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CN202292108U - Alignment platform - Google Patents

Alignment platform Download PDF

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Publication number
CN202292108U
CN202292108U CN2011202779055U CN201120277905U CN202292108U CN 202292108 U CN202292108 U CN 202292108U CN 2011202779055 U CN2011202779055 U CN 2011202779055U CN 201120277905 U CN201120277905 U CN 201120277905U CN 202292108 U CN202292108 U CN 202292108U
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movable part
screw rod
screw
elastic component
movable
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CN2011202779055U
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Chinese (zh)
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王锦燕
卓金星
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Individual
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Abstract

The utility model provides an alignment platform, including a base, a workstation and three mobile device of group, these some mobile device set up between this base and this workstation, make these some mobile device can drive the workstation and remove, wherein each mobile device of group is including an movable part, a fixed part and one push away to the mechanism, this fixed part sets firmly in this base and has a rotatable screw rod, this movable part has a spiral shell and fits the screw of screw rod, should push away to the mechanism application of force in each this movable part, make each this movable part push away to the wherein one end of screw rod, with this, the utility model discloses the usable clearance that pushes away around the mechanism with the screw rod keeps in fixed position, and can get rid of the clearance right the utility model discloses the influence of location ability improves by a wide margin the utility model discloses the precision of location and removal.

Description

对位平台Alignment platform

技术领域 technical field

本实用新型是有关于一种对位平台。  The utility model relates to an alignment platform. the

背景技术 Background technique

已知的对位平台可参考中国台湾M400904号专利所述,是利用多组移动单元驱动平台移动,各组移动单元则可利用螺杆转动而带动平台沿螺杆往复移动,其中,由于加工的误差以及组装上的需要,螺杆与配合螺杆的螺孔之间会存有无法去除的间隙,而降低对位平台进行加工定位时的精准度。  The known alignment platform can refer to the description of Taiwan Patent No. M400904, which uses multiple sets of moving units to drive the platform to move, and each set of moving units can use the rotation of the screw to drive the platform to reciprocate along the screw. Due to assembly requirements, there will be an irremovable gap between the screw and the screw hole of the matching screw, which will reduce the accuracy of the alignment platform for processing and positioning. the

更详细地说,当螺杆带动平台往复移动时,间隙相对于螺杆的位置可能会因为螺杆反向进给而改变,从而使平台的位置改变,或者未确实移动到预定的位置,而使平台未被精确地移动定位到预定的位置。  In more detail, when the screw drives the platform to move back and forth, the position of the gap relative to the screw may change due to the reverse feed of the screw, so that the position of the platform changes, or it does not move to the predetermined position, so that the platform does not move. Be precisely moved and positioned to a predetermined position. the

除上述原因之外,即便使用者利用其中一组移动单元将平台移动到某一方向上的精确位置,使用者进一步操作另一组移动单元后,两组或多组移动单元将彼此干扰,而使间隙的位置再次发生改变,而使原本准确的位置发生偏移,降低定位的精准度。  In addition to the above reasons, even if the user uses one set of mobile units to move the platform to a precise position in a certain direction, after the user further operates another set of mobile units, two or more sets of mobile units will interfere with each other, causing the The position of the gap changes again, and the original accurate position is shifted, reducing the positioning accuracy. the

实用新型内容 Utility model content

本实用新型的主要目的在于提供一种对位平台,能具有较精准的移动定位能力,而可提供准确的对位使用效果。  The main purpose of the utility model is to provide an alignment platform, which can have a more precise movement and positioning capability, and can provide accurate alignment effects. the

为达成上述目的,本实用新型提供一种对位平台,包括一底座、三移动装置与一工作台。  To achieve the above purpose, the utility model provides an alignment platform, which includes a base, three moving devices and a workbench. the

各该移动装置包含一固定部、一活动部与一推抵机构,各该固定部具有一螺杆,各该固定部固设于该底座,各该活动部具有一螺孔,各该移动装置之活动部与对应之螺杆螺合,各该固定部可带动各自之螺杆转动,使该些活动部各自沿对应之螺杆平移,各该推抵机构施力于各该活动部,令各该活动部沿各该螺杆向各该螺杆的其中一端推抵,三个螺杆中的其中二个彼此不平行,第三个螺杆则与该二个螺杆中的其中一个螺杆平行。该工作台设于该些活动部,各该活动部移动时带动该工作台移动或转动。  Each of the moving devices includes a fixed part, a movable part and a pushing mechanism, each of the fixed parts has a screw rod, and each of the fixed parts is fixed on the base, and each of the movable parts has a screw hole. The movable part is screwed with the corresponding screw rod, and each fixed part can drive the respective screw rod to rotate, so that the movable parts can translate along the corresponding screw rod, and each push mechanism exerts force on each movable part, so that each movable part Pushing against one end of each screw along each screw, two of the three screws are not parallel to each other, and the third screw is parallel to one of the two screws. The workbench is arranged on the movable parts, and each movable part drives the workbench to move or rotate when moving. the

以此,本实用新型可利用推抵机构推抵于活动部与固定部,使螺杆与活动部之间的间隙保持于固定的位置,去除间隙对于工作台的位置或移动定位的影响,大幅提高对位平台使用的精准度,而极具进步的对位使用功效。  In this way, the utility model can use the pushing mechanism to push against the movable part and the fixed part, so that the gap between the screw rod and the movable part can be kept at a fixed position, and the influence of the gap on the position of the workbench or the mobile positioning can be removed, greatly improving The accuracy of the use of the alignment platform, and the extremely improved efficiency of the use of the alignment. the

附图说明 Description of drawings

图1为本实用新型的立体图。  Fig. 1 is a perspective view of the utility model. the

图2为本实用新型中移动装置的立体分解图。  Fig. 2 is a three-dimensional exploded view of the mobile device in the present invention. the

图3为本实用新型中移动装置的侧视图。  Fig. 3 is a side view of the mobile device in the present invention. the

图4为本实用新型中移动装置的俯视图。  Fig. 4 is a top view of the mobile device in the present invention. the

图5为本实用新型中螺杆与螺孔的剖面放大图。  Fig. 5 is an enlarged cross-sectional view of a screw rod and a screw hole in the utility model. the

【主要元件符号说明】  【Description of main component symbols】

1:底座                             11:主动滑轨 1: Base 11: Active slide rail

2:移动装置                     21:固定部 2: Mobile device 21: Fixed part

211:螺杆                         212:固定座 211: Screw 212: Fixing seat

213:动力部                     214:螺固件 213: Power Department 214: Screws

22:活动部                       221:螺孔 22: Movable part 221: Screw hole

222:滑块                         223:座部 222: Slider 223: Seat

224:组合块                     225:穿孔 224: combination block 225: perforation

226:插销                         227:定位孔 226: Pin 227: Positioning hole

228:插孔                         231:弹性件 228: Jack 231: Elastic piece

3:移动装置                     4:移动装置 3: Mobile device 4: Mobile device

5:工作台                         51:被动滑块 5: Workbench 51: Passive slider

52:转动滑块。 52: Turn the slider.

具体实施方式 Detailed ways

以下仅以实施例说明本实用新型可能的实施方式,然并非用以限制本实用新型所欲保护的范围,合先叙明。  The following examples illustrate possible implementations of the present utility model, but are not intended to limit the scope of protection of the present utility model, and will be described first. the

请参考图1,本实用新型提供一种对位平台,包括有一底座1、三移动装置2、3、4与一工作台5,各移动装置分别包含一固定部、一活动部与一推抵机构,各固定部分别具有一螺杆。  Please refer to Figure 1, the utility model provides an alignment platform, including a base 1, three moving devices 2, 3, 4 and a worktable 5, each moving device includes a fixed part, a movable part and a pushing part mechanism, each fixing part has a screw rod respectively. the

该些移动装置2、3、4设于该底座1与该工作台5之间,用以控制该工作台5相对于该底座1移动,以精确地进行定位,而可供将欲加工的工件固定于工作台5上,进一步进行精密的加工作业。该底座1供该些移动装置2、3、4设置,较佳者,该底座1具有三个主动滑轨11。各移动装置的活动部分别滑设于其中一主动滑轨,该些主动滑轨分别与其中一螺杆平行。  These moving devices 2, 3, 4 are arranged between the base 1 and the workbench 5, and are used to control the movement of the workbench 5 relative to the base 1 so as to accurately position the workpiece to be processed. It is fixed on the workbench 5 for further precise processing. The base 1 is provided for the moving devices 2 , 3 , 4 . Preferably, the base 1 has three active sliding rails 11 . The movable part of each moving device is respectively slid on one of the driving slide rails, and the driving slide rails are respectively parallel to one of the screw rods. the

请参考图2至图4,前述的移动装置2包括有一固定部21、一活动部22与一推抵机构。  Please refer to FIG. 2 to FIG. 4 , the aforementioned mobile device 2 includes a fixed part 21 , a movable part 22 and a pushing mechanism. the

如图1所示,该固定部21固设于该底座1并具有一螺杆211,该固定部21可带动该螺杆211转动,更清楚地说,该固定部21包括螺杆211、一固定座212与一动力部213,该固定座212固设于底座1,该螺杆211穿设于该固定座212,并可相对该固定座212绕螺杆211自身的轴心旋转,该动力部213固定于该固定座212,并连接于该螺杆211,使该动力部213可带动该螺杆211转动,更具体地说,该动力部可包括有马达、伺服器与减速机构。该固定部21另外包括二螺固件214,较佳者,该二螺固件214螺锁固定于该固定座212。  As shown in Figure 1, the fixing part 21 is fixed on the base 1 and has a screw 211, the fixing part 21 can drive the screw 211 to rotate, more clearly, the fixing part 21 includes a screw 211, a fixing seat 212 With a power part 213, the fixed seat 212 is fixed on the base 1, the screw 211 is passed through the fixed seat 212, and can rotate around the axis of the screw rod 211 itself relative to the fixed seat 212, the power part 213 is fixed on the The fixing base 212 is connected to the screw rod 211 so that the power part 213 can drive the screw rod 211 to rotate. More specifically, the power part can include a motor, a servo and a reduction mechanism. The fixing portion 21 further includes two screw components 214 , preferably, the two screw components 214 are screwed and fixed on the fixing base 212 . the

该活动部22具有一螺孔221,该活动部22与该螺杆211螺合,使得该螺杆211转动时,该活动部22将沿该螺杆211平移,更清楚地说,该活动部22可以通过一滑块222滑设于其中一个主动滑轨11,使该活动部22仅能沿主动滑轨11滑移,该主动滑轨11并与该螺杆211平行,使该螺杆211可通过转动而带动活动部22滑动。其中,该活动部22可包括有一座部223与一组合块224,该座部223固设于该滑块222,该组合块224固设于该座部223,该组合块224设有该螺孔221,该座部223并设有与该螺孔221同轴且略大的穿孔225,以此,本实用新型可在组合块224的螺孔221设置较精密的螺纹,供螺杆211螺合,而组合块224可具有较简单的外形与轮廓,而可较容易于进行加工制作。该活动部22可以进一步包括二插销226,该活动部22另外形成二定位孔227与二插孔228,更明确地说,该二定位孔227与该二插孔228是位于该座部223,该二定位孔227与该螺杆211平行,该二插孔228分别横向地连通于其中一个定位孔227。  The movable part 22 has a screw hole 221, the movable part 22 is screwed with the screw rod 211, so that when the screw rod 211 rotates, the movable part 22 will translate along the screw rod 211, more clearly, the movable part 22 can pass through A slide block 222 is slid on one of the driving slide rails 11, so that the movable part 22 can only slide along the driving slide rail 11, and the driving slide rail 11 is parallel to the screw rod 211, so that the screw rod 211 can be driven by rotation. The movable part 22 slides. Wherein, the movable part 22 may include a seat 223 and a combination block 224, the seat 223 is fixed on the slider 222, the combination block 224 is fixed on the seat 223, the combination block 224 is provided with the screw Hole 221, the seat portion 223 is also provided with the coaxial and slightly larger perforation 225 with the screw hole 221, so that the utility model can set a more precise screw thread in the screw hole 221 of the combination block 224, for the screw rod 211 to screw together , and the combined block 224 can have a simpler shape and outline, and can be easier to manufacture. The movable part 22 may further include two pins 226, and the movable part 22 additionally forms two positioning holes 227 and two insertion holes 228. More specifically, the two positioning holes 227 and the two insertion holes 228 are located in the seat part 223, The two positioning holes 227 are parallel to the screw rod 211 , and the two insertion holes 228 are respectively transversely connected to one of the positioning holes 227 . the

该推抵机构施加力量于该活动部22,使该活动部22沿该螺杆211向螺杆211的其中一端推抵,更清楚地说,该推抵机构包括有二弹性件231,各该弹性件231可以设置为弹簧,该二弹性件231分别插设于其中一个定位孔227,该二插销226并分别插设于其中一个插孔228与其中一个弹性件231,使该二弹性件231其中一端被分别固定于该活动部22。该二弹性件231的另一端则分别套设于其中一个螺固件214,使该二弹性件231同时也分别被固定于固定部21。更进一步,该二弹性件231被预先拉伸,使弹性件231可以拉着活动部22沿螺杆211朝向固定部21推抵,然而,于本实用新型其他可能的实施例中,也可以改将该二弹性件231预先压缩,使活动部22沿螺杆211朝向远离固定部21的一侧推抵。在本实用新型较佳实施例中,该二定位孔227分别位于该螺孔221的两侧,使该二弹性件231并列于螺杆211的两侧,而可利用弹性件231平均地推抵活动部22。  The pushing mechanism applies force to the movable part 22, so that the movable part 22 pushes against one end of the screw rod 211 along the screw rod 211. More clearly, the pushing mechanism includes two elastic members 231, each of which 231 can be set as a spring, the two elastic members 231 are respectively inserted in one of the positioning holes 227, and the two pins 226 are respectively inserted in one of the insertion holes 228 and one of the elastic members 231, so that one end of the two elastic members 231 are respectively fixed to the movable portion 22 . The other ends of the two elastic parts 231 are sleeved on one of the screw parts 214 respectively, so that the two elastic parts 231 are respectively fixed to the fixing part 21 at the same time. Furthermore, the two elastic members 231 are pre-stretched so that the elastic members 231 can pull the movable part 22 and push against the fixed part 21 along the screw rod 211. However, in other possible embodiments of the present utility model, the The two elastic members 231 are pre-compressed so that the movable part 22 pushes along the screw rod 211 toward a side away from the fixed part 21 . In a preferred embodiment of the present utility model, the two positioning holes 227 are respectively located on both sides of the screw hole 221, so that the two elastic members 231 are arranged on both sides of the screw rod 211, and the elastic members 231 can be used to evenly push against the movement. Section 22. the

本实用新型中可以设置有三组移动装置2、3、4,以上仅举其中一组移动装置2为例,以便于进行说明,其余二组移动装置3、4则可具有相同或相似的结构。其中,该些移动装置2、3、4中的螺杆其中两个彼此不平行,较佳者,为相互垂直,另外一个螺杆则与其中一个螺杆平行,如图1所示,使该些移动装置2、3、4可任意地带动工作台5水平移动,相互平行的螺杆沿相反方向作动时,则可带动工作台5转动。  The utility model can be provided with three groups of mobile devices 2, 3, 4, and the above is only one group of mobile devices 2 as an example for the convenience of explanation, and the remaining two groups of mobile devices 3, 4 can have the same or similar structure. Wherein, two of the screw rods in these moving devices 2, 3, and 4 are not parallel to each other, preferably, are perpendicular to each other, and the other screw rod is parallel to one of the screw rods, as shown in Figure 1, so that these moving devices 2, 3, 4 can arbitrarily drive the workbench 5 to move horizontally, and when the mutually parallel screw rods act in opposite directions, they can drive the workbench 5 to rotate. the

该工作台5设置于各个移动装置的活动部22,使得活动部22移动时带动工作台5移动或转动,其中,该工作台5可进一步包括三组被动滑块51与三组转动滑块52,各个被动滑块51是可滑动地设置于其中一个活动部22,更明确地说,是可滑动地设置于座部223,其可滑动的方向各自与活动部22的移动方向垂直,该些转动滑块52则是可转动地设置于被动滑块51,使该些移动装置2、3、4的活动部移动时,可顺畅地带动工作台5移动或转动。  The workbench 5 is arranged on the movable part 22 of each mobile device, so that the movable part 22 drives the workbench 5 to move or rotate when it moves, wherein the workbench 5 can further include three sets of passive sliders 51 and three sets of rotating sliders 52 , each passive slider 51 is slidably arranged on one of the movable parts 22, more specifically, is slidably arranged on the seat part 223, and its slidable direction is perpendicular to the moving direction of the movable part 22 respectively, and these The rotating slider 52 is rotatably arranged on the passive slider 51, so that when the moving parts of the moving devices 2, 3, 4 move, the working table 5 can be smoothly driven to move or rotate. the

利用上述装置,请参考图5,该活动部22将受到推抵机构的推抵,而沿着螺杆211向螺杆211的其中一端推抵,使螺孔221内的间隙被保持于活动部22推抵方向的另一侧,使螺杆211带动活动部22移动时,活动部22可以通过螺杆211的转动圈数或转动角度精确定位,复请参考图1,当三组移动装置2、3、4同时作动时,各个活动部的位置与移动距离随时都可以被保持于确切的目标位置与距离数值,而可随时达成工作台5的移动距离或位置的精确定位,不会出现因为反向进给而产生的定位误差,大幅提高加工的精密度与精准度。  Using the above device, please refer to FIG. 5 , the movable part 22 will be pushed by the pushing mechanism, and push against one end of the screw 211 along the screw 211, so that the gap in the screw hole 221 is maintained by the movable part 22. On the other side of the arrival direction, when the screw rod 211 drives the movable part 22 to move, the movable part 22 can be accurately positioned by the number of turns or the rotation angle of the screw rod 211. Please refer to Figure 1 again. When the three groups of moving devices 2, 3, 4 When simultaneously operating, the position and moving distance of each movable part can be maintained at the exact target position and distance value at any time, and the precise positioning of the moving distance or position of the workbench 5 can be achieved at any time, and there will be no problems due to reverse progress. The resulting positioning error greatly improves the precision and accuracy of processing. the

承上述,在常用对位平台中,由于各个移动装置的活动部容易发生定位不精确的问题,使各个活动部的定位误差各不相同,甚至可能会因为其中一个活动部的移动而发生干扰,使其他活动部的位置发生小幅度的偏移,而使工作台发生复合式的且较复杂的定位误差,无法利用数值运算方式进行校正,而必须同时将所有的活动部移动到定位才能降低误差,使得常用的对位平台难以进一步提高定位的精准度,对此,本实用新型所提供的对位平台可将各个活动部移动到确切的预定位置,即便有其中一个活动部移动,也不容易对其他活动部发生干扰,而可以精确的进行定位,并将工作台维持于确切的位置,更进一步提高加工的精密度与准确度,而具有极高的工艺价值。  Based on the above, in the commonly used alignment platforms, since the movable parts of each mobile device are prone to inaccurate positioning, the positioning errors of each movable part are different, and even interference may occur due to the movement of one of the movable parts. The positions of other movable parts are slightly shifted, resulting in complex and complex positioning errors of the workbench, which cannot be corrected by numerical calculation methods, but all movable parts must be moved to the position at the same time to reduce the error , so that it is difficult to further improve the positioning accuracy of the commonly used alignment platform, in this regard, the alignment platform provided by the utility model can move each movable part to the exact predetermined position, even if one of the movable parts moves, it is not easy It interferes with other moving parts, so it can be accurately positioned and the worktable can be maintained at the exact position, which further improves the precision and accuracy of processing, and has extremely high technological value. the

其次,本实用新型可进一步将推抵机构中的弹性件插设于定位孔中,而使弹簧推抵的力量保持于预定的方向上,更可以进一步提高本实用新型使用的精准度。  Secondly, the utility model can further insert the elastic part in the pushing mechanism into the positioning hole, so that the pushing force of the spring can be kept in a predetermined direction, and the accuracy of the utility model can be further improved. the

再者,本实用新型可以将两个弹性件231对称地排列于螺杆211的两侧,使螺杆211与螺孔221可进一步均匀且稳定地结合,进一步提高本实用新型的精准度。  Furthermore, the present invention can symmetrically arrange the two elastic parts 231 on both sides of the screw 211, so that the screw 211 and the screw hole 221 can be further uniformly and stably combined, further improving the accuracy of the present invention. the

综上所述,本实用新型大幅度提高了对位平台的定位精准度,而可以降低对工件加工的误差,突破传统加工中加工精密度的瓶颈,实为具有进步之功效。   To sum up, the utility model greatly improves the positioning accuracy of the alignment platform, can reduce the error of workpiece processing, and breaks through the bottleneck of processing precision in traditional processing, which is really an improvement. the

Claims (8)

1. one kind to bit platform, it is characterized in that, comprises:
One base;
Three mobile devices; Respectively this mobile device comprises a fixed part, a movable part and a pushing and pressing mechanism, and respectively this fixed part has a screw rod, and respectively this fixed part is fixedly arranged on this base; Respectively this movable part has a screw; Respectively the movable part of this mobile device screws togather with corresponding screw rod, in three screw rods wherein two not parallel each other, the 3rd screw rod then with these two screw rods in one of them screw rod parallel;
One workbench is located at those movable parts, drives this movable workbench or rotation when respectively this movable part moves.
2. as claimed in claim 1ly bit platform is characterized in that respectively this pushing and pressing mechanism comprises two elastic components, respectively this elastic component one end is fixedly arranged on corresponding fixed part, and the other end is fixedly arranged on corresponding movable part.
3. as claimed in claim 2 to bit platform; It is characterized in that this movable part also comprises two latches, this movable part forms two locating holes and two jacks; This two jack communicates with a locating hole wherein respectively; This two elastic component is inserted in a wherein locating hole respectively, and this two latch is inserted in wherein a jack and wherein an elastic component respectively, makes this two elastic component be individually fixed in this movable part.
4. as claimed in claim 2 bit platform is characterized in that elastic component that respectively should pushing and pressing mechanism is stretched in advance, the movable part that makes the elastic component of this pushing and pressing mechanism respectively haul correspondence pushes against to the fixed part of correspondence.
5. as claimed in claim 3 bit platform is characterized in that elastic component that respectively should pushing and pressing mechanism is stretched in advance, the movable part that makes the elastic component of this pushing and pressing mechanism respectively haul correspondence pushes against to the fixed part of correspondence.
6. as each is described to bit platform in the claim 2 to 5, it is characterized in that respectively the elastic component in this mobile device is listed in the both sides of corresponding screw rod.
7. as each is described to bit platform in the claim 1 to 5, it is characterized in that this base has three slide rails initiatively, those movable parts are slidedly arranged on wherein a slide rail initiatively respectively, those initiatively slide rails a screw rod is parallel respectively with wherein.
8. as claimed in claim 6 bit platform is characterized in that this base has three slide rails initiatively, those movable parts are slidedly arranged on wherein a slide rail initiatively respectively, those initiatively slide rails a screw rod is parallel respectively with wherein.
CN2011202779055U 2011-08-02 2011-08-02 Alignment platform Expired - Fee Related CN202292108U (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103624557A (en) * 2013-12-11 2014-03-12 中国工程物理研究院激光聚变研究中心 Two-dimensional offline regulation workbench with repeated positioning function
CN104117859A (en) * 2013-04-25 2014-10-29 高明铁企业股份有限公司 Positioning method of suspension type precise alignment platform
CN104139310A (en) * 2013-05-03 2014-11-12 高明铁企业股份有限公司 Counterpoint platform with tight locate function of fluid pressure boost
CN105014395A (en) * 2014-04-29 2015-11-04 高明铁企业股份有限公司 Alignment platform with positioning function
CN106291853A (en) * 2015-05-24 2017-01-04 上海微电子装备有限公司 A kind of suspension positioning mechanism

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104117859A (en) * 2013-04-25 2014-10-29 高明铁企业股份有限公司 Positioning method of suspension type precise alignment platform
CN104139310A (en) * 2013-05-03 2014-11-12 高明铁企业股份有限公司 Counterpoint platform with tight locate function of fluid pressure boost
CN104139310B (en) * 2013-05-03 2016-12-28 高明铁企业股份有限公司 Counterpoint platform with tight locate function of fluid pressure boost
CN103624557A (en) * 2013-12-11 2014-03-12 中国工程物理研究院激光聚变研究中心 Two-dimensional offline regulation workbench with repeated positioning function
CN103624557B (en) * 2013-12-11 2016-04-06 中国工程物理研究院激光聚变研究中心 One can resetting two dimension off-line adjustment workbench
CN105014395A (en) * 2014-04-29 2015-11-04 高明铁企业股份有限公司 Alignment platform with positioning function
CN106291853A (en) * 2015-05-24 2017-01-04 上海微电子装备有限公司 A kind of suspension positioning mechanism
CN106291853B (en) * 2015-05-24 2019-03-26 上海微电子装备(集团)股份有限公司 A kind of suspension positioning mechanism

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