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CN202297373U - Glass processing equipment - Google Patents

Glass processing equipment Download PDF

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Publication number
CN202297373U
CN202297373U CN2011203749235U CN201120374923U CN202297373U CN 202297373 U CN202297373 U CN 202297373U CN 2011203749235 U CN2011203749235 U CN 2011203749235U CN 201120374923 U CN201120374923 U CN 201120374923U CN 202297373 U CN202297373 U CN 202297373U
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glass
laser
processing equipment
cutting
glass processing
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汤海林
彭信翰
杨伟
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SHENZHEN MUSEN TECHNOLOGY Co Ltd
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SHENZHEN MUSEN TECHNOLOGY Co Ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57Improving the yield, e-g- reduction of reject rates

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Abstract

一种玻璃加工设备,包括激光器、扩束镜、振镜、远心透镜及控制装置;激光束经过扩束镜、振镜后再经远心透镜聚焦;控制装置与所述激光器电连接,且控制所述振镜与玻璃之间的相对位置而使激光束在玻璃的加工表面沿着切割线形成一个切割槽,切割线为螺旋线。上述玻璃加工设备控制激光束沿着切割线形成一个切割槽,随着切割面的下降,焦点会随着一同下降,即焦点始终位于切割面上,从而加深切割槽的深度。因此,上述玻璃加工设备可加工厚度较大的玻璃。并且,整个螺旋线作为一条曲线,切割过程中激光从起始点开激光直到终止点结束,无需频繁开关激光,即提高的切割效率,又可避免的起点终点位置因为延迟参数问题造成起点爆点问题,提高了切割的质量。

A glass processing equipment, comprising a laser, a beam expander, a vibrating mirror, a telecentric lens and a control device; the laser beam is focused by the telecentric lens after passing through the beam expander and the vibrating mirror; the control device is electrically connected to the laser, and The relative position between the vibrating mirror and the glass is controlled so that the laser beam forms a cutting groove along the cutting line on the processing surface of the glass, and the cutting line is a helical line. The above-mentioned glass processing equipment controls the laser beam to form a cutting groove along the cutting line. As the cutting surface descends, the focal point will drop along with it, that is, the focal point is always on the cutting surface, thereby deepening the depth of the cutting groove. Therefore, the above-mentioned glass processing equipment can process glass with a relatively large thickness. Moreover, the entire helix is a curve. During the cutting process, the laser turns on the laser from the starting point to the end point. There is no need to switch the laser frequently, which improves the cutting efficiency and avoids the problem of starting and ending points due to delay parameters. , improving the cutting quality.

Description

玻璃加工设备Glass processing equipment

【技术领域】 【Technical field】

本实用新型涉及一种板材加工设备,特别是涉及一种玻璃加工设备。The utility model relates to a plate processing equipment, in particular to a glass processing equipment.

【背景技术】 【Background technique】

玻璃,一种透明的固体物质,在熔融时形成连续网络结构,冷却过程中粘度逐渐增大并硬化而不结晶的硅酸盐类非金属材料。种类繁多,化学成分多样,主要成分是二氧化硅。广泛的用于建筑、日常家庭用品、化工、电子、军事、工业等领域,是目前应用最为广泛最为重要的材料之一,与高分子材料、陶瓷材料并称为三大支柱型非金属材料。Glass, a transparent solid substance, forms a continuous network structure when molten, and a silicate non-metallic material that gradually increases in viscosity and hardens during cooling. There are many kinds and various chemical compositions, the main ingredient is silicon dioxide. It is widely used in construction, daily household products, chemical industry, electronics, military, industry and other fields. It is one of the most widely used and most important materials at present. It is also called the three pillar non-metallic materials together with polymer materials and ceramic materials.

由于实用中要求各异,因此玻璃的加工技术显得尤为重要,传统的工艺包括熔融吹拉或模具成型,机械及化学加工等。近些年来,随着平板玻璃广泛应用于电子、化工、生物、微光学领域,对平板玻璃的高精密加工要求越来越高,精度要求在百分之一毫米的级别,传统的工艺越来越显得力不从心,无论是在加工质量还是在加工效率方面都大为逊色,渐渐无法跟上与满足日益进步的需求。尤其是随着IPHONE/IPAD一类平板类消费电子产品的出现,使得我们消费电子产品产生了根本性革命性的变化,无数的领军企业,龙头大厂都被迫转型跟随苹果的脚步,这样高精度高质量高效率的平板玻璃的加工的需求也日益增加,越来越紧迫。Due to the different requirements in practical use, glass processing technology is particularly important. Traditional processes include melt blowing or mold forming, mechanical and chemical processing, etc. In recent years, as flat glass is widely used in the fields of electronics, chemical industry, biology, and micro-optics, the requirements for high-precision processing of flat glass are getting higher and higher, and the precision is required to be at the level of one hundredth of a millimeter. The more it seems to be unable to do what it wants, both in terms of processing quality and processing efficiency, it is gradually unable to keep up with and meet the needs of increasing progress. Especially with the emergence of flat-panel consumer electronics products such as IPHONE/IPAD, our consumer electronics products have undergone fundamental and revolutionary changes. Numerous leading companies and leading manufacturers have been forced to transform and follow Apple's footsteps. The demand for the processing of flat glass with high precision, high quality and high efficiency is also increasing day by day, and it is becoming more and more urgent.

传统的平面玻璃精密加工技术主要有机械加工、超声波加工、喷砂加工、化学蚀刻。机械加工、超声加工、喷砂加工等均属于接触性加工,存在速度慢、成品率相对较低、耗材多、精度低等诸多缺点,而化学蚀刻则采用氢氟酸这样剧毒高腐蚀性或氢氧化钾等强碱,尽管安全保护措施很完善,但是依旧存在安全隐患,不断的发生各类安全事故。此时我们就会考虑到新兴的加工技术-激光加工。Traditional flat glass precision processing technologies mainly include mechanical processing, ultrasonic processing, sandblasting, and chemical etching. Mechanical processing, ultrasonic processing, sandblasting, etc. are all contact processing, which has many disadvantages such as slow speed, relatively low yield, many consumables, and low precision. Chemical etching uses hydrofluoric acid, which is highly toxic and highly corrosive or Potassium hydroxide and other strong alkalis, although the safety protection measures are perfect, still have potential safety hazards, and various safety accidents continue to occur. At this point we will consider the emerging processing technology - laser processing.

激光加工技术被誉为“万能的加工技术”,以非接触,速度快,精度高、无耗材,无污染,功能强,应用范围广,性价比高,易于自动化集成等优点逐步在许多领域代替传统工艺。因此在激光出现后,人们便尝试使用激光来加工玻璃,到目前为止,出现了使用二氧化碳激光器、YAG激光器、绿光激光器及紫外激光器进行加工的技术。Laser processing technology is known as "universal processing technology". It gradually replaces traditional craft. Therefore, after the emergence of lasers, people tried to use lasers to process glass. So far, there have been technologies using carbon dioxide lasers, YAG lasers, green lasers and ultraviolet lasers for processing.

其中二氧化碳切割玻璃的原理是激光聚焦在玻璃表面,形成椭圆形光斑,玻璃强烈吸收二氧化碳激光,随着激光与玻璃的相对移动行程切割线,同时淬火嘴将冷水或冷气喷射到切割道上,使玻璃裂开,但只能产生很浅的裂纹,还需要后续工艺将玻璃裂开,且此种方法只能切割直线,无法加工复杂图形,如弧形外框,内部开孔等。Among them, the principle of carbon dioxide cutting glass is that the laser is focused on the glass surface to form an elliptical spot, and the glass strongly absorbs the carbon dioxide laser. With the relative movement of the laser and the glass, the cutting line is moved, and at the same time, the quenching nozzle sprays cold water or cold air onto the cutting path, making the glass Cracking, but only very shallow cracks can be produced, and subsequent processes are required to crack the glass, and this method can only cut straight lines, and cannot process complex graphics, such as curved outer frames, internal openings, etc.

YAG的切割原理及优缺点同二氧化碳类似。The cutting principle and advantages and disadvantages of YAG are similar to those of carbon dioxide.

绿光和紫外激光的切割原理类似,并不是像二氧化碳激光器那样单纯的依靠热效应来加工玻璃,但紫外激光波长比绿光更短,可以破坏材料的化学键,使材料熔化或气化,从而来达到是材料分离的目的。且大部分玻璃通常在紫外波段会有更高的吸收率,因此使用紫外激光切割玻璃效果会更好。尤其是在调Q的绿光及紫外固态激光器出现并迅猛发展的今天,使用绿光及紫外激光切割玻璃会越来越广泛。但目前绿光和紫外激光切割玻璃是将激光聚焦于材料表面,激光可以很轻易的将玻璃移除掉,形成小的凹槽,但是由于紫外激光的焦深较短,形成的凹槽较小,因此使得切割无法深入进行下去,切割深度有限,之后激光会被切割处的凹槽侧壁及底部吸收,还会引起玻璃温度上升,甚至爆裂。The cutting principle of green light and ultraviolet laser is similar. It does not rely solely on the thermal effect to process glass like carbon dioxide laser, but the wavelength of ultraviolet laser is shorter than that of green light, which can destroy the chemical bonds of materials, melt or vaporize materials, so as to achieve is the purpose of material separation. And most glass usually has a higher absorption rate in the ultraviolet band, so the effect of cutting glass with ultraviolet laser will be better. Especially with the emergence and rapid development of Q-switched green and ultraviolet solid-state lasers, the use of green and ultraviolet lasers to cut glass will become more and more widespread. However, the current green and ultraviolet laser cutting glass focuses the laser on the surface of the material. The laser can easily remove the glass and form small grooves. However, due to the short depth of focus of the ultraviolet laser, the formed grooves are small. , so that the cutting cannot go deep, the cutting depth is limited, and then the laser will be absorbed by the side wall and bottom of the groove at the cutting place, and the temperature of the glass will rise, and even burst.

另外,紫外激光并非万能的工具,并不是所有的玻璃都可以切割,目前主要有两类无法切割,第一类是高透过率的光学玻璃,比如石英玻璃(BK7)或水晶玻璃,他们在大于300nm的波段,透过率达90%以上;第二类是热膨胀系数较高的玻璃,由于其受热膨胀变形较大,会造成玻璃的崩裂,因此无法加工。In addition, ultraviolet laser is not a universal tool. Not all glass can be cut. At present, there are two main types that cannot be cut. The first type is optical glass with high transmittance, such as quartz glass (BK7) or crystal glass. The transmittance of the wavelength band greater than 300nm is more than 90%. The second type is glass with a high thermal expansion coefficient. Because of its large thermal expansion and deformation, it will cause the glass to crack, so it cannot be processed.

【实用新型内容】 【Content of utility model】

鉴于上述状况,有必要提供一种可加工厚度较大的玻璃的加工设备。In view of the above situation, it is necessary to provide a processing equipment capable of processing glass with a relatively large thickness.

一种玻璃加工设备,包括:A glass processing equipment, comprising:

激光器,发射一激光束;a laser emitting a laser beam;

扩束镜,与所述激光器相对;a beam expander, opposite to the laser;

振镜,与所述扩束镜相对;A vibrating mirror, opposite to the beam expander;

远心透镜,与所述振镜固定连接,所述激光束经过所述扩束镜、所述振镜后再经所述远心透镜聚焦;及A telecentric lens is fixedly connected to the vibrating mirror, and the laser beam is focused by the telecentric lens after passing through the beam expander and the vibrating mirror; and

控制装置,与所述激光器电连接,且控制所述振镜与玻璃之间的相对位置而使所述激光束在所述玻璃的加工表面沿着切割线形成一个切割槽,所述切割线为螺旋线。The control device is electrically connected with the laser, and controls the relative position between the vibrating mirror and the glass so that the laser beam forms a cutting groove along the cutting line on the processing surface of the glass, and the cutting line is Helix.

进一步地,所述螺旋线的间距小于所述激光束的光斑直径,且所述螺旋线的圈数由如下公式确定:Further, the pitch of the helix is smaller than the spot diameter of the laser beam, and the number of turns of the helix is determined by the following formula:

N=kD/dN=kD/d

其中,N为所述螺旋线的圈数,D为所述玻璃的厚度,d为所述螺旋线的间距,k为大于等于0.2且小于等于0.5的常数。Wherein, N is the number of turns of the helix, D is the thickness of the glass, d is the pitch of the helix, and k is a constant greater than or equal to 0.2 and less than or equal to 0.5.

进一步地,所述玻璃加工设备还包括朝向所述玻璃的加工表面吹冷却气体的吹气装置。Further, the glass processing equipment further includes a blowing device for blowing cooling gas toward the processing surface of the glass.

进一步地,所述玻璃加工设备还包括在所述玻璃的加工表面涂覆吸收层的涂覆装置。Further, the glass processing equipment further includes a coating device for coating an absorbing layer on the processing surface of the glass.

进一步地,所述玻璃加工设备还包括与所述控制装置电连接的摄像装置,所述摄像装置拍摄所述玻璃的加工位置及加工图形而使所述激光束自动定位、聚焦。Further, the glass processing equipment further includes an imaging device electrically connected to the control device, and the imaging device photographs the processing position and graphics of the glass to automatically position and focus the laser beam.

进一步地,所述激光器为脉冲能量大于100微焦耳的脉冲激光器。Further, the laser is a pulsed laser with a pulse energy greater than 100 microjoules.

进一步地,所述激光器为波长为260~360纳米的紫外光激光器或525~540纳米的绿光激光器。Further, the laser is an ultraviolet laser with a wavelength of 260-360 nm or a green laser with a wavelength of 525-540 nm.

进一步地,所述激光器为峰值功率大于10千瓦的大功率激光器。Further, the laser is a high-power laser with a peak power greater than 10 kilowatts.

进一步地,所述远心透镜为焦距小于120毫米的透镜。Further, the telecentric lens is a lens with a focal length less than 120 mm.

进一步地,所述玻璃加工设备还包括用于承载所述玻璃的高精度平台,所述高精度平台相对于所述振镜可移动,以调节所述玻璃相对于所述振镜的相对位置。Further, the glass processing equipment further includes a high-precision platform for carrying the glass, and the high-precision platform is movable relative to the vibrating mirror, so as to adjust the relative position of the glass relative to the vibrating mirror.

上述玻璃加工设备控制激光束沿着切割线形成一个切割槽,切割线为螺旋线,随着切割面的下降,焦点会随着一同下降,即焦点始终位于切割面上,从而加深切割槽的深度。因此,上述玻璃加工设备可加工厚度较大的玻璃。并且,整个螺旋线作为一条曲线,切割过程中激光从起始点开激光直到终止点结束,无需频繁开关激光,即提高的切割效率,又可避免的起点终点位置因为延迟参数问题造成起点爆点问题,提高了切割的质量。The above-mentioned glass processing equipment controls the laser beam to form a cutting groove along the cutting line. The cutting line is a helical line. As the cutting surface descends, the focus will drop along with it, that is, the focus is always on the cutting surface, thereby deepening the depth of the cutting groove. . Therefore, the above-mentioned glass processing equipment can process glass with a relatively large thickness. Moreover, the entire helix is a curve. During the cutting process, the laser turns on the laser from the starting point to the end point. There is no need to switch the laser frequently, which improves the cutting efficiency and avoids the problem of starting and ending points due to delay parameters. , improving the cutting quality.

【附图说明】 【Description of drawings】

图1为本实施方式的玻璃加工设备的结构示意图;Fig. 1 is the structural representation of the glass processing equipment of this embodiment;

图2为图1所示的玻璃加工设备加工玻璃的状态示意图;Fig. 2 is a schematic diagram of the state of processing glass by the glass processing equipment shown in Fig. 1;

图3为图1所示的玻璃加工设备加工玻璃的另一状态示意图;Fig. 3 is a schematic diagram of another state of processing glass by the glass processing equipment shown in Fig. 1;

图4为本实施方式的玻璃加工方法的流程示意图;Fig. 4 is a schematic flow chart of the glass processing method of the present embodiment;

图5为采用本实施方式的玻璃加工方法切割圆形的玻璃板的示意图。Fig. 5 is a schematic diagram of cutting a circular glass plate by the glass processing method of this embodiment.

【具体实施方式】 【Detailed ways】

为了便于理解本实用新型,下面将参照相关附图对本实用新型进行更全面的描述。附图中给出了本实用新型的较佳的实施例。但是,本实用新型可以以许多不同的形式来实现,并不限于本文所描述的实施例。相反地,提供这些实施例的目的是使对本实用新型的公开内容的理解更加透彻全面。In order to facilitate the understanding of the utility model, the utility model will be described more fully below with reference to the relevant drawings. Preferred embodiments of the present utility model are provided in the accompanying drawings. However, the invention can be embodied in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the understanding of the disclosure of the present utility model more thorough and comprehensive.

需要说明的是,当元件被称为“固定于”另一个元件,它可以直接在另一个元件上或者也可以存在居中的元件。当一个元件被认为是“连接”另一个元件,它可以是直接连接到另一个元件或者可能同时存在居中元件。本文所使用的术语“垂直的”、“水平的”、“左”、“右”以及类似的表述只是为了说明的目的。It should be noted that when an element is referred to as being “fixed” to another element, it can be directly on the other element or there can also be an intervening element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and similar expressions are used herein for purposes of illustration only.

除非另有定义,本文所使用的所有的技术和科学术语与属于本实用新型的技术领域的技术人员通常理解的含义相同。本文中在本实用新型的说明书中所使用的术语只是为了描述具体的实施例的目的,不是旨在于限制本实用新型。本文所使用的术语“及/或”包括一个或多个相关的所列项目的任意的和所有的组合。Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the technical field of this invention. The terminology used in the description of the utility model herein is only for the purpose of describing specific embodiments, and is not intended to limit the utility model. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

请参阅图1及图2,本实施方式的玻璃加工设备100,包括激光器110、高精度平台120、扩束镜(图未示)、振镜130、远心透镜140、控制装置150、吹气装置160及涂覆装置170。1 and 2, the glass processing equipment 100 of this embodiment includes a laser 110, a high-precision platform 120, a beam expander (not shown), a vibrating mirror 130, a telecentric lens 140, a control device 150, and an air blower. Device 160 and coating device 170.

激光器110发射一激光束111。激光器110可为半导体泵浦固态激光器,峰值功率大于10千瓦。具体在本实施方式中,激光器110为调Q半导体泵浦固态绿光激光器或者紫外激光器,其中绿光的波长在525~540nm,紫外激光波长在260~360nm之间,选择单脉冲能量大,脉冲宽度窄的激光器,这样会有较高的峰值功率,激光器峰值功率大于10kw,可以超过材料的加工阈值,更容易实现加工,可以得到较好的加工质量和较快的加工速度。The laser 110 emits a laser beam 111 . The laser 110 can be a semiconductor-pumped solid-state laser with a peak power greater than 10 kilowatts. Specifically, in this embodiment, the laser 110 is a Q-switched semiconductor-pumped solid-state green laser or an ultraviolet laser, wherein the wavelength of the green light is between 525-540nm, and the wavelength of the ultraviolet laser is between 260-360nm. A laser with a narrow width will have a higher peak power. The peak power of the laser is greater than 10kw, which can exceed the processing threshold of the material, making it easier to process, and can obtain better processing quality and faster processing speed.

高精度平台120用于承载待加工的玻璃200,高精度平台120相对于振镜130可移动,以调节玻璃200相对于振镜130的相对位置。The high-precision platform 120 is used to carry the glass 200 to be processed, and the high-precision platform 120 is movable relative to the vibrating mirror 130 to adjust the relative position of the glass 200 relative to the vibrating mirror 130 .

需要说明的是,高精度平台120不移动,控制装置130控制振镜130可移动,同样可调节玻璃200相对于振镜130的相对位置。It should be noted that the high-precision platform 120 does not move, and the control device 130 controls the vibrating mirror 130 to move, and the relative position of the glass 200 relative to the vibrating mirror 130 can also be adjusted.

扩束镜设于振镜130与激光器110之间,且与激光器110相对。The beam expander is disposed between the vibrating mirror 130 and the laser 110 , and is opposite to the laser 110 .

振镜130与扩束镜相对。远心透镜140与振镜固定连接,激光器110发射的激光束经过扩束镜、振镜130后再经远心透镜140聚焦。具体在本实施方式中,远心透镜焦距小于120毫米。The vibrating mirror 130 is opposite to the beam expander. The telecentric lens 140 is fixedly connected with the vibrating mirror, and the laser beam emitted by the laser 110 is focused by the telecentric lens 140 after passing through the beam expander and the vibrating mirror 130 . Specifically, in this embodiment, the focal length of the telecentric lens is less than 120 millimeters.

控制装置150与激光器110电连接,且控制振镜130与玻璃200之间的相对位置,例如,水平位置及高度位置,从而使激光束110经过振镜130及远心透镜140后在玻璃200的加工表面沿着切割线形成一个切割槽201,切割线为螺旋线。The control device 150 is electrically connected with the laser 110, and controls the relative position between the vibrating mirror 130 and the glass 200, for example, the horizontal position and the height position, so that the laser beam 110 passes through the vibrating mirror 130 and the telecentric lens 140 and passes through the glass 200. A cutting groove 201 is formed on the processed surface along the cutting line, which is a helical line.

优选地,为了进一步提高切割效率,防止切割时崩边,提高切割质量螺旋线的间距小于激光束的光斑直径,且螺旋线的圈数由如下公式确定:Preferably, in order to further improve the cutting efficiency and prevent edge collapse during cutting, the pitch of the helix to improve the cutting quality is smaller than the spot diameter of the laser beam, and the number of turns of the helix is determined by the following formula:

N=kD/dN=kD/d

其中,N为螺旋线的圈数,D为玻璃200的厚度,d为螺旋线的间距,k为大于等于0.2且小于等于0.5的常数。Wherein, N is the number of turns of the helix, D is the thickness of the glass 200, d is the pitch of the helix, and k is a constant greater than or equal to 0.2 and less than or equal to 0.5.

其中k为大于等于0.2且小于等于0.5的常数,这是由切割经验所得,通常切割槽的线宽度为玻璃200厚度D的五分之一到二分之一,小于五分之一时无法切割,大于二分之一时会浪费时间,因此切割线宽为kD;且针对不同的玻璃,k会有一个最佳数值,可以得到最快的切割效率,此数值要依据不同玻璃的性质进行测试而得出;小于此最佳数值时会无法切割或者切割时间较长,且切割质量较差,崩边较多,大于此最佳数值时会浪费时间,降低生产效率;d为螺旋线的线间距,此线间距要求要小于光斑直径,以使光斑之间有足够的重叠率。因此使用线宽kD除以线间距d就可以得到需要添加线的圈数N。只有在合适恰当螺旋线的圈数N的情况下,才可以达到最佳的切割效果及最快的切割效率。Where k is a constant greater than or equal to 0.2 and less than or equal to 0.5, which is obtained from cutting experience. Usually, the line width of the cutting groove is one-fifth to one-half of the thickness D of glass 200, and it cannot be cut when it is less than one-fifth , it will waste time when it is greater than half, so the cutting line width is kD; and for different glasses, k will have an optimal value, which can get the fastest cutting efficiency. This value should be tested according to the properties of different glasses It can be concluded that when the value is less than this optimal value, it will not be able to cut or the cutting time will be longer, and the cutting quality will be poor, and there will be more chipping. When it is greater than this optimal value, it will waste time and reduce production efficiency; d is the line of the helix Spacing, this line spacing is required to be smaller than the diameter of the spot, so that there is a sufficient overlap rate between the spots. Therefore, divide the line width kD by the line spacing d to get the number N of turns that need to be added. The best cutting effect and the fastest cutting efficiency can be achieved only when the number of turns N of the appropriate helix is appropriate.

吹气装置160受控制装置150控制,用于朝向玻璃200的加工表面吹冷却气体。切割的同时压缩气体吹至切割面,将气化的玻璃和破裂的碎屑,随着切割深度的增加,避免了玻璃的碎屑的堆积;同时还起到冷却切割面,避免温度过高引起玻璃破裂;并且还能保护远心透镜140的镜头,避免碎屑飞溅污损镜头。The air blowing device 160 is controlled by the control device 150 and used for blowing cooling gas toward the processing surface of the glass 200 . While cutting, the compressed gas is blown to the cutting surface, and the vaporized glass and broken debris are avoided as the cutting depth increases; at the same time, it also cools the cutting surface to avoid excessive temperature. The glass is broken; and the lens of the telecentric lens 140 can also be protected to prevent debris from splashing and contaminating the lens.

涂覆装置170与控制装置150电连接,用于在玻璃200的加工表面涂覆吸收层。对于某些透过率较高的光学玻璃,表面加吸收层以增加激光的吸收,提高激光加工效率,使不能切割变为可以切割;并且,吸收层可以同时保护切割槽的边缘,减少崩边。The coating device 170 is electrically connected with the control device 150 and used for coating the processing surface of the glass 200 with an absorbing layer. For some optical glass with high transmittance, an absorbing layer is added on the surface to increase the absorption of laser light, improve the efficiency of laser processing, and make it possible to cut from uncut; moreover, the absorbing layer can protect the edge of the cutting groove at the same time and reduce chipping .

可以理解,涂覆装置170也可不受控制装置150控制,可由人工控制涂覆。It can be understood that the coating device 170 may not be controlled by the control device 150, and the coating may be manually controlled.

为提高激光加工玻璃的效率及精度,玻璃加工设备100还包括与控制装置150电连接的摄像装置(图未示),摄像装置用于拍摄加工玻璃的加工位置及加工图形,从而自动定位、聚焦。In order to improve the efficiency and accuracy of laser processing glass, the glass processing equipment 100 also includes a camera (not shown) electrically connected to the control device 150. The camera is used to photograph the processing position and processing pattern of the processed glass, thereby automatically positioning and focusing .

上述玻璃加工设备100的控制装置150控制激光束沿着切割线形成一个切割槽201,切割线为螺旋线,随着切割面的下降,焦点会随着一同下降,即焦点始终位于切割面上,从而加深切割槽的深度。因此,上述玻璃加工设备100可加工厚度较大的玻璃。并且,整个螺旋线作为一条曲线,切割过程中激光从起始点开激光直到终止点结束,无需频繁开关激光,即提高的切割效率,又可避免的起点终点位置因为延迟参数问题造成起点爆点问题,提高了切割的质量。The control device 150 of the above-mentioned glass processing equipment 100 controls the laser beam to form a cutting groove 201 along the cutting line. The cutting line is a spiral line. As the cutting surface descends, the focal point will drop together, that is, the focal point is always located on the cutting surface. Thereby deepening the depth of the cutting groove. Therefore, the glass processing apparatus 100 described above can process glass with a relatively large thickness. Moreover, the entire helix is a curve. During the cutting process, the laser turns on the laser from the starting point to the end point. There is no need to switch the laser frequently, which improves the cutting efficiency and avoids the problem of starting and ending points due to delay parameters. , improving the cutting quality.

请参阅图1、图3及图4,本实施方式的玻璃加工方法,包括如下步骤S201~S205。Referring to FIG. 1 , FIG. 3 and FIG. 4 , the glass processing method of this embodiment includes the following steps S201 - S205 .

S201,提供一激光束。激光器110发射一激光束111。激光束111的脉冲能量大于100微焦耳。激光束111为波长为260~360纳米的紫外激光或525~540纳米的绿光激光。S201, providing a laser beam. The laser 110 emits a laser beam 111 . The pulse energy of the laser beam 111 is greater than 100 microjoules. The laser beam 111 is an ultraviolet laser with a wavelength of 260-360 nm or a green laser with a wavelength of 525-540 nm.

S202,在玻璃的加工表面涂覆吸收层以提高激光的吸收率。对于某些透过率较高的光学玻璃,涂覆装置170在玻璃200表面涂覆吸收层以增加激光的吸收,提高激光加工效率,使不能切割变为可以切割;并且,吸收层可以同时保护切割槽的边缘,减少崩边。S202, coating the processing surface of the glass with an absorbing layer to increase the laser absorption rate. For some optical glass with high transmittance, the coating device 170 coats the absorbing layer on the surface of the glass 200 to increase the absorption of laser light, improve the efficiency of laser processing, and make it impossible to cut; and the absorbing layer can protect the glass at the same time Cut the edge of the groove to reduce edge chipping.

S203,激光束在玻璃表面沿着切割线形成一个切割槽,切割线为螺旋线。S203, the laser beam forms a cutting groove along the cutting line on the glass surface, and the cutting line is a helical line.

优选地,为了进一步提高切割效率,防止切割时崩边,提高切割质量螺旋线的间距小于激光束的光斑直径,且螺旋线的圈数由如下公式确定:Preferably, in order to further improve the cutting efficiency and prevent edge collapse during cutting, the pitch of the helix to improve the cutting quality is smaller than the spot diameter of the laser beam, and the number of turns of the helix is determined by the following formula:

N=kD/dN=kD/d

其中,N为螺旋线的圈数,D为玻璃的厚度,d为螺旋线的间距,k为大于等于0.2且小于等于0.5的常数。Wherein, N is the number of turns of the helix, D is the thickness of the glass, d is the pitch of the helix, and k is a constant greater than or equal to 0.2 and less than or equal to 0.5.

具体在本实施方式中,控制装置150与激光器110电连接,且控制振镜130与玻璃200之间的相对位置,例如,水平位置及高度位置,从而使激光束110经过振镜130及远心透镜140后在玻璃200的加工表面沿着切割线形成一个切割槽201,切割线由平行且等间距的螺旋线组成。螺旋线的间距小于等于0.03毫米。Specifically in this embodiment, the control device 150 is electrically connected to the laser 110, and controls the relative position between the vibrating mirror 130 and the glass 200, for example, the horizontal position and the height position, so that the laser beam 110 passes through the vibrating mirror 130 and the telecentric After the lens 140, a cutting groove 201 is formed on the processed surface of the glass 200 along the cutting line, and the cutting line is composed of parallel and equally spaced helical lines. The pitch of the helix is less than or equal to 0.03 mm.

S204,朝向玻璃的加工表面吹冷却气流。具体在本实施方式中,吹气装置160受控制装置150控制,用于朝向玻璃200的加工表面吹冷却气体。切割的同时压缩气体吹至切割面,将气化的玻璃和破裂的碎屑,随着切割深度的增加,避免了玻璃的碎屑的堆积;同时还起到冷却切割面,避免温度过高引起玻璃破裂;并且还能保护远心透镜140的镜头,避免碎屑飞溅污损镜头。S204, blowing cooling airflow toward the processing surface of the glass. Specifically, in this embodiment, the air blowing device 160 is controlled by the control device 150 to blow cooling gas toward the processing surface of the glass 200 . While cutting, the compressed gas is blown to the cutting surface, and the vaporized glass and broken debris are avoided as the cutting depth increases; at the same time, it also cools the cutting surface to avoid excessive temperature. The glass is broken; and the lens of the telecentric lens 140 can also be protected to prevent debris from splashing and contaminating the lens.

S205,随着切割槽的深度加大,激光束的焦点相对于切割槽的底部下降。S205, as the depth of the cutting groove increases, the focal point of the laser beam decreases relative to the bottom of the cutting groove.

如图3所示,由于激光的焦深较短,使得切割无法深入进行下去,切割深度有限,之后激光会被切割处的凹槽侧壁及底部吸收,形成的切割槽呈梯形,为使形成的切割槽为矩形槽,则可使螺旋线的圈数随着切割槽的深度的增大而增加,从而形成矩形槽。激光束可以在玻璃表面加工凹槽、划线、切割、通孔、盲孔或腔体。As shown in Figure 3, due to the short depth of focus of the laser, the cutting cannot go deep, and the cutting depth is limited. If the cutting groove is a rectangular groove, the number of turns of the helix increases with the depth of the cutting groove, thereby forming a rectangular groove. The laser beam can process grooves, scribes, cuts, through-holes, blind holes or cavities in the glass surface.

请参阅图5,以切割圆形玻璃板为例来说明,将图形增加螺旋形边缘可以再CAD等图形处理软件中很轻易的实现,过程简单。整个螺旋线作为一条曲线,切割过程中激光从起始点开激光直到终止点结束,无需频繁开关激光,即提高的切割效率,又可避免的起点终点位置因为延迟参数问题造成起点爆点问题,提高了切割的质量。Please refer to Figure 5. Taking the cutting of a circular glass plate as an example, adding a spiral edge to the graphics can be easily realized in graphics processing software such as CAD, and the process is simple. The entire helix is a curve. During the cutting process, the laser turns on the laser from the starting point to the end point. There is no need to switch on and off the laser frequently, which improves the cutting efficiency and avoids the problem of starting and ending points due to delay parameters. cut quality.

可以理解,其他形状如方形、各种异型孔等,也可以在CAD中经过简单的作图处理,实现螺旋边缘,从而采用本实施方式的玻璃加工方法。It can be understood that other shapes, such as square shape, various special-shaped holes, etc., can also be processed through simple drawing in CAD to realize the spiral edge, so that the glass processing method of this embodiment can be adopted.

可以理解,玻璃的加工图形由多个小区域图形拼接形成,即使用由小区域图形拼接成大图形的方法实现大范围加工。It can be understood that the glass processing pattern is formed by splicing multiple small-area patterns, that is, large-scale processing can be realized by splicing small-area patterns into large patterns.

以上所述实施例仅表达了本实用新型的几种实施方式,其描述较为具体和详细,但并不能因此而理解为对本实用新型专利范围的限制。应当指出的是,对于本领域的普通技术人员来说,在不脱离本实用新型构思的前提下,还可以做出若干变形和改进,这些都属于本实用新型的保护范围。因此,本实用新型专利的保护范围应以所附权利要求为准。The above-mentioned embodiments only express several implementations of the utility model, and the description thereof is relatively specific and detailed, but it should not be construed as limiting the patent scope of the utility model. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the scope of protection of the utility model patent should be based on the appended claims.

Claims (10)

1. a glass processing equipment is characterized in that, comprising:
Laser apparatus is launched a laser beam;
Beam expanding lens is relative with said laser apparatus;
Galvanometer is relative with said beam expanding lens;
Telecentric lens is fixedly connected with said galvanometer, focuses on through said telecentric lens behind the said beam expanding lens of said laser beam process, the said galvanometer again; And
Gear is electrically connected with said laser apparatus, and controls the relative position between said galvanometer and the glass and make said laser beam form a slot at the finished surface of said glass along line of cut, and said line of cut is a spiral-line.
2. glass processing equipment as claimed in claim 1 is characterized in that, the spacing of said spiral-line is less than the spot diameter of said laser beam, and the number of turns of said spiral-line is confirmed by following formula:
N=kD/d
Wherein, N is the number of turns of said spiral-line, and D is the thickness of said glass, and d is the spacing of said spiral-line, and k is more than or equal to 0.2 and smaller or equal to 0.5 constant.
3. glass processing equipment as claimed in claim 1 is characterized in that, said glass processing equipment also comprises the blowing device towards the finished surface blowing cooling gas of said glass.
4. glass processing equipment as claimed in claim 1 is characterized in that, said glass processing equipment also is included in the coating unit of the finished surface coating absorption layer of said glass.
5. glass processing equipment as claimed in claim 1; It is characterized in that; Said glass processing equipment also comprises the camera head that is electrically connected with said gear, and said camera head is taken Working position and the graphics processing of said glass and made said laser beam locate automatically, focus on.
6. glass processing equipment as claimed in claim 1 is characterized in that, said laser apparatus is a pulse energy greater than 100 little joules pulsed laser.
7. glass processing equipment as claimed in claim 1 is characterized in that, said laser apparatus is that wavelength is the ultraviolet laser device of 260~360 nanometers or the green (light) laser of 525~540 nanometers.
8. glass processing equipment as claimed in claim 1 is characterized in that, said laser apparatus is a peak power greater than 10 kilowatts high power laser.
9. glass processing equipment as claimed in claim 1 is characterized in that, said telecentric lens is a focal length less than 120 millimeters lens.
10. glass processing equipment as claimed in claim 1; It is characterized in that; Said glass processing equipment also comprises the high accuracy platform that is used to carry said glass, and said high accuracy platform is removable with respect to said galvanometer, to regulate the relative position of said glassy phase for said galvanometer.
CN2011203749235U 2011-09-28 2011-09-28 Glass processing equipment Expired - Fee Related CN202297373U (en)

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CN105948476A (en) * 2016-04-27 2016-09-21 武汉华工激光工程有限责任公司 Method for glass edge chamfering by using laser
CN108098163A (en) * 2016-11-24 2018-06-01 蓝思科技(长沙)有限公司 The method and its equipment of use that display screen laser spiles before a kind of pressurization
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105948476A (en) * 2016-04-27 2016-09-21 武汉华工激光工程有限责任公司 Method for glass edge chamfering by using laser
CN108098163A (en) * 2016-11-24 2018-06-01 蓝思科技(长沙)有限公司 The method and its equipment of use that display screen laser spiles before a kind of pressurization
CN115519241A (en) * 2017-05-01 2022-12-27 株式会社尼康 Processing device and processing method
CN108890151A (en) * 2018-07-19 2018-11-27 深圳市吉祥云科技有限公司 A kind of photovoltaic glass drilling method
CN110695550A (en) * 2019-10-29 2020-01-17 深圳市吉祥云科技有限公司 Method and system for laser drilling and chamfering of glass
CN111045120A (en) * 2020-01-02 2020-04-21 北京理工大学重庆创新中心 High-pressure gas-assisted CO-based gas turbine2Laser melting microlens manufacturing method
CN111559856A (en) * 2020-04-22 2020-08-21 中国建材国际工程集团有限公司 Measuring device and measuring method for action delay amount of cutting tool assembly
CN111823419A (en) * 2020-07-03 2020-10-27 武汉华星光电半导体显示技术有限公司 Display screen and cutting method thereof

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