CN202420756U - Gauge pressure measurement silicon sensor capable of resisting environmental gas pollution - Google Patents
Gauge pressure measurement silicon sensor capable of resisting environmental gas pollution Download PDFInfo
- Publication number
- CN202420756U CN202420756U CN2012200441509U CN201220044150U CN202420756U CN 202420756 U CN202420756 U CN 202420756U CN 2012200441509 U CN2012200441509 U CN 2012200441509U CN 201220044150 U CN201220044150 U CN 201220044150U CN 202420756 U CN202420756 U CN 202420756U
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- pressure
- signal generator
- silicon
- positive
- cavity
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Abstract
Disclosed is a gauge pressure measurement silicon sensor capable of resisting environmental gas pollution. A reference cavity corrosion-resistant metal measuring membrane capable of transmitting pressure is hermetically welded at the upper end of a negative side of a silicon signal generator, and is filled with reference cavity filling liquid to form a reference cavity, and pressure of environmental gas is used as reference pressure and is transmitted to the negative side of the silicon signal generator via a ventilating channel and the reference cavity, a positive-side corrosion-resistant metal measuring membrane capable of transmitting pressure is hermetically welded at the lower end of a positive side of the silicon signal generator, and is filled with positive cavity filling liquid to form a positive-side cavity, and pressure of measuring media is transmitted to the positive side of the silicon signal generator via a positive-side cavity. Due to the design mode of the silicon sensor, when the silicon sensor works in an environment with polluted gas, the polluted gas is effectively prevented from polluting and oxidizing the silicon signal generator, and gauge pressure is measured.
Description
Technical field
The utility model relates to a kind of device for pressure measurement, especially possesses the gauge pressure measurement silicon sensor that anti-environmental gas pollutes.
Background technology
At present, known gauge pressure measure silicon sensor by measuring diaphragm, charge liquid, chamber, silicon signal generator, breather line and form.During work; The pressure of measuring media is through measuring diaphragm and charge liquid to the positive side transmission of signal generator; The pressure of environmental gas (being generally current atmospheric pressure) directly transmits to silicon signal generator minus side through breather line as reference pressure, realizes the purpose that gauge pressure is measured.But when this gauge pressure measurement silicon sensor is worked under the dusty gas environment; Contamination gas cognition directly gets into silicon sensor reference chamber through breather line and contacts with the silicon signal generator; The silicon signal generator will be polluted and oxidation, finally influence long-term working stability and reliability that gauge pressure is measured silicon sensor.
Summary of the invention
Deficiency when working under the dusty gas environment in order to overcome existing gauge pressure measurement silicon sensor, the gauge pressure that the utility model provides a kind of anti-environmental gas to pollute is measured silicon sensor.When the gauge pressure that this anti-environmental gas pollutes is measured silicon sensor work; The pressure of environmental gas (being generally current atmospheric pressure) transmits to silicon signal generator minus side through breather line and reference cavity as reference pressure; The pressure of measuring media to the positive side transmission of silicon signal generator, is realized the purpose that gauge pressure is measured through positive side cavity.
The utility model technical scheme that is adopted of dealing with problems is: one of welded seal can transmit the reference chamber corrosion resistant metal measuring diaphragm of pressure in the minus side upper end of silicon signal generator; Charge into the reference chamber and charge liquid; Form the reference cavity, simultaneously, breather line is communicated with the reference cavity; One of welded seal can transmit the positive side corrosion resistant metal measuring diaphragm of pressure in the positive side lower end of silicon signal generator, charges into positive chamber and charges liquid, forms positive side cavity.The pressure of environmental gas is passed to reference chamber corrosion resistant metal measuring diaphragm as reference pressure earlier through breather line, charges liquid through the reference chamber again and transmits pressure to silicon signal generator minus side; The pressure of measuring media charges liquid through positive side corrosion resistant metal measuring diaphragm and positive chamber and transmits pressure to the positive side of silicon signal generator, has realized the gauge pressure measurement.
The beneficial effect of the utility model is; When the design of this silicon sensor is worked under the dusty gas environment is arranged; Completely cut off pollution and the oxidation of dusty gas to the silicon signal generator effectively, it is unaffected to have guaranteed that gauge pressure is measured the silicon sensor performance, long term operation stability and reliability.
Description of drawings
Below in conjunction with accompanying drawing and embodiment the utility model is further specified.
Fig. 1 is the structure principle chart of the utility model.
Fig. 2 is the fundamental diagram of the utility model.
1. reference chamber corrosion resistant metal measuring diaphragms among the figure, 2. the reference chamber charges liquid, 3. silicon signal generator, 4. positive side corrosion resistant metal measuring diaphragm, 5. positive chamber charges liquid, 6. breather line.
Embodiment
In Fig. 1; Silicon signal generator (3) gauge pressure of packing into is measured in the silicon sensor; The welded seal reference chamber corrosion resistant metal measuring diaphragm (1) in silicon signal generator (3) minus side upper end; And charge into the reference chamber and charge liquid (2), form a reference cavity that can transmit pressure to silicon signal generator (3) minus side; At the positive side lower end positive side corrosion resistant metal measuring diaphragm of welded seal (4) of silicon signal generator (3), and charge into positive chamber and charge liquid (5), forming one can be to the positive side cavity of the positive side transmission of silicon signal generator (3) pressure.
In silicon sensor work embodiment shown in Figure 2, the pressure of environmental gas (is generally current atmospheric pressure P
0) be passed to reference chamber corrosion resistant metal measuring diaphragm (1) as reference pressure through breather line (6), charge liquid (2) transmits pressure P from current environment gas to silicon signal generator (3) minus side through the reference chamber again
0The pressure P of measuring media charges liquid (5) transmits pressure P from measuring media to the positive side of silicon signal generator (3) through positive side corrosion resistant metal measuring diaphragm (4) and positive chamber; Like this; The reference cavity that charges liquid (2) formation through reference strong corrosion resistant metal measuring diaphragm (1) and reference chamber has completely cut off environmental gas and silicon signal generator (3); Stop silicon signal generator (3) by the generation of the situation of environmental gas pollution and oxidation, realized the gauge pressure measurement simultaneously.
Claims (1)
1. the gauge pressure of an anti-environmental gas pollution is measured silicon sensor; One of welded seal can transmit the reference chamber corrosion resistant metal measuring diaphragm of pressure in the minus side upper end of silicon signal generator, charges into the reference chamber and charges liquid, forms the reference cavity; Simultaneously, breather line is communicated with the reference cavity; One of welded seal can transmit the positive side corrosion resistant metal measuring diaphragm of pressure in the positive side lower end of silicon signal generator, charges into positive chamber and charges liquid, forms positive side cavity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012200441509U CN202420756U (en) | 2012-02-10 | 2012-02-10 | Gauge pressure measurement silicon sensor capable of resisting environmental gas pollution |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012200441509U CN202420756U (en) | 2012-02-10 | 2012-02-10 | Gauge pressure measurement silicon sensor capable of resisting environmental gas pollution |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202420756U true CN202420756U (en) | 2012-09-05 |
Family
ID=46745511
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012200441509U Expired - Lifetime CN202420756U (en) | 2012-02-10 | 2012-02-10 | Gauge pressure measurement silicon sensor capable of resisting environmental gas pollution |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202420756U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104215382A (en) * | 2014-09-05 | 2014-12-17 | 沈阳市传感技术研究所 | Membrane-separation type gauge pressure sensor of external balance chamber |
-
2012
- 2012-02-10 CN CN2012200441509U patent/CN202420756U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104215382A (en) * | 2014-09-05 | 2014-12-17 | 沈阳市传感技术研究所 | Membrane-separation type gauge pressure sensor of external balance chamber |
| CN104215382B (en) * | 2014-09-05 | 2016-04-06 | 沈阳市传感技术研究所 | The film isolated form gauge pressure transducer of external balance chamber |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20120905 |
|
| CX01 | Expiry of patent term | ||
| DD01 | Delivery of document by public notice |
Addressee: Zhang Shu Document name: Notice of expiration and termination of patent right |
|
| DD01 | Delivery of document by public notice |