CN202330194U - High precision measurement system for three-dimensional microdeformation of mechanical device in high-lower temperature chamber - Google Patents

Abstract

A high precision measurement system for three-dimensional microdeformation of a mechanical device in a high-lower temperature chamber is provided. The system comprises a string, a three-dimensional air floating assembly and photoelectric displacement sensor devices in three directions. Each air floating unit comprises an air floating shaft and an air floating sleeve, and the photoelectric displacement sensor devices in the three directions are respectively installed on an x-direction air floating unit, a y-direction air floating unit and a z-direction air floating unit and are used for measuring displacement in the x direction, the y direction and the z direction. An x-direction air floating shaft is installed on a fixed plate, an x-direction air floating sleeve can be slidingly installed on the x-direction air floating shaft and is fixedly connected with a y-direction air floating shaft, a y-direction air floating sleeve can be slidingly installed on the y-direction air floating shaft and is fixedly connected with a z-direction air floating sleeve, and a z-direction air floating shaft can be slidingly installed on the z-direction air floating sleeve. The upper end of the string is connected with a tested part, and the lower end of the string is connected with the z-direction air floating shaft. The high precision measurement system for measuring the deformation of the test part in the high-low temperature chamber has high measurement precision.

Description

High-precision measurement system for three-dimensional micro-deformation of mechanical devices in high and low temperature chambers

technical field

The utility model relates to a high-precision measurement system for three-dimensional micro-deformation, in particular to a measurement system for mechanical devices in high and low temperature environments.

Background technique

During the stiffness test, it is necessary to apply a force in a certain direction of the tested part. Under the action of force or torque, the tested part will be deformed, and the stiffness can be calculated by measuring the deformation in the direction of the applied force. However, the shape of the measured piece is irregular, and under the action of external force, in addition to the deformation in the direction used for stiffness calculation, it may also produce rotation in the three directions of x, y, and z and deformation in the other two directions. Since the stiffness test examines the deformation of the point of action, the small rotation of the measured part around a certain axis has basically no effect on the measurement results and can be ignored. However, since the deformation of the tested part itself is very small, the small deformation in other directions after the force will affect the results of the stiffness test. Only high-precision and high-resolution measurement of the deformation in the three directions can be carried out at the same time, and the stiffness can be obtained through subsequent data processing. Accurate stiffness measurements can only be obtained by calculating the amount of deformation in the desired direction.

Since the tested part is in a high and low temperature box where sensors cannot be directly installed, it is impossible to accurately measure the three-dimensional micro-deformation of the mechanical device in the high and low temperature box in the prior art.

Contents of the invention

In order to overcome the shortcomings of low measurement accuracy of existing measurement systems used for mechanical devices in high and low temperature environments, the utility model provides a high-precision measurement system for three-dimensional micro-deformation of mechanical devices in high and low temperature boxes with high measurement accuracy.

The technical scheme that the utility model solves its technical problem adopts is:

A high-precision measurement system for three-dimensional micro-deformation of a mechanical device in a high-low temperature box. The measurement system includes a string, a three-dimensional air-floating component, and a photoelectric displacement sensing device in three directions. The three-dimensional air-floating component includes a fixed plate, The x-direction air flotation unit, the y-direction air flotation unit and the z-direction air flotation unit, each air flotation unit includes an air flotation shaft and an air flotation sleeve, and the photoelectric displacement sensing devices in the three directions are respectively installed on the x-direction air flotation unit , y-direction air flotation unit and z-direction air flotation unit, used to measure the displacement in x-direction, y-direction and z-direction; the x-direction air bearing shaft is installed on the fixed plate, the x-direction air bearing sleeve is slidably installed On the air bearing shaft, the x-direction air bearing sleeve is fixedly connected to the y-direction air bearing shaft, the y-direction air bearing sleeve is slidably installed on the y-direction air bearing shaft, and the y-direction air bearing sleeve is connected to the z-direction air bearing The sleeve is fixedly connected, and the z-direction air bearing shaft is slidably installed on the z-direction air bearing sleeve;

The upper end of the string is connected to the measured object, and the lower end of the string is connected to the z-direction air bearing shaft of the three-dimensional air bearing assembly.

Further, the x-direction photoelectric displacement sensing device is composed of a grating ruler and a reading head; the y-direction photoelectric displacement sensing device includes a y-direction photoelectric conversion transmitter and a y-direction receiver, and the z-direction photoelectric conversion transmitter and receiving device includes a first-level z To the photoelectric conversion transmitter, the first-level z-direction photoelectric conversion receiver, the second-level z-direction photoelectric conversion transmitter and the second-level z-direction photoelectric conversion receiver, wherein the photoelectric conversion transmitter is composed of a grating ruler and a reading head, and adopts Incremental photoelectric encoder, the receiver is composed of two groups of photoelectric transmitting and receiving tubes.

Furthermore, the x-direction air bearing sleeve is fixedly connected to the x-direction air bearing sleeve connecting plate, the x-direction air bearing sleeve connecting plate is fixedly connected to the y-direction mounting plate, and the y-direction air bearing shaft is installed on the y-direction On the mounting plate, the y-direction air bearing sleeve is fixedly connected to the y-direction air bearing sleeve connecting plate, the y-direction air bearing sleeve connecting plate is connected to the z-direction fixed baffle, and the z-direction air bearing sleeve passes through the z-direction The air bearing sleeve fixing plate is installed on the z-direction fixed baffle, the z-direction air flotation shaft connecting plate is installed on the z-direction fixed baffle, and the z-direction air flotation shaft is installed on the z-direction air flotation shaft connection On the board, the upper end of the z-direction air bearing shaft is installed with a connecting head connected with a string;

The first-level z-direction photoelectric conversion transmitter is installed on the z-direction fixed baffle, the first-level z-direction photoelectric conversion receiver and the second-level z-direction photoelectric conversion transmitter are installed on the y-direction mounting plate, and the second-level z-direction photoelectric conversion The receiver is mounted on the fixed plate;

The y-direction photoelectric conversion transmitter is installed on the y-direction mounting plate, and the y-direction receiver is installed on the fixed plate;

The x-direction photoelectric displacement sensing device is installed on the fixed plate.

Furthermore, each air flotation unit includes two air flotation shafts and two air flotation sleeves, and the two air flotation shafts are arranged in parallel.

The technical idea of the utility model is: connect the measured piece through a thin rope, and hang a small mass block under the thin rope to ensure that the rope is vertically downward. Since the force on the rope remains constant, the length of the rope is considered unchanged throughout the process. The mass block suspended under the rope is connected by the air flotation component, so that the small mass block can follow the movement of the tested part without friction in the three directions of x, y and z, and the tiny mass of the tested part can be obtained by measuring the movement track of the small mass block motion track.

The patent "combined air flotation device not affected by tracheal disturbance" (application number 201010165949.9, authorized) uses air flotation technology with the characteristics of small frictional resistance, high motion precision, clean and pollution-free, and provides an additional method that can effectively avoid friction. A three-dimensional air-floating follow-up device that affects and adapts to high-precision occasions. On the basis of the patent, the utility model modifies the structure of the air flotation component to overcome the current measurement requirements.

The beneficial effects of the utility model are mainly manifested in that: the tested piece is connected by a thin rope, and the movement track of the small mass block suspended on the thin rope is used to replace the movement track of the tested piece after being stressed. The system for measuring the stiffness of the tested piece in the environment effectively overcomes the influence of additional friction and additional movement of components during the measurement process, and realizes high-precision measurement.

Description of drawings

Fig. 1 is a front view of a three-dimensional air flotation module.

Fig. 2 is a left view of the three-dimensional air bearing unit.

Fig. 3 is an isometric view of a three-dimensional air bearing assembly.

Fig. 4 is a schematic diagram of the z-direction signal transmission process.

FIG. 5 is a schematic diagram of a signal transmission process in the y direction.

Detailed ways

Below in conjunction with accompanying drawing, the utility model is further described.

Referring to Figures 1 to 5, a high-precision measurement system for three-dimensional micro-deformation of a mechanical device in a high-low temperature box, the measurement system includes a string, a three-dimensional air flotation component and a photoelectric displacement sensing device in three directions, the three-dimensional The air flotation assembly includes a fixed plate 11, an x-direction air flotation unit, a y-direction air flotation unit and a z-direction air flotation unit. Each air flotation unit includes an air flotation shaft and an air flotation sleeve. The photoelectric displacement sensing devices in the three directions They are respectively installed on the x-direction air flotation unit, y-direction air flotation unit and z-direction air flotation unit to measure the displacement in the x-direction, y-direction and z-direction; The sleeve is slidably installed on the x-direction air bearing shaft, the x-direction air bearing sleeve is fixedly connected with the y-direction air bearing shaft 7, and the y-direction air bearing sleeve 19 is slidably installed on the y-direction air bearing shaft 7, so The y-direction air bearing sleeve 19 is fixedly connected with the z-direction air bearing sleeves 1 and 4, and the z-direction air bearing shafts 21 and 3 are slidably mounted on the z-direction air bearing sleeves 1 and 4;

The upper end of the string is connected to the tested object, and the lower end of the string is connected to the z-direction air bearing shafts 21 and 3 of the three-dimensional air bearing assembly.

The x direction photoelectric displacement sensing device is made up of x direction grating ruler 23 and x direction reading head 16; y direction photoelectric displacement sensing device comprises y direction photoelectric conversion transmitter 15 and y direction receiver 14, z direction photoelectric conversion transmitter and The receiving device includes a first-level z-direction photoelectric conversion transmitter 20, a first-level z-direction photoelectric conversion receiver 18, a second-level z-direction photoelectric conversion transmitter 17 and a second-level z-direction photoelectric conversion receiver 12, wherein the photoelectric conversion transmitter The device is composed of a grating ruler and a reading head, and an incremental photoelectric encoder is used. The receiver is composed of two sets of photoelectric transmitting and receiving tubes.

The x-direction air bearing sleeve is fixedly connected to the x-direction air bearing sleeve connecting plate 8, the x-direction air bearing sleeve connecting plate 8 is fixedly connected to the y-direction mounting plate 9, and the y-direction air bearing shaft 7 is installed on the On the y-direction mounting plate 7, the y-direction air bearing sleeve 19 is fixedly connected to the y-direction air bearing sleeve connecting plate 26, and the y-direction air bearing sleeve connecting plate 26 is connected to the z-direction fixed baffle plate 5, and the z-direction The air bearing sleeves 1 and 4 are installed on the z-direction fixed baffle 5 through the z-direction air flotation sleeve fixing plate 25, and the z-direction air bearing shaft connecting plate is installed on the z-direction fixed baffle 5, and the z-direction air bearing The floating shafts 19, 3 are installed on the z-direction air bearing shaft connection plate, and the upper ends of the z-direction air bearing shafts 19, 3 are installed with the connector 2 for connecting with the string;

The first-level z-direction photoelectric conversion transmitter 20 is installed on the z-direction fixed baffle 5, the first-level z-direction photoelectric conversion receiver 18 and the second-level z-direction photoelectric conversion transmitter 17 are installed on the y-direction mounting plate 9, and the second The z-direction photoelectric conversion receiver 12 is installed on the fixed plate 11; the y-direction photoelectric conversion transmitter 10 is installed on the y-direction mounting plate 9, and the y-direction receiver 14 is installed on the fixed plate 11; the x-direction photoelectric displacement sensor device (X-direction grating ruler 23 and x-direction reading head 16) are installed on the fixed plate 11.

Each air flotation unit includes two air flotation shafts and two air flotation sleeves, and the two air flotation shafts are arranged in parallel.

In this embodiment, the three layers of the three-dimensional air flotation module from the bottom to the top correspond to the three directions of x, y and z respectively, in which the string is connected to the measured object, and a small mass is suspended under the string, and the length of the string is based on the measured The error range is designed to ensure that the displacement deviation between the measured object and the small mass is within the required measurement accuracy range; the air bearing components in the three directions include the air bearing shaft and the air bearing sleeve, and the air bearing shafts in the x and y directions are relatively stationary , the air bearing sleeve moves, the air bearing shaft moves in the z direction, and the air bearing sleeve does not move; the air bearing shaft in the x direction is fixed on the frame, and the air bearing shaft in the y direction and the air bearing sleeve in the x direction pass through the mounting seat and the mounting plate Fixed connection, the air bearing sleeve in the z direction is fixedly connected with the air bearing sleeve in the y direction through the fixed plate of the z direction air bearing sleeve, the air bearing shaft in the z direction is connected with the string through a connector, and the air bearing shaft in the z direction plays a role The role of small masses.

There are two air bearing shafts and two air bearing sleeves in the three directions of x, y, and z respectively, and the air bearing shafts (sleeves) in the same direction are fixed on the same fixed plate, which effectively overcomes the small mass block caused by external force. torsion effect. The structure of the ventilation device of the air flotation component refers to the same patent "combined air flotation device not affected by tracheal disturbance" (application number 201010165949.9, authorized), which can effectively avoid the additional disturbance caused by the ventilation tube to the measurement.

In conventional measurement, a non-contact photoelectric encoder is generally used to measure the displacement change of the measured object. The non-contact photoelectric encoder consists of a reading head and a grating ruler. The grating ruler does not need power supply and no wire connection. The reading head must be powered by the power supply and transmit the measurement signal through the wire. The reading head and the grating ruler must move relative to each other at the required distance to obtain the displacement signal. Specifically, the reading head in the z direction is installed on the air bearing sleeve, and the grating scale is installed on the air bearing shaft (small mass). When moving in the z direction, the air bearing sleeve is relatively stationary and the air bearing shaft moves. The reading head in the y direction is installed on the air bearing shaft in the y direction, the grating scale is installed on the air bearing sleeve in the y direction, and the reading head in the y direction is connected with a wire. When moving in the y direction, the air bearing sleeve moves, and the air bearing shaft is opposite to the wire. Do not exercise. The reading head in the x direction is installed on the air bearing shaft in the x direction, the grating scale is installed on the air bearing sleeve in the x direction, and the reading head in the x direction is connected with an external wire. When moving in the x direction, the air bearing sleeve moves, and the air bearing shaft is opposite to the wire Do not exercise.

However, since the measurement signal is transmitted through the wire, the movement of the measured point causes one end of the wire to follow the movement, while the other end is fixed on the test instrument, so the winding of the wire will bring additional force to the movement of the small mass to be tested, thus Changing the position of the small mass produces measurement errors. Specifically: except that the wire connected to the reading head does not move relative to the frame in the x direction, since the air bearing shaft in the y direction is fixedly connected with the air bearing sleeve in the x direction, when the small mass moves along the x direction, it is installed on the air bearing in the y direction. The wire on the y-direction readhead on the floating shaft will move relative to the frame. In the same way, since the z-direction air bearing sleeve is fixedly connected with the y-direction air bearing sleeve, when the x-direction and y-direction movement, the wires of the z-direction reading head installed on the z-direction air bearing sleeve will be opposite to the frame and the y-direction air bearing. Float movement. The additional movement of the external wire of the reading head in the y and z directions will interfere with the measurement and cause measurement errors.

In order to solve the additional disturbance caused by the wire movement in the y direction and the z direction and improve the measurement accuracy, the reading heads in the y and z directions of the utility model are not connected to external wires, but are powered by batteries. The data read by the reading head in the z direction is sent to the x-direction air shaft mounting plate through the two-stage photoelectric conversion transmitting and receiving device, and the data read by the reading head in the y direction is sent to the signal through the first-stage photoelectric conversion transmitting and receiving device To the x-direction air bearing installation board, the data received on the x-direction air bearing installation board is transmitted back to the system through wires.

Among them, there are two major limitations in the photoelectric conversion transmitting device and receiving device: First, when the displacement of the measured part changes greatly, it exceeds the receiving range of the photoelectric receiving tube and cannot be used. Second, when the tested part moves at high speed, the influence of the response speed of the photoelectric transmitting and receiving tubes may lead to missing pulses, resulting in low measurement accuracy. However, this system is mainly used to measure the small deformation of the tested part after being subjected to external force. Therefore, the displacement change is correct and the change speed is slow. The photoelectric conversion transmitting and receiving device is used to meet the measurement requirements.

Specifically, the photoelectric conversion emission device is composed of a grating ruler and a reading head, and an incremental photoelectric encoder is selected. The signals output by the reading head of the photoelectric conversion emission device are two sets of TTL square wave signals, which are synthesized to obtain the relative displacement. The photoelectric conversion receiving device is composed of two groups of photoelectric transmitting and receiving tubes, and each group realizes the processing of one TTL square wave signal.

The z-direction two-stage photoelectric conversion transmitting and receiving device includes a first-stage z-direction photoelectric conversion transmitter installed on the z-direction air bearing sleeve fixing plate, and a first-stage z-direction photoelectric conversion transmitter installed on the y-direction air bearing sleeve component mounting seat The receiver and the two-stage z-direction photoelectric conversion transmitter, and the two-stage z-direction photoelectric conversion receiver installed on the x-direction air flotation component mount.

The y-direction photoelectric conversion transmitting and receiving device includes a y-direction photoelectric conversion transmitter installed on the y-direction air bearing component mounting base and a y-direction photoelectric conversion receiver installed on the x-direction air bearing component mounting base.

The utility model replaces the deformation of the measured piece after being stressed by the deformation of the small mass block (the z-direction air bearing axis acts as a mass block). A small displacement, and transfer the small displacement to the three-dimensional air bearing component. Specifically: the small displacement in the z direction is directly transmitted to the z direction air bearing shaft through the small mass block, the z direction air bearing shaft moves relative to the z direction air bearing sleeve, and the two-stage z direction photoelectric conversion device encoder completes the z direction Reading of displacement and transmission without additional perturbation of the wire. The small displacement in the y direction is directly transmitted to the y-axis air bearing sleeve, and the y-direction air bearing sleeve moves relative to the y-direction air bearing shaft, and the y-direction photoelectric conversion device completes the reading of the y-direction displacement and no additional disturbance of the wire. transmission. The small displacement in the x direction is directly transmitted to the x direction air bearing sleeve, the x direction air bearing sleeve moves relative to the x direction air bearing shaft, the encoder installed on the x direction air bearing shaft measures the small displacement, and Send the data back, so as to realize the function of measuring small deformation in the three directions of x, y, and z.

The working principle of the system for returning the displacement data of the tested part in the y and z directions is as follows: the reading head in the transmitter of the first-level z-direction photoelectric conversion device reads the data of the z-direction grating scale, and then converts the data into two sets of TTL square wave signals and sends them to One-stage z-direction photoelectric conversion receiver, two sets of photoelectric receiving tubes in the first-stage z-direction photoelectric conversion receiver, respectively process the received two-way TTL square wave signals, and transmit them through the photoelectric transmission of the first-stage z-direction photoelectric conversion receiver The photoelectric conversion transmitter and receiver of the tube and the secondary z-direction photoelectric conversion device are transmitted back to the system by wires. After the two sets of signals are synthesized, the relative displacement in the z direction is obtained; the reading head of the y-direction photoelectric conversion device reads the y-direction grating After converting the ruler data, two sets of TTL square wave signals are converted and sent to the y-direction photoelectric conversion receiver. The two sets of photoelectric receiving tubes in the y-direction photoelectric conversion receiver process the received two-way TTL square wave signals respectively, and then transmit them back by wires. System, after the system synthesizes the signals, the relative displacement in the y direction is obtained, thus realizing high-precision measurement without additional disturbance of the wire.

Claims (4)

1. the high precision measuring system of the three-dimensional microdeformation of mechanical hook-up in the high-low temperature chamber; It is characterized in that: said measuring system comprises the photoelectric displacement sensing device of cord, three-dimensional air floating assembly and three directions; Said three-dimensional air floating assembly comprise fixed head, x to air flotation cell, y to air flotation cell and z to air flotation cell; Each air flotation cell includes the gentle empty boasting of air-bearing shafts; The photoelectric displacement sensing device of said three directions be installed in respectively x to air flotation cell, y to air flotation cell and z on air flotation cell, in order to measurement of x to, y to z to displacement; X is installed on the fixed head to air-bearing shafts; X is slidably mounted in x on air-bearing shafts to the air supporting cover; Said x is fixedly connected to air-bearing shafts with y to the air supporting cover; Y is slidably mounted in y on air-bearing shafts to the air supporting cover, and said y is fixedly connected to the air supporting cover with z to the air supporting cover, and said z is slidably mounted in said z to air-bearing shafts and puts to air supporting;

The upper end of said cord is connected with measured piece, and the lower end of said cord is connected to air-bearing shafts with the z of said three-dimensional air floating assembly.

2. the high precision measuring system of the three-dimensional microdeformation of mechanical hook-up in the high-low temperature chamber as claimed in claim 1, it is characterized in that: x is made up of grating chi and read head to the photoelectric displacement sensing device; Y comprises that to the photoelectric displacement sensing device y transforms transmitter and y to receiver to photoelectricity; Z transforms emitter and receiving trap to photoelectricity and comprises that one-level z transforms transmitter, one-level z to photoelectricity and transforms receiver, secondary z to photoelectricity and transform transmitter and secondary z transforms receiver to photoelectricity to photoelectricity; Wherein, Said photoelectricity transforms transmitter to be made up of grating chi and read head, adopts incremental optical-electricity encoder, and said receiver is made up of two groups of photoemission and receiving tube.

3. the high precision measuring system of the three-dimensional micro-strain of mechanical device in the high-low temperature chamber as claimed in claim 2; It is characterized in that: said x is fixedlyed connected to air supporting cover connecting plate with x to the air supporting cover; Said x is fixedlyed connected to installing plate with y to air supporting cover connecting plate; Said y is installed in said y on installing plate to air-bearing shafts, and said y is fixedlyed connected to air supporting cover connecting plate with y to the air supporting cover, and said y is connected to fixed dam with z to air supporting cover connecting plate; Said z is installed in said z to fixed dam on by z to air supporting cover fixed head to the air supporting cover; Said z installs z to the air-bearing shafts connecting plate on fixed dam, said z is installed in said z on the air-bearing shafts connecting plate to air-bearing shafts, and said z installs the connector that is connected with cord to the upper end of air-bearing shafts;

Said one-level z is installed in z on fixed dam to the opto-electronic conversion transmitter, and one-level z all installs y to opto-electronic conversion receiver and secondary z on installing plate to the opto-electronic conversion transmitter, and secondary z is installed on the fixed head to the opto-electronic conversion receiver;

Y is installed in y on installing plate to the opto-electronic conversion transmitter, and y is installed on the fixed head to receiver;

X is installed on the fixed head to the photoelectric displacement sensing device.

4. like the high precision measuring system of the three-dimensional microdeformation of mechanical hook-up in the described high-low temperature chamber of one of claim 1～3, it is characterized in that: each air flotation cell includes two air-bearing shafts and two air supporting covers, and said two air-bearing shafts laterally arrange.

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