CN202682853U - Chemical liquid debubbling device - Google Patents

Abstract

The utility model relates to a chemical liquid debubbling device, relating to a liquid debubbling device. The chemical liquid debubbling device comprises a liquid barrel, a debubbling container, a liquid feeding inlet, an air outlet, a liquid outlet, and a liquid discharging outlet, wherein the liquid feeding inlet, the air outlet and the liquid outlet are arranged at the top end of the debubbling container, the liquid discharging outlet is arranged at the bottom end of the debubbling container, the liquid barrel is hermetically connected with the liquid feeding inlet by a liquid feeding pipe, the chemical liquid debubbling device is characterized in that a pneumatic pump and a pneumatic diaphragm liquid feeding valve which are driven by compressed air are sequentially arranged on the liquid feeding pipe, an air outlet pipe is arranged on the air outlet, the liquid outlet is hermetically connected with a wet-process processing machine by a liquid outlet pipe, and a liquid discharging pipe is arranged on the liquid discharging outlet. The chemical liquid debubbling device has the beneficial effects of solving the bubble problem of chemical liquid in the pipe, and being simple to control, convenient and reliable, and convenient to overhaul.

Description

A chemical liquid defoaming device

technical field

The utility model relates to a chemical liquid degassing device, in particular to a chemical liquid degassing device which can meet the transport requirements of non-bubbled chemical liquids in semiconductor, solar energy and LED/LCD industries and improve the online flow monitoring accuracy of chemical liquids.

Background technique

In the existing industrial manufacturing process, especially in the semiconductor, solar energy and LED/LCD industries, the addition of chemical liquid is mainly through pneumatic pumps, and the relevant valves and fittings are directly added to the tank of the liquid-requiring wet processing machine. Bubbles in the liquid affect the accuracy of the online flowmeter, resulting in deviations in the actual amount of liquid added, changes in the concentration of chemicals, and related processes that cannot be guaranteed.

Utility model content

The technical problem to be solved by the utility model is to provide a chemical liquid defoaming device that can meet the requirements of transporting the bubble-free chemical liquid in the semiconductor, solar energy and LED/LCD industries, and improve the online flow monitoring accuracy of the chemical liquid.

The technical problem solved by the utility model adopts the following technical solutions to realize:

A chemical liquid defoaming device, comprising a liquid bucket, a bubble-removing container, a liquid inlet, an exhaust port, a liquid outlet at the top of the bubble-removing container, and a liquid discharge port at the bottom of the container, the liquid bucket It is sealed and connected with the liquid inlet through the liquid inlet pipe, and it is characterized in that: a pneumatic pump driven by compressed air and a pneumatic diaphragm liquid inlet valve are sequentially arranged on the liquid inlet pipe, and a pneumatic diaphragm inlet valve is arranged on the exhaust port. An exhaust pipe, the liquid outlet is sealed and connected with the wet process machine through the liquid outlet, and a liquid discharge pipe is arranged on the liquid discharge port.

A high liquid level sensor is also provided on the outer surface of the air-removing container; a low liquid-level sensor is also provided at the bottom of the outer surface of the air-removing container; a pneumatic diaphragm liquid outlet valve is also provided on the liquid outlet pipeline; A pneumatic diaphragm exhaust valve is also provided on the exhaust pipe; a liquid discharge valve is also provided on the liquid discharge pipe; the pneumatic pump is a corrosion-resistant pneumatic pump, and the high liquid level sensor is a corrosion-resistant Corrosion high liquid level sensor; the low liquid level sensor is a corrosion-resistant low liquid level sensor.

The beneficial effects of the utility model are: the utility model solves the problem that the chemical liquid in the pipeline contains air bubbles, and the control is simple, convenient and reliable, and the maintenance is convenient.

Description of drawings

Fig. 1 is a schematic diagram of the overall structure of the utility model: a chemical liquid defoaming device.

Detailed ways

In order to make the technical means, creative features, goals and effects achieved by the utility model easy to understand, the utility model will be further elaborated below in conjunction with specific illustrations.

Embodiment: With reference to Fig. 1, a kind of chemical liquid defoaming device comprises liquid tank 1, defoaming container 4, the liquid inlet 41 that is located at defoaming container 4 tops, exhaust port 42, liquid outlet 43 and be located at The liquid discharge port 44 at the bottom, the liquid barrel 1 is sealed and connected with the liquid inlet 41 through the liquid inlet pipe 31, and the pneumatic pump 2 driven by compressed air and the pneumatic diaphragm liquid inlet valve 3 are sequentially arranged on the liquid inlet pipe 31. The exhaust port 42 is provided with an exhaust pipe 51 , the liquid outlet 43 is sealed and connected with the wet processor through the liquid outlet pipe 61 , and the liquid outlet 44 is provided with a liquid discharge pipe 71 .

A high liquid level sensor 8 is provided on the outer surface of the air-removing container 4; a low liquid-level sensor 9 is provided at the bottom of the outer surface of the air-removing container 4; a pneumatic diaphragm liquid outlet valve 6 is also provided on the liquid outlet pipeline 61; A pneumatic diaphragm exhaust valve 5 is also provided on the air pipeline 51; a liquid discharge valve 7 is also provided on the liquid discharge pipe 71; the pneumatic pump 2 is a corrosion-resistant pneumatic pump, and the high liquid level sensor 8 is a corrosion-resistant high liquid level Sensor, low liquid level sensor 9 is a corrosion-resistant low liquid level sensor.

The chemical liquid is contained in the liquid tank 1, and the chemical liquid is pumped out from the liquid tank 1 through the pneumatic pump 2, and is input into the air-removing container 4 through the opened liquid inlet valve 3, and the exhaust valve 5 is opened at the same time to exhaust, and the liquid is discharged Valve 6 and drain valve 7 remain closed. At this time, the chemical liquid input into the air-removing container 4 may contain a large amount of gas, especially after the liquid tank 1 is newly replaced, the pipeline from the liquid inlet valve 3 to the liquid tank 1 contains more gas. After the chemical liquid enters the airtight air-removing container 4, due to the effect of buoyancy, the air bubbles will automatically float to the top of the airtight air-tight air-removing container 4, and be discharged into the exhaust pipe 51 through the opened exhaust valve 5, while the chemical liquid stays below, realizing Gas-liquid separation. The pneumatic pump 2 continues to work until the liquid level in the debubbling container 4 reaches the position of the high liquid level sensor 8, the exhaust valve 5 is closed, and the liquid outlet valve 6 is opened according to the liquid demand signal of the tank body in the wet processing machine, so that The chemical liquid can be input into the tank of the wet processing machine. As the chemical liquid is continuously transported, a large amount of gas will also accumulate in the airtight air-removing container 4, causing the liquid level in the air-removing container 4 to drop to the position of the low liquid level sensor 9. At this time, the exhaust valve 5 is opened to exhaust and the liquid is discharged Valve 6 is closed. The chemical liquid will accumulate in the air-removing container 4. When the liquid level increases to the position of the high liquid level sensor 8, the exhaust valve 5 is closed and the liquid outlet valve 6 is opened, and the chemical liquid is continuously transported to the tank of the wet processing machine inside. When the liquid level in the air-removing container drops to the position of the low liquid level sensor 9 again, open the exhaust valve 5 and close the liquid outlet valve 6 again, and repeat this cycle until the liquid volume of the tank in the wet processing machine meets the process requirements , the machine will give the pneumatic pump 2 a stop signal, and the pneumatic pump 2 will stop the infusion. And the waste liquid remaining in the air-removing container 4 can be discharged into the liquid discharge pipe 71 through the liquid discharge valve 7 . Through the above control, the delivery of chemical liquid without air bubbles is realized.

The basic principles and main features of the present utility model and the advantages of the present utility model have been shown and described above. Those skilled in the art should understand that the utility model is not limited by the above-mentioned embodiments. The above-mentioned embodiments and descriptions only illustrate the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model The new model also has various changes and improvements, and these changes and improvements all fall within the scope of the claimed utility model. The scope of protection required by the utility model is defined by the appended claims and their equivalents.

Claims (7)

1. chemical liquids bulb apparatus that degass, comprise the liquid bucket, the bubble container that degass, be located at described bubble inlet, exhaust outlet, the liquid outlet of container head and the leakage fluid dram of being located at its bottom of degassing, described liquid bucket is tightly connected by input duct and described inlet, it is characterized in that: on described input duct, also be provided with successively air driven pump and pneumatic diaphragm liquid feed valve by compressed air-driven, be provided with a discharge duct at described exhaust outlet, described liquid outlet is connected with wet-treating secret envelope by the fluid pipeline, is provided with a Drainage pipe at described leakage fluid dram.

2. the chemical liquids according to claim 1 bulb apparatus that degass is characterized in that: also be provided with a high liquid level sensor on the described bubble container outer surface top of degassing;

Also be provided with a low liquid level sensor in the described bubble container outer surface bottom of degassing.

3. the chemical liquids according to claim 1 bulb apparatus that degass is characterized in that: also be provided with a pneumatic diaphragm air bleeding valve on described discharge duct.

4. the chemical liquids according to claim 1 bulb apparatus that degass is characterized in that: also be provided with a pneumatic diaphragm liquid valve on described fluid pipeline.

5. the chemical liquids according to claim 1 bulb apparatus that degass is characterized in that: also be provided with a tapping valve on described Drainage pipe.

6. the chemical liquids according to claim 1 bulb apparatus that degass, it is characterized in that: described air driven pump is a corrosion-resistant air driven pump.

7. the chemical liquids according to claim 1 and 2 bulb apparatus that degass, it is characterized in that: described high liquid level sensor is a corrosion-resistant high liquid level sensor; Described low liquid level sensor is a corrosion-resistant low liquid level sensor.

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