネジメント株式会社 Electronic component mounting method and electronic component mounting apparatus
JP6582239B2 (en) * 2016-02-23 2019-10-02 パナソニックIpマネジメント株式会社 Electronic component mounting method and electronic component mounting apparatus
JP6804905B2 (en) * 2016-09-09 2020-12-23 ヤマハ発動機株式会社 Board work equipment
US20230392921A1 (en) 2020-10-19 2023-12-07 Shinkawa Ltd. Measurement device, measurement method, and bonding system

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000269692A (en) * 1999-03-16 2000-09-29 Matsushita Electric Ind Co Ltd Method for detecting warpage of substrate, and part- fitting method and device using the same
JP5153998B2 (en) * 2005-02-25 2013-02-27 Hoya株式会社 Method for manufacturing transparent substrate for mask blank, method for manufacturing mask blank, method for manufacturing exposure mask, and method for manufacturing semiconductor device
US7809461B2 (en) * 2005-11-29 2010-10-05 Panasonic Corporation Working apparatus and working method for circuit board
JP2008182111A (en) * 2007-01-25 2008-08-07 Juki Corp Substrate fixing device
JP4912246B2 (en) * 2007-07-20 2012-04-11 株式会社日立ハイテクインスツルメンツ Electronic component mounting method and electronic component mounting apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110637508A (en) * 2017-05-24 2019-12-31 株式会社富士 Measurement position determining device
CN111434202A (en) * 2017-12-07 2020-07-17 雅马哈发动机株式会社 Work device for mounted object
CN111434202B (en) * 2017-12-07 2021-06-22 雅马哈发动机株式会社 Work device for mounted object
CN111656882A (en) * 2018-03-07 2020-09-11 株式会社富士 Component mounting system

Also Published As

Publication number Publication date
JP5688564B2 (en) 2015-03-25
JP2013004828A (en) 2013-01-07

Similar Documents

Publication Publication Date Title
CN202759740U (en) Apparatus for mounting electronic components
CN101283636B (en) Electronic component mounting system and electronic component mounting method
JP5387540B2 (en) Electronic component mounting apparatus and work execution method for electronic component mounting
CN101317502B (en) Working device and working method for circuit board
KR101972363B1 (en) Mounting device and measurement method
CN101662926B (en) Method for controlling device for mounting electronic component
KR20070095351A (en) Electronic component mounting system and electronic component mounting method
CN105870038B (en) Assembly machine and method for assembling a shell-less chip to a carrier
KR20130118195A (en) Paste applying apparatus, paste applying method, and die bonder
CN103770450A (en) Silk-screen printing device and setting method of substrate clamping position of the same
JP5845421B2 (en) Electronic component mounting apparatus and transfer film thickness detection method
JP2017098287A (en) Component mounter and wafer component suction height adjustment method of component mounter
JP5371590B2 (en) Mounting processing equipment and display board module assembly line
CN116190295B (en) Semiconductor component transfer device and transfer method
TWI776680B (en) Mounting apparatus and parallelism detection method in mounting apparatus
CN112331582B (en) Chip mounting apparatus and method for manufacturing semiconductor device
JP6432043B2 (en) Method for correcting measurement position of height sensor in component mounting apparatus and component mounting apparatus
JPH06104597A (en) Electronic component mounting device
US20250008718A1 (en) Component mounting machine and method for calculating correction value
CN114364940B (en) Mounting device and parallelism detection method in mounting device
JP2011171330A (en) Component mounting apparatus and method
JPWO2017006461A1 (en) Component mounting machine and component mounting line

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20130227

Termination date: 20150620

EXPY Termination of patent right or utility model