CN202652117U - A micro-driver with adjustable local magnetic field - Google Patents
A micro-driver with adjustable local magnetic field Download PDFInfo
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- CN202652117U CN202652117U CN 201220162277 CN201220162277U CN202652117U CN 202652117 U CN202652117 U CN 202652117U CN 201220162277 CN201220162277 CN 201220162277 CN 201220162277 U CN201220162277 U CN 201220162277U CN 202652117 U CN202652117 U CN 202652117U
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- magnetic field
- permanent magnet
- local magnetic
- main pole
- magnet array
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Abstract
The utility model discloses a local magnetic field adjustable micro driver. The local magnetic field adjustable micro driver comprises a stator formed by a two-dimensional permanent magnet array and a back iron, and a rotor with armatures alternatively laid on upper, lower surfaces of an insulator along the directions of X axis and Y axis, wherein an air gap is arranged between the stator and the rotor; the two-dimensional permanent magnet array is a permanent magnet array wholly in a rectangular '+' shape, wherein N, S main poles are distributed in a staggered way and the adjacent N main poles or adjacent S main poles are separated by non-magnetic blocks; the armatures alternatively arranged along the directions of X axis and Y axis are composed of wire groups arranged in parallel along the X axis direction, and wire groups arranged in parallel along the Y axis direction. The structure of the micro driver is simple, the production is convenient, the local magnetic field and electromagnetic force are more flexibly adjusted by the wire type armature structure, and the suspension force and the horizontal thrust are decoupled and controlled, thus the response is quick and the drive range is wide. The local magnetic field adjustable micro driver can be used in the fields in need of precise drive and operation such as micro robots, lithography devices or microelectronic packaging equipment.
Description
Technical field
The utility model relates to a kind of electromagnetic drive type microdrive, is specifically related to the adjustable microdrive of a kind of local magnetic field of electromagnetic suspension type.
Background technology
Along with science and technology to future development small, the ultraprecise field, the object that robot will operate also expands to sub-micron, nano level microscopic fields from macroscopical field, therefore can be under microscopic dimensions to small items process, assemble, the multiple degrees of freedom micro actuator of the operation such as test become one of important directions of domestic and international research.
The microdrive of Piezoelectric Ceramic has become the main flow of domestic and international micro-manipulating robot research, secondly is electrostatic actuator and marmem.Compare with electromagnetic drive mode, these drivers have compact conformation, Motion Resolution rate high, be convenient to the advantages such as micro-system is integrated.But their acceleration is less simultaneously, and hysteresis is strong, and flexibility ratio is not high, and range of movement is limited, is generally limited to below the micron dimension, can't satisfy the requirement of the large-scale nano level motion of little Driving technique proposition.And the micro actuator of electromagnetic drive type not only range of movement is large, the degree of freedom is high, and eliminated the impact of friction, wearing and tearing, performance accuracy is higher.
The accurate Driving technique of electromagnetism can roughly be divided three classes according to its mode of operation at present:
First kind straight line motor drive type has working range wide, the advantage that actuating force is large, but exist the harmful effect of electromagnetic force fluctuation, edge effect and accumulated error.
Equations of The Second Kind macro/micro type of drive, this mode can obtain larger opereating specification and higher positioning accuracy, but the degree of freedom is restricted, and the type of drive of two-stage type is comparatively complicated.
The 3rd class adopts that electromagnetic force realizes the mode that multiple degrees of freedom drives between coil and permanent magnet, and this structure is regulated comparatively flexible, but middle winding is relative with the permanent magnet position fixing, is vulnerable to the impact of the factor such as edge effect in operating process, produces vibration.
Summary of the invention
In order to solve the problem that exists in the background technology, the purpose of this utility model is to provide a kind of local magnetic field adjustable microdrive, can improve the microdrive dynamic responding speed, simplify control method, reduce accumulated error, realize the microdrive of local magnetic field fine setting and lag function.
The utility model technical solution problem, the technical scheme that adopts is:
Comprise the stator that formed by two-dimentional permanent magnet array and back iron and be equipped with along the mover of X, the staggered armature of Y direction in the insulator upper and lower surface to have air gap between stator and the mover; The two dimension permanent magnet array is separated by with non-magnetic between adjacent N main pole or adjacent S main pole for the permanent magnet array that whole orthogonal " ten " font N, S main pole are interspersed; To be consisted of by the X-direction wire group that is arranged in parallel and Y direction wire group along X, the staggered armature of Y direction.
Be filled with magnetizing direction between described " ten " font N, the S main pole by the auxiliary magnetic pole of the S utmost point sensing N utmost point, the magnetizing direction of auxiliary magnetic pole and horizontal direction are 45 °.
Non-magnetic block length and width between described adjacent N main pole or adjacent S main pole equate that non-magnetic is 1/3rd of N, S main pole length and width.
The beneficial effect that the utlity model has is:
1, contactless between stator and the mover, avoided the existence of frictional force, iron-core-free wire type Structure of mover has reduced the mover quality, when having eliminated the electromagnetic force fluctuation, has reduced hysteresis and accumulated error;
2, wire group structure independent of each other is so that local magnetic field and electromagnetic force are regulated more flexible; By to each wire group electric current, can realize the decoupling zero control to suspending power and horizontal thrust.
3, by the detection to rotor position, the electric current of each wire can carry out real-time change according to the mover attitude, has servo-actuated property, and has reduced the impact of edge effect;
4, permanent magnet array is simple in structure, and the adding of back-iron structures has improved the permanent magnet utilization rate.
The utility model can be used in microrobot, and mask aligner or microelectronics Packaging equipment etc. need the accurate occasion that drives and operate.
Description of drawings
Fig. 1 is the microdrive vertical view of the utility model embodiment.
Fig. 2 is the microdrive left view of the utility model embodiment.
Fig. 3 is the vertical view of the microdrive permanent magnet array magnetizing direction of the utility model embodiment.
Among the figure: 1-1. X-direction wire group, 1-2. Y direction wire group, 1-3. insulating barrier, 2-1. main pole, 2-2. auxiliary magnetic pole, 2-3. back iron, non-magnetic of 2-4..
Embodiment
Below in conjunction with the drawings and embodiments of the microdrive structure take permanent magnet array as five utmost points as example the utility model is further described.
As depicted in figs. 1 and 2, the utility model comprises the stator that is comprised of two-dimentional permanent magnet array and back iron and is equipped with along the mover of X, the staggered armature of Y direction or along the mover of Y, the staggered armature of X-direction in the insulator upper and lower surface, have air gap between stator and the mover, can realize that the precision of six-freedom degree drives by the Lorentz force effect; Two dimension permanent magnet array integral body is orthogonal, and " ten " font N, S main pole 2-1 are interspersed, and are separated by with non-magnetic 2-4 between adjacent N main pole or adjacent S main pole; To be consisted of by the X-direction wire group 1-1 that is arranged in parallel and Y direction wire group 1-2 along X, the staggered armature of Y direction.
X-direction wire group 1-1 and Y direction wire group 1-2 are comprised of enamel covered wire, are welded in respectively the upper and lower surface of double-sided PCB along horizontal or vertical direction, and copper cash adopts the single-turn type structure, is evenly distributed, and is separate to each other.The specification of the copper cash that X-direction wire group 1-1 and Y direction wire group 1-2 are used is identical with Lay interval, and every copper cash two ends connect respectively chip pin and drive circuit, and the sense of current and current value in every copper cash all can be regulated respectively.When the sense of current that is connected with in each copper cash as shown in Figure 1 the time, can form the multi-peak armature field corresponding with permanent magnet array.When the armature field pole polarity is identical with the magnetic field of permanent magnet pole polarity, can form repulsion between the two, realize the precise motion of mover six-freedom degree.When the current in wire value changed, corresponding Lorentz force also can change, and the attitude of mover also changes thereupon.Change the size that the current value of part position wire between corresponding permanent magnet pole can be regulated this suspending power, the current value that changes corresponding permanent magnet pole core conductor then can be regulated the size of this horizontal thrust.In order to increase electromagnetic force, also can adopt multilayer winding type structure.
As shown in Figure 3, described " ten " font N, the S main pole 2-1 neodymium iron boron piece for vertically magnetizing, N utmost point magnetizing direction points to the mover direction by back iron, S main pole magnetizing direction is to point to back iron by mover, and the X-axis distance between two adjacent N, the S main pole center equates with the Y-axis distance.Be filled with magnetizing direction is pointed to the N utmost point by the S utmost point auxiliary magnetic pole 2-2 between N, the S main pole, auxiliary magnetic pole 2-2 adopts NdFeB material, magnetizing direction and horizontal direction are 45 °, form flux loop with auxiliary magnetic pole 2-2 in the back iron direction, increase the magnetic flux density in the air gap.
Non-magnetic 2-4 length between described adjacent N main pole or adjacent S main pole equates that with width non-magnetic 2-4 is 1/3rd of N, S main pole 2-1 length and width, can adopt the materials such as resin or aluminium to make.
Described back iron 2-3 is made of ordinary silicon steel disc or A3 steel, and manufacturing process is identical with common electric machine.
During use, the back iron 2-3 of described stator need be fixed on the fixed part surface in the process equipment; Mover in the microdrive partly is installed in the below of moving component, and staggered wire group part is corresponding with permanent magnet array; There is air gap between microdrive stator and mover, do not contact between corresponding processing and the fixed body in the operating system and the movable body, utilize Lorentz force to realize the relative motion of the six-freedom degrees such as suspension, rotation between the two.Compare with existing each microdrive structure, but the utility model can provide the local magnetic field fine setting, armature field with servo-actuated property, so that the microdrive operation is more flexible, and the permanent magnet array that provides is under the certain situation of permanent magnet consumption, not only simplify the structure, and higher air gap flux density and Lorentz force can be provided, improved the utilance of permanent magnet.
Claims (3)
1. adjustable microdrive of local magnetic field comprises the stator that is comprised of two-dimentional permanent magnet array and back iron and is equipped with along the mover of X, the staggered armature of Y direction in the insulator upper and lower surface, has air gap between stator and the mover; It is characterized in that: two-dimentional permanent magnet array is separated by with non-magnetic between adjacent N main pole or adjacent S main pole for the permanent magnet array that whole orthogonal " ten " font N, S main pole are interspersed; To be consisted of by the X-direction wire group that is arranged in parallel and Y direction wire group along X, the staggered armature of Y direction.
2. the adjustable microdrive of a kind of local magnetic field according to claim 1, it is characterized in that: be filled with magnetizing direction between described " ten " font N, the S main pole by the auxiliary magnetic pole of the S utmost point sensing N utmost point, the magnetizing direction of auxiliary magnetic pole and horizontal direction are 45 °.
3. the adjustable microdrive of a kind of local magnetic field according to claim 1, it is characterized in that: non-magnetic block length and width between described adjacent N main pole or adjacent S main pole equate that non-magnetic is 1/3rd of N, S main pole length and width.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220162277 CN202652117U (en) | 2012-04-17 | 2012-04-17 | A micro-driver with adjustable local magnetic field |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220162277 CN202652117U (en) | 2012-04-17 | 2012-04-17 | A micro-driver with adjustable local magnetic field |
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| Publication Number | Publication Date |
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| CN202652117U true CN202652117U (en) | 2013-01-02 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220162277 Expired - Fee Related CN202652117U (en) | 2012-04-17 | 2012-04-17 | A micro-driver with adjustable local magnetic field |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102647126A (en) * | 2012-04-17 | 2012-08-22 | 浙江理工大学 | Locally adjustable magnetic field microactuator |
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2012
- 2012-04-17 CN CN 201220162277 patent/CN202652117U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102647126A (en) * | 2012-04-17 | 2012-08-22 | 浙江理工大学 | Locally adjustable magnetic field microactuator |
| CN102647126B (en) * | 2012-04-17 | 2014-10-15 | 浙江理工大学 | Micro actuator with adjustable local magnetic field |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130102 Termination date: 20150417 |
|
| EXPY | Termination of patent right or utility model |